CN116783467A - 气体分析装置 - Google Patents

气体分析装置 Download PDF

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Publication number
CN116783467A
CN116783467A CN202180086309.5A CN202180086309A CN116783467A CN 116783467 A CN116783467 A CN 116783467A CN 202180086309 A CN202180086309 A CN 202180086309A CN 116783467 A CN116783467 A CN 116783467A
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CN
China
Prior art keywords
gas
unit
optical
platen
laser light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180086309.5A
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English (en)
Chinese (zh)
Inventor
赤松武
中山将人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Stec Co Ltd
Original Assignee
Horiba Stec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Stec Co Ltd filed Critical Horiba Stec Co Ltd
Publication of CN116783467A publication Critical patent/CN116783467A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N21/8507—Probe photometers, i.e. with optical measuring part dipped into fluid sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/0303—Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G01N21/61—Non-dispersive gas analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G01N2021/3513—Open path with an instrumental source
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396—Type of laser source
    • G01N2021/399—Diode laser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8557—Special shaping of flow, e.g. using a by-pass line, jet flow, curtain flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8578—Gaseous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/031—Multipass arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/0332—Cuvette constructions with temperature control

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
CN202180086309.5A 2021-03-12 2021-12-21 气体分析装置 Pending CN116783467A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021040603 2021-03-12
JP2021-040603 2021-03-12
PCT/JP2021/047224 WO2022190555A1 (ja) 2021-03-12 2021-12-21 ガス分析装置

Publications (1)

Publication Number Publication Date
CN116783467A true CN116783467A (zh) 2023-09-19

Family

ID=83226249

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180086309.5A Pending CN116783467A (zh) 2021-03-12 2021-12-21 气体分析装置

Country Status (6)

Country Link
US (1) US12492989B2 (https=)
JP (1) JP7775278B2 (https=)
KR (1) KR20230151979A (https=)
CN (1) CN116783467A (https=)
TW (1) TWI911380B (https=)
WO (1) WO2022190555A1 (https=)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6150250U (https=) * 1984-09-07 1986-04-04
JP2004053405A (ja) * 2002-07-19 2004-02-19 Horiba Ltd インラインガス分析計
JP2007101433A (ja) * 2005-10-06 2007-04-19 Horiba Ltd ガス分析装置
CN101814425A (zh) * 2009-02-20 2010-08-25 株式会社岛津制作所 半导体制造工艺用吸光分析装置
CN103185693A (zh) * 2011-12-27 2013-07-03 株式会社堀场制作所 气体分析装置
JP2014105991A (ja) * 2012-11-22 2014-06-09 Shimadzu Corp ガスセル
WO2016174759A1 (ja) * 2015-04-30 2016-11-03 富士電機株式会社 レーザ式ガス分析計

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6150250A (ja) * 1984-08-17 1986-03-12 Matsushita Electric Ind Co Ltd タ−ンテ−ブル装置
DK176920B1 (da) 2008-10-30 2010-05-17 Smidth As F L Fremgangsmåde og apparat til analyse af partikelholdige gasser
JP2010217031A (ja) 2009-03-17 2010-09-30 Shimadzu Corp 光学式ガス分析システム及びガスフローセル
US9651488B2 (en) 2010-10-14 2017-05-16 Thermo Fisher Scientific (Bremen) Gmbh High-accuracy mid-IR laser-based gas sensor
US9012851B2 (en) 2010-10-14 2015-04-21 Thermo Fisher Scientific (Bremen) Gmbh Optical chamber module assembly
US9116158B2 (en) * 2012-10-18 2015-08-25 Vuv Analytics, Inc. Vacuum ultraviolet absorption spectroscopy system and method
DE102014100691B3 (de) 2014-01-22 2015-01-08 Avl Emission Test Systems Gmbh Vorrichtung zur Bestimmung der Konzentration zumindest eines Gases in einem Probengasstrom mittels Infrarotabsorptionsspektroskopie
CN107024442A (zh) 2015-12-15 2017-08-08 株式会社堀场制作所 多重反射型单元、分析装置、排气分析装置和光的射入方法
JP2018084523A (ja) * 2016-11-25 2018-05-31 株式会社島津製作所 ガス濃度測定装置
JP2025050250A (ja) * 2023-09-22 2025-04-04 Toto株式会社 静電チャック

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6150250U (https=) * 1984-09-07 1986-04-04
JP2004053405A (ja) * 2002-07-19 2004-02-19 Horiba Ltd インラインガス分析計
JP2007101433A (ja) * 2005-10-06 2007-04-19 Horiba Ltd ガス分析装置
CN101814425A (zh) * 2009-02-20 2010-08-25 株式会社岛津制作所 半导体制造工艺用吸光分析装置
CN103185693A (zh) * 2011-12-27 2013-07-03 株式会社堀场制作所 气体分析装置
JP2014105991A (ja) * 2012-11-22 2014-06-09 Shimadzu Corp ガスセル
WO2016174759A1 (ja) * 2015-04-30 2016-11-03 富士電機株式会社 レーザ式ガス分析計

Also Published As

Publication number Publication date
JPWO2022190555A1 (https=) 2022-09-15
KR20230151979A (ko) 2023-11-02
TW202235853A (zh) 2022-09-16
US20240060881A1 (en) 2024-02-22
US12492989B2 (en) 2025-12-09
JP7775278B2 (ja) 2025-11-25
WO2022190555A1 (ja) 2022-09-15
TWI911380B (zh) 2026-01-11

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