JP7775278B2 - ガス分析装置 - Google Patents

ガス分析装置

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Publication number
JP7775278B2
JP7775278B2 JP2023505115A JP2023505115A JP7775278B2 JP 7775278 B2 JP7775278 B2 JP 7775278B2 JP 2023505115 A JP2023505115 A JP 2023505115A JP 2023505115 A JP2023505115 A JP 2023505115A JP 7775278 B2 JP7775278 B2 JP 7775278B2
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Japan
Prior art keywords
gas
cell
optical
laser light
gas cell
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Active
Application number
JP2023505115A
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English (en)
Japanese (ja)
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JPWO2022190555A1 (https=
Inventor
武 赤松
将人 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Stec Co Ltd
Original Assignee
Horiba Stec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of JPWO2022190555A1 publication Critical patent/JPWO2022190555A1/ja
Application granted granted Critical
Publication of JP7775278B2 publication Critical patent/JP7775278B2/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N21/8507—Probe photometers, i.e. with optical measuring part dipped into fluid sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/0303—Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G01N21/61—Non-dispersive gas analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G01N2021/3513—Open path with an instrumental source
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396—Type of laser source
    • G01N2021/399—Diode laser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8557—Special shaping of flow, e.g. using a by-pass line, jet flow, curtain flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8578—Gaseous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/031—Multipass arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/0332—Cuvette constructions with temperature control

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
JP2023505115A 2021-03-12 2021-12-21 ガス分析装置 Active JP7775278B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021040603 2021-03-12
JP2021040603 2021-03-12
PCT/JP2021/047224 WO2022190555A1 (ja) 2021-03-12 2021-12-21 ガス分析装置

Publications (2)

Publication Number Publication Date
JPWO2022190555A1 JPWO2022190555A1 (https=) 2022-09-15
JP7775278B2 true JP7775278B2 (ja) 2025-11-25

Family

ID=83226249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023505115A Active JP7775278B2 (ja) 2021-03-12 2021-12-21 ガス分析装置

Country Status (6)

Country Link
US (1) US12492989B2 (https=)
JP (1) JP7775278B2 (https=)
KR (1) KR20230151979A (https=)
CN (1) CN116783467A (https=)
TW (1) TWI911380B (https=)
WO (1) WO2022190555A1 (https=)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007101433A (ja) 2005-10-06 2007-04-19 Horiba Ltd ガス分析装置
JP2010217031A (ja) 2009-03-17 2010-09-30 Shimadzu Corp 光学式ガス分析システム及びガスフローセル
US20120287418A1 (en) 2010-10-14 2012-11-15 Scherer James J High-Accuracy Mid-IR Laser-Based Gas Sensor
JP2014105991A (ja) 2012-11-22 2014-06-09 Shimadzu Corp ガスセル
JP2015532433A (ja) 2012-10-18 2015-11-09 ブイユーブイ・アナリティクス・インコーポレイテッドＶＵＶ Ａｎａｌｙｔｉｃｓ，Ｉｎｃ． 真空紫外吸収分光システムおよび方法
JP2017504028A (ja) 2014-01-22 2017-02-02 エイヴィエル エミッション テスト システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツングＡＶＬ Ｅｍｉｓｓｉｏｎ Ｔｅｓｔ Ｓｙｓｔｅｍｓ ＧｍｂＨ 赤外吸収分光法を用いて試料ガス流中の少なくとも１つのガスの濃度を測定する装置
JP2018084523A (ja) 2016-11-25 2018-05-31 株式会社島津製作所 ガス濃度測定装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6150250A (ja) * 1984-08-17 1986-03-12 Matsushita Electric Ind Co Ltd タ−ンテ−ブル装置
JPS6145478Y2 (https=) * 1984-09-07 1986-12-20
JP2004053405A (ja) * 2002-07-19 2004-02-19 Horiba Ltd インラインガス分析計
DK176920B1 (da) 2008-10-30 2010-05-17 Smidth As F L Fremgangsmåde og apparat til analyse af partikelholdige gasser
JP2010190824A (ja) * 2009-02-20 2010-09-02 Shimadzu Corp 半導体製造プロセス用吸光分析装置
US9012851B2 (en) 2010-10-14 2015-04-21 Thermo Fisher Scientific (Bremen) Gmbh Optical chamber module assembly
EP3644043B1 (en) * 2011-12-27 2023-10-18 HORIBA, Ltd. Gas analyzing apparatus
WO2016174759A1 (ja) * 2015-04-30 2016-11-03 富士電機株式会社 レーザ式ガス分析計
CN107024442A (zh) 2015-12-15 2017-08-08 株式会社堀场制作所 多重反射型单元、分析装置、排气分析装置和光的射入方法
JP2025050250A (ja) * 2023-09-22 2025-04-04 Toto株式会社 静電チャック

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007101433A (ja) 2005-10-06 2007-04-19 Horiba Ltd ガス分析装置
JP2010217031A (ja) 2009-03-17 2010-09-30 Shimadzu Corp 光学式ガス分析システム及びガスフローセル
US20120287418A1 (en) 2010-10-14 2012-11-15 Scherer James J High-Accuracy Mid-IR Laser-Based Gas Sensor
JP2015532433A (ja) 2012-10-18 2015-11-09 ブイユーブイ・アナリティクス・インコーポレイテッドＶＵＶ Ａｎａｌｙｔｉｃｓ，Ｉｎｃ． 真空紫外吸収分光システムおよび方法
JP2014105991A (ja) 2012-11-22 2014-06-09 Shimadzu Corp ガスセル
JP2017504028A (ja) 2014-01-22 2017-02-02 エイヴィエル エミッション テスト システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツングＡＶＬ Ｅｍｉｓｓｉｏｎ Ｔｅｓｔ Ｓｙｓｔｅｍｓ ＧｍｂＨ 赤外吸収分光法を用いて試料ガス流中の少なくとも１つのガスの濃度を測定する装置
JP2018084523A (ja) 2016-11-25 2018-05-31 株式会社島津製作所 ガス濃度測定装置

Also Published As

Publication number Publication date
JPWO2022190555A1 (https=) 2022-09-15
KR20230151979A (ko) 2023-11-02
TW202235853A (zh) 2022-09-16
US20240060881A1 (en) 2024-02-22
CN116783467A (zh) 2023-09-19
US12492989B2 (en) 2025-12-09
WO2022190555A1 (ja) 2022-09-15
TWI911380B (zh) 2026-01-11

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