TWI544209B - Solar cell related sample determination system - Google Patents

Description

Solar cell related sample measurement system

The present invention relates to a solar cell-associated sample measuring system for measuring characteristics of a sample associated with a solar cell by photoluminescence.

In recent years, solar cells have been actively developed in terms of prevention of global warming. In the research and development of such solar cells, for example, regarding the improvement of conversion efficiency in solar cells, it is important to measure and inspect the characteristics of samples related to solar cells such as materials, cells, and panels of solar cells (for example, refer to patents). Literature 1, 2).

Prior technical literature Patent literature

Patent Document 1: Japanese Patent Laid-Open No. Hei 8-235903

Patent Document 2: Japanese Patent Laid-Open Publication No. 2009-512198

In the measurement of the most important conversion efficiency (IV measurement) in the development of solar cells, a solar simulator that irradiates solar cell-related samples into white light of simulated sunlight with a specific wavelength spectrum and specific irradiation conditions (Solar) is used. Simulator). In this case, the solar light is irradiated to the sample such as the solar cell unit or the module by the solar simulator, and the probe or the like is brought into contact with the electrode on the solar cell unit to measure the electrical characteristics.

In the measurement of the electrical characteristics of the sample such as the I-V characteristics, the measurement results including all the factors in the entire solar cell unit were obtained. Therefore, found In the case of a unit having a problem such as a conversion efficiency, it is not possible to determine which of the manufacturing steps is abnormal based on the result of the electric characteristic measurement, and it is not possible to identify a portion where a defect has occurred. In order to ascertain the cause of the malfunction of such a solar cell, a method other than the electrical measurement, such as a photoluminescence (PL) method or an electroluminescence (EL) method, is used.

The principle of the photoluminescence measurement (PL measurement) is to generate a carrier in the sample by irradiating the target sample with excitation light having a higher energy (short wavelength) than the band-gap energy Eg. Electron or hole) detects the illuminating when the carrier is re-bonded near the PN junction. In such a method, the electronic state inside the material can be observed based on the obtained two-dimensional image of PL light emission, or the wavelength spectrum of PL light emission or the like.

Here, the evaluation of the solar cell is generally performed as described above, using a solar simulator, for example, a white light having an AM 1.5 G or the like having a wavelength spectrum close to sunlight, and a 1 SUN which is close to the intensity of sunlight. Under the conditions. On the other hand, when physical properties and defects other than the conversion efficiency of the solar cell are examined by PL imaging or spectrometry, such PL measurement is usually performed by irradiating the sample with laser light.

Regarding the inspection of solar cell-related samples using photoluminescence, it is suggested that there is a correlation between the PL luminescence and the characteristics of the solar cell in terms of material properties. That is, there is a tendency that the conversion efficiency is higher in the PL measurement in the PL measurement or the defect portion is less. However, for example, in CIGS (a compound of Cu, In, Ga, and Se) solar cells as a compound thin film solar cell, there are electrical characteristics for light and excitation light intensity for PL luminescence. Without linearity, it is difficult to select the optimum excitation light intensity as a parameter that can be correlated with conversion efficiency in the PL measurement.

Further, since the PL excitation by the laser light is excited by the single-wavelength light, the excitation light spectrum is absolutely different from the measurement using the conversion efficiency of the white light. In the case where a laser source is used as the lasing source of the sample, the wavelength of the applied excitation light is a specific wavelength such as 532 nm or 808 nm due to a material such as a laser, and the wavelength of the excitation light is determined in this case. The sample of the object may not be optimal.

For example, when light of a very short wavelength (for example, 355 nm) which is unsuitable for the material of the measurement object is used as the excitation light, there is a possibility that the penetration of light is long, and only the vicinity of the inclusion surface can be seen. The information other than the PL measurement target is completely different from the data that can be obtained from the target conversion efficiency. In addition, regarding solar cells, there are many requirements for the irradiation of the light to the sample, or the uniformity of the surface of the sample, and it is expected to be close to the requirements even in PL imaging or spectrometry. The measurement was carried out in the state.

The present invention has been made to solve the above problems, and an object of the invention is to provide a solar cell-related sample measurement system capable of preferably measuring a sample characteristic by a photoluminescence method for a sample associated with a solar cell.

To achieve such a purpose, the sample measurement system for a solar cell-related sample of the present invention is characterized by: (1) a solar simulator for measuring the characteristics of a sample associated with a solar cell; (2) for utilizing a solar simulation And an additional measuring device for measuring the sample by photoluminescence; (3) the sun The simulator includes: a sample mounting table on which a sample is placed; a white light supply unit that supplies white light that simulates sunlight to the sample; and a case portion that integrally holds the sample mounting table and the white light supply unit; The additional measuring device includes: a measuring device main body portion that is additionally disposed at a specific position with respect to the solar simulator; and a photoluminescence measuring unit that is attached to the measuring device main body portion and configured to be movable with respect to the sun The device is moved between a measurement position inserted from the white light supply unit on the measurement optical path of the sample mounting table and a standby position shifted from the measurement optical path; (5) the photoluminescence measurement unit includes an optical filter, which is to be When the photoluminescence measuring unit is disposed at the measurement position, the white light supplied from the white light supply unit to the sample mounting table is converted into excitation light having a specific wavelength spectrum, and the detected light detecting unit detects the self-irradiated light from the optical filter. The light to be measured emitted from the sample of the excitation light; and the unit frame portion integrally holding the optical filter and the light detecting portion to be measured, and The way moves between the standby position and the predetermined position is attached to the measuring device body.

In the above-described solar cell-related sample measurement system, an additional measurement device including a photoluminescence measurement unit (PL measurement unit) for a material, a unit, and a solar cell is additionally provided to the solar simulator. The sample material such as a panel is configured to be a white light that simulates sunlight and is inspected. Further, an optical filter (wavelength selective filter) that converts white light into excitation light, a light detecting unit that detects light from the sample, and a cell frame unit that integrally holds the same constitute a PL measuring unit.

Further, the PL measuring unit has the following configuration with respect to the solar simulator and the apparatus main body of the additional measuring device: The apparatus moves between the measurement position of the measurement optical path defined by the supply of the white light of the sample, the irradiation range, and the standby position deviated from the measurement optical path. According to this configuration, when the PL measuring unit is placed at the standby position, the measurement of the electrical characteristics such as the measurement of the IV characteristic similar to the prior art can be performed, and the PL measuring unit can be placed in the measurement position. The white light component of the optical filter is used as the excitation light to perform PL measurement on the sample. Thereby, the characteristics of the sample by the photoluminescence method can be preferably measured for the sample associated with the solar cell.

According to the solar cell-related sample measurement system of the present invention, an additional measuring device including a PL measuring unit is provided for a solar simulator that measures white light to be supplied to a sample, and is measured by an optical filter that converts white light into excitation light. The light detecting unit and the unit frame unit constitute a PL measuring unit, and the PL measuring unit is configured to be movable between a measurement position including a measurement optical path of the sample and a standby position deviating from the measurement optical path. The sample associated with the solar cell is preferably subjected to measurement of the characteristics of the sample by photoluminescence.

Form for implementing the invention

Hereinafter, embodiments of the solar cell-related sample measurement system of the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same components are denoted by the same reference numerals, and the repeated description is omitted. Moreover, the dimensional ratio of the drawings is not necessarily consistent with the description.

Fig. 1 is a view showing an embodiment of a solar cell-related sample measuring system; Form the front view. FIG. 1 shows a state in which the photoluminescence measuring unit (PL measuring unit) described below is placed in a standby position. 2 is a front view showing the configuration of the solar cell-associated sample measuring system shown in FIG. 1. Fig. 3 is a side view showing the configuration of the sample measuring system shown in Fig. 1. Fig. 4 is a perspective view showing the configuration of the sample measuring system shown in Fig. 1. 2 to 4 show the state in which the PL measuring unit is placed at the measurement position. In each of the drawings, the configuration of the sample measurement system is schematically shown in FIGS. 1 to 3, and an example of the structure is slightly shown in FIG.

The sample measurement system 1A of the present embodiment performs a test for evaluating and evaluating the characteristics of a sample, such as a material, a unit, and a panel (hereinafter referred to as a solar cell-related sample or simply a sample) S, which is related to a solar cell. The battery-related sample measurement system includes a solar simulator 10, an electrical property measuring device 19, an additional measuring device 20, and a control device 30.

The solar simulator 10 is for measuring the characteristics of the solar cell-related sample S, and includes a sample mounting table 11, a white light supply unit 13, and a casing portion 15. Further, the sample mounting table 11 on which the sample S to be measured is placed is configured to move in the x-axis direction, the y-axis direction (horizontal direction), and the z-axis direction (vertical direction) by the stage driving unit 12, thereby The measurement position and measurement range of the sample S on the mounting table 11 can be adjusted and set.

The white light supply unit 13 applies white light having a wavelength spectrum close to sunlight to the sample S on the mounting table 11 as a sample S according to specific irradiation conditions (irradiation range, irradiation angle, irradiation light intensity distribution, and the like). The characteristic measurement is supplied by simulating sunlight. Specifically, the white light supply unit 13 is composed of, for example, one or a plurality of light sources, and includes adjusting light from the light source. An optical system consisting of one or a plurality of optical elements such as an optical path and a wavelength spectrum. Further, between the white light supply unit 13 and the mounting table 11, ON/OFF of the supply of white light switched from the white light supply unit 13 to the sample S is provided on the measurement optical axis Ax. The baffle 14).

The casing portion 15 integrally holds the sample placing table 11 and the white light supply portion 13. In the present embodiment, the casing portion 15 is composed of the upper casing portion 16 and the lower casing portion 17. The upper casing portion 16 houses the white light supply portion 13 and the baffle 14 therein, and has a box shape having an opening portion opposed to the sample mounting table 11 below. The white light from the white light supply unit 13 passes through the shutter 14 in the ON state (open state) and the opening below the upper casing portion 16 , and expands to a specific range of measurement optical path by including the Ax optical axis. The sample S on the mounting table 11 is supplied.

As shown in FIG. 4, the lower casing portion 17 has a configuration in which four columnar members are provided between the upper casing portion 16 and the casing bottom portion 18, and is configured to be accessible from the outside and contained therein. Determine the space of the light path. Further, the sample mounting table 11 and the mounting table driving portion 12 are provided on the case bottom portion 18.

For such a solar simulator 10, an additional measuring device 20 is provided at a specific position in the vicinity thereof. The additional measurement device 20 is for measuring the solar cell-related sample S by the photoluminescence (PL) method using the solar simulator 10, and includes a measurement device main body portion 21 and a photoluminescence (PL) measurement unit 22. The measurement device main body portion 21 is attached to the solar simulator 10 and fixedly disposed at a specific position (in FIG. 1 , a position on the right side of the lower casing portion 17 of the solar simulator 10).

The PL measuring unit 22 is attached to the measuring device main body portion 21, and is configured as The measurement position (Fig. 2 to Fig. 4) of the sample S inserted into the sample S from the white light supply unit 13 to the sample mounting table 11 and the standby position deviating from the measurement optical path with respect to the solar simulator 10 (Fig. 1) ) move between.

When the PL measuring unit 22 is disposed at a standby position deviated from the measurement optical path, as shown in FIG. 1 , the PL measuring unit 22 is placed in the state inside the main body portion 21 . Further, when the PL measuring unit 22 is disposed at the measurement position (insertion position) including the measurement optical path, as shown in FIGS. 2 to 4, the PL measurement unit 22 is pulled out from the main body portion 21 to be included in the lower portion of the solar simulator 10. The space inside the measurement optical path inside the casing portion 17 is inserted into the measurement optical path at a measurement position between the baffle 14 and the sample mounting table 11.

As shown in FIGS. 2 to 4, the PL measuring unit 22 includes an optical filter 23, a to-be-measured light detecting unit 24, and a unit frame unit 25. The optical filter 23 is a wavelength selective filter that filters the white light supplied from the white light supply unit 13 to the sample mounting table 11 in the measurement optical path including the optical axis Ax when the PL measurement unit 22 is placed at the measurement position. Light components in a particular wavelength range are selectively passed, thereby converting white light into excitation light having a particular wavelength spectrum.

The optical filter 23 may be a filter that removes a wavelength region in which photoluminescence is generated from the white light emitted from the free solar simulator 10, and transmits a wavelength region of the excitation light. For example, the following short-pass filter can be used. (SPF, Short Pass Filter): The light component in a specific wavelength range on the short-wavelength side of white light is passed, and the light component on the long-wavelength side is cut off. Alternatively, as the optical filter 23, a band pass filter (BPF) may be used to pass light components in a specific wavelength range, and cut off Breaking the light component on the shorter wavelength side and the longer wavelength side than the light component in the specific wavelength range.

When the excitation light generated by the optical filter 23 is irradiated onto the sample S, the measurement light detecting unit 24 detects a detection unit including the PL light emitted from the sample S irradiated with the excitation light. As shown in FIGS. 3 and 4, the detection unit 24 is provided on the measurement optical path (the range in which the white light and the excitation light pass) from the white light supply unit 13 and the optical filter 23 to the sample mounting table 11. position.

Regarding the configuration of the light-measuring unit 24 to be measured, for example, the detecting unit 24 can be configured by an imaging device (camera) that acquires a two-dimensional image of the light to be measured. In such a configuration, the characteristic of the sample S measured by PL imaging can be evaluated by the detecting unit 24. Alternatively, the detecting unit 24 may be configured by a spectroscope that splits the light to be measured and a photodetector that detects the light to be measured. In such a configuration, by detecting one or more photodetectors in the detecting unit 24, each wavelength component of the light to be measured which is split by the spectroscope is detected, whereby the characteristics of the sample S measured by PL spectroscopy can be performed. Evaluation.

In the PL measuring unit 22, the unit frame unit 25 is provided to the optical filter 23 and the to-be-measured light detecting unit 24. The unit frame unit 25 integrally holds the optical filter 23 and the light-measuring unit 24 to be measured, and is attached to the measurement device main body unit 21 so as to be movable between the measurement position and the standby position. In the configuration example shown in FIG. 4, a rail 25a is provided on the side surface of the unit frame portion 25, and the unit frame portion 25 is included by the rail 25a and the rail provided on the inner side of the main body portion 21. The PL measuring unit 22 moves in the horizontal direction (left and right direction).

Further, in the PL measuring unit 22 of the present embodiment, a band pass filter (BPF) 26 is provided between the sample mounting table 11 of the solar simulator 10 and the light detecting unit 24 of the PL measuring unit 22. The band pass filter 26 selectively selects light components in a specific wavelength range of the light to be measured from the sample S on the mounting table 11 (for example, light including PL light from the sample S irradiated by the excitation light) The component is passed through the second optical filter of the photodetecting unit 24, and is fixed to the front surface side of the detecting unit 24 (on the sample mounting table 11 side). Further, as the second optical filter, a wavelength selective filter other than the band pass filter may be used depending on the wavelength range of the light component to be detected by the detecting unit 24.

Further, in the PL measuring unit 22, the illumination device 27 is provided at a position shifted from the measurement optical path on the side of the sample stage 11 from the optical filter 23. The illumination device 27 is a user who obtains a general image of the sample S while the PL measurement unit 22 is placed at the measurement position. For example, infrared illumination such as an infrared LED (Light Emitting Diode) can be used. Device.

In the sample measurement system 1A of the present embodiment, in addition to the solar simulator 10 and the additional measurement device 20, the electrical property measurement device 19 and the control device 30 are also provided. The electric characteristic measuring device 19 is provided for the solar simulator 10, and is connected to the sample S on the sample mounting table 11 by a specific wiring as shown in Fig. 1 to measure the electrical characteristics of the sample S, for example, IV. Used when measuring characteristics. In addition, in FIGS. 2 to 4, the illustration of the electrical characteristic measuring device 19 is omitted.

Moreover, the control device 30 is connected to the solar simulator 10 and an additional measuring device. 20, as shown in FIG. 2, the execution of the PL measurement of the pair of samples S is controlled by controlling the operations of the respective portions of the solar simulator 10 and the additional measuring device 20. For example, the control device 30 controls the operation of the shutter 14 provided to the solar simulator 10 in accordance with the execution state of the PL measurement. As described above, the configuration of the control flapper is effective when the solar simulator 10 has a flapper state output or the like.

Further, a display device 31 and an input device 32 are connected to the control device 30. The display device 31 displays information relating to the measurement of the characteristics of the solar cell-associated sample S in the measurement system 1A to the operator. Further, the input device 32 is used to input information, instructions, and the like required for measurement. In addition, in FIGS. 1, 3, and 4, the illustration of the control device 30, the display device 31, and the input device 32 is abbreviate|omitted.

The effects of the solar cell-related sample measurement system of the present embodiment and the sample measurement method using the same will be described.

In the solar cell-related sample measurement system 1A shown in FIG. 1 to FIG. 4, the solar simulator 10 configured to detect the supply of the white light that is the simulated sunlight to the sample S is additionally provided with the PL measurement unit. An additional measuring device 20 of 22. Further, the optical filter 23 that converts white light into excitation light, the light detecting unit 24 that detects the light to be measured from the sample S, and the cell frame unit 25 that integrally holds the light constitute the PL measuring unit 22.

Further, with respect to the solar simulator 10 and the apparatus main body portion 21 of the additional measuring device 20, the PL measuring unit 22 is configured to include a supply range of white light for the sample S in the solar simulator 10. The measurement position of the measurement optical path moves between the measurement position and the standby position deviated from the measurement optical path. According to this configuration, in the state where the PL measuring unit 22 is placed at the standby position, the electrical characteristic measuring device 19 can be used to measure the electrical characteristics such as the IV characteristic measurement as before, and the PL measuring unit 22 can be placed in the measurement. In the state of the position, the light component of the white light passing through the optical filter 23 can be used as the excitation light, and the sample S can be subjected to PL measurement. Thereby, various measurements and inspections including the measurement of the characteristics of the sample S can be preferably performed by the photoluminescence method for the solar cell-related sample S.

In the above-described embodiment, the PL measuring unit 22 is provided with a band pass filter that selectively passes light components in a specific wavelength range of the light to be measured between the sample mounting table 11 and the light detecting unit 24 to be measured. 26. By providing an optical filter such as the band pass filter 26 in the preceding stage of the detecting unit 24, only the wavelength range suitable for the characteristic evaluation of the sample S among the lights of the sample S can be selectively detected in the detecting unit 24. Light composition. For example, when the imaging device used in the photodetection unit 24 is sensitive to one of the wavelength ranges of the excitation light and interferes with the PL measurement, the optical filter 26 is disposed such that the wavelength of the excitation light is cut off. The composition of the light components in the range is effective. However, such a filter 26 may be configured not to be provided if it is not required.

Further, the PL measuring unit 22 includes an illumination device 27 for acquiring a general image of the sample S. Here, in the state where the PL measuring unit 22 is placed at the measurement position, since the optical filter 23 is inserted into the measurement optical path, the light from the solar simulator does not include detection by a camera or the like constituting the light detection unit to be measured. The case of light in the wavelength region. In contrast, borrowing as described above By providing the illumination device 27 in the PL measurement unit 22, even when the PL measurement unit 22 is placed in the measurement position, a general image such as a pattern image of the sample S can be preferably obtained. However, such a lighting device 27 may be configured not to be provided if it is not required.

Further, in the above embodiment, the sample measurement system 1A is provided with a control device 30 that controls PL measurement. Such a control device 30 may be, for example, attached or built into the additional measuring device 20. In this case, the control device 30 may be configured to control the operation of the shutter 14 provided between the white light supply unit 13 and the sample mounting table 11 in the solar simulator 10 as described above.

Further, in the above embodiment, the sample measurement system 1A is provided with the electric characteristic measuring device 19. Thereby, in addition to the PL measurement of the sample S, the measurement of the isoelectric characteristics using the I-V characteristic of the solar simulator 10 can be preferably performed. Further, the electrical characteristic measuring device 19 may be configured to be attached or built in the solar simulator 10, for example.

The configuration of the solar cell-related sample measurement system 1A shown in FIGS. 1 to 4 and the PL measurement performed using the sample measurement system 1A will be described more specifically.

Fig. 5 is a graph showing wavelength spectra of white light, excitation light, and measured light from a sample used in sample measurement. In the graphs (a), (b), and (c) of Fig. 5, the horizontal axis represents the wavelength (nm) of light, and the vertical axis represents the intensity of light. Further, the solar simulator 10 is used under the conditions of AM 1.5G.

The graph (a) of Fig. 5 shows the white light supply unit from the solar simulator 10. 13 wavelength spectrum of white light supplied. In the graph, the graph A1 represents the wavelength spectrum of the white light in the solar simulator 10, and the graph A2 represents the wavelength spectrum of the actual sunlight. Such white light also has a light component in a wavelength region in which PL light is emitted as a target in the PL measurement.

The graph (b) of Fig. 5 shows the wavelength spectrum of the excitation light irradiated to the sample S by the optical filter 23. In the graph, the graph B1 shows the wavelength spectrum when the optical filter 23 is applied to the white light in the solar simulator 10, and the graph B2 shows the wavelength spectrum when the optical filter 23 is applied to the sunlight. . Specifically, here, a short-pass filter (SPF) is used as the optical filter 23, which is set as a filter having a size larger than that of the white light supplied from the solar simulator 10, and the truncation includes PL illumination. The light component in the wavelength range on the long wavelength side is used as the excitation light measured by PL.

The graph (c) of Fig. 5 shows the wavelength spectrum of the light to be measured by the PL light emitted from the sample S irradiated by the excitation light shown in the graph B1. By detecting such PL light emission by the light detecting unit 24 to be measured, evaluation and inspection of the characteristics of the sample S can be performed. Here, when the detection unit 24 is an imaging device and a two-dimensional image of PL illumination is acquired, a PL image reflecting the characteristics of the sample S can be obtained. Further, when the detecting unit 24 is used as the spectroscope + photodetector, various kinds of information such as information on the wavelength spectrum of the PL light emission can be obtained. In addition, as described above, the detection of the light to be measured by the detecting unit 24 is performed via an optical filter such as the band pass filter 26 as needed.

Fig. 6 is a graph showing a wavelength spectrum of the light to be measured including PL light emitted from the sample S, wherein the horizontal axis represents the wavelength of light (nm) and the vertical axis represents the intensity of light. (a.u.). In the graph, the graph C1 shows the wavelength spectrum of the measurement result of the PL luminescence when the excitation light generated by the white light is used in the configuration of the solar simulator 10+ additional measuring device 20, and the graph C2. A wavelength spectrum indicating the measurement result of PL luminescence when laser light having a wavelength of 810 nm is used as the excitation light.

As is clear from the graphs C1 and C2, substantially the same PL luminescence spectrum can be obtained when excitation light generated by white light and laser excitation light are used. As can be seen from the sample measurement system 1A of FIGS. 1 to 4, the configuration of the PL measuring unit 22 for the white light of the solar simulator 10 is the same as the configuration using the laser excitation light, and the PL of the sample S is used. The luminescence assay is effective.

In the sample measurement system 1A of the above-described embodiment, an additional measurement device 20 including a PL measurement unit 22 for measuring the most important measurement, detection, and the like of the solar cell, that is, using the solar simulation, is additionally provided. The measurement of the isoelectric characteristics of the IV characteristic of the device 10 does not destroy the environment of the electrical measurement, and can be moved between the measurement position and the standby position.

According to this configuration, it is possible to provide an effective means for immediately switching the function of the measurement system 1A by the movement of the PL measuring unit 22 before the electric measurement, and simply finding the defective portion in the sample S by PL imaging. For example, PL imaging, PL spectrometry, or the like on an extension line using the I-V measurement of the solar simulator 10 or the measurement of conversion efficiency can be performed. Thereby, the abnormal portion can be visualized directly by PL imaging immediately after the measurement of the efficiency and other electrical characteristics, for example, in the case of poor efficiency. At the time, it is possible to visualize the cause and the like immediately and determine. In particular, in the sample S of a large-area state such as a solar cell panel, if it has a solar simulator for a large area, it can be applied to PL measurement.

Further, in the I-V measurement using the solar simulator 10, when the solar cell to be the sample S is provided in the measurement device, and the electrode is connected to a cell in which no lead wire or the like is attached, the operation and the like are very troublesome. In particular, since a crystalline Si solar cell such as a polycrystalline Si solar cell is easily broken, cracks or the like are generated with a little force, so that it is not easy to handle. If cracks are generated in the sample S, of course, the electrical characteristics including the conversion efficiency thereof are deteriorated. Further, if the unit in which the crack is generated is again placed in another detecting device, the crack may grow.

On the other hand, in the state in which the sample S is provided in the solar simulator 10 which is a measuring device for performing the I-V measurement, the crack can be detected by PL imaging, and the problem can be easily grasped. According to the above-described sample measurement system 1A, for example, in the detection of the above-mentioned cracks, it is possible to perform very effective analysis. The sample measurement system 1A is only required to insert the PL measurement unit 22 of the additional measurement device 20 into the sun after performing the IV measurement. The optical path of the simulator 10 can be used to perform PL imaging measurement of the solar cell.

Further, the optical filter 23 is applied to the white light of the solar simulator 10 to generate excitation light. In the PL measurement, the excitation light intensity, the excitation light spectrum, and the uniformity of the excitation light to the sample S can be solved. problem. In other words, when the solar cell-related sample S is irradiated with the excitation light in the PL measurement, strict conditions relating to the uniformity of the extremely high light, the condition of the irradiation angle, the unevenness of the light irradiation, or the degree of parallelism can be obtained.

On the other hand, in the above-described configuration in which the optical filter 23 is partially inserted from the body of the solar simulator 10, the uniformity of the excitation light irradiation can be realized on the side of the solar simulator 10 that supplies the white light which is the source of the excitation light. For example, the rectangular solar cell unit can be uniformly irradiated with excitation light or the like to achieve irradiation of the excitation light under ideal conditions. Further, in such a configuration, the various solar simulators 10 can be modified, and the use/non-use of the filter 23 can be selected by the movement of the PL measuring unit 22, thereby making it possible to improve the current use without affecting the current use. Next, the solar simulator 10 is used as a light source for PL measurement.

Further, in the solar simulator 10, in order to realize the conditions required for uneven illumination or parallelism, there is a case where an optical component called a fly-eye lens is used inside the solar simulator, However, even in the case where the light is emitted from the solar simulator, it is possible to obtain uniform and parallel light in the irradiation surface of the sample S when the optical filter smaller than the light beam is inserted. On the other hand, in the PL measuring unit 22, such a problem can be avoided by using the optical filter 23 having a larger size than the light beam of the white light supplied from the solar simulator 10.

The above measurement system 1A has the advantage of photoluminescence, that is, the advantage of non-contact, non-destructive measurement, for example, solar cells in various states from the stage before the electrode is mounted to the final stage after the electrode is mounted. The associated sample S is applied. Thereby, in each manufacturing step, the cause of the defect can be detected in advance, and the improvement in yield and quality can be greatly contributed. Further, in the case where there is a problem in the electrode, the failure can be confirmed by the PL measurement.

Moreover, in the above configuration using the white light of the solar simulator 10, In terms of the wavelength spectrum and the light intensity (1SUN), which are the operating conditions for the conversion efficiency, such as the conversion efficiency, the measurement is performed in a state close to the actual operating condition by observing the electronic state inside the sample S. Therefore, as a result of the PL measurement, it is expected to obtain a measurement result which can be further correlated with the electrical conversion efficiency and the like. The reason for this is that, for example, the penetration length in the sample S to be measured is caused to cause a problem in the depth direction of the sample S; the sample S does not necessarily ensure a straight line with respect to the electrical output of the light. When the intensity of the excitation light is not suitable for the sample with no linearity, the result may be reversed.

Further, in the measurement system 1A, the long-wavelength component of the white light supplied from the solar simulator 10, for example, the light component having a lower energy than the band gap energy Eg of the target solar cell material is an optical filter 23 such as SPF. It was cut off without irradiating the sample S. In this case, in the PL measurement, in principle, the light whose energy is lower than the band gap energy Eg causes the temperature of the sample S which is an obstacle to the PL measurement to rise, so that the influence on the PL measurement by cutting the long-wavelength component is small.

Further, the above-described measurement system 1A is also effective in terms of safety, cost, and the like. Regarding safety, for example, a CW laser light having a wavelength of 808 nm is used as excitation light, and in a single unit such as 12.5 cm square, it is desired to uniformly obtain a state close to the energy of sunlight, such as 1SUN, in a single unit such as 12.5 cm square. In the case of output, it is necessary to use a tens of W Class 4 laser as a laser output. In this case, in addition to the use of the laser in the completely shielded device or the use in the laser management area, the user is also limited, and the management or operation of the measuring device requires a great deal of labor. .

On the other hand, in the PL measurement, the configuration of the lamp light source or the like used in the solar simulator 10 is used without using a laser light source, and since the safety standard or the like is not critical, the introduction of the device is easy. Further, it is expected that the damage of the sample S caused by the excitation of the laser light and the strong energy at a specific wavelength is alleviated by using the excitation light generated by the white light.

Further, in terms of cost, in the case of manufacturing a solar cell or the like, the operation cost becomes a problem when the detecting device is completely operated, but in the case of a light source or the like, the operating cost lower than that of the laser light source can be achieved. Moreover, since the prepared lamp light source can be easily prepared in advance, it is possible to avoid the loss due to the downtime. Moreover, the overall cost of the device can also be reduced compared to systems that use lasers.

The measurement and detection method of the solar cell-related sample using the sample measurement system 1A shown in FIGS. 1 to 4 will be further described.

Fig. 7 is a flow chart showing an example of a sample measuring method. In Fig. 7, an example in which the solar simulator 10 has a shutter state output is shown. In the method shown in FIG. 7, first, the PL measuring unit 22 is placed in the standby position in the main body portion 21 of the additional measuring device 20, and the sample S is performed by the solar simulator 10 and the electrical property measuring device 19. Measurement of IV characteristic isoelectric characteristics (step S101).

Then, the PL measuring unit 22 is moved to the measurement position including the optical axis Ax and the measurement optical path, and the optical filter 23, the measured light detection unit 24, and the like are placed at specific positions (S102). Then, in this state, the PL measurement of the sample S using the solar simulator 10 and the PL measuring unit 22 is started (S103).

Based on the state of the shutter output from the solar simulator 10, it is confirmed whether or not the shutter 14 on the measurement optical path is closed (S104), and when it is opened, the shutter 14 is closed (S105). Next, measurement of the dark current in the light detecting unit 24 to be measured is performed (S106). Here, there is a case where the measurement result of the imaging device or the photodetector used in the detection unit 24 includes a noise called dark current, and the background light of the non-signal is also required to be self-measured. Remove. The dark current measurement is performed to remove unnecessary signals and data such as noise.

Next, it is confirmed whether or not the shutter 14 is opened based on the state of the shutter output from the solar simulator 10 (S107), and the shutter 14 is opened when it is closed (S108). Then, the sample light S is irradiated with the excitation light from the white light supply unit 13 via the optical filter 23, and the measurement information of the obtained PL light emission is acquired by the measurement light detection unit 24 (S109). After the completion of the PL measurement, the shutter 14 is closed (S110), and the obtained PL measurement data is subjected to necessary analysis and output operations (S111).

As a specific data analysis, for example, the control device 30 performs a process of subtracting the data obtained in the dark current measurement from the data obtained in the PL measurement, and generates measurement data from which noise has been removed. Then, the obtained two-dimensional image data of the PL light emission, the wavelength spectrum data, and the like are displayed to the operator by the display device 31.

After the completion of the operations, the operation of moving the PL measurement unit 22 to the standby position or the like is performed as needed (S112), and the measurement is ended. Further, in the analysis of the PL measurement data, when it is necessary to compare the defective portion in the sample S and it is necessary to compare with the pattern image of the sample S, the solar simulator 10 is turned off. The shutter 14 lights the infrared illuminating device 27 to obtain a pattern image.

Fig. 8 is a flow chart showing another example of the sample measuring method. In Fig. 8, an example in which the solar simulator 10 does not have a shutter state output is shown. In the method shown in FIG. 8, first, the PL measuring unit 22 is placed in a standby position in the main body portion 21 of the additional measuring device 20, and the solar simulator 10 and the electrical property measuring device 19 perform sample preparation. Measurement of the isoelectric characteristics of the IV characteristic of S (step S201).

Then, the PL measuring unit 22 is moved to the measurement position including the optical axis Ax and the measurement optical path, and the optical filter 23, the measured light detection unit 24, and the like are placed at specific positions (S202). Then, in this state, the PL measurement of the sample S using the solar simulator 10 and the PL measuring unit 22 is started (S203).

In the solar simulator 10, the operation of closing the shutter 14 on the measurement optical path is performed (S204), and the operation is continued until the closing operation of the shutter is completed (S205). Next, measurement of the dark current in the light detecting unit 24 to be measured is performed (S206). Next, in the solar simulator 10, the operation of opening the shutter 14 is performed (S207), and it stands by until the opening operation of the shutter is completed (S208). Then, the sample S is irradiated with the excitation light, and the measurement information of the obtained PL light emission is acquired by the measurement light detecting unit 24 (S209). After the completion of the PL measurement, the shutter 14 is closed (S210), and the obtained PL measurement data is subjected to necessary analysis, output, and the like (S211). After the end of the operations, the operation of moving the PL measuring unit 22 to the standby position is performed as needed (S212), and the measurement is ended.

The solar cell related sample measurement system of the present invention is not limited to the above Various modifications can be made to the embodiment and configuration examples. For example, the configuration of each of the solar simulator 10 and the additional measuring device 20 is not limited to the above configuration, and specifically, various configurations may be used. Further, the electric characteristic measuring device 19, the control device 30, and the like may be configured not to be provided if they are not required.

In the sample measurement system for a solar cell-related sample according to the above embodiment, a configuration including (1) a solar simulator for measuring characteristics of a sample associated with a solar cell; and (2) for using a solar simulator are used. And an additional measuring device for measuring the sample by photoluminescence; (3) the solar simulator includes: a sample mounting table on which the sample is placed; and a white light supply unit that supplies the sample with white light that simulates sunlight. And a housing portion that integrally holds the sample mounting table and the white light supply unit; (4) the additional measuring device includes: a measuring device body portion that is additionally disposed at a specific position with respect to the solar simulator; and The illuminating measuring unit is attached to the main body of the measuring device, and is configured to be capable of being inserted between the measurement position of the measurement optical path from the white light supply unit to the sample mounting table and the standby position of the measurement optical path. (5) The photoluminescence measuring unit comprises: an optical filter for supplying the photoluminescence measuring unit from the white light when the photoluminescence measuring unit is disposed at the measuring position The white light supplied to the sample mounting table is converted into excitation light having a specific wavelength spectrum, and the measured light detecting unit detects the light to be measured emitted from the sample irradiated by the excitation light from the optical filter; and the cell frame portion. The optical filter and the light-measuring unit to be measured are integrally held, and are attached to the main body of the measuring device so as to be movable between the measurement position and the standby position.

In the configuration of the detection unit for detecting the light to be measured from the sample used in the PL measurement unit, the measurement light detection unit can be configured to include an imaging device that acquires a two-dimensional image of the light to be measured. In such a configuration, the evaluation of the characteristics of the sample measured by PL imaging can be performed.

Alternatively, the measurement light detecting unit may be configured to include a spectroscope that splits the light to be measured and a photodetector that detects the light to be measured by the spectroscope. In such a configuration, the characteristics of the sample measured by PL spectroscopy can be evaluated by detecting the respective wavelength components of the light to be measured by one or a plurality of photodetectors.

Further, the photoluminescence measuring unit preferably includes a second optical filter that is disposed between the sample mounting table and the light detecting unit to be measured, and selectively selects a specific wavelength range of the light to be measured. The light component inside passes through the light detecting unit to be measured. By providing the second optical filter in the preceding stage of the light detecting unit to be measured, it is possible to selectively detect only the light component in the wavelength range suitable for the characteristic evaluation of the sample from the light of the sample.

Further, the photoluminescence measuring unit may be configured to include an illumination device for obtaining a general image of the sample. Here, in the state where the PL measuring unit is placed at the measurement position, since the optical filter is inserted into the optical path to be measured, the light from the solar simulator does not include the camera or the like that constitutes the light detecting unit to be measured. The case of light in the wavelength region. On the other hand, by providing the illumination device in the PL measurement unit as described above, even when the PL measurement unit is placed in the measurement position, a general image such as a pattern image of the sample can be preferably obtained.

Further, the sample measurement system may be configured as follows: In addition to the simulator and the additional measuring device, a control device for controlling the photoluminescence measurement of the sample by the solar simulator and the additional measuring device is also included. Such a control device may also be, for example, attached or built into an additional measuring device. Further, in this case, the control device may be configured to control the operation of the shutter provided between the white light supply unit and the sample mounting table in the solar simulator.

Further, the sample measurement system may be configured to include an electric characteristic measuring device provided for the measurement of the electrical characteristics of the sample with respect to the solar simulator. Thereby, in addition to the PL measurement of the sample, the measurement of the isoelectric characteristics using the I-V characteristic of the solar simulator can be preferably performed. Further, such an electrical characteristic measuring device may be, for example, attached or built in a solar simulator.

Industrial availability

The present invention can be used as a sample measurement system capable of measuring the characteristics of a sample by a photoluminescence method for a sample associated with a solar cell.

1A‧‧‧Solar battery related sample measurement system

10‧‧‧Sun Simulator

11‧‧‧Sample loading table

12‧‧‧Station drive department

13‧‧‧White Light Supply Department

14‧‧‧Baffle

15‧‧‧Shell Department

16‧‧‧Upper casing

17‧‧‧ Lower housing section

18‧‧‧Bottom of the casing

19‧‧‧Electrical characteristic measuring device

20‧‧‧Additional measuring device

21‧‧‧Measurement device body

22‧‧‧Photoluminescence measurement unit (PL measurement unit)

23‧‧‧Optical filter

24‧‧‧Measured light detection department

25‧‧‧Unit frame

26‧‧‧Bandpass filter

27‧‧‧Lighting device

30‧‧‧Control device

31‧‧‧ display device

32‧‧‧ Input device

Ax‧‧‧ Measuring optical axis

S‧‧‧Solar battery related samples

Fig. 1 is a front view showing the configuration of an embodiment of a solar cell-related sample measuring system.

Fig. 2 is a front view showing the configuration of the sample measuring system shown in Fig. 1.

Fig. 3 is a side view showing the configuration of the sample measuring system shown in Fig. 1.

Fig. 4 is a perspective view showing the configuration of the sample measuring system shown in Fig. 1.

Fig. 5 (a) - (c) are graphs showing the wavelength spectrum of the white light, the excitation light, and the light to be measured from the sample used in the sample measurement.

Fig. 6 is a graph showing the wavelength spectrum of the light to be measured from the sample.

Fig. 7 is a flow chart showing an example of a sample measuring method.

Fig. 8 is a flow chart showing another example of the sample measuring method.

1A‧‧‧Solar battery related sample measurement system

10‧‧‧Sun Simulator

11‧‧‧Sample loading table

12‧‧‧Station drive department

13‧‧‧White Light Supply Department

14‧‧‧Baffle

15‧‧‧Shell Department

16‧‧‧Upper casing

17‧‧‧ Lower housing section

18‧‧‧Bottom of the casing

20‧‧‧Additional measuring device

21‧‧‧Measurement device body

22‧‧‧Photoluminescence measurement unit (PL measurement unit)

23‧‧‧Optical filter

24‧‧‧Measured light detection department

25‧‧‧Unit frame

26‧‧‧Bandpass filter

27‧‧‧Lighting device

30‧‧‧Control device

31‧‧‧ display device

32‧‧‧ Input device

Ax‧‧‧ Measuring optical axis

S‧‧‧Solar battery related samples

Claims (8)

A solar cell related sample measurement system, comprising: a solar simulator for measuring characteristics of a sample associated with a solar cell; and an additional measuring device for utilizing the solar simulator described above, and by using a light The illuminating method performs the measurement of the sample; the solar simulator includes: a sample mounting table on which the sample is placed; a white light supply unit that supplies white light that simulates sunlight to the sample; and a case portion that is integrally provided The sample mounting table and the white light supply unit are held; the additional measuring device includes a measuring device main portion that is additionally disposed at a specific position with respect to the solar simulator, and a photoluminescence measuring unit that is attached to The measuring device main body portion is configured to be movable between a measurement position inserted from the white light supply unit on the measurement optical path of the sample mounting table and a standby position deviated from the measurement optical path with respect to the solar simulator; The photoluminescence measuring unit includes: an optical filter for determining the photoluminescence described above When element arranged in the measurement position, the supply of the white to the sample from the mounting portion station supplying the white light is converted into the excitation light having a specific wavelength spectrum of light; The measured light detecting unit detects the light to be measured emitted from the sample irradiated with the excitation light from the optical filter, and the unit frame unit that integrally holds the optical filter and the light detecting unit to be measured And attached to the main body of the measuring device so as to be movable between the measurement position and the standby position. The solar cell-associated sample measurement system according to claim 1, wherein the measured light detecting unit includes an imaging device that acquires a two-dimensional image of the light to be measured. The solar cell-associated sample measuring system according to claim 1, wherein the measured light detecting unit includes: a spectroscope that splits the light to be measured; and a photodetector that detects the photo split by the spectroscope The light was measured. The solar cell-associated sample measuring system according to any one of claims 1 to 3, wherein the photoluminescence measuring unit includes a second optical filter, wherein the second optical filter is disposed on the sample mounting table and the measured light The light components in a specific wavelength range of the light to be measured are selectively passed through the light detecting unit to be measured between the detecting portions. The solar cell-associated sample measuring system according to any one of claims 1 to 3, wherein the photoluminescence measuring unit comprises a lighting device for obtaining a general image of the sample. The solar cell-associated sample measurement system according to any one of claims 1 to 3, further comprising control means for controlling the photoluminescence measurement of the sample by the solar simulator and the additional measuring device. The solar cell associated sample measurement system of claim 6 wherein the above control The apparatus is controlled by the operation of the baffle provided between the white light supply unit and the sample stage in the solar simulator. The solar cell-associated sample measurement system according to any one of claims 1 to 3, further comprising an electric characteristic measuring device provided for the solar simulator to measure the electrical characteristics of the sample .