CN117055301A - Loading and unloading method of working platform - Google Patents
Loading and unloading method of working platform Download PDFInfo
- Publication number
- CN117055301A CN117055301A CN202311079196.3A CN202311079196A CN117055301A CN 117055301 A CN117055301 A CN 117055301A CN 202311079196 A CN202311079196 A CN 202311079196A CN 117055301 A CN117055301 A CN 117055301A
- Authority
- CN
- China
- Prior art keywords
- workpiece
- working surface
- platform
- supporting component
- working
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000007667 floating Methods 0.000 claims abstract description 54
- 230000000712 assembly Effects 0.000 claims description 10
- 238000000429 assembly Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000007664 blowing Methods 0.000 claims description 8
- 238000001459 lithography Methods 0.000 abstract description 2
- 238000003825 pressing Methods 0.000 description 45
- 229910000831 Steel Inorganic materials 0.000 description 9
- 239000010959 steel Substances 0.000 description 9
- 238000000206 photolithography Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000001259 photo etching Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 238000002788 crimping Methods 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 239000004579 marble Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Abstract
The application relates to a loading and unloading method for a working platform of a lithography device, which comprises the following steps: s1, starting a supporting component; s2, moving the workpiece to a working surface of a platform by using a lifting piece, and supporting the workpiece by using a supporting component; s3, separating the lifting piece from the workpiece; s4, the pump body blows air to the air holes, so that the floating assembly arranged in the air holes moves in the air holes and at least partially protrudes out of the working surface; s5, closing the supporting component to enable the upper end face of the supporting component to be parallel to or lower than the working face, and enabling the floating component to support the workpiece; s6, moving the workpiece to a target position, and fixing the workpiece on a working surface; s7, after the workpiece is machined, starting a supporting component, wherein at least part of the supporting component protrudes out of the working surface to support the workpiece; s8, inserting the lifting piece into a gap between the workpiece and the working surface so as to lift the workpiece and move the workpiece away from the working platform. The method is simple and labor-saving to operate, and can easily realize loading and unloading of large-volume or heavier workpieces, so that the practicability of the working platform is improved.
Description
The application relates to a method for feeding and discharging materials on a working platform, which is a divisional application of an application patent application with the application number of 202110872266.5, wherein the application date is 2021, 07 and 30.
Technical Field
The present application relates to a work table and a lithographic apparatus.
Background
Photolithography, i.e., photolithography, is the application of light to a photoreactive material to react the photoreactive material, typically in accordance with a specific pattern, to produce a desired structure. Photolithography is also commonly referred to as exposure, and the apparatus in which the photolithography is performed is a photolithography machine or an exposure machine.
Common objects to be lithographically imaged are screens, dry films or glasses coated with photoreactive materials, etc. The screen is to fix the gauze on the wood frame or steel frame and to coat the gauze with light reaction material, and the screen can be used for printing cloth after exposure and subsequent treatment. Dry films are films coated with photoreactive materials and are commonly used to manufacture PCB boards. Glass coated with photoreactive materials is commonly used to make display screens.
The screen plate, the dry film and the glass are light in weight, and the work of carrying, loading and unloading can be completed by 1-3 persons. However, under some special requirements, the apparatus requires photolithography on objects of relatively large mass and volume, such as steel plates, marble, etc. The length and width of the objects are 2-3 meters, the weight exceeds 150Kg, and the objects cannot be transported manually, by a skip car or by a pipeline, so that new equipment and a new process are needed for loading and unloading.
However, such objects cannot be lifted by the hooks mounted thereon and can only be carried by lifting. The lifting mode is to lift the large steel plate upwards by using a lifting piece at the bottom of the object such as the large steel plate, but when the large steel plate is transported to a working platform, the lifting piece cannot be directly separated from the large steel plate, so that the large steel plate cannot be placed on the platform.
Disclosure of Invention
The application aims to provide the loading and unloading method of the working platform, which is simple to operate, saves labor and can easily realize the lifting loading and unloading of a large-volume or heavy-weight workpiece.
In order to achieve the above purpose, the present application provides the following technical solutions: a method of loading and unloading a work table for a lithographic apparatus, the lithographic apparatus further comprising a frame and an optical device mounted on the frame, the frame being movable relative to the work table, the method comprising:
s1, a containing cavity is formed in the platform, the containing cavity is provided with an opening on the working surface, when the upper end face of the supporting component is parallel to or lower than the working surface, the supporting component seals the opening, and the supporting component is started to enable at least part of the supporting component to protrude out of the working surface of the platform;
s2, moving a workpiece to a working surface of the platform by using a lifting piece, wherein the workpiece is supported by the supporting component;
s3, separating the lifting piece from the workpiece;
s4, opening a pump body connected with a platform with a plurality of air holes, and blowing air to the air holes by the pump body, so that a floating assembly arranged in the air holes moves in the air holes and at least partially protrudes out of the working surface;
s5, closing the supporting component so that the upper end face of the supporting component is parallel to or lower than the working face, and supporting the workpiece by the floating component;
s6, moving the workpiece to a target position, and fixing the workpiece on the working surface;
s7, after the workpiece is machined, starting the supporting component, wherein at least part of the supporting component protrudes out of the working surface of the platform so as to support the workpiece;
s8, inserting the lifting piece into a gap between the workpiece and the working surface so as to lift the workpiece and move the workpiece away from the working platform.
Further, the floating assembly protrudes beyond the working surface a distance less than the distance the support assembly protrudes beyond the working surface.
Further, the support assembly comprises at least two support assemblies, and the at least two support assemblies are arranged separately to stably support the workpiece.
Further, the lifting element is connected to the lifting device.
Further, the target position is located at a vertex angle of the working surface.
The application has the beneficial effects that: through set up supporting component on the platform, when using the lift piece to remove the work piece to the working face of platform on or remove from the working face, supporting component supports the work piece for have the clearance between work piece and the working face, can be easily break away from the work piece with the lift piece or insert the work piece bottom in order to support the work piece, easy operation, laborsaving, and can easily realize the unloading of going up of the heavier work piece of bulk or weight, improved work platform's practicality.
The foregoing description is only an overview of the present application, and is intended to provide a better understanding of the present application, as it is embodied in the following description, with reference to the preferred embodiments of the present application and the accompanying drawings.
Drawings
FIG. 1 is a schematic view of a working platform according to an embodiment of the present application;
FIG. 2 is a cross-sectional view of a portion of the work platform of FIG. 1;
FIG. 3 is a partial structural cross-sectional view of a work platform not covering a work piece and working in a pump body by blowing;
FIG. 4 is a partial structural cross-sectional view of a work platform covering a work piece and working in a pump body by blowing;
FIG. 5 is a partial structural cross-sectional view of the work platform not covering the work piece and operating in suction in the pump body;
FIG. 6 is a partial structural cross-sectional view of a work platform covering a work piece and operating in suction in a pump body;
FIG. 7 is a schematic view of a structure of a lifting member lifting a workpiece;
FIG. 8 is a schematic view of a structure in which a workpiece is supported by a support assembly;
FIG. 9 is another schematic view of a structure in which the support assembly supports a workpiece;
FIG. 10 is a schematic view of the structure of the floating assembly supporting a workpiece;
FIG. 11 is a schematic view of another construction of a working platform according to an embodiment of the present application;
FIG. 12 is a schematic view of the configuration of the blank holder and the abutment away from the workpiece;
FIG. 13 is a schematic view of the configuration of the blank holder and the abutment adjacent to the workpiece;
FIG. 14 is a schematic view of the configuration of the blank holder and the abutment contacting the workpiece;
FIG. 15 is a schematic diagram of a lithographic apparatus according to an embodiment of the application.
Detailed Description
The following description of the embodiments of the present application will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the application are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the mechanisms or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In addition, the technical features of the different embodiments of the present application described below may be combined with each other as long as they do not collide with each other.
Referring to FIG. 1, a stage 100 for supporting a workpiece 200 (FIG. 8) in a lithographic apparatus according to an embodiment of the application includes a stage 1 and a pump (not shown) coupled to the stage 1.
The platform 1 comprises a platform body 11 and a plurality of air holes 12 which penetrate through the platform body 11 and are communicated with the pump body. The platform body 11 has a working surface 111 and a bottom surface 112 disposed opposite to the working surface 111, and the air hole 12 communicates with the working surface 111 and the bottom surface 112. The platform body 11 is rectangular, and the shape and specific size of the platform body 11 are not limited herein, and can be set according to actual needs. The plurality of air holes 12 are arranged on the working surface 111 at equal intervals, but not limited thereto, and the plurality of air holes 12 may be arranged on the working surface 111 at random. In the present embodiment, the cross section of the air hole 12 is circular, but the cross section of the air hole 12 is not limited thereto, and other shapes are also possible, which are not exemplified herein. The specific number and specific size of the air holes 12 and the spacing between the adjacent air holes 12 are not particularly limited herein, and may be set according to actual needs. The air hole 12 is communicated with the pump body, and the pump body is started to blow or suck air into the air hole 12. The bottom surface 112 of the platform 1 may enclose a chamber (not shown) that communicates with the plurality of air holes 12, and the chamber may be connected to the pump body through a pipe (not shown), so as to realize that the pump body blows or sucks air into the plurality of air holes 12 synchronously. The connection between the air hole 12 and the pump body is not specifically described herein. The height direction of the platform 1 is shown as direction a in fig. 1.
Referring to fig. 2, in the present embodiment, in the height direction of the platform 1, the air hole 12 is provided with a first opening 121 and a second opening 122, the first opening 121 is formed on the working surface 111, the second opening 122 is formed in the platform body 11, and it is obvious that the air hole 12 is further provided with a third opening (not shown) formed on the bottom surface 112, so as to penetrate the platform body 11 through the first opening 121 and the third opening.
A float assembly 13 is disposed within the air hole 12, the float assembly 13 being movable within the air hole 12 and partially protruding beyond the working surface 111 to support the workpiece 200, the float assembly 13 also being movable within the air hole 12 and sealing the air hole 12. Specifically, the float assembly 13 may move to the first opening 121 and protrude out of the first opening 121 or move to the second opening 122 and close the second opening 122.
The float assembly 13 includes a float member 131 disposed between the first opening 121 and the second opening 122, an elastic member 132 for restraining the float member 131 between the first opening 121 and the second opening 122, and a fixing member 133 coupled with the platform body 11. The floating member 131 has an arc surface disposed toward the first opening 121 and protruding out of the air hole 12 to support the workpiece 200. In this embodiment, the floating member 131 is a sphere, and in other embodiments, the floating member 131 may be an ellipse or an irregular structure with an arc surface at one end, which is not illustrated herein. The maximum size of the floating member 131 is larger than the sizes of the first and second openings 121 and 122 so as to be limited therebetween by the first and second openings 121 and 122, and in particular, when the floating member 131 is a sphere, the diameter of the sphere is larger than the sizes of the first and second openings 121 and 122.
The elastic member 132 may be a structure with elastic force such as a spring, the fixing member 133 and the floating member 131 are oppositely disposed at two ends of the elastic member 132, the fixing member 133 is located at a third opening, the fixing member 133 and the platform body 11 may be integrally formed, the structure is simplified, a channel 1331 for communicating the pump body and the air flow is formed on the fixing member 133, and the third opening is an opening of the channel 1331 at the bottom surface 112. In other embodiments, the fixing member 133 may also be fixedly connected to the platform body 11, which is not specifically limited herein. The fixing member 133 may be a hollow cylindrical structure, a hollow rectangular parallelepiped structure, or the like, which is not illustrated herein.
The elastic member 132 may be in abutting contact with the fixing member 133 and the floating member 131, and under the action of gravity, the elastic member 132 abuts against the fixing member 133, and the floating member 131 abuts against the elastic member 132, so that the floating member 131 is maintained between the first opening 121 and the second opening 122. The elastic member 132 may have one end connected to the fixing member 133 and the other end connected to the floating member 131.
When the pump body does not work, the elastic member 132 is in a natural state, the floating member 131 abuts against one end of the elastic member 132, a first gap is formed between the floating member 131 and the first opening 121, and a second gap is formed between the floating member 131 and the second opening 122, i.e., the first opening 121 is not plugged by the floating member 131 at this time, and the second opening 122 is not plugged at the same time, so that the pump body is started, and air flow can circulate in the air hole 12.
Referring to fig. 3, if the workpiece 200 is not covered above the air hole 12, during the blowing operation of the pump body, the air flow formed enters the channel 1331 of the fixing member 133 from the third opening, and then passes through the elastic member 132 to blow toward the floating member 131, and under the action of the air flow, the floating member 131 moves toward the first opening 121 and partially protrudes out of the air hole 12, i.e., the floating member 131 protrudes out of the working surface 111 until the floating member 131 blocks the first opening 121, and then the floating member 131 stops moving. At this time, the workpiece 200 may be placed on the float member 131, wherein the direction of the air flow is indicated by the arrow. After the pump body stops working, the floating piece 131 moves towards the second opening 122 under the action of gravity, and is positioned between the first opening 121 and the second opening 122 under the action of the elastic piece 132.
Referring to fig. 4, if the workpiece 200 is covered above the air hole 12, during the blowing operation of the pump body, the air flow formed enters the channel 1331 of the fixing member 133 from the third opening, then passes through the elastic member 132 and blows to the floating member 131, and under the action of the air flow, the floating member 131 moves toward the first opening 121 and supports the workpiece 200 to move upward, so that the workpiece 200 is supported and separated from the working surface 111 until the floating member 131 stops moving after the first opening 121 is blocked, wherein the air flow direction is indicated by an arrow. After the pump body stops working, the floating member 131 moves towards the second opening 122 under the dual action of gravity and the workpiece 200, and is located between the first opening 121 and the second opening 122 under the action of the elastic member 132.
The floating member 131 can support the workpiece 200 when the workpiece 200 is placed on the work surface 111 or the workpiece 200 is removed from the work surface 111, and cannot be manually carried when the workpiece 200 is large in mass and large in volume, such as steel plate, marble, or the like. At this time, the lifting device, for example, a crane with a lifting hook, hooks or bottoms the workpiece 200 with the lifting hook, and places the workpiece 200 on the working surface 111, the floating member 131 protrudes out of the working surface 111, so that the workpiece 200 can be supported, and the top end of the floating member 131 is of an arc structure, so that the workpiece 200 is placed conveniently and the workpiece 200 can be moved on the working surface 111 easily, the operation is simple and labor-saving, the workpiece 200 and the working surface 111 are prevented from being damaged due to direct contact friction between the workpiece 200 and the working surface 111, and the service life of the platform 1 is prolonged.
Referring to fig. 5, when the pump body is sucking, the floating member 131 in the air hole 12 of the unsupported work piece 200 moves toward the second opening 122 and blocks the second opening 122, and negative pressure is formed between the floating member 131 and the second opening 122. Specifically, when the pump body is in suction operation, the formed air flow enters the air hole 12 from the first opening 121, the floating member 131 moves towards the second opening 122 under the action of the air flow, the elastic member 132 is compressed at this time, the air flow passes through the channel 1331 of the fixing member 133 and enters the pump body from the third opening, until the floating member 131 stops moving after the floating member 131 seals the second opening 122, and at this time, the floating member 131 and the second opening 122 form negative pressure, so that the air hole 12 is sealed, wherein the air flow direction is shown by an arrow. After the pump body stops working, the floating member 131 moves towards the first opening 121 under the action of the elastic member 132, and moves between the first opening 121 and the second opening 122.
Referring to fig. 6, if the workpiece 200 is covered above the air hole 12, when the pump body sucks air, the workpiece 200 seals the first opening 121, so that negative pressure is immediately formed between the workpiece 200 and the first opening 121, the position of the floating member 131 remains unchanged, and the workpiece 200 is firmly adsorbed on the working surface 111 under the action of the negative pressure. After the pump body stops working, the negative pressure at the work piece 200 and the first opening 121 is removed, wherein the direction of the air flow is indicated by the arrow.
After the workpiece 200 is placed at the target position, the pump body can be switched to suck air, the floating piece 131 can move into the air hole 12 to obtain a flat working surface 111, the workpiece 200 is tightly contacted with the working surface 111, negative pressure is immediately formed at the positions of the workpiece 200 and the first opening 121, the workpiece 200 is adsorbed on the working surface 111, the floating piece 131 in the air hole 12 which does not support the workpiece 200 moves in the air hole 12 and seals the air hole 12, the condition that air is always sucked because part of the air hole 12 is not covered by the workpiece 200 is avoided, negative pressure cannot be formed or is smaller, the adsorption force is far smaller than the suction force of the pump body, and therefore the suction force of the pump body to the workpiece 200 is equal to or slightly smaller than the suction force of the pump body, the workpiece 200 can be adsorbed tightly, and the practicability of the working platform 100 is improved. The work piece 200 may be of any size and may be placed at any location on the work surface 111, achieving high suction attraction to the work piece 200.
Referring to fig. 7, when the workpiece 200 can be carried only by lifting, the lifting member 210 is located at the bottom of the workpiece 200, and the lifting member 210 has a certain height, the lifting member 210 cannot be directly separated from the workpiece 200, or cannot directly lift the bottom of the workpiece 200 to remove the workpiece 200 from the working surface, so that the workpiece 200 cannot be placed on the platform 1.
Referring to fig. 1 and 8-10, in the present embodiment, the platform 1 further includes a support assembly 14 disposed on the platform body 11, and the support assembly 14 is used to support the workpiece 200, so that a gap is formed between the workpiece 200 and the working surface 111, and the height of the gap is greater than the height of a portion of the lifting member 210 located below the workpiece 200, so as to facilitate the lifting member 210 to be withdrawn or inserted through the lower portion of the workpiece 200. It will be apparent that the distance that the float assembly 13 protrudes beyond the working surface 111 is less than the distance that the support assembly 14 protrudes beyond the working surface 111.
The support assemblies 14 may be provided in at least two and at least two support assemblies 14 are provided apart so as to be able to support the workpiece 200. In order to stably support the workpiece 200, the number of the support assemblies 14 is three, and the three support assemblies 14 are arranged in a triangle on the working surface 111, but not limited thereto, the number of the support assemblies 14 may be other, and is not particularly limited herein. The support assembly 14 is arranged on the platform body 11 according to actual requirements.
The supporting component 14 can move along the height direction a of the platform body 11 relative to the platform body 11 and at least partially protrudes out of the working surface 111, so as to support the workpiece 200, or the upper end surface of the supporting component 14 is parallel to or lower than the working surface 111, so that the workpiece 200 is positioned on the working surface 111. Specifically, the support assembly 14 includes a support member 141 that is movable relative to the platform body 11, and a driving member 142 for driving the support member 141 to move, in order to distinguish the subsequent driving members, the driving member 142 is temporarily referred to as a fourth driving member 142, where the fourth driving member 142 is disposed below the working surface 111, and the fourth driving member 142 is any one of a motor, a cylinder, and a hydraulic cylinder, but not limited thereto, and may be any other device that can provide power.
Specifically, the platform body 11 is provided with a receiving cavity 113, and the support assembly 14 is disposed in the receiving cavity 113 and can move in the receiving cavity 113. The housing cavity 113 is a through hole penetrating the platform body 11 or a groove provided on the working surface 111. In this embodiment, the housing cavity 113 is a through hole penetrating the platform body 11, the supporting member 141 is penetrating the platform body 11, and the fourth driving member 142 is disposed below the platform body 11.
The connection manner between the fourth driving member 142 and the supporting member 141, and the specific operation of the fourth driving member 142 to drive the supporting member 141 to protrude from the working surface 111 or enter the accommodating cavity 113 are the prior art, and will not be described herein.
The housing cavity 113 has an opening 1131 in the working surface 111, and when the upper end surface of the support member 141 moves onto the working surface 111, the opening 1131 can be blocked, that is, when the support member 141 is housed in the platform body 11, the through hole can be blocked, so that the suction force to the workpiece 200 is prevented from being reduced due to air leakage of the through hole during the subsequent suction operation of the pump body.
In addition, in order to increase the contact area of the support 141 with the workpiece 200, the top end of the support 141 has a support portion 143, and the support portion 143 contacts the bottom surface of the workpiece 200, thereby improving the support stability of the support assembly 14.
The process of placing the workpiece 200 on the stage 1 is: referring to fig. 8, each of the fourth driving members 142 of the three supporting assemblies 14 is started, the supporting members 141 protrude from the working surface 111, the distance between the supporting portion 143 and the working surface 111 is larger than the height of the portion of the lifting member 210 located below the workpiece 200, and then the fourth driving members 142 are stopped, so that the workpiece 200 is placed on the supporting members 141; referring to fig. 9, the lifting member 210 is removed, the pump is started to blow, the floating member 131 moves toward the first opening 121 and partially protrudes out of the working surface 111, and then the fourth driving member 142 is started to drive the supporting member 141 to restore into the accommodating cavity 113, and at this time, the floating member 131 supports the workpiece 200. When the workpiece 200 is removed from the platform 1, the supporting member 141 is protruded from the working surface 111, the lifting member 210 is inserted under the workpiece 200, the workpiece 200 is removed, and then the supporting member 141 is driven to return to the accommodating cavity 113, as shown in fig. 10. The operation is simple, and the experience of an operator is improved.
Referring to fig. 11 to 14, the platform 1 further includes at least one edge pressing member 15 disposed on the platform body 11, where the edge pressing member 15 can move relative to the platform body 11 to form a clamping notch with the platform body 11, so as to clamp the workpiece 200 on the working surface 111, and avoid the problems of air leakage, unstable adsorption and the like when the side edge of the workpiece 200 is tilted and cannot be tightly attached to the working surface 111, thereby causing the platform 1 to adsorb.
The crimping piece 15 includes a body portion 151 and a crimping portion 152 movable in the height direction a of the stage body 11 with respect to the stage body 11, and a first driving piece (not shown) for driving the body portion 151 and the crimping portion 152 to move in the height direction a. The body portion 151 and the binder portion 152 are connected, and the body portion 151 and the binder portion 152 may be integrally formed or separately formed, with the binder portion 152 at least partially disposed above the workpiece 200. When the edge pressing member 15 is holding the workpiece 200, the body 151 is located at the side of the workpiece 200, and the edge pressing portion 152 is located above the workpiece 200. The edge pressing portion 152 may have a circular structure, but is not limited thereto, and may have a square structure. Since the edge pressing portion 152 covers a part of the workpiece 200, the covered part cannot be subjected to photolithography, and thus the edge pressing portion 152 may be made of a transparent material, such as resin, high-strength glass, etc., so that light can be irradiated to the surface of the workpiece 200 through the edge pressing portion 152 for photolithography.
The first drive member may drive the lip 152 away from or towards the working surface 111. When the workpiece 200 moves to the clamping slot, in order to facilitate the workpiece 200 to enter the clamping slot, the first driving member may drive the blank pressing portion 152 away from the working surface 111, and increase the size of the clamping slot in the height direction a, so as to easily move the workpiece 200 below the blank pressing portion 152. When the workpiece 200 moves into the holding notch, the first driving member drives the pressing edge 152 to move in a direction approaching the working surface 111, so that the workpiece 200 is tightly attached to the working surface 111. It is apparent that the blank holder 15 can hold workpieces 200 of various height dimensions, increasing the utility of the work platform 1.
The first driving member is any one of a motor, a cylinder, and a hydraulic cylinder, but not limited thereto, and may be any other device capable of supplying power, and is not limited thereto. The connection manner between the first driving member and the edge pressing portion 152, and the specific operation of the first driving member for driving the edge pressing portion 152 to move are known in the art, and will not be described herein.
The workpiece 200 has low flatness, especially concave middle and two side edges are tilted, and the two side edges cannot be clung to the table top, which can cause air leakage when the platform 1 adsorbs the workpiece 200, and cause weak adsorption, in order to cling the workpiece 200 to the working surface 111, two edge pressing pieces 15 may be provided, and two edge pressing pieces 15 are respectively provided on two sides of the workpiece 200, but not limited to this, in other embodiments, a plurality of edge pressing pieces 15 may be provided, so as to be at least partially located in the clamping notch on four sides of the workpiece 200.
Taking two edge pressing pieces 15 disposed on two sides of the workpiece 200 as an example, the edge pressing pieces 15 include a first edge pressing piece 153 and a second edge pressing piece 154, and the second edge pressing piece 154 can move on the working surface 111 relative to the first edge pressing piece 153, so that the first edge pressing piece 153 and the second edge pressing piece 154 relatively abut against two sides of the workpiece 200, that is, the first edge pressing piece 153 can move on the working surface 111, and at this time, the second edge pressing piece 154 is fixedly disposed on the working surface 111; alternatively, the second edge pressing member 154 may be moved on the working surface 111, and at this time, the first edge pressing member 153 is fixedly disposed on the working surface 111; or both the first and second crimp 153, 154 may be movable on the working surface 111. Thereby adjusting the distance between the first and second crimp 153, 154 to accommodate workpieces 200 of various length or width dimensions.
Specifically, at least one sliding rail 114 is disposed on the platform body 11, the first edge pressing member 153 and/or the second edge pressing member 154 move in the sliding rail 114, and a second driving member (not shown) connected to the first edge pressing member 153 or the second edge pressing member 154 is further disposed on the platform body 11, and the second driving member drives the first edge pressing member 153 or the second edge pressing member 154 to move in the sliding rail 114. The second driving member is any one of a motor, a cylinder, and a hydraulic cylinder, but not limited thereto, and may be any other device capable of supplying power, and is not limited thereto.
For convenience of description, it is defined that the first edge pressing piece 153 is fixedly disposed on the working surface 111, and the second edge pressing piece 154 is movable on the slide rail 114. Referring to fig. 12, when the workpiece 200 is placed on the work surface 111, both the first and second edge rollers 153, 154 may be remote from the workpiece 200; the workpiece 200 is moved toward the direction in which the first edge pressing member 153 is located, and when one side of the workpiece 200 is moved to the holding notch formed by the first edge pressing member 153 and the working surface 111, the second edge pressing member 154 is moved to the other side of the workpiece 200, and the workpiece 200 is positioned at least partially in the holding notch formed by the second edge pressing member 154 and the working surface 111.
After the workpiece 200 is placed on the working surface 111, the workpiece needs to be moved to a target position, and the target position is generally located at the top corner of the working surface 111, so that the positioning is facilitated. The first crimp 153 may be placed outside the target position, when the workpiece 200 is moved to the first crimp 153, i.e., to the target position.
Because of the heavy weight of the workpiece 200, manual movement is still laborious even if it is lifted by the float assembly 13. To this end, the platform 1 further comprises at least one abutment 16 provided on the platform body 11, the abutment 16 abutting against the workpiece 200 to limit the workpiece 200 on the work surface 111.
The number of the abutting pieces 16 may be two, and the two abutting pieces 16 are disposed on two sides of the workpiece 200, but not limited thereto, and in other embodiments, a plurality of abutting pieces 16 may be disposed and may be distributed on any position on four sides of the workpiece 200.
Now, taking two abutting pieces 16 disposed on both sides of the workpiece 200 as an example, the abutting pieces 16 include a first abutting piece 161 and a second abutting piece 162, and the second abutting piece 162 is movable on the working surface 111 relative to the first abutting piece 161 so that the first abutting piece 161 and the second abutting piece 162 abut against both sides of the workpiece 200 relatively. That is, the first abutting piece 161 can move on the working surface 111, and at this time, the second abutting piece 162 is fixedly arranged on the working surface 111; alternatively, the second abutting member 162 may be movable on the working surface 111, in which case the first abutting member 161 is fixedly disposed on the working surface 111, or both the first abutting member 161 and the second abutting member 162 may be movable on the working surface 111. Thereby adjusting the distance between the first abutment 161 and the second abutment 162 to accommodate workpieces 200 of various length or width dimensions.
Specifically, at least one chute 115 is provided on the platform body 11, and the first abutment 161 and/or the second abutment 162 move within the chute 115. The platform body 11 is further provided with a third driving member (not shown) connected to the first abutting member 161 or the second abutting member 162, and the third driving member drives the first abutting member 161 or the second abutting member 162 to move in the chute 115. The third driving member is any one of a motor, a cylinder, and a hydraulic cylinder, but not limited thereto, and may be any other device capable of supplying power, and is not limited thereto.
For convenience of description, it is defined that the first abutting piece 161 is fixedly disposed on the working surface 111, the first abutting piece 161 may be disposed outside the target position, and the second abutting piece 162 may be movable on the chute 115 to abut the workpiece 200 and drive the workpiece 200 to move. Referring to fig. 12, when the workpiece 200 is placed on the working surface 111, the first abutment 161 and the second abutment 162 may both be away from the workpiece 200; the third driving member is started, and the second abutting member 162 moves towards the direction of the first abutting member 161 so as to abut against the workpiece 200 and drive the workpiece 200 to move, as shown in fig. 13; when one side of the workpiece 200 abuts against the first abutting member 161, as shown in fig. 14.
The first abutting piece 161 and the first edge pressing piece 153 may be disposed at both sides of the target position, thereby facilitating the second abutting piece 162 to drive the workpiece 200 to move to the target position.
Referring to FIG. 15, the present application also provides a lithographic apparatus 001 comprising a frame 300, a frame 400 provided on the frame 300, an optical device 500 provided on the frame 400, a stage 100 provided on the frame 300 and as described above.
The frame 400 is in a portal frame structure, the frame 400 is slidably mounted on the stand 300 along the X direction, and the frame 400 may be externally connected with a power device (not shown), so that the power device drives the frame 400 to move on the stand 300 along the X direction. The optical device 500 is movable relative to the frame 400 in the Y-direction and the Z-direction, so that the position of the optical device 500 can be adjusted to implement processing lithography on the workpiece 200 positioned on the stage 100. The manner in which the optical device 500 is mounted on the frame 400 and the manner in which it is moved are known in the art, and will not be described in detail herein.
The optical device 500 includes a light source (not shown), a DMD (not shown), and a lens assembly (not shown), and a light beam emitted from the light source is projected onto the DMD, reflected by the DMD, formed through the lens assembly, and irradiated to the workpiece 200 for etching. The structure of the optical device 500 is a prior art and will not be described herein.
The application also provides a loading and unloading method for the working platform of the photoetching equipment, which comprises the following steps:
s1, starting a supporting component to enable the supporting component to at least partially protrude out of a working surface of a platform;
s2, moving the workpiece to a working surface of a platform by using a lifting piece, and supporting the workpiece by using a supporting component;
s3, separating the lifting piece from the workpiece;
s4, opening a pump body connected with a platform with a plurality of air holes, and blowing air to the air holes by the pump body, so that a floating assembly arranged in the air holes moves in the air holes and at least partially protrudes out of a working surface;
s5, closing the supporting component to enable the upper end face of the supporting component to be parallel to or lower than the working face, and enabling the floating component to support the workpiece;
s6, moving the workpiece to a target position, and fixing the workpiece on a working surface;
s7, after the workpiece is machined, starting a supporting component, wherein at least part of the supporting component protrudes out of the working surface of the platform so as to support the workpiece;
s8, inserting the lifting piece into a gap between the workpiece and the working surface so as to lift the workpiece and move the workpiece away from the working platform.
Among them, when the mass and volume of the work are large, such as steel plate, marble, etc., it is impossible to carry by hand and it is difficult to move on the stage. The work piece may be placed on or removed from the platform using a lifting device, such as a crane, to which a lift is attached, with the lift lifting the work piece at the bottom and placing the work piece on the work surface.
The target position is positioned at the vertex angle of the working surface, such as the upper left corner, the lower left corner and the like, and the setting of the target position is convenient for the subsequent photoetching equipment to position the workpiece during photoetching.
The operation method for moving the workpiece to the target position comprises the following steps: the workpiece is positioned between the first abutting piece and the second abutting piece, and the first abutting piece and/or the second abutting piece are moved until two sides of the workpiece abut against the first abutting piece and the second abutting piece respectively. The operation is labor-saving and simple without manual driving.
The operation method for fixing the workpiece on the working surface comprises the following steps: the first edge pressing piece and the second edge pressing piece which are positioned on two sides of the workpiece are started, and the first edge pressing piece and the second edge pressing assembly respectively form clamping notches with the working surface, so that the workpiece is clamped on the working surface, and the phenomenon that the adsorptivity is poor due to the fact that the side edges of the workpiece are tilted is avoided.
The feeding and discharging method of the working platform is described in detail by the following specific embodiments:
step one, starting a supporting component to enable the supporting component to at least partially protrude out of a working surface of a platform;
starting lifting equipment, moving a workpiece to a working surface of a platform by using a lifting piece, and supporting the workpiece by using a supporting component;
step three, separating the lifting piece from the workpiece;
opening a pump body connected with a platform with a plurality of air holes, and blowing air to the air holes by the pump body, so that a floating assembly arranged in the air holes moves in the air holes and at least partially protrudes out of a working surface;
step five, closing the supporting component to enable the upper end face of the supporting component to be parallel to or lower than the working face, and enabling the floating component to support the workpiece;
step six, starting the second abutting piece and the first blank holder to move on the working surface, and driving the workpiece to move to a target position;
step seven, starting the first blank holder and the second blank holder to fix the workpiece on the working surface;
starting the pump body to suck air, enabling the floating assembly to move in the air hole and enter the air hole, enabling the workpiece to cover part of the air hole and be adsorbed on the working surface, enabling the floating assembly in the air hole which does not support the workpiece to move in the air hole and block the air hole, and enabling the pump body to stably adsorb the workpiece;
step nine, positioning a workpiece by an optical device of the photoetching equipment, starting photoetching treatment, and starting a supporting component after the workpiece is processed, wherein at least part of the supporting component protrudes out of a working surface of a platform so as to support the workpiece;
and step ten, inserting a lifting piece into a gap between the workpiece and the working surface so as to lift the workpiece and move the workpiece away from the working platform, and closing the supporting component so that the upper end surface of the supporting component is parallel to or lower than the working surface.
In summary, through set up supporting component on the platform, when using the lift piece to remove the work piece to the working face of platform on or remove from the working face, supporting component supports the work piece for have the clearance between work piece and the working face, can be easily break away from the work piece with the lift piece or insert the work piece bottom in order to support the work piece, easy operation, laborsaving, and can easily realize the unloading of going up of the heavier work piece of bulk or weight, improved work platform's practicality.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the application. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.
Claims (5)
1. A loading and unloading method for a work platform of a lithographic apparatus, the lithographic apparatus further comprising a frame and an optical device mounted on the frame, the frame being movable relative to the work platform, the method comprising:
s1, a containing cavity is formed in the platform, the containing cavity is provided with an opening on the working surface, when the upper end face of the supporting component is parallel to or lower than the working surface, the supporting component seals the opening, and the supporting component is started to enable at least part of the supporting component to protrude out of the working surface of the platform;
s2, moving a workpiece to a working surface of the platform by using a lifting piece, wherein the workpiece is supported by the supporting component;
s3, separating the lifting piece from the workpiece;
s4, opening a pump body connected with a platform with a plurality of air holes, and blowing air to the air holes by the pump body, so that a floating assembly arranged in the air holes moves in the air holes and at least partially protrudes out of the working surface;
s5, closing the supporting component so that the upper end face of the supporting component is parallel to or lower than the working face, and supporting the workpiece by the floating component;
s6, moving the workpiece to a target position, and fixing the workpiece on the working surface;
s7, after the workpiece is machined, starting the supporting component, wherein at least part of the supporting component protrudes out of the working surface of the platform so as to support the workpiece;
s8, inserting the lifting piece into a gap between the workpiece and the working surface so as to lift the workpiece and move the workpiece away from the working platform.
2. The method of loading and unloading a work platform of claim 1, wherein the distance the floating assembly protrudes from the work surface is less than the distance the support assembly protrudes from the work surface.
3. The method of loading and unloading a work platform according to claim 1, wherein the support assembly comprises at least two support assemblies, and the at least two support assemblies are arranged apart to stably support the work piece.
4. The method of loading and unloading a work platform of claim 1, wherein the lifting element is connected to a lifting device.
5. The method for loading and unloading a work platform according to claim 1, wherein the target position is located at a vertex angle of the work surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311079196.3A CN117055301A (en) | 2021-07-30 | 2021-07-30 | Loading and unloading method of working platform |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311079196.3A CN117055301A (en) | 2021-07-30 | 2021-07-30 | Loading and unloading method of working platform |
| CN202110872266.5A CN113534621B (en) | 2021-07-30 | 2021-07-30 | Loading and unloading method of working platform |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110872266.5A Division CN113534621B (en) | 2021-07-30 | 2021-07-30 | Loading and unloading method of working platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117055301A true CN117055301A (en) | 2023-11-14 |
Family
ID=78121628
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311075700.2A Withdrawn CN117055299A (en) | 2021-07-30 | 2021-07-30 | Loading and unloading method of working platform |
| CN202110872266.5A Active CN113534621B (en) | 2021-07-30 | 2021-07-30 | Loading and unloading method of working platform |
| CN202311079196.3A Withdrawn CN117055301A (en) | 2021-07-30 | 2021-07-30 | Loading and unloading method of working platform |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311075700.2A Withdrawn CN117055299A (en) | 2021-07-30 | 2021-07-30 | Loading and unloading method of working platform |
| CN202110872266.5A Active CN113534621B (en) | 2021-07-30 | 2021-07-30 | Loading and unloading method of working platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (3) | CN117055299A (en) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3070006B2 (en) * | 1997-02-07 | 2000-07-24 | 株式会社オーク製作所 | How to transport thin work |
| PL2008736T3 (en) * | 2007-06-30 | 2011-11-30 | Trumpf Werkzeugmaschinen Gmbh Co Kg | Machine tool and method for discharging a workpiece part |
| PT2586595E (en) * | 2011-10-25 | 2015-07-13 | Helmholtz Zentrum Geesthacht Zentrum Für Material Und Küstenforschung Gmbh | Process for connecting a plastic workpiece with another workpiece |
| CN105824200B (en) * | 2016-05-31 | 2017-08-29 | 京东方科技集团股份有限公司 | A kind of substrate support structure and exposure machine |
| CN106081623B (en) * | 2016-07-28 | 2018-09-28 | 意力(广州)电子科技有限公司 | Shift the device of rack automatically for product |
| CN107237642B (en) * | 2017-08-11 | 2018-09-18 | 中建山东投资有限公司 | A kind of the manual work trolley and its construction method of packaged type auxiliary installation arch |
| CN109051804A (en) * | 2018-08-21 | 2018-12-21 | 深圳市创世纪机械有限公司 | Automatic loading and unloading device and glass carving machine |
| CN209740591U (en) * | 2018-12-31 | 2019-12-06 | 江苏一重数控机床有限公司 | Auxiliary lifting device for workpiece feeding platform |
| CN210361047U (en) * | 2019-08-23 | 2020-04-21 | 惠州市瑞科机械设备有限公司 | Novel air flotation adsorption honeycomb platform |
| CN212528278U (en) * | 2020-01-18 | 2021-02-12 | 东莞市名创精密机械科技有限公司 | Glass engraving and milling machine and conveying device capable of automatically feeding and discharging |
-
2021
- 2021-07-30 CN CN202311075700.2A patent/CN117055299A/en not_active Withdrawn
- 2021-07-30 CN CN202110872266.5A patent/CN113534621B/en active Active
- 2021-07-30 CN CN202311079196.3A patent/CN117055301A/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| CN113534621B (en) | 2023-11-07 |
| CN117055299A (en) | 2023-11-14 |
| CN113534621A (en) | 2021-10-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6120453B2 (en) | Substrate printing device | |
| JP4037386B2 (en) | Work side processing method and apparatus | |
| KR101873664B1 (en) | Workpiece-flipping assistance device and robot cell equipped with said device | |
| KR20130014930A (en) | Producing apparatus for backlight unit | |
| CN113534621B (en) | Loading and unloading method of working platform | |
| KR20180069676A (en) | Substrate cutting apparatus | |
| CN215117167U (en) | Working platform and photoetching equipment | |
| CN113568283A (en) | Feeding and discharging method for working platform | |
| CN215117168U (en) | Working platform and photoetching equipment | |
| CN113467196A (en) | Working platform and photoetching equipment | |
| CN215376085U (en) | Working platform and photoetching equipment | |
| CN213657773U (en) | Size detection device | |
| CN216039273U (en) | Scribing device | |
| CN212169750U (en) | Robot secondary positioning goes up unloading chamfer and snatchs equipment | |
| CN212449653U (en) | SOMA equipment | |
| JP4976922B2 (en) | Substrate transfer device | |
| KR20060066924A (en) | Vacuum clamping apparatus | |
| KR101493913B1 (en) | apparatus for cutting sheet | |
| CN217620099U (en) | Turnover positioning device | |
| JPH11123643A (en) | Working device of plate material | |
| KR20160076585A (en) | A Release Paper Removal Device of the Backlight Unit | |
| CN220761388U (en) | Full-automatic glass laser micropore processing device | |
| JP2004266014A (en) | Working apparatus of flat plate-like work | |
| CN215376084U (en) | Adsorption working platform and photoetching equipment | |
| CN107932553B (en) | Fixing device and test equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20231114 |