CN213337678U - Ultrahigh vacuum sample transfer cavity - Google Patents
Ultrahigh vacuum sample transfer cavity Download PDFInfo
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- CN213337678U CN213337678U CN202021785006.1U CN202021785006U CN213337678U CN 213337678 U CN213337678 U CN 213337678U CN 202021785006 U CN202021785006 U CN 202021785006U CN 213337678 U CN213337678 U CN 213337678U
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Abstract
The invention discloses an ultrahigh vacuum sample transfer cavity, which comprises: the device comprises a transfer cavity, an auxiliary cavity, a sample transfer magnetic rod, a swinging magnetic rod, an observation window, an ion pump, a gate valve, an air inlet valve and a vacuum gauge, wherein seven vacuum pipelines are welded in the transfer cavity, and a vacuum flange capable of being in vacuum sealing connection with other devices is arranged on the outer side of each vacuum pipeline; five vacuum pipelines are welded in the auxiliary cavity, a vacuum flange capable of being in vacuum sealing connection with other devices is arranged on the outer side of each vacuum pipeline, and the sample transfer magnetic rod, the swinging magnetic rod, the observation window, the ion pump and the gate valve are connected with the transfer cavity; the other end of the gate valve is connected with an auxiliary cavity flange, and the vacuum gauge and the air inlet valve are connected with the auxiliary cavity flange. Therefore, the sample can be ensured to be always in the ultrahigh vacuum environment when being transferred between ultrahigh vacuum systems, the sample is prevented from being polluted by the outside, the vacuum of the equipment is not damaged, and the operation is convenient.
Description
Technical Field
The invention relates to an ultrahigh vacuum instrument, in particular to an ultrahigh vacuum sample transfer cavity.
Background
Generally, an ultra-high vacuum equipment system is composed of a vacuum pump, a vacuum gauge, a vacuum chamber and other components, and is assembled according to certain requirements by means of a vacuum pipeline. To ensure that a specific vacuum environment (typically a vacuum degree better than 1x10-9mbar) is obtained and maintained in a certain space, ensuring that a certain process or physical process is carried out in the vacuum system. Ultra-high vacuum systems are widely used in semiconductor, machining, physics, chemistry, materials and biological science.
After the sample is prepared in the ultra-high vacuum system, it is usually tested and analyzed in an environment without destroying the ultra-high vacuum in order to ensure the stable properties of the sample. Currently, sample preparation and testing equipment can be integrated into an ultra-high vacuum system that generally includes a robot that can be used to transfer samples at certain specific locations within a chamber so that sample preparation and testing can be accomplished in the same ultra-high vacuum environment. However, the number of test devices that can be integrated in a system is limited, and in order to analyze the properties of a sample more comprehensively, the sample has to be taken out of a certain vacuum system and transferred to another ultrahigh vacuum system for test analysis, and the process inevitably contacts air and dust to cause sample pollution. Some samples encounter air and even undergo chemical reaction, the components and the properties are changed, and the samples are completely destroyed.
Many approaches have been devised to protect samples, such as: introducing inert gas as protective gas into the vacuum cavity, taking out the sample, and quickly putting the sample into a clean sample box or a vacuum box; or plating a protective film on the sample and taking out the sample. However, most of them are complicated to operate, and each method cannot avoid the operation of "open cavity sampling" in which the sample is exposed to a non-vacuum gas atmosphere. Once the vacuum environment around the sample is broken, the gas is adsorbed to the surface of the sample, and the sample is polluted to some extent.
At present, no portable equipment capable of transferring samples among different ultrahigh vacuum systems on the premise of not damaging the ultrahigh vacuum environment exists.
Disclosure of Invention
The invention aims to provide an ultrahigh vacuum sample transfer cavity, which can ensure that a sample is always in an ultrahigh vacuum environment in the process of transferring the sample from one ultrahigh vacuum system to another ultrahigh vacuum system, does not damage the vacuum of the device and is convenient to operate.
The ultra-high vacuum sample transfer apparatus of the present invention comprises: the method comprises the following steps: the device comprises a transfer cavity, an auxiliary cavity, a sample transmission magnetic rod, a swinging magnetic rod, an observation window, an ion pump, a gate valve, an air inlet valve and a vacuum gauge, wherein the transfer cavity is kept in an ultrahigh vacuum environment through the ion pump;
seven vacuum pipelines are welded on the transfer cavity, and vacuum flanges capable of being in vacuum sealing connection with other devices are arranged on the outer sides of the vacuum pipelines and comprise a first flange, a second flange, a third flange, a fourth flange, a fifth flange, a sixth flange and a seventh flange; the auxiliary cavity is welded with five vacuum pipelines, and the outer side of each vacuum pipeline is provided with a vacuum flange capable of being in vacuum sealing connection with other devices, wherein the vacuum flange comprises an eighth flange, a ninth flange, a tenth flange, an eleventh flange and a twelfth flange
The ion pump is hermetically connected with the first flange;
the swinging magnetic rod is connected with the second flange in a sealing manner;
the third flange, the sixth flange and the seventh flange are all connected with an observation window in a sealing way;
the sample transmission magnetic rod is connected with the fourth flange in a sealing mode;
the gate valve is connected with the fifth flange and the eighth flange in a sealing manner;
the vacuum gauge is connected with the ninth flange in a sealing mode;
an air inlet valve hermetically connected with the tenth flange
Preferably, the ion pump is connected with a matched ion pump control unit, and is powered by a power supply.
Preferably, the transfer chamber is further provided with a storage chamber, which is a cylindrical chamber for storing samples.
Preferably, the apparatus further comprises a stand and a handle.
The portable ultrahigh vacuum sample transfer cavity can ensure that a sample is always in an ultrahigh vacuum environment when transferred between ultrahigh vacuum systems, prevents the sample from being polluted by the outside, and has the advantages of simple structure, small volume, simple and easy assembly and disassembly, light weight, convenient transportation and high utilization rate of each part.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
1 a transfer chamber; 2 an auxiliary cavity; 3 a sample transmission magnetic rod; 4 swinging the magnetic rod; 5, an observation window; 6, an ion pump; 7, a gate valve; 8 an air inlet valve; 9, a vacuum gauge; 10 sample stage; 11 a first flange; 12 a second flange; 13 a third flange; 14 a fourth flange; 15 a fifth flange; 16 a sixth flange; 17 a seventh flange; 18 storage compartments; 19 a support; 20, a handle; 21 an eighth flange; 22 a ninth flange; 23 tenth flange; 24 an eleventh flange; 25 twelfth flange.
Detailed Description
As shown, the present invention provides a portable apparatus for transferring samples between different ultra-high vacuum systems.
Fig. 1 shows a perspective view of the overall structure according to an embodiment of the present invention. In this embodiment, the sample transfer chamber is composed of a transfer chamber 1, an auxiliary chamber 2, a sample transfer magnetic rod 3, a swing magnetic rod 4, an observation window 5, an ion pump 6, a gate valve 7, an air inlet valve 8, a vacuum gauge 9 and a sample stage 10, and is used for connecting an ultrahigh vacuum system to transfer a sample. The ion pump 6 is in sealing connection with the first flange 11, the swing magnetic rod 4 is in sealing connection with the second flange 12, the observation window 5 is in sealing connection with the third flange 13, the sixth flange 16 and the seventh flange 17, the sample transmission magnetic rod 3 is in sealing connection with the fourth flange 14, the gate valve 7 is in sealing connection with the fifth flange 15 and the eighth flange 21, the vacuum gauge 9 is in sealing connection with the ninth flange 22, and the air inlet valve 8 is in sealing connection with the tenth flange 23. When not in use, the eleventh flange 24 and the twelfth flange 25 are sealed by blind flanges. It will be appreciated that other connections are possible which achieve the above described functionality.
When the sample is transferred, the twelfth flange 25 is hermetically connected with a certain ultrahigh vacuum sample preparation system, the eleventh flange 24 is connected with an air extractor, the gate valve 7 is opened to enable the transfer cavity 1 and the auxiliary cavity 2 to reach the ultrahigh vacuum level, and then a certain ultrahigh vacuum level is openedThe valve of the ultrahigh vacuum sample preparation system is characterized in that a swinging magnetic rod 4 penetrates through a gate valve 7 and an auxiliary cavity 2 and extends to the sample preparation system to clamp a sample; after grasping the sample, withdrawing the swinging magnetic rod 4, transferring the sample from the ultrahigh vacuum sample preparation system to the transfer cavity, and then closing the gate valve 7 and the valve of the ultrahigh vacuum sample preparation system. Then the air inlet valve 8 is opened, the device connected with the eleventh flange 24 and the twelfth flange 25 is disconnected, the sample transfer cavity is moved to another ultrahigh vacuum system and is fixed with the other ultrahigh vacuum system through the twelfth flange 25, the eleventh flange 24 is connected with the air extractor, the auxiliary cavity 2 reaches the ultrahigh vacuum level, the gate valve 7 is opened again at the moment, the magnetic rod 4 is swung to send the sample into a new ultrahigh vacuum system, and therefore the sample is transferred between the two ultrahigh vacuum systems. The vacuum degree in the sample transfer cavity is maintained by the ion pump 6 in the transfer process, which is generally superior to 3x10- 10mbar。
The sample is held by the head of the oscillating magnetic bar 4, stays in the transfer chamber 1, and can be observed through the observation window 5 to a specific position.
When a large number of samples are transferred, when the samples are taken out, the samples can be firstly placed on the sample table 10 from the swinging magnetic rod 4, and the samples on the sample table 10 are placed at corresponding positions of the storage chamber 18 through the sample transferring magnetic rod 3; when a sample is fed, the sample is transferred from the corresponding position of the storage chamber 18 to the sample table 10 by the sample transfer magnetic rod 3, and then the sample is transferred to a new system by swinging the magnetic rod 4. The device also includes a stand 19 and a handle 20.
Although the structure, features, and methods of use of embodiments of the present invention have been described in detail above, such description is not intended to limit the invention. Any modifications and variations obvious to those skilled in the art, which are within the spirit of the invention, are possible and fall within the scope of the invention. The scope of the invention is to be determined solely by the appended claims.
Claims (4)
1. An ultra-high vacuum sample transfer chamber comprising: the device comprises a transfer cavity, an auxiliary cavity, a sample transmission magnetic rod, a swinging magnetic rod, an observation window, an ion pump, a gate valve, an air inlet valve and a vacuum gauge, and is characterized in that the transfer cavity is kept in an ultrahigh vacuum environment through the ion pump;
seven vacuum pipelines are welded on the transfer cavity, and vacuum flanges capable of being in vacuum sealing connection with other devices are arranged on the outer sides of the vacuum pipelines and comprise a first flange, a second flange, a third flange, a fourth flange, a fifth flange, a sixth flange and a seventh flange; five vacuum pipelines are welded on the auxiliary cavity, and vacuum flanges capable of being in vacuum sealing connection with other devices are arranged on the outer sides of the vacuum pipelines and comprise an eighth flange, a ninth flange, a tenth flange, an eleventh flange and a twelfth flange;
the ion pump is hermetically connected with the first flange;
the swinging magnetic rod is connected with the second flange in a sealing manner;
the third flange, the sixth flange and the seventh flange are all connected with an observation window in a sealing way;
the sample transmission magnetic rod is connected with the fourth flange in a sealing mode;
the gate valve is connected with the fifth flange and the eighth flange in a sealing manner;
the vacuum gauge is connected with the ninth flange in a sealing mode;
the air inlet valve is connected with the tenth flange in a sealing mode;
the eleventh flange is connected with the vacuumizing device in a sealing manner;
the twelfth flange is connected to the sample preparation system.
2. The ultra-high vacuum sample transfer chamber of claim 1, wherein: the ion pump is connected with a matched ion pump control unit and is powered by a power supply.
3. The ultra-high vacuum sample transfer chamber of claim 2, wherein: the transfer chamber is also provided with a storage chamber which is a cylindrical cavity for storing samples and a liftable sample table for controlling the movement of the samples.
4. The ultra-high vacuum sample transfer chamber of claim 3, wherein: the device also includes a stand and a handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021785006.1U CN213337678U (en) | 2020-08-25 | 2020-08-25 | Ultrahigh vacuum sample transfer cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021785006.1U CN213337678U (en) | 2020-08-25 | 2020-08-25 | Ultrahigh vacuum sample transfer cavity |
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| CN213337678U true CN213337678U (en) | 2021-06-01 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113655241A (en) * | 2021-08-19 | 2021-11-16 | 中国科学院苏州纳米技术与纳米仿生研究所 | Butt joint sample transfer device and optical system |
| CN113740108A (en) * | 2021-08-27 | 2021-12-03 | 清华大学 | Particle sampling device, analysis system and sampling method for vacuum environment of equipment |
-
2020
- 2020-08-25 CN CN202021785006.1U patent/CN213337678U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113655241A (en) * | 2021-08-19 | 2021-11-16 | 中国科学院苏州纳米技术与纳米仿生研究所 | Butt joint sample transfer device and optical system |
| CN113740108A (en) * | 2021-08-27 | 2021-12-03 | 清华大学 | Particle sampling device, analysis system and sampling method for vacuum environment of equipment |
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