CN116745902A - 具有包括与衬底表面对准的表面互连件的衬底的封装件 - Google Patents

具有包括与衬底表面对准的表面互连件的衬底的封装件 Download PDF

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Publication number
CN116745902A
CN116745902A CN202180091685.3A CN202180091685A CN116745902A CN 116745902 A CN116745902 A CN 116745902A CN 202180091685 A CN202180091685 A CN 202180091685A CN 116745902 A CN116745902 A CN 116745902A
Authority
CN
China
Prior art keywords
interconnects
substrate
interconnect
package
integrated device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180091685.3A
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English (en)
Chinese (zh)
Inventor
卫洪博
M·徐
A·帕蒂尔
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Qualcomm Inc
Original Assignee
Qualcomm Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Inc filed Critical Qualcomm Inc
Publication of CN116745902A publication Critical patent/CN116745902A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/20—Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/611—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65—Shapes or dispositions of interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/021—Manufacture or treatment of interconnections within wafers or substrates
    • H10W20/023—Manufacture or treatment of interconnections within wafers or substrates the interconnections being through-semiconductor vias
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/42—Vias, e.g. via plugs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/435—Cross-sectional shapes or dispositions of interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65—Shapes or dispositions of interconnections
    • H10W70/6565—Shapes or dispositions of interconnections recessed into the surface of the package substrates, interposers, or redistribution layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/685—Shapes or dispositions thereof comprising multiple insulating layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/221—Structures or relative sizes
    • H10W72/227—Multiple bumps having different sizes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/231—Shapes
    • H10W72/237—Multiple bump connectors having different shapes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/241—Dispositions, e.g. layouts
    • H10W72/247—Dispositions of multiple bumps
    • H10W72/248—Top-view layouts, e.g. mirror arrays

Landscapes

  • Wire Bonding (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Combinations Of Printed Boards (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
CN202180091685.3A 2021-02-01 2021-12-22 具有包括与衬底表面对准的表面互连件的衬底的封装件 Pending CN116745902A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/164,729 2021-02-01
US17/164,729 US11682607B2 (en) 2021-02-01 2021-02-01 Package having a substrate comprising surface interconnects aligned with a surface of the substrate
PCT/US2021/064920 WO2022164560A1 (en) 2021-02-01 2021-12-22 Package having a substrate comprising surface interconnects aligned with a surface of the substrate

Publications (1)

Publication Number Publication Date
CN116745902A true CN116745902A (zh) 2023-09-12

Family

ID=80050968

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180091685.3A Pending CN116745902A (zh) 2021-02-01 2021-12-22 具有包括与衬底表面对准的表面互连件的衬底的封装件

Country Status (8)

Country Link
US (1) US11682607B2 (enExample)
EP (1) EP4285407A1 (enExample)
JP (1) JP7824965B2 (enExample)
KR (1) KR20230137329A (enExample)
CN (1) CN116745902A (enExample)
BR (1) BR112023014695A2 (enExample)
TW (1) TWI911361B (enExample)
WO (1) WO2022164560A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7728756B2 (ja) 2019-10-29 2025-08-25 エイエムエス－オスラム インターナショナル ゲーエムベーハー オプトエレクトロニクス装置
WO2021110332A1 (en) * 2019-12-06 2021-06-10 Osram Opto Semiconductors Gmbh Window or surface of a vehicle comprising at least one optoelectronic component
DE112020005977T5 (de) 2019-12-06 2022-09-22 Osram Opto Semiconductors Gmbh Vorrichtung umfassend einen träger mit optoelektronischen elementen und verfahren zur herstellung der vorrichtung
CN114786943A (zh) 2019-12-06 2022-07-22 奥斯兰姆奥普托半导体股份有限两合公司 光电装置
US12040317B2 (en) 2019-12-06 2024-07-16 Osram Opto Semiconductors Gmbh Optoelectronic device
CN114787996A (zh) 2019-12-06 2022-07-22 奥斯兰姆奥普托半导体股份有限两合公司 光电装置
US11682607B2 (en) * 2021-02-01 2023-06-20 Qualcomm Incorporated Package having a substrate comprising surface interconnects aligned with a surface of the substrate
US12549154B2 (en) 2021-09-24 2026-02-10 Rf360 Singapore Pte. Ltd. Package comprising an acoustic device and a cap substrate comprising an inductor
US12341488B2 (en) * 2022-09-20 2025-06-24 Qualcomm Incorporated Package comprising an acoustic device and a polymer cap layer
US20240136293A1 (en) * 2022-10-25 2024-04-25 Taiwan Semiconductor Manufacturing Company, Ltd. Package structure and method of forming the same

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US8021976B2 (en) * 2002-10-15 2011-09-20 Megica Corporation Method of wire bonding over active area of a semiconductor circuit
US7099293B2 (en) * 2002-05-01 2006-08-29 Stmicroelectronics, Inc. Buffer-less de-skewing for symbol combination in a CDMA demodulator
JP3800215B2 (ja) 2003-09-29 2006-07-26 株式会社トッパンＮｅｃサーキットソリューションズ 印刷配線板、半導体装置、及びそれらの製造方法
JP4769022B2 (ja) 2005-06-07 2011-09-07 京セラＳｌｃテクノロジー株式会社 配線基板およびその製造方法
US7569422B2 (en) * 2006-08-11 2009-08-04 Megica Corporation Chip package and method for fabricating the same
JP5101169B2 (ja) 2007-05-30 2012-12-19 新光電気工業株式会社 配線基板とその製造方法
US8193555B2 (en) * 2009-02-11 2012-06-05 Megica Corporation Image and light sensor chip packages
US8837872B2 (en) * 2010-12-30 2014-09-16 Qualcomm Incorporated Waveguide structures for signal and/or power transmission in a semiconductor device
US9177899B2 (en) 2012-07-31 2015-11-03 Mediatek Inc. Semiconductor package and method for fabricating base for semiconductor package
US9461008B2 (en) * 2012-08-16 2016-10-04 Qualcomm Incorporated Solder on trace technology for interconnect attachment
US9508637B2 (en) * 2014-01-06 2016-11-29 Taiwan Semiconductor Manufacturing Company, Ltd. Protrusion bump pads for bond-on-trace processing
US10971476B2 (en) * 2014-02-18 2021-04-06 Qualcomm Incorporated Bottom package with metal post interconnections
US9679841B2 (en) 2014-05-13 2017-06-13 Qualcomm Incorporated Substrate and method of forming the same
US9343369B2 (en) * 2014-05-19 2016-05-17 Qualcomm Incorporated Three dimensional (3D) integrated circuits (ICs) (3DICs) and related systems
US10157823B2 (en) 2014-10-31 2018-12-18 Qualcomm Incorporated High density fan out package structure
US9425174B1 (en) 2014-11-18 2016-08-23 Altera Corporation Integrated circuit package with solderless interconnection structure
US11139224B2 (en) * 2019-12-05 2021-10-05 Qualcomm Incorporated Package comprising a substrate having a via wall configured as a shield
US20210175178A1 (en) * 2019-12-05 2021-06-10 Qualcomm Incorporated Package comprising a double-sided redistribution portion
US12040317B2 (en) * 2019-12-06 2024-07-16 Osram Opto Semiconductors Gmbh Optoelectronic device
US20210210452A1 (en) * 2020-01-02 2021-07-08 Qualcomm Incorporated Integrated passive device (ipd) coupled to front side of integrated device
US11444019B2 (en) * 2020-04-06 2022-09-13 Qualcomm Incorporated Package comprising a substrate with interconnect routing over solder resist layer and an integrated device coupled to the substrate and method for manufacturing the package
US11502049B2 (en) * 2020-05-06 2022-11-15 Qualcomm Incorporated Package comprising multi-level vertically stacked redistribution portions
US11682607B2 (en) * 2021-02-01 2023-06-20 Qualcomm Incorporated Package having a substrate comprising surface interconnects aligned with a surface of the substrate
US11823983B2 (en) * 2021-03-23 2023-11-21 Qualcomm Incorporated Package with a substrate comprising pad-on-pad interconnects
US12469811B2 (en) * 2021-03-26 2025-11-11 Qualcomm Incorporated Package comprising wire bonds coupled to integrated devices
US11791276B2 (en) * 2021-04-08 2023-10-17 Qualcomm Incorporated Package comprising passive component between substrates for improved power distribution network (PDN) performance

Also Published As

Publication number Publication date
TW202232694A (zh) 2022-08-16
BR112023014695A2 (pt) 2023-12-12
US11682607B2 (en) 2023-06-20
JP2024505487A (ja) 2024-02-06
KR20230137329A (ko) 2023-10-04
TWI911361B (zh) 2026-01-11
JP7824965B2 (ja) 2026-03-05
US20220246496A1 (en) 2022-08-04
EP4285407A1 (en) 2023-12-06
WO2022164560A1 (en) 2022-08-04

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