CN218182163U

CN218182163U - Self-opening and self-closing vacuum displacement device suitable for scanning electron microscope

Info

Publication number: CN218182163U
Application number: CN202222409041.9U
Authority: CN
Inventors: 靳凤民; 田娜娜; 胡佳其; 高彤彤; 刘士新; 方卉
Original assignee: Tianjin University
Current assignee: Tianjin University
Priority date: 2022-09-08
Filing date: 2022-09-08
Publication date: 2022-12-30
Anticipated expiration: 2032-09-08

Abstract

The utility model relates to a material observation technical field, and a move device certainly, from true idle suitable for scanning electron microscope that opens and shuts, the inside wall of sealed door is close to bottom position department and is provided with the main spring, the last one end fixedly connected with main spring buckle mechanism who keeps away from sealed door of main spring, the one end of main spring buckle mechanism is provided with secondary vacuum cavity, fixedly connected with main shaft sleeve pipe on the lateral wall of secondary vacuum cavity, the one end of main spring buckle mechanism is provided with pressure differential and actuates the piston, pressure differential actuates the piston and sets up in the inside of main shaft sleeve pipe, the inside of main shaft sleeve pipe is provided with piston reset spring, fixedly connected with one-way air valve on the lateral wall of secondary vacuum cavity. This from real idle migration device that opens and shuts suitable for scanning electron microscope is through the sealed save to the sensitive sample of air of the whole journey of transfer storehouse body to the reuse rate and the safe storability of the sensitive sample of air have been improved greatly.

Description

Self-opening and self-closing true-motion moving device suitable for scanning electron microscope

Technical Field

The utility model relates to a technical field is surveyed to the material, specifically is a move device from real idle of opening and shutting suitable for scanning electron microscope.

Background

The microstructure of the material determines the macroscopic performance, and a scanning electron microscope (scanning electron microscope for short) is one of the important means for observing the microstructure of the material and plays a great role in the field of material research. However, in practical tests, samples sensitive to air are often encountered, and the samples are extremely active in nature and are prone to irreversible chemical reactions with oxygen or water vapor in the air, so that the surface topography and the element components of the samples are changed. Therefore, without protective measures against air, such samples cannot be observed and analyzed for true morphology and elemental composition. Vacuum transfer devices designed for such samples are undoubtedly an effective means.

At present, most of vacuum transfer devices designed for scanning electron microscope sensitive samples adopt a motor driving mode. In addition, an electronic control interface is required to be provided for the scanning electron microscope, which relates to the problem of compatibility of instrument interfaces of different models and specifications, undoubtedly increases the modification cost and complexity of the instrument, and limits the application range of the instrument to a certain extent.

Although there are also vacuum transfer sample stages that do not require electrical drive, this is relatively rare. Publication No. CN212387290U discloses a self-driven sample transfer device which does not need to be driven by electric power, but can only be opened in one direction, and cannot be closed after the test is completed, so that the tested sample can be exposed in the air, and if the sample needs to be recovered or other subsequent experiments cannot be carried out. While another patent (CN 107768221A) also opens the gland unidirectionally by means of pressure difference, but the design adopts a vacuum sealing structure in a flip-open manner, and this design has a risk of striking a scanning electron microscope probe during the opening process of the gland.

In order to solve the above problems, we have designed a self-opening and self-closing vacuum displacement device suitable for scanning electron microscope, which is used to solve the above problems mentioned in the background.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a move device from true empty of opening and shutting suitable for scanning electron microscope to solve the problem that proposes among the above-mentioned background art.

In order to solve the technical problem, the utility model provides a following technical scheme: a self-opening and self-closing true-running moving device suitable for a scanning electron microscope comprises a transfer cabin body, wherein one end of the transfer cabin body is provided with a sealing cabin door, the other end of the transfer cabin body is fixedly connected with a detachable sealing cabin door through a bolt, and a needle valve is fixedly connected to the position, close to the bottom, on the outer side wall of the detachable sealing cabin door;

the inner side wall of the sealed bin door is fixedly connected with two sample bracket guide rails, and the outer side walls of the two sample bracket guide rails are connected with sample brackets in a sliding manner;

a main spring is arranged on the inner side wall of the sealing bin door and close to the bottom of the sealing bin door, a main spring buckling mechanism is fixedly connected to one end, far away from the sealing bin door, of the main spring, a secondary vacuum cavity is arranged at one end of the main spring buckling mechanism, a main shaft sleeve is fixedly connected to the outer side wall of the secondary vacuum cavity, a differential pressure actuating piston is arranged at one end of the main spring buckling mechanism, the differential pressure actuating piston is arranged inside the main shaft sleeve, a piston return spring is arranged inside the main shaft sleeve, and a one-way air valve is fixedly connected to the outer side wall of the secondary vacuum cavity;

the equal fixedly connected with door side ear piece in lateral wall both sides of sealed door, shift the equal fixedly connected with storehouse side ear piece in lateral wall both sides of the storehouse body, door side ear piece and storehouse side ear piece correspond the setting, two equal fixedly connected with door guide arm, two on the inside wall of door side ear piece the door guide arm runs through two storehouse side ear pieces, two respectively on the lateral wall of door guide arm in the opposite side position department of two storehouse side ear pieces all the cover is equipped with the secondary spring.

Preferably, the inner side wall of the sealing bin door is fixedly connected with sealing rings around the outer parts of the two sample bracket guide rails, and the sealing rings are mutually attached to the outer side wall of one end of the transfer bin body.

Preferably, the bottom of the secondary vacuum cavity is provided with a fixed support, and the fixed support is fixedly connected with the bottom of the inner side wall of the transfer bin body.

Compared with the prior art, the utility model discloses the beneficial effect who reaches is:

first, the utility model discloses a whole sealed of the empty air sensitive sample of the storehouse body that shifts is preserved to the reuse rate and the safe conservativeness of the sensitive sample of air have been improved greatly.

Second, the utility model discloses because simple structure is practical, consequently the volume occupies littleer, and the commonality is stronger like this, does not receive the restriction of speculum type number.

Drawings

FIG. 1 is a schematic view of the external structure of the present invention;

FIG. 2 is a schematic view of the internal cutting structure of the present invention;

fig. 3 is a schematic view of the overlooking plane structure of the present invention.

Wherein: 1. a transferring bin body; 2. sealing the bin gate; 3. a detachable sealing bin door; 4. a sample holder; 5. a sample carrier guide; 6. a seal ring; 7. a main spring; 8. a main spring latching mechanism; 9. a secondary vacuum chamber; 10. a needle valve; 11. a main shaft sleeve; 12. a differential pressure actuated piston; 13. a piston return spring; 14. a fixed bracket; 15. a door side ear piece; 16. a bin side ear block; 17. a bin gate guide rod; 18. a secondary spring; 19. a one-way air valve.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Please refer to FIGS. 1-3

Example one

The present embodiment is a specific implementation of a self-opening/closing vacuum displacement device for a scanning electron microscope.

A self-opening and self-closing true-running moving device suitable for a scanning electron microscope comprises a transfer cabin body 1, wherein one end of the transfer cabin body 1 is provided with a sealing cabin door 2, the other end of the transfer cabin body 1 is fixedly connected with a detachable sealing cabin door 3 through a bolt, and a needle valve 10 is fixedly connected to the position, close to the bottom, on the outer side wall of the detachable sealing cabin door 3;

the inner side wall of the sealed bin door 2 is fixedly connected with two sample bracket guide rails 5, and the outer side walls of the two sample bracket guide rails 5 are connected with sample brackets 4 in a sliding manner;

a main spring 7 is arranged at a position, close to the bottom, of the inner side wall of the sealing bin door 2, a main spring buckling mechanism 8 is fixedly connected to one end, far away from the sealing bin door 2, of the main spring 7, a secondary vacuum cavity 9 is arranged at one end of the main spring buckling mechanism 8, a main shaft sleeve 11 is fixedly connected to the outer side wall of the secondary vacuum cavity 9, a differential pressure actuating piston 12 is arranged at one end of the main spring buckling mechanism 8, the differential pressure actuating piston 12 is arranged inside the main shaft sleeve 11, a piston return spring 13 is arranged inside the main shaft sleeve 11, and a one-way air valve 19 is fixedly connected to the outer side wall of the secondary vacuum cavity 9;

the equal fixedly connected with door side ear piece 15 in the lateral wall both sides of sealed door 2, the equal fixedly connected with storehouse side ear piece 16 in the lateral wall both sides that shifts the storehouse body 1, door side ear piece 15 corresponds the setting with storehouse side ear piece 16, equal fixedly connected with door guide arm 17 on the inside wall of two door side ear pieces 15, two door guide arms 17 run through two storehouse side ear pieces 16 respectively, all overlap in the other side position department of two storehouse side ear pieces 16 on the lateral wall of two door guide arms 17 and be equipped with secondary spring 18.

By sliding the sample carrier 4 up and down on the sample carrier guide 5, the position of the sample carrier 4 is adjusted according to the size of the sample, and the adaptability of the device is improved.

Specifically, the inner side wall of the sealing bin door 2 is fixedly connected with a sealing ring 6 around the outer parts of the two sample bracket guide rails 5, and the sealing ring 6 is attached to the outer side wall of one end of the transfer bin body 1.

The sealing bin door 2 and the transferring bin body 1 are jointed and sealed through the sealing ring 6, so that the sealing ring 6 and the transferring bin body 1 are jointed more tightly, and a certain buffering effect is achieved.

Specifically, the bottom of the secondary vacuum cavity 9 is provided with a fixing bracket 14, and the fixing bracket 14 is fixedly connected with the bottom of the inner side wall of the transfer bin body 1.

Example two

The present embodiment is a specific embodiment of a main spring and its accessories of a self-opening/closing vacuum displacement device suitable for a scanning electron microscope.

The inside wall of sealed door 2 is close to bottom position department and is provided with main spring 7, the one end fixedly connected with main spring buckle mechanism 8 of sealed door 2 is kept away from on the main spring 7, the one end of main spring buckle mechanism 8 is provided with secondary vacuum cavity 9, fixedly connected with spindle sleeve 11 on the lateral wall of secondary vacuum cavity 9, the one end of main spring buckle mechanism 8 is provided with pressure differential and actuates piston 12, pressure differential actuates piston 12 and sets up in the inside of spindle sleeve 11, the inside of spindle sleeve 11 is provided with piston reset spring 13, fixedly connected with one-way air valve 19 on the lateral wall of secondary vacuum cavity 9.

EXAMPLE III

The present embodiment is a specific embodiment of an auxiliary spring and its accessory components of a self-opening/closing vacuum sliding device suitable for a scanning electron microscope.

Example four

The embodiment is a specific implementation mode of the working principle of the self-opening and self-closing vacuum translation device suitable for the scanning electron microscope.

The utility model provides a working principle that is applicable to scanning electron microscope's true migration device that opens and shuts certainly, the flow includes following step:

s1, placing a transfer bin body 1 in an open state into a glove box, wherein a main spring clamping mechanism 8 of the transfer bin body 1 is arranged in a clamping groove of a main shaft sleeve 11, and a main spring 7 is enabled to enable a sealing bin door 2 to be in an open state (similar to the working principle part of a sliding claw sleeve of a ball pen);

s2, fixing the sample on the sample bracket 4, and manually closing the sealing bin door 2;

s3, opening a switch of the needle valve 10, connecting a vacuum pump exhaust pipe with the needle valve 10, vacuumizing the transfer bin body 1, closing the switch of the needle valve 10 after the operation is finished, removing the vacuum pump exhaust pipe, keeping the internal pressure of the transfer bin body 1 consistent with the vacuum degree of the secondary vacuum cavity 9 at the moment, and keeping the differential pressure actuating piston 12 still;

s4, taking the transfer bin body 1 out of the glove box, placing the transfer bin body in a sample bin of a scanning electron microscope for vacuumizing, wherein when the pressure of the sample bin is consistent with the internal pressure of the transfer bin body 1, the sealing bin door 2 is bounced open under the comprehensive action of the main spring 7 and the auxiliary spring 18, and as the pressure is further increased, the vacuum degree of the secondary vacuum cavity 9 is also increased all the time and is always consistent with the pressure of the sample bin;

s5, performing electron microscope test when the vacuum degree required by the test is reached, vacuumizing the sample bin after the test is finished, wherein the pressure of the sample bin is gradually increased, the vacuum degree of the secondary vacuum cavity 9 is kept unchanged under the action of the one-way air valve 19 and is always lower than the external pressure, and due to the action of the internal and external pressure difference, the pressure difference actuating piston 12 moves rightwards, so that the main spring buckling mechanism 8 is bounced rightwards along the main shaft sleeve 11 of the secondary vacuum cavity 9, the main spring 7 fails and does not work any more, and the sealing bin door 2 is closed under the action of the auxiliary spring 18;

s6, the transfer bin body 1 is taken out from the sample bin and placed in a glove box, the needle valve 10 is opened to deflate, and the sample is taken out, so that the sample is always in an inert gas atmosphere, and the air-sensitive sample is well protected.

It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a from vacuum transfer device that opens and shuts suitable for scanning electron microscope, includes the transfer storehouse body (1), its characterized in that: a sealing bin door (2) is arranged at one end of the transfer bin body (1), a detachable sealing bin door (3) is fixedly connected to the other end of the transfer bin body (1) through a bolt, and a needle valve (10) is fixedly connected to the position, close to the bottom, on the outer side wall of the detachable sealing bin door (3);

the inner side wall of the sealed bin door (2) is fixedly connected with two sample bracket guide rails (5), and the outer side walls of the two sample bracket guide rails (5) are connected with sample brackets (4) in a sliding manner;

a main spring (7) is arranged at a position, close to the bottom, of the inner side wall of the sealing bin door (2), a main spring clamping mechanism (8) is fixedly connected to one end, far away from the sealing bin door (2), of the main spring (7), a secondary vacuum cavity (9) is arranged at one end of the main spring clamping mechanism (8), a main shaft sleeve (11) is fixedly connected to the outer side wall of the secondary vacuum cavity (9), a differential pressure actuating piston (12) is arranged at one end of the main spring clamping mechanism (8), the differential pressure actuating piston (12) is arranged inside the main shaft sleeve (11), a piston return spring (13) is arranged inside the main shaft sleeve (11), and a one-way air valve (19) is fixedly connected to the outer side wall of the secondary vacuum cavity (9);

the equal fixedly connected with door side ear piece (15) in lateral wall both sides of sealed door (2), shift equal fixedly connected with storehouse side ear piece (16) in lateral wall both sides of the storehouse body (1), door side ear piece (15) correspond with storehouse side ear piece (16) and set up, two equal fixedly connected with door guide arm (17), two on the inside wall of door side ear piece (15) door guide arm (17) run through two storehouse side ear pieces (16), two respectively in the opposite side position department of two storehouse side ear pieces (16) all overlap and be equipped with auxiliary spring (18) on the lateral wall of door guide arm (17).

2. The self-opening and self-closing vacuum translation device suitable for the scanning electron microscope according to claim 1, characterized in that: the inside wall of the sealing bin door (2) surrounds the outside fixedly connected with sealing rings (6) of the two sample bracket guide rails (5), and the sealing rings (6) are mutually attached to the outer side wall of one end of the transferring bin body (1).

3. The self-opening and self-closing vacuum displacement device suitable for the scanning electron microscope according to claim 1, characterized in that: the bottom of the secondary vacuum cavity (9) is provided with a fixed support (14), and the fixed support (14) is fixedly connected with the bottom of the inner side wall of the transfer bin body (1).