CN215376085U

CN215376085U - Working platform and photoetching equipment

Info

Publication number: CN215376085U
Application number: CN202121772431.1U
Authority: CN
Inventors: 陈国军; 吴景舟; 马迪
Original assignee: Jiangsu Desheng Intelligent Technology Co ltd
Current assignee: Jiangsu Desheng Intelligent Technology Co ltd
Priority date: 2021-07-30
Filing date: 2021-07-30
Publication date: 2021-12-31
Anticipated expiration: 2031-07-30

Abstract

The utility model relates to a working platform, which is used for a photoetching device to support a workpiece, and also comprises a frame and an optical device, wherein the working platform comprises a platform and a pump body, the platform comprises a platform body with a working surface and a plurality of air holes which are arranged through the platform body and communicated with the pump body, and floating components which can move in the air holes and partially protrude out of the air holes to support the workpiece are arranged in the air holes, so that the placement, the movement and the loading and unloading of large-size or heavy workpieces are convenient, the operation is simple and labor-saving, the damage caused by the direct contact friction between the workpiece and the working surface is avoided, and the service life of the platform is prolonged; simultaneously, the floating assembly can move into the air hole to obtain a smooth working surface, the workpiece is adsorbed on the working surface, the floating assembly in the air hole which does not support the workpiece can move in the air hole and block the air hole, so that the adsorption force of the pump body on the workpiece is equal to or slightly less than the suction force of the pump body, the workpiece is tightly adsorbed, the workpiece with any size can be adsorbed, and the practicability of the working platform is improved.

Description

Working platform and photoetching equipment

Technical Field

The utility model relates to a working platform and a photoetching device.

Background

Photolithography, that is, photolithography, involves irradiating light onto a photoreactive material to react the photoreactive material, and usually irradiating light onto the photoreactive material in a specific pattern to obtain a desired structure. Lithography is also commonly referred to as exposure, and the equipment that performs the lithography is a lithography machine or an exposure machine.

Common objects to be subjected to photolithography are screens, dry films, or glasses coated with a photoreactive material. The screen plate is used for fixing a screen on a wood frame or a steel frame, and coating a light reaction material on the screen, and the screen plate can be used for printing cloth after exposure and subsequent treatment. The dry film is a film coated with a photoreactive material, which is generally used to manufacture a PCB board. Glass coated with a photoreactive material is commonly used to make display screens.

The screen plate, the dry film and the glass are light in weight, and 1-3 people can finish the work of carrying, loading and unloading. However, under special requirements, the equipment needs to perform photoetching on objects with large mass and volume, such as steel plates, marbles and the like. The length and width of the objects are 2-3 meters, the weight of the objects exceeds 150Kg, and the objects cannot be carried by manpower, transported by a loading and unloading vehicle or transported by a production line, so that new equipment and processes are needed for loading and unloading.

In the existing market, an air floatation platform and an adsorption platform are two different functional components, the air floatation platform has an air floatation function and is used for loading and unloading heavy workpieces, the adsorption platform has an adsorption function and is used for loading and unloading light materials, however, steel balls on the air floatation platform protrude out of the platform surface, the light materials can be jacked up by the beads, the materials are uneven, and the processing operation is affected; the adsorption platform does not have the air floatation function, and heavier materials rub the platform surface of the platform, so that the materials and equipment are easily damaged.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a working platform which has air floatation and adsorption functions and can block air holes.

In order to achieve the purpose, the utility model provides the following technical scheme: a working platform is used for a photoetching device to support a workpiece, the photoetching device further comprises a rack and an optical device mounted on the rack, the rack can move relative to the working platform, the working platform comprises a platform and a pump body connected with the platform, the platform comprises a platform body with a working face and a plurality of air holes penetrating through the platform body and communicated with the pump body, floating assemblies are arranged in the air holes, the floating assemblies can move in the air holes and partially protrude out of the air holes to support the workpiece, and the floating assemblies can also move in the air holes and seal the air holes.

Further, in the height direction of the platform, the air hole is provided with a first opening and a second opening, the first opening is formed on the working surface, and the floating assembly can move to the first opening and protrude out of the first opening or move to the second opening and block the second opening.

Further, the floating assembly comprises a floating piece arranged between the first opening and the second opening and an elastic piece used for limiting the floating piece between the first opening and the second opening.

Further, the maximum size of the floating member is larger than the sizes of the first opening and the second opening, a first gap is formed between the floating member and the first opening, and a second gap is formed between the floating member and the second opening.

Further, when the pump body is blown, the floating piece moves towards the first opening and partially protrudes out of the air hole to support the workpiece.

Further, the floating piece is provided with an arc-shaped surface, and the arc-shaped surface protrudes out of the air hole to support the workpiece.

Further, when the pump body sucks air to work, the workpiece blocks the first opening, negative pressure is formed between the workpiece and the first opening, the floating piece in the air hole which does not support the workpiece moves towards the second opening and blocks the second opening, and negative pressure is formed between the floating piece and the second opening.

Further, the floating member is a sphere.

Furthermore, the floating assembly further comprises a supporting piece connected with the platform body, the supporting piece and the floating piece are oppositely arranged at two ends of the elastic piece, and a channel communicated with the pump body and the airflow is formed in the supporting piece.

The utility model also provides a lithographic apparatus comprising a work platform as described above.

The utility model has the beneficial effects that: the floating assembly is arranged in the air hole of the platform, can move in the air hole and partially protrudes out of the air hole to support the workpiece, and can also move in the air hole and seal the air hole, so that when the workpiece is placed on a working surface, the floating assembly can support the workpiece, the workpiece can be conveniently placed and can be easily moved on the working surface, the operation is simple and labor-saving, the loading and unloading of the large-size or heavy workpiece can be easily realized, the damage to the workpiece and the working surface caused by the direct contact friction between the workpiece and the working surface is avoided, and the service life of the platform is prolonged; simultaneously, the floating assembly can move into the air hole to obtain a smooth working surface, the workpiece is adsorbed on the working surface, the floating assembly in the air hole which does not support the workpiece can move in the air hole and block the air hole, so that the adsorption force of the pump body on the workpiece is equal to or slightly less than the suction force of the pump body, the workpiece is tightly adsorbed, the workpiece with any size can be adsorbed, and the practicability of the working platform is improved.

The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.

Drawings

Fig. 1 is a schematic structural diagram of a working platform according to an embodiment of the present invention;

FIG. 2 is a cross-sectional view of a portion of the platform of FIG. 1;

FIG. 3 is a sectional view of a part of the structure of a work platform which is not covered with a workpiece and is operated by blowing air on a pump body;

FIG. 4 is a sectional view of a part of the structure of the work table covering the workpiece and performing a work of blowing air on the pump body;

FIG. 5 is a sectional view of a portion of the structure of the work platform uncovered with the workpiece and operating by suction on the pump body;

FIG. 6 is a sectional view of a portion of the structure of the work platform covering the workpiece and working by suction on the pump body;

FIG. 7 is a schematic diagram of a lithographic apparatus according to an embodiment of the utility model.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the mechanism or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

Referring to fig. 1, a work platform 100 according to an embodiment of the present application for supporting a workpiece 200 (as shown in fig. 4 or fig. 6) in a lithographic apparatus includes a platform 1 and a pump body (not shown) connected to the platform 1.

The platform 1 comprises a platform body 11 and a plurality of air holes 12 which run through the platform body 11 and are communicated with the pump body. The platen body 11 has a working surface 111 and a bottom surface 112 disposed opposite to the working surface 111, and the air hole 12 communicates the working surface 111 and the bottom surface 112. The platform body 11 is in a rectangular parallelepiped shape, and the shape and the specific size of the platform body 11 are not limited herein and can be set according to actual needs. The plurality of air holes 12 are arranged on the working surface 111 at equal intervals, but not limited thereto, and the plurality of air holes 12 may be randomly arranged on the working surface 111. In this embodiment, the cross section of the air hole 12 is circular, but the air hole is not limited thereto, and the cross section of the air hole 12 may be other shapes, which are not listed here. The specific number and the specific size of the air holes 12 and the distance between the adjacent air holes 12 are not particularly limited, and may be set according to actual needs. The air hole 12 is communicated with the pump body, and the pump body is started, so that air blowing or air suction into the air hole 12 can be realized. The bottom surface 112 of the platform 1 may be surrounded with a chamber (not shown) communicating with the plurality of air holes 12, and the chamber may be connected to the pump body through a pipe (not shown), so that the pump body can synchronously blow or suck air into the plurality of air holes 12. The connection between the air hole 12 and the pump body is not listed here. Note that the height direction of the platform 1 is shown as a direction a in fig. 1.

Referring to fig. 2, in the embodiment, the air hole 12 is provided with a first opening 121 and a second opening 122 in the height direction of the platform 1, the first opening 121 is formed on the working surface 111, the second opening 122 is formed in the platform body 11, and obviously, the air hole 12 is further provided with a third opening (not shown) formed on the bottom surface 112, so as to penetrate through the platform body 11 through the first opening 121 and the third opening.

The air hole 12 is provided with a floating component 13, the floating component 13 can move in the air hole 12 and partially protrudes out of the air hole 12 to support the workpiece 200, and the floating component 13 can also move in the air hole 12 and block the air hole 12. Specifically, the floating assembly 13 can move to the first opening 121 and protrude out of the first opening 121 or move to the second opening 122 and block the second opening 122.

The floating assembly 13 includes a floating member 131 disposed between the first opening 121 and the second opening 122, an elastic member 132 to restrain the floating member 131 between the first opening 121 and the second opening 122, and a support member 133 connected to the platform body 11. The float 131 has an arc-shaped face disposed toward the first opening 121 and may protrude out of the air hole 12 to support the workpiece 200. In this embodiment, the floating member 131 is a sphere, and in other embodiments, the floating member 131 may also be an oval or an irregular structure with an arc-shaped surface at one end, which is not listed here. The maximum size of the floating member 131 is larger than the size of the first and

second openings

121 and 122 so as to be restricted therebetween by the first and

second openings

121 and 122, and particularly, when the floating member 131 is a sphere, the diameter of the sphere is larger than the size of the first and

second openings

121 and 122.

The elastic member 132 may be a spring or other structure having an elastic force, the support member 133 and the floating member 131 are oppositely disposed at two ends of the elastic member 132, the support member 133 is located at the third opening, the support member 133 may be integrally formed with the platform body 11, the structure is simplified, the support member 133 is formed with a channel 1331 for communicating the pump body and the air flow, and the third opening is an opening of the channel 1331 on the bottom surface 112. In other embodiments, the supporting member 133 may also be fixedly connected to the platform body 11, and is not limited in this respect. The supporting member 133 may have a hollow cylindrical structure, a hollow rectangular parallelepiped structure, or the like, which is not specifically illustrated herein.

The elastic member 132 may be in abutting contact with the supporting member 133 and the floating member 131, and under the action of gravity, the elastic member 132 abuts against the supporting member 133, and the floating member 131 abuts against the elastic member 132, so that the floating member 131 is held between the first opening 121 and the second opening 122. The elastic member 132 may also be connected and fixed to the supporting member 133 at one end and to the floating member 131 at the other end.

When the pump body does not work, the elastic member 132 is in a natural state, the floating member 131 abuts against one end of the elastic member 132, a first gap is formed between the floating member 131 and the first opening 121, and a second gap is formed between the floating member 131 and the second opening 122, that is, at this time, the first opening 121 is not blocked by the floating member 131, and the second opening 122 is not blocked by the floating member 131, so that the pump body is started, and the air flow can circulate in the air hole 12.

Referring to fig. 3, if the workpiece 200 is not covered above the air hole 12, when the pump body is operated by blowing air, the formed air flow enters the channel 1331 of the support member 133 from the third opening and then passes through the elastic member 132 and blows towards the floating member 131, and under the action of the air flow, the floating member 131 moves towards the first opening 121 and partially protrudes out of the air hole 12, that is, the floating member 131 protrudes out of the working surface 111, and the floating member 131 stops moving until the floating member 131 blocks the first opening 121. At this time, the workpiece 200 may be placed on the floating member 131, wherein the direction of the air flow is indicated by the arrow. After the pump stops working, the floating member 131 moves towards the second opening 122 under the action of gravity, and the floating member 131 is located between the first opening 121 and the second opening 122 under the action of the elastic member 132.

Referring to fig. 4, if the workpiece 200 is covered above the air hole 12, when the pump body is operated by blowing air, the formed air flow enters the passage 1331 of the support member 133 from the third opening, and then passes through the elastic member 132 and blows toward the floating member 131, under the action of the air flow, the floating member 131 moves toward the first opening 121, and the workpiece 200 is supported and moved upward, so that the workpiece 200 is supported and away from the working surface 111, and the movement is stopped until the floating member 131 blocks the first opening 121, wherein the air flow direction is shown by an arrow. After the pump body stops working, the floating piece 131 is under the dual action of gravity and the workpiece 200, and the floating piece 131 moves towards the second opening 122 position and is positioned between the first opening 121 and the second opening 122 under the action of the elastic piece 132.

The floating member 131 can support the workpiece 200 when the workpiece 200 is placed on the work surface 111 or when the workpiece 200 is removed from the work surface 111, and cannot be handled manually when the workpiece 200 has a large mass and a large volume, such as a steel plate, marble, or the like. At this time, a hoisting device, such as a crane with a hook, is used to hook the workpiece 200 or to support the workpiece 200 at the bottom by using the hook, and the workpiece 200 is placed on the working surface 111, and the floating member 131 protrudes out of the working surface 111, so the workpiece 200 can be supported, and the top end of the floating member 131 is of an arc-shaped structure, so that the workpiece 200 can be conveniently placed and the workpiece 200 can be easily moved on the working surface 111, the operation is simple and labor-saving, the damage to the workpiece 200 and the working surface 111 caused by the direct contact friction between the workpiece 200 and the working surface 111 is avoided, and the service life of the platform 1 is prolonged.

Referring to fig. 5, during the suction operation of the pump body, the floating member 131 in the air hole 12 which does not support the workpiece 200 moves towards the second opening 122 and blocks the second opening 122, and negative pressure is formed at the floating member 131 and the second opening 122. Specifically, when the pump body sucks air, the formed air flow enters the air hole 12 from the first opening 121, the floating member 131 moves towards the second opening 122 under the action of the air flow, at this time, the elastic member 132 compresses, the air flow passes through the channel 1331 of the support member 133 and enters the pump body from the third opening, after the floating member 131 blocks the second opening 122, the floating member 131 stops moving, at this time, negative pressure is formed at the floating member 131 and the second opening 122, and thus the air hole 12 is blocked, wherein the air flow direction is shown as an arrow. After the pump stops working, the floating member 131 moves towards the first opening 121 and moves between the first opening 121 and the second opening 122 under the action of the elastic member 132.

Referring to fig. 6, if the workpiece 200 covers the air hole 12, when the pump body sucks air, because the workpiece 200 blocks the first opening 121, a negative pressure is immediately formed at the workpiece 200 and the first opening 121, the floating member 131 keeps the position unchanged, and the workpiece 200 is firmly adsorbed on the working surface 111 under the action of the negative pressure. After the pump stops working, the negative pressure at the workpiece 200 and the first opening 121 disappears, wherein the direction of the air flow is shown by the arrow.

After the workpiece 200 is placed at the target position, the pump body can be switched to suck air to work, the floating piece 131 can move into the air hole 12 to obtain a smooth working surface 111, the workpiece 200 is in close contact with the working surface 111, negative pressure is formed immediately at the workpiece 200 and the first opening 121, the workpiece 200 is adsorbed on the working surface 111, the floating piece 131 in the air hole 12 which does not support the workpiece 200 moves in the air hole 12 and blocks the air hole 12, the phenomenon that air enters all the time because part of the air hole 12 is not covered by the workpiece 200, negative pressure cannot be formed or the negative pressure is small, and the adsorption force is far smaller than that of the pump body is avoided, so that the adsorption force of the pump body on the workpiece 200 is equal to or slightly smaller than that of the pump body, the workpiece 200 is tightly adsorbed, the workpiece 200 with any size can be adsorbed, and the practicability of the working platform 100 is improved. The workpiece 200 can be any size and can be placed at any position of the working surface 111, and high-suction of the workpiece 200 can be realized.

Referring to fig. 7, the present invention further provides a lithographic apparatus 001, which includes a base 300, a frame 400 disposed on the base 300, an optical device 500 disposed on the frame 400, and the working platform 100 disposed on the base 300 and shown above.

The frame 400 is a gantry structure, the frame 400 is slidably mounted on the base 300 along the X direction, and the frame 400 is externally connected with a power device (not shown), so that the power device drives the frame 400 to move on the base 300 along the X direction. The optical device 500 is movable in the Y-direction and the Z-direction relative to the frame 400, so that the position of the optical device 500 can be adjusted to achieve the processing lithography of the workpiece 200 on the working platform 100. The manner in which the optical device 500 is mounted on the frame 400 and moved is conventional and will not be described in detail herein.

The optical device 500 includes a light source (not shown), a DMD (not shown), and a lens assembly (not shown), and a light beam emitted from the light source is projected onto the DMD, reflected by the DMD, and then formed through the lens assembly to irradiate the workpiece 200 for etching. The structure of the optical device 500 is conventional and will not be described in detail herein.

In conclusion, the floating assembly is arranged in the air hole of the platform, can move in the air hole and partially protrudes out of the air hole to support the workpiece, and can also move in the air hole and seal the air hole, so that when the workpiece is placed on the working surface, the floating assembly can support the workpiece, the workpiece can be conveniently placed and can be easily moved on the working surface, the operation is simple and labor-saving, the loading and unloading of the large-volume or heavy workpiece can be easily realized, the damage to the workpiece and the working surface caused by the direct contact friction between the workpiece and the working surface is avoided, and the service life of the platform is prolonged; simultaneously, the floating assembly can move into the air hole to obtain a smooth working surface, the workpiece is adsorbed on the working surface, the floating assembly in the air hole which does not support the workpiece can move in the air hole and block the air hole, so that the adsorption force of the pump body on the workpiece is equal to or slightly less than the suction force of the pump body, the workpiece is tightly adsorbed, the workpiece with any size can be adsorbed, and the practicability of the working platform is improved.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the utility model. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. A working platform is used for a photoetching device to support a workpiece, the photoetching device further comprises a rack and an optical device mounted on the rack, the rack can move relative to the working platform, and the working platform is characterized by comprising a platform and a pump body connected with the platform, the platform comprises a platform body with a working face and a plurality of air holes penetrating through the platform body and communicated with the pump body, floating assemblies are arranged in the air holes, the floating assemblies can move in the air holes and partially protrude out of the air holes to support the workpiece, and the floating assemblies can also move in the air holes and block the air holes.

2. The work platform of claim 1, wherein the air hole is provided with a first opening and a second opening in a height direction of the platform, the first opening is formed on the work surface, and the floating assembly is movable to the first opening and protrudes out of the first opening or movable to the second opening and blocks the second opening.

3. The work platform of claim 2, wherein the float assembly comprises a float member disposed between the first opening and the second opening, and a resilient member to retain the float member between the first opening and the second opening.

4. The work platform of claim 3, wherein said float member has a maximum dimension greater than a dimension of said first opening and said second opening, said float member having a first gap between said first opening and said float member having a second gap between said second opening and said float member.

5. The work platform of claim 3, wherein said float member is movable toward said first opening and partially protrudes through said air hole to support said workpiece during said pump body blowing operation.

6. The work platform of claim 5, wherein said float member has an arcuate surface that protrudes through said air aperture to support said workpiece.

7. The work platform of claim 3, wherein the workpiece blocks the first opening when the pump body is operated by suction, a negative pressure is formed between the workpiece and the first opening, a floating member in an air hole which does not support the workpiece moves towards the second opening and blocks the second opening, and a negative pressure is formed between the floating member and the second opening.

8. A work platform according to claim 3, characterised in that the float is a sphere.

9. The work platform of claim 3, wherein the float assembly further comprises a support member connected to the platform body, the support member and the float member being disposed opposite each other at opposite ends of the resilient member, the support member having a passage formed therein for communicating the pump body with the air hole.

10. A lithographic apparatus comprising a work platform according to any one of claims 1 to 9.