KR20230151979A - 가스 분석 장치 - Google Patents

가스 분석 장치 Download PDF

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Publication number
KR20230151979A
KR20230151979A KR1020237019771A KR20237019771A KR20230151979A KR 20230151979 A KR20230151979 A KR 20230151979A KR 1020237019771 A KR1020237019771 A KR 1020237019771A KR 20237019771 A KR20237019771 A KR 20237019771A KR 20230151979 A KR20230151979 A KR 20230151979A
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KR
South Korea
Prior art keywords
gas
cell
optical
analysis device
gas cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237019771A
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English (en)
Korean (ko)
Inventor
다케시 아카마츠
마사토 나카야마
Original Assignee
가부시키가이샤 호리바 에스텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of KR20230151979A publication Critical patent/KR20230151979A/ko
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N21/8507—Probe photometers, i.e. with optical measuring part dipped into fluid sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/0303—Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G01N21/61—Non-dispersive gas analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G01N2021/3513—Open path with an instrumental source
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396—Type of laser source
    • G01N2021/399—Diode laser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8557—Special shaping of flow, e.g. using a by-pass line, jet flow, curtain flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8578—Gaseous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/031—Multipass arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/0332—Cuvette constructions with temperature control

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
KR1020237019771A 2021-03-12 2021-12-21 가스 분석 장치 Pending KR20230151979A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021040603 2021-03-12
JPJP-P-2021-040603 2021-03-12
PCT/JP2021/047224 WO2022190555A1 (ja) 2021-03-12 2021-12-21 ガス分析装置

Publications (1)

Publication Number Publication Date
KR20230151979A true KR20230151979A (ko) 2023-11-02

Family

ID=83226249

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237019771A Pending KR20230151979A (ko) 2021-03-12 2021-12-21 가스 분석 장치

Country Status (6)

Country Link
US (1) US12492989B2 (https=)
JP (1) JP7775278B2 (https=)
KR (1) KR20230151979A (https=)
CN (1) CN116783467A (https=)
TW (1) TWI911380B (https=)
WO (1) WO2022190555A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017187468A (ja) 2015-12-15 2017-10-12 株式会社堀場製作所 多重反射型セル、分析装置、排ガス分析装置、及び、光の入射方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6150250A (ja) * 1984-08-17 1986-03-12 Matsushita Electric Ind Co Ltd タ−ンテ−ブル装置
JPS6145478Y2 (https=) * 1984-09-07 1986-12-20
JP2004053405A (ja) * 2002-07-19 2004-02-19 Horiba Ltd インラインガス分析計
JP2007101433A (ja) * 2005-10-06 2007-04-19 Horiba Ltd ガス分析装置
DK176920B1 (da) 2008-10-30 2010-05-17 Smidth As F L Fremgangsmåde og apparat til analyse af partikelholdige gasser
JP2010190824A (ja) * 2009-02-20 2010-09-02 Shimadzu Corp 半導体製造プロセス用吸光分析装置
JP2010217031A (ja) 2009-03-17 2010-09-30 Shimadzu Corp 光学式ガス分析システム及びガスフローセル
US9651488B2 (en) 2010-10-14 2017-05-16 Thermo Fisher Scientific (Bremen) Gmbh High-accuracy mid-IR laser-based gas sensor
US9012851B2 (en) 2010-10-14 2015-04-21 Thermo Fisher Scientific (Bremen) Gmbh Optical chamber module assembly
EP3644043B1 (en) * 2011-12-27 2023-10-18 HORIBA, Ltd. Gas analyzing apparatus
US9116158B2 (en) * 2012-10-18 2015-08-25 Vuv Analytics, Inc. Vacuum ultraviolet absorption spectroscopy system and method
JP5954136B2 (ja) * 2012-11-22 2016-07-20 株式会社島津製作所 ガスセル
DE102014100691B3 (de) 2014-01-22 2015-01-08 Avl Emission Test Systems Gmbh Vorrichtung zur Bestimmung der Konzentration zumindest eines Gases in einem Probengasstrom mittels Infrarotabsorptionsspektroskopie
WO2016174759A1 (ja) * 2015-04-30 2016-11-03 富士電機株式会社 レーザ式ガス分析計
JP2018084523A (ja) * 2016-11-25 2018-05-31 株式会社島津製作所 ガス濃度測定装置
JP2025050250A (ja) * 2023-09-22 2025-04-04 Toto株式会社 静電チャック

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017187468A (ja) 2015-12-15 2017-10-12 株式会社堀場製作所 多重反射型セル、分析装置、排ガス分析装置、及び、光の入射方法

Also Published As

Publication number Publication date
JPWO2022190555A1 (https=) 2022-09-15
TW202235853A (zh) 2022-09-16
US20240060881A1 (en) 2024-02-22
CN116783467A (zh) 2023-09-19
US12492989B2 (en) 2025-12-09
JP7775278B2 (ja) 2025-11-25
WO2022190555A1 (ja) 2022-09-15
TWI911380B (zh) 2026-01-11

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Patent event date: 20230612

Patent event code: PA01051R01D

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PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20241029

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