CN1123764C - Ceramic pressure sensor and differential pressure sensor - Google Patents
Ceramic pressure sensor and differential pressure sensor Download PDFInfo
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- CN1123764C CN1123764C CN 00111213 CN00111213A CN1123764C CN 1123764 C CN1123764 C CN 1123764C CN 00111213 CN00111213 CN 00111213 CN 00111213 A CN00111213 A CN 00111213A CN 1123764 C CN1123764 C CN 1123764C
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Abstract
The present invention relates to a ceramic pressure sensor and differential pressure sensor. A base and a diaphragm are made of a homogeneous ceramic material. The base is provided with venting holes. The base is provided with an electrode which is coated with an insulating layer made of an inorganic material on a position corresponding to the diaphragm, and the diaphragm is also provided with an electrode which is coated with an insulating layer made of the inorganic material on a position corresponding to the base. The base and the diaphragm are respectively provided with a circle of boss made of the inorganic material at the periphery. A sealing glass layer is used for sealing a gap between the corresponding faces of the two bosses. Each electrode adopts a metal film, and a leader line for each electrode is led out from a small metallized hole on the base or from the inner of a metallized slot on one side wall of the base and is connected with a special treating circuit on the base. The present invention has the advantages of small creepage, high reaction speed, good temperature stability, corrosion resistance, tamper resistance, overload resistance and high precision.
Description
The invention belongs to the pressure detection technical field, particularly a kind of ceramic pressure sensor and differential pressure pick-up.
The sensor that is used for detected pressures in the prior art mainly contains the pressure transducer of forms such as resistance-strain chip, silicon diffusion chip, piezoelectric type, inductance type, condenser type.These sensors cut both ways, and their shortcoming mainly contains linear poor, poor repeatability, and hysteresis, creep are serious, and reaction velocity is slow, and temperature stability is bad, and shock resistance, anti-overvoltage capabilities are poor; Or measurement range is little; Or the temperature and time less stable, and volume is bigger.
At present existing several improvement projects, for example, ZL87209178 discloses a kind of high temperature resistant shock type capacitive pressure transducer, comprise a pedestal and a diaphragm of making by 95 alumina ceramic materials of making by 75 alumina ceramic materials, pedestal and diaphragm prepare a pair of silver electrode respectively, separate with mica sheet between said base and the diaphragm and be fixed together and form a dielectric cavity, constitute pressure transducer with lead glass.
US4388668 discloses a kind of capacitive pressure transducer, comprise a pedestal and a diaphragm of making by stupalith, pedestal and diaphragm prepare a metal electrode respectively, separate and formation one dielectric cavity that is fixed together with glass barrier layer between said base and the diaphragm, constitute pressure transducer.
US4531415 discloses a kind of capacitor differential pressure transducer, comprise a pedestal and two diaphragms of making by stupalith, the one side of pedestal two sides and diaphragm prepares a metal electrode respectively, separate and two dielectric cavity of formation that are fixed together with glass barrier layer between said base and the diaphragm, constitute differential pressure pick-up.
Chinese patent application 95103518.5 discloses a kind of capacitive pressure transducer or differential pressure pick-up, and above-mentioned United States Patent (USP) is improved, and has covered one deck high temp glass insulation course and prevent electric pole short circuit on the electrode of base of ceramic.
There is following deficiency in ZL87209178:
1. the material thermal expansion coefficient of pedestal and diaphragm is inconsistent, is difficult to guarantee the reliability and the measuring stability of sensor sealing-in;
Silver electrode surface coarse, be difficult to form the smooth electrode layer of surfacing, bring difficulty for back operation processing, cause electric pole short circuit easily, and the easy oxidation of silver electrode, not corrosion-resistant, be difficult at its surface coverage inorganic insulating material.
3. come the control capacitance gap that certain technology difficulty is arranged with mica sheet.
Chinese patent application 95103518.5 disclosed capacitive pressure transducers owing to be perimeter support disc structure single capacitor, fail to solve when big pressure, owing to edge effect, and existence bigger non-linear; Not tape handling of sensor circuit itself is because the influence of distributed capacitance is difficult to remote use; Pedestal is not with vent port, and internal gas and volatile matter are at high temperature difficult during sealing gets rid of, thereby sealing-in is of low quality.
Chinese patent application 95103518.5 disclosed capacitive pressure transducer or differential pressure pick-ups adopt the separation layer that increases with a kind of pristine glass materials processing insulation course and its marginal layer thickness, and the technology of heated sealant, difficult control.But the modified of above-mentioned pressure transducer and differential pressure pickup adds the insulation course of one deck with the grinding of pottery or high temp glass preparation in addition, and prepare the method for separation layer thereon, except that having increased dielectric thickness sensor capacitance is diminished, increased outside the difficulty of processing, it has little significance.
It is little to the purpose of this invention is to provide a kind of creep, and reaction velocity is fast, and temperature stability is good, and is corrosion-resistant, anti-interference and overload-resistant, ceramic pressure sensor that precision is high and differential pressure pick-up.
Concrete technical scheme is a kind of ceramic pressure sensor of design, comprise the combination of pedestal, diaphragm and be separately positioned on pedestal and diaphragm on electrode, the combination that it is characterized in that pedestal and diaphragm is used with the toughness reinforcing microcrystalline alumina ceramic making of a kind of stupalith, air hole is set on the pedestal, on pedestal and the diaphragm corresponding surface conductive gold membrane electrode is set respectively, electrode surface covers the insulation course of plumbous boron-silicon-aluminum glass, and electrode outlet line is connected with dedicated processes circuit on being positioned at pedestal; The periphery of base of ceramic and diaphragm all is provided with a circle boss with plumbous boron-silicon-aluminum glass, and with the sealing of seal glass layer, electrode is drawn in the metallization aperture from the pedestal or the metallization trench on the pedestal sidewall respectively in the middle of the corresponding surface of boss.
Above-mentioned ceramic pressure sensor, the combination of its pedestal and diaphragm are the combinations of a pedestal and a slice diaphragm, or the combination of a pedestal and two diaphragms;
Above-mentioned ceramic pressure sensor, in the combination of an one pedestal and two diaphragms, the centre of pedestal has at least an aperture to be communicated with two dielectric cavity, one of them hole is communicated with the vent port of side, pedestal two parallel surfaces corresponding with diaphragm placed in the middle are provided with bipolar electrode respectively, on the diaphragm face corresponding single electrode is set with pedestal, electrode surface covers the insulation course of plumbous boron-silicon-aluminum glass, the periphery of base of ceramic and diaphragm respectively is provided with a circle boss with plumbous boron-silicon-aluminum glass respectively, be sealed into two dielectric cavity with the seal glass layer in the middle of the corresponding surface of boss, constitute two groups of four capacitors, electrode outlet line is connected with dedicated processes circuit on being positioned at pedestal;
Above-mentioned ceramic pressure sensor, it is characterized in that in the combination of a pedestal and two diaphragms, the centre of pedestal has at least an aperture to be communicated with two dielectric cavity, one of them hole is communicated with the vent port of side, pedestal two parallel surfaces corresponding with diaphragm placed in the middle are provided with bipolar electrode respectively, on the diaphragm face corresponding single electrode is set with pedestal, electrode surface covers the insulation course of plumbous boron-silicon-aluminum glass, the periphery of base of ceramic and diaphragm respectively is provided with a circle boss with plumbous boron-silicon-aluminum glass respectively, be sealed into two dielectric cavity with the seal glass layer in the middle of the corresponding surface of boss, constitute two groups of four capacitors, electrode outlet line is connected with dedicated processes circuit on being positioned at pedestal;
Design a kind of ceramic differential pressure pick-up, comprise pedestal, diaphragm and the electrode that is separately positioned on pedestal and the diaphragm, it is characterized in that pedestal and diaphragm use with a kind of ceramic material, at the pedestal center a plurality of apertures are arranged, one of them hole is communicated with the vent port of side, two parallel surfaces that pedestal placed in the middle is corresponding with diaphragm are provided with single electrode respectively, on two diaphragms face corresponding single electrode is set respectively with pedestal, electrode surface covers the insulation course of inorganic material, the periphery of base of ceramic and diaphragm respectively is provided with a circle boss with inorganic material respectively, is sealed into two dielectric cavity with the seal glass layer in the middle of the corresponding surface of boss, the electrode metallization trench from the pedestal sidewall is respectively drawn.
Above-mentioned ceramic pressure sensor and differential pressure pick-up, the dedicated processes circuit on it is characterized in that electrode outlet line and being positioned at pedestal is connected;
Above-mentioned ceramic pressure sensor and differential pressure pick-up is characterized in that equal filling silicone oil in two dielectric cavity.The ceramic differential pressure pick-up of stating, the equal filling silicone oil of two dielectric cavity.
The present invention compared with prior art has:
1. adopt toughness reinforcing microcrystalline alumina pottery to make pressure transducer, solved low, the rough surface of common aluminium oxide ceramics strength, be not suitable for the problem of pressure transducer processing, because the raising of stupalith toughness, the mechanics susceptibility of diaphragm greatly improves, sensor adopts non-topping up dry design, and the machining precision of sensor is improved greatly, and creep properties improves greatly;
2. sensor base and diaphragm all adopt with a kind of ceramic material, dielectric film, dielectric cavity boss, encapsulant are all selected the different material close with the ceramic body thermal expansivity for use, and adopt different technology manufacturings, solved the problem that sealing-in is of poor quality, thermal stability is bad of ceramic pressure sensor; Sensor medium of the present invention chamber thickness is lower than 100 μ m, thereby shock resistance, anti-overvoltage capabilities are stronger;
3. employing gold film electrode has solved the problem of very easily oxidation of sensor electrical, corrosion-resistant;
4. adopt two electric capacity corrections and circuit modifications two-step scheme, solved pressure transducer because the non-linear big problem that edge effect causes;
5. increase by a blow vent to pressure transducer, improved the sealing-in quality; And the Transform Type design that adds the mouth of pipe is arranged, make it be suitable for measuring (for example noncorrosive gases) measurement pressure reduction use under relative pressure and some certain conditions;
6. pressure transducer adopts two diaphragm Transform Type design, makes it be suitable for measuring minute-pressure;
7. for pressure transducer has been equipped with incorporate treatment circuit, this circuit has functions such as conversion of signals, amplification, temperature compensation, linear correction, range adjusting at zero point simultaneously.With pressure-dependent measurement electric capacity with change voltage, current signal into reference to the difference signal of electric capacity after export, antijamming capability is strong, can long-distance transmissions;
8. two diaphragm designs of differential pressure pick-up can be measured pressure reduction under high static pressure;
9. the single-iris Transform Type design of differential pressure pick-up adopts non-topping up dry design, and volume dwindles greatly, stability is obviously improved.
The present invention is further elaborated below in conjunction with drawings and Examples:
Fig. 1 is the structural representation of a kind of ceramic pressure sensor shown in the one embodiment of the invention;
Fig. 2 is that the electrode among Fig. 1 is arranged the form example schematic on pedestal;
Fig. 3 is that the electrode among Fig. 1 is arranged the form example schematic on diaphragm;
Fig. 4 is a kind of structural representation of ceramic pressure sensor with the ventilation mouth of pipe shown in another embodiment;
Fig. 5 is that the electrode among Fig. 4 is arranged the form example schematic on pedestal;
Fig. 6 is a kind of structural representation of measuring the ceramic pressure sensor of minute-pressure shown in another embodiment;
Fig. 7 is the structural representation of a kind of pair of diaphragm pottery differential pressure pick-up shown in another embodiment;
Fig. 8 is the structural representation of a kind of single-iris pottery differential pressure pick-up shown in another embodiment.
Ceramic pressure sensor comprises a pedestal 1 and a slice diaphragm 2 among embodiment one embodiment shown in Figure 1, they are all used with a kind of stupalith manufacturing, electrode on the pedestal is a bipolar electrode 3,4, electrode on the diaphragm is a single electrode 5, electrode is all used golden conductive film manufacturing, electrode 3,4 and 5 the top inorganic material insulation course 6 and 6 ' that covers respectively, the periphery of base of ceramic 1 and diaphragm 2 is respectively with inorganic material preparation one circle boss 7 and 7 ', described inorganic material is used the boron aluminosilicate glass, the centre is sealed into a dielectric cavity with seal glass layer 8, constitutes one group of electric capacity.Electrode 3,4 and 5 respectively from the pedestal 1 metallized aperture 9 draw, exhaust when having a vent port 10 to be used to seal in the behind of pedestal 1, pressure acts on the diaphragm, changing capacitance with pressure changes, aperture can be used as the through hole of environmental pressure when measuring relative pressure, this aperture can be shut under vacuum when measuring absolute pressure.
The electric capacity quantitative change of capacitor is big when pressure strengthens, and is to export behind voltage, the current signal with the electric capacity conversion of signals.Sensor antijamming capability after signal Processing and stability all improve greatly, can directly adorn the sampling of shell long-distance transmissions, measure.
Sensor base and diaphragm adopt with a kind of ceramic material, and the physical strength height, elastic modulus is big, the microscopic crystalline granularity is tiny evenly;
Electrode adopts that film forming is continuous, rete is moist, combine the fastness height with ceramic body, conduct electricity good gold electrode material preparation, can solve the problem of the easy oxidation of electrode, corrosion-resistant difference.
Pressure transducer adopts two capacitor design, and two electric capacity direct capacitance amounts equate, can reduce Temperature Influence, and simultaneously, one electric capacity changes with pressure for measuring electric capacity; Another electric capacity is for to change slightly with pressure with reference to electric capacity, and the amount of nonlinearity variable quantity of measuring electric capacity is got its difference signal and carried out the linear correction of two-stage by treatment circuit with close with reference to the total variation of electric capacity.
Dielectric film also should be high temperature resistant except that must insulating, and can adopt vacuum sputtering, vapour deposition, high temperature sintering inorganic material film to make.
The size of dielectric cavity boss decision electric capacity and the stability of sensor, must adopt the zero-g hysteresis made close with sensor ceramic body thermal expansivity, sensor medium of the present invention chamber thickness is lower than 100 μ m, thereby shock resistance, anti-overvoltage capabilities are higher;
Because of sensor system adopts the seal glass sealing, the discharge for gas and volatile matter in the assurance sealing-in process is provided with an aperture on the pedestal, and this aperture can be used as the environment through hole when measuring relative pressure, this aperture can be shut under vacuum when measuring absolute pressure.
The present invention combines the treatment circuit of a special use and sensor, this circuit can adopt the charging/discharging type circuit, also can adopt the pulse-width-modulating type circuit, with pressure-dependent measurement electric capacity with change voltage, current signal into reference to the difference signal of electric capacity after export.This circuit has functions such as conversion of signals, amplification, temperature compensation, linear correction, range adjusting at zero point simultaneously.
Among embodiment two embodiment shown in Figure 4, basic and the example of the situation that is provided with together, but electrode 3,4 and 5 is drawn from the groove 9 of pedestal 1 side metalization respectively, exhaust when having a mouth of pipe 10 to be used to seal in the behind of pedestal 1, pressure acts on the diaphragm, changing capacitance with pressure changes, export after capacitance signal is converted to voltage signal with treatment circuit 11, the through hole of the environmental pressure that aperture can be used as when measuring relative pressure, (for example noncorrosive gases) can measure differential pressure under some certain conditions.Described inorganic material is used plumbous sial glass.
Exhaust hole on the base of ceramic can be changed into the macropore or the mouth of pipe of reducing, the introducing of the environmental pressure when being convenient for measuring relative pressure.
Among embodiment three embodiment shown in Figure 6, basic and the example of the situation that is provided with together, but be sealed into two cavitys with the seal glass layer between pedestal and diaphragm, constitute two groups of four capacitors, the measurement electric capacity parallel connection of two groups of electric capacity, also in parallel with reference to electric capacity, electrode respectively from pedestal 1 side metallized groove draw, have at least an intercommunicating pore 11 to be used to be communicated with two cavitys in the centre of pedestal 1, one of them intercommunicating pore is communicated with the unified vent port 10 of side, exhaust when being used to seal, during use it is packed into sealing ring 12 and shell 13, on 14, pressure is applied on two diaphragms 2 and 2 ' simultaneously by connecting pipe 15, changes capacitance with pressure and changes, and can be used to measure minute-pressure power.Described inorganic material is used silicon boron lead glass.
The base of ceramic two sides respectively can be prepared last two pairs of electrodes, prepare dielectric film, boss by above-mentioned technology then, seal two diaphragms that prepare equally simultaneously, the measurement electric capacity parallel connection of two groups of electric capacity, also in parallel with reference to electric capacity, same air hole is on the sidewall of base of ceramic, during use pressure is applied on two diaphragms simultaneously, can be used to measure minute-pressure power.
Ceramic differential pressure pick-up comprises a pedestal 1 and two diaphragms 2 among embodiment four embodiment shown in Figure 7,2 ' they all use same stupalith manufacturing, two sides on the pedestal makes electrode 3 and electrode 4 respectively, electrode on two diaphragms is respectively an electrode 5 and 5 ', electrode is all used golden conductive film manufacturing, electrode 3,4 and 5,5 ' the top inorganic material insulation course 6 and 6 ' that covers respectively, the periphery on base of ceramic 1 two sides and the periphery of two diaphragms 2 are respectively with inorganic material preparation one circle boss 7 and 7 ', described inorganic material is used the boron aluminosilicate glass, the centre is sealed into two cavitys with seal glass layer 8 and 8 ', forms two electric capacity.Electrode 3,4 and 5,5 ' is drawn with metallized groove on the pedestal 1 respectively, have an intercommunicating pore 11 at least at the center of pedestal 1, one of them hole is communicated with exhaust when being used to seal with the vent port 10 of side, after sealing is finished, shut then from this aperture filling silicone oil.One of them diaphragm contact high pressure during measurement, another diaphragm contact low-pressure, silicone oil is as the pressure conductive medium, when the pressure on two diaphragm both sides not simultaneously, one side condenser capacitance quantitative change that pressure is big is big, one side condenser capacity that pressure is little diminishes, and has constituted a kind of ceramic differential pressure pick-up, can draw pressure difference signal with the difference signal of sensor capacitance is treated.
This ceramic capacitor-type differential pressure pick-up adopts with ceramic pressure sensor identical materials and technology and processes, air hole and intercommunicating pore filling silicone oil in two dielectric cavity by sidewall, forming two is the capacitor of medium with silicone oil, silicone oil is again the conductive medium of power simultaneously, when the pressure on the both sides of two diaphragms not simultaneously, one side condenser capacitance quantitative change that pressure is big is big, one side condenser capacity that pressure is little diminishes, constitute a kind of ceramic capacitor-type differential pressure pick-up, can draw pressure difference signal with the difference signal of sensor capacitance is treated.
Among embodiment five embodiment shown in Figure 8, the pottery differential pressure pick-up comprises a slice diaphragm 2 and two pedestals 1,1 ', they are all used with a kind of stupalith manufacturing, one side on two pedestals is made electrode 5 and electrode 5 ' respectively, the two sides of a slice diaphragm makes electrode 3 and 3 ' respectively, electrode is all used golden conductive film manufacturing, electrode 3,3 ' and 5,5 ' the top inorganic material insulation course 6 and 6 ' that covers respectively, two base of ceramic 1, the periphery on the two sides of the periphery of 1 ' one side and a slice diaphragm 2 is respectively with inorganic material preparation one circle boss 7,7 ', described inorganic material is used plumbous sial glass, middle with seal glass layer 8,8 ' is sealed into two cavitys, forms two electric capacity.Electrode 3,3 ' and 5,5 ' respectively from the pedestal metallized groove draw, at the center of two pedestals aperture 11 is set, 11 ', exhaust when being used to seal, after sealing is finished, this aperture is simultaneously as the pressure signal input port, one of them diaphragm contact high pressure during measurement, another diaphragm contact low-pressure, without silicone oil as the pressure conductive medium, when the pressure on the both sides of two diaphragms not simultaneously, one side condenser capacitance quantitative change that pressure is big is big, one side condenser capacity that pressure is little diminishes, constitute a kind of ceramic differential pressure pick-up, can draw pressure difference signal with the difference signal of sensor capacitance is treated.This sensor also can use after recharging silicone oil after the barrier film seal.
This ceramic capacitor-type differential pressure pick-up adopts with ceramic pressure sensor identical materials and technology and processes, not filling silicone oil in two dielectric cavity, forming two is the capacitor of medium with measured medium, when the pressure on two diaphragm both sides not simultaneously, one side condenser capacitance quantitative change that pressure is big is big, one side condenser capacity that pressure is little diminishes, and has constituted a kind of ceramic capacitor-type differential pressure pick-up, with the treated pressure difference signal that draws of the difference signal of sensor capacitance.But this differential pressure pick-up is energy measurement conducting medium and Korrosionsmedium not, and must demarcate at carrying out the different measuring medium.This sensor uses after also can recharging silicone oil by barrier film seal.
Claims (7)
1. ceramic pressure sensor, comprise the combination of pedestal, diaphragm and be separately positioned on pedestal and diaphragm on electrode, the combination that it is characterized in that pedestal and diaphragm is used with the toughness reinforcing microcrystalline alumina ceramic making of a kind of stupalith, air hole is set on the pedestal, on pedestal and the diaphragm corresponding surface conductive gold membrane electrode is set respectively, electrode surface covers the insulation course of plumbous boron-silicon-aluminum glass, and electrode outlet line is connected with dedicated processes circuit on being positioned at pedestal; The periphery of base of ceramic and diaphragm all is provided with a circle boss with plumbous boron-silicon-aluminum glass, and with the sealing of seal glass layer, electrode is drawn in the metallization aperture from the pedestal or the metallization trench on the pedestal sidewall respectively in the middle of the corresponding surface of boss.
2. one kind according to the described ceramic pressure sensor of claim 1, and the combination that it is characterized in that pedestal and diaphragm is the combination of a pedestal and a slice diaphragm, or the combination of a pedestal and two diaphragms.
3. one kind according to the described ceramic pressure sensor of claim 1, it is characterized in that in the combination of a pedestal and two diaphragms, the centre of pedestal has at least an aperture to be communicated with two dielectric cavity, one of them hole is communicated with the vent port of side, pedestal two parallel surfaces corresponding with diaphragm placed in the middle are provided with bipolar electrode respectively, on the diaphragm face corresponding single electrode is set with pedestal, electrode surface covers the insulation course of plumbous boron-silicon-aluminum glass, the periphery of base of ceramic and diaphragm respectively is provided with a circle boss with plumbous boron-silicon-aluminum glass respectively, be sealed into two dielectric cavity with the seal glass layer in the middle of the corresponding surface of boss, constitute two groups of four capacitors, electrode outlet line is connected with dedicated processes circuit on being positioned at pedestal.
4. ceramic pressure sensor, comprise pedestal, diaphragm and the electrode that is separately positioned on pedestal and the diaphragm, it is characterized in that in the combination of a pedestal and two diaphragms, the centre of pedestal has at least an aperture to be communicated with two dielectric cavity, one of them hole is communicated with the vent port of side, pedestal two parallel surfaces corresponding with diaphragm placed in the middle are provided with bipolar electrode respectively, on the diaphragm face corresponding single electrode is set with pedestal, electrode surface covers the insulation course of plumbous boron-silicon-aluminum glass, the periphery of base of ceramic and diaphragm respectively is provided with a circle boss with plumbous boron-silicon-aluminum glass respectively, be sealed into two dielectric cavity with the seal glass layer in the middle of the corresponding surface of boss, constitute two groups of four capacitors, electrode outlet line is connected with dedicated processes circuit on being positioned at pedestal.
5. ceramic differential pressure pick-up, comprise pedestal, diaphragm and the electrode that is separately positioned on pedestal and the diaphragm, it is characterized in that pedestal and diaphragm use with the toughness reinforcing microcrystalline alumina ceramic making of a kind of stupalith, the aperture that a double as ventilation and pressure signal input port are at least respectively arranged at two pedestal centers, on two pedestals face corresponding single electrode is set with diaphragm, on the face corresponding of a slice diaphragm two sides placed in the middle single electrode is set respectively with pedestal, electrode adopts conductive gold film material, electrode surface covers the insulation course of plumbous boron-silicon-aluminum glass, the periphery of base of ceramic and diaphragm respectively is provided with a circle boss with plumbous boron-silicon-aluminum glass respectively, is sealed into two dielectric cavity with the seal glass layer in the middle of the corresponding surface of boss, the electrode metallization trench from the pedestal sidewall is respectively drawn.
6. one kind according to claim 4 or 5 described ceramic pressure sensor and differential pressure pick-ups, and the dedicated processes circuit on it is characterized in that electrode outlet line and being positioned at pedestal is connected.
7. one kind according to claim 4 or 5 described ceramic pressure sensor and differential pressure pick-ups, it is characterized in that in two dielectric cavity all filling silicone oil.
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| CN 00111213 CN1123764C (en) | 2000-07-15 | 2000-07-15 | Ceramic pressure sensor and differential pressure sensor |
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| CN 00111213 CN1123764C (en) | 2000-07-15 | 2000-07-15 | Ceramic pressure sensor and differential pressure sensor |
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Families Citing this family (18)
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| CN100442036C (en) * | 2006-04-28 | 2008-12-10 | 中国科学院合肥物质科学研究院 | Preparation method of double capacitance thick film ceramic pressure element |
| ES2414230T5 (en) * | 2010-12-07 | 2016-03-08 | Vega Grieshaber Kg | Pressure measuring cell |
| CN102156011B (en) * | 2011-04-09 | 2013-07-03 | 刘喜元 | Anchored prestress testing piece |
| CN102980564B (en) * | 2012-12-17 | 2014-12-24 | 北京理工大学 | Device for measuring oscillation mode of harmonic oscillator of bell-shaped oscillator type angle rate gyroscope |
| DE102014201529A1 (en) | 2014-01-28 | 2015-07-30 | Siemens Aktiengesellschaft | Method for operating a pressure transmitter and pressure transmitter |
| CN104458065A (en) * | 2014-11-19 | 2015-03-25 | 中国电子科技集团公司第四十八研究所 | Gauge pressure sensitive core |
| JP6703850B2 (en) * | 2016-02-16 | 2020-06-03 | 株式会社不二工機 | Pressure detection unit and pressure sensor using the same |
| CN105784212B (en) * | 2016-03-25 | 2018-09-21 | 深圳安培龙科技股份有限公司 | A kind of ceramic capacitive pressure sensor and preparation method |
| WO2018049633A1 (en) * | 2016-09-14 | 2018-03-22 | 深圳市汇顶科技股份有限公司 | Pressure detection device, pressure detection method, and electronic terminal |
| CN107845560A (en) * | 2016-09-19 | 2018-03-27 | 中国科学院微电子研究所 | A kind of high-precision vacuum gauge |
| CN107843384A (en) * | 2016-09-19 | 2018-03-27 | 中国科学院微电子研究所 | A kind of quartz thin film piece vacuum gauge |
| CN107843772A (en) * | 2016-09-19 | 2018-03-27 | 中国科学院微电子研究所 | A kind of sensitivity enhancement vacuum gauge group |
| US10724907B2 (en) * | 2017-07-12 | 2020-07-28 | Sensata Technologies, Inc. | Pressure sensor element with glass barrier material configured for increased capacitive response |
| CN107389229A (en) * | 2017-07-17 | 2017-11-24 | 合肥皖科智能技术有限公司 | A kind of ceramic capacitive pressure sensors |
| CN107588870A (en) * | 2017-09-01 | 2018-01-16 | 襄阳臻芯传感科技有限公司 | A kind of anti-medium sensitive ceramic capacitive pressure sensors and its manufacture method |
| IT201800001092A1 (en) * | 2018-01-16 | 2019-07-16 | St Microelectronics Srl | MICROELECTROMECHANICAL PIEZORESISTIVE PRESSURE SENSOR WITH SELF-DIAGNOSTIC CAPACITY AND RELATED MANUFACTURING PROCESS |
| CN111060231B (en) * | 2019-12-31 | 2021-12-21 | 捷普电子(新加坡)公司 | Capacitive pressure sensor and method for manufacturing the same |
| CN116625568B (en) * | 2023-07-26 | 2023-11-10 | 深圳市长天智能有限公司 | High-range integrated capacitive pressure sensor |
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