CN116714336A - 抛光用带有底部缓冲保护层的缓冲阻尼布及其制备工艺 - Google Patents

抛光用带有底部缓冲保护层的缓冲阻尼布及其制备工艺 Download PDF

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Publication number
CN116714336A
CN116714336A CN202310669649.1A CN202310669649A CN116714336A CN 116714336 A CN116714336 A CN 116714336A CN 202310669649 A CN202310669649 A CN 202310669649A CN 116714336 A CN116714336 A CN 116714336A
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China
Prior art keywords
layer
polishing
palm
parts
buffering
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CN202310669649.1A
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English (en)
Inventor
李加海
杨惠明
孙传东
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Anhui Hechen New Material Co ltd
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Anhui Hechen New Material Co ltd
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Priority to CN202310669649.1A priority Critical patent/CN116714336A/zh
Publication of CN116714336A publication Critical patent/CN116714336A/zh
Pending legal-status Critical Current

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  • Wood Science & Technology (AREA)
  • Zoology (AREA)
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Abstract

本发明公开了抛光用带有底部缓冲保护层的缓冲阻尼布及其制备工艺,属于阻尼布技术领域。本发明的抛光用带有底部缓冲保护层的缓冲阻尼布,包括基底缓冲层、热熔胶层和抛光面层,所述基底缓冲层通过热熔胶层与抛光面层粘接,基底缓冲层包括第一弹性层、第二弹性层、第一织物层、第二织物层和第三织物层。本发明解决了现有不同的弹性垫聚氨酯多孔吸附垫弹性差异较大,本发明提出的抛光用带有底部缓冲保护层的缓冲阻尼布,棕榈纤维单丝绞制成螺旋绳,获得卷曲的棕榈纤维,再由天然橡胶混合黏合,黏合后的纤维网在纤维相交处形成弹性节点,提高了棕榈纤维的弹性,增强了基底缓冲层的抗压和抗拉能力,从而起到缓冲保护作用。

Description

抛光用带有底部缓冲保护层的缓冲阻尼布及其制备工艺
技术领域
本发明涉及阻尼布技术领域,具体为抛光用带有底部缓冲保护层的缓冲阻尼布及其制备工艺。
背景技术
阻尼布,是一种丝绒状的磨光材料,它质地细腻,表面柔软,多孔,呈弹性,使用周期长。研磨时可有效含浸研磨液,提高切削力的同时避免划伤工件。阻尼布适用于光学元件、晶体及金属和玻璃材料的终道抛光,也可用来抛光特殊材质,如硅、锗、硒脂锌、砷化镓、合金钢、陶瓷和丙烯酸玻璃。
公开号为CN114683183B的中国专利公开了一种用于贵重金属表面抛光的阻尼布及其生产工艺,该种阻尼布从抛光接触面至吸附面依次包括助磨涂料层、拒水基垫和弹性垫;助磨涂料层由亲水改性的偏二氟乙烯和聚乙二醇为成膜材料,助磨涂料层的良好亲水性使得抛光液可均匀分散,聚乙二醇具有水溶性,在抛光过程中助磨涂料层缓慢浸蚀,磨料均匀释放参与抛光,可降低抛光液的浓度,使得抛光液中的磨粒易分散,从而提高抛光精度。
该专利虽然在一定程度上解决了背景技术中的抛光切削下的微粉易卡在空隙中难以与抛光垫分离,使得贵重金属的抛光损失率较大的问题,但是该专利中弹性垫为聚氨酯多孔吸附垫,不同的弹性垫聚氨酯多孔吸附垫弹性差异较大。
发明内容
本发明的目的在于提供抛光用带有底部缓冲保护层的缓冲阻尼布及其制备工艺,通过棕榈纤维起到底部缓冲作用,棕榈纤维进行碱洗处理后,棕榈纤维的内部具有因木质素被碱分解而导致的孔洞结构,酯化后的棕榈纤维在冷却后棕榈酸甲酯成为固体,将防静电剂和石墨烯固定在棕榈纤维表面,提高了棕榈纤维的抗静电、耐磨耐热性能,解决了上述背景技术中提出的问题。
为实现上述目的,本发明提供如下技术方案:抛光用带有底部缓冲保护层的缓冲阻尼布,包括基底缓冲层、热熔胶层和抛光面层,所述基底缓冲层通过热熔胶层与抛光面层粘接,基底缓冲层包括第一弹性层、第二弹性层、第一织物层、第二织物层和第三织物层,第一织物层和第二织物层之间夹有第一弹性层,第二织物层和第三织物层之间夹有第二弹性层,第一弹性层由以下重量份原料制成:酯化棕榈纤维20-45份、天然橡胶10-25份、改性剂5-8份;第二弹性层由以下重量份原料制成:酯化棕榈纤维20-45份、猪鬃15-20份、天然橡胶10-25份、改性剂5-8份。
优选的,所述第一织物层为尼龙纤维编织而成,第二织物层为芳纶纤维编织而成,第三织物层为聚酯纤维编织而成。
优选的,所述改性剂包括防静电剂和石墨烯,防静电剂和石墨烯的质量比为1:2。
优选的,所述酯化棕榈纤维的制备过程如下:
将棕榈叶鞘纤维片进行碱洗处理,获得碱处理棕榈纤维,再经打散、梳理分解成棕榈纤维单丝;
使用制绳机将棕榈纤维单丝绞制成螺旋绳,高温定型后取出,将螺旋绳分解,获得卷曲的棕榈纤维;
将碱洗处理后的棕榈纤维、甲醇和浓硫酸混合,进行酯化反应,制得酯化棕榈纤维。
优选的,所述棕榈纤维单丝绞制成螺旋绳的环境温度为120-140℃,保持时间为5-7分钟,
优选的,所述抛光面层由以下重量份原料制成:聚氨酯38-45份、环氧树脂25-36份、分散剂2-6份、磨料组分10-13份。
优选的,所述磨料组分包括以下原料:碳化硅23-50%、氧化铝15-25%、氧化铬5-10%、二氧化钛12-18%、氧化物陶瓷15-18%和猪鬃2-10%。
本发明要解决的另一技术问题是提供抛光用带有底部缓冲保护层的缓冲阻尼布的制备工艺,包括如下步骤:
S1制备基底缓冲层:
S11:将获得的酯化棕榈纤维与改性剂进行混合冷却,制得改性棕榈纤维,利用气流将改性棕榈纤维吹成三维方向均匀分布的状态,使棕榈纤维互相交叠成网状;
S12:将两层网状棕榈纤维叠加,与天然橡胶混合黏合,黏合后的纤维网在纤维相交处形成弹性节点,制成第一弹性层;
S13:将猪鬃裁减至两层网状棕榈纤维的高度,叠加三层网状棕榈纤维,并将猪鬃均匀的竖插至三层网状棕榈纤维内,再将天然橡胶与之混合黏合,制成第二弹性层;
S14:在第一弹性层、第二弹性层的两侧均涂覆一层聚氨酯胶黏剂,并按照第三织物层、第二弹性层、第二织物层、第一弹性层和第一织物层从下到上的顺序铺设,铺设整齐后,施压至聚氨酯胶黏剂干燥,制成基底缓冲层;
S2制备抛光面层:
S21:将聚氨酯、环氧树脂加入混料机内,通过高速旋转的搅拌叶片对原料进行充分地混合,使其混合均匀,之后再向混料机内加入分散剂,使原料均一分散,原料反应融合后,将原料投入挤压机内,通过旋转的挤压辊对原料进行挤压成片,制成抛光面层半成品;
S22:将碳化硅、氧化铝、氧化铬、二氧化钛、氧化物陶瓷和猪鬃按比例混合后,充分研磨,得到磨料组分;
S23:采用静电植砂法将磨料组分植到抛光面层半成品上,制成抛光面层;
S3制备成品:在抛光面层没有磨料组分的一面涂覆热熔胶层,并将基底缓冲层与热熔胶层叠放,共同放置到热压机中,先进行预热,然后进行热压,热压完毕,降温至室温后裁剪得到缓冲阻尼布成品。
优选的,所述S14中涂覆聚氨酯胶黏剂后施加的压力为0.1-0.3Mpa,施压时长为30-60s。
优选的,所述S3中热压温度为70-90℃,热压时间为30-60s,热压压力为0.7-0.8Mpa。
与现有技术相比,本发明的有益效果是:
1、本发明通过棕榈纤维起到底部缓冲作用,棕榈纤维进行碱洗处理后,棕榈纤维的内部具有因木质素被碱分解而导致的孔洞结构,酯化后的棕榈纤维在冷却后棕榈酸甲酯成为固体,将防静电剂和石墨烯固定在棕榈纤维表面,提高了棕榈纤维的抗静电、耐磨耐热性能;
2、本发明通过棕榈纤维单丝绞制成螺旋绳,获得卷曲的棕榈纤维,再由天然橡胶混合黏合,黏合后的纤维网在纤维相交处形成弹性节点,提高了棕榈纤维的弹性,增强了基底缓冲层的抗压和抗拉能力,从而起到缓冲保护作用;
3、本发明通过棕榈纤维本身具有孔洞结构,加之第一弹性层和第二弹性层具有多层棕榈纤维网结构,使得基底缓冲层具有良好的蓄水能力,在抛光过程中,吸收抛光液,利用液体起到缓冲保护作用;
4、本发明通过在棕榈纤维网上内插猪鬃材料,在厚度更厚的第二弹性层提供一定的支撑力,提高了第二弹性层的抗压性能。
附图说明
图1为本发明的缓冲阻尼布结构示意图;
图2为本发明的基底缓冲层结构示意图。
图中:1、基底缓冲层;11、第一弹性层;12、第二弹性层;13、第一织物层;14、第二织物层;15、第三织物层;2、热熔胶层;3、抛光面层。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
实施例一:
为了解决现有的问题,请参阅图1-图2,本实施例提供以下技术方案:
抛光用带有底部缓冲保护层的缓冲阻尼布,包括基底缓冲层1、热熔胶层2和抛光面层3,基底缓冲层1通过热熔胶层2与抛光面层3粘接,基底缓冲层1包括第一弹性层11、第二弹性层12、第一织物层13、第二织物层14和第三织物层15,第一织物层13和第二织物层14之间夹有第一弹性层11,第二织物层14和第三织物层15之间夹有第二弹性层12,
第一弹性层11由以下重量份原料制成:酯化棕榈纤维20份、天然橡胶10份、改性剂5份;
第二弹性层12由以下重量份原料制成:酯化棕榈纤维20份、猪鬃15份、天然橡胶10份、改性剂5份。
第一织物层13为尼龙纤维编织而成,第二织物层14为芳纶纤维编织而成,第三织物层15为聚酯纤维编织而成。
采用尼龙纤维、芳纶纤维和聚酯纤维共同叠加,增加基底缓冲层1的韧性和抗皱性,提高基底缓冲层1的抗拉性。
改性剂包括防静电剂和石墨烯,防静电剂和石墨烯的质量比为1:2,通过增加防静电剂和石墨烯,填充到棕榈纤维的间隙内,能够提高棕榈纤维的抗静电性能,同时提高棕榈纤维的耐磨耐热性能。
酯化棕榈纤维的制备过程如下:
将棕榈叶鞘纤维片进行碱洗处理,获得碱处理棕榈纤维,再经打散、梳理分解成棕榈纤维单丝;
使用制绳机将棕榈纤维单丝绞制成螺旋绳,高温定型后取出,环境温度为140℃,保持时间为5分钟,将螺旋绳分解,获得卷曲的棕榈纤维;
将碱洗处理后的棕榈纤维、甲醇和浓硫酸混合,进行酯化反应,制得酯化棕榈纤维。
抛光面层3由以下重量份原料制成:聚氨酯40份、环氧树脂30份、分散剂3份、磨料组分10份。
磨料组分包括以下原料:碳化硅37%、氧化铝23%、氧化铬8%、二氧化钛12%、氧化物陶瓷16%和猪鬃4%。
为了更好的展现抛光用带有底部缓冲保护层的缓冲阻尼布的制备流程,本实施例现提出抛光用带有底部缓冲保护层的缓冲阻尼布的制备工艺,包括以下步骤:
S1制备基底缓冲层1:
S11:将获得的酯化棕榈纤维与改性剂进行混合冷却,制得改性棕榈纤维,利用气流将改性棕榈纤维吹成三维方向均匀分布的状态,使棕榈纤维互相交叠成网状;
S12:将两层网状棕榈纤维叠加,与天然橡胶混合黏合,黏合后的纤维网在纤维相交处形成弹性节点,制成第一弹性层11;
S13:将猪鬃裁减至两层网状棕榈纤维的高度,叠加三层网状棕榈纤维,并将猪鬃均匀的竖插至三层网状棕榈纤维内,再将天然橡胶与之混合黏合,制成第二弹性层12;
S14:在第一弹性层11、第二弹性层12的两侧均涂覆一层聚氨酯胶黏剂,并按照第三织物层15、第二弹性层12、第二织物层14、第一弹性层11和第一织物层13从下到上的顺序铺设,铺设整齐后,施压至聚氨酯胶黏剂干燥,压力为0.2Mpa,施压时长为45s,制成基底缓冲层1;
S2制备抛光面层3:
S21:将聚氨酯、环氧树脂加入混料机内,通过高速旋转的搅拌叶片对原料进行充分地混合,使其混合均匀,之后再向混料机内加入分散剂,使原料均一分散,原料反应融合后,将原料投入挤压机内,通过旋转的挤压辊对原料进行挤压成片,制成抛光面层3半成品;
S22:将碳化硅、氧化铝、氧化铬、二氧化钛、氧化物陶瓷和猪鬃按比例混合后,充分研磨,得到磨料组分;
S23:采用静电植砂法将磨料组分植到抛光面层3半成品上,制成抛光面层3;
S3制备成品:在抛光面层3没有磨料组分的一面涂覆热熔胶层2,并将基底缓冲层1与热熔胶层2叠放,共同放置到热压机中,先进行预热,然后进行热压,热压温度为70℃,热压时间为45s,热压压力为0.7Mpa,热压完毕,降温至室温后裁剪得到缓冲阻尼布成品。
实施例二:
本实施例采用与实施例一相同的制备方法,各层的原料如下:
第一弹性层11由以下重量份原料制成:酯化棕榈纤维30份、天然橡胶10份、改性剂5份;
第二弹性层12由以下重量份原料制成:酯化棕榈纤维30份、猪鬃15份、天然橡胶10份、改性剂5份。
其他材料与实施例一相同,本实施例中,增加了第一弹性层11、第二弹性层12中酯化棕榈纤维的分量。
实施例三:
本实施例采用与实施例一相同的制备方法,各层的原料如下:
第一弹性层11由以下重量份原料制成:酯化棕榈纤维45份、天然橡胶10份、改性剂5份;
第二弹性层12由以下重量份原料制成:酯化棕榈纤维45份、猪鬃15份、天然橡胶10份、改性剂5份。
其他材料与实施例一相同,本实施例中,在实施例二的基础上增加了第一弹性层11、第二弹性层12中酯化棕榈纤维的分量。
实施例四:
本实施例采用与实施例一相同的制备方法,各层的原料如下:
第一弹性层11由以下重量份原料制成:酯化棕榈纤维30份、天然橡胶15份、改性剂5份;
第二弹性层12由以下重量份原料制成:酯化棕榈纤维30份、猪鬃15份、天然橡胶15份、改性剂5份。
其他材料与实施例一相同,本实施例中,在实施例二的基础上增加了第一弹性层11、第二弹性层12中天然橡胶的分量。
实施例五:
本实施例采用与实施例一相同的制备方法,各层的原料如下:
第一弹性层11由以下重量份原料制成:酯化棕榈纤维30份、天然橡胶15份、改性剂5份;
第二弹性层12由以下重量份原料制成:酯化棕榈纤维30份、猪鬃20份、天然橡胶15份、改性剂5份。
其他材料与实施例一相同,本实施例中,在实施例四的基础上增加了第二弹性层12中猪鬃的分量。
对比例一:
本对比例中不设置第一弹性层11,其他结构、材料与实施例一相同,将实施例一中制备第一弹性层11的步骤去除,制备对比例中的缓冲阻尼布。
对比例二:
本实施例采用与实施例一相同的制备方法,各层的原料如下:
第一弹性层11由以下重量份原料制成:酯化棕榈纤维30份、天然橡胶15份、改性剂5份;
第二弹性层12由以下重量份原料制成:酯化棕榈纤维30份、天然橡胶15份、改性剂5份。
其他材料与实施例一相同,本实施例中,将第二弹性层12中猪鬃成分去除。
上述的实施例及对比例的组分对比,如下表1。
表1:各个实施例和对比例的组成对比结果
将上述制备的缓冲阻尼垫进行测试,获得以下数据,如表2:
表2:各个实施例和对比例的性能测试结果
从表2中可以得出,实施例一至实施例五中制备的缓冲阻尼布的均有较高的抗压缩性和抗拉伸性,其中实施例四和实施例五中制备的缓冲阻尼布抗压缩性和抗拉伸性最好,对比例一中,缺少第一弹性层11,压缩率和拉伸率均有较大程度的下降,对比例二中,第二弹性层12中缺少猪鬃成分,压缩率提高,但是压缩回弹率明显降低,说明竖直设置的猪鬃材料能够提高缓冲阻尼布的压缩性能。
综上所述:本发明提出的抛光用带有底部缓冲保护层的缓冲阻尼布,采用棕榈纤维起到底部缓冲作用,棕榈纤维进行碱洗处理后,棕榈纤维的内部具有因木质素被碱分解而导致的孔洞结构,酯化后的棕榈纤维在冷却后棕榈酸甲酯成为固体,将防静电剂和石墨烯固定在棕榈纤维表面,提高了棕榈纤维的抗静电、耐磨耐热性能;棕榈纤维单丝绞制成螺旋绳,获得卷曲的棕榈纤维,再由天然橡胶混合黏合,黏合后的纤维网在纤维相交处形成弹性节点,提高了棕榈纤维的弹性,增强了基底缓冲层1的抗压和抗拉能力,从而起到缓冲保护作用;棕榈纤维本身具有孔洞结构,加之第一弹性层11和第二弹性层12具有多层棕榈纤维网结构,使得基底缓冲层1具有良好的蓄水能力,在抛光过程中,吸收抛光液,利用液体起到缓冲保护作用。
需要说明的是,在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。
尽管已经示出和描述了本发明的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由所附权利要求及其等同物限定。

Claims (10)

1.抛光用带有底部缓冲保护层的缓冲阻尼布,包括基底缓冲层(1)、热熔胶层(2)和抛光面层(3),其特征在于:所述基底缓冲层(1)通过热熔胶层(2)与抛光面层(3)粘接,基底缓冲层(1)包括第一弹性层(11)、第二弹性层(12)、第一织物层(13)、第二织物层(14)和第三织物层(15),第一织物层(13)和第二织物层(14)之间夹有第一弹性层(11),第二织物层(14)和第三织物层(15)之间夹有第二弹性层(12),第一弹性层(11)由以下重量份原料制成:酯化棕榈纤维20-45份、天然橡胶10-25份、改性剂5-8份;第二弹性层(12)由以下重量份原料制成:酯化棕榈纤维20-45份、猪鬃15-20份、天然橡胶10-25份、改性剂5-8份。
2.根据权利要求1所述的抛光用带有底部缓冲保护层的缓冲阻尼布,其特征在于:所述第一织物层(13)为尼龙纤维编织而成,第二织物层(14)为芳纶纤维编织而成,第三织物层(15)为聚酯纤维编织而成。
3.根据权利要求2所述的抛光用带有底部缓冲保护层的缓冲阻尼布,其特征在于:所述改性剂包括防静电剂和石墨烯,防静电剂和石墨烯的质量比为1:2。
4.根据权利要求3所述的抛光用带有底部缓冲保护层的缓冲阻尼布,其特征在于:所述酯化棕榈纤维的制备过程如下:
将棕榈叶鞘纤维片进行碱洗处理,获得碱处理棕榈纤维,再经打散、梳理分解成棕榈纤维单丝;
使用制绳机将棕榈纤维单丝绞制成螺旋绳,高温定型后取出,将螺旋绳分解,获得卷曲的棕榈纤维;
将碱洗处理后的棕榈纤维、甲醇和浓硫酸混合,进行酯化反应,制得酯化棕榈纤维。
5.根据权利要求4所述的抛光用带有底部缓冲保护层的缓冲阻尼布,其特征在于:所述棕榈纤维单丝绞制成螺旋绳的环境温度为120-140℃,保持时间为5-7分钟。
6.根据权利要求5所述的抛光用带有底部缓冲保护层的缓冲阻尼布,其特征在于:所述抛光面层(3)由以下重量份原料制成:聚氨酯38-45份、环氧树脂25-36份、分散剂2-6份、磨料组分10-13份。
7.根据权利要求6所述的抛光用带有底部缓冲保护层的缓冲阻尼布,其特征在于:所述磨料组分包括以下原料:碳化硅23-50%、氧化铝15-25%、氧化铬5-10%、二氧化钛12-18%、氧化物陶瓷15-18%和猪鬃2-10%。
8.一种如权利要求7所述的抛光用带有底部缓冲保护层的缓冲阻尼布的制备工艺,其特征在于,包括以下步骤:
S1制备基底缓冲层(1):
S11:将获得的酯化棕榈纤维与改性剂进行混合冷却,制得改性棕榈纤维,利用气流将改性棕榈纤维吹成三维方向均匀分布的状态,使棕榈纤维互相交叠成网状;
S12:将两层网状棕榈纤维叠加,与天然橡胶混合黏合,黏合后的纤维网在纤维相交处形成弹性节点,制成第一弹性层(11);
S13:将猪鬃裁减至两层网状棕榈纤维的高度,叠加三层网状棕榈纤维,并将猪鬃均匀的竖插至三层网状棕榈纤维内,再将天然橡胶与之混合黏合,制成第二弹性层(12);
S14:在第一弹性层(11)、第二弹性层(12)的两侧均涂覆一层聚氨酯胶黏剂,并按照第三织物层(15)、第二弹性层(12)、第二织物层(14)、第一弹性层(11)和第一织物层(13)从下到上的顺序铺设,铺设整齐后,施压至聚氨酯胶黏剂干燥,制成基底缓冲层(1);
S2制备抛光面层(3):
S21:将聚氨酯、环氧树脂加入混料机内,通过高速旋转的搅拌叶片对原料进行充分地混合,使其混合均匀,之后再向混料机内加入分散剂,使原料均一分散,原料反应融合后,将原料投入挤压机内,通过旋转的挤压辊对原料进行挤压成片,制成抛光面层(3)半成品;
S22:将碳化硅、氧化铝、氧化铬、二氧化钛、氧化物陶瓷和猪鬃按比例混合后,充分研磨,得到磨料组分;
S23:采用静电植砂法将磨料组分植到抛光面层(3)半成品上,制成抛光面层(3);
S3制备成品:在抛光面层(3)没有磨料组分的一面涂覆热熔胶层(2),并将基底缓冲层(1)与热熔胶层(2)叠放,共同放置到热压机中,先进行预热,然后进行热压,热压完毕,降温至室温后裁剪得到缓冲阻尼布成品。
9.根据权利要求8所述的抛光用带有底部缓冲保护层的缓冲阻尼布的制备工艺,其特征在于:所述S14中涂覆聚氨酯胶黏剂后施加的压力为0.1-0.3Mpa,施压时长为30-60s。
10.根据权利要求9所述的抛光用带有底部缓冲保护层的缓冲阻尼布的制备工艺,其特征在于:所述S3中热压温度为70-90℃,热压时间为30-60s,热压压力为0.7-0.8Mpa。
CN202310669649.1A 2023-06-07 2023-06-07 抛光用带有底部缓冲保护层的缓冲阻尼布及其制备工艺 Pending CN116714336A (zh)

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CN116967930A (zh) * 2023-09-21 2023-10-31 上海芯谦集成电路有限公司 特殊热熔胶加工工艺的抛光垫及其制备方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116967930A (zh) * 2023-09-21 2023-10-31 上海芯谦集成电路有限公司 特殊热熔胶加工工艺的抛光垫及其制备方法
CN116967930B (zh) * 2023-09-21 2024-01-02 上海芯谦集成电路有限公司 特殊热熔胶加工工艺的抛光垫及其制备方法

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