JPWO2022190555A1 - - Google Patents

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Publication number
JPWO2022190555A1
JPWO2022190555A1 JP2023505115A JP2023505115A JPWO2022190555A1 JP WO2022190555 A1 JPWO2022190555 A1 JP WO2022190555A1 JP 2023505115 A JP2023505115 A JP 2023505115A JP 2023505115 A JP2023505115 A JP 2023505115A JP WO2022190555 A1 JPWO2022190555 A1 JP WO2022190555A1
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
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JP2023505115A
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Japanese (ja)
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JP7775278B2 (ja
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Publication of JPWO2022190555A1 publication Critical patent/JPWO2022190555A1/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N21/8507—Probe photometers, i.e. with optical measuring part dipped into fluid sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/0303—Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G01N21/61—Non-dispersive gas analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G01N2021/3513—Open path with an instrumental source
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396—Type of laser source
    • G01N2021/399—Diode laser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8557—Special shaping of flow, e.g. using a by-pass line, jet flow, curtain flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8578—Gaseous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/031—Multipass arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/0332—Cuvette constructions with temperature control

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
JP2023505115A 2021-03-12 2021-12-21 ガス分析装置 Active JP7775278B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021040603 2021-03-12
JP2021040603 2021-03-12
PCT/JP2021/047224 WO2022190555A1 (ja) 2021-03-12 2021-12-21 ガス分析装置

Publications (2)

Publication Number Publication Date
JPWO2022190555A1 true JPWO2022190555A1 (https=) 2022-09-15
JP7775278B2 JP7775278B2 (ja) 2025-11-25

Family

ID=83226249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023505115A Active JP7775278B2 (ja) 2021-03-12 2021-12-21 ガス分析装置

Country Status (6)

Country Link
US (1) US12492989B2 (https=)
JP (1) JP7775278B2 (https=)
KR (1) KR20230151979A (https=)
CN (1) CN116783467A (https=)
TW (1) TWI911380B (https=)
WO (1) WO2022190555A1 (https=)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6150250U (https=) * 1984-09-07 1986-04-04
JP2007101433A (ja) * 2005-10-06 2007-04-19 Horiba Ltd ガス分析装置
JP2010217031A (ja) * 2009-03-17 2010-09-30 Shimadzu Corp 光学式ガス分析システム及びガスフローセル
US20120287418A1 (en) * 2010-10-14 2012-11-15 Scherer James J High-Accuracy Mid-IR Laser-Based Gas Sensor
JP2014105991A (ja) * 2012-11-22 2014-06-09 Shimadzu Corp ガスセル
JP2015532433A (ja) * 2012-10-18 2015-11-09 ブイユーブイ・アナリティクス・インコーポレイテッドＶＵＶ Ａｎａｌｙｔｉｃｓ，Ｉｎｃ． 真空紫外吸収分光システムおよび方法
JP2017504028A (ja) * 2014-01-22 2017-02-02 エイヴィエル エミッション テスト システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツングＡＶＬ Ｅｍｉｓｓｉｏｎ Ｔｅｓｔ Ｓｙｓｔｅｍｓ ＧｍｂＨ 赤外吸収分光法を用いて試料ガス流中の少なくとも１つのガスの濃度を測定する装置
JP2018084523A (ja) * 2016-11-25 2018-05-31 株式会社島津製作所 ガス濃度測定装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6150250A (ja) * 1984-08-17 1986-03-12 Matsushita Electric Ind Co Ltd タ−ンテ−ブル装置
JP2004053405A (ja) * 2002-07-19 2004-02-19 Horiba Ltd インラインガス分析計
DK176920B1 (da) 2008-10-30 2010-05-17 Smidth As F L Fremgangsmåde og apparat til analyse af partikelholdige gasser
JP2010190824A (ja) * 2009-02-20 2010-09-02 Shimadzu Corp 半導体製造プロセス用吸光分析装置
US9012851B2 (en) 2010-10-14 2015-04-21 Thermo Fisher Scientific (Bremen) Gmbh Optical chamber module assembly
EP3644043B1 (en) * 2011-12-27 2023-10-18 HORIBA, Ltd. Gas analyzing apparatus
WO2016174759A1 (ja) * 2015-04-30 2016-11-03 富士電機株式会社 レーザ式ガス分析計
CN107024442A (zh) 2015-12-15 2017-08-08 株式会社堀场制作所 多重反射型单元、分析装置、排气分析装置和光的射入方法
JP2025050250A (ja) * 2023-09-22 2025-04-04 Toto株式会社 静電チャック

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6150250U (https=) * 1984-09-07 1986-04-04
JP2007101433A (ja) * 2005-10-06 2007-04-19 Horiba Ltd ガス分析装置
JP2010217031A (ja) * 2009-03-17 2010-09-30 Shimadzu Corp 光学式ガス分析システム及びガスフローセル
US20120287418A1 (en) * 2010-10-14 2012-11-15 Scherer James J High-Accuracy Mid-IR Laser-Based Gas Sensor
JP2015532433A (ja) * 2012-10-18 2015-11-09 ブイユーブイ・アナリティクス・インコーポレイテッドＶＵＶ Ａｎａｌｙｔｉｃｓ，Ｉｎｃ． 真空紫外吸収分光システムおよび方法
JP2014105991A (ja) * 2012-11-22 2014-06-09 Shimadzu Corp ガスセル
JP2017504028A (ja) * 2014-01-22 2017-02-02 エイヴィエル エミッション テスト システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツングＡＶＬ Ｅｍｉｓｓｉｏｎ Ｔｅｓｔ Ｓｙｓｔｅｍｓ ＧｍｂＨ 赤外吸収分光法を用いて試料ガス流中の少なくとも１つのガスの濃度を測定する装置
JP2018084523A (ja) * 2016-11-25 2018-05-31 株式会社島津製作所 ガス濃度測定装置

Also Published As

Publication number Publication date
KR20230151979A (ko) 2023-11-02
TW202235853A (zh) 2022-09-16
US20240060881A1 (en) 2024-02-22
CN116783467A (zh) 2023-09-19
US12492989B2 (en) 2025-12-09
JP7775278B2 (ja) 2025-11-25
WO2022190555A1 (ja) 2022-09-15
TWI911380B (zh) 2026-01-11

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