CN215117168U - Working platform and photoetching equipment - Google Patents

Abstract

The utility model relates to a work platform, a be used for lithography apparatus in order to support the work piece, lithography apparatus still includes the frame and installs the optical device in the frame, but the frame is work platform motion relatively, work platform includes the platform and the pump body of being connected with the platform, the platform is including the platform body that has the working face, set up at least one blank pressing piece on the platform body, blank pressing piece can remove relatively the platform body, hold the notch with forming the card with the platform body, thereby hold the work piece card on the working face, through set up at least one blank pressing piece on the platform, hug closely the side of work piece and adsorb at the working face, avoid because of the low problem that leads to the unable working face of laminating of both sides perk of the whole roughness of work piece, the work piece is whole by closely adsorbing on the working face and keep level, adsorb firmly and not leak gas, and convenient to process, work platform's practicality has been improved.

Description

Working platform and photoetching equipment

Technical Field

The utility model relates to a work platform and lithography apparatus.

Background

Photolithography, that is, photolithography, involves irradiating light onto a photoreactive material to react the photoreactive material, and usually irradiating light onto the photoreactive material in a specific pattern to obtain a desired structure. Lithography is also commonly referred to as exposure, and the equipment that performs the lithography is a lithography machine or an exposure machine.

Common objects to be subjected to photolithography are screens, dry films, or glasses coated with a photoreactive material. The screen plate is used for fixing a screen on a wood frame or a steel frame, and coating a light reaction material on the screen, and the screen plate can be used for printing cloth after exposure and subsequent treatment. The dry film is a film coated with a photoreactive material, which is generally used to manufacture a PCB board. Glass coated with a photoreactive material is commonly used to make display screens.

Due to the problems of the weight, the processing precision and the like of the photoetching object, the flatness of the photoetching object is low, particularly the problems of concave middle and two-side upwarping are caused, so that the two sides of the photoetching object can not be tightly attached to the table top, and the problems of air leakage, infirm adsorption and the like during platform adsorption are caused.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a can hug closely the work platform that adsorbs on the working face with the work piece.

In order to achieve the above purpose, the utility model provides a following technical scheme: a working platform is used for supporting a workpiece by a photoetching device, the photoetching device further comprises a frame and an optical device arranged on the frame, the frame can move relative to the working platform, the working platform comprises a platform and a pump body connected with the platform, the platform comprises a platform body with a working surface and at least one edge pressing piece arranged on the platform body, the edge pressing piece can move relative to the platform body to form a clamping groove opening with the platform body, so that the workpiece is clamped on the working surface.

Further, the blank holder comprises a body part and a blank holder part which can move along the height direction of the platform body relative to the platform body, and a first driving part for driving the body part and the blank holder part to move along the height direction, wherein the body part is connected with the blank holder part, and the blank holder part is at least partially positioned above the workpiece.

Furthermore, the blank pressing piece comprises a first blank pressing piece and a second blank pressing piece, and the second blank pressing piece can move on the working face relative to the first blank pressing piece, so that the first blank pressing piece and the second blank pressing piece are relatively abutted against two sides of the workpiece.

Further, be provided with at least one slide rail on the platform body, first blank pressing spare and/or second blank pressing spare is in the slide rail removes.

Furthermore, a second driving piece connected with the first edge pressing piece or the second edge pressing piece is further arranged on the platform body, and the second driving piece drives the first edge pressing piece or the second edge pressing piece to move in the sliding rail.

Further, the platform also comprises at least one abutting piece arranged on the platform body, and the abutting piece abuts against the workpiece to limit the workpiece on the working surface.

Further, the abutting pieces comprise a first abutting piece and a second abutting piece, and the second abutting piece can move on the working face relative to the first abutting piece so that the first abutting piece and the second abutting piece can abut against two sides of the workpiece oppositely.

Further, the platform body is provided with at least one sliding groove, and the first abutting piece and/or the second abutting piece move in the sliding groove.

Further, a third driving member connected with the first abutting member or the second abutting member is further arranged on the platform body, and the third driving member drives the first abutting member or the second abutting member to move in the sliding groove.

The utility model also provides a lithography apparatus, include as above work platform.

The beneficial effects of the utility model reside in that: through set up at least one blank pressing spare on the platform, hug closely the side of work piece and adsorb at the working face, avoid leading to the problem of the unable working face of laminating of both sides perk because of the whole roughness of work piece is low, the work piece is whole to be tightly adsorbed on the working face and keep leveling, adsorbs firmly and not leak gas, and the practicality of work platform has been improved to the processing of being convenient for.

The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.

Drawings

Fig. 1 is a schematic structural diagram of a working platform according to an embodiment of the present application;

FIG. 2 is a cross-sectional view of a portion of the platform of FIG. 1;

FIG. 3 is a sectional view of a part of the structure of a work platform which is not covered with a workpiece and is operated by blowing air on a pump body;

FIG. 4 is a sectional view of a part of the structure of the work table covering the workpiece and performing a work of blowing air on the pump body;

FIG. 5 is a sectional view of a portion of the structure of the work platform uncovered with the workpiece and operating by suction on the pump body;

FIG. 6 is a sectional view of a portion of the structure of the work platform covering the workpiece and working by suction on the pump body;

FIG. 7 is a schematic view of a workpiece held by the holding member;

FIG. 8 is a schematic view of the support assembly supporting a workpiece;

FIG. 9 is another schematic view of the support assembly supporting a workpiece;

FIG. 10 is a schematic view of a floating assembly supporting a workpiece;

FIG. 11 is a schematic view of another embodiment of a work platform;

FIG. 12 is a schematic view of the configuration of the hold-down member and the abutment member away from the workpiece;

FIG. 13 is a schematic view of the blank holder and abutment approaching the workpiece;

FIG. 14 is a schematic view of the configuration of the hold-down member and abutment member contacting the workpiece;

FIG. 15 is a schematic diagram of a lithographic apparatus according to an embodiment of the invention.

Detailed Description

The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the mechanism or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.

Referring to fig. 1, a work platform 100 according to an embodiment of the present application for supporting a workpiece 200 (as shown in fig. 8) in a lithographic apparatus includes a platform 1 and a pump body (not shown) connected to the platform 1.

The platform 1 comprises a platform body 11 and a plurality of air holes 12 which run through the platform body 11 and are communicated with the pump body. The platen body 11 has a working surface 111 and a bottom surface 112 disposed opposite to the working surface 111, and the air hole 12 communicates the working surface 111 and the bottom surface 112. The platform body 11 is in a rectangular parallelepiped shape, and the shape and the specific size of the platform body 11 are not limited herein and can be set according to actual needs. The plurality of air holes 12 are arranged on the working surface 111 at equal intervals, but not limited thereto, and the plurality of air holes 12 may be randomly arranged on the working surface 111. In this embodiment, the cross section of the air hole 12 is circular, but the air hole is not limited thereto, and the cross section of the air hole 12 may be other shapes, which are not listed here. The specific number and the specific size of the air holes 12 and the distance between the adjacent air holes 12 are not particularly limited, and may be set according to actual needs. The air hole 12 is communicated with the pump body, and the pump body is started, so that air blowing or air suction into the air hole 12 can be realized. The bottom surface 112 of the platform 1 may be surrounded with a chamber (not shown) communicating with the plurality of air holes 12, and the chamber may be connected to the pump body through a pipe (not shown), so that the pump body can synchronously blow or suck air into the plurality of air holes 12. The connection between the air hole 12 and the pump body is not listed here. Note that the height direction of the platform 1 is shown as a direction a in fig. 1.

Referring to fig. 2, in the embodiment, the air hole 12 is provided with a first opening 121 and a second opening 122 in the height direction of the platform 1, the first opening 121 is formed on the working surface 111, the second opening 122 is formed in the platform body 11, and obviously, the air hole 12 is further provided with a third opening (not shown) formed on the bottom surface 112, so as to penetrate through the platform body 11 through the first opening 121 and the third opening.

The air hole 12 is provided with a floating component 13, the floating component 13 can move in the air hole 12 and partially protrudes out of the working surface 111 to support the workpiece 200, and the floating component 13 can also move in the air hole 12 and block the air hole 12. Specifically, the floating assembly 13 can move to the first opening 121 and protrude out of the first opening 121 or move to the second opening 122 and block the second opening 122.

The floating assembly 13 includes a floating member 131 disposed between the first opening 121 and the second opening 122, an elastic member 132 to restrain the floating member 131 between the first opening 121 and the second opening 122, and a fixing member 133 connected to the platform body 11. The float 131 has an arc-shaped face disposed toward the first opening 121 and may protrude out of the air hole 12 to support the workpiece 200. In this embodiment, the floating member 131 is a sphere, and in other embodiments, the floating member 131 may also be an oval or an irregular structure with an arc-shaped surface at one end, which is not listed here. The maximum size of the floating member 131 is larger than the size of the first and second openings 121 and 122 so as to be restricted therebetween by the first and second openings 121 and 122, and particularly, when the floating member 131 is a sphere, the diameter of the sphere is larger than the size of the first and second openings 121 and 122.

The elastic member 132 may be a spring or other structure having elastic force, the fixing member 133 and the floating member 131 are oppositely disposed at two ends of the elastic member 132, the fixing member 133 is located at the third opening, the fixing member 133 may be integrally formed with the platform body 11, the structure is simplified, the fixing member 133 is formed with a passage 1331 for communicating the pump body and the air flow, and the third opening is an opening of the passage 1331 at the bottom surface 112. In other embodiments, the fixing element 133 may also be fixedly connected to the platform body 11, and is not limited in this respect. The fixing member 133 may have a hollow cylindrical structure or a hollow rectangular parallelepiped structure, which is not specifically illustrated herein.

The elastic member 132 can be in contact with the fixing member 133 and the floating member 131 in an abutting manner, and under the action of gravity, the elastic member 132 abuts against the fixing member 133, and the floating member 131 abuts against the elastic member 132, so that the floating member 131 is held between the first opening 121 and the second opening 122. The elastic member 132 may also have one end connected to the fixing member 133 and the other end connected to the floating member 131.

When the pump body does not work, the elastic member 132 is in a natural state, the floating member 131 abuts against one end of the elastic member 132, a first gap is formed between the floating member 131 and the first opening 121, and a second gap is formed between the floating member 131 and the second opening 122, that is, at this time, the first opening 121 is not blocked by the floating member 131, and the second opening 122 is not blocked by the floating member 131, so that the pump body is started, and the air flow can circulate in the air hole 12.

Referring to fig. 3, if the workpiece 200 is not covered above the air hole 12, when the pump body is operated by blowing air, the formed air flow enters the channel 1331 of the fixing member 133 from the third opening and then passes through the elastic member 132 and blows towards the floating member 131, and under the action of the air flow, the floating member 131 moves towards the first opening 121 and partially protrudes out of the air hole 12, that is, the floating member 131 protrudes out of the working surface 111, and the floating member 131 stops moving until the floating member 131 blocks the first opening 121. At this time, the workpiece 200 may be placed on the floating member 131, wherein the direction of the air flow is indicated by the arrow. After the pump stops working, the floating member 131 moves towards the second opening 122 under the action of gravity, and the floating member 131 is located between the first opening 121 and the second opening 122 under the action of the elastic member 132.

Referring to fig. 4, if the workpiece 200 is covered above the air hole 12, when the pump body is operated by blowing air, the formed air flow enters the passage 1331 of the fixing member 133 from the third opening, and then passes through the elastic member 132 and blows toward the floating member 131, under the action of the air flow, the floating member 131 moves toward the first opening 121, and the supporting workpiece 200 moves upward, so that the workpiece 200 is supported and away from the working surface 111, and the movement is stopped until the floating member 131 blocks the first opening 121, wherein the air flow direction is shown by an arrow. After the pump body stops working, the floating piece 131 is under the dual action of gravity and the workpiece 200, and the floating piece 131 moves towards the second opening 122 position and is positioned between the first opening 121 and the second opening 122 under the action of the elastic piece 132.

The floating member 131 can support the workpiece 200 when the workpiece 200 is placed on the work surface 111 or when the workpiece 200 is removed from the work surface 111, and cannot be handled manually when the workpiece 200 has a large mass and a large volume, such as a steel plate, marble, or the like. At this time, a hoisting device, such as a crane with a hook, is used to hook the workpiece 200 or to support the workpiece 200 at the bottom by using the hook, and the workpiece 200 is placed on the working surface 111, and the floating member 131 protrudes out of the working surface 111, so the workpiece 200 can be supported, and the top end of the floating member 131 is of an arc-shaped structure, so that the workpiece 200 can be conveniently placed and the workpiece 200 can be easily moved on the working surface 111, the operation is simple and labor-saving, the damage to the workpiece 200 and the working surface 111 caused by the direct contact friction between the workpiece 200 and the working surface 111 is avoided, and the service life of the platform 1 is prolonged.

Referring to fig. 5, during the suction operation of the pump body, the floating member 131 in the air hole 12 which does not support the workpiece 200 moves towards the second opening 122 and blocks the second opening 122, and negative pressure is formed at the floating member 131 and the second opening 122. Specifically, when the pump body sucks air, the formed air flow enters the air hole 12 from the first opening 121, the floating member 131 moves towards the second opening 122 under the action of the air flow, at this time, the elastic member 132 compresses, the air flow passes through the channel 1331 of the fixing member 133 and enters the pump body from the third opening, after the floating member 131 blocks the second opening 122, the floating member 131 stops moving, at this time, negative pressure is formed at the floating member 131 and the second opening 122, and thus the air hole 12 is blocked, wherein the air flow direction is shown as an arrow. After the pump stops working, the floating member 131 moves towards the first opening 121 and moves between the first opening 121 and the second opening 122 under the action of the elastic member 132.

Referring to fig. 6, if the workpiece 200 covers the air hole 12, when the pump body sucks air, because the workpiece 200 blocks the first opening 121, a negative pressure is immediately formed at the workpiece 200 and the first opening 121, the floating member 131 keeps the position unchanged, and the workpiece 200 is firmly adsorbed on the working surface 111 under the action of the negative pressure. After the pump stops working, the negative pressure at the workpiece 200 and the first opening 121 disappears, wherein the direction of the air flow is shown by the arrow.

After the workpiece 200 is placed at the target position, the pump body can be switched to suck air to work, the floating piece 131 can move into the air hole 12 to obtain a smooth working surface 111, the workpiece 200 is in close contact with the working surface 111, negative pressure is formed immediately at the workpiece 200 and the first opening 121, the workpiece 200 is adsorbed on the working surface 111, the floating piece 131 in the air hole 12 which does not support the workpiece 200 moves in the air hole 12 and blocks the air hole 12, the phenomenon that air enters all the time because part of the air hole 12 is not covered by the workpiece 200, negative pressure cannot be formed or the negative pressure is small, and the adsorption force is far smaller than that of the pump body is avoided, so that the adsorption force of the pump body on the workpiece 200 is equal to or slightly smaller than that of the pump body, the workpiece 200 is tightly adsorbed, the workpiece 200 with any size can be adsorbed, and the practicability of the working platform 100 is improved. The workpiece 200 can be any size and can be placed at any position of the working surface 111, and high-suction of the workpiece 200 can be realized.

Referring to fig. 7, when the workpiece 200 can only be carried by lifting, since the lifting member 210 is located at the bottom of the workpiece 200 and the lifting member 210 has a certain height, the lifting member 210 cannot be directly separated from the workpiece 200, and cannot directly lift the bottom of the workpiece 200 to remove the workpiece 200 from the working surface, so that the workpiece 200 cannot be placed on the platform 1.

Referring to fig. 1, 8 to 10, in the present embodiment, the platen 1 further includes a supporting assembly 14 disposed on the platen body 11, the supporting assembly 14 is used for supporting the workpiece 200, so that a gap is formed between the workpiece 200 and the working surface 111, and the height of the gap is greater than the height of a portion of the lifting member 210 located below the workpiece 200, thereby facilitating the lifting member 210 to be withdrawn or inserted through the lower portion of the workpiece 200. It is apparent that the floating assembly 13 protrudes from the working surface 111 a smaller distance than the support assembly 14 protrudes from the working surface 111.

The support members 14 may be arranged at least two and at least two support members 14 spaced apart to support the workpiece 200. In order to stably support the workpiece 200, the number of the support assemblies 14 is three, and the three support assemblies 14 form a triangular arrangement on the working surface 111, but the number of the support assemblies 14 is not limited thereto, and the number of the support assemblies 14 may be other, and is not limited specifically herein. The arrangement of the supporting components 14 on the platform body 11 can be set according to actual needs.

The support member 14 is movable relative to the table body 11 in the height direction a of the table body 11 and protrudes at least partially beyond the work surface 111 to support the workpiece 200, or the upper end surface of the support member 14 is parallel to or lower than the work surface 111 to allow the workpiece 200 to be positioned on the work surface 111. Specifically, the supporting assembly 14 includes a supporting member 141 capable of moving relative to the platform body 11, and a driving member 142 for driving the supporting member 141 to move, in order to distinguish the subsequent driving members, the driving member 142 is temporarily a fourth driving member 142, the fourth driving member 142 is disposed below the working surface 111, and the fourth driving member 142 is any one of a motor, an air cylinder, and a hydraulic cylinder, but is not limited thereto, and may also be other devices capable of providing power, which are not listed herein.

Specifically, the platform body 11 is provided with a receiving cavity 113, and the supporting component 14 is disposed in the receiving cavity 113 and can move in the receiving cavity 113. The receiving cavity 113 is a through hole penetrating the platform body 11 or a groove provided on the working surface 111. In this embodiment, the accommodating cavity 113 is a through hole penetrating through the platform body 11, the supporting member 141 is disposed on the platform body 11, and the fourth driving member 142 is disposed below the platform body 11.

The connection manner between the fourth driving element 142 and the supporting element 141 and the specific operation of the fourth driving element 142 driving the supporting element 141 to protrude out of the working surface 111 or enter the receiving cavity 113 are the prior art and are not described herein again.

The accommodating cavity 113 has an opening 1131 on the working surface 111, and when the upper end surface of the support member 141 moves to the working surface 111, the opening 1131 can be closed, that is, when the support member 141 is accommodated in the platform body 11, the through hole can be closed, so that the reduction of the adsorption force on the workpiece 200 due to the air leakage of the through hole during the subsequent suction operation of the pump body can be avoided.

In addition, in order to increase the contact area of the supporter 141 and the workpiece 200, the top end of the supporter 141 has a support portion 143, and the support portion 143 contacts the bottom surface of the workpiece 200, thereby improving the support stability of the support assembly 14.

The process of placing the workpiece 200 on the stage 1 is: referring to fig. 8, each of the fourth driving members 142 of the three supporting assemblies 14 is activated to protrude the supporting member 141 from the working surface 111, and the distance between the supporting portion 143 and the working surface 111 is greater than the height of the lifting member 210 below the workpiece 200, and then the fourth driving members 142 are stopped to place the workpiece 200 on the supporting member 141; referring to fig. 9, the lifting member 210 is removed, the pump body is activated to blow air, the floating member 131 moves towards the first opening 121 and partially protrudes out of the working surface 111, and then the fourth driving member 142 is activated to drive the supporting member 141 to return to the receiving cavity 113, at which time the floating member 131 supports the workpiece 200. When the workpiece 200 is removed from the platform 1, the supporting member 141 protrudes out of the working surface 111, the lifting member 210 is inserted under the workpiece 200, the workpiece 200 is removed, and then the supporting member 141 is driven to return to the receiving cavity 113, as shown in fig. 10. The operation is simple, and the experience of an operator is improved.

Referring to fig. 11 to 14, the platform 1 further includes at least one edge pressing member 15 disposed on the platform body 11, and the edge pressing member 15 is movable relative to the platform body 11 to form a clamping slot with the platform body 11, so as to clamp the workpiece 200 on the working surface 111, thereby preventing the side of the workpiece 200 from tilting and failing to cling to the working surface 111, thereby preventing the problems of air leakage, weak adsorption, and the like during the adsorption of the platform 1.

The hold-down member 15 includes a body portion 151 and a hold-down portion 152 that are movable in the height direction a of the platform body 11 with respect to the platform body 11, and a first driving member (not shown) for driving the body portion 151 and the hold-down portion 152 to move in the height direction a. The main body 151 and the clamping portion 152 are connected, the main body 151 and the clamping portion 152 may be integrally formed or separately formed, and the clamping portion 152 is at least partially located above the workpiece 200. When the blank 15 holds the workpiece 200, the main body 151 is located at the side of the workpiece 200, and the blank 152 is located above the workpiece 200. The crimping portion 152 may have a circular structure, but is not limited thereto, and may have a square structure. Since the pressing edge portion 152 covers a portion of the workpiece 200, which is not accessible for photolithography, the pressing edge portion 152 may be made of a transparent material, such as resin, high-strength glass, etc., so that light can be irradiated to the surface of the workpiece 200 through the pressing edge portion 152 for photolithography.

The first drive member drives the crimping portion 152 away from or toward the work surface 111. When the workpiece 200 moves to the chucking groove, in order to facilitate the workpiece 200 to enter the chucking groove, the first driving member may drive the pressing edge portion 152 away from the working surface 111, and increase the dimension of the chucking groove in the height direction a, thereby easily moving the workpiece 200 to the lower side of the pressing edge portion 152. When the workpiece 200 moves into the retaining slot, the first driving member drives the pressing edge portion 152 to move toward the working surface 111, so that the workpiece 200 is tightly attached to the working surface 111. Obviously, the blank holder 15 can hold workpieces 200 with various height dimensions, and the practicability of the working platform 1 is increased.

The first driving member is any one of a motor, a cylinder and a hydraulic cylinder, but is not limited thereto, and may also be other devices capable of providing power, which are not listed here. The connection manner between the first driving element and the pressing edge portion 152 and the specific operation of the first driving element driving the pressing edge portion 152 to move are the prior art, and are not described herein.

The workpiece 200 has a low flatness, particularly, the middle of the workpiece is concave, the two sides of the workpiece are tilted, and the two sides of the workpiece cannot be tightly attached to the table top, which may cause air leakage when the platform 1 adsorbs the workpiece 200, resulting in weak adsorption.

Now, taking two edge pressing members 15 respectively disposed on two sides of the workpiece 200 as an example for detailed description, the edge pressing members 15 include a first edge pressing member 153 and a second edge pressing member 154, the second edge pressing member 154 can move on the working surface 111 relative to the first edge pressing member 153, so that the first edge pressing member 153 and the second edge pressing member 154 relatively abut against two sides of the workpiece 200, that is, the first edge pressing member 153 can move on the working surface 111, and at this time, the second edge pressing member 154 is fixedly disposed on the working surface 111; alternatively, the second edging 154 may be movable on the work surface 111, in which case the first edging 153 is fixedly disposed on the work surface 111; or both the first and second crimping members 153 and 154 may be movable on the work surface 111. Thereby adjusting the distance between the first and second crimping members 153 and 154 to accommodate workpieces 200 of various length or width dimensions.

Specifically, the platform body 11 is provided with at least one slide rail 114, the first edge pressing member 153 and/or the second edge pressing member 154 move in the slide rail 114, and the platform body 11 is further provided with a second driving member (not shown) connected with the first edge pressing member 153 or the second edge pressing member 154, and the second driving member drives the first edge pressing member 153 or the second edge pressing member 154 to move in the slide rail 114. The second driving element is any one of a motor, a cylinder and a hydraulic cylinder, but is not limited thereto, and may also be other devices capable of providing power, which are not listed here.

For convenience of illustration, the first presser member 153 is fixedly disposed on the working surface 111, and the second presser member 154 is movable on the slide rail 114. Referring to fig. 12, when the workpiece 200 is placed on the work surface 111, the first and second crimping members 153 and 154 may both be away from the workpiece 200; the workpiece 200 is moved toward the first hold-down member 153, and when one side of the workpiece 200 moves to the holding groove formed by the first hold-down member 153 and the work surface 111, the second hold-down member 154 is moved to the other side of the workpiece 200, and the workpiece 200 is at least partially positioned in the holding groove formed by the second hold-down member 154 and the work surface 111.

After the workpiece 200 is placed on the working surface 111, it needs to be moved to a target position, which is generally located at the top corner of the working surface 111 for positioning. The first bead member 153 may be placed outside the target position, and when the workpiece 200 moves to the first bead member 153, the target position is reached.

Since the work 200 is heavy, even if it is jacked up by the floating assembly 13, manual movement is still laborious. To this end, the platform 1 further comprises at least one abutment 16 provided on the platform body 11, the abutment 16 abutting against the workpiece 200 to limit the workpiece 200 on the working face 111.

The abutting members 16 may be provided in two, and two abutting members 16 are respectively provided on two sides of the workpiece 200, but not limited thereto, and in other embodiments, the abutting members 16 may be provided in plurality, and may be distributed at any position on four sides of the workpiece 200.

Taking two abutting pieces 16 respectively disposed on two sides of the workpiece 200 as an example for detailed description, the abutting piece 16 includes a first abutting piece 161 and a second abutting piece 162, and the second abutting piece 162 can move on the working surface 111 relative to the first abutting piece 161, so that the first abutting piece 161 and the second abutting piece 162 abut against two sides of the workpiece 200 relatively. That is, the first abutting piece 161 can move on the working surface 111, and at this time, the second abutting piece 162 is fixedly arranged on the working surface 111; alternatively, the second abutting member 162 may be movable on the working surface 111, in which case the first abutting member 161 is fixedly disposed on the working surface 111, or both the first abutting member 161 and the second abutting member 162 may be movable on the working surface 111. Thereby adjusting the distance between the first and second abutments 161 and 162 to accommodate workpieces 200 of various length or width dimensions.

Specifically, at least one sliding groove 115 is provided on the platform body 11, and the first abutting piece 161 and/or the second abutting piece 162 move in the sliding groove 115. The platform body 11 is further provided with a third driving element (not shown) connected with the first abutting element 161 or the second abutting element 162, and the third driving element drives the first abutting element 161 or the second abutting element 162 to move in the sliding groove 115. The third driving element is any one of a motor, a cylinder and a hydraulic cylinder, but is not limited thereto, and may also be other devices capable of providing power, which are not listed here.

For convenience of illustration, it is limited that the first abutting piece 161 is fixedly arranged on the working surface 111, the first abutting piece 161 can be arranged outside the target position, and the second abutting piece 162 can move on the sliding groove 115 to abut against the workpiece 200 and drive the workpiece 200 to move. Referring to fig. 12, when the workpiece 200 is placed on the working surface 111, the first abutting piece 161 and the second abutting piece 162 may both be away from the workpiece 200; when the third driving member is activated, the second abutting member 162 moves towards the first abutting member 161 to abut against the workpiece 200 and drive the workpiece 200 to move, as shown in fig. 13; when one side of the workpiece 200 abuts against the first abutting member 161, as shown in fig. 14.

The first abutting piece 161 and the first bead pressing piece 153 may be disposed at both side edges of the target position, thereby facilitating the second abutting piece 162 to drive the workpiece 200 to move to the target position.

Referring to fig. 15, the present invention further provides a lithographic apparatus 001, which includes a base 300, a frame 400 disposed on the base 300, an optical device 500 disposed on the frame 400, and the working platform 100 disposed on the base 300 and shown above.

The frame 400 is a gantry structure, the frame 400 is slidably mounted on the base 300 along the X direction, and the frame 400 is externally connected with a power device (not shown), so that the power device drives the frame 400 to move on the base 300 along the X direction. The optical device 500 is movable in the Y-direction and the Z-direction relative to the frame 400, so that the position of the optical device 500 can be adjusted to achieve the processing lithography of the workpiece 200 on the working platform 100. The manner in which the optical device 500 is mounted on the frame 400 and moved is conventional and will not be described in detail herein.

The optical device 500 includes a light source (not shown), a DMD (not shown), and a lens assembly (not shown), and a light beam emitted from the light source is projected onto the DMD, reflected by the DMD, and then formed through the lens assembly to irradiate the workpiece 200 for etching. The structure of the optical device 500 is conventional and will not be described in detail herein.

The present application further provides a loading and unloading method for a working platform of a lithographic apparatus, the method comprising:

s1, starting the supporting component to enable the supporting component to at least partially protrude out of the working surface of the platform;

s2, moving the workpiece to the working surface of the platform by using the lifting piece, and supporting the workpiece by using the supporting component;

s3, separating the lifting piece from the workpiece;

s4, opening a pump body connected with a platform with a plurality of air holes, and blowing air to the air holes by the pump body to enable a floating assembly arranged in the air holes to move in the air holes and at least partially protrude out of the working surface;

s5, closing the supporting component to enable the upper end face of the supporting component to be parallel to or lower than the working face, and enabling the floating component to support the workpiece;

s6, moving the workpiece to a target position, and fixing the workpiece on the working surface;

s7, after the workpiece is processed, starting the supporting component, wherein at least part of the supporting component extends out of the working surface of the platform to support the workpiece;

and S8, inserting the lifting piece into the gap between the workpiece and the working surface to lift the workpiece and remove the workpiece from the working platform.

Among them, when the mass and volume of the workpiece are large, such as steel plate and marble, it is difficult to move the workpiece on the platform. The workpiece may be placed on or removed from the platform using a lifting device, such as a crane, to which the lifting members are attached, and used to lift the workpiece at the bottom and place the workpiece on the work surface.

The target position is located at the top corner of the working surface, such as the upper left corner, the lower left corner and the like, and the target position is arranged, so that the subsequent photoetching equipment can conveniently position the workpiece during photoetching.

The operation method for moving the workpiece to the target position comprises the following steps: the workpiece is positioned between the first abutting piece and the second abutting piece, and the first abutting piece and/or the second abutting piece are/is moved until two sides of the workpiece abut against the first abutting piece and the second abutting piece respectively. Manpower drive is not needed, and the operation is labor-saving and simple.

The operation method for fixing the workpiece on the working surface comprises the following steps: the first blank pressing piece and the second blank pressing piece which are positioned on two sides of the workpiece are started, and the first blank pressing piece and the second blank pressing component form clamping notches with the working surface respectively, so that the workpiece is clamped on the working surface, and the phenomenon that the adsorption property is poor due to the fact that the side edges of the workpiece tilt is avoided.

The following detailed description is made of the loading and unloading method of the working platform by specific embodiments:

step one, starting a support component to ensure that at least part of the support component protrudes out of a working surface of a platform;

secondly, starting the hoisting equipment, moving the workpiece to the working surface of the platform by using the lifting piece, and supporting the workpiece by using the supporting assembly;

step three, separating the lifting piece from the workpiece;

step four, opening a pump body connected with a platform with a plurality of air holes, and blowing air to the air holes by the pump body to ensure that the floating assembly arranged in the air holes moves in the air holes and at least partially protrudes out of the working surface;

step five, closing the supporting assembly to enable the upper end face of the supporting assembly to be parallel to or lower than the working face, and enabling the floating assembly to support the workpiece;

sixthly, starting the second abutting part and the first edge pressing part to move on the working surface, and driving the workpiece to move to a target position;

step seven, starting the first edge pressing piece and the second edge pressing piece to fix the workpiece on the working surface;

step eight, starting the pump body to suck air, enabling the floating assembly to move in the air hole and enter the air hole, covering the part of the air hole by the workpiece and adsorbing the workpiece on the working surface, enabling the floating assembly in the air hole which does not support the workpiece to move in the air hole and block the air hole, and enabling the pump body to stably adsorb the workpiece;

ninth, an optical device of the photoetching equipment positions a workpiece, then photoetching treatment is started, and after the workpiece is processed, a supporting component is started, and at least part of the supporting component protrudes out of the working surface of the platform to support the workpiece;

step ten, inserting the lifting piece into the gap between the workpiece and the working surface to lift the workpiece and move the workpiece away from the working platform, and closing the support assembly to enable the upper end face of the support assembly to be parallel to or lower than the working surface.

To sum up, through set up at least one blank pressing piece on the platform, hug closely the side of work piece and adsorb at the working face, avoid leading to the problem of the unable working face of laminating of both sides perk because of the whole roughness of work piece is low, the work piece is whole to be tightly adsorbed on the working face and keep leveling, adsorbs firmly and not leak gas, and the processing of being convenient for has improved work platform's practicality.

The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above examples only represent some embodiments of the present invention, and the description thereof is more specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims (10)

1. A working platform is used for a photoetching device to support a workpiece, and the photoetching device further comprises a frame and an optical device arranged on the frame, wherein the frame can move relative to the working platform.

2. The work platform of claim 1, wherein the binder member includes a body portion and a binder portion movable in a height direction of the platform body relative to the platform body, the body portion and the binder portion being connected, and a first drive member for driving the body portion and the binder portion in a height direction, the binder portion being at least partially positioned above the workpiece.

3. The work platform of claim 1, wherein the hold-down member comprises a first hold-down member and a second hold-down member, the second hold-down member being movable relative to the first hold-down member on the work surface to hold the first hold-down member and the second hold-down member against opposite sides of the workpiece.

4. A work platform according to claim 3, wherein the platform body is provided with at least one slide track within which the first and/or second edging member moves.

5. The work platform of claim 4, wherein said platform body further comprises a second driving member connected to said first crimping member or said second crimping member, said second driving member driving said first crimping member or said second crimping member to move within said slide track.

6. The work platform of claim 1, further comprising at least one abutment member disposed on the platform body, the abutment member abutting the workpiece to retain the workpiece on the work surface.

7. The work platform of claim 6, wherein said abutment members comprise a first abutment member and a second abutment member, said second abutment member being movable relative to said first abutment member on said work surface to bring said first and second abutment members into abutment against opposite sides of the workpiece.

8. Work platform according to claim 7, characterised in that the platform body is provided with at least one slide groove, in which the first and/or the second abutment member move.

9. The work platform of claim 8, wherein a third driving member is disposed on the platform body and connected to the first abutting member or the second abutting member, and the third driving member drives the first abutting member or the second abutting member to move in the sliding groove.

10. A lithographic apparatus comprising a work platform according to any one of claims 1 to 9.

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