CN111721793A - Sample vacuum transfer device suitable for miniaturized scanning electron microscope - Google Patents
Sample vacuum transfer device suitable for miniaturized scanning electron microscope Download PDFInfo
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- CN111721793A CN111721793A CN202010749226.7A CN202010749226A CN111721793A CN 111721793 A CN111721793 A CN 111721793A CN 202010749226 A CN202010749226 A CN 202010749226A CN 111721793 A CN111721793 A CN 111721793A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/09—Investigating materials by wave or particle radiation secondary emission exo-electron emission
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/102—Different kinds of radiation or particles beta or electrons
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
Abstract
The invention discloses a sample vacuum transfer device suitable for a miniaturized scanning electron microscope, which consists of a sealing cavity, a valve mechanism, a power mechanism and a bearing bracket, wherein the sealing cavity comprises a fixed bottom plate, a transfer device cavity, a sealing strip and a sealing cover plate, the valve mechanism is used for vacuumizing the sealing cavity, the power mechanism is used for opening and closing the sealing cover plate, a guide pillar is arranged between the fixed bottom plate and the sealing cover plate, a sample nail placing hole is arranged on the bearing bracket and horizontally arranged at the upper part of the rear side surface of the sealing cover plate, and only a fine space exists between the upper surface of the bearing bracket and the top of the inner wall of the transfer device cavity. The vacuum transfer device has the advantages of small volume, simple structure, good vacuum sealing performance and high reliability, is very suitable for a miniaturized scanning electron microscope in a narrow space, and can complete the vacuum sealing transfer of the air sensitive sample between the glove box and the miniaturized scanning electron microscope while ensuring low cost, thereby solving the problem of vacuum transfer of the air sensitive sample observed by the miniaturized scanning electron microscope.
Description
Technical Field
The invention belongs to the technical field of analysis and detection of materials of a scanning electron microscope, and particularly relates to a transfer device which is suitable for carrying out vacuum sealing and transferring samples between a glove box and a small scanning electron microscope.
Background
Scanning electron microscopes (scanning electron microscopes for short) are important tools for researching microstructure of materials, can represent morphology, structure and characteristics of micron/nanometer scale, and can qualitatively analyze component characteristics of the materials, so that the scanning electron microscopes have a large amount of applications in research and development, improvement, quality detection and other links of various materials. Conventional scanning electron microscopes can be broadly classified into a large-sized floor-type scanning electron microscope and a small-sized (desktop-type) scanning electron microscope. In recent years, with the updating and iteration of the technology, the miniaturized scanning electron microscope is increasingly favored by researchers, and the performance and the market occupation rate of the miniaturized scanning electron microscope gradually approach to the traditional large floor type electron microscope.
In the field of scanning electron microscope material detection, some samples are very active in nature and can also be called as air-sensitive samples. The sample is easy to react with oxygen, nitrogen, water vapor and other substances in the air, so that the appearance of the sample can be changed. Therefore, without protection of such samples, it is difficult to observe and analyze their true morphology and chemical composition.
For a large floor-type scanning electron microscope, the existing solutions mostly use an electron vacuum transfer chamber (an openable and closable closed chamber) to transfer a sample from a glove box or other preparation container filled with a protective gas to an air environment, and then place the whole transfer chamber filled with an air-sensitive sample into a large electron microscope. See "vacuum sample transfer device (publication No.: CN 104914264A)" and "a sample sealing and vacuum transfer device for cross-platform connection (publication No.: CN 110726746A)". Benefit from the sufficient space of large-scale console mode electron microscope, bulky parts such as arm, mechanical lever can be placed to its inside usually, treat that the transfer chamber gets into inside the electron microscope, and when the electron microscope is inside to reach certain vacuum, these arm or mechanical lever can open the transfer chamber switch, take out the sample from it, put into the electron microscope again and observe. Through the operation, the sample is not contacted with the air in the whole process from the glove box to the internal transfer of the electron microscope, so that the vacuum transfer process of the sample is realized.
However, for the increasingly desktop miniaturized scanning electron microscopes in the market, firstly, because the internal space of the desktop miniaturized scanning electron microscopes is very compact, it is difficult to install complicated large-volume components such as a mechanical arm and a mechanical rod in the desktop miniaturized scanning electron microscopes from a technical point of view to operate the transfer chamber; second, the high cost of the high precision electronic components is undesirable to the purchaser of the miniaturized electronic microscope. Therefore, based on the above two points, a vacuum transfer scheme directly applicable to a miniaturized scanning electron microscope is not seen in the market at present.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a sample vacuum transfer device suitable for a miniaturized scanning electron microscope, so that the vacuum transfer action of an air sensitive sample between a glove box and the miniaturized scanning electron microscope is completed at low cost, and the complete isolation of the sample and air is ensured when the miniaturized electron microscope is used for testing the air sensitive sample.
In order to solve the technical problems and achieve the technical effects, the invention is realized by the following technical scheme:
a sample vacuum transfer device suitable for a miniaturized scanning electron microscope is composed of a sealing cavity for sealing a sample to be tested, a valve mechanism for vacuumizing the sealing cavity, a power mechanism for opening or closing the sealing cavity, and a bearing bracket for bearing a scanning electron microscope sample nail.
The sealing cavity comprises a whole structure integrally milled by a fixed bottom plate and a transfer device cavity, the transfer device cavity is located on the front side face of the fixed bottom plate, the front portion of the transfer device cavity is open, a circle of sealing strip is arranged on the front side face of the edge of the opening of the transfer device cavity, an openable sealing cover plate is arranged on the opening of the transfer device cavity, when the sealing cover plate covers the opening of the transfer device cavity, the rear side face of the sealing cover plate is tightly attached to the sealing strip, the sealing cover plate is closed, and when the air pressure in the sealing cavity is lower than the outside, the structure can keep a stable sealing state under the action of pressure difference.
The valve mechanism comprises a needle valve, the needle valve is installed on the rear side face of the fixing base plate, one end of the needle valve penetrates through the fixing base plate and then is communicated with the cavity of the transfer device.
The power mechanism comprises a transmission part for controlling the opening and closing of the sealing cover plate and a driving part for driving the transmission part to move, the driving part is connected with the fixed bottom plate, and the transmission part is connected with the sealing cover plate.
Bear the bracket horizontal installation in the upper portion of sealed apron trailing flank, it places the hole to be provided with the sample nail that is used for bearing the used standard half inch nail formula sample platform of small-size scanning electron microscope on the bearing bracket, works as when sealed apron is opened, it stretches out completely to bear the bracket the transfer device cavity, works as when sealed apron is fashionable, it is located completely to bear the bracket the transfer device cavity, just the upper surface that bears the bracket with only there is slight interval between the inner wall top of transfer device cavity to avoid the interval too big and lead to the decay of the inside probe signal of electron microscope to shelter from even.
Further, PMKD with the transfer device cavity adopts cast aluminium alloy material and an organic whole mills to make a structure whole, just PMKD with the wall thickness of transfer device cavity is all not less than 4mm, in order to guarantee the shape stability of sealed chamber under great inside and outside differential pressure stress effect.
Furthermore, the sealing strip is an O-shaped sealing ring made of Teflon.
Further, the needle valve is a manual needle valve or an electric needle valve.
Further, the needle valve with realize the intercommunication through inside and outside screw thread structure between the transfer device cavity, and be located the outside screw thread structure on the PMKD adopts build-up welding or threaded connection or other lower gas leakage rate's connected mode with PMKD fixed connection in order to guarantee the use the leakproofness in sealed chamber.
Furthermore, the step motor adopts an ultrathin step motor which is suitable for the size of a miniaturized scanning electron microscope.
Furthermore, the lead screw is a precision lead screw made of stainless steel.
Further, the bearing bracket is provided with 9 sample nail placing holes.
Further, the distance between the upper surface of the bearing bracket and the top of the inner wall of the cavity of the transfer device is 2-5 mm.
Furthermore, the power mechanism comprises a stepping motor, a coupler and a lead screw, the stepping motor is installed on the rear side face of the fixed base plate, an output shaft of the stepping motor penetrates through the fixed base plate and then is fixedly connected with the coupler, the rear end of the lead screw is fixedly connected with the coupler, and the other end of the lead screw penetrates through the sealing cover plate in a threaded fit mode.
Furthermore, the power mechanism is a precise electric sliding table, a slide rail part of the precise electric sliding table is fixedly connected with the fixed base plate, and a slide block part of the precise electric sliding table is fixedly connected with the sealing cover plate.
Furthermore, the front side of the fixed bottom plate is also provided with at least one guide post for improving the opening and closing stability of the sealing cover plate, the rear end of the guide post is fixedly connected with the front side of the fixed bottom plate, and the front end of the guide post can slidably penetrate through the sealing cover plate.
The invention has the beneficial effects that:
1. the vacuum transfer device has the advantages of small volume, simple structure, good vacuum sealing performance and high reliability, is very suitable for a miniaturized scanning electron microscope in a narrow space, and can complete the vacuum sealing transfer of the air sensitive sample between the glove box and the miniaturized scanning electron microscope while ensuring low cost, thereby solving the problem of vacuum transfer of the air sensitive sample observed by the miniaturized scanning electron microscope.
2. The sealing cavity of the invention adopts a drawer type structure matched with the sealing ring, the core structure not only avoids the risk of impacting the scanning electron microscope probe in the opening process, but also the sealing ring matched with the core structure is not easy to deform and wear due to larger friction force, most importantly, the structure is simple, the position with possible air leakage is extremely few, the sealing cavity is the simplest vacuum structure with the lowest air leakage rate in all the existing vacuum sealing structures, the vacuum sealing performance is good, and the service life is long.
3. The power mode of the invention adopts the stepping motor to drive the lead screw for transmission, and has the characteristic of bidirectional transmission, so that the sealing cover plate of the sealing cavity can be freely opened and closed, the problem that the existing vacuum sealing structure can only be opened in one direction is solved, and the limitation of the existing vacuum transfer device in certain application scenes is removed.
4. The vacuum valve system is additionally arranged on the sealed cavity, and the sealed cavity can be vacuumized in a glove box with Ar/He and other inert gas environments, so that the pressure in the sealed cavity is reduced to ensure the sealing performance of the sealing cover plate, the storage amount of argon molecules in the sealed cavity is reduced as much as possible, a large amount of inert gas is prevented from being suddenly released when the sealed cavity is opened in a scanning electron microscope, the vacuum environment of the scanning electron microscope is disordered, and meanwhile, arc discharge of large-volume inert gas in the vacuum environment of the scanning electron microscope is prevented, and potential risks are reduced.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings. The detailed description of the present invention is given in detail by the following examples and the accompanying drawings.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
fig. 1 is a perspective view of a sample vacuum transfer apparatus suitable for a miniaturized scanning electron microscope according to the present invention in an open state.
Fig. 2 is a plan view structural view of the sample vacuum transfer apparatus in an open state, which is suitable for a miniaturized scanning electron microscope according to the present invention.
Fig. 3 is a top view structural view of the sample vacuum transfer apparatus in a closed state, which is suitable for a miniaturized scanning electron microscope according to the present invention.
The reference numbers in the figures illustrate: 1. the device comprises a sealing cover plate, 2, a bearing bracket, 3, a sealing strip, 4, a guide rail, 5, a transfer device cavity, 6, a needle valve, 7, a lead screw, 8, a coupler, 9, a stepping motor, 10, a fixed base plate, 11 and a sample nail placing hole.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
Referring to fig. 1-3, a sample vacuum transfer device suitable for a miniaturized scanning electron microscope comprises a sealing cavity, a valve mechanism, a power mechanism and a bearing bracket 2.
The sealed cavity is used for blocking a sample to be tested, and comprises a whole structure which is milled integrally by a fixed base plate 10 and a transfer device cavity 5, wherein the transfer device cavity 5 is positioned on the front side surface of the fixed base plate 10, the front part of the transfer device cavity 5 is open, a circle of sealing strip 3 is arranged on the front side surface of the open edge of the transfer device cavity 5, a sealing cover plate 1 which can be opened and closed is arranged on the open surface of the transfer device cavity 5, and when the sealing cover plate 1 is tightly covered on the open surface of the transfer device cavity 5, the rear side surface of the sealing cover plate 1 is tightly attached to the sealing strip 3, the sealing cover plate 1 is closed, and when the air pressure in the sealed cavity is lower than the outside, the structure can keep a stable sealing state under the action of pressure difference.
Valve mechanism is used for carrying out the evacuation to sealed chamber, including a needle valve 6, needle valve 6 installs the trailing flank of PMKD 10, just needle valve 6's one end with pass behind the PMKD 10 with transfer device cavity 5 intercommunication. The needle valve 6 can guarantee the vacuum degree in the sealing cavity, the sealing cover plate 1 is closed in a glove box or other gas protection containers, and the needle valve 6 is opened to vacuumize the sealing cavity. When the vacuum degree in the sealed cavity reaches a designated level, the needle valve 6 is closed. During the subsequent vacuum transfer, the needle valve 6 is always in the closed state, so that the inside of the seal chamber is maintained in a high vacuum state.
The power mechanism is used for opening or closing the sealing cavity and comprises a transmission part and a driving part, the transmission part is used for controlling the opening and closing of the sealing cover plate 1, the driving part is used for driving the transmission part to move, the driving part is connected with the fixed bottom plate 10, and the transmission part is connected with the sealing cover plate 1.
The bearing bracket 2 is used for bearing a standard half-inch nail type sample table used for a small scanning electron microscope, and air sensitive samples to be protected are adhered to the sample table. The bearing bracket 2 is horizontally arranged on the upper portion of the rear side face of the sealing cover plate 1, a sample nail placing hole 11 is formed in the bearing bracket 2, when the sealing cover plate 1 is opened, the bearing bracket 2 completely extends out of the transfer device cavity 5, when the sealing cover plate 1 is covered, the bearing bracket 2 is completely located in the transfer device cavity 5, only a slight interval exists between the upper surface of the bearing bracket 2 and the top of the inner wall of the transfer device cavity 5, and therefore the phenomenon that the interval is too large to cause attenuation and even shielding of an electron microscope internal probe signal is avoided.
As a further embodiment, the fixed base plate 10 and the transfer device cavity 5 are made of cast aluminum alloy materials and are milled integrally to form a structural whole, and the wall thickness of the fixed base plate 10 and the wall thickness of the transfer device cavity 5 are not smaller than 4mm, so that the shape stability of the sealed cavity under the action of the larger internal and external differential pressure stress is ensured.
As a further embodiment, the sealing strip 3 is an O-ring made of teflon.
As a further example, the needle valve 6 is a manual needle valve or an electric needle valve, and other valves capable of performing a vacuum sealing function can be used to replace the needle valve used in the device.
As a further embodiment, needle valve 6 with realize the intercommunication through inside and outside screw thread structure between the transfer device cavity 5, and be located external screw thread structure on the PMKD 10 adopt build-up welding or threaded connection or other lower gas leakage rate's connected mode with PMKD 10 fixed connection to guarantee in the use the leakproofness of seal chamber.
As a further embodiment, when the device is used, because the inside of the small scanning electron microscope is also in a high vacuum state, when the device is placed into the electron microscope, the pressure difference between the inside and the outside of the sealing cavity becomes small, so that the torque of the adopted stepping motor 9 does not need to be too large, and the purpose of driving the lead screw 7 to open and close the sealing cover plate 1 can be realized by selecting an ultrathin stepping motor which meets the size of the small scanning electron microscope.
As a further embodiment, the lead screw 7 is a precision lead screw made of stainless steel, and is used in cooperation with the guide post 4, so that the stability of the sealing cover plate 1 in the opening and closing movement process can be ensured.
As a further example, the bearing bracket 2 is provided with 9 sample nail placing holes 11, so that a plurality of samples can be transferred at one time.
As a further example, the upper surface of the carrier 2 is spaced from the top of the inner wall of the transfer device chamber 5 by 2-5 mm.
As a further embodiment, the power mechanism includes a stepping motor 9, a coupler 8 and a lead screw 7, the stepping motor 9 is installed on the rear side surface of the fixing base plate 10, an output shaft of the stepping motor 9 penetrates through the fixing base plate 10 and then is fixedly connected with the coupler 8, the rear end of the lead screw 7 is fixedly connected with the coupler 8, and the other end of the lead screw 7 penetrates through the sealing cover plate 1 through thread matching.
As a further embodiment, the front side of the fixed base plate 10 is further provided with at least one guide post 4 for improving the opening and closing stability of the sealing cover plate 1, the rear end of the guide post 4 is fixedly connected with the front side of the fixed base plate 10, and the front end of the guide post 4 slidably penetrates through the sealing cover plate 1.
As a further embodiment, the power mechanism has more choices, and a precise electric sliding table can be adopted to replace the stepping motor 9, the coupler 8 and the lead screw 7, the slide rail part of the precise electric sliding table is fixedly connected with the fixed bottom plate 10, and the slide block part of the precise electric sliding table is fixedly connected with the sealing cover plate 1.
The following is a detailed description of several main technical innovation points and benefits of the present invention:
1. drawer type vacuum sealing structure
As a core structure designed by the invention, the drawer type vacuum sealing structure is the structure which is the smallest, the simplest and the best in sealing performance compared with the vacuum sealing structure adopted by the existing sample vacuum transfer device.
The conventional non-drawer vacuum sealing structure may have the following problems:
(1) the complicated non-drawer type vacuum sealing structure is not suitable for a small scanning electron microscope with a narrow space, for example, the vacuum sealing structure in a flip cover mode is adopted, and the risk of impacting a probe of the scanning electron microscope exists in the opening process of the vacuum sealing structure;
(2) in the opening and closing process of a sealing rubber ring of a traditional non-drawer type vacuum sealing structure, the sealing rubber ring is subjected to friction force in the direction parallel to the plane of the sealing ring, deformation and abrasion are easy to generate, and the sealing performance and the service life are affected;
(3) for example, in the case of a special-shaped vacuum sealing structure using a louver, a hinge, or the like, the complicated shape may result in excessive leakage positions, which makes it difficult to perform sealing treatment.
The drawer type vacuum sealing structure completely avoids all the problems, tests prove that the sealing performance is excellent, the drawer type vacuum sealing structure is the simplest vacuum sealing structure with the lowest air leakage rate in all the existing vacuum moving devices, the drawer type vacuum sealing structure is used as a core structure claimed by the invention, and other similar drawable structures or similar structures designed under the initiation of the patent belong to the protection scope of the patent.
2. Power structure
The power structure of the invention is designed in such a way that the stepping motor drives the screw rod to carry out transmission, and the transmission structure has the advantage of bidirectional transmission, namely, the motion of the sealing cover plate can be opened or closed. Some existing sample vacuum transfer devices, which use a string for transmission, can only be opened but not closed, which has certain limitations in the application scenarios of the vacuum transfer devices. The power structure of the invention completely solves the problem that some existing vacuum sealing structures can only be opened in one direction.
3. Vacuum valve system
The vacuum valve system is not arranged in the existing large-scale scanning electron microscope vacuum transfer system, and the potential problem is that when a transfer bin gate is opened, a large amount of argon gas in the transfer bin gate can be suddenly released in vacuum to cause the disorder of the scanning electron microscope vacuum system, the argon gas can cause electric arc discharge, and 5-30kV high-voltage electricity is loaded in the scanning electron microscope, so that the large-size argon gas can possibly cause the internal discharge of the scanning electron microscope, and potential danger is formed.
The vacuum valve system avoids the problem, and the transfer device is vacuumized when being arranged in the glove box, so that the pressure inside the glove box is low, the storage amount of argon molecules is very small, a large amount of gas cannot be suddenly released when the glove box is opened in a scanning electron microscope, and the potential risk of arc discharge does not exist.
The main working process of observing the air-sensitive sample by using the vacuum transfer device of the invention is as follows:
1. in a glove box (mostly in an inert gas environment such as Ar/He) and the like, opening a needle valve of the vacuum transfer device, opening a sealing cover plate of the vacuum transfer device through a power mechanism consisting of a stepping motor, a coupler and a lead screw, then adhering the prepared sample on a nail-type sample table, and inserting the nail-type sample table adhered with the sample on a bearing bracket of the vacuum transfer device;
2. after a sample is placed, a sealing cover plate of the vacuum transfer device is closed through a power mechanism consisting of a stepping motor, a coupler and a lead screw, then a vacuum pump (the type is not limited) is used for vacuumizing a sealing cavity through a needle valve, when the pressure in the sealing cavity is slightly lower than the working vacuum degree of a target small scanning electron microscope sample bin, vacuumizing can be stopped, the needle valve is closed, and at the moment, a vacuum sealing environment is formed inside the sealing cavity under the action of internal and external differential pressure;
3. taking out the vacuum transfer device in the vacuum sealing state from the glove box, and loading the vacuum transfer device into a small scanning electron microscope, wherein the sealing cavity of the transfer device is still in a sealing state under the action of internal and external pressure differences in the process;
4. the small scanning electron microscope working bin is vacuumized, after the small scanning electron microscope working bin reaches the required vacuum degree of work, a power mechanism consisting of a stepping motor, a coupler and a lead screw is used for opening a sealing cover plate of the vacuum transfer device, exposing a sample on the bearing bracket and starting to observe.
In all the processes, the sample in the transfer device is not contacted with the air all the time, namely the vacuum transfer process from the glove box to the miniature electron microscope is completed.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. The utility model provides a sample vacuum transfer device suitable for miniaturized scanning electron microscope which characterized in that: the device comprises a sealing cavity for sealing a sample to be tested, a valve mechanism for vacuumizing the sealing cavity, a power mechanism for opening or closing the sealing cavity and a bearing bracket (2) for bearing a scanning electron microscope sample nail;
the sealing cavity comprises a whole structure integrally milled by a fixed bottom plate (10) and a transfer device cavity (5), the transfer device cavity (5) is positioned on the front side surface of the fixed bottom plate (10), the front part of the transfer device cavity (5) is open, a circle of sealing strip (3) is arranged on the front side surface of the edge of the opening of the transfer device cavity (5), an openable sealing cover plate (1) is arranged on the opening of the transfer device cavity (5), and when the sealing cover plate (1) is tightly covered on the opening of the transfer device cavity (5), the rear side surface of the sealing cover plate (1) is tightly attached to the sealing strip (3);
the valve mechanism comprises a needle valve (6), the needle valve (6) is installed on the rear side face of the fixed base plate (10), and one end of the needle valve (6) is communicated with the transfer device cavity (5) after penetrating through the fixed base plate (10);
the power mechanism comprises a transmission part for controlling the opening and closing of the sealing cover plate (1) and a driving part for driving the transmission part to move, the driving part is connected with the fixed bottom plate (10), and the transmission part is connected with the sealing cover plate (1);
the bearing bracket (2) is horizontally arranged at the upper part of the rear side surface of the sealing cover plate (1), a sample nail placing hole (11) for bearing a standard half-inch nail type sample table for a small scanning electron microscope is arranged on the bearing bracket (2), when the sealing cover plate (1) is opened, the bearing bracket (2) completely extends out of the transfer device cavity (5), when the sealing cover plate (1) is covered, the bearing bracket (2) is completely positioned in the transfer device cavity (5), and only a slight distance exists between the upper surface of the bearing bracket (2) and the top of the inner wall of the transfer device cavity (5).
2. The vacuum sample transfer device suitable for the miniaturized scanning electron microscope of claim 1, wherein: the fixed base plate (10) and the transfer device cavity (5) are made of cast aluminum alloy materials and are milled integrally into a whole structure, and the wall thickness of the fixed base plate (10) and the wall thickness of the transfer device cavity (5) are not smaller than 4 mm.
3. The vacuum sample transfer device suitable for the miniaturized scanning electron microscope of claim 1, wherein: the sealing strip (3) is an O-shaped sealing ring made of Teflon.
4. The vacuum sample transfer device suitable for the miniaturized scanning electron microscope of claim 1, wherein: needle valve (6) are manual needle valve or electronic needle valve, just needle valve (6) with realize the intercommunication through inside and outside screw thread structure between transfer device cavity (5), and be located external screw thread structure on PMKD (10) adopt build-up welding or threaded connection with PMKD (10) fixed connection.
5. The vacuum sample transfer device suitable for the miniaturized scanning electron microscope of claim 1, wherein: the step motor (9) adopts an ultrathin step motor which meets the size of a miniaturized scanning electron microscope; the lead screw (7) is a precision lead screw made of stainless steel.
6. The vacuum sample transfer device suitable for the miniaturized scanning electron microscope of claim 1, wherein: the bearing bracket (2) is provided with 9 sample nail placing holes (11).
7. The vacuum sample transfer device suitable for the miniaturized scanning electron microscope of claim 1, wherein: the distance between the upper surface of the bearing bracket (2) and the top of the inner wall of the cavity (5) of the transfer device is 2-5 mm.
8. The vacuum sample transfer device suitable for the miniaturized scanning electron microscope of claim 1, wherein: the power mechanism comprises a stepping motor (9), a coupler (8) and a lead screw (7), the stepping motor (9) is installed on the rear side face of the fixing base plate (10), an output shaft of the stepping motor (9) penetrates through the fixing base plate (10) and then fixedly connected with the coupler (8), the rear end of the lead screw (7) is fixedly connected with the coupler (8), and the other end of the lead screw (7) penetrates through the sealing cover plate (1) in a threaded fit mode.
9. The vacuum sample transfer device suitable for the miniaturized scanning electron microscope of claim 1, wherein: the power mechanism is a precise electric sliding table, a slide rail part of the precise electric sliding table is fixedly connected with the fixed base plate (10), and a slide block part of the precise electric sliding table is fixedly connected with the sealing cover plate (1).
10. The vacuum sample transfer device suitable for the miniaturized scanning electron microscope of claim 1, wherein: the front side surface of the fixed bottom plate (10) is also provided with at least one guide post (4) for improving the opening and closing stability of the sealing cover plate (1), the rear end of the guide post (4) is fixedly connected with the front side surface of the fixed bottom plate (10), and the front end of the guide post (4) can slidably penetrate through the sealing cover plate (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010749226.7A CN111721793A (en) | 2020-07-30 | 2020-07-30 | Sample vacuum transfer device suitable for miniaturized scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010749226.7A CN111721793A (en) | 2020-07-30 | 2020-07-30 | Sample vacuum transfer device suitable for miniaturized scanning electron microscope |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112245814A (en) * | 2020-10-21 | 2021-01-22 | 浙江大学 | Animal sample conveying device for accurate radiotherapy research |
| CN112362682A (en) * | 2020-11-03 | 2021-02-12 | 华北科技学院 | Rock pore structure acquisition device |
| CN113109376A (en) * | 2021-06-15 | 2021-07-13 | 中国科学院地质与地球物理研究所 | System and method for transferring sample of cryoelectron microscope and electronic equipment |
| CN114660315A (en) * | 2022-05-24 | 2022-06-24 | 季华实验室 | Sample transfer device, batch sample introduction system, analysis equipment and batch sample introduction method |
| CN116798839A (en) * | 2023-08-25 | 2023-09-22 | 国仪量子(合肥)技术有限公司 | Sample feeding device of scanning electron microscope and scanning electron microscope |
| CN112362682B (en) * | 2020-11-03 | 2024-05-10 | 华北科技学院 | Rock pore structure acquisition device |
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2020
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112245814A (en) * | 2020-10-21 | 2021-01-22 | 浙江大学 | Animal sample conveying device for accurate radiotherapy research |
| CN112362682A (en) * | 2020-11-03 | 2021-02-12 | 华北科技学院 | Rock pore structure acquisition device |
| CN112362682B (en) * | 2020-11-03 | 2024-05-10 | 华北科技学院 | Rock pore structure acquisition device |
| CN113109376A (en) * | 2021-06-15 | 2021-07-13 | 中国科学院地质与地球物理研究所 | System and method for transferring sample of cryoelectron microscope and electronic equipment |
| CN113109376B (en) * | 2021-06-15 | 2021-09-24 | 中国科学院地质与地球物理研究所 | System and method for transferring sample of cryoelectron microscope and electronic equipment |
| CN114660315A (en) * | 2022-05-24 | 2022-06-24 | 季华实验室 | Sample transfer device, batch sample introduction system, analysis equipment and batch sample introduction method |
| CN116798839A (en) * | 2023-08-25 | 2023-09-22 | 国仪量子(合肥)技术有限公司 | Sample feeding device of scanning electron microscope and scanning electron microscope |
| CN116798839B (en) * | 2023-08-25 | 2023-11-07 | 国仪量子(合肥)技术有限公司 | Sample feeding device of scanning electron microscope and scanning electron microscope |
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