CN213832914U - Ultrahigh vacuum sample transfer mechanism - Google Patents
Ultrahigh vacuum sample transfer mechanism Download PDFInfo
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- CN213832914U CN213832914U CN202022643112.2U CN202022643112U CN213832914U CN 213832914 U CN213832914 U CN 213832914U CN 202022643112 U CN202022643112 U CN 202022643112U CN 213832914 U CN213832914 U CN 213832914U
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- 238000012546 transfer Methods 0.000 title claims abstract description 140
- 238000007789 sealing Methods 0.000 claims abstract description 20
- 238000002360 preparation method Methods 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910001868 water Inorganic materials 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- UBAZGMLMVVQSCD-UHFFFAOYSA-N carbon dioxide;molecular oxygen Chemical compound O=O.O=C=O UBAZGMLMVVQSCD-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
The utility model discloses an ultrahigh vacuum sample transfer mechanism, this ultrahigh vacuum sample transfer mechanism include the transfer body, carry article, passive aspirator pump, vacuometer and observation window. The transfer body is formed with the transfer chamber, is equipped with first vacuum flange, second vacuum flange, third vacuum flange and fourth vacuum flange on the transfer body, and first vacuum flange can be connected with sample preparation vacuum system sealing. The carrying piece is arranged in the transfer cavity and used for carrying a sample. The passive getter pump is hermetically connected with the second vacuum flange, and the passive getter pump can passively form and maintain a vacuum environment of the transfer chamber. The vacuum gauge is connected with the third vacuum flange in a sealing mode. The observation window is connected with a fourth vacuum flange in a sealing way, and the fourth vacuum flange is positioned on the top wall of the transfer body. The ultrahigh vacuum sample transfer mechanism can be conveniently transported for a long time and can maintain ultrahigh vacuum degree for a long time.
Description
Technical Field
The utility model relates to a sample vacuum shifts technical field, especially relates to an ultrahigh vacuum sample shifts mechanism.
Background
In order to prevent the product or sample prepared in the vacuum apparatus from being contaminated by the external environment and thus damaging the performance and structure of the product or sample, such as the product or sample and substances such as oxygen or water in the atmosphere, etc. to perform chemical reactions, the ultra-high vacuum transfer chamber is generally used to transfer the product or sample from one vacuum system to another vacuum system for further processing of the product or sample. In the prior art, an ultrahigh vacuum transfer cavity can only maintain an ultrahigh vacuum environment for a short time or an active (power supply required) device is required to maintain ultrahigh vacuum degree in the transfer cavity, the two methods are difficult to meet the requirement of maintaining the ultrahigh vacuum degree of the vacuum transfer cavity in a long-time transportation process and cannot meet the requirement of testing and analyzing samples transported to different units at present, and part of the samples need to be transported for a long distance and sent to different cities for testing and analyzing materials.
Therefore, there is a need for an ultra-high vacuum sample transfer mechanism that can maintain ultra-high vacuum for a long period of time and facilitate transportation for a long period of time.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an ultrahigh vacuum sample transfer mechanism can maintain the ultrahigh vacuum for a long time to be convenient for carry out long-time transportation.
For realizing the technical effect, the utility model discloses an ultrahigh vacuum sample shifts technical scheme as follows:
an ultra-high vacuum sample transfer mechanism comprising: the transfer body is provided with a transfer cavity, a first vacuum flange, a second vacuum flange, a third vacuum flange and a fourth vacuum flange, and the first vacuum flange can be hermetically connected with a sample preparation vacuum system; the object carrying piece is arranged in the transfer cavity and is used for carrying a sample; a passive getter pump sealingly connected to the second vacuum flange, the passive getter pump being capable of passively forming and maintaining a vacuum environment of the transfer chamber; the vacuum gauge is connected with the third vacuum flange in a sealing mode; and the observation window is in sealing connection with the fourth vacuum flange, and the fourth vacuum flange is positioned on the top wall of the transfer body.
Further, the passive getter pump comprises a getter pump.
Further, the ultrahigh vacuum sample transfer mechanism further comprises a gate valve, the gate valve is arranged between the first vacuum flange and the sample preparation vacuum system, and the gate valve is arranged between the second vacuum flange and the passive getter pump.
Furthermore, the first vacuum flange and the gate valve, the second vacuum flange and the gate valve, the third vacuum flange and the vacuum gauge, and the fourth vacuum flange and the observation window are all connected in an ultrahigh vacuum sealing mode such as metal sealing and welding.
Furthermore, the ultrahigh vacuum sample transfer mechanism also comprises a locking assembly, wherein one end of the locking assembly is hermetically connected with the transfer body, and the other end of the locking assembly is positioned in the transfer cavity and can lock the sample on the carrier.
Further, the locking assembly includes: one end of the driving piece is hermetically connected with the transfer body; the retaining member, the retaining member with the output of driving piece is connected, the retaining member is located in the transfer chamber, the retaining member can with the sample is locked on carry the thing.
Further, the retaining member includes a pin.
Further, the driving member comprises a vacuum cylinder and/or a vacuum electromagnet.
Further, the locking assembly is welded with the transfer body.
Further, the second vacuum flange, the third vacuum flange and the fourth vacuum flange are all arranged on the top wall of the transfer body.
The utility model has the advantages that: because the passive getter pump can passively form and maintain the vacuum environment of the transfer cavity, the ultrahigh vacuum sample transfer mechanism can bear a sample and carry out long-time transportation, and simultaneously can continuously maintain the vacuum environment of the transfer cavity in the long-time transportation process. In addition, the vacuum gauge can be convenient for operating personnel to detect the vacuum degree of the transfer cavity in real time, so that the operating personnel can fill high-purity inert gas into the vacuum cavity through the first vacuum flange after the vacuum degree reaches a preset value, so as to protect a sample, and meanwhile, the passive suction pump can be conveniently replaced before and after the ultrahigh vacuum sample transfer mechanism is transported. The observation window can be convenient for operating personnel to observe the relevant information of the sample inside the transfer cavity in real time. According to the utility model discloses an ultrahigh vacuum sample transfer mechanism can be convenient for long-time transportation to keep the vacuum environment of vacuum chamber in the transportation, have simple structure, small, be convenient for transport, the high and long advantage of vacuum hold time of vacuum, be favorable to testing analysis or accomplishing the lower one technology including the encapsulation in different regions to the sample that has the vacuum environment demand.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
Fig. 1 is a schematic structural diagram of an ultra-high vacuum sample transfer mechanism according to an embodiment of the present invention;
fig. 2 is an exploded view of an ultra-high vacuum sample transfer mechanism according to an embodiment of the present invention;
fig. 3 is a schematic view of an internal structure of a transfer body according to an embodiment of the present invention.
Reference numerals
1. A transfer body; 11. a transfer chamber; 12. a first vacuum flange; 13. a second vacuum flange; 14. a third vacuum flange; 15. a fourth vacuum flange;
2. carrying an object; 3. a passive getter pump; 4. a vacuum gauge; 5. an observation window; 6. a gate valve;
7. a locking assembly; 71. a drive member; 72. and a locking member.
Detailed Description
In order to make the technical problem solved by the present invention, the technical solution adopted by the present invention and the technical effect achieved by the present invention clearer, the technical solution of the present invention will be further explained by combining the drawings and by means of the specific implementation manner.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
It will be understood that the terms "central," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing and simplifying the invention, and do not indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.
The specific structure of the ultra-high vacuum sample transfer mechanism according to the embodiment of the present invention will be described below with reference to fig. 1 to 3.
As shown in fig. 1-3, fig. 1 discloses an ultra-high vacuum sample transfer mechanism, which comprises a transfer body 1, a carrying piece 2, a passive getter pump 3, a vacuum gauge 4 and an observation window 5. The transfer body 1 is provided with a transfer cavity 11, a first vacuum flange 12, a second vacuum flange 13, a third vacuum flange 14 and a fourth vacuum flange 15 are arranged on the transfer body 1, and the first vacuum flange 12 can be connected with a sample preparation vacuum system in a sealing mode. A carrier member 2 is provided in the transfer chamber 11, the carrier member 2 being for carrying a sample. The passive getter pump 3 is hermetically connected to the second vacuum flange 13, and the passive getter pump 3 is capable of passively forming and maintaining the vacuum environment of the transfer chamber 11. The vacuum gauge 4 is sealingly connected to a third vacuum flange 14. The observation window 5 is sealingly connected to a fourth vacuum flange 15, which fourth vacuum flange 15 is located on the top wall of the transfer body 1.
The passive getter pump 3 is capable of passively forming and maintaining the vacuum environment of the transfer chamber 11, and means that the passive getter pump 3 can perform evacuation processing of the transfer chamber 11 without a power supply and can maintain the vacuum environment of the transfer chamber 11 without a power supply for a long time.
It can be understood that, because the passive getter pump 3 can passively form and maintain the vacuum environment of the transfer cavity 11, the ultra-high vacuum sample transfer mechanism can bear a sample and carry out long-time transportation, and simultaneously can continuously maintain the vacuum environment of the transfer cavity 11 in the long-time transportation process, compared with an active common vacuum transfer device, the ultra-high vacuum sample transfer mechanism can have a smaller volume, the transportation convenience is greatly improved compared with the existing active vacuum transfer device, the passive getter pump 3 can avoid the vacuum environment in the transfer cavity 11 from being damaged in the long-time transportation process, and compared with the common vacuum transfer device, the sample can be in the ultra-high vacuum environment for a long time. In addition, the vacuum gauge 4 can be convenient for the operating personnel to detect the vacuum degree of the transfer cavity 11 in real time, so that the operating personnel can fill high-purity inert gas into the vacuum cavity through the first vacuum flange 12 after the vacuum degree reaches a preset value, so as to protect a sample, and meanwhile, the passive suction pump 3 can be conveniently replaced before and after the transportation of the ultrahigh vacuum sample transfer mechanism. The observation window 5 can facilitate an operator to observe information about the sample inside the transfer chamber 11 in real time.
According to the ultra-high vacuum sample transfer mechanism of this embodiment, can be convenient for long-time transportation to keep the vacuum environment in the vacuum chamber in the transportation, have simple structure, small, be convenient for transportation, vacuum degree height and the long advantage of vacuum maintenance time, be favorable to carrying out test analysis or accomplishing including the next technology of encapsulation in different regions to the sample that has the vacuum environment demand.
In some embodiments, the passive getter pump 3 comprises a getter pump.
It will be appreciated that the getter pump enables a long evacuation process without a power supply and maintains a vacuum environment in the transfer chamber 11, while also enabling the creation and maintenance of an ultra-high vacuum environment in the transfer chamber 11. In addition, the getter pump can usually absorb active gas including water, oxygen, carbon dioxide and other gases, but not absorb part of the inert gas, when the getter pump is used, high-purity inert gas can be filled in the transfer cavity 11 forming the ultrahigh vacuum environment, at the moment, the getter pump can continuously absorb the active gas in the vacuum cavity, the sample can be ensured to be positioned in the high-purity inert gas environment, and the getter pump can continuously absorb the active gas in the transportation process of the ultrahigh vacuum sample transfer mechanism, so that the safety of the sample in the long-time transportation process is further improved.
In some embodiments, as shown in fig. 1 and 2, the ultra-high vacuum sample transfer mechanism further comprises a gate valve 6, the gate valve 6 is arranged between the first vacuum flange 12 and the sample preparation vacuum system, and the gate valve 6 is arranged between the second vacuum flange 13 and the passive getter pump 3.
It can be understood that, through the above-mentioned structural arrangement, the transfer body 1 can be disconnected or opened and communicated with other systems through the gate valve 6, and the transfer body 1 can be disconnected or opened and communicated with the passive getter pump 3 through the gate valve 6, so that the first vacuum flange 12 can be closed through the gate valve 6 after inputting a sample or filling inert gas into the transfer cavity 11, and the passive getter pump 3 can evacuate the transfer cavity 11 and maintain the vacuum environment of the transfer cavity 11 by opening the gate valve 6.
In some embodiments, the first vacuum flange 12 and the gate valve 6, the second vacuum flange 13 and the gate valve 6, the third vacuum flange 14 and the vacuum gauge 4, and the fourth vacuum flange 15 and the observation window 5 are hermetically connected by ultra-high vacuum means such as sealing metal or welding.
It can be understood that, through the above structure arrangement, the leakproofness of the transfer cavity 11 can be further improved, the escape of inert gas in the transfer cavity 11 can be reduced, and the external air entering the transfer cavity 11 from the joint can also be reduced, so that the transfer cavity 11 can maintain an ultrahigh vacuum environment or an inert gas environment, and further, the sample in the transfer cavity 11 is effectively protected, and the sample is prevented from being polluted in long-time transportation.
Illustratively, the sealing metal can be provided as a sealing copper ring.
In some embodiments, as shown in fig. 2 and 3, the ultra-high vacuum sample transfer mechanism further comprises a locking assembly 7, one end of the locking assembly 7 is connected with the transfer body 1 in a sealing manner, and the other end is positioned in the transfer cavity 11 and can lock the sample on the object carrying piece 2.
It can be understood that the locking assembly 7 can lock the sample on the object carrying member 2, so that the sample can be stably arranged on the object carrying member 2 in the long-time transportation process without falling off from the object carrying member 2 or colliding with the inner wall of the transfer cavity 11, and the sample protection effect of the ultrahigh vacuum sample transfer mechanism is further improved.
In some embodiments, as shown in fig. 3, locking assembly 7 includes an actuating member 71 and a locking member 72. One end of the driving member 71 is hermetically connected with the transferring body 1. A locking member 72 is connected to the output end of the driving member 71, the locking member 72 being located in the transfer chamber 11, the locking member 72 being capable of locking the sample on the object holder 2.
It can be understood that the arrangement of the driving member 71 and the locking member 72 enables an operator to lock the sample on the object carrying member 2 by driving the locking member 72 to move outside the transfer body 1, which effectively improves the convenience of sample installation.
In some embodiments, retaining member 72 includes a pin.
It can be understood that the pin can be inserted into the through holes of the sample and the object carrying piece 2, so that the sample is locked on the object carrying piece 2, meanwhile, the sample cannot be damaged, and the sample can be effectively fixed on the object carrying piece 2.
Of course, in other embodiments of the present invention, the locking member 72 can be configured as a screw bolt or the like, and is not limited in detail.
In some embodiments, the drive member 71 comprises a vacuum cylinder and/or a vacuum electromagnet.
It can be understood that the vacuum cylinder and the vacuum electromagnet can drive the locking member 72 in the transfer chamber 11 in the ultra-high vacuum environment, so that the locking member 72 locks the sample on the object carrying member 2, thereby improving the installation effect of the sample.
In some embodiments, the locking assembly 7 is welded to the transfer body 1.
It will be appreciated that welding the locking assembly 7 to the transfer body 1 can further reduce the possibility of outside air entering the transfer chamber 11 from the junction of the locking assembly 7 and the transfer body 1, thereby ensuring a vacuum environment or inert gas environment in the transfer chamber 11 to ensure that the sample is in a safe and reliable transport environment during long-term transport.
Of course, in other embodiments of the present invention, the locking assembly 7 can be connected to the transfer body 1 by a flange, and is not limited in detail.
In some embodiments, as shown in fig. 1 and 3, a second vacuum flange 13, a third vacuum flange 14 and a fourth vacuum flange 15 are provided on the top wall of the transfer body 1.
It can be understood that, through the above structure arrangement, the passive getter pump 3, the vacuum window, the vacuum gauge 4 and other structures can be conveniently installed by the operator, and the passive getter pump 3, the vacuum window and the vacuum gauge 4 can be conveniently observed by the operator. In addition, since the sidewall of the transfer body 1 is provided with only the first vacuum flange 12, the installation of the transfer body 1 can be facilitated, reducing the possibility that the passive getter pump 3, the vacuum window and the vacuum gauge 4 are damaged during the long-term transportation of the ultra-high vacuum sample transfer mechanism.
Example (b):
an ultra-high vacuum sample transfer mechanism according to an embodiment of the present invention is described below with reference to fig. 1-3.
The ultra-high vacuum sample transfer mechanism of the embodiment comprises a transfer body 1, an object carrying piece 2, a passive getter pump 3, a vacuum gauge 4, an observation window 5, a gate valve 6 and a locking assembly 7.
The transfer body 1 is provided with a transfer cavity 11, a first vacuum flange 12, a second vacuum flange 13, a third vacuum flange 14 and a fourth vacuum flange 15 are arranged on the transfer body 1, and the first vacuum flange 12 can be connected with a sample preparation vacuum system in a sealing mode.
A gate valve 6 is arranged between the first vacuum flange 12 and the sample preparation vacuum system, and the gate valve 6 is arranged between the second vacuum flange 13 and the passive getter pump 3. The first vacuum flange 12 and the gate valve 6, the second vacuum flange 13 and the gate valve 6, the third vacuum flange 14 and the vacuum gauge 4, and the fourth vacuum flange 15 and the observation window 5 are all connected through sealing metal seal. A second vacuum flange 13, a third vacuum flange 14 and a fourth vacuum flange 15 are provided on the top wall of the transfer body 1.
A carrier member 2 is provided in the transfer chamber 11, the carrier member 2 being for carrying a sample.
The passive getter pump 3 is hermetically connected to the second vacuum flange 13, and the passive getter pump 3 is capable of passively forming and maintaining the vacuum environment of the transfer chamber 11. The passive getter pump 3 comprises a getter pump.
The vacuum gauge 4 is sealingly connected to a third vacuum flange 14.
The observation window 5 is sealingly connected to a fourth vacuum flange 15, which fourth vacuum flange 15 is located on the top wall of the transfer body 1.
One end of the locking component 7 is connected with the transferring body 1 in a sealing way, and the other end is positioned in the transferring cavity 11 and can lock the sample on the object carrying piece 2. The locking assembly 7 is welded to the transfer body 1. The locking assembly 7 comprises an actuating member 71 and a locking member 72. One end of the driving member 71 is hermetically connected with the transferring body 1. A locking member 72 is connected to the output end of the driving member 71, the locking member 72 being located in the transfer chamber 11, the locking member 72 being capable of locking the sample on the object holder 2. Retaining member 72 includes a pin. The drive member 71 comprises a vacuum cylinder and/or a vacuum electromagnet.
The ultra-high vacuum sample transfer mechanism according to the embodiment is used as follows:
the gate valve 6 connected with the first vacuum flange 12 is opened, the sample in the sample preparation vacuum system is put on the object carrying member 2 through the transmission mechanism, the driving member 71 is operated to drive the locking member 72 to lock the sample on the object carrying member 2, and the gate valve 6 connected with the first vacuum flange 12 is closed. And (3) opening a gate valve 6 connected with the passive getter pump 3, opening the passive getter pump 3, enabling the passive getter pump 3 to work and form an ultrahigh vacuum environment in the transfer cavity 11, and enabling the passive getter pump 3 to continuously work and maintain the ultrahigh vacuum environment in the transfer cavity 11.
Optionally, when the vacuum degree displayed by the vacuum gauge 4 is a preset value, an operator can select to communicate the gate valve 6 connected with the first vacuum flange 12 with the inert gas charging system, open the gate valve 6 connected with the first vacuum flange 12, charge enough inert gas into the vacuum chamber by the inert gas charging system, close the gate valve 6 connected with the first vacuum flange 12, and simultaneously, the passive getter pump 3 continuously works to adsorb active substances such as water, oxygen and the like in the transfer chamber 11.
In the description herein, references to the description of "some embodiments," "other embodiments," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only for the preferred embodiment of the present invention, and for those skilled in the art, there are variations on the detailed description and the application scope according to the idea of the present invention, and the content of the description should not be construed as a limitation to the present invention.
Claims (10)
1. An ultra-high vacuum sample transfer mechanism, comprising:
the sample preparation device comprises a transfer body (1), wherein a transfer cavity (11) is formed in the transfer body (1), a first vacuum flange (12), a second vacuum flange (13), a third vacuum flange (14) and a fourth vacuum flange (15) are arranged on the transfer body (1), and the first vacuum flange (12) can be in sealing connection with a sample preparation vacuum system;
the carrier piece (2) is arranged in the transfer cavity (11), and the carrier piece (2) is used for carrying a sample;
a passive getter pump (3), said passive getter pump (3) being hermetically connected to said second vacuum flange (13), said passive getter pump (3) being capable of passively creating and maintaining a vacuum environment of said transfer chamber (11);
the vacuum gauge (4), the vacuum gauge (4) is connected with the third vacuum flange (14) in a sealing way;
the observation window (5), observation window (5) with fourth vacuum flange (15) sealing connection, fourth vacuum flange (15) are located the roof of shift body (1).
2. Ultra-high vacuum sample transfer mechanism according to claim 1, wherein the passive getter pump (3) comprises a getter pump.
3. The ultra-high vacuum sample transfer mechanism according to claim 1, further comprising a gate valve (6), the gate valve (6) being arranged between the first vacuum flange (12) and the sample preparation vacuum system, the gate valve (6) being arranged between the second vacuum flange (13) and the passive getter pump (3).
4. The ultra-high vacuum sample transfer mechanism according to claim 3, wherein the first vacuum flange (12) and the gate valve (6), the second vacuum flange (13) and the gate valve (6), the third vacuum flange (14) and the vacuum gauge (4), and the fourth vacuum flange (15) and the observation window (5) are all welded or hermetically connected by a sealing metal.
5. The ultra-high vacuum sample transfer mechanism according to claim 1, further comprising a locking assembly (7), wherein one end of the locking assembly (7) is hermetically connected with the transfer body (1), and the other end is located in the transfer chamber (11) and can lock the sample on the carrier member (2).
6. The ultra-high vacuum sample transfer mechanism according to claim 5, wherein the locking assembly (7) comprises:
the driving piece (71), one end of the driving piece (71) is connected with the transfer body (1) in a sealing way;
a retaining member (72), the retaining member (72) being connected with an output end of the driving member (71), the retaining member (72) being located in the transfer chamber (11), the retaining member (72) being capable of retaining the sample on the carrier member (2).
7. The ultra-high vacuum sample transfer mechanism of claim 6, wherein the retaining member (72) comprises a pin.
8. The ultra-high vacuum sample transfer mechanism according to claim 7, wherein the driving member (71) comprises a vacuum cylinder and/or a vacuum electromagnet.
9. Ultra-high vacuum sample transfer mechanism according to claim 5, characterized in that the locking assembly (7) is welded to the transfer body (1).
10. Ultra-high vacuum sample transfer mechanism according to any of claims 1-9, wherein the second vacuum flange (13), the third vacuum flange (14) and the fourth vacuum flange (15) are all provided on the top wall of the transfer body (1).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022643112.2U CN213832914U (en) | 2020-11-16 | 2020-11-16 | Ultrahigh vacuum sample transfer mechanism |
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| CN202022643112.2U CN213832914U (en) | 2020-11-16 | 2020-11-16 | Ultrahigh vacuum sample transfer mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115108140A (en) * | 2022-06-20 | 2022-09-27 | 中国科学院国家天文台 | Moon sample storage device and system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115108140A (en) * | 2022-06-20 | 2022-09-27 | 中国科学院国家天文台 | Moon sample storage device and system |
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