CN116773450A - Low-light microscope system and working method thereof - Google Patents
Low-light microscope system and working method thereof Download PDFInfo
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- CN116773450A CN116773450A CN202310758391.2A CN202310758391A CN116773450A CN 116773450 A CN116773450 A CN 116773450A CN 202310758391 A CN202310758391 A CN 202310758391A CN 116773450 A CN116773450 A CN 116773450A
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- 238000013016 damping Methods 0.000 claims abstract description 11
- 238000010330 laser marking Methods 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 9
- 239000011358 absorbing material Substances 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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Abstract
The application belongs to the field of semiconductor device detection, and particularly relates to a micro-light microscope system and a working method thereof, wherein the micro-light microscope system comprises: the device comprises a box body, a damping table, a probe table, an optical system, a power supply system and a computer control system, wherein the damping table is fixed at the bottom of the inner side of the box body, the probe table is arranged above the damping table and used for fixing and moving a piece to be detected, the optical system is arranged above the probe table and used for being matched with the computer control system so as to position the position of a failure point of the piece to be detected, the power supply system is arranged outside the box body and electrically connected with the probe table through a wire and used for supplying power to the piece to be detected, and the computer control system is arranged outside the box body and electrically connected with the probe table, the optical system and the power supply system through the wire and used for controlling the power supply mode of the power supply system to the piece to be detected. The micro-light microscope system does not need to manually switch the power supply mode of the to-be-detected piece, and can improve the efficiency of positioning and detecting the failure point of the to-be-detected piece.
Description
Technical Field
The application relates to the field of semiconductor device detection, in particular to a micro-light microscope system and a working method thereof.
Background
In the field of semiconductor device inspection, a micro light microscope (EmissionMicroscope, EMMI) is a device that utilizes a high gain camera or detector to detect trace photons emitted by certain semiconductor device defects or failures, and is capable of efficiently and accurately locating the location of the semiconductor device failure point over a wide range. The basic principle is that in a semiconductor device with electric leakage, breakdown and hot carrier effect, when a proper voltage is applied to the semiconductor device to be tested, photons with specific wavelengths are released due to accelerated carrier scattering or electron-hole pair recombination at the failure point, and after the photons are collected and subjected to image processing, a luminous image can be obtained. After the voltage applied to the sample is removed, an optical image of the surface of the semiconductor device is collected, and after the luminous image and the optical image are overlapped, the position of the luminous point can be positioned, so that the positioning of the failure point is realized.
Taking a light emitting diode (LightEmittingDiode, LED) as an example, the existing test flow of locating a failure point by an EMMI system is as follows: firstly, confirming whether the forward volt-ampere characteristic parameters of the LED are normal or not by using a power meter, if the electric parameters are abnormal (such as short circuit, forward voltage rise or reduction), manually switching the power supply of the anode and the cathode to the LED to apply reverse bias voltage, confirming whether the device has reverse electric leakage and the magnitude of leakage current, generally under the driving voltage which is several times of the starting voltage, the reverse current reaches the submicron level, then, judging the current leakage, after the current leakage is confirmed, placing the LED chip in a micro-light microscope, collecting photons emitted by a failure point through a light detector after the power is applied, performing photoelectric conversion and image processing to directly obtain a luminous image, and finally, directly positioning the position of the failure point by overlapping the luminous image with an optical image. However, the system has single function, the power supply mode of the sample needs to be manually adjusted, the test flow is complex, and the test efficiency is low.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, the present application is directed to a micro-light microscope system and a working method thereof, which are used for solving the problems that the conventional EMMI device has a single function and cannot automatically adjust the power supply mode of the workpiece to be tested, thereby resulting in low testing efficiency.
To achieve the above and other related objects, the present application provides a micro light microscope system comprising: the device comprises a box body, a damping table, a probe table, an optical system, a power supply system and a computer control system, wherein the damping table is fixed at the bottom of the inner side of the box body; the probe table is arranged above the damping table and used for fixing a piece to be detected, and at least one servo motor is arranged in the probe table and used for controlling the piece to be detected to move and rotate so as to adjust the position of the piece to be detected; the optical system is arranged above the probe station and is used for being matched with the calculation control system to position the failure point of the piece to be detected; the power supply system is arranged outside the box body and is electrically connected with the probe station through a wire, and is used for supplying power to the to-be-detected piece; the computer control system is arranged outside the box body and is electrically connected with the probe station, the optical system and the power supply system through wires, and is used for controlling a power supply mode of the power supply system to the to-be-detected piece, wherein the power supply mode comprises the step of providing forward voltage or reverse voltage for the to-be-detected piece.
Preferably, the box body is of a hexahedral structure with a single side capable of being opened and closed.
Preferably, the inner wall of the box body is coated with a black light absorbing material, and the absorbance of the black light absorbing material is greater than 99%.
Preferably, the optical system comprises an objective lens, a light guide cylinder, a photoelectric detector, a cooling system and a laser marking system, wherein the objective lens is arranged below the light guide cylinder, the photoelectric detector is arranged above the light guide cylinder, and the cooling system and the laser marking system are respectively arranged on the left side and the right side of the photoelectric detector.
Preferably, a light supplementing system is installed in the light guide cylinder.
Preferably, the light source of the laser marking system includes at least one of helium neon laser, carbon dioxide laser, YAG laser, and semiconductor laser.
Preferably, at least two probes are arranged above the probe station.
Preferably, the spectral response of the photodetector ranges from 100 to 2000nm.
Preferably, the micro light microscope system further comprises a first display and a second display, wherein the first display is arranged in the box body and is electrically connected with the computer control system through a wire, and the second display is arranged outside the box body and is electrically connected with the computer control system through a wire.
The application also provides a working method of the micro-light microscope system, which is applied to the micro-light microscope system, and comprises the following steps:
fixing a piece to be detected on a probe station, judging the positive electrode and the negative electrode of the piece to be detected through a computer control system, controlling a power supply system to apply forward voltage to the piece to be detected, if the piece to be detected is short-circuited or inconsistent with the forward voltage value of a normal piece to be detected, continuously controlling the power supply system to apply reverse voltage to the piece to be detected through the computer control system so as to obtain the magnitude of reverse leakage current of the piece to be detected, and judging that the piece to be detected has leakage failure if the magnitude of the reverse leakage current is in the range of 1nA-100 mu A;
the position of the to-be-detected piece is adjusted by moving and rotating the probe table, so that the position of the to-be-detected piece and the optical path of the optical system are on the same vertical horizontal line;
the optical system is adopted to acquire the optical information of the to-be-detected piece and carry out photoelectric conversion, the result after the photoelectric conversion is transmitted to the computer control system, and the computer control system is used for carrying out image processing to obtain a luminous image of the to-be-detected piece, wherein the luminous image comprises a bright point generated by a failure point;
and superposing the luminous image and the optical image of the to-be-detected piece, and then positioning the position of the bright point in the optical image as the position of the failure point.
Compared with the prior art, the micro light microscope system and the working method thereof provided by the application have the following beneficial effects:
according to the micro-light microscope system and the working method thereof, the sample to be detected is directly fixed on the probe station, the power supply system is controlled by the computer control system to switch the power supply mode of the piece to be detected, the electric parameters of the piece to be detected in different power supply modes are analyzed to judge whether the piece to be detected has the problem of leakage failure, after the leakage failure of the piece to be detected is judged, the micro-light microscope system is automatically positioned to the position of the failure point of the piece to be detected, the functions of basic electric test and failure point positioning are achieved, the power supply mode of the piece to be detected is not required to be manually switched, and the efficiency of positioning and detecting the failure point of the piece to be detected is greatly improved. In addition, the laser marking system is further arranged in the optical system of the micro-light microscope system, and can automatically mark the edge area of the failure point position of the piece to be detected after the failure point position of the piece to be detected is detected, so that the piece to be detected can be conveniently cut to analyze the position area of the failure point, and the efficiency of positioning and analyzing the failure point of the piece to be detected can be improved.
Drawings
In order to more clearly illustrate the solution of the application, a brief description will be given below of the drawings that are needed in the description of the embodiments of the application, it being obvious that the drawings in the following description are some embodiments of the application and that other drawings can be obtained from these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a block diagram of a micro-light microscope system according to an embodiment of the present application;
FIG. 2 is a block diagram of an optical system according to an embodiment of the present application;
FIG. 3 is a block diagram of a micro light microscope system according to an embodiment of the present application;
reference numerals:
the device comprises a box body 1, a damping table 2, a probe table 3, a piece to be tested 31, an optical system 4, a power supply system 5, a computer control system 6, a first display 7, a second display 7', an objective lens 41, a light guide tube 42, a photoelectric detector 43, a cooling system 44 and a laser marking system 45.
Detailed Description
Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the application.
In the description of the present application, it should be understood that the direction or positional relationship indicated in reference to the description of the orientation, such as up, down, front, rear, left, right, etc., is based on the direction or positional relationship shown in the drawings, only for convenience in describing the present application and simplifying the description, and is not indicative or implying that the apparatus or element in question must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present application; meanwhile, the terms "first", "second", etc. referred to may be used in the present disclosure to describe various structures, but the structures are not limited by these terms. These terms are only used to distinguish one structure from another structure.
In the description of the present application, unless explicitly defined otherwise, terms such as arrangement, mounting, connection, etc. should be construed broadly and the specific meaning of the terms in the present application can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.
As shown in fig. 1, the present application provides a micro light microscope system, at least comprising: the device comprises a box body 1, a shock absorption table 2, a probe table 3, an optical system 4, a power supply system 5 and a computer control system 6, wherein the shock absorption table 2 is fixed at the bottom of the inner side of the box body 1, the probe table 3 is arranged above the shock absorption table 2 and is used for fixing a piece 31 to be detected, and at least one servo motor (not shown in the figure) is arranged in the probe table 3 and is used for controlling the piece 31 to be detected to move and rotate so as to adjust the position of the piece to be detected; the optical system 4 is arranged above the probe station 3 and is used for being matched with the calculation control system to position the failure point of the piece 31 to be detected; the power supply system 5 is arranged outside the box body 1 and is electrically connected with the probe station 3 through a wire, and is used for supplying power to the to-be-detected piece 31; the computer control system 6 is disposed outside the box and electrically connected with the probe station 3, the optical system 4 and the power system through wires, and is used for controlling a power supply mode of the power system to the to-be-tested piece 31, wherein the power supply mode comprises providing forward voltage or reverse voltage to the to-be-tested piece 31.
Specifically, the base material of the damping table 2 can be stainless steel or marble, and the like, and is used for providing a base for a micro-light microscope system, so that the vibration amplitude of the whole system in the working process is controlled, and the stability of the system is improved. At least two probes are arranged above the probe table 3, the probes can automatically move or manually move according to requirements, the probe table 3 is driven to move and rotate by a servo motor arranged in the probe table 3 so as to adjust the position of the to-be-detected piece 31, on one hand, the optical system 4 can receive an optical signal generated by a failure point of the to-be-detected piece 31 conveniently, on the other hand, the probes can be connected with the to-be-detected piece 31 conveniently, and the to-be-detected piece can be an LED chip, MOSFET, MESFEF or a MISFET and other semiconductor devices. The optical system 4 is used for being matched with the computer control system 6 to locate the position of the failure point, the optical system 4 can receive the optical signal of the to-be-detected piece and convert the optical signal into an electric signal, then the electric signal is transmitted to the computer control system 6, and the computer control system 6 performs image processing so as to locate the position of the failure point. The power supply system 5 can realize continuous or pulse power supply to the member 31 to be tested. More importantly, the computer control system 6 can control the power supply system 5 to automatically provide the forward voltage or the reverse voltage, i.e. the power supply system can automatically switch the power supply mode to the workpiece 31.
In the micro-light microscope system in this embodiment, the computer control system 6 controls the power supply system 5 to switch the power supply mode of the to-be-detected member, so as to analyze the electrical parameters of the to-be-detected member 31 in different power supply modes to determine whether the to-be-detected member 31 has the problem of leakage failure, and after the leakage failure of the to-be-detected member is determined, the optical system 4 and the computer control system 6 are combined to position the failure point of the to-be-detected member 31, so that the efficiency of positioning and detecting the failure point of the to-be-detected member can be greatly improved without manually switching the power supply mode of the to-be-detected member.
In some embodiments of the present application, it is preferable that the case 1 has a hexahedral structure with one side openable and closable. Further, the inner wall of the case 1 is coated with a black light absorbing material, and the absorbance of the black light absorbing material is greater than 99%. In the implementation, the black light absorbing material is preferably a carbon nano tube blackbody, and has the function of absorbing a light source generated in the detection process of the micro-light microscope system and avoiding the influence of light reflection on the detection result on the inner wall of the box body 1.
In some embodiments of the present application, as shown in fig. 2, the optical system preferably includes an objective lens 41, a light guide tube 42, a photodetector 43, a cooling system 44, and a laser marking system 45: the objective 41 is arranged below the light guide tube 42 and consists of at least two lens arrays with different multiplying powers, and the selectable multiplying power range is 1-200; the photo detector 43 is disposed above the light guide tube 42, and may be at least one of a CCD detector, an InGaAs photo detector, a graphene-based photo detector, a silicon-based photo detector, or a perovskite photo detector, where the photo detector 43 corresponds to the position of the light guide tube 42, so that excitation light emitted by the to-be-measured element 31 is incident into the photo detector 43 through the light guide tube 42; the cooling system 44 and the laser marking system 45 are respectively disposed at the left and right sides of the photodetector 43, the cooling system 44 includes at least one of an electric refrigerator, a liquid refrigerator and a semiconductor refrigerator, and is used for reducing noise interference caused by thermal effect generated by the system, and the light source of the laser marking system 45 includes at least one of helium-neon laser, carbon dioxide laser, YAG laser and semiconductor laser, which has the function of marking near the failure point by laser after locating the failure point of the to-be-detected member 31, thereby facilitating subsequent cutting of the to-be-detected member 31 to analyze the position area of the failure point, and improving subsequent failure analysis efficiency.
It should be noted that the cooling system 44 may be disposed at the left side or the right side of the photodetector 43, and the laser marking system 45 may be disposed at the left side or the right side of the photodetector 43, which is not particularly limited herein.
In some embodiments of the present application, preferably, a light supplementing system (not shown in the drawings) is installed in the light guiding barrel 42, and the light supplementing system includes a basic lighting lamp and an infrared lamp, where the basic lighting lamp is a halogen lamp or an LED lamp in this embodiment, and is used to provide a basic lighting environment when the part 31 to be measured is placed and positioned, and the wavelength range of the infrared lamp is 800-1500nm, and is used to supplement light to the part to be measured when the optical image of the part 31 to be measured is captured.
In some embodiments of the present application, the photodetector preferably has a spectral response in the range of 100-2000nm, which ensures that wavelengths in the visible range and in the ultraviolet and infrared ranges are responsive.
In some embodiments of the present application, as shown in fig. 3, the micro light microscope system further includes a first display 7 and a second display 7', wherein the first display 7 is disposed in the case and electrically connected to the computer control system 6 through a wire, and the second display 7' is disposed outside the case and electrically connected to the computer control system 6 through a wire. The first display 7 and the second display 7' are synchronously displayed for displaying the values of the electrical parameters when the power is supplied to the part 31 to be measured and the images processed by the computer control system 6.
The application also comprises another embodiment, a working method of a micro-light microscope system, which is applied to the micro-light microscope system, and the working method of the micro-light microscope system comprises the following steps:
fixing the to-be-detected piece 31 on the probe station 3, judging the positive and negative electrodes of the to-be-detected piece 31 through the computer control system 6 and controlling the power supply system 5 to apply forward voltage to the to-be-detected piece 31, if the to-be-detected piece 31 is short-circuited or inconsistent with the forward voltage value of the normal to-be-detected piece, continuously applying reverse voltage to the to-be-detected piece 31 through the computer control system 6 by controlling the power supply system 5 so as to obtain the magnitude of reverse leakage current of the to-be-detected piece 31, and if the magnitude of the reverse leakage current is in the range of 1nA-100 mu A, judging that the to-be-detected piece 31 has leakage failure;
the position of the to-be-measured piece 31 is adjusted by moving and rotating the probe platform 3, so that the position of the to-be-measured piece 31 and the optical path of the optical system are on the same vertical horizontal line;
the optical system 4 is adopted to acquire the optical information of the piece 31 to be detected and carry out photoelectric conversion, the result after the photoelectric conversion is transmitted to the computer control system 6, the image processing is carried out through the computer control system 7, the luminous image of the piece 31 to be detected is obtained, and the luminous image comprises the luminous points generated by the failure points;
the light-emitting image is superimposed with the optical image of the surface of the object 31, and then the position of the bright point in the optical image is located as the position of the failure point.
According to the working method of the micro-light microscope system in the embodiment, the computer control system 6 is used for controlling the power supply system 5 to switch the power supply mode of the to-be-detected piece so as to analyze the electric parameters of the to-be-detected piece 31 in different power supply modes to judge whether the to-be-detected piece 31 has the problem of leakage failure or not, after judging that the to-be-detected piece fails in leakage, the optical system 4 and the computer control system 6 are combined to position the failure point of the to-be-detected piece 31, the power supply mode of the to-be-detected piece does not need to be manually switched, and the efficiency of positioning and detecting the failure point of the to-be-detected piece can be greatly improved.
According to the micro-light microscope system and the working method thereof, the sample to be detected is directly fixed on the probe station, the power supply system is controlled by the computer control system to switch the power supply mode of the piece to be detected, the electric parameters of the piece to be detected in different power supply modes are analyzed to judge whether the piece to be detected has the problem of leakage failure, after the leakage failure of the piece to be detected is judged, the micro-light microscope system is automatically positioned to the position of the failure point of the piece to be detected, meanwhile, the micro-light microscope system has the functions of basic electric test and failure point positioning, and the power supply mode of the piece to be detected does not need to be manually switched, so that the efficiency of positioning and detecting the failure point of the piece to be detected is greatly improved. In addition, the laser marking system is further arranged in the optical system of the micro-light microscope system, and can automatically mark the edge area of the failure point position of the piece to be detected after the failure point position of the piece to be detected is detected, so that the piece to be detected can be conveniently cut to analyze the position area of the failure point, and the efficiency of positioning and analyzing the failure point of the piece to be detected can be improved.
In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present application have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the application, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A micro-optic microscope system, comprising: the device comprises a box body, a damping table, a probe table, an optical system, a power supply system and a computer control system, wherein the damping table is fixed at the bottom of the inner side of the box body; the probe table is arranged above the damping table and used for fixing a piece to be detected, and at least one servo motor is arranged in the probe table and used for controlling the piece to be detected to move and rotate so as to adjust the position of the piece to be detected; the optical system is arranged above the probe station and is used for being matched with the calculation control system so as to position the failure point of the piece to be detected; the power supply system is arranged outside the box body and is electrically connected with the probe station through a wire, and is used for supplying power to the to-be-detected piece; the computer control system is arranged outside the box body and is electrically connected with the probe station, the optical system and the power supply system through wires, and is used for controlling a power supply mode of the power supply system to the to-be-detected piece, wherein the power supply mode comprises the step of providing forward voltage or reverse voltage for the to-be-detected piece.
2. The micro light microscope system according to claim 1, wherein the case has a hexahedral structure with a single side openable and closable.
3. The micro light microscope system according to claim 1, wherein the inner wall of the housing is coated with a black light absorbing material, the absorbance of the black light absorbing material being greater than 99%.
4. The micro light microscope system according to claim 1, wherein the optical system comprises an objective lens, a light guide tube, a photoelectric detector, a cooling system and a laser marking system, the objective lens is arranged below the light guide tube, the photoelectric detector is arranged above the light guide tube, and the cooling system and the laser marking system are respectively arranged at the left side and the right side of the photoelectric detector.
5. The micro light microscope system according to claim 4, wherein a light supplementing system is installed in the light guiding tube.
6. The micro light microscope system according to claim 4, wherein the light source of the laser marking system comprises at least one of helium neon laser, carbon dioxide laser, YAG laser and semiconductor laser.
7. The micro light microscope system according to claim 1, wherein at least two probes are arranged above the probe station.
8. The micro light microscope system according to claim 1, wherein the spectral response range of the photodetector is 100-2000nm.
9. The micro light microscope system according to claim 1, further comprising a first display and a second display, wherein the first display is disposed in the housing and electrically connected to the computer control system via a wire, and the second display is disposed outside the housing and electrically connected to the computer control system via a wire.
10. A method of operating a micro-optic microscope system as claimed in claims 1 to 9, wherein the method of operating a micro-optic microscope system comprises: fixing a piece to be detected on a probe station, judging the positive electrode and the negative electrode of the piece to be detected through a computer control system, controlling a power supply system to apply forward voltage to the piece to be detected, if the piece to be detected is short-circuited or inconsistent with the forward voltage value of a normal piece to be detected, continuously controlling the power supply system to apply reverse voltage to the piece to be detected through the computer control system so as to obtain the magnitude of reverse leakage current of the piece to be detected, and judging that the piece to be detected has leakage failure if the magnitude of the reverse leakage current is in the range of 1nA-100 mu A;
the position of the to-be-detected piece is adjusted by moving and rotating the probe table, so that the position of the to-be-detected piece and the optical path of the optical system are on the same vertical horizontal line;
acquiring optical information of the to-be-detected piece by adopting an optical system, performing photoelectric conversion, transmitting a result after the photoelectric conversion to a computer control system, and performing image processing by the computer control system to obtain a luminous image of the to-be-detected piece, wherein the luminous image comprises a bright point generated by a failure point;
and superposing the luminous image and the optical image of the to-be-detected piece, and then positioning the position of the bright point in the optical image as the position of the failure point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310758391.2A CN116773450A (en) | 2023-06-26 | 2023-06-26 | Low-light microscope system and working method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310758391.2A CN116773450A (en) | 2023-06-26 | 2023-06-26 | Low-light microscope system and working method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116773450A true CN116773450A (en) | 2023-09-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310758391.2A Pending CN116773450A (en) | 2023-06-26 | 2023-06-26 | Low-light microscope system and working method thereof |
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| Country | Link |
|---|---|
| CN (1) | CN116773450A (en) |
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2023
- 2023-06-26 CN CN202310758391.2A patent/CN116773450A/en active Pending
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