CN116798839A - Sample feeding device of scanning electron microscope and scanning electron microscope - Google Patents
Sample feeding device of scanning electron microscope and scanning electron microscope Download PDFInfo
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- CN116798839A CN116798839A CN202311078144.4A CN202311078144A CN116798839A CN 116798839 A CN116798839 A CN 116798839A CN 202311078144 A CN202311078144 A CN 202311078144A CN 116798839 A CN116798839 A CN 116798839A
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- 238000007789 sealing Methods 0.000 claims abstract description 99
- 238000000605 extraction Methods 0.000 claims abstract description 9
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 238000009434 installation Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 8
- 238000001514 detection method Methods 0.000 description 23
- 238000005070 sampling Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
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- 239000000126 substance Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
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- 238000010894 electron beam technology Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004627 transmission electron microscopy Methods 0.000 description 1
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Abstract
The invention discloses a sample feeding device of a scanning electron microscope and the scanning electron microscope, wherein the sample feeding device of the scanning electron microscope comprises: the device comprises a device main body, wherein an excessive cavity is formed in the device main body, a connecting port and a sample feeding port which are communicated with the excessive cavity are also formed in the device main body, and a shielding plate for selectively closing the connecting port is arranged on the device main body; the air extraction structure is arranged on the device main body and is used for extracting air from the excessive accommodating cavity; the sealing cover is movably arranged at the sample feeding opening and is used for selectively sealing the sample feeding opening; the sample feeding structure comprises a sample feeding part and a sample tray, wherein the sample feeding part movably penetrates through the sealing cover, and one end of the sample feeding part in the excessive accommodating cavity is connected with the sample tray. The sample feeding device of the scanning electron microscope provided by the embodiment of the invention is easy to take and put samples, can realize rapid sample feeding and sample changing, and has a better use effect.
Description
Technical Field
The invention relates to the technical field of scanning electron microscope, in particular to a sample feeding device of a scanning electron microscope and the scanning electron microscope with the sample feeding device of the scanning electron microscope.
Background
Scanning electron microscopy is an observation means between transmission electron microscopy and optical microscopy, which uses a high-energy electron beam focused to a very narrow range to scan a sample, and excites various physical information through the interaction between the beam and a substance, so as to collect, amplify and re-image the information, thereby achieving the purpose of representing the microscopic morphology of the substance. The scanning electron microscope and other analysis instruments are combined, so that the micro-region component analysis of the substance can be performed while the micro-morphology is observed. Meanwhile, the scanning electron microscope is widely applied to researches on rock soil, graphite, ceramics, nano materials and the like, so that the scanning electron microscope has a great effect in the scientific research field. The existing scanning electron microscope is troublesome in the process of conveying samples into the scanning electron microscope for detection, and the detection efficiency is low.
In addition, when carrying the sample to scanning electron microscope inside, easily lead to external atmosphere to enter into scanning electron microscope equipment inside, make the impurity in the air enter into scanning electron microscope, cause serious pollution, in particular, when taking out the sample, need open scanning electron microscope, because inside is the vacuum state, in the moment of opening, external atmosphere strong air current directly enters into scanning electron microscope inside, very easily blow off powdered sample, liquid form sample etc. to fall into scanning electron microscope inside each corner, lead to scanning electron microscope inside environmental pollution, bring serious influence for subsequent sample scanning, reduce the accuracy and the reliability of subsequent sample scanning effect.
Disclosure of Invention
The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, an object of the present invention is to provide a sample feeding device of a scanning electron microscope, which is easy to collect and sample, can realize rapid sample feeding and sample changing, improve detection efficiency, save detection cost, and can not cause the external atmospheric impurities to enter the scanning electron microscope during the sampling and sample changing process, and can not generate external atmospheric air flow to blow off samples, so that the phenomenon that the internal environment of the scanning electron microscope is polluted by the samples occurs, and the accuracy and reliability of the scanning result of the subsequent samples are ensured.
According to the embodiment of the invention, the sample feeding device of the scanning electron microscope comprises: the device comprises a device main body, wherein an excessive cavity is formed in the device main body, a connecting port and a sample feeding port are also arranged in the device main body, the connecting port is communicated with the excessive cavity and is used for being connected with an installation port of a scanning electron microscope, and a shielding plate for selectively closing the connecting port is arranged on the device main body; the air extraction structure is arranged on the device main body and is used for extracting air from the excessive accommodating cavity; the sealing cover is movably arranged at the sample feeding opening and is used for selectively sealing the sample feeding opening; the sample feeding structure comprises a sample feeding part and a sample tray, wherein the sample feeding part movably penetrates through the sealing cover, the sample feeding part is positioned at one end in the excessive accommodating cavity and connected with the sample tray, the sample feeding part is used for selectively feeding the sample tray into the scanning electron microscope, and the connecting ports and the sample feeding ports are respectively arranged at two sides of the excessive accommodating cavity and are opposite to each other along the moving direction of the sample feeding part.
According to the sample feeding device of the scanning electron microscope, disclosed by the embodiment of the invention, the sample is easy to take and put, the rapid sample feeding and sample changing can be realized, the consistency of the internal pressure of the scanning electron microscope and the stability of the sample position during detection are ensured, the detection efficiency is improved, the detection cost is saved, the application effect is better, the application range is wider, and in the sampling and sample feeding processes, the connecting port can be selectively closed through the shielding plate, so that the internal part of the scanning electron microscope is always in a vacuum state, and the accuracy and the reliability of a detection result are improved.
When the sample is sent, the shielding plate is closed, the sample is sent into the sample sending device, the sample sending device is vacuumized, the pressure intensity in the sample sending device is consistent with the pressure intensity in the scanning electron microscope, the shielding plate is opened, the sample is sent into the scanning electron microscope, the air is prevented from entering the scanning electron microscope, the scanning electron microscope is prevented from being polluted, the inner cavity of the sample sending device and the inner cavity of the scanning electron microscope cannot generate air flow, the sample is prevented from scattering, and the sample is prevented from polluting the inner cavity of the scanning electron microscope.
When sampling, remove the sample to the sample device in, can seal the connector through the shielding plate, make sample device inner chamber and scanning electron microscope inner chamber isolated, carry out the pressurization to sample device inner chamber again, send into air promptly, make the inside pressure of sample device and external atmospheric pressure unanimous, in the actual operation process, if send into air, lead to the sample of sample device inner chamber to scatter, pollute sample device inner chamber, can carry out cleaning treatment to sample device afterwards, carry out the scanning of next sample again, also accessible sets up buffer device, will external atmosphere slowly send into sample device in, avoid the sample to be blown away by the air current, avoid sample pollution in the sample device, send into the air and reach and be unanimous with external atmospheric pressure after, open sample device, take out the sample, change new sample waiting to detect can, carry out above-mentioned sample flow and sampling flow again.
According to the sample feeding device of the scanning electron microscope, according to some embodiments of the present invention, the sealing cover is provided with a first guide rod, one end of the first guide rod is connected with the sealing cover, the other end of the first guide rod is movably arranged through the device main body, and the moving direction of the first guide rod is the same as the moving direction of the sample feeding portion.
According to the sample feeding device of the scanning electron microscope, at least two first guide rods are arranged, and the at least two first guide rods are connected with the sealing cover in parallel at intervals.
The sample feeding device of the scanning electron microscope according to some embodiments of the present invention further comprises: the driving piece is arranged on the device main body, and the output end of the driving piece is connected with the shielding plate and used for driving the shielding plate to open or close the connecting port.
According to the sample feeding device of the scanning electron microscope, the driving piece is configured to drive the air cylinder, the device main body is provided with the movable groove, the movable groove is communicated with the lower part of the connecting port, the shielding plate is movably arranged in the movable groove, and the output end of the driving air cylinder is connected with the lower end of the shielding plate to drive the shielding plate to lift.
According to the sample feeding device of the scanning electron microscope, a first sealing ring for elastic sealing is arranged at the joint of the connecting port and the mounting port;
and/or a second sealing ring for elastic sealing is arranged at the joint of the sealing cover and the sample feeding port.
According to the sample feeding device of the scanning electron microscope, the sample feeding part comprises a bearing table, a connecting table and a sample feeding rod, the sample feeding rod penetrates through the sealing cover, one end of the sample feeding rod is connected with the connecting table, the sample tray is supported on the connecting table, the bearing table is suitable for being installed in the scanning electron microscope, and the connecting table is suitable for being in plug-in fit with the bearing table when extending into the scanning electron microscope.
According to the sample feeding device of the scanning electron microscope of some embodiments of the present invention, one of the bearing table and the linking table is provided with a clamping groove, and the other is provided with a movable lifting table, the lifting table is provided with a clamping portion, the clamping portion is suitable for the clamping groove to be in plug-in fit, the lifting table is connected with an elastic component, and the elastic component is used for applying an elastic force to the clamping portion, wherein the elastic force is pressed towards the inner wall of the clamping groove.
According to some embodiments of the invention, the sample feeding part further comprises a clamping assembly, the clamping assembly is connected with one end of the sample feeding rod, which is located in the excessive accommodating cavity, and the clamping assembly is used for clamping the engagement platform.
According to the sample feeding device of the scanning electron microscope, the sealing cover is provided with the penetrating hole, the airtight sealing piece is arranged at the penetrating hole, and the sample feeding rod penetrates through the airtight sealing piece.
The invention also provides a scanning electron microscope.
According to the scanning electron microscope of the embodiment of the invention, the sample feeding device of the scanning electron microscope is arranged.
The scanning electron microscope and the sample feeding device of the scanning electron microscope have the same advantages compared with the prior art, and are not described in detail herein.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The foregoing and/or additional aspects and advantages of the invention will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:
FIG. 1 is a schematic diagram of a sample feeder of a scanning electron microscope according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a sample feeder of a scanning electron microscope according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a sample feeding structure of a sample feeding device of a scanning electron microscope according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a sample feeding structure of a sample feeding device of a scanning electron microscope according to an embodiment of the present invention.
Reference numerals:
the sample presentation apparatus 100 of the scanning electron microscope,
the excessive cavity 11, the observation window 111, the connection port 12, the first sealing ring 121, the sample feeding port 13, the second sealing ring 131, the air extraction structure 14, the sealing cover 15, the first guide rod 151, the airtight sealing piece 152, the driving cylinder 16, the adjusting device 17,
the sample feeding device comprises a sample feeding structure 18, a sample tray 181, a carrying platform 182, a clamping groove 1821, a connecting platform 183, a clamping part 1831, an elastic component 1832, a sample feeding rod 184 and a clamping component 185.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the invention.
The following describes a sample feeding device 100 of a scanning electron microscope according to an embodiment of the present invention with reference to fig. 1 to 4, which is easy to take and sample, and can realize rapid sample feeding and sample changing, improve detection efficiency, save detection cost, and in the process of sampling and sample changing, no external atmospheric impurities enter the scanning electron microscope, no external atmospheric air flow is generated to blow off the sample, the internal environment of the scanning electron microscope is polluted by the sample, and the accuracy and reliability of the scanning result of the subsequent sample are ensured.
As shown in fig. 1 to 4, a sample presentation device 100 of a scanning electron microscope according to an embodiment of the present invention includes: the device comprises a device main body, an air extraction structure 14, a sealing cover 15 and a sample delivery structure 18.
The device is characterized in that an excessive cavity 11 is formed in the device body, the device body is further provided with a connecting port 12 and a sample feeding port 13 which are communicated with the excessive cavity 11, the connecting port 12 is used for being connected with a mounting port of the scanning electron microscope, a shielding plate for selectively sealing the connecting port 12 is arranged on the device body, an air suction structure 14 is arranged on the device body and used for sucking air of the excessive cavity 11, a sealing cover 15 is movably arranged at the sample feeding port 13 and used for selectively sealing the sample feeding port 13, the sample feeding structure 18 comprises a sample feeding part and a sample tray 181, the sample feeding part movably penetrates through the sealing cover 15, one end of the sample feeding part, which is positioned in the excessive cavity 11, is connected with the sample tray 181, the sample feeding part is used for selectively feeding the sample tray 181 into the scanning electron microscope, and the connecting port 12 and the sample feeding port 13 are respectively arranged at two sides of the excessive cavity 11 and are opposite to each other along the moving direction of the sample feeding part.
Specifically, in this embodiment, the device body is rectangular and is internally provided with an excessive cavity 11, a circular observation window 111 is disposed on the upper surface of the excessive cavity 11, so that the situation of a sample can be observed from the outside of the device body, the excessive cavity 11 is communicated with a connection port 12 and a sample delivery port 13, the connection port 12 and the sample delivery port 13 are respectively disposed at two sides of the excessive cavity 11 and are opposite to each other along the moving direction of the sample delivery portion, so that the sample can pass through the connection port 12 and the sample delivery port 13 along a straight line path respectively, the connection port 12 is provided with a plurality of cylindrical plug structures, the plug structures are used for being connected with the mounting port of the scanning electron microscope in an inserting manner, a shielding plate is further installed on the device body, the shielding plate is used for selectively sealing the connection port 12, a suction structure 14 is disposed on one side of the device body, the suction structure 14 is communicated with the inside of the excessive cavity 11, the excessive cavity 11 can suction the sample delivery port 13 is mounted at the sample delivery port 13 with a sealing cover 15 which is movably connected with the sealing cover 15, the sealing cover 15 is used for selectively sealing the sample delivery port 13, the shape of the sample delivery port 13 is matched with the shape of the sealing cover 15, and the sealing cover 15 is movably arranged in the shape of the sealing cover 15, and the sealing cover is movably arranged in the sample tray for selectively feeding the sample into the scanning electron microscope.
When the scanning electron microscope needs to replace a sample, the sample on the sample tray 181 is taken to the excessive cavity 11 through the sample conveying structure 18, the connecting port 12 is closed through the shielding plate, the inside of the scanning electron microscope is isolated from the inside of the excessive cavity 11, so that the air pressure inside the scanning electron microscope is kept unchanged, after the shielding plate closes the connecting port 12, the sealing cover 15 is opened, the sample placed on the sample tray 181 is taken out of the excessive cavity 11 through the sample conveying structure 18, the sample is replaced, the sample can be conveyed into the excessive cavity 11 again through the sample conveying structure 18 after the sample replacement is completed, the sealing cover 15 is moved to the sample conveying port 13 to seal the sample conveying port 13 at the moment, the air in the excessive cavity 11 is pumped out through the air pumping structure 14 after the sealing is completed, the shielding plate is opened after the pressure in the excessive cavity 11 is consistent with the pressure inside the scanning electron microscope, and the sample is conveyed into the scanning electron microscope through the sample conveying structure 18, and the sample replacement is completed.
Thus, by providing the shielding plate at the connection port 12, the connection port 12 can be selectively closed by the shielding plate. That is, before sample feeding, the shielding plate is used for sealing the connecting port 12 so as to ensure that the inside of the scanning electron microscope is in a vacuum state, at the moment, the inside of the excessive accommodating cavity 11 is inflated for sample input, but impurities in the excessive accommodating cavity 11 cannot be flushed into the scanning electron microscope due to the fact that the air pressure in the excessive accommodating cavity 11 is large, and the environment in the scanning electron microscope can be ensured to be in a safe and reliable state.
According to the sample feeding device 100 of the scanning electron microscope provided by the embodiment of the invention, a sample is easy to take and put, quick sample feeding and sample changing can be realized, the consistency of the internal pressure of the scanning electron microscope and the stability of the sample position during detection are ensured, the detection efficiency is improved, the detection cost is saved, the application effect is better, the application range is wider, and in the sampling and sample feeding processes, the connecting port can be selectively closed through the shielding plate, so that the internal part of the scanning electron microscope is always in a vacuum state, and the accuracy and the reliability of a detection result are improved.
When the sample is sent, the shielding plate is closed, the sample is sent into the sample sending device, the sample sending device is vacuumized, the pressure intensity in the sample sending device is consistent with the pressure intensity in the scanning electron microscope, the shielding plate is opened, the sample is sent into the scanning electron microscope, the air is prevented from entering the scanning electron microscope, the scanning electron microscope is prevented from being polluted, the inner cavity of the sample sending device and the inner cavity of the scanning electron microscope cannot generate air flow, the sample is prevented from scattering, and the sample is prevented from polluting the inner cavity of the scanning electron microscope.
When sampling, remove the sample to the sample device in, can seal the connector through the shielding plate, make sample device inner chamber and scanning electron microscope inner chamber isolated, carry out the pressurization to sample device inner chamber again, send into air promptly, make the inside pressure of sample device and external atmospheric pressure unanimous, in the actual operation process, if send into air, lead to the sample of sample device inner chamber to scatter, pollute sample device inner chamber, can carry out cleaning treatment to sample device afterwards, carry out the scanning of next sample again, also accessible sets up buffer device, will external atmosphere slowly send into sample device in, avoid the sample to be blown away by the air current, avoid sample pollution in the sample device, send into the air and reach and be unanimous with external atmospheric pressure after, open sample device, take out the sample, change new sample waiting to detect can, carry out above-mentioned sample flow and sampling flow again.
In some embodiments, as shown in fig. 1, the sealing cover 15 is provided with a first guide rod 151, one end of the first guide rod 151 is connected with the sealing cover 15, and the other end of the first guide rod 151 is movably penetrating through the device main body, and the moving direction of the first guide rod 151 is the same as the moving direction of the sample feeding portion, so that the sealing cover 15 is connected with the device main body by arranging the first guide rod 151, and the sealing cover 15 can be close to or far from the device main body when moving relative to the device main body through the first guide rod 151, so as to selectively close the sample feeding port 13.
Specifically, when the sample needs to be taken out of the scanning electron microscope, the sample feeding structure 18 takes the sample out of the excessive cavity 11, after the shielding plate seals the connection port 12, the sealing cover 15 is opened, the sealing cover 15 moves away from the sample feeding port 13 through the first guide rod 151, when the sample needs to be fed into the scanning electron microscope, the sample feeding structure 18 feeds the sample into the excessive cavity 11, the sealing cover 15 is closed, the sealing cover 15 moves towards the direction close to the sample feeding port 13 through the first guide rod 151 until the sample feeding port 13 is sealed, the pressure in the excessive cavity 11 is consistent with the pressure in the scanning electron microscope through the air extraction structure 14, and the shielding plate is opened to feed the sample into the scanning electron microscope.
Wherein, the moving direction of the first guide rod 151 is the same as the moving direction of the sample feeding portion, and the movable distance of the sealing cover 15 depends on the length of the first guide rod 151, and moving the sealing cover 15 through the first guide rod 151 fixes the moving track of the sealing cover 15, and simultaneously, the sealing cover 15 can be aligned more easily when sealing the sample feeding port 13, thereby improving the use efficiency.
In some embodiments, the number of the first guide rods 151 is at least two, and the at least two first guide rods 151 are connected to the sealing cover 15 in parallel at intervals, in this embodiment, the number of the guide rods is two, and the two first guide rods 151 are respectively connected to the plane of the sealing cover 15 facing the sample feeding port 13, and the two first guide rods 151 are arranged in parallel on the two opposite sides of the plane of the sealing cover 15 facing the sample feeding port 13, so that the connection between the first guide rods 151 and the sealing cover 15 is firmer, the deformation is not easy to occur, the sealing cover 15 is smoother in moving, and a first guide rod 151 mounting structure is arranged at the corresponding position of the sample feeding port 13, a space for placing the first guide rods 151 is formed inside the structure, and when the sealing cover 15 is connected with the sample feeding port 13, the first guide rods 151 are all placed in the structure, and the structure is not communicated with the inside the excessive accommodating cavity 11, so that the tightness of the excessive accommodating cavity 11 is ensured.
In some embodiments, the sample presentation device 100 of the scanning electron microscope further comprises: a driving member.
The driving piece is installed in the device main part, and in this embodiment, the driving piece is located the device main part below, the output of driving piece links to each other with the shielding plate and is used for driving shielding plate to open or seal connector 12, after the sample is taken out to excessive appearance chamber 11 from scanning electron microscope, the driving piece drives shielding plate and seals connector 12, and then open sealed lid 15 and take out the sample, and send into excessive appearance intracavity 11 and sealed lid 15 and seal and send out appearance mouth 13 when the sample, after the gas in the excessive appearance intracavity 11 was taken out by air extraction structure 14 simultaneously, the driving piece drives shielding plate and opens connector 12, make the sample can send into the inside detection of scanning electron microscope, the atmospheric pressure in the scanning electron microscope has been guaranteed to remain unchanged, simultaneously open or seal connector 12 through the driving piece can practice thrift the manpower, improve detection efficiency.
In some embodiments, the driving member is configured to drive the air cylinder 16, the device body is provided with a movable slot, the movable slot is communicated below the connection port 12, and the shielding plate is movably installed in the movable slot, the output end of the driving air cylinder 16 is connected with the lower end of the shielding plate to drive the shielding plate to lift, the movable slot is matched with the shielding plate, the shielding plate is placed in the movable slot, and the traveling path of the shielding plate can be restrained through the inner wall of the movable slot, so that the shielding plate can lift according to a required path, and the shielding plate can be ensured to completely seal the connection port 12.
In some embodiments, the connection between the connection port 12 and the mounting port is provided with a first sealing ring 121 for elastic sealing, and/or the connection between the sealing cover 15 and the sample feeding port 13 is provided with a second sealing ring 131 for elastic sealing.
As shown in fig. 1-2, in this embodiment, the first sealing ring 121 is disposed at the connection port 12, and the second sealing ring 131 is disposed at the sample delivery port 13, or the first sealing ring 121 may be disposed only at the connection port 12 or the second sealing ring 131 may be disposed only at the sample delivery port 13, so that the connection port 12 and the mounting port are tightly contacted by the first sealing ring 121, preventing the gas entering the scanning electron microscope from disturbing the detection environment, and meanwhile, buffering, vibration-proof and loosening-proof effects may be achieved on the connection between the connection port 12 and the mounting port, ensuring the connection stability, and meanwhile, the disposition of the second sealing ring 131 may also enable the contact between the sealing cover 15 and the sample delivery port 13 to be tighter, ensuring that the air extraction structure 14 is in a sealing state after the excessive cavity 11 has extracted gas, and meanwhile, buffering, vibration-proof and loosening-proof effects may be achieved on the connection between the sealing cover 15 and the sample delivery port 13, reducing the abrasion of components, and prolonging the service life.
In some embodiments, as shown in fig. 3-4, the sample feeding portion includes a bearing platform 182, a linking platform 183 and a sample feeding rod 184, the sample feeding rod 184 is penetrating through the sealing cover 15, one end of the sample feeding rod 184 is connected with the linking platform 183, the other end is connected with the adjusting device 17, the sample tray 181 is supported on the linking platform 183, the bearing platform 182 is suitable for being installed in the scanning electron microscope, the linking platform 183 is suitable for being in plug-in fit with the bearing platform 182 when extending into the scanning electron microscope, the linking platform 183 and the sample tray 181 can be pushed into the scanning electron microscope by the connection mode, so that the locking can be completed by plug-in fit between the linking platform 183 and the bearing platform 182, the sample can be conveniently taken out and fed in during sample feeding and sample changing, and the connection fixation can be improved. The connection block 183 and the sample tray 181 may be connected by a bolt, or may be connected by welding, adhesion, magnetic attraction, or the like, and is not limited thereto.
In some embodiments, as shown in fig. 3-4, one of the bearing platform 182 and the engagement platform 183 is provided with a clamping groove 1821 and the other is provided with a movable lifting platform, in this embodiment, the bearing platform 182 is provided with a movable lifting platform, the engagement platform 183 is provided with a clamping groove 1821, the lifting platform is provided with a clamping part 1831, the clamping part 1831 is suitable for the clamping groove 1821 to be in plug-fit, the lifting platform is connected with an elastic component 1832, and the elastic component 1832 is used for applying an elastic force pressed towards the inner wall of the clamping groove 1821 to the clamping part 1831.
Specifically, the bearing platform 182 is suitable for being installed at the bottom of the electron microscope, the bearing platform 182 is provided with a movable lifting platform, the lifting platform comprises a clamping portion 1831, the connecting platform 183 is provided with a clamping groove 1821, the clamping portion 1831 is suitable for being slidably clamped into the clamping groove 1821, the connecting platform 183 is used for installing the sample tray 181, and the elastic component 1832 is connected with the main body of the bearing platform 182 and is used for applying elastic force for tightly attaching the clamping portion 1831 and the clamping groove 1821. In actual operation, the engagement groove 1821 of the engagement block 183 is placed at the position of the engagement groove 1831, and then when the engagement groove 1821 contacts with the engagement groove 1831, the elastic component 1832 on the main body of the bearing platform 182 connected with the engagement groove 1831 applies an elastic pre-tightening force to the engagement groove 1831, and the engagement groove 1831 moves in a direction approaching to the engagement groove 1821, so as to connect the engagement groove 1821 with the engagement groove 1831, and further connect the bearing platform 182 with the engagement block 183. The connection mode is convenient for the installation between the bearing table 182 and the connection table 183, is also convenient for use after installation, and can directly push the connection table 183 and the sample tray 181 into the scanning electron microscope, so that the clamping groove 1821 of the connection table 183 and the clamping part 1831 of the bearing table 182 are combined, the locking can be completed, and the connection fixity is improved.
In some embodiments, as shown in fig. 3, the sample feeding portion further includes a clamping component 185, the clamping component 185 is connected to one end of the sample feeding rod 184 located in the excessive accommodating cavity 11, the clamping component 185 is used for clamping the adapter platform 183, the clamping component 185 is provided with a mounting frame, one side of the mounting frame is connected with the sample feeding rod 184, the other side of the mounting frame is rotationally connected with two clamping jaws symmetrical to each other, the two clamping jaws are arranged on two opposite sides of the same plane of the mounting frame in parallel, a spring is arranged between the two clamping jaws and is used for providing clamping force for the clamping jaws, an inclined surface blocking block matched with the adapter platform 183 is arranged at one end of the clamping jaw far away from the mounting frame, so that the clamping component 185 is positioned more accurately when the adapter platform 183 is assembled, meanwhile, a groove-shaped structure capable of being buckled with the adapter platform 183 is further arranged at the middle position of the clamping jaw, various assembling modes are provided when the clamping component 185 is assembled with the adapter platform 183, and a blocking block is further arranged at the position of the clamping jaw near the spring, so that the clamping component 185 reaches the spring to prevent the position of the adapter platform 183 from damaging the spring when the clamping component 185 is assembled with the adapter platform 183, the sample feeding rod 184 and the sample unloading tray 181 are connected through the clamping component 185 and the adapter platform 183, so that the sample unloading tray 181 can be convenient to improve flexibility.
In some embodiments, as shown in fig. 1, the sealing cover 15 is provided with a through hole, the through hole is provided with an airtight sealing element 152, the sample feeding rod 184 is penetrated through the airtight sealing element 152, and because the sample is to be fed into the scanning electron microscope for detection through the structures of the excessive cavity 11, the shielding plate and the like, the sample feeding rod 184 needs to be long enough, and the sample position still needs to be controlled from the outside of the device body after the sealing cover 15 is connected with the sample feeding port 13, so the sample feeding rod 184 is penetrated in the through hole provided on the sealing cover 15, and the through hole is provided with the airtight sealing element 152, and the airtight sealing element 152 can ensure the tightness in the excessive cavity 11 after the sealing cover 15 is connected with the sample feeding port 13 while the sample feeding rod 184 is movable relative to the sealing cover 15, so that the device cannot be leaked, and the test result is affected.
In some embodiments, as shown in fig. 1, the connection port 12 and the sample feeding port 13 are respectively opened at two ends of the device main body, the connection port 12 is connected with the mounting port of the scanning electron microscope, the sample feeding port 13 is connected with the sealing cover 15, a sample enters the excessive cavity 11 through the sample feeding port 13, after air extraction is completed, the sample enters the scanning electron microscope through the connection port 12, the device main body is set to be cuboid, the connection port 12 and the sample feeding port 13 are respectively arranged at two ends of the device main body, the sample can directly enter the scanning electron microscope after passing through the sample feeding port 13 and the connection port 12, the sample travelling route is ensured to be shortest, rapid sample feeding and sample changing are realized, and the detection efficiency is improved.
The invention also provides a scanning electron microscope.
According to the scanning electron microscope of the embodiment of the present invention, the sample presentation device 100 of the scanning electron microscope of any one of the above is provided.
According to the scanning electron microscope provided by the embodiment of the invention, the sample feeding device 100 of the scanning electron microscope is arranged, so that the sample feeding device is easy to take and put samples, quick sample feeding and sample changing can be realized, the consistency of the internal pressure of the scanning electron microscope and the stability of the sample position during detection are ensured, the detection efficiency is improved, the detection cost is saved, the use effect is better, the application range is wider, in the sampling and sample feeding process, the connecting port can be selectively closed through the shielding plate, the internal part of the scanning electron microscope is always in a vacuum state, and the accuracy and the reliability of the detection result are improved.
1. In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
2. In the description of the invention, a "first feature" or "second feature" may include one or more of such features.
3. In the description of the present invention, "plurality" means two or more.
4. In the description of the invention, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, and may also include the first and second features not being in direct contact but being in contact with each other by another feature therebetween.
5. In the description of the invention, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature.
In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the invention, the scope of which is defined by the claims and their equivalents.
Claims (11)
1. A sample presentation device for a scanning electron microscope, comprising:
the device comprises a device main body, wherein an excessive cavity is formed in the device main body, a connecting port and a sample feeding port are also arranged in the device main body, the connecting port is communicated with the excessive cavity and is used for being connected with an installation port of a scanning electron microscope, and a shielding plate for selectively closing the connecting port is arranged on the device main body;
the air extraction structure is arranged on the device main body and is used for extracting air from the excessive accommodating cavity;
the sealing cover is movably arranged at the sample feeding opening and is used for selectively sealing the sample feeding opening;
the sample feeding structure comprises a sample feeding part and a sample tray, wherein the sample feeding part movably penetrates through the sealing cover, the sample feeding part is positioned at one end in the excessive accommodating cavity and connected with the sample tray, the sample feeding part is used for selectively feeding the sample tray into the scanning electron microscope, and the connecting ports and the sample feeding ports are respectively arranged at two sides of the excessive accommodating cavity and are opposite to each other along the moving direction of the sample feeding part.
2. The sample feeder of scanning electron microscope according to claim 1, wherein the sealing cover is provided with a first guide rod, one end of the first guide rod is connected with the sealing cover, the other end of the first guide rod movably penetrates through the main body of the device, and the moving direction of the first guide rod is the same as the moving direction of the sample feeder.
3. The sample presentation device of claim 2, wherein the number of first guide bars is at least two, and at least two of the first guide bars are connected to the sealing cover in parallel at a distance.
4. The sample presentation device of a scanning electron microscope of claim 1, further comprising: the driving piece is arranged on the device main body, and the output end of the driving piece is connected with the shielding plate and used for driving the shielding plate to open or close the connecting port.
5. The sample feeder of scanning electron microscope according to claim 4, wherein the driving member is configured as a driving cylinder, the device body is provided with a movable groove, the movable groove is communicated with the lower part of the connection port, the shielding plate is movably installed in the movable groove, and the output end of the driving cylinder is connected with the lower end of the shielding plate to drive the shielding plate to lift.
6. The sample feeder of scanning electron microscope according to claim 1, wherein a first sealing ring for elastic sealing is arranged at the joint of the connecting port and the mounting port;
and/or a second sealing ring for elastic sealing is arranged at the joint of the sealing cover and the sample feeding port.
7. The sample feeding device of a scanning electron microscope according to claim 1, wherein the sample feeding part comprises a bearing table, a connecting table and a sample feeding rod, the sample feeding rod is arranged in the sealing cover in a penetrating mode, one end of the sample feeding rod is connected with the connecting table, the sample tray is supported on the connecting table, the bearing table is suitable for being installed in the scanning electron microscope, and the connecting table is suitable for being in plug-in fit with the bearing table when extending into the scanning electron microscope.
8. The sample presentation device of claim 7, wherein one of the loading table and the engagement table is provided with a clamping groove and the other one is provided with a movable lifting table, the lifting table is provided with a clamping portion, the clamping portion is suitable for the clamping groove to be in plug-in fit, the lifting table is connected with an elastic component, and the elastic component is used for applying an elastic force to the clamping portion, wherein the elastic force is pressed towards the inner wall of the clamping groove.
9. The scanning electron microscope sample feeding apparatus according to claim 7, wherein the sample feeding portion further comprises a clamping assembly connected to an end of the sample feeding rod located in the excessive cavity, the clamping assembly being configured to clamp the engagement stage.
10. The sample presentation device of claim 7, wherein the sealing cover has a hole therethrough, an airtight sealing member is disposed at the hole therethrough, and the sample presentation rod is disposed through the airtight sealing member.
11. A scanning electron microscope, characterized in that a sample feeding device of the scanning electron microscope according to any one of claims 1 to 10 is provided.
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| CN202311078144.4A CN116798839B (en) | 2023-08-25 | 2023-08-25 | Sample feeding device of scanning electron microscope and scanning electron microscope |
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| CN202311078144.4A CN116798839B (en) | 2023-08-25 | 2023-08-25 | Sample feeding device of scanning electron microscope and scanning electron microscope |
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| CN116798839B CN116798839B (en) | 2023-11-07 |
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| CN116798839B (en) | 2023-11-07 |
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Address after: 230088 floor 1-4, zone a, building E2, phase II, innovation industrial park, No. 2800, innovation Avenue, high tech Zone, Hefei, Anhui Province Patentee after: Guoyi Quantum Technology (Hefei) Co.,Ltd. Address before: 230088 floor 1-4, zone a, building E2, phase II, innovation industrial park, No. 2800, innovation Avenue, high tech Zone, Hefei, Anhui Province Patentee before: Guoyi Quantum (Hefei) Technology Co.,Ltd. |
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