CN116275049A - 一种金属合金结合剂金刚石砂轮及其加工方法和应用 - Google Patents
一种金属合金结合剂金刚石砂轮及其加工方法和应用 Download PDFInfo
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- 239000010432 diamond Substances 0.000 title claims abstract description 56
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- 229910001092 metal group alloy Inorganic materials 0.000 title claims abstract description 30
- 239000007767 bonding agent Substances 0.000 title claims abstract description 16
- 238000003672 processing method Methods 0.000 title claims abstract description 8
- 238000005245 sintering Methods 0.000 claims abstract description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 11
- 239000010703 silicon Substances 0.000 claims abstract description 11
- 239000000843 powder Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000002156 mixing Methods 0.000 claims abstract description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 5
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000011863 silicon-based powder Substances 0.000 claims abstract description 4
- 238000003754 machining Methods 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 2
- 239000011347 resin Substances 0.000 abstract description 8
- 229920005989 resin Polymers 0.000 abstract description 8
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 239000002184 metal Substances 0.000 abstract description 7
- 239000000203 mixture Substances 0.000 description 6
- 238000005452 bending Methods 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
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- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/14—Both compacting and sintering simultaneously
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
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- B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
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Abstract
本发明提供了一种金属合金结合剂金刚石砂轮加工方法，其包括：将6‑8％金刚石粉末、45‑54％铜粉、0‑1％铁粉、0‑26％钴粉、20‑27％锡粉、0‑1.5％铝粉、2‑5％石墨粉、0‑1.5％硅粉以及1‑2％银粉混合后加入模具，然后在烧结压机中进行烧结，烧结时从常温升温至590‑750℃并保温20min。本发明还提供了由该方法加工的金属合金结合剂金刚石砂轮及其应用，解决了现有技术中树脂金刚石砂轮和普通金属结合剂金刚石砂轮不适用于硅棒加工的问题。
Description
技术领域
本发明涉及金刚石砂轮及其加工方法和应用技术领域，尤其涉及一种金属合金结合剂金刚石砂轮及其加工方法和应用。
背景技术
硅棒主要应用于电子半导体、光伏太阳能电池板的制作，其加工一直以来都是行业的难点，要求加工效率高，加工粗糙度低，加工成品率高。硅棒加工一般使用树脂金刚石砂轮进行，但是加工效率低、树脂金刚石砂轮寿命低，而且还每天需要用油石修正；如使用普通金属结合剂金刚石砂轮进行，则会因普通金属结合剂金刚石砂轮强度高会导致加工次品率高。因此，需要提供一种新型的金刚砂砂轮以适应硅棒的加工。
发明内容
针对现有技术中所存在的不足，本发明提供了一种金属合金结合剂金刚石砂轮及其加工方法和应用，其解决了现有技术中树脂金刚石砂轮和普通金属结合剂金刚石砂轮不适用于硅棒加工的问题。
根据本发明的实施例，一种金属合金结合剂金刚石砂轮加工方法，按重量计，包括：将6-8％金刚石粉末、45-54％铜粉、0-1％铁粉、0-26％钴粉、20-27％锡粉、0-1.5％铝粉、2-5％石墨粉、0-1.5％硅粉以及1-2％银粉混合后加入模具，然后在烧结压机中进行烧结，烧结时从常温升温至590-750℃并保温20min。
进一步地，金刚石粉末的粒径为300-200目。
进一步地，烧结压机压力为20MPa。
进一步地，烧结在真空下进行。
根据本发明的实施例，还提供了由上述方法所得的金属合金结合剂金刚石砂轮，孔隙率小于1％，抗弯强度为130-160MPa，洛氏硬度为HRA80-HRA85。
根据本发明的实施例，还提供了上述金属合金结合剂金刚石砂轮的应用，用于加工硅棒。
相比于现有技术，本发明具有如下有益效果：
1、本发明金属合金结合剂金刚石砂轮制备过程中，采用由金属粉末混合烧结形成的金属合金金刚石砂轮，该合金结合剂的洛氏硬度、抗弯性能优于现树脂结合剂金刚石砂轮，且该金属合金结合剂金刚石砂轮实际使用中耐磨性也优于树脂结合剂金刚石砂轮；
2、本发明金属合金结合剂金刚石砂轮制备过程中，在金刚石砂轮中加入石墨提高产品的润滑性能，同时金刚石砂轮磨削过程中挤压过大时结合剂会自主脱落，从而对硅棒提供保护；
3、本发明采用成型和烧结在设备上同步完成的工艺，大大提高了加工效率，时间控制在20min，可降低产品的成本，提高产品的稳定性。
附图说明
图1为本发明实施例1的表面显微结构扫面电镜图；
图2为本发明实施例2的表面显微结构扫面电镜图；
具体实施方式
下面结合附图及实施例对本发明中的技术方案进一步说明。
实施例1
一种金属合金结合剂金刚石砂轮，按重量计，包括如下混合物：
金刚石粉末8％、铜粉54％、铁粉1％、锡粉27％、铝粉1.5％、石墨粉5％、硅粉1.5％、银粉2％，加工时将混合物在30r/min转速下混合2h，然后将混合后的混合物放入模具内，将模具放入烧结压机，升温至590℃，压力20MP，在真空下烧结20min，完成烧结。其中，金刚石粉末粒径为200目。
所得金属合金结合剂金刚石砂轮的孔隙率为0.64％，洛氏硬度为HRA80，抗弯强度为130MPa。
实施例2
一种金属合金结合剂金刚石砂轮，按重量计，包括如下混合物：
金刚石粉末6％、铜粉45％、钴粉26％、锡粉20％、银粉1％、石墨粉2％，加工时将混合物在30r/min转速下混合2h，然后将混合后的混合物放入模具内，将模具放入烧结压机，升温至750℃，压力20MP，在真空下烧结20min，完成烧结。其中，金刚石粉末粒径为300目。
所得金属合金结合剂金刚石砂轮的孔隙率为0.55％，洛氏硬度为HRA85，抗弯强度为160MPa。
将实施例1和2提供的金属合金结合剂金刚石砂轮和市售树脂结合剂金刚石砂轮以及金属结合剂金刚石砂轮进行对比，所得结果列入下表1和2：
表1
表2
实施例1和2提供的金属合金结合剂金刚石砂轮抗弯强度和最高回转速度均居于树脂结合剂金刚石砂轮和金属结合剂金刚石砂轮之间，能够提高加工效率的同时保证不因强度过大导致次品率增高，同时磨损比例适中，使用寿命也得到了优化，因此更适合用于对硅棒进行加工。
最后说明的是，以上实施例仅用以说明本发明的技术方案而非限制，尽管参照较佳实施例对本发明进行了详细说明，本领域的普通技术人员应当理解，可以对本发明的技术方案进行修改或者等同替换，而不脱离本发明技术方案的宗旨和范围，其均应涵盖在本发明的权利要求范围当中。
Claims (9)
1.一种金属合金结合剂金刚石砂轮加工方法，按重量计，其特征在于，包括：
将6-8％金刚石粉末、45-54％铜粉、0-1％铁粉、0-26％钴粉、20-27％锡粉、0-1.5％铝粉、2-5％石墨粉、0-1.5％硅粉以及1-2％银粉混合后加入模具，然后在烧结压机中进行烧结，烧结时从常温升温至590-750℃并保温20min。
2.如权利要求1所述的金属合金结合剂金刚石砂轮加工方法，其特征在于，金刚石粉末的粒径为300-200目。
3.如权利要求1所述的金属合金结合剂金刚石砂轮加工方法，其特征在于，烧结压机压力为20MPa。
4.如权利要求1所述的金属合金结合剂金刚石砂轮加工方法，其特征在于，烧结在真空下进行。
5.一种金属合金结合剂金刚石砂轮，其特征在于，由权利要求1-4所述方法所得。
6.如权利要求5所述的金属合金结合剂金刚石砂轮，其特征在于，孔隙率小于1％。
7.如权利要求5所述的金属合金结合剂金刚石砂轮，其特征在于，抗弯强度为130-160MPa。
8.如权利要求5所述的金属合金结合剂金刚石砂轮，其特征在于，洛氏硬度为HRA80-HRA85。
9.如权利要求5-8中任一项所述的金属合金结合剂金刚石砂轮的应用，其特征在于，用于加工硅棒。
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