CN212387290U

CN212387290U - Self-driven sample vacuum transfer device

Info

Publication number: CN212387290U
Application number: CN202021236768.6U
Authority: CN
Inventors: 张小波; 常正凯; 闻益
Original assignee: Shenzhen Supro Instruments Co ltd
Current assignee: Shenzhen Supro Instruments Co ltd
Priority date: 2020-06-30
Filing date: 2020-06-30
Publication date: 2021-01-22
Anticipated expiration: 2030-06-30

Abstract

The present application relates to a self-driven sample vacuum transfer device; the sample holder is detachably arranged on the bracket part; the vacuum sealing valve body is respectively communicated with the chamber and the air tap of the vacuum sealing valve; the cover plate is in contact with the box body to seal the cavity and the bracket part is positioned in the cavity when the elastic part is in a certain compression state; the elastic piece is in a free state, and the sample holder is positioned outside the box body. The pressure formed by the vacuum environment is utilized skillfully, the sample can be driven automatically when the internal and external gas pressure difference reaches a certain condition, so that the next step of operation can be performed, the electric drive is not involved completely during use, the reduction of the volume of the sample processing equipment beyond expectation is facilitated, the sample processing equipment is particularly suitable for sample processing equipment with compact volume, most of sample preparation and characterization platforms are compatible, the problem that the cost of sample pretreatment is high due to the fact that the existing related system is complex in structure and low in universality is solved, and the universality of cross-platform lossless transfer of sensitive samples is facilitated to be improved.

Description

Self-driven sample vacuum transfer device

Technical Field

The present application relates to the field of sample transfer, and in particular to a self-driven sample vacuum transfer device.

Background

Glove boxes, scanning electron microscopes and micro-nano processing systems have been widely used in the fields of traditional materials, advanced new materials, semiconductor materials, nano materials, catalytic materials and the like. The method realizes direct fine processing and high-resolution characterization of magnetic materials, low-dielectric-coefficient materials, biomedical materials, polymer composite materials and ceramic materials, and has great potential in the fields of new materials, environment, energy, chemistry and the like. In particular applications, however, some samples are at risk of contamination or oxidation by air or moisture during preparation, storage and transfer. In order to avoid the problem that air or water vapor sensitive materials are polluted or oxidized in the preparation, storage and transfer processes, the whole process needs to be in a dry protective atmosphere or vacuum environment. The sample vacuum transfer system is undoubtedly a key technology to solve the problem. The existing sample vacuum transfer technology generally uses an external or internal electric driving device, such as a commercialized vacuum transfer device product of kammrat-Weiss, germany, and integrates a motor, a control device and a guiding device with a vacuum system, so as to drive and control the opening and closing of a box cover of the vacuum system.

Chinese patent with publication number CN110514685A of the university of the chinese and western sciences discloses a carrier for testing of in-situ scanning electron microscope, which comprises a cabin body, a first sealing ring, a carrier, a cover plate, a string, an air exhaust part, a sealing cover, a battery, a controller and a motor, wherein the carrier is installed in the cabin body, a sample is put on the carrier, the cover plate and the air exhaust part can carry out vacuum sealing on the space where the sample is located, and the remote controller is used for controlling the opening of the cover plate. The cover plate is opened at a controllable time, so that the cover plate can be opened after the vacuum in the electron microscope sample chamber is achieved, the sample is prevented from being polluted, the vacuum in-situ test of the sample is realized in the electron microscope, and the cover plate can be opened remotely under any vacuum degree in the electron microscope sample chamber, so that the sample is exposed in a specific atmospheric pressure environment, and observation tests under certain specific environments are completed. Chinese patent publication No. CN110726746A of the institute of metal of the chinese academy of sciences discloses a sample sealing and vacuum transfer device for cross-platform connection of electron microscopy or micro-nano laser processing systems. The device includes: the device comprises a rectangular airtight flange used for connecting the side wall of a vacuum sample chamber of an electron microscope or a vacuum cavity of a laser processing system, a vacuum seal transfer box used for packaging a test sample, a high-precision support and clamp structure used for realizing the connection of the sample and the electron microscope or the micro-nano laser processing system, a mechanical arm unlocking mechanism used for controlling the vacuum seal transfer box, a vacuum transition bin used for placing and replacing the vacuum seal transfer box, an observation window used for determining the opening state of the vacuum seal transfer box and a bin gate used for observing the opening state. The invention can be widely applied to cross-platform connection and vacuum transfer of various types of scanning electron microscopes, electron beam and ion beam double-beam electron microscopes or micro-nano laser processing systems to form a systematic sample assembling, protecting, transferring and feeding device. However, both of the above patents employ an electric drive device with external or internal components.

Although the existing electric drive type vacuum transferring device can realize the storage and transfer functions of sensitive samples, the following problems exist in the specific using process: (1) the electric drive type vacuum transfer device is integrated with a motor, a guide device and other parts, so that the electric drive type vacuum transfer device is generally large in size, and can not bear a vacuum transfer device with the size for some scanning electron microscopes with compact size, such as a table-type scanning electron microscope; (2) in order to realize electric drive and control, corresponding electric control interfaces provided by a glove box, a scanning electron microscope and a micro-nano processing system are needed to be connected with the internal and external electric power, the compatibility problems of interfaces with different specifications are involved, the complexity and the cost of the system are increased invisibly, and the threshold of cross-platform transfer use is improved.

SUMMERY OF THE UTILITY MODEL

Based on this, there is a need for a self-driven sample vacuum transfer device.

A self-driven sample vacuum transfer device comprising a vacuum cartridge; the vacuum box comprises a box body, a self-driven sample ejecting table, a vacuum sealing valve body, a vacuum sealing valve nozzle and a sample holder; the self-driven ejected sample stage is provided with a cover plate, a bracket part and an elastic part which are sequentially connected, one end of the elastic part is fixed in the box body, the other end of the elastic part is movably abutted against the bracket part, and the sample holder is detachably arranged on the bracket part; a chamber is arranged in the box body, the vacuum sealing valve body is respectively communicated with the chamber and the vacuum sealing valve air tap, and the vacuum sealing valve air tap is used for connecting a vacuum pump set; the elastic part is in a certain compression state, the cover plate is in contact with the box body to seal the cavity, and the bracket part is positioned in the cavity; the elastic piece is in a free state, and the sample holder is positioned outside the box body.

The self-driven sample vacuum transfer device is used for storing and transferring in the sample preparation process, has the advantage of simple structure, skillfully utilizes the pressure formed by a vacuum environment, can automatically drive a sample when the pressure difference between the inside and outside air reaches a certain condition so as to carry out the next operation, does not involve electric drive when in use, is favorable for reducing the volume of the sample above the expectation, is particularly suitable for sample processing equipment with compact volume, is compatible with most sample processing platforms such as sample preparation and characterization platforms, solves the problem of high sample pretreatment cost caused by complex structure and low universality of the existing related system, and is favorable for improving the universality of the cross-platform lossless transfer of sensitive samples.

In one embodiment, the vacuum sealing valve body is provided with a vacuum sealing valve switch, and the vacuum sealing valve switch is used for enabling the vacuum sealing valve body and the chamber to be in a closed state or an open state when the vacuum sealing valve nozzle is in a closed state. In one embodiment, the sample tray includes a tray and a fixing end, the tray is used for carrying a sample, the bracket member is provided with a fixing groove corresponding to the fixing end, and the fixing end is detachably fixed in the fixing groove, so that the tray is detachably arranged on the bracket member. In one embodiment, the self-driven sample vacuum transfer device further comprises a sealing gasket arranged on the box body or the cover plate, the elastic member is in a certain compression state, and the cover plate is in contact with the box body through the sealing gasket to seal the chamber. In one embodiment, a propping piece is arranged in the box body, and one end of the elastic piece is fixed on the propping piece; the self-driven ejected sample stage is further provided with a guide shaft and an installation part, the installation part is fixed in the box body, one end of the guide shaft is fixed on the abutting part, the other end of the guide shaft is fixed on the installation part, and the guide shaft penetrates through the support part; the elastic piece is a hollow piece and is sleeved outside the guide shaft, and the elastic piece is in a telescopic state to enable the support piece to move along the guide shaft. In one embodiment, the box body is further internally provided with an upper guide rail and a lower guide rail, the bracket part is provided with an upper bracket, an inner bracket and a lower bracket which are sequentially connected, and the upper bracket and the lower bracket are respectively connected with the cover plate; the guide shaft penetrates through the inner support, one end of the elastic piece is fixed on the abutting piece, and the other end of the elastic piece movably abuts against the inner support; the sample holder is detachably arranged on the upper bracket; the upper bracket is arranged on the upper guide rail in a sliding mode, and the lower bracket is arranged on the lower guide rail in a sliding mode. In one embodiment, the bracket member is further provided with an outer bracket, the upper bracket and the lower bracket are respectively connected with the outer bracket, and the outer bracket is connected with the cover plate. In one embodiment, the upper bracket is further provided with a positioning part for fixing the sample holder under a certain force. In one embodiment, the self-driven sample vacuum transfer device further comprises the vacuum pump set, and the vacuum pump set is used for connecting the vacuum sealing valve air tap through a pipe body. In one embodiment, the self-driven sample vacuum transfer device further comprises the tube.

Drawings

Fig. 1 is a schematic structural view of an embodiment of the self-driven sample vacuum transfer apparatus of the present application. Fig. 2 is another schematic view of the embodiment shown in fig. 1. 3 FIG. 3 3 3 is 3 a 3 schematic 3 sectional 3 view 3 taken 3 along 3 the 3 line 3 A 3- 3 A 3 of 3 the 3 embodiment 3 shown 3 in 3 FIG. 3 2 3. 3 Fig. 4 is another schematic view of the embodiment of fig. 2. Fig. 5 is a schematic view of the self-driven ejection sample stage of the embodiment shown in fig. 1 in an open state. Fig. 6 is another schematic view of the embodiment shown in fig. 5. FIG. 7 is a schematic cross-sectional view along the direction B-B of the embodiment shown in FIG. 6. Fig. 8 is another schematic view of the embodiment of fig. 5. Fig. 9 is a schematic partial structural view of another embodiment of the self-driven sample vacuum transfer device of the present application. Fig. 10 is another schematic view of the embodiment of fig. 9. Fig. 11 is another schematic view of the embodiment of fig. 9. Fig. 12 is a schematic structural view of another embodiment of the self-driven sample vacuum transfer device of the present application. Fig. 13 is another schematic view of the embodiment of fig. 12. Fig. 14 is another schematic view of the embodiment of fig. 12. Fig. 15 is a schematic view of the self-driven ejection sample stage of the embodiment shown in fig. 12 in an open state. Fig. 16 is another schematic view of the embodiment of fig. 15.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is capable of embodiments in many different forms than those described herein and that modifications may be made by one skilled in the art without departing from the spirit and scope of the application and it is therefore not intended to be limited to the specific embodiments disclosed below.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used in the description of the present application are for illustrative purposes only and do not denote a single embodiment. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in the description of the present application, the term "and/or" includes any and all combinations of one or more of the associated listed items.

In one embodiment of the present application, a self-driven sample vacuum transfer device includes a vacuum cartridge; the vacuum box comprises a box body, a self-driven sample ejecting table, a vacuum sealing valve body, a vacuum sealing valve nozzle and a sample holder; the self-driven ejected sample stage is provided with a cover plate, a bracket part and an elastic part which are sequentially connected, one end of the elastic part is fixed in the box body, the other end of the elastic part is movably abutted against the bracket part, and the sample holder is detachably arranged on the bracket part; a chamber is arranged in the box body, the vacuum sealing valve body is respectively communicated with the chamber and the vacuum sealing valve air tap, and the vacuum sealing valve air tap is used for connecting a vacuum pump set; the elastic part is in a certain compression state, the cover plate is in contact with the box body to seal the cavity, and the bracket part is positioned in the cavity; the elastic piece is in a free state, and the sample holder is positioned outside the box body. The self-driven sample vacuum transfer device is used for storing and transferring in the sample preparation process, has the advantage of simple structure, skillfully utilizes the pressure formed by a vacuum environment, can automatically drive a sample when the pressure difference between the inside and outside air reaches a certain condition so as to carry out the next operation, does not involve electric drive when in use, is favorable for reducing the volume of the sample above the expectation, is particularly suitable for sample processing equipment with compact volume, is compatible with most sample processing platforms such as sample preparation and characterization platforms, solves the problem of high sample pretreatment cost caused by complex structure and low universality of the existing related systems, and is favorable for improving the universality of lossless cross-platform transfer of sensitive samples such as air or water vapor sensitive samples. In one embodiment, a self-driven type sample vacuum transfer apparatus includes a part of or the entire structure of the following embodiments; that is, the self-driven type sample vacuum transfer apparatus includes some or all of the following technical features. In one embodiment, a self-driven sample vacuum transfer device includes a vacuum cartridge; the vacuum box is used for containing and providing a vacuum environment for the sample, and ejecting the sample under self-driving under a preset condition. Further, in one embodiment, the self-driven sample vacuum transfer device further comprises a vacuum pump set connected to the vacuum box for providing a vacuum environment for the vacuum box. In one embodiment, the self-driven sample vacuum transfer apparatus further comprises a tube, and the vacuum pump set is connected to the vacuum cartridge through the tube. In one embodiment, the self-driven sample vacuum transfer device further comprises a tube, and the vacuum pump set is connected with the vacuum sealing valve air tap through the tube. It can be understood that the vacuum pump set or the pipe body can be respectively used as an accessory, so that the modular design is realized, the structure of the self-driven sample vacuum transfer device is favorably simplified, and only a vacuum box needs to be transferred when samples are transferred, so that the vacuum transfer device is suitable for a large number of sample processing devices with compact structures, and the universality of the self-driven sample vacuum transfer device is improved.

In one embodiment, the vacuum box comprises a box body, a self-driven sample ejecting table, a vacuum sealing valve body, a vacuum sealing valve nozzle and a sample holder; the box body is used for bearing the self-driven ejected sample table on one hand and providing a vacuum environment on the other hand; the vacuum sealing valve body is used for connecting a vacuum pump set through a vacuum sealing valve air tap; the self-driven ejected sample stage is used for bearing a sample support; the sample holder is used for bearing a sample. For some samples which are not sensitive to magnetism, the bracket component and the sample support are respectively provided with corresponding magnetic adsorption components so as to fix the sample support in a magnetic attraction way. In one embodiment, the cartridge has a prism or cylinder shape. In one embodiment, the sample tray includes a tray and a fixing end, the tray is used for carrying a sample, the bracket member is provided with a fixing groove corresponding to the fixing end, and the fixing end is detachably fixed in the fixing groove, so that the tray is detachably arranged on the bracket member. Further, in one embodiment, the sample holder further comprises a shielding cover movably arranged on the tray for shielding the sample. In one embodiment, the isolation cover is slidably disposed on the tray. The design is favorable for taking and placing samples; on the other hand, the design of the isolation cover is also beneficial to protecting the sample.

In one embodiment, the self-driven sample ejecting table is provided with a cover plate, a bracket part and an elastic part which are sequentially connected, one end of the elastic part is fixed in the box body, the other end of the elastic part is movably abutted against the bracket part, and the sample holder is detachably arranged on the bracket part; the cover plate is used for closing or opening the box body, the elastic part is used for being in a certain compression state when being stressed with larger pressure so that the support part is positioned in the cavity, and is restored when being stressed with smaller pressure so that the sample support is positioned outside the box body, at least part of the support part is positioned outside the box body at the moment, in actual use, the support part can be partially positioned outside the box body or can be completely positioned outside the box body, and the sample support is positioned outside the box body so as to be convenient for taking and placing samples. The elastic part is used for being in a certain compression state when being stressed greatly, the other end of the elastic part is abutted to the support part, the elastic part is used for recovering when being stressed slightly so as to enable the sample support to be located outside the box body, and the other end of the elastic part is abutted to the support part or a gap is reserved between the elastic part and the support part. In one embodiment, the cover plate is flat. In one embodiment, the cover has a convex shape with respect to the case.

In one embodiment, a chamber is arranged inside the box body, the vacuum sealing valve body is respectively communicated with the chamber and the vacuum sealing valve nozzle, and the vacuum sealing valve nozzle is used for connecting a vacuum pump set; in one embodiment, the chamber has a prismatic or cylindrical shape. Further, in one embodiment, the vacuum sealing valve nozzle has a conducting state and a closed state, the vacuum sealing valve body is used for communicating the vacuum pump group through the vacuum sealing valve nozzle in the conducting state, and isolating the external environment through the vacuum sealing valve nozzle in the closed state; in one embodiment, the vacuum sealing valve body is arranged in the box body, and the vacuum sealing valve air tap is exposed out of the box body. With such a design, after the vacuum pumping is finished, the self-driven type sample vacuum transfer device can be transferred by closing the air tap of the vacuum sealing valve so as to enable the air tap to be in a closed state. In one embodiment, the vacuum sealing valve body is provided with a vacuum sealing valve switch, and the vacuum sealing valve switch is used for enabling the vacuum sealing valve body and the chamber to be in a closed state or an open state when the vacuum sealing valve nozzle is in a closed state. The design has the advantage of simple structure, is favorable for actively adjusting the isolation or communication between the vacuum sealing valve body and the external environment when needed, so that the cavity is in a closed state or an open state, the sample can be always in a dry protective atmosphere or a vacuum environment in the cross-platform transfer process of a glove box, a scanning electron microscope or a micro-nano processing system, and the purposes of in-situ processing, morphology characterization and element analysis are realized.

In one embodiment, the elastic member is a spring or an elastic block. In one embodiment, the elastic member is a hollow elastic block. In one embodiment, the elastic element is under a certain compression state, the cover plate is in contact with the box body to close the cavity, and the bracket element is positioned in the cavity; in order to improve the sealing performance and ensure that the sample is in a vacuum environment during transfer, in one embodiment, the self-driven sample vacuum transfer device is further provided with a sealing gasket on the box body or the cover plate, the elastic member is in a certain compression state, and the cover plate is in contact with the box body through the sealing gasket to seal the chamber. In one embodiment, the elastic member is in a free state, and the sample holder is located outside the box body. Further, in one embodiment, the elastic member is in a free state, and the sample holder is partially or completely located outside the box body. The sample support is positioned outside the box body and is used for enabling the sample carried by the sample support to be accessed. It will be appreciated that as the external pressure is reduced, the resilient member slowly recovers to the extent that the sample holder is outside the cartridge body. In the process, the moving speed of the sample tray is related to the environmental change of the sample processing platform, and the sample tray is not ejected at a flying speed, so that the sample tray is beneficial to holding the sample, and is suitable for storage and transfer in the sample preparation process. The design has the advantages of simple structure, skillfully utilizes the pressure formed by the vacuum environment and the elasticity of the elastic piece, when the vacuum sealing valve body is vacuumized to a certain degree, the external atmospheric pressure is more than or even far more than the elasticity, the cover plate seals the box body to seal the chamber, the sample processing platform is vacuumized, the external atmospheric pressure is gradually reduced to be less than the elasticity, the sample support and the sample thereon can be automatically driven to the outside of the box body by the elasticity of the elastic piece to a certain degree so as to carry out the next operation, and the electric drive is not involved completely when in use, thereby reducing the related accessories of the electric power, solving the problem of high sample pretreatment cost caused by complicated structure and weak universality of the existing related systems, and the vacuum box can be separated from a vacuum pump group to use, thereby being beneficial to reducing the volume of the vacuum box above the expectation, the device is particularly suitable for sample processing equipment with compact volume. By the design, the air or water vapor sensitive material is in a dry protective atmosphere or vacuum environment in the whole process of cross-platform transfer of a glove box, a scanning electron microscope and a micro-nano processing system. The method comprises the steps of preparing a sample on a certain platform such as a glove box and the like, fixing the prepared sample on a self-driven ejection sample table in the vacuum transfer device before transferring the prepared sample to another platform such as a scanning electron microscope or a micro-nano processing system for next detection or processing, and pressing the prepared sample into a vacuum box body of the vacuum transfer device. And simultaneously starting a vacuum pump group to vacuumize the vacuum transfer device, and closing a vacuum sealing valve after a certain vacuum degree is achieved to achieve the purpose of vacuum sealing of the sample vacuum transfer device. At the moment, the connection of the vacuum pump set is disconnected, the vacuum transfer device is taken out from a platform such as a glove box and is transferred and fixed on a sample platform in another platform such as a scanning electron microscope or a micro-nano processing system, and the sample which is always in the vacuum transfer device is always in a negative pressure state and isolated from the atmospheric environment in the transfer process. At the moment, a platform such as a scanning electron microscope or a micro-nano processing system vacuumizing system is started, and when the pressure difference between the inner air pressure and the outer air pressure of the vacuum transfer device on the sample platform reaches a certain condition, the mechanical ejection device of the vacuum transfer device acts to realize that the self-driven ejected sample platform is automatically ejected from the vacuum box body. The sample is automatically exposed in the vacuum environment of the platform so as to carry out the next operation, and the self-powered sample vacuum transfer device is not needed in the whole process and has a simple structure.

In order to control the moving direction of the support part conveniently, in one embodiment, a propping part is arranged in the box body, and one end of the elastic part is fixed on the propping part; the self-driven ejected sample stage is further provided with a guide shaft and an installation part, the installation part is fixed in the box body, one end of the guide shaft is fixed on the abutting part, the other end of the guide shaft is fixed on the installation part, and the guide shaft penetrates through the support part; the elastic piece is a hollow piece and is sleeved outside the guide shaft, and the elastic piece is in a telescopic state to enable the support piece to move along the guide shaft. Further, in one embodiment, the mounting portion is further configured to cooperatively limit a position of the bracket member or a position of an inner bracket of the bracket member, so as to limit a maximum extension length of the elastic member, thereby controlling the bracket member or a sample holder above the bracket member, in one embodiment, an upper guide rail and a lower guide rail are further disposed inside the box body, the bracket member is provided with an upper bracket, an inner bracket and a lower bracket which are sequentially connected, and the upper bracket and the lower bracket are respectively connected with the cover plate; the guide shaft penetrates through the inner support, one end of the elastic piece is fixed on the abutting piece, and the other end of the elastic piece movably abuts against the inner support; the sample holder is detachably arranged on the upper bracket; the upper bracket is arranged on the upper guide rail in a sliding mode, and the lower bracket is arranged on the lower guide rail in a sliding mode. In one embodiment, a self-driven sample vacuum transfer device includes a vacuum cartridge; the vacuum box comprises a box body, a self-driven sample ejecting table, a vacuum sealing valve body, a vacuum sealing valve nozzle and a sample holder; the self-driven ejected sample stage is provided with a cover plate, a bracket part and an elastic part which are sequentially connected, one end of the elastic part is fixed in the box body, the other end of the elastic part is movably abutted against the bracket part, and the sample holder is detachably arranged on the bracket part; a chamber is arranged in the box body, the vacuum sealing valve body is respectively communicated with the chamber and the vacuum sealing valve air tap, and the vacuum sealing valve air tap is used for connecting a vacuum pump set; the elastic part is in a certain compression state, the cover plate is in contact with the box body to seal the cavity, and the bracket part is positioned in the cavity; the elastic piece is in a free state, and the sample holder is positioned outside the box body. A propping piece is arranged in the box body, and one end of the elastic piece is fixed on the propping piece; the self-driven ejected sample stage is further provided with a guide shaft and an installation part, the installation part is fixed in the box body, one end of the guide shaft is fixed on the abutting part, the other end of the guide shaft is fixed on the installation part, and the guide shaft penetrates through the support part; the elastic piece is a hollow piece and is sleeved outside the guide shaft, and the elastic piece is in a telescopic state to enable the support piece to move along the guide shaft. The box body is also internally provided with an upper guide rail and a lower guide rail, the bracket part is provided with an upper bracket, an inner bracket and a lower bracket which are sequentially connected, and the upper bracket and the lower bracket are respectively connected with the cover plate; the guide shaft penetrates through the inner support, one end of the elastic piece is fixed on the abutting piece, and the other end of the elastic piece movably abuts against the inner support; the sample holder is detachably arranged on the upper bracket; the upper bracket is arranged on the upper guide rail in a sliding mode, and the lower bracket is arranged on the lower guide rail in a sliding mode. The rest of the embodiments are analogized and are not described in detail. In one embodiment, the chamber is arranged in the box body, the elastic piece is in a certain compression state, and the cover plate is in contact with the box body to close the chamber; the vacuum sealing valve body is provided with a vacuum sealing valve switch, and the vacuum sealing valve switch is used for enabling the vacuum sealing valve body and the chamber to be in a closed state or an open state when the air tap of the vacuum sealing valve is in a closed state; the sample support comprises a tray and a fixed end which are connected, the tray is used for bearing a sample, the support part is provided with a fixed groove corresponding to the fixed end, and the fixed end is detachably fixed in the fixed groove so that the tray is detachably arranged on the support part; the self-driven sample vacuum transfer device is also provided with a sealing gasket on the box body or the cover plate, the elastic part is in a certain compression state, and the cover plate is in contact with the box body through the sealing gasket to seal the chamber; the box body is internally provided with a propping piece; the self-driven popup sample stage is further provided with a guide shaft and an installation part, the installation part is fixed in the box body, one end of the guide shaft is fixed on the abutting part, the other end of the guide shaft is fixed on the installation part, an upper guide rail and a lower guide rail are further arranged in the box body, and the support part is provided with an upper support, an inner support and a lower support which are sequentially connected; the guide shaft penetrates through the inner support, one end of the elastic piece is fixed on the abutting piece, and the other end of the elastic piece movably abuts against the inner support; the elastic part is a hollow part and is sleeved outside the guide shaft, and the elastic part moves along the guide shaft when being in a telescopic state; the sample holder is detachably arranged on the upper bracket; the upper bracket is arranged on the upper guide rail in a sliding manner, and the lower bracket is arranged on the lower guide rail in a sliding manner; the bracket piece is also provided with an outer bracket, the upper bracket and the lower bracket are respectively connected with the outer bracket, and the outer bracket is connected with the cover plate; the upper bracket is also provided with a positioning part for fixing the sample holder under a certain force; the self-driven sample vacuum transfer device further comprises a vacuum pump set, and the vacuum pump set is connected with the air tap of the vacuum sealing valve. The design is favorable for accurately controlling the moving direction of the support part, and is particularly suitable for the automatic processing of a precise sample processing platform.

In order to facilitate the installation of the cover plate, in one embodiment, the bracket member is further provided with an outer bracket, the upper bracket and the lower bracket are respectively connected with the outer bracket, and the outer bracket is connected with the cover plate. In order to enhance the supporting effect and avoid uneven force application to the bracket component when taking and placing a sample or a sample tray or tray, in one embodiment, a middle bracket is further arranged between the outer bracket and the inner bracket of the bracket component, the upper bracket and the lower bracket are further respectively connected with the middle bracket, and the guide shaft is further arranged through the middle bracket. According to the design, the middle support does not interfere with the guide shaft on one hand, and the supporting effect on the sample holder can be enhanced on the other hand. In order to improve the fixing effect on the sample holder, in one embodiment, the upper support is further provided with a positioning part for fixing the sample holder under a certain force. The design is favorable for accurately positioning the sample holder and the sample carried by the sample holder, and the sample can be driven to slowly pop out of the box body when the internal and external gas pressure difference reaches a certain condition so as to carry out the next operation.

In one embodiment, the self-driven sample vacuum transfer device further comprises the vacuum pump set, and the vacuum pump set is used for connecting the vacuum sealing valve air tap through a pipe body. In one embodiment, the self-driven sample vacuum transfer device further comprises a tube. Due to the design, a vacuum pump group or a pipe body is not needed during moving, electric drive is not involved during use, the volume of the sample processing device is greatly reduced beyond expectation, the sample processing device is particularly suitable for sample processing equipment with compact volume, and most of sample preparation and characterization platforms are compatible, so that the universality of cross-platform lossless transfer of air or water vapor sensitive samples is improved.

To facilitate the transfer of samples having temperature requirements, further, in one embodiment, the self-driven sample vacuum transfer apparatus or the self-driven ejected sample stage further comprises a cooling module for providing a low temperature environment or a heating module for providing a high temperature environment; in one embodiment, the cooling module comprises a cold storage module or a refrigeration module; in one embodiment, the heating module comprises a heat storage module or a heating module; such a design is advantageous for accommodating the storage and transfer requirements of the samples in a vacuum low-temperature or vacuum high-temperature environment, but increases the complexity of the system.

The embodiments can realize the lossless cross-platform transfer of the air or water vapor sensitive sample, creatively utilizes the characteristic of pressure difference between the platforms through ingenious design and the characteristic that the vacuum environment can isolate air and water vapor, creatively fixes the prepared sample in the vacuum system for transfer, and breaks through the problem of realizing the cross-platform transfer of the air or water vapor sensitive sample. And the whole process does not need external driving force and electric drive, and the sample in the new platform is opened and popped out in a self-driven mode, namely the sample is popped out in a self-driven mode only by means of accurately designed air pressure difference. The design can ensure that the system has small volume and compact structure on the premise of realizing the function, thereby being compatible with most of sample preparation and characterization platforms. The problem of high sample pretreatment cost caused by complex structure and low universality of the existing related system is solved. And moreover, a modular design mode is adopted, the operation is flexible, the compatibility is good, and the self-driven sample vacuum transfer device is independently divided into a vacuum pump set and a vacuum box. In the process of realizing cross-platform transfer of samples, only the vacuum box needs to be transferred by operation, so that the vacuum box can be directly fixed on the sample stage in each platform without connecting or adjusting any external adapter of each platform. The problem of poor platform compatibility caused by complex structure and weak universality of the existing related system is solved. Furthermore, various optional upgrading modules can be realized for different samples or platforms. For example: for samples required by the temperature field environment, a cooling or heating module can be integrated, and the storage and transfer requirements of the samples in the vacuum low-temperature or vacuum high-temperature environment are met; for the requirement of automation degree, the vacuum sealing valve can be selected and matched with a manual type or an electromagnetic driving type; for the requirement of the vacuum degree of a sample or a platform, the vacuum pump set can be in the form of a low vacuum pump set such as a rotary vane vacuum pump or a diaphragm pump, and can also be in the form of a high vacuum pump set of a backing pump matched with a turbo molecular pump.

In one embodiment, as shown in fig. 12, 13 and 14, a self-driven sample vacuum transfer device includes a vacuum cartridge 900 and a vacuum pump set 600; when the vacuum pump set 600 is used, the vacuum box 900 is connected through the pipe body, and only the vacuum box 900 needs to be transferred when a sample is transferred. Referring to fig. 15 and 16 together, the self-driven sample ejecting cartridge 100 of the self-driven sample vacuum transfer device includes a cartridge body 100, a self-driven sample ejecting stage 200, a vacuum sealing valve 300, a vacuum sealing valve nozzle 400 and a sample holder 700; the vacuum sealing valve body 300 is provided with a vacuum sealing valve switch 500, and the sample holder 700 is positioned outside the cartridge body 100, so that the sample carried by the sample holder 700 can be automatically or manually processed. The vacuum sealing valve switch 500 is used to close or open the vacuum sealing valve body 300 and the chamber 180 when the vacuum sealing valve nozzle 400 is closed.

In one embodiment, as shown in fig. 1, a self-driven sample vacuum transfer device includes a vacuum cartridge; referring to fig. 2 and 3, the vacuum box includes a box body 100, a self-driven sample ejecting platform 200, a vacuum sealing valve body 300, a vacuum sealing valve nozzle 400 and a sample holder 700; the vacuum seal valve body 300 is provided with a vacuum seal valve switch 500, the vacuum seal valve nozzle 400 has a conducting state and a closed state, the vacuum seal valve body 300 is used for communicating the vacuum pump set 600 through the vacuum seal valve nozzle 400 in the conducting state, and after the vacuum pumping is finished, the vacuum seal valve nozzle 400 is closed to be in the closed state, so that the self-driven sample vacuum transfer device can be transferred. The vacuum sealing valve body 300 is fixed to the cartridge 100 by a fixing member 310.

The box body 100 is provided with an upper box plate 110, a lower box plate 120, a bottom box plate 140 and a side box plate, the upper box plate 110, the lower box plate 120, the bottom box plate 140 and the side box plate are arranged together in a surrounding manner, so that a chamber 180 is arranged inside the box body 100, namely, the chamber 180 is arranged inside the box body 100, and the bottom box plate 140 is respectively fixed with the upper box plate 110 and the lower box plate 120 through a fixing device 150. The box body 100 is also internally provided with an upper guide rail 160 and a lower guide rail 170, the vacuum sealing valve body 300 is respectively communicated with the chamber 180 and the vacuum sealing valve nozzle 400, and the vacuum sealing valve nozzle 400 is used for connecting a vacuum pump set 600; the box 100 is provided with a holding part 130; in this embodiment, the supporting member 130 is fixedly disposed on the bottom case plate 140.

The self-driven pop-up sample stage 200 is provided with a cover plate 210, a bracket member and an elastic member 260 which are sequentially connected, the cover plate 210 is flat, and the cartridge body 100 has a prism shape. The self-driven pop-up sample stage 200 is further provided with a guide shaft 270 and a mounting part 271, the mounting part 271 is fixed inside the cartridge 100, one end of the guide shaft 270 is fixed on the abutting part 130, the other end of the guide shaft 270 is fixed on the mounting part 271, the guide shaft 270 passes through the support part, one end of the elastic part 260 is fixed on the abutting part 130, the other end of the elastic part movably abuts against the support part, and the sample holder 700 is detachably arranged on the support part; the bracket member is provided with an upper bracket 240, an inner bracket 250 and a lower bracket 230 which are connected in sequence, and the sample holder 700 is detachably arranged on the upper bracket 240; the upper bracket 240 is slidably disposed on the upper rail 160, and the lower bracket 230 is slidably disposed on the lower rail 170; the upper holder 240 is further provided with a positioning part 241 for fixing the sample holder 700 under a certain force; the bracket piece is also provided with an outer bracket 220, an upper bracket 240 and a lower bracket 230 are respectively connected with the outer bracket 220, and the outer bracket 220 is connected with the cover plate 210; the bracket member is further provided with a middle bracket 280 between the outer bracket 220 and the inner bracket 250, the upper bracket 240 and the lower bracket 230 are further connected with the middle bracket 280, respectively, the guide shaft 270 is disposed through the inner bracket 250, and the guide shaft 270 is further disposed through the middle bracket 280. One end of the elastic member 260 is fixed on the supporting member 130, and the other end movably abuts against the inner bracket 250; the elastic member 260 is a hollow member, the guide shaft 270 is sleeved with the elastic member 260, and the elastic member 260 is in a telescopic state, so that the bracket moves along the guide shaft 270. As shown in fig. 3 and 4, the elastic member 260 is under a certain compression state, the cover 210 contacts the case 100 to close the cavity 180 and the bracket member is located in the cavity 180.

As shown in fig. 5, the elastic member 260 is in a free state, and the sample holder 700 is located outside the cartridge body 100. Referring to fig. 6 and 7, the sample holder 700 includes a tray 710 and a fixing end 720 connected to each other, the tray 710 is used for supporting a sample, the frame member is provided with a fixing groove corresponding to the fixing end 720, and the fixing end 720 is detachably fixed in the fixing groove, so that the tray 710 is detachably disposed on the frame member. At this time, the mounting portion 271 supports the inner frame 250 to limit the elastic member 260 from further extending outward, and the sample holder 700 and the tray 710 thereof are all located outside the cartridge body 100. Referring to fig. 8, the self-driven sample vacuum transfer apparatus further includes a sealing gasket 800 disposed on the case 100 or the cover 210, and the cover 210 is in contact with the case 100 through the sealing gasket 800 to seal the chamber 180 when the elastic member 260 is under a certain compression state.

In order to better show the internal structure of the vacuum box, in one embodiment, as shown in fig. 9, 10 and 11, the number of the guide shafts 270 is two, a spring is provided outside each guide shaft 270 as the elastic member 260, and the cover plate 210 fixes the upper bracket 240 and the outer bracket 220 through the fixing portion 290; the guide shaft 270 has one end fixed to the abutting member 130 and the other end fixed to the mounting portion 271, and the upper bracket 240 is fixed to the inner bracket 250 by a fixing portion 290. The case 100 is provided with a supporting member 130 on the bottom case plate 140, one end of the elastic member 260 is fixed on the supporting member 130, and the other end movably abuts against the mounting portion 271, i.e. the other end of the elastic member 260 abuts against the mounting portion 271 in a compressed state, and can contact with the mounting portion 271 in a free state, or can have a gap with the mounting portion 271, and the gap is determined according to the length of the guide shaft 270 and the elastic force of the elastic member 260.

In one embodiment of specific application, the self-driven sample vacuum transfer device comprises a vacuum box body, a self-driven ejection sample table, a vacuum sealing valve body and a vacuum pump set, and further comprises a guide shaft, a spring and the like. The bracket component for ejecting the sample platform in the self-driven mode is arranged in the box body of the vacuum box through the guide shaft, the spring and the like, and the self-driven ejection function of the sample platform is achieved; the vacuum sealing valve body is communicated with the box body, so that the communication or isolation between the sample in the box body and the external environment is realized; the air nozzle joint of the vacuum seal valve is connected with an external vacuum pump set through a pipeline, namely a gas pipeline, so that the vacuum transfer device is vacuumized. For air or water vapor sensitive samples, the vacuum box can be directly fixed on sample platforms in each platform for use without connecting or adjusting any external adapter ports of a glove box, a scanning electron microscope or a micro-nano processing system in the cross-platform transfer process of the samples in the glove box, the scanning electron microscope or the micro-nano processing system by the vacuum transfer device; meanwhile, the vacuum moving device can be compatible with a scanning electron microscope or a micro-nano processing system of the mainstream brand on the market at present; and the sample is always in a dry protective atmosphere or vacuum environment, so that the aims of in-situ processing, morphology characterization and element analysis are fulfilled. In a vacuum sample bin of a scanning electron microscope or a micro-nano processing system, the sample stage of the self-driven sample vacuum transfer device in the embodiment is opened without external driving force, and the self-driven ejection mode is realized only by means of accurately designed air pressure difference. Further, in one embodiment, the self-driven ejection sample stage can integrate a cooling or heating module, and is compatible with the storage and transfer requirements of the vacuum low-temperature or vacuum high-temperature environment samples. Further, in one embodiment, the vacuum sealing valve body may be of a manual type or an electromagnetic driving type. Further, in one embodiment, the vacuum pump set may be in the form of a low vacuum pump set such as a rotary vane vacuum pump or a diaphragm pump, or may be in the form of a high vacuum pump set of a backing pump and a turbomolecular pump. By adopting the design, the self-driven sample vacuum transfer device with compact structure, high use efficiency and high compatibility is provided. The method is used for solving the problem of high sample pretreatment cost caused by complex structure and low universality of related systems at present, is favorable for realizing that air or water vapor sensitive materials are in a dry protective atmosphere or vacuum environment in the cross-platform transfer process of a glove box, a scanning electron microscope and a micro-nano processing system in the whole process, and has good compatibility with each platform.

The following takes a lithium ion battery material as an example to further give specific applications of the embodiments of the present application, and it is understood that the present application is also applicable to the preparation of other materials with strict requirements.

The lithium ion battery material is determined to be incapable of contacting the atmospheric environment in the processes of lithium ion battery material preparation and microscopic morphology observation due to the characteristic that the lithium ion battery material is easy to oxidize and is easy to absorb water vapor for modification. The lithium ion battery material was prepared in a glove box filled with a positive pressure nitrogen protective atmosphere and transferred to an SEM scanning electron microscope to observe the sample. The self-driven type sample vacuum transfer device is placed in a glove box and comprises a vacuum box and a vacuum pump set, and the prepared sample is fixed on a sample support. At this time, the box body is in an open state, as shown in fig. 5 to 8, and also refer to fig. 15 and 16, that is, the sample holder with the sample fixed thereon can be inserted into the fixing groove of the self-driven sample ejecting table. At this time, the spring fitted over the guide shaft is in an expanded state as shown in fig. 7. The vacuum sealing valve air tap and the vacuum pump set are connected through a gas pipeline, the sample platform is ejected into the box body by pressing in self-driving, and the spring sleeved on the guide shaft is in a compressed state at the moment, as shown in figure 3. And starting a vacuum pump group to vacuumize the box body, and closing a vacuum sealing valve switch after a certain vacuum degree is reached so as to keep the box body in a vacuum sealing state. And taking the gas pipeline out of the air tap of the vacuum sealing valve, taking the vacuum box out of the glove box, transferring the vacuum box into the SEM sample cabin, and fixing the vacuum box. In the moving and transferring process, the sample is always fixed on the sample support and is sealed in the box body in a vacuum mode. And (3) closing the SEM sample bin and starting the SEM vacuumizing system, when the SEM sample bin reaches a certain vacuum degree, because the pressure difference between the inside and the outside of the vacuum box body 1 and the sample bin is rapidly reduced, namely the pressure of the SEM sample bin is rapidly reduced and is not close to the pressure of the vacuum box body 1, the SEM sample bin is popped out from the self-driven sample ejecting table under the action of the elastic force of the compression spring, as shown in figures 5 to 8, and the sample can be observed and detected in the SEM in the next step. As can be seen from the above description, in the processes of preparation, transfer and observation, the sample is always in a protective atmosphere or vacuum environment, so that the influence of air or water vapor on the sample is isolated to the maximum extent; moreover, only the vacuum box is transferred, and the vacuum box has the advantage of small volume. The whole process is skillfully controlled by matching vacuum pressure with elastic force without electric drive.

In addition, other embodiments of the present application include a self-driven sample vacuum transfer apparatus that can be implemented by combining technical features of the above embodiments.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features. The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the claims. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present application shall be subject to the appended claims.

Claims

1. A self-driven sample vacuum transfer device comprising a vacuum cartridge;

the vacuum box comprises a box body, a self-driven sample ejecting table, a vacuum sealing valve body, a vacuum sealing valve nozzle and a sample holder;

the self-driven ejected sample stage is provided with a cover plate, a bracket part and an elastic part which are sequentially connected, one end of the elastic part is fixed in the box body, the other end of the elastic part is movably abutted against the bracket part, and the sample holder is detachably arranged on the bracket part;

a chamber is arranged in the box body, the vacuum sealing valve body is respectively communicated with the chamber and the vacuum sealing valve air tap, and the vacuum sealing valve air tap is used for connecting a vacuum pump set;

the elastic part is in a certain compression state, the cover plate is in contact with the box body to seal the cavity, and the bracket part is positioned in the cavity;

the elastic piece is in a free state, and the sample holder is positioned outside the box body.

2. The self-driven sample vacuum transfer device according to claim 1, wherein the vacuum sealing valve body is provided with a vacuum sealing valve switch for closing or opening the vacuum sealing valve body and the chamber when the vacuum sealing valve nozzle is in a closed state.

3. The self-driven sample vacuum transfer device according to claim 1, wherein the sample tray comprises a tray and a fixing end, the tray is used for carrying a sample, the supporting member is provided with a fixing groove corresponding to the fixing end, and the fixing end is detachably fixed in the fixing groove, so that the tray is detachably arranged on the supporting member.

4. The self-driven sample vacuum transfer device according to claim 1, further comprising a sealing gasket disposed on the case or the cover plate, wherein the elastic member is under a certain compression state, and the cover plate is in contact with the case through the sealing gasket to close the chamber.

5. The self-driven sample vacuum transfer device according to claim 4, wherein a holding member is provided inside the cartridge body, and one end of the elastic member is fixed to the holding member;

the self-driven ejected sample stage is further provided with a guide shaft and an installation part, the installation part is fixed in the box body, one end of the guide shaft is fixed on the abutting part, the other end of the guide shaft is fixed on the installation part, and the guide shaft penetrates through the support part;

the elastic piece is a hollow piece and is sleeved outside the guide shaft, and the elastic piece is in a telescopic state to enable the support piece to move along the guide shaft.

6. The self-driven type sample vacuum transfer apparatus according to claim 5, wherein the case body is further provided therein with an upper guide rail and a lower guide rail, the holder member is provided with an upper holder, an inner holder and a lower holder which are connected in series, and the upper holder and the lower holder are respectively connected to the cover plate;

the guide shaft penetrates through the inner support, one end of the elastic piece is fixed on the abutting piece, and the other end of the elastic piece movably abuts against the inner support;

the sample holder is detachably arranged on the upper bracket;

the upper bracket is arranged on the upper guide rail in a sliding mode, and the lower bracket is arranged on the lower guide rail in a sliding mode.

7. The self-driven type sample vacuum transfer device according to claim 6, wherein the supporting frame is further provided with an outer frame, the upper and lower supporting frames are connected to the outer frame, respectively, and the outer frame is connected to the cover plate.

8. The self-driven type specimen vacuum transfer device according to claim 6, wherein the upper holder is further provided with a positioning portion for fixing the specimen holder under a certain force.

9. The self-driven sample vacuum transfer device of any one of claims 1 to 8, further comprising the vacuum pump set for connecting the vacuum sealing valve air tap through a tube body.

10. The self-driven sample vacuum transfer device of claim 9, further comprising the tube.