CN116164878B - Ceramic single-cavity capacitive differential pressure sensor and preparation method thereof - Google Patents
Ceramic single-cavity capacitive differential pressure sensor and preparation method thereof Download PDFInfo
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- CN116164878B CN116164878B CN202310049555.4A CN202310049555A CN116164878B CN 116164878 B CN116164878 B CN 116164878B CN 202310049555 A CN202310049555 A CN 202310049555A CN 116164878 B CN116164878 B CN 116164878B
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- 239000000919 ceramic Substances 0.000 title claims abstract description 102
- 238000002360 preparation method Methods 0.000 title abstract description 9
- 238000011049 filling Methods 0.000 claims abstract description 72
- 238000004891 communication Methods 0.000 claims abstract description 44
- 230000006835 compression Effects 0.000 claims abstract description 14
- 238000007906 compression Methods 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims abstract description 14
- 239000012530 fluid Substances 0.000 claims abstract description 13
- 239000012528 membrane Substances 0.000 claims description 44
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 42
- 229910052709 silver Inorganic materials 0.000 claims description 42
- 239000004332 silver Substances 0.000 claims description 42
- 239000011268 mixed slurry Substances 0.000 claims description 25
- 238000005245 sintering Methods 0.000 claims description 21
- 239000002002 slurry Substances 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 19
- 239000011248 coating agent Substances 0.000 claims description 18
- 238000000576 coating method Methods 0.000 claims description 18
- 238000001035 drying Methods 0.000 claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 238000000498 ball milling Methods 0.000 claims description 10
- 239000008367 deionised water Substances 0.000 claims description 10
- 229910021641 deionized water Inorganic materials 0.000 claims description 10
- 239000002270 dispersing agent Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 238000005498 polishing Methods 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 10
- 238000007650 screen-printing Methods 0.000 claims description 10
- 238000003756 stirring Methods 0.000 claims description 10
- 238000003466 welding Methods 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 9
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 5
- 239000000843 powder Substances 0.000 claims description 5
- 230000000903 blocking effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 3
- 230000006698 induction Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 5
- 239000003292 glue Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000010865 sewage Substances 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/028—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using capsules
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/10—Internal combustion engine [ICE] based vehicles
- Y02T10/40—Engine management systems
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- Measuring Fluid Pressure (AREA)
Abstract
The invention relates to a ceramic single-cavity capacitive differential pressure sensor and a preparation method thereof, wherein the ceramic single-cavity capacitive differential pressure sensor comprises a base, communication holes, filling holes, pressure chambers and ceramic compression diaphragms, the base is a cylinder, the pressure chambers are oppositely arranged on two sides, the communication holes are communicated between the two pressure chambers, the filling holes are arranged in the center of the communication holes, one ends of the filling holes are communicated with the communication holes, the other ends of the filling holes penetrate through the base and are communicated with the outside, the ceramic compression diaphragms are cooperatively arranged on two sides of the base, and the ceramic compression diaphragms are sealed with the pressure chambers; through with two pressure chambers intercommunication, form a cavity, make things convenient for insulating fluid material filling, moreover because two pressure chambers intercommunication, the space of every pressure chamber can be designed littleer, reaches same forced induction effect, and then reduces insulating fluid material's use, and then avoids the error that causes because of insulating fluid material thermal expansion.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a ceramic single-cavity capacitive differential pressure sensor and a preparation method thereof.
Background
Pressure is one of the most typical and critical process parameters in various industrial processes, and pressure transmitters are used industrially to measure related parameters. Pressure transmitters are divided into "pressure" and "differential pressure". The core component of the differential pressure transmitter is a differential pressure sensor. The differential pressure sensor is divided into piezoresistive, piezoelectric, strain-type, capacitance-type and other different technical modes.
The differential pressure sensor is capable of detecting a pressure differential between specific ends of devices connected thereto, is not affected by changes in fluid pressure, temperature or other characteristics (e.g., ambient temperature, etc.), and is capable of converting pressure into an analog electrical signal output.
Differential pressure measurements are widely used in industrial control and are often the basis for other measurements such as flow, liquid level, density, viscosity and even temperature. Differential pressure transmitters are very widely used, for example, for monitoring the pressure of offshore oil and gas flows and various underwater applications, for monitoring the pressure of filters and sewage in sewage treatment plants, for monitoring sprinkler systems and pump control in agricultural applications, for remote monitoring of the steam and hot water pressure of heating systems in power plants, and for monitoring the pressure of valve elements of various automobiles, ships, etc.
Disclosure of Invention
The invention provides a ceramic single-cavity capacitive differential pressure sensor and a preparation method thereof.
The aim of the invention can be achieved by the following technical scheme:
the invention relates to a ceramic single-cavity capacitive differential pressure sensor, which comprises a base, communication holes, filling holes, pressure chambers and ceramic pressure-receiving diaphragms, wherein the base is a cylinder, the pressure chambers are oppositely arranged on two sides, the communication holes are communicated between the two pressure chambers, the filling holes are arranged in the center of the communication holes, one ends of the filling holes are communicated with the communication holes, the other ends of the filling holes penetrate through the base and are communicated with the outside, the ceramic pressure-receiving diaphragms are cooperatively arranged on two sides of the base, and the ceramic pressure-receiving diaphragms are sealed with the pressure chambers.
A preparation method of a ceramic single-cavity capacitive differential pressure sensor comprises the following steps: the method comprises the following steps:
Firstly, preparing a base;
Step S1, adding 1000 parts of aluminum oxide powder, 2-5 parts of dispersing agent (I sobam series of KURARAY company are selected and used, meanwhile, dispersing and self-solidifying effects are achieved) and 200-300 parts of deionized water into a ball mill, ball milling for 2-4 hours, discharging by a 120-150 mesh screen after ball milling, placing into a vacuumizing device, vacuumizing for 30-60 min by 0.06-0.1 megapascal, and transferring to a stirring tank for continuous stirring for 0.5-1 hour to obtain mixed slurry;
S2, taking out the mixed slurry, placing the mixed slurry into a measuring cup, pouring the mixed slurry into a cylindrical mold, placing the mold and the ceramic slurry in the mold into a baking oven at 40-60 ℃ for standing for 1-3 hours, and forming a gel-like green body by the ceramic;
S3, drying the blank for 24-72 hours, placing the dried blank in an electric furnace, sintering, arranging communication holes at the circle centers of the surfaces of the two sides of the cylinder base after sintering, arranging filling holes at the center of the upper surface of the top end of the base, and communicating the filling holes with the communication holes; polishing to obtain a base;
Secondly, preparing a ceramic pressed membrane;
Preparing slurry according to the step S1 and the step S2, pouring the slurry into a circular mold, placing the mold and the ceramic slurry in the mold into a baking oven at 40-60 ℃ for standing for 1-2 hours to form a wafer-shaped gel blank with the thickness of 2-3mm, drying for 24-48 hours, placing the wafer-shaped gel blank into an electric furnace for sintering, processing the wafer-shaped gel blank into a circular sheet with the thickness of 0.5-1mm, and polishing to obtain a ceramic pressed film;
Thirdly, preparing a pressure chamber;
Processing two sides of the base into parabolic concave surfaces, calculating the curvature according to the required measuring range of the sensor, the elastic modulus of the ceramic membrane and the like, coating a silver paste layer on the bottom of the concave surfaces in a screen printing mode, and forming a circle with the radius r (as shown in figure 3); coating a layer of silver paste on the middle position of the inner side of the ceramic pressed membrane except the periphery in a screen printing mode to form a circle, wherein the radius is R and R > R (shown in figure 4); extending and smearing silver paste to the periphery at an inner side A point; coating dot-shaped silver paste on the outer side of the base close to the point A of the pressed membrane; controlling the thickness of silver paste to be less than 0.1mm; simultaneously, a layer of silver paste is uniformly smeared on the inner walls of the communicating holes and the filling holes; transferring the base and the membrane into an oven, drying 8 min at 120-150 ℃, transferring into an electric furnace, sintering 30-60 min at 500-850 ℃, and curing the silver paste to form a silver film; then coating a circle of high-temperature adhesive with the width of about 2mm and the thickness of 0.1-0.5mm on the periphery of the inner side of the ceramic pressed membrane, respectively bonding the two ceramic pressed membranes on two sides of the base, transferring the two ceramic pressed membranes into an electric furnace, sintering for 30-60 min at 500-700 ℃, and forming a pressure chamber by parabolic concave surfaces on two sides of the base and the ceramic pressed membranes;
Welding metal wires at the A point of the pressure-bearing diaphragms at the two sides, welding the metal wires at the outer sides of the filling holes, respectively serving as leads of the sensor, and connecting the leads to a measuring module of the transmitter;
Fifthly, filling;
filling is carried out in a vacuum environment, insulating fluid materials enter a pressure chamber through filling holes and communication holes, and after filling is finished, the filling holes are blocked by strong glue, so that the ceramic single-cavity capacitive differential pressure sensor is manufactured.
Further: in the step S3 in the first step, controlling the muffle furnace to heat up to 350-400 ℃ at the room temperature at the speed of 0.5-2 ℃/min, preserving heat for 4-10h, heating up to 1100-1200 ℃ at the speed of 0.5-2 ℃/min, preserving heat for 4-10h, heating up to 1600 ℃ at the speed of 0.5-2 ℃/min, preserving heat for 6-20h, and finally cooling down to the room temperature at the speed of 0.5-2 ℃/min; in the second step, controlling the muffle furnace to heat up to 350-400 ℃ at the room temperature at the speed of 0.5-2 ℃/min, preserving heat for 4-6h, heating up to 1100-1200 ℃ at the speed of 0.5-2 ℃/min, preserving heat for 4-6h, heating up to 1600 ℃ at the speed of 0.5-2 ℃/min, preserving heat for 6-10h, and finally cooling down to the room temperature at the speed of 0.5-2 ℃/min;
Further: in the step S2 in the first step, the dosage ratio of the mixed slurry, the dispersing agent and the deionized water is controlled to be 1000 g:2-5 g:200-300g.
The invention has the beneficial effects that:
According to the ceramic single-cavity capacitive differential pressure sensor, two pressure chambers are communicated to form a cavity, so that the insulating fluid material is convenient to fill, and because the two pressure chambers are communicated, the space of each pressure chamber can be designed to be smaller, the same pressure sensing effect is achieved, the use of the insulating fluid material is further reduced, the error caused by thermal expansion of the insulating fluid material is further avoided, and the technical problem that the two pressure chambers are difficult to fill to the same height when the insulating fluid material is filled can be solved by communicating the two pressure chambers;
The invention adopts industrial ceramic raw materials such as high-purity alumina with purity higher than 99% to manufacture the base and the ceramic compression diaphragm of the sensor, and the base and the ceramic compression diaphragm have the characteristics of high strength, high insulation, corrosion resistance, high elastic modulus, low hysteresis, low expansion rate and the like, and have strong signal interference resistance.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a ceramic single-cavity capacitive differential pressure sensor according to the present invention.
Fig. 2 is a schematic view of a structure of the present invention in which a wire guide is formed on a base.
Fig. 3 is a schematic view of a base silver paste.
Fig. 4 is a schematic diagram of a film silver paste.
In the drawings, the list of components represented by the various numbers is as follows:
1. a base; 2. a communication hole; 3. filling holes; 4. a pressure chamber; 5. ceramic compression membrane.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
Referring to fig. 1-4, the invention discloses a ceramic single-cavity capacitive differential pressure sensor, which comprises a base 1, a communication hole 2, a filling hole 3, pressure chambers 4 and ceramic pressure-receiving diaphragms 5, wherein the pressure chambers 4 are oppositely arranged on two sides of the base 1, the communication hole 2 is communicated between the two pressure chambers 4, the filling hole 3 is arranged in the center of the communication hole 2, one end of the filling hole 3 is communicated with the communication hole 2, the other end of the filling hole 3 penetrates through the base 1 to be communicated with the outside, the ceramic pressure-receiving diaphragms 5 are cooperatively arranged on two sides of the base 1, and the ceramic pressure-receiving diaphragms 5 are sealed with the pressure chambers 4.
A preparation method of a ceramic single-cavity capacitive differential pressure sensor comprises the following steps: the method comprises the following steps:
firstly, preparing a base 1;
Step S1, adding 1000 parts of alumina powder, 2 parts of dispersing agent (KURARAY company I sobam-104) and 200 parts of deionized water into a ball mill for ball milling for 2 hours, discharging by a 120-mesh screen after ball milling, placing into a vacuumizing device, vacuumizing for 30 min by 0.06 megapascals, and transferring to a stirring tank for continuous stirring for 0.5 hour to prepare mixed slurry;
s2, taking out the mixed slurry, placing the mixed slurry into a measuring cup, pouring the mixed slurry into a cylindrical mold, placing the mold and the ceramic slurry in the mold into a baking oven at 60 ℃ for standing for 3 hours, forming a gel-like green body by the ceramic, and controlling the dosage ratio of the mixed slurry, the dispersing agent and the deionized water to be 1000 g/2 g:200g;
S3, drying the blank for 72 hours, placing the dried blank in an electric furnace, sintering, arranging communication holes 2 at the circle center positions of the two side surfaces of the cylinder base after sintering, arranging filling holes 3 at the center position of the upper surface of the top end of the base, and communicating the filling holes 3 with the communication holes 2; polishing to obtain a base 1;
Controlling the muffle furnace to heat to 400 ℃ at the room temperature at the speed of 0.5 ℃/min, preserving heat for 10 hours, heating to 1200 ℃ at the speed of 0.5 ℃/min, preserving heat for 10 hours, heating to 1600 ℃ at the speed of 0.5 ℃/min, preserving heat for 20 hours, and finally cooling to the room temperature at the speed of 0.5 ℃/min;
Secondly, preparing a ceramic compression membrane 5;
preparing slurry according to the step S1 and the step S2, pouring the slurry into a circular mold, placing the mold and the ceramic slurry in the mold into a baking oven at 60 ℃ for standing for 2 hours to form a wafer-shaped gel blank with the thickness of 2mm, drying for 48 hours, placing the wafer-shaped gel blank into an electric furnace for sintering, processing the wafer-shaped gel blank into a circular sheet with the thickness of 1mm, and polishing to obtain a ceramic pressed film 5;
Controlling the muffle furnace to heat to 400 ℃ at the room temperature at the speed of 0.5 ℃/min, preserving heat for 6 hours, heating to 1200 ℃ at the speed of 0.5 ℃/min, preserving heat for 6 hours, heating to 1600 ℃ at the speed of 0.5 ℃/min, preserving heat for 10 hours, and finally cooling to the room temperature at the speed of 0.5 ℃/min;
thirdly, preparing a pressure chamber 4;
Processing two sides of a base 1 into parabolic concave surfaces, calculating the curvature according to the required measuring range of a sensor, the elastic modulus of a ceramic membrane and the like, coating a silver paste layer on the bottom of the concave surface in a screen printing mode to form a circle with the radius R (shown in figure 3), coating a silver paste layer on the middle position of the inner side of a ceramic pressed membrane 5 except the periphery in a screen printing mode to form a circle with the radius R, R > R (shown in figure 4), and extending and coating the silver paste layer on the periphery at the inner side A point; coating dot-shaped silver paste on the outer side of the base close to the point A of the pressed membrane 5; controlling the thickness of silver paste to be less than 0.1mm; simultaneously, a layer of silver paste is uniformly smeared on the inner walls of the communication hole 2 and the filling hole 3; transferring the base and the membrane into an oven, drying at 150 ℃ for 8min, transferring into an electric furnace, sintering at 800 ℃ for 60min, and curing the silver paste to form a silver film; then, a circle of high-temperature adhesive with the width of 2mm and the thickness of 0.2mm is coated on the periphery of the inner side of the ceramic pressed membrane 5, two ceramic pressed membranes 5 are respectively adhered on the two sides of the base 1, then, the ceramic pressed membrane is transferred into an electric furnace, and sintered for 60min at the temperature of 700 ℃, and the parabolic concave surfaces on the two sides of the base 1 and the ceramic pressed membrane 5 form a pressure chamber 4;
Welding metal wires at the A point of the compression diaphragms 5 at the two sides, welding the metal wires at the outer sides of the filling holes 3, and respectively serving as leads of a sensor to be connected to a measuring module of a transmitter;
Fifthly, filling;
Filling is carried out in a vacuum environment, insulating fluid materials enter a pressure chamber 4 through a filling hole 3 and a communication hole 2, and after filling is finished, the filling hole 3 is blocked by strong glue, so that the ceramic single-cavity capacitive differential pressure sensor is manufactured.
Example 2
Referring to fig. 1-4, the invention discloses a ceramic single-cavity capacitive differential pressure sensor, which comprises a base 1, a communication hole 2, a filling hole 3, pressure chambers 4 and ceramic pressure-receiving diaphragms 5, wherein the pressure chambers 4 are oppositely arranged on two sides of the base 1, the communication hole 2 is communicated between the two pressure chambers 4, the filling hole 3 is arranged in the center of the communication hole 2, one end of the filling hole 3 is communicated with the communication hole 2, the other end of the filling hole 3 penetrates through the base 1 to be communicated with the outside, the ceramic pressure-receiving diaphragms 5 are cooperatively arranged on two sides of the base 1, and the ceramic pressure-receiving diaphragms 5 are sealed with the pressure chambers 4.
A preparation method of a ceramic single-cavity capacitive differential pressure sensor comprises the following steps: the method comprises the following steps:
firstly, preparing a base 1;
Step S1, adding 1000 parts of alumina powder, 5 parts of dispersing agent (KURARAY company I sobam-104) and 300 parts of deionized water into a ball mill for ball milling for 4 hours, discharging by a 150-mesh screen after ball milling, placing into a vacuumizing device, vacuumizing for 60 min by 0.1 megapascals, and transferring to a stirring tank for continuous stirring for 1 hour to prepare mixed slurry;
S2, taking out the mixed slurry, placing the mixed slurry into a measuring cup, pouring the mixed slurry into a cylindrical mold, placing the mold and the ceramic slurry in the mold into a baking oven at 40 ℃ for standing for 1h, forming a gel-like green body by the ceramic, and controlling the dosage ratio of the mixed slurry, the dispersing agent and the deionized water to be 1000 g/5 g:300g;
S3, drying the blank for 60 hours, placing the dried blank in an electric furnace, sintering, arranging communication holes 2 at the circle center positions of the two side surfaces of the cylinder base after sintering, arranging filling holes 3 at the center position of the upper surface of the top end of the base, and communicating the filling holes 3 with the communication holes 2; polishing to obtain a base 1;
controlling the muffle furnace to heat up to 350 ℃ at the room temperature at the speed of 2 ℃/min, preserving heat for 4 hours, heating up to 1100 ℃ at the speed of 2 ℃/min, preserving heat for 8 hours, heating up to 1600 ℃ at the speed of 2 ℃/min, preserving heat for 10 hours, and finally cooling down to the room temperature at the speed of 2 ℃/min;
Secondly, preparing a ceramic compression membrane 5;
Preparing slurry according to the step S1 and the step S2, pouring the slurry into a circular mold, placing the mold and the ceramic slurry in the mold into a baking oven at 40 ℃ for standing for 1h to form a wafer-shaped gel blank with the thickness of 2mm, drying the wafer-shaped gel blank for 24h, sintering the wafer-shaped gel blank in an electric furnace, processing the wafer-shaped gel blank into a circular sheet with the thickness of 0.5mm, and polishing the circular sheet to obtain the ceramic pressed film 5;
Controlling the muffle furnace to heat to 400 ℃ at the room temperature at the speed of 2 ℃/min, preserving heat for 4 hours, heating to 1100 ℃ at the speed of 2 ℃/min, preserving heat for 4 hours, heating to 1600 ℃ at the speed of 2 ℃/min, preserving heat for 6 hours, and finally cooling to the room temperature at the speed of 2 ℃/min;
thirdly, preparing a pressure chamber 4;
processing two sides of a base 1 into parabolic concave surfaces, calculating the curvature according to the required measuring range of a sensor, the elastic modulus of a ceramic membrane and the like, coating a silver paste layer on the bottom of the concave surface in a screen printing mode to form a circle with the radius R (shown in figure 3), coating a silver paste layer on the middle position of the inner side of a ceramic pressed membrane 5 except the periphery in a screen printing mode to form a circle with the radius R, R > R (shown in figure 4), and extending and coating the silver paste layer on the periphery at the inner side A point; coating dot-shaped silver paste on the outer side of the base close to the point A of the pressed membrane 5; controlling the thickness of silver paste to be less than 0.1mm; simultaneously, a layer of silver paste is uniformly smeared on the inner walls of the communication hole 2 and the filling hole 3; transferring the base and the membrane into an oven, drying at 120 ℃ for 8min, transferring into an electric furnace, sintering at 600 ℃ for 40 min, and curing the silver paste to form a silver film; then, a circle of high-temperature adhesive with the width of 2mm and the thickness of 0.5mm is coated on the periphery of the inner side of the ceramic pressed membrane 5, two ceramic pressed membranes 5 are respectively adhered on the two sides of the base 1, then, the ceramic pressed membrane 5 is transferred into an electric furnace, and sintered for 40 min at 500 ℃, and the parabolic concave surfaces on the two sides of the base 1 and the ceramic pressed membrane 5 form a pressure chamber 4;
Welding metal wires at the A point of the compression diaphragms 5 at the two sides, welding the metal wires at the outer sides of the filling holes 3, and respectively serving as leads of a sensor to be connected to a measuring module of a transmitter;
Fifthly, filling;
And filling in a vacuum environment, wherein an insulating fluid material enters the pressure chamber 4 through the filling hole 3 and the communication hole 2, and after filling, the filling hole 3 is plugged by using strong glue to prepare the ceramic single-cavity capacitive differential pressure sensor.
Example 3
Referring to fig. 1-4, the invention discloses a ceramic single-cavity capacitive differential pressure sensor, which comprises a base 1, a communication hole 2, a filling hole 3, pressure chambers 4 and ceramic pressure-receiving diaphragms 5, wherein the pressure chambers 4 are oppositely arranged on two sides of the base 1, the communication hole 2 is communicated between the two pressure chambers 4, the filling hole 3 is arranged in the center of the communication hole 2, one end of the filling hole 3 is communicated with the communication hole 2, the other end of the filling hole 3 penetrates through the base 1 to be communicated with the outside, the ceramic pressure-receiving diaphragms 5 are cooperatively arranged on two sides of the base 1, and the ceramic pressure-receiving diaphragms 5 are sealed with the pressure chambers 4.
A preparation method of a ceramic single-cavity capacitive differential pressure sensor comprises the following steps: the method comprises the following steps:
firstly, preparing a base 1;
Step S1, adding 1000 parts of alumina powder, 3 parts of dispersing agent (1 part I sobam-104 and 2 parts I sobam-600 of KURARAY company) and 250 parts of deionized water into a ball mill for ball milling for 3 hours, discharging by a 130-mesh screen after ball milling, putting into a vacuumizing device, vacuumizing by 0.08 megapascals for 40 min, and transferring into a stirring tank for continuous stirring for 0.8 hour to prepare mixed slurry;
S2, taking out the mixed slurry, placing the mixed slurry into a measuring cup, pouring the mixed slurry into a cylindrical mold, placing the mold and the ceramic slurry in the mold into a baking oven at 55 ℃ for standing for 2.5 hours, forming a gel-like green body by the ceramic, and controlling the dosage ratio of the mixed slurry, the dispersing agent and the deionized water to be 1000 g/3 g:250g;
S3, drying the blank for 65 hours, placing the dried blank in an electric furnace, sintering, arranging communication holes 2 at the circle center positions of the two side surfaces of the cylinder base after sintering, arranging filling holes 3 at the center position of the upper surface of the top end of the base, and communicating the filling holes 3 with the communication holes 2; polishing to obtain a base 1;
controlling the muffle furnace to heat up to 380 ℃ at the room temperature at the speed of 1 ℃/min, preserving heat for 8 hours, heating up to 1150 ℃ at the speed of 1 ℃/min, preserving heat for 8 hours, heating up to 1600 ℃ at the speed of 1 ℃/min, preserving heat for 15 hours, and finally cooling down to the room temperature at the speed of 1 ℃/min;
Secondly, preparing a ceramic compression membrane 5;
Preparing slurry according to the step S1 and the step S2, pouring the slurry into a circular mold, placing the mold and the ceramic slurry in the mold into a baking oven at 55 ℃ for standing for 1.5 hours to form a disc-shaped gel blank with the thickness of 2mm, drying for 36 hours, placing the blank into an electric furnace for sintering, processing into a circular sheet with the thickness of 0.8mm, and polishing to obtain a ceramic pressed film 5;
Controlling the muffle furnace to heat up to 380 ℃ at the room temperature at the speed of 1 ℃/min, preserving heat for 5 hours, heating up to 1150 ℃ at the speed of 1 ℃/min, preserving heat for 5 hours, heating up to 1600 ℃ at the speed of 0.5 ℃/min, preserving heat for 8 hours, and finally cooling down to the room temperature at the speed of 1 ℃/min;
thirdly, preparing a pressure chamber 4;
Processing two sides of a base 1 into parabolic concave surfaces, calculating the curvature according to the required measuring range of a sensor, the elastic modulus of a ceramic membrane and the like, coating a silver paste layer on the bottom of the concave surface in a screen printing mode to form a circle with the radius R (shown in figure 3), coating a silver paste layer on the middle position of the inner side of a ceramic pressed membrane 5 except the periphery in a screen printing mode to form a circle with the radius R, R > R (shown in figure 4), and extending and coating the silver paste layer on the periphery at the inner side A point; coating dot-shaped silver paste on the outer side of the base close to the point A of the pressed membrane 5; controlling the thickness of silver paste to be less than 0.1mm; simultaneously, a layer of silver paste is uniformly smeared on the inner walls of the communication hole 2 and the filling hole 3; transferring the base and the membrane into an oven, drying at 140 ℃ for 8min, transferring into an electric furnace, sintering at 700 ℃ for 60min, and curing the silver paste to form a silver film; then, a circle of high-temperature adhesive with the width of 2mm and the thickness of 0.3mm is coated on the periphery of the inner side of the ceramic pressed membrane 5, two ceramic pressed membranes 5 are respectively adhered on the two sides of the base 1, then, the ceramic pressed membrane is transferred into an electric furnace, and sintered for 60min at 600 ℃, and the parabolic concave surfaces on the two sides of the base 1 and the ceramic pressed membrane 5 form a pressure chamber 4;
Welding metal wires at the A point of the compression diaphragms 5 at the two sides, welding the metal wires at the outer sides of the filling holes 3, and respectively serving as leads of a sensor to be connected to a measuring module of a transmitter;
Fifthly, filling;
Filling is carried out in a vacuum environment, insulating fluid materials enter a pressure chamber 4 through a filling hole 3 and a communication hole 2, and after filling is finished, the filling hole 3 is blocked by strong glue, so that the ceramic single-cavity capacitive differential pressure sensor is manufactured.
In the description of the present specification, the descriptions of the terms "one embodiment," "example," "specific example," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is merely illustrative and explanatory of the principles of the invention, as various modifications and additions may be made to the specific embodiments described, or similar thereto, by those skilled in the art, without departing from the principles of the invention or beyond the scope of the appended claims.
Claims (3)
1. A ceramic single-cavity capacitive differential pressure sensor is characterized in that: the ceramic pressure-bearing membrane type air conditioner comprises a base (1), communication holes (2), filling holes (3), pressure chambers (4) and ceramic pressure-bearing membranes (5), wherein the base (1) is a cylinder, the pressure chambers (4) are oppositely arranged on two sides, the communication holes (2) are communicated between the two pressure chambers (4), the filling holes (3) are arranged in the center of the communication holes (2), one ends of the filling holes (3) are communicated with the communication holes (2), the other ends of the filling holes (3) penetrate through the base (1) to be communicated with the outside, the ceramic pressure-bearing membranes (5) are matched and arranged on two sides of the base (1), and the ceramic pressure-bearing membranes (5) are sealed with the pressure chambers (4);
The ceramic single-cavity capacitive differential pressure sensor is manufactured by the following steps:
Firstly, preparing a base (1);
Step S1, adding 1000 parts of alumina powder, 2-5 parts of dispersing agent and 200-300 parts of deionized water into a ball mill for ball milling for 2-4 hours, discharging by a 120-150 mesh screen after ball milling, placing into a vacuumizing device, vacuumizing for 30-60 minutes by 0.06-0.1 megapascal, and transferring into a stirring tank for continuous stirring for 0.5-1 hour to prepare mixed slurry;
S2, taking out the mixed slurry, placing the mixed slurry into a measuring cup, pouring the mixed slurry into a cylindrical mold, placing the mold and the ceramic slurry in the mold into a baking oven at 40-60 ℃ for standing for 1-3 hours, and forming a gel-like green body by the ceramic;
S3, drying the blank for 24-72 hours, placing the dried blank in an electric furnace, sintering, arranging communication holes (2) at the circle center positions of the surfaces of the two sides of the cylinder base after sintering, arranging filling holes (3) at the center positions of the upper surfaces of the top ends of the base, and communicating the filling holes (3) with the communication holes (2); polishing to obtain a base (1);
secondly, preparing a ceramic compression membrane (5);
Preparing slurry according to the step S1 and the step S2, pouring the slurry into a circular mold, placing the mold and the ceramic slurry in the mold into a baking oven at 40-60 ℃ for standing for 1-2 hours to form a wafer-shaped gel blank with the thickness of 2-3mm, drying for 24-48 hours, placing the wafer-shaped gel blank into an electric furnace for sintering, processing the wafer-shaped gel blank into a circular sheet with the thickness of 0.5-1mm, and polishing to obtain a ceramic pressed film (5);
Thirdly, preparing a pressure chamber (4);
Processing two sides of the base (1) into parabolic concave surfaces, coating a layer of silver paste on the bottoms of the concave surfaces in a screen printing mode, and forming a circle with the radius r; the middle position of the inner side of the ceramic pressed diaphragm (5) except the periphery is coated with a layer of silver paste in a screen printing mode to form a circle, and the radius is R, R > R; extending and smearing silver paste to the periphery at an inner side A point; coating dot-shaped silver paste on the outer side of the base close to the point A of the pressed membrane (5); controlling the thickness of silver paste to be less than 0.1mm; simultaneously, a layer of silver paste is uniformly smeared on the inner walls of the communication hole (2) and the filling hole (3); transferring the base and the membrane into an oven, drying for 8min at 120-150 ℃, transferring into an electric furnace, sintering for 30-60min at 500-850 ℃, and solidifying the silver paste to form a silver film; then, a circle of high-temperature adhesive with the width of about 2mm and the thickness of 1mm is coated on the periphery of the inner side of the ceramic pressed film (5), two pieces of ceramic pressed film (5) are respectively adhered on the two sides of the base (1), then, the ceramic pressed film is transferred into an electric furnace, and sintered for 30-60min at 500-700 ℃, and a pressure chamber (4) is formed by the parabolic concave surfaces on the two sides of the base (1) and the ceramic pressed film (5);
Welding metal wires at the A point of the compression diaphragms (5) at the two sides, welding the metal wires at the outer sides of the filling holes (3) respectively serving as leads of the sensor, and connecting the leads to a measuring module of the transmitter;
Fifthly, filling;
and (3) filling the insulating fluid material through a filling hole (3) in a vacuum environment, entering a pressure chamber (4) through the filling hole (3) and a communication hole (2), and blocking the filling hole (3) by using strong adhesive after filling is finished to prepare the ceramic single-cavity capacitive differential pressure sensor.
2. The ceramic single-cavity capacitive differential pressure sensor of claim 1, wherein: in the step S3 in the first step, controlling the muffle furnace to heat up to 350-400 ℃ at the room temperature at the speed of 0.5-2 ℃/min, preserving heat for 4-10h, heating up to 1100-1200 ℃ at the speed of 0.5-2 ℃/min, preserving heat for 4-10h, heating up to 1600 ℃ at the speed of 0.5-2 ℃/min, preserving heat for 6-20h, and finally cooling down to the room temperature at the speed of 0.5-2 ℃/min; in the second step, the muffle furnace is controlled to be heated to 350-400 ℃ at the room temperature at the speed of 0.5-2 ℃/min, the temperature is kept for 4-6h, the temperature is heated to 1100-1200 ℃ at the speed of 0.5-2 ℃/min, the temperature is kept for 4-6h, the temperature is further heated to 1600 ℃ at the speed of 0.5-2 ℃/min, the temperature is kept for 6-10h, and finally the temperature is reduced to the room temperature at the speed of 0.5-2 ℃/min.
3. The ceramic single-cavity capacitive differential pressure sensor of claim 1, wherein: in the step S2 in the first step, the dosage ratio of the mixed slurry, the dispersing agent and the deionized water is controlled to be 1000 g:2-5 g:200-300g.
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| US4829826A (en) * | 1987-05-07 | 1989-05-16 | Fischer & Porter Company | Differential-pressure transducer |
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| CN1123764C (en) * | 2000-07-15 | 2003-10-08 | 山东省硅酸盐研究设计院 | Ceramic pressure sensor and differential pressure sensor |
| DE102007026243A1 (en) * | 2007-06-04 | 2008-12-11 | Endress + Hauser Gmbh + Co. Kg | Capacitive pressure sensor |
| CN102323004A (en) * | 2011-06-01 | 2012-01-18 | 合肥望远电子科技有限公司 | A kind of switching value differential pressure pick-up |
| CN103435357B (en) * | 2013-08-15 | 2014-11-26 | 中国科学院新疆理化技术研究所 | Preparation method for support-free micronscale ultrathin ceramic chip |
| CN108735707B (en) * | 2018-04-18 | 2020-11-06 | 华为技术有限公司 | Ceramic substrate, preparation method of ceramic substrate and power module |
| CN108689711A (en) * | 2018-06-13 | 2018-10-23 | 合肥工业大学 | A kind of thermostable type sodium niobate based leadless piezoelectric ceramics and preparation method thereof |
| CN209416128U (en) * | 2018-11-24 | 2019-09-20 | 上海恒脉陶瓷技术有限公司 | A kind of efficient micropore ceramics heat storage body structure of crystal cellular type |
| CN110057486B (en) * | 2019-04-15 | 2020-12-18 | 绍兴文理学院元培学院 | Preparation process of ceramic thick film pressure sensor |
| CN110220636B (en) * | 2019-07-05 | 2020-12-15 | 中国计量大学 | Capillary communicating pipe type differential pressure sensor and measuring method |
| JP2021092489A (en) * | 2019-12-12 | 2021-06-17 | アズビル株式会社 | Differential pressure measuring device |
| CN114894371A (en) * | 2022-05-09 | 2022-08-12 | 厦门乃尔电子有限公司 | Differential pressure core |
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| US4829826A (en) * | 1987-05-07 | 1989-05-16 | Fischer & Porter Company | Differential-pressure transducer |
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