CN116422650B

CN116422650B - Plasma cleaning equipment

Info

Publication number: CN116422650B
Application number: CN202310092788.2A
Authority: CN
Inventors: 王龙; 陈思; 焦锐; 刘敦
Original assignee: Kunshan Hongyi Precision Technology Co ltd
Current assignee: Kunshan Hongyi Precision Technology Co ltd
Priority date: 2023-02-10
Filing date: 2023-02-10
Publication date: 2023-11-21
Anticipated expiration: 2043-02-10
Also published as: CN116422650A

Abstract

The invention discloses plasma cleaning equipment, wherein a first loading and unloading mechanism and a second loading and unloading mechanism are respectively arranged on two different sides of a rack, and one or both of the first loading and unloading mechanism and the second loading and unloading mechanism are used for loading and unloading a workpiece; the first transfer mechanism is used for transferring the workpiece between the first loading and unloading mechanism and the first transfer mechanism; the second transfer mechanism is used for transferring the workpiece between the second loading and unloading mechanism and the second transfer mechanism; the transplanting mechanism is used for conveying the workpiece between the first transfer mechanism and the cleaning mechanism and/or is used for conveying the workpiece between the second transfer mechanism and the cleaning mechanism. The first transfer mechanism and the second transfer mechanism comprise suction nozzle modules, each suction nozzle module comprises a suction nozzle seat and a plurality of suction nozzles, and each suction nozzle is detachably connected with the corresponding suction nozzle seat. The whole cleaning process of the plasma cleaning equipment does not need manual intervention, has high automation degree, can realize continuous feeding and cleaning of workpieces, has higher working efficiency and wider application range.

Description

Plasma cleaning equipment

Technical Field

The invention relates to the technical field of semiconductor chip manufacturing, in particular to plasma cleaning equipment.

Background

The plasma surface treatment technology is a novel surface treatment technology which utilizes plasmas composed of ions, electrons, active groups, photons and the like to treat the surface of a workpiece and achieves the purposes of cleaning, modification, photoresist ashing and the like, and can achieve special effects which cannot be achieved by a conventional cleaning method. The plasma surface treatment technology is generally applied to the production and manufacture of precision product workpieces such as semiconductors, new energy batteries, digital electronics and the like. In the existing plasma cleaning equipment, a plasma cleaning device is arranged in a vacuum cavity, high-energy disordered plasma is generated by starting under a certain pressure through a radio frequency power supply, and the surface of a workpiece to be cleaned is bombarded through the plasma.

Most of the existing plasma cleaning equipment is low in automation degree, feeding and discharging are needed by means of manual work, feeding and discharging mechanisms are respectively located on two sides of the equipment, at least two operators are needed to cooperate to achieve the purpose, on the one hand, efficiency is low, labor is consumed, on the other hand, rubber fingerprints of the operators can be left on the surface of a workpiece, errors such as workpiece reverse placing and damage are easy to occur due to manual fatigue, and cleaning effect and workpiece quality are affected. In addition, the existing plasma cleaning equipment is usually single-line transmission, and workpieces to be cleaned can only be sequentially transmitted from one side of the equipment to the other side, so that the working efficiency is low.

Disclosure of Invention

The invention aims to provide plasma cleaning equipment with high automation degree and high working efficiency.

In order to achieve the above purpose, the invention adopts the following technical scheme:

a plasma cleaning device is used for cleaning a workpiece and comprises a frame, a first loading and unloading mechanism, a second loading and unloading mechanism, a first transfer mechanism, a second transfer mechanism, a cleaning mechanism and a transplanting mechanism, wherein,

the first feeding and discharging mechanism and the second feeding and discharging mechanism are respectively arranged on two different sides of the frame, the first feeding and discharging mechanism and/or the second feeding and discharging mechanism are used for feeding the workpiece, and the first feeding and discharging mechanism and/or the second feeding and discharging mechanism are used for discharging the workpiece;

the first transfer mechanism is used for transferring the workpiece between the first loading and unloading mechanism and the first transfer mechanism;

the second transfer mechanism is used for transferring the workpiece between the second loading and unloading mechanism and the second transfer mechanism;

the transplanting mechanism is used for conveying the workpiece between the first transferring mechanism and the cleaning mechanism, and/or the transplanting mechanism is used for conveying the workpiece between the second transferring mechanism and the cleaning mechanism;

The first transfer mechanism and the second transfer mechanism comprise suction nozzle modules, each suction nozzle module comprises a suction nozzle seat and a plurality of suction nozzles, each suction nozzle is used for sucking one workpiece, and each suction nozzle is detachably connected with the corresponding suction nozzle seat.

In some embodiments, the first loading and unloading mechanism, the first transferring mechanism, the cleaning mechanism, the second transferring mechanism and the second loading and unloading mechanism are sequentially arranged along a horizontal first direction; the horizontal direction perpendicular to the first direction is a second direction, along the second direction, the first transfer mechanism and the second transfer mechanism are arranged on the same side of the cleaning mechanism, the transplanting mechanism is arranged on the other side of the cleaning mechanism, and the first transfer mechanism and the second transfer mechanism can respectively transmit the workpiece along the second direction.

In some embodiments, the first loading and unloading mechanism includes a tray translation module and a first lifting module, the frame includes a first workbench, the tray translation module is located below the first workbench, the tray translation module is used for conveying a tray along a horizontal direction, the tray is used for storing a plurality of workpieces, the first lifting module is used for conveying the tray along an up-and-down direction, and the first transfer mechanism is used for transferring the workpieces between the tray located above the first workbench and the first transfer mechanism.

In some embodiments, the second feeding and discharging mechanism comprises a first clip track, a second clip track and a second lifting module, wherein the first clip track and the second clip track are respectively used for conveying clips and workpieces along a horizontal direction, the clips are used for storing the workpieces, the first clip track is provided with a first interface close to the second transfer mechanism, the second clip track is provided with a second interface close to the second transfer mechanism, the first clip track is located above the second clip track, the first interface is located above the second interface, the second lifting module is used for conveying the clips and the workpieces between the first interface and the second interface, and the second transfer mechanism is used for transferring the workpieces between the clips located at the first interface and the second transfer mechanism.

In some embodiments, the second feeding and discharging mechanism is provided with two groups arranged at intervals along the second direction, in each group of second feeding and discharging mechanism, the transmission direction of the first clip track and the transmission direction of the second clip track respectively extend along the first direction, the first direction and the second direction respectively extend along the horizontal direction, and the first direction and the second direction are mutually perpendicular.

In some embodiments, the second lifting module comprises a clip lifting device and a workpiece lifting device, the clip lifting device is used for driving the clip to move relatively in the up-down direction, the workpiece lifting device is used for driving the workpiece in the clip to move relatively in the up-down direction relative to the clip, the workpiece lifting device is provided with one or more pieces, and the second lifting module further comprises an in-place sensor for detecting the height of the workpiece.

In some embodiments, the second lifting module comprises a cartridge holder, and the cartridge lifting device comprises a cartridge holder, and the cartridge holder is connected with the cartridge holder in a manner of relatively moving along the up-down direction; the workpiece jacking device comprises a jacking rod, the jacking rod can relatively move along the up-down direction and is connected with the cartridge clip lifting seat, the top of the jacking rod is provided with a top plate, and the top plate can vertically move in the cartridge clip.

In some embodiments, the second lifting module comprises a cartridge holder, the cartridge holder comprises a base and side plates, the side plates are provided with two parts which are arranged on two sides of the base, the two side plates and the base enclose to form an accommodating space for accommodating the cartridge holder, the two side plates can move close to or far away from each other, and the second lifting module further comprises a spacing adjusting device for driving at least one side plate to move close to or far away from the other side plate relatively.

In some embodiments, the first transfer mechanism and the second transfer mechanism are mechanical arms, one end of each mechanical arm is provided with the suction nozzle module, the suction nozzle seat is provided with a first magnetic piece, each suction nozzle is provided with a second magnetic piece, the first magnetic piece and the second magnetic piece can be attracted to each other through magnetic attraction, and each suction nozzle is provided with a vacuum adsorption structure.

In some embodiments, the first transfer mechanism and the second transfer mechanism have the same structure, and the first transfer mechanism and the second transfer mechanism comprise a middle rotating seat, a first transmission platform, a second transmission platform, a first jig and a second jig, wherein the first jig and the second jig are respectively used for storing a plurality of workpieces, the first jig is connected with the first transmission platform, the second jig is connected with the second transmission platform, the first transmission platform and the second transmission platform are respectively arranged on the middle rotating seat in a relatively moving manner along a second direction, the first transfer mechanism and the second transfer mechanism are arranged at intervals along a first direction, the first direction and the second direction are respectively extended along a horizontal direction, and the first direction and the second direction are mutually perpendicular.

In some embodiments, in each of the first transfer mechanism and the second transfer mechanism, the transfer seat is provided with a first rail and a second rail, the first rail and the second rail respectively extend along the second direction, the first rail is located above the second rail, and along the first direction, the first rail is located outside the second rail; the first transmission table can be connected with the first track in a relative sliding manner; the second transmission platform can be connected with the second track in a relative sliding manner, the second transmission platform is located below the first transmission platform, the second jig can be connected with the second transmission platform in a relative motion manner along the up-down direction, and the second jig can pass through the lower part of the first transmission platform in the process of moving along the second track.

In some embodiments, in each of the first transfer mechanism and the second transfer mechanism, the transfer seat is provided with a guide groove extending along the second direction, the guide groove is provided with a first section, a second section and a third section which are connected in sequence along the second direction, the first section is positioned above the second section, and the third section is positioned above the second section; the second jig is connected with a guide pin, and the guide pin can be inserted into the guide groove in a relatively sliding manner along the extending direction of the guide groove.

In some embodiments, the first transfer mechanism, the cleaning mechanism, and the second transfer mechanism are sequentially disposed along a horizontal first direction, the transplanting mechanism includes a support, a transplanting seat, and a suction seat, the support is fixedly connected with the frame, the transplanting seat can be relatively movably connected with the support along the first direction, the suction seat can be relatively movably connected with the transplanting seat along an up-down direction, and the suction seat can simultaneously suck a plurality of workpieces.

In some embodiments, the cleaning mechanism includes a plasma cleaning showerhead having a plurality of plasma cleaning showers disposed sequentially along a horizontal second direction, the first direction being perpendicular to the second direction.

In some embodiments, the first transfer mechanism and the second transfer mechanism respectively include a jig for carrying the workpieces, each jig has a plurality of grooves arranged in an array, each groove is used for placing one workpiece, the suction seat has a plurality of suction heads arranged in an array, the suction heads and the positions of the grooves are in one-to-one correspondence, and the suction seat can suck all the workpieces in one jig at the same time.

Due to the application of the technical scheme, the plasma cleaning equipment provided by the invention can flexibly select one or both of the first feeding and discharging mechanism and the second feeding and discharging mechanism for feeding and discharging, is suitable for various feeding modes, and is matched with the first transfer mechanism and/or the second transfer mechanism and the first transfer mechanism and/or the second transfer mechanism to finish feeding and discharging, conveying and cleaning of workpieces, the feeding and discharging mechanisms can be smoothly connected in any direction, and different mechanisms are not interfered with each other. The whole cleaning process does not need manual intervention, the degree of automation is high, the operation can be stopped, the continuous feeding and cleaning of workpieces are realized, and the working efficiency is higher. Furthermore, the suction nozzle modules in the first transfer mechanism and the second transfer mechanism can absorb a plurality of workpieces at one time, so that the transmission efficiency is improved, the suction nozzles can be conveniently detached and replaced, different suction nozzles are selected for workpieces with different specifications and sizes, and the application range is wider.

Drawings

In order to more clearly illustrate the technical solution of the present invention, the drawings used in the description of the embodiments will be briefly described.

FIG. 1 is a schematic perspective view of a plasma cleaning apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic partial perspective view of the plasma cleaning apparatus according to the present embodiment;

FIG. 3 is a schematic partial perspective view of the plasma cleaning apparatus according to another embodiment;

fig. 4 is a schematic perspective view of a second feeding and discharging mechanism in the embodiment;

fig. 5 is a schematic perspective view of a second lifting module in the present embodiment;

FIG. 6 is a schematic front view of the suction nozzle module according to the present embodiment;

FIG. 7 is a schematic bottom view of the suction nozzle module according to the present embodiment;

FIG. 8 is a schematic top view of the suction nozzle in the present embodiment;

FIG. 9 is another partial perspective view of the plasma cleaning apparatus of the present embodiment;

FIG. 10 is a schematic partial perspective view of a plasma cleaning apparatus according to the present embodiment;

FIG. 11 is a schematic perspective view of the first transfer mechanism or the second transfer mechanism in the present embodiment;

FIG. 12 is a schematic top view of FIG. 11;

FIG. 13 is a schematic cross-sectional view of section A-A of FIG. 12;

FIG. 14 is a schematic view of the first transfer table and the second transfer table of FIG. 13 after relative movement;

wherein: 100. a frame; 110. a first work table; 120. a second work table;

200. a first feeding and discharging mechanism; 210. a tray translation module; 211. a tray base; 220. a first lifting module;

300. A second feeding and discharging mechanism; 310. a first clip track; 320. a second clip track; 301. a first interface; 302. a second interface; 330. a second lifting module; 331. a cartridge holder; 3311. a base; 3312. a side plate; 332. a cartridge clip lifting seat; 3321. a cartridge clip lifting cylinder; 333. a lifting rod; 334. a top plate; 335. a pitch adjustment device; 3351. adjusting the track; 3352. a belt; 3353. an opening and closing driving motor; 336. an in-place sensor; 340. a track adjusting device;

410. a first transfer mechanism; 420. a second transfer mechanism; 430. a suction nozzle module; 431. a suction nozzle seat; 4311. a connection part; 432. a suction nozzle; 433. a first magnetic member; 434. a second magnetic member; 435. a vacuum adsorption structure; 436. a positioning pin; 437. a seal ring; 438. positioning holes;

500. a visual detection module;

610. a first transfer mechanism; 620. a second transfer mechanism; 630. middle rotating seat; 631. a first track; 632. a second track; 633. a guide groove; 633a, first segment; 633b, second segment; 633c, third segment; 634. a guide seat; 640. a first transmission station; 650. a second transmission station; 651. a slide; 660. a first jig; 670. a second jig; 671. a guide pin; 672. a guide member; 673. a spool; 601. a groove;

800. A cleaning mechanism; 810. a plasma cleaning spray head;

900. a transplanting mechanism; 910. a bracket; 911. a cross beam; 920. transplanting seats; 930. a suction seat;

2. a cartridge clip; 21. a clip groove; x, a first direction; y, second direction; z, up-down direction.

Detailed Description

Preferred embodiments of the present invention will be described in detail below with reference to the attached drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art.

Referring to fig. 1 to 5, the present embodiment provides a plasma cleaning apparatus for cleaning a workpiece (not shown), and is particularly suitable for surface cleaning or modifying of precision workpieces such as chips or accessories thereof by using a plasma surface treatment technique. In this embodiment, the workpiece to be cleaned is a small-sized metal cover, and the metal cover can be used for sealing protection and heat dissipation of the precision chip, and a plurality of workpieces before or after feeding can be placed and stored in a tray (not shown in the figure) or a cartridge clip 2.

Referring to fig. 1, the plasma cleaning apparatus includes a frame 100. For convenience of description and understanding, in this embodiment, the frame 100 is used as a reference to establish an XYZ three-dimensional coordinate system, wherein the first direction X, the second direction Y, and the up-down direction Z are perpendicular to each other, the first direction X and the second direction Y respectively extend along a horizontal direction, and the up-down direction Z extends along a vertical direction. In this embodiment, the rack 100 includes a first table 110 and a second table 120, the first table 110 is higher than the second table 120, and the first table 110 and the second table 120 are connected along a first direction X.

Referring to fig. 1 to 3, the plasma cleaning apparatus further includes a first loading and unloading mechanism 200, a second loading and unloading mechanism 300, a first transfer mechanism 410, a second transfer mechanism 420, a first transfer mechanism 610, a second transfer mechanism 620, a cleaning mechanism 800, a transplanting mechanism 900, and the like. The first loading and unloading mechanism 200, the first transferring mechanism 410, the second transferring mechanism 420, the first transferring mechanism 610, the second transferring mechanism 620, the cleaning mechanism 800, the transplanting mechanism 900, and the like are all disposed on the first table 110, and the second loading and unloading mechanism 300 is disposed on the second table 120. In this embodiment, the first loading and unloading mechanism 200 and the second loading and unloading mechanism 300 are separately disposed on two different sides of the frame 100, the first loading and unloading mechanism 200 and/or the second loading and unloading mechanism 300 are used for loading workpieces, and the first loading and unloading mechanism 200 and/or the second loading and unloading mechanism 300 are used for unloading workpieces. The first transfer mechanism 410 is used for transferring the workpiece between the first loading and unloading mechanism 200 and the first transfer mechanism 610; the second transfer mechanism 420 is used for transferring the workpiece between the second loading and unloading mechanism 300 and the second transfer mechanism 620. The transplanting mechanism 900 is used to transfer workpieces between the first transfer mechanism 610 and the cleaning mechanism 800, and/or the transplanting mechanism 900 is used to transfer workpieces between the second transfer mechanism 620 and the cleaning mechanism 800. In this embodiment, the first feeding and discharging mechanism 200, the first transferring mechanism 610, the cleaning mechanism 800, the second transferring mechanism 620, and the second feeding and discharging mechanism 300 are sequentially arranged along the first direction X; along the second direction Y, the first transferring mechanism 410 and the second transferring mechanism 420 are disposed on the same side of the cleaning mechanism 800, the transplanting mechanism 900 is disposed on the other side of the cleaning mechanism 800, and the first transferring mechanism 610 and the second transferring mechanism 620 are capable of transferring the workpiece along the second direction Y, respectively.

From the above, the plasma cleaning apparatus can select at most four different and efficient loading/unloading and transmission modes: (1) The first feeding and discharging mechanism 200 feeds materials, the workpieces are sequentially transmitted to the first transfer mechanism 610, the cleaning mechanism 800 and the second transfer mechanism 620, and finally the second feeding and discharging mechanism 300 feeds materials; (2) The second feeding and discharging mechanism 300 is used for feeding, the workpiece is sequentially transmitted to the second transfer mechanism 620, the cleaning mechanism 800 and the first transfer mechanism 610, and finally the first feeding and discharging mechanism 200 is used for discharging; (3) The first feeding and discharging mechanism 200 feeds materials, the workpiece is transmitted to the cleaning mechanism 800 after passing through the first transfer mechanism 610, and then returns to the first transfer mechanism 610, and the workpiece is still discharged by the first feeding and discharging mechanism 200; (4) The second loading and unloading mechanism 300 loads the workpiece, the workpiece is transferred to the cleaning mechanism 800 after passing through the second transfer mechanism 620, and then returns to the second transfer mechanism 620, and the workpiece is still unloaded by the second loading and unloading mechanism 300. In this embodiment, the first loading and unloading mechanism 200 can specifically load or unload the workpieces in the tray, and the second loading and unloading mechanism 300 can load or unload the workpieces in the cartridge 2, so that the plasma cleaning apparatus is suitable for use in practical application in the above mode (1) or mode (4). In other embodiments, the first loading and unloading mechanism 200 and the second loading and unloading mechanism 300 may also take other different forms, so that the modes (2) and (3) are also possible.

Referring to fig. 2 and 3, in this embodiment, the plasma cleaning apparatus further includes a visual detection module 500, where the visual detection module 500 specifically includes one or more CCD cameras disposed around the first loading and unloading mechanism 200, and can locate the position, direction, and forward and reverse of the workpiece to be loaded by visual photographing, so as to avoid workpiece placement errors and improve cleaning efficiency. In addition, the plasma cleaning apparatus further includes a control system (not shown in the figure), where the control system is in signal connection with each of the first loading and unloading mechanism 200, the second loading and unloading mechanism 300, the first transferring mechanism 410, the second transferring mechanism 420, the vision detecting module 500, the first transferring mechanism 610, the second transferring mechanism 620, the cleaning mechanism 800, the transplanting mechanism 900, and the like, so as to receive detection signals of different sensors, and comprehensively control the operation of the whole apparatus, thereby ensuring that the cleaning process is orderly and efficiently performed.

Referring to fig. 2, in the embodiment, the first loading and unloading mechanism 200 includes a tray translation module 210 and a first lifting module 220. The tray translation module 210 is located below the first table 110, and the tray translation module 210 is used for conveying the tray along a horizontal direction. The tray translation module 210 further includes a tray seat 211, where the tray seat 211 can slide relatively along the second direction Y under the driving of a driving device such as an air cylinder, and a plurality of trays can be stacked on the tray seat 211, and the tray seat 211 is synchronously driven to move along the second direction Y. The first workbench 110 is provided with a through hole, the first lifting module 220 passes through the through hole along the up-down direction Z, and the first lifting module 220 is used for conveying the tray along the up-down direction Z. Specifically, after the tray base 211 moves to a preset position close to the first lifting module 220, the first lifting module 220 may grasp the whole stack of trays from the tray base 211 at the last time and lift the whole stack of trays to the upper side of the first table 110, so that the first transferring mechanism 410 may suck the workpieces in the transferred trays. In this embodiment, the first transfer mechanism 410 is also disposed above the first table 110, and the first transfer mechanism 410 is used to transfer workpieces between the tray located above the first table 110 and the first transfer mechanism 610. Further, in this embodiment, each tray has a plurality of workpiece slots arranged in an array, and each workpiece slot can hold one workpiece, and the first transfer mechanism 410 takes materials from the tray located at the uppermost layer; when all the workpieces in the tray are taken out, the tray is transferred to an empty tray area (not shown in the figure); subsequently, the first lifting module 220 lifts the remaining trays to a certain height, so that the first transferring mechanism 410 can continue to take materials from the next top tray; and continuing until all trays are transferred to the empty tray area, taking all empty trays away, and repeatedly feeding the next batch of trays. From the above, only a stack of trays is placed on the tray seat 211 from the external feeding opening of the frame 100, and then the trays can be continuously fed in a period of time without manual intervention, so that the feeding efficiency is high.

Referring to fig. 2 to 5, in the present embodiment, the second loading and unloading mechanism 300 includes a first clip rail 310, a second clip rail 320, and a second lifting module 330. The first clip track 310 and the second clip track 320 are respectively used for conveying clips 2 along a horizontal direction, wherein the conveying direction of the first clip track 310 and the conveying direction of the second clip track 320 respectively extend along a first direction X, the first clip track 310 has a first interface 301 close to the second transfer mechanism 620, the second clip track 320 has a second interface 302 close to the second transfer mechanism 620, the first clip track 310 is located above the second clip track 320, and the first interface 301 is located above the second interface 302. The second lifting module 330 is used for conveying the cartridge 2 and the workpiece between the first interface 301 and the second interface 302, and the second transfer mechanism 420 is used for transferring the workpiece between the cartridge 2 located at the first interface 301 and the second transfer mechanism 620.

Referring to fig. 4, in this embodiment, in order to adapt to clips 2 of different sizes, the track widths of the first clip track 310 and the second clip track 320 can be adjusted, and the second feeding and discharging mechanism 300 includes a track adjusting device 340 for adjusting the track widths of the respective clips. In this embodiment, the first clip track 310 is disposed above the second workbench 120, the second clip track 320 is disposed below the second workbench 120, and an opening is disposed on a side of the second workbench 120 near the first workbench 110, and the opening is engaged with the first interface 301 and the second interface 302, so that the second lifting module 330 can shuttle up and down.

Referring to fig. 2 to 5, in the present embodiment, the second loading and unloading mechanism 300 has two groups spaced along the second direction Y, and the two groups of second loading and unloading mechanisms 300 have the same structural arrangement. In the above mode (1), the first loading and unloading mechanism 200 is used for loading, the two sets of second loading and unloading mechanisms 300 are both used for unloading, at this time, the two sets of second loading and unloading mechanisms 300 have the same operation mode, for example, the second clip track 320 at the lower layer can both transmit the empty clip 2 to the second interface 302, and the second lifting module 330 lifts the empty clip 2 to the first interface 301 and receives the cleaned workpiece; after the clip 2 is full, the clip is transported outwards by the first clip track 310, and the blanking is completed. In the above mode (4), the first loading and unloading mechanism 200 is not used for loading and unloading, one of the two sets of second loading and unloading mechanisms 300 is used for loading and the other is used for unloading, and at this time, the transmission directions of the first clip track 310, the second clip track 320 and the second lifting module 330 in the two sets of second loading and unloading mechanisms 300 are opposite, so that different functions can be realized. For example, in a group of second feeding and discharging mechanisms 300 for feeding, a first clip track 310 at the upper layer transmits a full clip 2 to a first interface 301, the full clip 2 is filled with a workpiece to be cleaned, a second lifting module 330 receives the clip 2 at the first interface 301 and cooperates with a second transfer mechanism 420 to take away the workpiece for feeding; after all the workpieces are taken away, the empty clip 2 descends to the corresponding second interface 302 by the second lifting module 330, and finally is conveyed away by the second clip track 320. On the other hand, in the mode (4), the first clip rail 310, the second clip rail 320, and the second lifting module 330 of the second loading and unloading mechanism 300 for unloading operate in the same manner as in the mode (1), the empty clip 2 is transferred from the second clip rail 320 of the lower layer, and the full clip 2 after the cleaning is transferred from the first clip rail 310 of the upper layer. It should be noted that, in the mode (4), the first clip rails 310 of the two sets of second feeding and discharging mechanisms 300 are used for conveying full clips 2 (containing the workpieces to be cleaned or washed), and the second clip rails 320 are used for conveying empty clips 2, so that the two sets of second feeding and discharging mechanisms 300 are connected with the conveying device of the external clips 2, and the orderly feeding and discharging of the workpieces is ensured.

Referring to fig. 2 to 5, in the present embodiment, in each set of the second loading and unloading mechanisms 300, the second lifting module 330 includes a clip lifting device and a workpiece lifting device. The clip jacking device is used for driving the clip 2 to move relatively along the up-down direction Z, so that the clip 2 and the whole workpiece therein are conveyed between the first interface 301 and the second interface 302; the workpiece lifting device is used for driving the workpieces in the cartridge clips 2 to move relatively along the up-down direction Z relative to the cartridge clips 2, and the workpiece lifting device has one or more workpiece lifting devices and can be suitable for cartridge clips 2 with different numbers of cartridge clip grooves 21. In this embodiment, the second lifting module 330 further includes an in-place sensor 336 for detecting the height of the workpiece, which can detect whether the workpiece lifting device lifts the workpiece to a preset height, and then cooperates with the second transfer mechanism 420 to transfer the workpiece.

Referring to fig. 5, in particular, the second lifting module 330 includes a cartridge 331. The cartridge holder 331 includes a base 3311 and side plates 3312, the side plates 3312 are respectively disposed on two sides of the base 3311, and the two side plates 3312 and the base 3311 enclose an accommodating space for accommodating the cartridge holder 2. The two side plates 3312 can move close to or far away from each other, and here, the two side plates 3312 can both move relatively along the second direction Y, so that the distance between the two side plates 3312 can be adjusted for clips 2 with different sizes, and effective limiting and lifting guiding can be formed for the clips 2. The second lift module 330 further includes a spacing adjustment device 335 for moving at least one of the side plates 3312 relatively closer to or farther from the other side plate 3312. In this embodiment, the space adjustment device 335 includes an adjustment rail 3351, a belt 3352, an opening/closing driving motor 3353, and the like, wherein a plurality of adjustment rails 3351 extending along the second direction Y are fixedly arranged on the base 3311, and each side plate 3312 is connected to the adjustment rail 3351 in a relatively sliding manner; an endless belt 3352 is connected between the two side plates 3312, and an open-close driving motor 3353 is used for driving the belt 3352 to rotate. In this way, the opening and closing driving motor 3353 is controlled to rotate around different directions, so that the two side plates 3312 can be driven to be close to or relatively far away from each other along the adjusting rail 3351, and the width adjustment of the accommodating space is realized.

Referring to fig. 5, in the present embodiment, the clip lifting device includes a clip lifting base 332, and the clip lifting base 332 is connected to a clip base 331 so as to be relatively movable in the up-down direction Z. Specifically, the clip lifting seat 332 is disposed in the accommodating space of the clip seat 331, and the clip lifting device further includes a clip lifting cylinder 3321 for driving the clip lifting seat 332 to lift, the clip lifting seat 332 can position the clip 2 thereon, and when the clip 2 is positioned on the clip lifting seat 332, the clip lifting cylinder 3321 can drive the clip lifting seat 332 and the clip 2 to lift integrally.

Referring to fig. 5, in the present embodiment, each clip 2 has two clip grooves 21 spaced apart in the second direction Y, and a stack of workpieces can be stored in each clip groove 21. The workpiece lifting device comprises a lifting rod 333, wherein the lifting rod 333 is connected with the cartridge clip lifting seat 332 in a manner of relatively moving along the up-down direction Z, the top of the lifting rod 333 is provided with a top plate 334, and the top plate 334 can move up and down in the cartridge clip 2 on the cartridge clip lifting seat 332. In this embodiment, the lifting rods 333 and the top plate 334 have three groups disposed at intervals along the second direction Y, each lifting rod 333 can independently move up and down, each lifting rod 333 passes through the base 3311 and the clip lifting seat 332 from bottom to top, and the top plate 334 is located above the clip lifting seat 332. For different configurations of the clip 2, the control system may choose to use one, two or three of the lifting bars 333, for example, in this embodiment, the clip 2 has two clip slots 21, and only two lifting bars 333 are activated, with two corresponding top plates 334 located exactly in the two clip slots 21, and the middle lifting bar 333 and its top plate 334 are relatively stationary and not running. Each lifting rod 333 drives the corresponding top plate 334 to lift when in lifting motion, so that the whole stack of workpieces borne on the top plate 334 can be driven to lift, and the workpieces are fed or discharged one by one. The uppermost workpiece in each clip groove 21 can be detected by an in-place sensor 336 provided above the clip elevating seat 332, so that the control system can correctly determine and control the elevating height of each top plate 334. In this embodiment, the in-place sensor 336 has three corresponding to three lift pins 333, and is capable of detecting the height position of the workpiece above each lift pin 333.

Referring to fig. 2 and 3, in the present embodiment, the first transfer mechanism 410 and the second transfer mechanism 420 are both manipulators, the two manipulators have the same structure, and a suction nozzle module 430 is disposed at one end of each manipulator, and the suction nozzle module 430 can simultaneously suck and transfer a plurality of workpieces. Referring to fig. 6 to 8, in the present embodiment, each of the nozzle modules 430 includes a nozzle base 431 and a plurality of nozzles 432, the nozzle base 431 is fixedly connected to one end of the manipulator, each nozzle 432 is used for sucking a workpiece, and each nozzle 432 is detachably connected to the corresponding nozzle base 431. In this embodiment, the suction nozzle seat 431 and the suction nozzles 432 are detachably connected through magnetic force, the suction nozzle seat 431 has a first magnetic member 433, each suction nozzle 432 has a second magnetic member 434, and the first magnetic member 433 and the second magnetic member 434 can be attracted to each other through magnetic attraction and can be rapidly separated under the action of external force. In addition, each suction nozzle 432 has a vacuum suction structure 435, specifically a vacuum chuck, capable of sucking one workpiece by vacuum. In this embodiment, each suction nozzle module 430 includes three suction nozzles 432, the suction nozzle seat 431 has three connecting portions 4311 extending downward and arranged side by side, and the three connecting portions 4311 can be correspondingly connected to the three suction nozzles 432 respectively. The bottom of each connecting part 4311 is provided with two positioning pins 436 protruding downwards, each positioning pin 436 is sleeved with a sealing ring 437, and the bottom of each connecting part 4311 is fixedly provided with two first magnetic pieces 433; correspondingly, two positioning holes 438 are formed on the top of each suction nozzle 432, and two second magnetic members 434 are fixedly arranged. Thus, when the suction nozzle 432 is connected with the connection portion 4311 in a matching manner, each positioning pin 436 is inserted into one of the positioning holes 438, the two first magnetic members 433 and the two second magnetic members 434 are attracted in a one-to-one correspondence manner, and the suction nozzle 432 can be kept connected with the connection portion 4311 in a correct orientation. On the other hand, since the suction nozzles 432 in the present embodiment are detachable, different suction nozzles 432 can be selectively replaced according to the size of the workpiece to be cleaned, and the same suction nozzle seat 431 can be connected with the suction nozzles 432 of various specifications in a matching manner, so that the application range is wider.

Referring to fig. 1, 9 and 10, in this embodiment, the first transfer mechanism 610, the cleaning mechanism 800 and the second transfer mechanism 620 are sequentially arranged along the first direction X, the cleaning mechanism 800 includes a plurality of plasma cleaning nozzles 810 sequentially arranged along the second direction Y, and here, three plasma cleaning nozzles 810 are specifically arranged, and each of the plasma cleaning nozzles 810 can spray plasma upward to clean the bottom of the workpiece. In the second direction Y, three plasma cleaning heads 810 are positioned on a side near the transplanting mechanism 900. In this embodiment, the transplanting mechanism 900 includes a support 910, a transplanting seat 920 and a suction seat 930, where the support 910 is fixedly connected with the frame 100, the support 910 includes a beam 911 extending along a first direction X, the transplanting seat 920 is connected with the support 910 in a manner capable of moving relatively along the first direction X, and the transplanting seat 920 is specifically slidingly connected with the beam 911; the suction base 930 is connected to the transplanting base 920 so as to be movable relatively in the up-down direction Z, and the suction base 930 can suck a plurality of workpieces at the same time. In this embodiment, the first transfer mechanism 610 and the second transfer mechanism 620 respectively include jigs for carrying workpieces, each of the jigs has a plurality of grooves 601 arranged in an array, and each groove 601 is used for placing one workpiece. Correspondingly, the sucking seat 930 of the transplanting mechanism 900 is provided with a plurality of sucking heads (not shown in the figure) which are arranged in an array, and the positions of the sucking heads and the grooves 601 are in one-to-one correspondence, so that the sucking seat 930 can suck all workpieces in one fixture at the same time, and then the workpieces can be moved to the positions above the three plasma cleaning spray heads 810 to be cleaned by the plasmas; the cleaned multiple workpieces can be further integrally transplanted to a certain fixture of the first transfer mechanism 610 or the second transfer mechanism 620 by the suction base 930, and waiting for blanking.

Referring to fig. 9 to 14, in the present embodiment, the first transferring mechanism 610 and the second transferring mechanism 620 have the same structure, and each of them includes a middle rotating base 630, a first transmitting table 640, a second transmitting table 650, a first jig 660, a second jig 670, and the like. The first jig 660 and the second jig 670 are respectively used for storing a plurality of workpieces, that is, the corresponding jigs for carrying workpieces are the same in number and arrangement mode of the grooves 601 in the first jig 660 and the second jig 670, here, each jig is specifically provided with nine grooves 601 in array arrangement, and the suction seat 930 is correspondingly provided with nine suction heads. The suction base 930 can suck nine workpieces from any jig at the same time. The first jig 660 is connected to the first transmission stage 640, the second jig 670 is connected to the second transmission stage 650, and the first transmission stage 640 and the second transmission stage 650 are respectively disposed on the middle swivel mount 630 so as to be capable of moving relatively in the second direction Y.

Referring to fig. 10 to 14, further, in each of the first transferring mechanism 610 and the second transferring mechanism 620, the middle swivel base 630 is provided with a first rail 631 and a second rail 632, the first rail 631 and the second rail 632 respectively extend along the second direction Y, and the first rail 631 and the second rail 632 respectively have two rails respectively disposed on two sides of the first direction X of the middle swivel base 630. The first rail 631 is located above the second rail 632, and the first rail 631 is located outside the second rail 632 in the first direction X. The first transmission platform 640 is connected with the two first rails 631 in a relatively sliding manner, and the first jig 660 is fixedly connected with the first transmission platform 640; the second transfer table 650 is connected to the two second rails 632 in a relatively slidable manner, and the second jig 670 is connected to the second transfer table 650 in a relatively movable manner in the up-down direction Z. In this embodiment, the width of the first transfer table 640 along the first direction X is greater than the width of the second transfer table 650 along the first direction X, and the second transfer table 650 is located below the first transfer table 640. Thus, when the first transfer stage 640 and the second transfer stage 650 are disposed at intervals along the second direction Y, the second jig 670 can be lifted relatively and flush with the first jig 660; while the second transfer table 650 moves along the second track 632, the first transfer table 640 and the second transfer table 650 approach each other, and in order to avoid interference, the second jig 670 can pass through the lower side of the first transfer table 640, so that the first jig 660 and the second jig 670 can exchange positions in the second direction Y, and each moves to a desired position.

Referring to fig. 10 to 14, in each of the first transferring mechanism 610 and the second transferring mechanism 620, the middle swivel base 630 is provided with a guiding groove 633 extending along the second direction Y, and the guiding groove 633 has a first segment 633a, a second segment 633b and a third segment 633c sequentially connected along the second direction Y, wherein the first segment 633a is located above the second segment 633b, and the third segment 633c is also located above the second segment 633 b. In this embodiment, the middle swivel mount 630 includes a guide holder 634, and along the first direction X, the guide holder 634 is located between two second rails 632, and the guide groove 633 is formed on the guide holder 634. The first segment 633a, the second segment 633b and the third segment 633c extend horizontally along the second direction Y, the first segment 633a and the third segment 633c have the same height, the first segment 633a and the second segment 633b are in transitional connection through a first chute, and the second segment 633b and the third segment 633c are in transitional connection through another chute. On the other hand, the second jig 670 is connected with a guide pin 671, and the guide pin 671 is relatively slidably inserted into the guide groove 633 along the extending direction of the guide groove 633, so that the second jig 670 can be linked to lift and lower in the process that the second transmission table 650 slides along the second rail 632. Specifically, the bottom of the second jig 670 has a guiding member 672 extending downward, the second conveying table 650 is provided with a through hole through which the guiding member 672 passes from top to bottom, the guiding pin 671 is connected to the lower end of the guiding member 672, and the guiding pin 671 and the guiding member 672 may be fixedly connected or rotatably connected. Further, a plurality of sliding seats 651 are fixed on the second transmission platform 650 at intervals, a plurality of sliding columns 673 are correspondingly arranged at the lower part of the second jig 670, each sliding column 673 can be inserted into one sliding seat 651 in a relatively sliding manner along the up-down direction Z, and a plurality of groups of sliding seats 651 are matched with the sliding columns 673 to realize up-down sliding guiding of the second jig 670 relative to the second transmission platform 650. As shown in fig. 13, when the second conveying table 650 slides along the second track 632 to both sides of the transfer seat 630, the guide pin 671 is located in the first segment 633a or the third segment 633c, and the second jig 670 is relatively raised and substantially flush with the first jig 660; as shown in fig. 14, when the second transfer table 650 slides along the second rail 632 to the middle of the transfer seat 630, the guide pin 671 is located in the second section 633b, and the second jig 670 is relatively lowered, so as to pass under the first transfer table 640 and move on to the other side of the transfer seat 630, and exchange positions with the first jig 660.

Referring to fig. 1 to 14, it can be seen from the foregoing that the plasma cleaning apparatus in this embodiment may adopt two slightly different loading, unloading and conveying modes of mode (1) or mode (4), which are described in detail below.

In mode (1): in this mode, the workpiece to be cleaned is fed from the first feeding and discharging mechanism 200, that is, disc feeding is adopted, and the cleaned workpiece is discharged from the two sets of second feeding and discharging mechanisms 300, that is, clip type discharging is adopted.

First, a stack of trays filled with the workpieces to be cleaned is placed on the tray seat 211 of the first loading and unloading mechanism 200, and the tray translation module 210 drives the tray seat 211 to move horizontally inwards, so as to interface with the first lifting module 220, and the first lifting module 220 lifts the stack of trays to the position to be loaded above the first workbench 110. Then, the suction nozzle module 430 of the first transferring mechanism 410 sucks three workpieces from the uppermost tray at the same time, photographs and positions the positions, directions and forward and backward of the workpieces through the vision detecting module 500, and transfers the workpieces to the first jig 660 of the first transferring mechanism 610 after confirming that the positions, directions and forward and backward of the workpieces are correct. After the detection by the visual detection module 500, if the sucked workpiece has errors such as reverse discharge, the sucked workpiece is moved to a collecting place (not shown) of the unqualified workpiece for uniform recovery. The first transfer mechanism 410 repeats the above-described operation until all the grooves 601 of the first jig 660 are filled. It should be noted that, during the process of transferring the workpiece by the first transferring mechanism 410, along the second direction Y, the first jig 660 should be located near to the side of the first transferring mechanism 410, so as to be capable of directly receiving the workpiece sucked by the first transferring mechanism 410; in other embodiments, if the second jig 670 is located at the side close to the first transfer mechanism 410 at this time, the first transfer mechanism 410 may transfer the workpiece into the second jig 670; that is, the first jig 660 and the second jig 670 are functionally identical, and the first transfer mechanism 410 may be a closer one according to the actual situation. The description below proceeds with reference to the first jig 660.

When the first jig 660 of the first transfer mechanism 610 is fully set, the first transfer table 640 moves in the second direction Y and exchanges positions with the second transfer table 650, so that the first jig 660 moves to a side close to the transplanting mechanism 900 and the cleaning mechanism 800. Then, the transplanting seat 920 and the sucking seat 930 of the transplanting mechanism 900 move to suck all the workpieces in the first jig 660 at one time, and then drive the workpieces to move to the upper parts of the three plasma cleaning spray heads 810 along the first direction X, so that the bottoms of the workpieces are subjected to plasma cleaning. The cleaned workpiece is continuously transferred by the transplanting mechanism 900 along the first direction X, and is transplanted into the first jig 660 of the second transferring mechanism 620 at a time (similarly, according to the actual situation, the workpiece may be transplanted into the second jig 670 of the second transferring mechanism 620). After the workpieces on the suction seat 930 are released simultaneously, the transplanting seat 920 and the suction seat 930 can return to the first transfer mechanism 610 to continue transplanting the next batch of workpieces.

Then, the first conveying table 640 and the first jig 660 of the second transferring mechanism 620 move along the second direction Y to a side close to the second transferring mechanism 420, and the suction nozzle module 430 of the second transferring mechanism 420 simultaneously sucks two workpieces from the first jig 660 (according to the different number of the clip slots 21 of the clip 2, the suction nozzle module 430 can also simultaneously suck one or three workpieces), so that the second transferring mechanism 420 transfers the workpieces to the clip 2 in the second loading and unloading mechanism 300, and after one clip 2 is filled, the workpieces can be transferred away through the first clip track 310 to complete the unloading. In this mode, the two groups of second loading and unloading mechanisms 300 have the same function, and the second transfer mechanism 420 can transfer the cleaned workpiece to the clip 2 of any group of second loading and unloading mechanisms 300.

It should be noted that, during the process of receiving the workpiece for blanking from each clip 2, the empty clip 2 is first transferred to the first interface 301 via the second clip track 320 and the second lifting module 330, and then the clip 2 is kept stationary, and the two lifting rods 333 corresponding to the positions of the two clip slots 21 are lifted to lift the top plate 334 thereon to a position close to the top opening of the clip slot 21. Then, the two top plates 334 can simultaneously receive the workpieces transferred by the second transfer mechanism 420, and each time the second transfer mechanism 420 puts two workpieces into the two clip slots 21, the workpiece at the uppermost layer can be detected by the in-place sensor 336, so that the control system can control the corresponding lifting rod 333 to descend by the height of one workpiece and continue to receive the next workpiece until both clip slots 21 are filled. The above-mentioned blanking mode of gradually lowering the top plate 334 can prevent the workpiece from being damaged by throwing in the cartridge clip 2, and protect the workpiece.

In mode (4): in this mode, the first loading and unloading mechanism 200 and the first transferring mechanism 610 are not used, the workpiece to be cleaned is loaded from one set of second loading and unloading mechanisms 300, and the cleaned workpiece is unloaded from the other set of second loading and unloading mechanisms 300, i.e. the cartridge clip type loading and unloading mechanism is used.

First, the clips 2 filled with the workpieces to be cleaned are introduced by the first clip track 310 of the second loading and unloading mechanism 300, and are received and held stationary by the second lifting module 330 at the first interface 301. Then, the two lifting rods 333 corresponding to the two clip slots 21 are lifted a certain distance, so that the two top workpieces are lifted to the position sensor 336, and after the position sensor 336 detects the workpiece to be loaded, the second transfer mechanism 420 is controlled to simultaneously take the two workpieces and put the two workpieces into the second jig 670 (or the first jig 660) of the second transfer mechanism 620. After the second jig 670 is filled, the second transfer table 650 moves along the second rail 632 to a side close to the transplanting mechanism 900. Then, the suction base 930 of the transplanting mechanism 900 sucks all the workpieces in the second jig 670 at a time, and moves to the upper side of the three plasma cleaning nozzles 810 to be cleaned. The cleaned workpiece is returned to the second jig 670 of the second transfer mechanism 620 by the transplanting mechanism 900. Then, the second jig 670 returns to the side close to the second transferring mechanism 420 along the second direction Y, and the second transferring mechanism 420 transfers the workpiece to the empty magazine 2 of another set of second feeding and discharging mechanism 300 for discharging, where the working manner of the second feeding and discharging mechanism 300 for discharging is the same as that of the mode (1), and will not be described herein again.

In summary, the plasma cleaning apparatus of the present embodiment has at least the following advantages:

1. the automatic feeding and discharging device is suitable for various feeding and discharging modes, can be freely selected by a producer, and has a wider application range;

2. when the second feeding and discharging mechanisms 300 are used for feeding and discharging, the two groups of second feeding and discharging mechanisms 300 can work cooperatively, so that feeding and discharging operations of the cartridge clip 2 are realized without stopping;

3. the first transfer mechanism 410 and the second transfer mechanism 420 use the double mechanical arms and the multiple suction nozzles 432 to take and discharge materials, so that the workpiece transfer efficiency is higher, the suction nozzles 432 can be flexibly replaced, and the device is suitable for workpiece products with various feeding modes and different specifications;

4. the first transfer mechanism 610 and the second transfer mechanism 620 both use a double-sliding table mechanism, so that the double manipulators can take and discharge materials without interference, and the two transfer mechanisms can operate simultaneously, save time and improve efficiency;

5. the sucking seat 930 of the transplanting mechanism 900 can simultaneously suck a plurality of workpieces and simultaneously clean the workpieces, so that the efficiency is improved;

6. the whole plasma cleaning equipment is full-automatic in cleaning process, does not need to manually contact with a workpiece, and is higher in product quality.

The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and to implement the same, but are not intended to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.

Claims

1. A plasma cleaning apparatus for cleaning a workpiece, characterized in that: the plasma cleaning equipment comprises a frame, a first feeding and discharging mechanism, a second feeding and discharging mechanism, a first transfer mechanism, a second transfer mechanism, a cleaning mechanism and a transplanting mechanism, wherein,

the first transfer mechanism and the second transfer mechanism comprise suction nozzle modules, each suction nozzle module comprises a suction nozzle seat and a plurality of suction nozzles, each suction nozzle is used for sucking one workpiece, each suction nozzle is detachably connected with the corresponding suction nozzle seat,

The first transfer mechanism and the second transfer mechanism are identical in structure, and comprise a middle rotary seat, a first transmission table, a second transmission table, a first jig and a second jig, wherein the first jig and the second jig are respectively used for storing a plurality of workpieces, the first jig is connected with the first transmission table, the second jig is connected with the second transmission table, the first transmission table and the second transmission table are respectively arranged on the middle rotary seat in a relatively movable manner along a second direction, the first transfer mechanism and the second transfer mechanism are arranged at intervals along a first direction, the first direction and the second direction respectively extend along a horizontal direction, and the first direction and the second direction are mutually perpendicular;

in each of the first transfer mechanism and the second transfer mechanism, the transfer seat is provided with a first track and a second track, the first track and the second track respectively extend along the second direction, and the first track is positioned above the second track; along the first direction, the first track is positioned outside the second track; the first transmission table is connected with the first track in a relatively sliding manner; the second transmission table can be connected with the second track in a relatively sliding manner, the second transmission table is positioned below the first transmission table, the second jig can be connected with the second transmission table in a relatively moving manner along the up-down direction, and the second jig can pass through the lower part of the first transmission table in the process of moving along the second track; the transfer seat is provided with a guide groove extending along the second direction, the guide groove is provided with a first section, a second section and a third section which are sequentially connected along the second direction, the first section is positioned above the second section, and the third section is positioned above the second section; the second jig is connected with a guide pin, and the guide pin can be inserted into the guide groove in a relatively sliding manner along the extending direction of the guide groove.

2. The plasma cleaning apparatus according to claim 1, wherein: the first feeding and discharging mechanism, the first transfer mechanism, the cleaning mechanism, the second transfer mechanism and the second feeding and discharging mechanism are sequentially arranged along a horizontal first direction; the horizontal direction perpendicular to the first direction is a second direction, along the second direction, the first transfer mechanism and the second transfer mechanism are arranged on the same side of the cleaning mechanism, the transplanting mechanism is arranged on the other side of the cleaning mechanism, and the first transfer mechanism and the second transfer mechanism can respectively transmit the workpiece along the second direction.

3. The plasma cleaning apparatus according to claim 1, wherein: the first feeding and discharging mechanism comprises a tray translation module and a first lifting module, the frame comprises a first workbench, the tray translation module is located below the first workbench, the tray translation module is used for conveying trays along the horizontal direction, the trays are used for storing a plurality of workpieces, the first lifting module is used for conveying the trays along the vertical direction, and the first transfer mechanism is used for transferring the workpieces between the trays located above the first workbench and the first transfer mechanism.

4. The plasma cleaning apparatus according to claim 1, wherein: the second feeding and discharging mechanism comprises a first clip track, a second clip track and a second lifting module, wherein the first clip track and the second clip track are respectively used for conveying clips and workpieces along the horizontal direction, the clips are used for storing the workpieces, the first clip track is provided with a first interface close to the second transfer mechanism, the second clip track is provided with a second interface close to the second transfer mechanism, the first clip track is located above the second clip track, the first interface is located above the second interface, the second lifting module is used for conveying the clips and the workpieces between the first interface and the second interface, and the second transfer mechanism is used for transferring the workpieces between the clips located at the first interface and the second transfer mechanism.

5. The plasma cleaning apparatus according to claim 4, wherein: in each second feeding and discharging mechanism, the transmission direction of the first clip track and the transmission direction of the second clip track respectively extend along a first direction, the first direction and the second direction respectively extend along a horizontal direction, and the first direction and the second direction are mutually perpendicular.

6. The plasma cleaning apparatus according to claim 4, wherein: the second lifting module comprises a cartridge clip lifting device and a workpiece lifting device, the cartridge clip lifting device is used for driving the cartridge clip to move relatively in the up-down direction, the workpiece lifting device is used for driving a workpiece in the cartridge clip to move relatively in the up-down direction relative to the cartridge clip, the workpiece lifting device is provided with one or more workpieces, and the second lifting module further comprises an in-place sensor used for detecting the height of the workpiece.

7. The plasma cleaning apparatus according to claim 6, wherein: the second lifting module comprises a cartridge holder, and the cartridge jacking device comprises a cartridge holder lifting seat which can be connected with the cartridge holder in a relative motion along the up-down direction; the workpiece jacking device comprises a jacking rod, the jacking rod can relatively move along the up-down direction and is connected with the cartridge clip lifting seat, the top of the jacking rod is provided with a top plate, and the top plate can vertically move in the cartridge clip.

8. The plasma cleaning apparatus according to claim 4, wherein: the second lifting module comprises a cartridge holder, the cartridge holder comprises a base and side plates, the side plates are respectively arranged on two sides of the base, the two side plates and the base enclose to form an accommodating space for accommodating the cartridge holder, the two side plates can move close to or far away from each other, and the second lifting module further comprises a spacing adjusting device for driving at least one side plate to move close to or far away from the other side plate relatively.

9. The plasma cleaning apparatus according to claim 1, wherein: the first transfer mechanism and the second transfer mechanism are mechanical arms, one end part of each mechanical arm is provided with a suction nozzle module, the suction nozzle seat is provided with a first magnetic piece, each suction nozzle is provided with a second magnetic piece, the first magnetic piece and the second magnetic piece can be attracted to each other through magnetic attraction, and each suction nozzle is provided with a vacuum adsorption structure.

10. The plasma cleaning apparatus according to claim 1, wherein: the first transfer mechanism, the cleaning mechanism and the second transfer mechanism are sequentially arranged along a horizontal first direction, the transplanting mechanism comprises a support, a transplanting seat and a sucking seat, the support is fixedly connected with the frame, the transplanting seat can be connected with the support in a relative motion along the first direction, the sucking seat can be connected with the transplanting seat in a relative motion along the up-down direction, and the sucking seat can suck a plurality of workpieces simultaneously.

11. The plasma cleaning apparatus according to claim 10, wherein: the cleaning mechanism comprises a plasma cleaning spray head, wherein the plasma cleaning spray head is provided with a plurality of cleaning nozzles which are sequentially arranged along a horizontal second direction, and the first direction and the second direction are mutually perpendicular; and/or the number of the groups of groups,

The first transfer mechanism and the second transfer mechanism respectively comprise jigs for bearing the workpieces, each jig is provided with a plurality of grooves which are arranged in an array, each groove is used for placing one workpiece, the suction seat is provided with a plurality of suction heads which are arranged in an array, the suction heads are in one-to-one correspondence with the positions of the grooves, and the suction seat can suck all the workpieces in one jig at the same time.