CN117015748A - 曝光方法以及曝光装置 - Google Patents
曝光方法以及曝光装置 Download PDFInfo
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- CN117015748A CN117015748A CN202280019789.8A CN202280019789A CN117015748A CN 117015748 A CN117015748 A CN 117015748A CN 202280019789 A CN202280019789 A CN 202280019789A CN 117015748 A CN117015748 A CN 117015748A
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- 238000000034 method Methods 0.000 title claims abstract description 60
- 238000012937 correction Methods 0.000 claims abstract description 425
- 239000000758 substrate Substances 0.000 claims abstract description 151
- 230000007246 mechanism Effects 0.000 claims abstract description 134
- 230000001678 irradiating effect Effects 0.000 claims abstract description 15
- 238000012360 testing method Methods 0.000 claims description 54
- 238000003384 imaging method Methods 0.000 claims description 46
- 238000005259 measurement Methods 0.000 claims description 34
- 238000001514 detection method Methods 0.000 claims description 26
- 230000000875 corresponding effect Effects 0.000 description 25
- 238000010586 diagram Methods 0.000 description 15
- 238000012545 processing Methods 0.000 description 11
- 238000012546 transfer Methods 0.000 description 9
- 238000004891 communication Methods 0.000 description 8
- 238000005286 illumination Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021-037542 | 2021-03-09 | ||
| JP2021-037543 | 2021-03-09 | ||
| JP2021037543A JP2022137850A (ja) | 2021-03-09 | 2021-03-09 | 露光方法および露光装置 |
| PCT/JP2022/003515 WO2022190706A1 (ja) | 2021-03-09 | 2022-01-31 | 露光方法および露光装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117015748A true CN117015748A (zh) | 2023-11-07 |
Family
ID=83319411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202280019789.8A Pending CN117015748A (zh) | 2021-03-09 | 2022-01-31 | 曝光方法以及曝光装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2022137850A (ja) |
| CN (1) | CN117015748A (ja) |
-
2021
- 2021-03-09 JP JP2021037543A patent/JP2022137850A/ja active Pending
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2022
- 2022-01-31 CN CN202280019789.8A patent/CN117015748A/zh active Pending
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| Publication number | Publication date |
|---|---|
| JP2022137850A (ja) | 2022-09-22 |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |