CN113624565B - Trace atmosphere sampling detection device and trace atmosphere sampling detection method - Google Patents
Trace atmosphere sampling detection device and trace atmosphere sampling detection method Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims abstract description 110
- 238000005070 sampling Methods 0.000 title claims abstract description 63
- 238000012360 testing method Methods 0.000 claims abstract description 49
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- 230000007246 mechanism Effects 0.000 claims description 18
- 230000005540 biological transmission Effects 0.000 claims description 14
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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Abstract
The invention relates to a trace atmosphere sampling detection device and a trace atmosphere sampling detection method, wherein the trace atmosphere sampling detection device comprises a hollow detection cavity and a vacuum system, the detection cavity is communicated with the vacuum system, a testing device, a sample fixing device and a mass spectrometer are arranged in the detection cavity, the testing device is correspondingly arranged with the sample fixing device, the sample fixing device is used for fixing a sample, the testing device can break the airtight seal of the sample, and the mass spectrometer analyzes the escaping atmosphere of the sample. Compared with the prior art, the micro-atmosphere sampling and detecting device has the characteristics of high detection sensitivity and low analysis detection limit, and avoids adverse effects on the internal atmosphere diffusion of a sample by arranging the internal atmosphere sampling and detecting and analyzing structure in the same cavity, and even if the atmosphere gas in the sample is few, the internal atmosphere sampling and detecting and analyzing structure can be fully diffused in the detecting cavity, so that a mass spectrometer can acquire and test and analyze the sample.
Description
Technical Field
The invention relates to the technical field of electronic information, in particular to a micro-atmosphere sampling and detecting device and a micro-atmosphere sampling and detecting method.
Background
The packaging classification of microelectronic devices can be classified into hermetic packages and non-hermetic packages according to the form of the seal. The sealing material of the airtight sealing device is metal, ceramic, glass and the like, the inside of the sealing structure is a cavity, and high-purity nitrogen or other inert gases are filled in the cavity. Besides the matrix gas, the atmosphere in the cavity may introduce vapor, oxygen, carbon dioxide, and organic gases such as methanol, ethanol, acetone, toluene, etc. released by volatilization of the organic materials during the packaging process of the components, so that corrosion of internal metals is accelerated, and the reduction of the insulating performance of the components or the out-of-tolerance parameters are key factors affecting the reliability of the hermetically packaged components. Therefore, the application of high reliability demands makes clear demands on the internal atmosphere components of the airtight device and the contents thereof, for example, the national and army standards clearly specify that the internal moisture content cannot exceed 5000ppm.
Based on this, it is necessary to sample and analyze the internal atmosphere within the microelectronic device. The most commonly used internal atmosphere analysis method at present is a mass spectrometry method, and the principle is that after the airtight package of a sample is destroyed, the internal atmosphere is sent into a vacuum cavity for mass spectrometry for ionization, ions with different mass-to-charge ratios are formed into ion beams under the action of an accelerating electric field, and the ion beams enter a mass analyzer and are focused at different points according to the mass-to-charge ratio to form a mass spectrogram, so that the composition and the content of the internal atmosphere are obtained.
According to this analysis method, the internal atmosphere sampling and detecting device of the microelectronic device in the prior art is generally divided into two parts of structures of internal atmosphere sampling and detecting analysis, and the two parts are connected through a gas path channel. Due to the existence of the gas path channel, the structure is relatively complex, and importantly, the adsorption effect of the gas path pipeline wall, the dead space at the corner of the structure and the like can limit the sampled internal atmosphere to enter the detection analysis part, so that the detection limit is influenced.
Disclosure of Invention
Accordingly, it is necessary to provide a trace atmosphere sampling and detecting device and a trace atmosphere sampling and detecting method for solving the problem that the internal atmosphere cannot be sufficiently supplied to the detection and analysis section in the prior art.
The invention discloses a trace atmosphere sampling and detecting device which comprises a hollow detecting cavity and a vacuum system, wherein the detecting cavity is communicated with the vacuum system, a testing device, a sample fixing device and a mass spectrometer are arranged in the detecting cavity, the testing device is arranged corresponding to the sample fixing device, the sample fixing device is used for fixing a sample, the testing device can break the airtight seal of the sample, and the mass spectrometer analyzes the atmosphere escaping from the sample.
In one embodiment, the mass spectrometer is disposed proximate to a communication between the vacuum system and the detection chamber.
In one embodiment, the sample holder is disposed proximate to the mass spectrometer.
In one embodiment, the sample fixing device comprises a sample fixing structure and a sample fixing frame, the sample fixing frame is fixedly connected to the detection cavity, the sample fixing structure is arranged on the sample fixing frame, and the sample is arranged on the sample fixing structure.
In one embodiment, the sample fixing frame comprises a fixing part and a moving part, the fixing part is fixed with the detection cavity, the moving part is movably connected with the fixing part, and the sample fixing structure is fixed on the moving part.
In one embodiment, the fixed member is connected with the movable member clamping groove.
In one embodiment, the testing device is a manual puncture mechanism, and comprises a puncture needle and a transmission mechanism, wherein the puncture needle is positioned in the detection cavity, the transmission mechanism penetrates through the cavity wall of the detection cavity, the puncture needle is connected with the transmission mechanism, and the transmission mechanism can drive the puncture needle to move.
In one embodiment, the micro-atmosphere sampling and detecting device further comprises a vacuum detecting device and a controller, wherein the controller is electrically connected with the vacuum detecting device and the testing device respectively, the vacuum detecting device sends the vacuum degree in the detecting cavity to the controller in real time, the controller compares the vacuum degree with a preset value, and when the vacuum degree reaches the preset value, the controller closes the testing device.
The invention also discloses a trace atmosphere sampling detection method which is applied to any trace atmosphere sampling detection device and comprises the following steps:
(1) Setting the sample on the sample fixing device, opening the vacuum system to make the detection cavity reach the specified vacuum degree,
(2) Operating the testing device to cause the testing device to break the hermetic seal of the sample,
(3) Maintaining the vacuum system in a working state, starting a mass spectrometer to complete internal atmosphere sampling analysis,
(4) Closing the vacuum system, and taking down the sample from the sample fixing device;
And (5) circularly executing the steps (1) - (4).
In one embodiment, the micro-scale atmosphere sampling detection method further comprises, after step (4), re-opening the vacuum system and, before step (1), closing the vacuum system.
Advantageous effects
Compared with the prior art, the micro-atmosphere sampling detection device has the advantages that the internal atmosphere sampling and detection analysis structure is arranged in the same cavity, and compared with the prior art, the micro-atmosphere sampling detection device does not need to be provided with structures such as gas paths and channels and the like and having space dead angles, so that adverse effects on the diffusion of the internal atmosphere of a sample are avoided, even if the atmosphere gas in the sample is small, the micro-atmosphere sampling detection device can be fully diffused in the detection cavity, so that a mass spectrometer can acquire and test and analyze the atmosphere gas, and therefore, the micro-atmosphere sampling detection device has the characteristics of high detection sensitivity and low analysis detection limit.
Drawings
FIG. 1 is a schematic diagram of a trace atmosphere sampling and detecting apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a sample holder of a trace atmosphere sampling detection apparatus according to an embodiment of the present invention;
Wherein 1 is the detection cavity, 2 is the vacuum system, 3 is the testing arrangement, 4 is sample fixing device, 5 is the mass spectrometer, 6 is the vacuum detection device, 7 is the sample, 11 is the apron, 12 is auxiliary seal structure, 41 is sample fixing structure, 42 is sample mount, 421 is the mounting, 422 is the moving part, 51 is the ion source, 52 is mass analyzer, 53 is the detector.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the invention, whereby the invention is not limited to the specific embodiments disclosed below.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
Referring to fig. 1, as shown in fig. 1, the micro-atmosphere sampling detection device according to an embodiment of the present invention includes a hollow detection cavity 1, a testing device 3, a sample fixing device 4 and a mass spectrometer 5 are disposed in the detection cavity 1, the testing device 3 is disposed corresponding to the sample fixing device 4, the sample fixing device 4 is used for fixing a sample 7, the testing device 3 breaks the airtight seal of the sample 7, the mass spectrometer 5 analyzes the atmosphere escaping from the sample 7, the micro-atmosphere sampling detection device further includes a vacuum system 2, and the detection cavity 1 is communicated with the vacuum system 2.
In the trace atmosphere sampling and detecting device of the invention, the regular-shaped airtight sample 7, or the airtight sample 7 with irregular shell surface or the airtight sample 7 with fragile shell surface can be arranged on the sample fixing device 4, and the detecting cavity 1 is vacuumized by using the vacuum system 2 such as a vacuum pump, so as to finish sampling preparation. After that, the testing device 3 is operated to break the airtight seal of the sample 7, and the internal atmosphere of the broken sample 7 rapidly escapes and spreads to the whole internal space of the detection cavity 1 due to the vacuum state of the detection cavity 1, so that the mass spectrometer 5 also positioned in the detection cavity 1 can complete the test analysis of the atmosphere gas of the sample 7. According to the micro-atmosphere sampling detection device, the internal atmosphere sampling and detection analysis structures are arranged in the same cavity, and compared with the prior art, the micro-atmosphere sampling detection device does not need to be provided with structures such as gas paths and channels and the like and having space dead angles, so that adverse effects on the diffusion of the internal atmosphere of the sample 7 are avoided, even if the atmosphere gas in the sample 7 is very small, the micro-atmosphere sampling detection device can be fully diffused in the vacuum detection cavity 1, so that the mass spectrometer 5 can acquire and test and analyze the atmosphere gas, and therefore, the micro-atmosphere sampling detection device has the characteristics of high detection sensitivity and low analysis detection limit.
Wherein preferably in one of the embodiments the mass spectrometer 5 is arranged in the vicinity of the communication of the vacuum system 2 with the detection chamber 1. In order to ensure the vacuum degree of the detection cavity 1, the vacuum system 2 continuously pumps out the gas from the detection cavity 1, so that the pressure of the communication part between the vacuum system 2 and the detection cavity 1 is lower than the pressure of other positions in the detection cavity 1, and the gas has a tendency to spontaneously flow from a high pressure position to a low pressure position, when the sample 7 is destroyed, the internal atmosphere gas spontaneously diffuses to the communication part between the vacuum system 2 and the detection cavity 1, and by arranging the mass spectrometer 5 near the communication part between the vacuum system 2 and the detection cavity 1, the internal atmosphere gas of the sample 7 can be obtained by the mass spectrometer 5 at the first time for further test analysis, so that the detection sensitivity of the micro atmosphere sampling detection device can be further improved and the detection limit can be reduced. Similarly, in one of the embodiments, the sample holder 4 is disposed in the vicinity of the mass spectrometer 5. This allows the internal atmosphere of the sample 7 to be obtained by the mass spectrometer 5 at the fastest speed after diffusion when the sample is broken in the airtight seal by the test device 3, improving the detection sensitivity and reducing the detection limit of the trace atmosphere sampling detection device of the present invention.
Specifically, in one embodiment, as shown in fig. 1, the micro-atmosphere sampling detection apparatus according to the present invention includes a mass spectrometer 5 including an ion source 51, a mass analyzer 52, and a detector 53. When the hermetic seal of sample 7 is broken, the internal atmosphere gas rapidly diffuses to ion source 51, which ion source 51 ionizes the internal atmosphere gas into positively charged ions of different charge-to-mass ratios, forming an ion beam by the action of the accelerating electric field, and entering mass analyzer 52. In the mass analyzer 52, the ions with different charge-to-mass ratios are separated spatially or temporally by using an electric field or a magnetic field, or are focused on the detectors 53 by filtering, and the detectors 53 convert the separated ions into electric signals to obtain mass spectrograms, so as to obtain a spectrum with mass and concentration (or partial pressure) related, and complete the test analysis of the internal atmosphere of the sample 7.
Specifically, in one embodiment, the sample fixing device 4 includes a sample fixing structure 41 and a sample fixing frame 42, the sample fixing frame 42 is fixedly connected to the detection cavity 1, the sample fixing structure 41 is disposed on the sample fixing frame 42, and the sample 7 is disposed on the sample fixing structure 41. It will be appreciated that the invention is not limited to the particular form of the sample holding structure 41 and the sample holder 42. For example, in some embodiments, the sample holding structure 41 is a recess provided on the sample holder 42, in which the sample 7 is mounted. Wherein preferably the recess matches the shape of the sample 7, thereby ensuring that the test device 3 does not slip off the sample 7 when the air seal is broken. In still other embodiments, as shown in fig. 1, the sample fixing structure 41 is a boss that is higher than the sample fixing frame 42, and the sample 7 is adhered to the boss through double sided tape. Through setting up the boss, can make sample 7 is more easily destroyed by testing arrangement 3, and the mode that the double faced adhesive tape pasted has reduced the loaded down with trivial details nature of changing sample 7 when guaranteeing that sample 7 has sufficient stability. Preferably, in some embodiments as shown in fig. 2, the sample fixing frame 42 includes a fixing member 421 and a movable member 422, the fixing member 421 is fixed to the detection cavity 1, the movable member 422 is movably connected to the fixing member 421, and the sample fixing structure 41 is fixed to the movable member 422. Because the sample 7 is usually small in volume, the technical scheme of directly replacing the sample 7 can easily lead the testing device 3 to be unable to be opposite to the sample 7, so that the airtight seal of the sample 7 can not be completely destroyed, and the internal atmosphere can not completely escape into the detection cavity 1, thereby influencing the use convenience and accuracy of the micro-atmosphere sampling detection device. By using the technical scheme of this embodiment, the sample 7 can be pre-fixed at the correct position on the movable member 422, when the sample 7 is replaced, only the movable member 422 needs to be replaced, and at this time, the airtight seal of the sample 7 can be completely destroyed by the testing device 3, so that the internal atmosphere can be completely escaped, and the high detection sensitivity and the lower detection limit of the trace atmosphere sampling detection device of the invention are effectively ensured. Specifically, the fixing member 421 is connected to the movable member 422 by a slot. In this embodiment, as shown in fig. 2, a dovetail groove is formed at the lower end of the movable member 422, and a guide rail is formed at the top end of the fixed member 421 corresponding to the dovetail groove, and the guide rail can be inserted into the dovetail groove, so that the movable member 422 can slide relative to the fixed member 421.
It will be appreciated that the test device 3 of the present invention has a variety of implementations. In some embodiments, the testing device 3 is a manual puncture mechanism, and includes a puncture needle and a transmission mechanism, where the puncture needle is located in the detection cavity 1, and the transmission mechanism penetrates through a cavity wall of the detection cavity 1 under the condition of ensuring tightness of the detection cavity 1, and the puncture needle is connected with the transmission mechanism, and the transmission mechanism can drive the puncture needle to move. Taking the embodiment shown in fig. 1 as an example, the transmission mechanism can drive the puncture needle to move in the vertical direction. When the testing device 3 is operated, an operator controls the transmission mechanism to enable the puncture needle positioned in the detection cavity 1 to move, the puncture needle is contacted with the sample 7 in the moving process, the shell of the sample 7 is pierced, and the atmosphere in the sample 7 is released in a very short time, so that the mass spectrometer 5 can complete sampling analysis. In other embodiments, the testing device 3 is an electric puncture mechanism, and includes a stepper motor, a stepper rod, and a puncture rotating head, where the stepper rod can be driven by the stepper motor to extend or shorten, and the puncture rotating head is connected with the stepper rod.
Preferably, the trace atmosphere sampling detection device of the present invention further comprises a vacuum detection device 6 for detecting the vacuum degree inside the detection cavity 1. By using the vacuum detection device 6 to detect the air pressure in the detection cavity 1 in real time, once the air seal of the sample 7 is broken by the test device 3, the air pressure in the detection cavity 1 rises rapidly, which indicates that the sample 7 has been pierced, and at this time, the test device 3 can be stopped immediately. Compared with the prior art, the trace atmosphere sampling and detecting device provided by the invention can clearly know whether the sample 7 is damaged in airtight seal, and avoid the damage of the structure in the sample 7 caused by excessive damage, thereby adversely affecting the internal atmosphere result. Further, the micro-atmosphere sampling and detecting device of the present invention may further include a controller, the controller is electrically connected to the vacuum detecting device 6 and the testing device 3, the vacuum detecting device 6 sends the vacuum degree in the detecting cavity 1 to the controller in real time, the controller compares the vacuum degree with a preset value, and when the vacuum degree reaches the preset value, the controller closes the testing device 3. Specifically, the vacuum detection device 6 may be a vacuum gauge.
Specifically, in the embodiment shown in fig. 1, the detection cavity 1 is provided with an opening for placing the sample 7 and other devices inside the detection cavity 1, the detection cavity 1 is provided with a cover plate 11 corresponding to the opening, and an auxiliary sealing structure 12, such as a sealing ring or sealing grease, is further provided between the cover plate 11 and the detection cavity 1.
The invention also discloses a trace atmosphere sampling detection method which is applied to any trace atmosphere sampling detection device and comprises the following steps:
(1) The sample 7 is arranged on the sample fixing device 4, the vacuum system 2 is opened to enable the detection cavity 1 to reach a specified vacuum degree,
(2) Operating the testing device 3, causing the testing device 3 to break the airtight seal of the sample 7,
(3) Maintaining the vacuum system 2 in an operating state, starting the mass spectrometer 5 to complete the internal atmosphere sampling analysis,
(4) The vacuum system 2 is turned off and the sample 7 is removed from the sample holder 4.
By continuously repeating the trace atmosphere sampling detection method, a plurality of samples 7 can be continuously detected, compared with the prior art, the operation steps are greatly simplified, the internal atmosphere of the samples 7 can be sampled and detected with higher sensitivity and lower detection limit, and the accuracy of the test result is improved.
Wherein preferably, after step (4), the vacuum system 2 is re-opened and before step (1), the vacuum system 2 is closed. Therefore, the trace atmosphere sampling detection device can be ensured not to be polluted when not in use, and the device in the detection cavity 1 can ensure the same working state as much as possible, so that the accuracy of a detection result is ensured.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (9)
1. The micro-atmosphere sampling and detecting device is characterized by comprising a hollow detecting cavity and a vacuum system, wherein the detecting cavity is communicated with the vacuum system, a testing device, a sample fixing device and a mass spectrometer are arranged in the detecting cavity, the testing device is arranged corresponding to the sample fixing device, the sample fixing device is used for fixing a sample, the testing device can break the airtight seal of the sample, and the mass spectrometer is used for analyzing the atmosphere escaping from the sample;
the sample fixing device comprises a sample fixing structure and a sample fixing frame, the sample fixing frame is fixedly connected to the detection cavity, and the sample fixing structure is arranged on the sample fixing frame; the sample fixing frame comprises a movable piece, and the sample is arranged on the movable piece;
The micro-atmosphere sampling detection device further comprises a vacuum detection device and a controller, the controller is electrically connected with the vacuum detection device and the testing device respectively, the vacuum detection device sends the vacuum degree in the detection cavity to the controller in real time, the controller compares the vacuum degree with a preset value, and when the vacuum degree reaches the preset value, the controller closes the testing device.
2. The trace atmosphere sampling detection apparatus according to claim 1, wherein the mass spectrometer is disposed proximate to a communication between the vacuum system and the detection cavity.
3. The micro-atmosphere sampling detection device of claim 1, wherein the sample fixture is disposed proximate to the mass spectrometer.
4. The trace atmospheric sampling testing apparatus according to claim 3, wherein the sample holder comprises a fixing member, the fixing member is fixed to the testing cavity, the movable member is movably connected to the fixing member, and the sample fixing structure is fixed to the movable member.
5. The trace atmospheric sampling testing apparatus according to claim 4, wherein the stationary member is connected to the movable member clamping groove.
6. The trace atmosphere sampling detection apparatus according to claim 1, wherein the testing apparatus is a manual puncture mechanism, and comprises a puncture needle and a transmission mechanism, wherein the puncture needle is positioned in the detection cavity, the transmission mechanism penetrates through a cavity wall of the detection cavity, the puncture needle is connected with the transmission mechanism, and the transmission mechanism can drive the puncture needle to move.
7. The trace atmosphere sampling and detecting device according to claim 1, wherein the detecting cavity is provided with an opening for arranging a sample and other devices inside the detecting cavity, the detecting cavity is provided with a cover plate corresponding to the opening, and an auxiliary sealing structure is further arranged between the cover plate and the detecting cavity.
8. A trace atmosphere sampling detection method, characterized in that the trace atmosphere sampling detection apparatus according to any one of claims 1 to 7 is employed, comprising the steps of:
(1) Setting the sample on the sample fixing device, opening the vacuum system to make the detection cavity reach the specified vacuum degree,
(2) Operating the testing device to cause the testing device to break the hermetic seal of the sample,
(3) Maintaining the vacuum system in a working state, starting a mass spectrometer to complete internal atmosphere sampling analysis,
(4) Closing the vacuum system, and taking down the sample from the sample fixing device;
And (5) circularly executing the steps (1) - (4).
9. The method of claim 8, further comprising re-opening the vacuum system after step (4) and closing the vacuum system before the next step of step (1).
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|---|---|---|---|---|
| CN114324546A (en) * | 2021-12-18 | 2022-04-12 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method for detecting internal atmosphere of vacuum packaging device, airtight container and detection equipment |
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