CN116978837A - 一种芯片测试用自动堆叠装置 - Google Patents

一种芯片测试用自动堆叠装置 Download PDF

Info

Publication number
CN116978837A
CN116978837A CN202311220842.3A CN202311220842A CN116978837A CN 116978837 A CN116978837 A CN 116978837A CN 202311220842 A CN202311220842 A CN 202311220842A CN 116978837 A CN116978837 A CN 116978837A
Authority
CN
China
Prior art keywords
module
fixedly connected
pipe
limiting
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202311220842.3A
Other languages
English (en)
Other versions
CN116978837B (zh
Inventor
王树锋
梁晖
陈阳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jingfangyun Guangdong Testing Equipment Co ltd
Qianhai Jingfangyun Shenzhen Test Equipment Co ltd
Original Assignee
Jingfangyun Guangdong Testing Equipment Co ltd
Qianhai Jingfangyun Shenzhen Test Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jingfangyun Guangdong Testing Equipment Co ltd, Qianhai Jingfangyun Shenzhen Test Equipment Co ltd filed Critical Jingfangyun Guangdong Testing Equipment Co ltd
Priority to CN202311220842.3A priority Critical patent/CN116978837B/zh
Publication of CN116978837A publication Critical patent/CN116978837A/zh
Application granted granted Critical
Publication of CN116978837B publication Critical patent/CN116978837B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G61/00Use of pick-up or transfer devices or of manipulators for stacking or de-stacking articles not otherwise provided for
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67333Trays for chips
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68728Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/14Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

本发明属于芯片堆叠设备技术领域,且公开了一种芯片测试用自动堆叠装置,包括放置架,所述放置架的内部固定连接有驱动模块,所述驱动模块的两侧分别活动连接有与驱动模块抵触连接的活动堆叠框,所述活动堆叠框的顶部铰接有拉动模块。本发明通过设置限位模块和推动模块、等结构的配合,提升了对芯片的固定效果,活动堆叠框由于第一波纹管的弹力作用,逐渐向放置架的内部活动,第一波纹管呈现为逐渐扩展状态,连接管和分流管使得第二波纹管内部的气体通过气道进入至分流管和连接管的内部,四个第二波纹管内部的气体将会完全被抽取,并通过柔性弹簧对四个限位块进行拉动,使得四个限位块的内壁对芯片进行夹持限位,以此提升对芯片的稳固性。

Description

一种芯片测试用自动堆叠装置
技术领域
本发明属于芯片堆叠设备技术领域,具体是一种芯片测试用自动堆叠装置。
背景技术
芯片在电子学中是一种将电路(主要包括半导体设备,也包括被动组件等)小型化的方式,并时常制造在半导体晶圆表面上。
例如中国实用新型专利,公告号为CN212365924U,公告日为2021年01月1日,专利名称为“一种三维立体封装芯片的测试模组”,涉及印制电路板、立体封装芯片技术领域;所述测试模组包括若干个从上至下依次堆叠的叠层板、以及设置在两两相邻的两个所述叠层板之间的信号转接板;叠层板的正反两面均设置有至少一个测试点焊盘,叠层板的正面与反面的测试点焊盘一一对应短接;信号转接板的正反两面均设置有信号转接焊盘,信号转接板的正面与反面的信号转接焊盘一一对应设置,信号转接板上对应设置的正面与反面的信号转接焊盘导通或者断开;信号转接焊盘与其相对的叠层板的测试点焊盘一一对应电连接,本专利测试模组极大的简化了测试步骤,节省开发成本,提高叠层板的合格率、叠层板测试的可靠性。
针对上述专利中所述,在对三维立体封装芯片进行垂直互联测试时,一定程度上缩短了测试底板的设计周期、节省开发成本,然而在对芯片进行放置时,未设置相应的夹持限位结构,进而将会导致芯片在进行测试时,自身的不稳定性,微小幅度的晃动将会降低后续的测试效果,因此需要对其进行改进。
发明内容
为解决上述背景技术中提出的芯片在放置时,自身的不稳定晃动性,将会大幅度降低后续的测试效果问题,本发明提供了一种芯片测试用自动堆叠装置。
为实现上述目的,本发明提供如下技术方案:一种芯片测试用自动堆叠装置,包括放置架,所述放置架的内部固定连接有驱动模块,所述驱动模块的两侧分别活动连接有与驱动模块抵触连接的活动堆叠框,所述活动堆叠框的顶部铰接有拉动模块,所述拉动模块的顶部与放置架的外壁固定连接,所述活动堆叠框位于放置架内部一端的顶部固定连接有推动模块,所述推动模块的外端固定连接有与活动堆叠框内部连接的限位模块,所述限位模块的顶部固定连接有按压模块。
优选地,所述驱动模块包括有与放置架的顶部固定连接的电动伸缩器,所述电动伸缩器的底部固定连接有与活动堆叠框抵触连接的抵触杆,电动伸缩器启动,当其向上移动时,将会通过抵触杆对活动堆叠框的内端进行抵触,抵触杆两侧的斜角将会对活动堆叠框的内端进行抵触。
优选地,所述抵触杆外壁的两侧从上至下等距设置有斜角,且与活动堆叠框内端的底部抵触。
优选地,所述拉动模块包括有与放置架固定连接的拉动绳,所述拉动绳的底部固定连接有与活动堆叠框顶部铰接的铰接板,所述铰接板的底部与按压模块抵触连接,拉动绳将会对铰接板顶部的外端进行拉动,铰接板的底部将会以活动堆叠框顶端的一侧为轴心发生转动,铰接板对活动堆叠框的顶部解除封闭效果。
优选地,所述推动模块包括有与活动堆叠框内端顶部连接的第一波纹管,所述第一波纹管远离驱动模块的一端连接有连接组件,所述连接组件与限位模块相连通,活动堆叠框受到抵触杆的挤压,将会对第一波纹管进行抵触,使其压缩,其内部空气将会进入至连接组件的内部,以此便利后续的挤压限位使用。
优选地,所述限位模块包括有与活动堆叠框内壁固定连接的抵触弹簧伸缩管,所述抵触弹簧伸缩管的内端卡接有限位组件,所述限位组件设置有四个,四个所述限位组件均设置在活动堆叠框内壁的四角,相邻两个所述限位组件的中部固定连接有连通组件,四个限位组件将会由于连通组件的扩展而解除对芯片的限位。
优选地,所述限位组件包括有通过抵触弹簧伸缩管与活动堆叠框连接的限位块,所述限位块的内部开设有气道,所述气道与连接组件相连通,所述限位块的外部与抵触弹簧伸缩管活动卡接。
优选地,所述连通组件包括有与相邻两个限位组件中部连接的第二波纹管,所述第二波纹管的外壁活动套接有柔性弹簧,所述柔性弹簧的两端分别与相邻两个限位块连接,分流管内部的空气将会通过气道分别进入至四个第二波纹管的内部,使其膨胀,对四个第二波纹管将会解除限位块对芯片的限位固。
优选地,所述连接组件包括有与第一波纹管固定连接的连接管,所述连接管远离第一波纹管的一端固定连接有分流管,所述分流管的底端与限位块的内部相连通,连接管将会使得第一波纹管内部的空气进入,再次进入至分流管的内部,分流管将会对连接管内部的气体进行分流,使其分两批次进入至气道的内部。
优选地,所述按压模块包括有与活动堆叠框内壁固定连接的第三波纹管,所述第三波纹管的顶部与拉动模块的底部抵触连接,所述第三波纹管的底部连接有软管,所述软管的底部连接有与限位模块顶部连接的连接板,所述连接板设置为合页连接,所述连接板的顶部固定连接有弧形弹簧伸缩管,所述连接板底部的外端固定连接有按压波纹管,连接板将会呈现为垂直状态,将芯片放置在限位块的内部时,翻转连接板使其呈现水平状,当铰接板的底部对第三波纹管按压后,将会使其内部空气通过软管进入至按压波纹管,按压波纹管的扩张将会对芯片的顶部进行向下的按压,提升固定效果。
与现有技术相比,本发明的有益效果如下:
本发明通过设置限位模块和推动模块、等结构的配合,进而提升了对芯片的固定效果,增加了稳定性,活动堆叠框由于第一波纹管的弹力作用,逐渐向放置架的内部活动,第一波纹管呈现为逐渐扩展状态,通过连接管和分流管使得第二波纹管内部的气体通过气道进入至分流管和连接管的内部,并通过连接管进入至第一波纹管的内部,四个第二波纹管内部的气体将会完全被抽取,并通过柔性弹簧对四个限位块进行拉动,使得四个限位块的内壁对芯片进行夹持限位,以此提升对芯片的稳固性;
本发明通过设置按压模块和拉动模块等结构的配合,进而再次提升对芯片的稳固性,提升后续的测试稳定性,铰接板翻折后将会对第三波纹管的顶部进行按压,第三波纹管内部的空气通过软管进入至按压波纹管的内部,按压波纹管的底部将会对芯片的顶部进行向下的抵触,进而再次对芯片的顶部进行稳定,进而以便后续的稳固测试效果。
附图说明
图1为本发明结构示意图;
图2为本发明正面剖视结构示意图;
图3为本发明驱动模块和活动堆叠框的结构配合关系示意图;
图4为本发明驱动模块和拉动模块的结构配合关系示意图;
图5为图4中A处的局部放大结构示意图;
图6为本发明连接组件和限位模块的结构配合关系示意图;
图7为本发明限位组件和连通组件的结构配合关系示意图;
图8为图7中B处的局部放大结构示意图;
图9为本发明按压模块的细分结构示意图。
图中:1、放置架;2、驱动模块;21、电动伸缩器;22、抵触杆;3、活动堆叠框;4、拉动模块;41、拉动绳;42、铰接板;5、推动模块;51、第一波纹管;52、连接组件;521、连接管;522、分流管;6、限位模块;61、限位组件;611、限位块;612、气道;62、连通组件;621、第二波纹管;622、柔性弹簧;63、抵触弹簧伸缩管;7、按压模块;71、第三波纹管;72、软管;73、连接板;74、弧形弹簧伸缩管;75、按压波纹管。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
如图1至图9所示,本发明提供一种芯片测试用自动堆叠装置,包括放置架1,放置架1的内部固定连接有驱动模块2,驱动模块2的两侧分别活动连接有与驱动模块2抵触连接的活动堆叠框3,活动堆叠框3的顶部铰接有拉动模块4,拉动模块4的顶部与放置架1的外壁固定连接,活动堆叠框3位于放置架1内部一端的顶部固定连接有推动模块5,推动模块5的外端固定连接有与活动堆叠框3内部连接的限位模块6,限位模块6的顶部固定连接有按压模块7。
采用上述方案:通过通过设置限位模块6和推动模块5、等结构的配合,进而提升了对芯片的固定效果,增加了稳定性;通过设置按压模块7和拉动模块4等结构的配合,进而再次提升对芯片的稳固性,提升后续的测试稳定性。
如图2所示,驱动模块2包括有与放置架1的顶部固定连接的电动伸缩器21,电动伸缩器21的底部固定连接有与活动堆叠框3抵触连接的抵触杆22,抵触杆22外壁的两侧从上至下等距设置有斜角,且与活动堆叠框3内端的底部抵触。
采用上述方案:电动伸缩器21启动,当其向上移动时,将会通过抵触杆22对活动堆叠框3的内端进行抵触,抵触杆22两侧的斜角将会对活动堆叠框3的内端进行抵触,从而使得活动堆叠框3向外活动,进而利于后续芯片的放置使用。
如图4所示,拉动模块4包括有与放置架1固定连接的拉动绳41,拉动绳41的底部固定连接有与活动堆叠框3顶部铰接的铰接板42,铰接板42的底部与按压模块7抵触连接,推动模块5包括有与活动堆叠框3内端顶部连接的第一波纹管51,第一波纹管51远离驱动模块2的一端连接有连接组件52,连接组件52与限位模块6相连通。
采用上述方案:当活动堆叠框3向外移动时,拉动绳41将会对铰接板42顶部的外端进行拉动,铰接板42的底部将会以活动堆叠框3顶端的一侧为轴心发生转动,使得铰接板42对活动堆叠框3的顶部解除封闭效果,以此便于后续芯片的放置使用,当活动堆叠框3受到抵触杆22的挤压,向外移动时,将会对第一波纹管51进行抵触,使其压缩,其内部空气将会进入至连接组件52的内部,以此便利后续的挤压限位使用。
如图6所示,限位模块6包括有与活动堆叠框3内壁固定连接的抵触弹簧伸缩管63,抵触弹簧伸缩管63的内端卡接有限位组件61,限位组件61设置有四个,四个限位组件61均设置在活动堆叠框3内壁的四角,相邻两个限位组件61的中部固定连接有连通组件62。
采用上述方案:四个限位组件61将会由于连通组件62的扩展而解除对芯片的限位,反之,连通组件62内部空气被挤压后,将会实现对芯片的限位。
如图7所示,限位组件61包括有通过抵触弹簧伸缩管63与活动堆叠框3连接的限位块611,限位块611的内部开设有气道612,气道612与连接组件52相连通,限位块611的外部与抵触弹簧伸缩管63活动卡接,连通组件62包括有与相邻两个限位组件61中部连接的第二波纹管621,第二波纹管621的外壁活动套接有柔性弹簧622,柔性弹簧622的两端分别与相邻两个限位块611连接。
采用上述方案:分流管522内部的空气将会通过气道612分别进入至四个第二波纹管621的内部,使其膨胀,对四个第二波纹管621将会解除限位块611对芯片的限位固定。
如图6所示,连接组件52包括有与第一波纹管51固定连接的连接管521,连接管521远离第一波纹管51的一端固定连接有分流管522,分流管522的底端与限位块611的内部相连通。
采用上述方案:连接管521将会使得第一波纹管51内部的空气进入,之后再次进入至分流管522的内部,分流管522将会对连接管521内部的气体进行分流,使其分两批次进入至气道612的内部,提升后续的限位效果。
如图9所示,按压模块7包括有与活动堆叠框3内壁固定连接的第三波纹管71,第三波纹管71的顶部与拉动模块4的底部抵触连接,第三波纹管71的底部连接有软管72,软管72的底部连接有与限位模块6顶部连接的连接板73,连接板73设置为合页连接,连接板73的顶部固定连接有弧形弹簧伸缩管74,连接板73底部的外端固定连接有按压波纹管75。
采用上述方案:初始状态下,连接板73将会呈现为垂直状态,将芯片放置在限位块611的内部时,翻转连接板73使其呈现水平状,当铰接板42的底部对第三波纹管71按压后,将会使其内部空气通过软管72进入至按压波纹管75,按压波纹管75的扩张将会对芯片的顶部进行向下的按压,提升固定效果。
本发明的工作原理及使用流程:
使用中,当抵触杆22未对活动堆叠框3的内端进行抵触时,此时铰接板42顶部的一端将会向上翘起,与此同时活动堆叠框3的外端将会向外移动,四个限位块611将会呈现为松弛状态,此时工作人员将芯片放置在四个限位块611的内部,活动堆叠框3将会由于第一波纹管51的弹力作用,带动活动堆叠框3逐渐向放置架1的内部活动,此时第一波纹管51将会呈现为逐渐扩展状态,将会通过连接管521和分流管522使得第二波纹管621内部的气体通过气道612进入至分流管522和连接管521的内部,并通过连接管521进入至第一波纹管51的内部,这时四个第二波纹管621内部的气体将会完全被抽取,并通过柔性弹簧622对四个限位块611进行拉动,使得四个限位块611的内壁对芯片进行夹持限位;
与此同时,铰接板42将会对第三波纹管71的顶部进行按压,第三波纹管71内部的空气将会通过软管72进入至按压波纹管75的内部,翻折连接板73使其与限位块611呈现为水平状态,按压波纹管75的底部将会对芯片的顶部进行向下的抵触,进而再次对芯片进行固定,随后对其进行相应的测试使用;
当电动伸缩器21带动抵触杆22向上移动时,抵触杆22的两侧将会对活动堆叠框3的内端进行挤压使其向外移动,拉动绳41将会拉动铰接板42使其一端向上翘起,与此同时拉动绳41解除对第三波纹管71的顶部按压,按压波纹管75将会解除对芯片顶部的按压,与此同时第一波纹管51内部空气将会进入至四个第二波纹管621的内部,使得四个限位块611逐渐充斥向外展开,解除对四个限位块611内部芯片的限位固定作用,即可将测试结束后的芯片向外拿取。
需要说明的是,在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。
尽管已经示出和描述了本发明的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由所附权利要求及其等同物限定。

Claims (10)

1.一种芯片测试用自动堆叠装置,包括放置架(1),其特征在于:所述放置架(1)的内部固定连接有驱动模块(2),所述驱动模块(2)的两侧分别活动连接有与驱动模块(2)抵触连接的活动堆叠框(3),所述活动堆叠框(3)的顶部铰接有拉动模块(4),所述拉动模块(4)的顶部与放置架(1)的外壁固定连接,所述活动堆叠框(3)位于放置架(1)内部一端的顶部固定连接有推动模块(5),所述推动模块(5)的外端固定连接有与活动堆叠框(3)内部连接的限位模块(6),所述限位模块(6)的顶部固定连接有按压模块(7)。
2.根据权利要求1所述的芯片测试用自动堆叠装置,其特征在于:所述驱动模块(2)包括有与放置架(1)的顶部固定连接的电动伸缩器(21),所述电动伸缩器(21)的底部固定连接有与活动堆叠框(3)抵触连接的抵触杆(22)。
3.根据权利要求2所述的芯片测试用自动堆叠装置,其特征在于:所述抵触杆(22)外壁的两侧从上至下等距设置有斜角,且与活动堆叠框(3)内端的底部抵触。
4.根据权利要求1所述的芯片测试用自动堆叠装置,其特征在于:所述拉动模块(4)包括有与放置架(1)固定连接的拉动绳(41),所述拉动绳(41)的底部固定连接有与活动堆叠框(3)顶部铰接的铰接板(42),所述铰接板(42)的底部与按压模块(7)抵触连接。
5.根据权利要求1所述的芯片测试用自动堆叠装置,其特征在于:所述推动模块(5)包括有与活动堆叠框(3)内端顶部连接的第一波纹管(51),所述第一波纹管(51)远离驱动模块(2)的一端连接有连接组件(52),所述连接组件(52)与限位模块(6)相连通。
6.根据权利要求1所述的芯片测试用自动堆叠装置,其特征在于:所述限位模块(6)包括有与活动堆叠框(3)内壁固定连接的抵触弹簧伸缩管(63),所述抵触弹簧伸缩管(63)的内端卡接有限位组件(61),所述限位组件(61)设置有四个,四个所述限位组件(61)均设置在活动堆叠框(3)内壁的四角,相邻两个所述限位组件(61)的中部固定连接有连通组件(62)。
7.根据权利要求6所述的芯片测试用自动堆叠装置,其特征在于:所述限位组件(61)包括有通过抵触弹簧伸缩管(63)与活动堆叠框(3)连接的限位块(611),所述限位块(611)的内部开设有气道(612),所述气道(612)与连接组件(52)相连通,所述限位块(611)的外部与抵触弹簧伸缩管(63)活动卡接。
8.根据权利要求6所述的芯片测试用自动堆叠装置,其特征在于:所述连通组件(62)包括有与相邻两个限位组件(61)中部连接的第二波纹管(621),所述第二波纹管(621)的外壁活动套接有柔性弹簧(622),所述柔性弹簧(622)的两端分别与相邻两个限位块(611)连接。
9.根据权利要求5所述的芯片测试用自动堆叠装置,其特征在于:所述连接组件(52)包括有与第一波纹管(51)固定连接的连接管(521),所述连接管(521)远离第一波纹管(51)的一端固定连接有分流管(522),所述分流管(522)的底端与限位块(611)的内部相连通。
10.根据权利要求1所述的芯片测试用自动堆叠装置,其特征在于:所述按压模块(7)包括有与活动堆叠框(3)内壁固定连接的第三波纹管(71),所述第三波纹管(71)的顶部与拉动模块(4)的底部抵触连接,所述第三波纹管(71)的底部连接有软管(72),所述软管(72)的底部连接有与限位模块(6)顶部连接的连接板(73),所述连接板(73)设置为合页连接,所述连接板(73)的顶部固定连接有弧形弹簧伸缩管(74),所述连接板(73)底部的外端固定连接有按压波纹管(75)。
CN202311220842.3A 2023-09-21 2023-09-21 一种芯片测试用自动堆叠装置 Active CN116978837B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311220842.3A CN116978837B (zh) 2023-09-21 2023-09-21 一种芯片测试用自动堆叠装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311220842.3A CN116978837B (zh) 2023-09-21 2023-09-21 一种芯片测试用自动堆叠装置

Publications (2)

Publication Number Publication Date
CN116978837A true CN116978837A (zh) 2023-10-31
CN116978837B CN116978837B (zh) 2023-11-28

Family

ID=88479903

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311220842.3A Active CN116978837B (zh) 2023-09-21 2023-09-21 一种芯片测试用自动堆叠装置

Country Status (1)

Country Link
CN (1) CN116978837B (zh)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130076384A1 (en) * 2011-09-23 2013-03-28 Powertech Technology, Inc. Method for testing multi-chip stacked packages
CN203377200U (zh) * 2013-07-29 2014-01-01 中芯国际集成电路制造(北京)有限公司 一种芯片封装测试结构
CN111785653A (zh) * 2020-07-03 2020-10-16 珠海欧比特电子有限公司 一种三维立体封装芯片的测试模组
US20220262689A1 (en) * 2019-06-25 2022-08-18 Samsung Electronics Co., Ltd. Chip-stacked semiconductor package and method of manufacturing same
CN217844989U (zh) * 2022-06-01 2022-11-18 湖北德普电气股份有限公司 一种高精度堆叠式电芯膨胀位移测试装置
CN116266543A (zh) * 2021-12-15 2023-06-20 西安紫光国芯半导体有限公司 三维堆叠芯片及其键合测试方法、测试机台

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130076384A1 (en) * 2011-09-23 2013-03-28 Powertech Technology, Inc. Method for testing multi-chip stacked packages
CN203377200U (zh) * 2013-07-29 2014-01-01 中芯国际集成电路制造(北京)有限公司 一种芯片封装测试结构
US20220262689A1 (en) * 2019-06-25 2022-08-18 Samsung Electronics Co., Ltd. Chip-stacked semiconductor package and method of manufacturing same
CN111785653A (zh) * 2020-07-03 2020-10-16 珠海欧比特电子有限公司 一种三维立体封装芯片的测试模组
CN116266543A (zh) * 2021-12-15 2023-06-20 西安紫光国芯半导体有限公司 三维堆叠芯片及其键合测试方法、测试机台
CN217844989U (zh) * 2022-06-01 2022-11-18 湖北德普电气股份有限公司 一种高精度堆叠式电芯膨胀位移测试装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
韩博宇 等: "基于TSV的3D堆叠集成电路测试", 合肥工业大学学报, vol. 37, no. 4, pages 444 - 447 *

Also Published As

Publication number Publication date
CN116978837B (zh) 2023-11-28

Similar Documents

Publication Publication Date Title
CN116978837B (zh) 一种芯片测试用自动堆叠装置
CN219986670U (zh) 一种电芯极耳与转接片焊接工装
CN116381459A (zh) 一种安全浮动式pga芯片测试插座
CN216123015U (zh) 一种拼接式线路板
CN214054949U (zh) 一种铜套加工用固定装置
CN218804583U (zh) 防偏移的胶合板加工用涂胶装置
CN219923549U (zh) 一种用于固化胶的固化设备
CN217890113U (zh) 一种波纹管接头压装机
CN216618939U (zh) 一种用于电炉炼锌的多管道连接结构
CN110639996B (zh) 一种裸电芯顶封前折极耳调试装置及其工作流程
CN221012406U (zh) 一种储物架
CN219227735U (zh) 一种网络通信信号盒
CN215849941U (zh) 一种折袋成型装置
CN213152488U (zh) 一种柔性线路板的折角加工治具
CN211869979U (zh) 一种具有锁定结构的周转箱
CN215619503U (zh) 一种生产波形管成型模具
CN218887256U (zh) 一种电池模组挤压设备
CN210405652U (zh) 一种网布植入治具
CN216849330U (zh) 一种dram测试用工作台
CN218401392U (zh) 一种具有折叠功能的电池架
CN116840513B (zh) 一种电能质量分析仪的辅助测量装置
CN209394223U (zh) 焊接夹具
CN212156740U (zh) 一种具有快速拼装功能的led灯
CN210075391U (zh) 一种组装式手机摄像头模块
CN210318043U (zh) 一种室内桌面式电源组装用外壳粘胶压合装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant