CN113483828A - Double-piece ceramic warm-pressing core body and preparation method thereof - Google Patents

Double-piece ceramic warm-pressing core body and preparation method thereof Download PDF

Info

Publication number
CN113483828A
CN113483828A CN202110920747.9A CN202110920747A CN113483828A CN 113483828 A CN113483828 A CN 113483828A CN 202110920747 A CN202110920747 A CN 202110920747A CN 113483828 A CN113483828 A CN 113483828A
Authority
CN
China
Prior art keywords
electrode
core body
base
shielding
shielding electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110920747.9A
Other languages
Chinese (zh)
Inventor
秦迪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Judesou Technology Co Ltd
Original Assignee
Shenzhen Judesou Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Judesou Technology Co Ltd filed Critical Shenzhen Judesou Technology Co Ltd
Priority to CN202110920747.9A priority Critical patent/CN113483828A/en
Publication of CN113483828A publication Critical patent/CN113483828A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00Measuring or testing not otherwise provided for
    • G01D21/02Measuring two or more variables by means not covered by a single other subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable

Abstract

A double-piece ceramic warm-pressing core body comprises a base, an elastic diaphragm, an electrode, a shielding electrode and a glass pressure-sensing surface; the shielding electrode is arranged around the electrode, the electrode and the shielding electrode are arranged in a closed space formed by the base and the elastic membrane, and the glass pressure-sensitive surface is printed on the base; the core body is in a round cake shape, and a fan ring notch is formed in one side of the core body. According to the invention, by optimizing the structure and design of the traditional warm-pressing ceramic core body on the market at present, the NTC temperature signal can be directly transmitted to the PCB for data integration, the core body is not transmitted, whether the NTC is firmly connected with the core body or not is not required to be considered when the finished product is assembled, the assembling efficiency and the one-time passing rate are directly improved, and the finished product is more reliable in follow-up and use.

Description

Double-piece ceramic warm-pressing core body and preparation method thereof
Technical Field
The invention belongs to the technical field of pressure sensors, and particularly relates to a preparation method of a double-piece ceramic warm pressing core body.
Background
The pressure sensor is the most common sensor in industrial practice, is widely applied to various industrial automatic control environments, and relates to a plurality of industries such as water conservancy and hydropower, railway traffic, intelligent buildings, production automatic control, aerospace, military industry, petrochemical industry, oil wells, electric power, ships, machine tools, pipelines and the like. The pressure sensor is the most widely used sensor, and the traditional pressure sensor mainly uses a mechanical structure type device, and indicates pressure by deformation of an elastic element, but the structure is large in size and heavy in weight, and cannot provide electrical output. With the development of semiconductor technology, semiconductor pressure sensors have come into play, and are characterized by small volume, light weight, high accuracy and good temperature characteristics, and particularly with the development of MEMS technology, the semiconductor pressure sensors develop towards miniaturization, and have low power consumption and high reliability.
The pressure-capacitance core body is used as a high-performance pressure sensitive element of the pressure sensor, adopts an integrated structure, has high static pressure resistance value, is stable and reliable, and is gradually widely used. With the rise of various pressure sensors, the all-in-one sensor is gradually occupying the market by virtue of the composite function thereof, wherein the demand of the temperature and the core component temperature and pressure core body of the pressure sensor is more and more increased.
At present, the ceramic capacitor warm-pressing core body produced by most manufacturers is of a circular five-pin needle structure, the core body can be provided with two small holes on the elastic diaphragm, and the two small holes have the function of communicating with the NTC through printing conductive slurry on the thick sheet, so that the temperature signal is transmitted to the PCB for data integration. However, since the NTC and the PCB are not directly connected, there is uncertainty in the assembly process and subsequent reliability using this type of core.
Therefore, the ceramic capacitor warm-pressing core body with high assembly efficiency and high one-time pass rate and the preparation method thereof are problems to be solved urgently by the technical personnel in the field.
Disclosure of Invention
In view of the above, the invention provides a double-piece ceramic warm-pressing core body and a preparation method thereof, and the invention optimizes the structure and design of the traditional warm-pressing ceramic core body on the market at present, so that the NTC temperature signal can be directly transmitted to the PCB for data integration, and the NTC temperature signal is not transmitted by the core body, whether the NTC is firmly connected with the core body or not is not required to be considered during the assembly of the finished product, the assembly efficiency and the one-time passing rate are directly improved, and the finished product is more reliable in the follow-up and use processes.
In order to achieve the purpose, the invention adopts the following technical scheme:
a double-sheet ceramic warm-pressing core body is characterized by comprising a base, an elastic diaphragm, an electrode, a shielding electrode and a glass pressure-sensing surface; the shielding electrode is arranged around the electrode, the electrode and the shielding electrode are arranged in a closed space formed by the base and the elastic membrane, and the glass pressure-sensitive surface is printed on the base;
the core body is in a round cake shape, and a fan ring notch is formed in one side of the core body.
The invention is designed to be a special-shaped structure, and the notch is formed in one side of the core body, so that the NTC pin can be freely and directly connected with the PCB through the notch, the temperature signal can be stably and reliably transmitted, and the finished product can be more reliably assembled.
Preferably, the base and the elastic membrane are made of 96% aluminum oxide.
The 96% aluminum oxide has the advantages of high strength, high temperature resistance, corrosion resistance and the like.
Preferably, the diameter of the core is 18mm, the opening angle of the fan ring is 40 degrees, and the radius of the fan ring is 1.5 mm.
The diameter of the core body is 18mm, the minimum size can be selected on the basis of ensuring good notch structure, performance test and linear output, and meanwhile, compared with the traditional core body with the diameter of 21mm, the core body can effectively reduce the cost of raw materials, production and assembly; because the interval exists between two NTC pins, the opening angle of the fan ring is 40 degrees, the radius of the fan ring is 1.5mm, and the structural design just can meet the requirement that the NTC pins smoothly pass through the gap.
Preferably, the electrodes are divided into a measurement electrode and a source electrode, and the shielding electrode is divided into a first shielding electrode and a second shielding electrode.
The area of the measuring electrode is the opposite area of the capacitor, the measuring electrode is printed on the base, the base does not deform in the process of pressing the core body, the capacitance value only changes along with the change of the distance between the two ceramic plates, and the linearity is better.
Preferably, the measuring electrode and the source electrode are printed on the base and the elastic membrane respectively and are oppositely placed, wherein the measuring electrode is printed on the other side of the base on which the glass pressure sensing surface is printed.
The elastic membrane is opposite to the printed electrodes on the base to form a capacitor, the capacitance value led out by the two pins is the main capacitance of the core, the value is about 19pf, and in terms of design, the larger the initial capacitance value is, the larger the capacitance value variation is under the full-scale condition, so that the core can meet the stable linear output under the low-scale condition, and meanwhile, the application under different conditions can be met by adjusting the sizes of the two printed electrodes.
Preferably, the printing electrode paste on the elastic membrane and the base is gold paste.
The gold paste has good conductivity and small internal resistance, and reduces loss to the maximum extent.
Preferably, the first shielding electrode is arranged around the measuring electrode and printed on the base; the second shielding electrode is arranged on the periphery of the source electrode and printed on the elastic membrane; the first shielding electrode and the second shielding electrode are communicated up and down.
The shielding electrodes are designed around the source electrode and the measuring electrode, are communicated up and down at the outer sides of the two main capacitor plates, have the same potential, form a Faraday electromagnetic cage, play a role in electrostatic shielding and protect the variable capacitance of the inner layer from being influenced by an external electric field.
Preferably, the size of the electrode and the shield electrode is:
1) the diameter of the source electrode > the inner diameter of the first shield electrode > the diameter of the measurement electrode;
2) an outer diameter of the second shielding electrode > an outer diameter of the first shielding electrode > an inner diameter of the second shielding electrode;
3) an outer diameter of the first shield electrode > an inner diameter of the second shield electrode > a diameter of the source electrode;
4) the inner diameter of the glass pressure-sensitive surface > the outer diameter of the second shield electrode > the outer diameter of the first shield electrode.
Preferably, the electrode and the glass pressure-sensitive surface are arranged in an eccentric circle.
The internal electrode and the glass printing position are designed to be eccentric circles, and firstly, leakage caused by poor core body sealing performance due to too narrow printing position when the glass paste is printed on the side with the gap is prevented; secondly, in order to avoid that when the elastic diaphragm deforms under pressure, the deformation quantity of the elastic diaphragm is possibly influenced by the position of the notch due to a non-eccentric structure, and further the linear output of the core body is influenced.
Preferably, the inside of the glass pressure sensing surface is provided with a blank area.
The blank area is designed in the glass pressure sensing surface pattern, and in the high-temperature sheet combination sintering process, a space is reserved for glass flowing during extrusion of thin and thick sheets, so that the single glass surface is prevented from overflowing towards the inner ring, the deformation area is reduced, and the output performance of the core is poor.
Preferably, 3 pin structures are arranged on the base.
After the base part and the elastic membrane are combined into a whole through a high-temperature sintering method, the capacitance value of the capacitor is led out in a mode that conductive resin silver paste is filled into three small holes in the base and the pin needle is inserted, a PCB (printed circuit board) is matched when a finished product at the back is assembled, meanwhile, the conductive resin silver paste is filled into the front hole of the inserted pin needle, and the pin needle is fixed through high-temperature curing.
The preparation method of the double-sheet ceramic warm pressing core body is characterized by comprising the following steps:
(1) cleaning the elastic membrane and the base, and drying water for later use;
(2) printing a measuring electrode and a first shielding electrode on the surface of the base, printing a source electrode and a second shielding electrode on the surface of the elastic diaphragm, and then sintering at high temperature;
(3) pre-sintering after the glass pressure-sensitive surface printed on the base is obtained in the step (2);
(4) cleaning and drying the elastic membrane obtained in the step (2) and the base obtained in the step (3), and then sintering the core body at a high temperature after the source electrode and the measuring electrode face are prevented from facing each other;
(5) and (3) mounting a pin structure on the core body, and then curing at high temperature to obtain the double-piece ceramic warm pressing core body.
Compared with the prior art, the invention has the following beneficial effects:
according to the invention, by optimizing the structure and design of the traditional warm-pressing ceramic core body on the market at present, the NTC temperature signal can be directly transmitted to the PCB for data integration, the core body is not transmitted, whether the NTC is firmly connected with the core body or not is not required to be considered during the assembly of the finished product, the assembly efficiency and the one-time pass rate are directly improved, a detection procedure is not required after the NTC is assembled to confirm whether the connection is reliable or not, and the finished product can be ensured to be more reliable in the follow-up and use processes.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a front view of a two-piece ceramic warm press core electrode of the present invention;
FIG. 2 is a front view of a two-piece ceramic warm pressing core body according to the present invention;
1, a measuring electrode; 2, a source electrode; 3, a first shielding electrode; 4, a second shielding electrode; 5, glass pressure-sensitive surface; 6, a pin needle; and 7, a fan ring notch.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 and 2, the present invention provides a double-sheet ceramic warm pressing core body, which comprises a base, an elastic diaphragm, an electrode, a shielding electrode and a glass pressure sensing surface 5; the shielding electrode is arranged around the electrode, the electrode and the shielding electrode are arranged in a closed space formed by the base and the elastic membrane, the glass pressure-sensitive surface 5 is printed on the base, the core body is in a round cake shape, and one side of the core body is provided with a fan ring notch 7; the base and the elastic membrane are made of 96% aluminum oxide;
the electrodes are divided into a measuring electrode 1 and a source electrode 2, and the shielding electrodes are divided into a first shielding electrode 3 and a second shielding electrode 4; the measuring electrode 1 and the source electrode 2 are respectively printed on the base and the elastic membrane and are oppositely arranged, the first shielding electrode 3 is arranged at the periphery of the measuring electrode 1, the second shielding electrode 4 is arranged at the periphery 2 of the source electrode, the first shielding electrode 3 and the second shielding electrode 4 are communicated up and down and have the same potential, and a Faraday electromagnetic cage is formed; wherein, the size of electrode and shielding electrode is:
1) the diameter of the source electrode 2 > the inner diameter of the first shielding electrode 3 > the diameter of the measuring electrode 1;
2) the outer diameter of the second shielding electrode 4 > the outer diameter of the first shielding electrode 3 > the inner diameter of the second shielding electrode 4;
3) the outer diameter of the first shielding electrode 3 > the inner diameter of the second shielding electrode 4 > the diameter of the source electrode 2;
4) the inner diameter of the glass pressure-sensitive surface 5 > the outer diameter of the second shield electrode 4 > the outer diameter of the first shield electrode 3.
Wherein, electrode and glass pressure sensitive face 5 are eccentric circle setting, and the inside of glass pressure sensitive face 5 is provided with the blank region, is provided with 3 pin needle structures on the base.
Furthermore, the diameter of the core body is 18mm, the opening angle of the fan ring is 40 degrees, the radius of the fan ring is 1.5mm, and the size of the electrode can be properly adjusted according to different measuring ranges and use conditions.
Example 1
A preparation method of a double-sheet ceramic warm-pressing core body specifically comprises the following steps:
(1) cleaning the elastic membrane and the base in deionized water at 50 deg.C with ultrasonic wave (ultrasonic current 4A) for 10min, and drying at 130 deg.C for 20min to remove water;
(2) printing a measuring electrode 1 and a first shielding electrode 3 on the surface of a base, printing a source electrode 2 and a second shielding electrode 4 on the surface of an elastic diaphragm, wherein the electrodes are made of gold paste, the viscosity torque of the gold paste is 10%, the wet film printing thickness is 27 microns, drying at 130 ℃ for 8min after printing is finished, and sintering at 870 ℃ for 27 min;
(3) printing a glass pressure-sensitive surface 5 on a base with a sintered electrode, wherein the glass pressure-sensitive surface 5 is printed on the other surface of the base printed with the measuring electrode, the raw material is glass slurry, the viscosity torque is 27%, the wet film printing thickness is 50um, drying is carried out for 8min at 130 ℃ after the printing is finished, and the glue is removed and presintered for 15min at 530 ℃;
(4) cleaning the printed elastic membrane and the base in deionized water at 50 ℃ for 10min by ultrasonic waves (ultrasonic current is 4A), drying at 130 ℃ for 20min, and drying to remove water; then oppositely placing the surfaces of the source electrode 2 and the measuring electrode 3 into a co-firing tool, placing 40pcs products into each tool, and sintering at the high temperature of 660 ℃ for 20min to enable the two parts to be sealed and bonded to obtain a core body;
(5) epoxy silver paste is dotted at three through holes of the core body, the epoxy weight of each pcs product is 0.03g, a pin 6 is inserted, the height of the pin 6 is 1.4mm, then the product is cured at the high temperature of 190 ℃ for 25min, finally, performance test and pinkish red leakage detection are carried out (lamp inspection is carried out after the pinkish red solution is soaked for 1h, whether purple shadow exists in the core body or not is checked), and the double-piece ceramic warm-pressing core body is obtained after qualification.
Example 2
A preparation method of a double-sheet ceramic warm-pressing core body specifically comprises the following steps:
(1) cleaning the elastic membrane and the base in deionized water at 70 deg.C with ultrasonic wave (ultrasonic current 6A) for 20min, and drying at 170 deg.C for 40min to remove water;
(2) printing a measuring electrode 1 and a first shielding electrode 3 on the surface of a base, printing a source electrode 2 and a second shielding electrode 4 on the surface of an elastic diaphragm, wherein the electrodes are made of gold paste, the viscosity torque of the gold paste is 15%, the wet film printing thickness is 33um, drying at 170 ℃ for 16min after printing is finished, and sintering at 930 ℃ for 33 min;
(3) printing a glass pressure-sensitive surface 5 on a base of the sintered electrode, wherein the glass pressure-sensitive surface 5 is printed on the other surface of the base printed with the measuring electrode, the raw material is glass paste, the viscosity torque is 33%, the wet film printing thickness is 60um, drying is carried out for 16min at 170 ℃ after printing is finished, and pre-sintering is carried out for 20min at 570 ℃ after drying and glue discharging.
(4) Cleaning the printed elastic membrane and the base in deionized water at 70 ℃ for 20min by ultrasonic waves (ultrasonic current is 6A), drying at 170 ℃ for 40min, and drying to remove water; then oppositely placing the surfaces of the source electrode 2 and the measuring electrode 3 into a co-firing tool, placing 40pcs products into each tool, and sintering at the high temperature of 700 ℃ for 25min to enable the two parts to be sealed and bonded to obtain a core body;
(5) epoxy silver paste is dispensed at three through holes of the core body, the epoxy weight of each pcs product is 0.035g, a pin 6 is inserted, the height of the pin 6 is 1.6mm, then the product is cured at the high temperature of 210 ℃ for 35min, finally, the performance test and pinkish red leakage detection are carried out (lamp inspection is carried out after the pinkish red solution is soaked for 1h, whether purple shadow exists in the core body or not is checked), and the double-piece ceramic warm-pressing core body is obtained after the product is qualified.
Example 3
A preparation method of a double-sheet ceramic warm-pressing core body specifically comprises the following steps:
(1) cleaning the elastic membrane and the base in deionized water at 60 deg.C with ultrasonic wave (ultrasonic current 5A) for 15min, and drying at 150 + -20 deg.C for 30min to remove water;
(2) printing a measuring electrode 1 and a first shielding electrode 3 on the surface of a base, printing a source electrode 2 and a second shielding electrode 4 on the surface of an elastic diaphragm, wherein the electrodes are all made of gold paste, the viscosity torque of the gold paste is 10%, the wet film printing thickness is 30um, drying at 150 ℃ for 12min respectively after printing is finished, and sintering at 900 ℃ for 30 min;
(3) printing a glass pressure-sensitive surface 5 on a base of the sintered electrode, wherein the glass pressure-sensitive surface 5 is printed on the other surface of the base printed with the measuring electrode, the raw material is glass paste, the viscosity torque is 33%, the wet film printing thickness is 50um, drying is carried out for 12min at 150 ℃ after the printing is finished, and the glue is discharged for presintering for 15min at 550 ℃.
(4) Cleaning the printed elastic membrane and the base in deionized water at 60 ℃ for 15min by ultrasonic waves (ultrasonic current is 5A), drying at 150 ℃ for 30min, and drying to remove water; then oppositely placing the surfaces of the source electrode 2 and the measuring electrode 3 into a co-firing tool, placing a 40pcs product into each tool, and sintering at the high temperature of 680 ℃ for 25min to enable the two parts to be sealed and bonded to obtain a core body;
(5) epoxy silver paste is dotted at three through holes of the core body, the epoxy weight of each pcs product is 0.03g, a pin 6 is inserted, the height of the pin 6 is 1.6mm, the product is cured at the high temperature of 200 ℃ for 30min, and finally, performance test and fuchsin leakage detection are carried out (lamp inspection is carried out after the fuchsin solution is soaked for 1h, whether purple shadow exists in the core body or not is checked), and the double-piece ceramic warm-pressing core body is obtained after qualification.
The embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments can be referred to each other.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A double-sheet ceramic warm-pressing core body is characterized by comprising a base, an elastic diaphragm, an electrode, a shielding electrode and a glass pressure-sensing surface; the shielding electrode is arranged around the electrode, the electrode and the shielding electrode are arranged in a closed space formed by the base and the elastic membrane, and the glass pressure-sensitive surface is printed on the base;
the core body is in a round cake shape, and a fan ring notch is formed in one side of the core body.
2. The biplate ceramic warm-pressing core body of claim 1, wherein the diameter of the core body is 18mm, the opening angle of the fan ring is 40 degrees, and the radius of the fan ring is 1.5 mm.
3. The biplate ceramic warm-pressing core body of claim 1, wherein the electrodes are divided into a measuring electrode and a source electrode, and the shielding electrodes are divided into a first shielding electrode and a second shielding electrode.
4. The biplate ceramic warm pressing core body of claim 3, wherein the measuring electrode and the source electrode are printed on the base and the elastic membrane respectively, oppositely placed, wherein the measuring electrode is printed on the other side of the base printed with the glass pressure sensing surface.
5. The biplate ceramic warm compaction core body of claim 3, wherein the first shielding electrode is disposed around the measuring electrode and printed on the base; the second shielding electrode is arranged on the periphery of the source electrode and printed on the elastic membrane; the first shielding electrode and the second shielding electrode are communicated up and down.
6. The biplate ceramic warm-pressing core body of claim 3, wherein the size of the electrode and the shielding electrode is as follows:
1) the diameter of the source electrode > the inner diameter of the first shield electrode > the diameter of the measurement electrode;
2) an outer diameter of the second shielding electrode > an outer diameter of the first shielding electrode > an inner diameter of the second shielding electrode;
3) an outer diameter of the first shield electrode > an inner diameter of the second shield electrode > a diameter of the source electrode;
4) the inner diameter of the glass pressure-sensitive surface > the outer diameter of the second shield electrode > the outer diameter of the first shield electrode.
7. The biplate ceramic warm-pressing core body of claim 1, wherein the electrodes and the glass pressure-sensing surface are eccentrically arranged.
8. The two-piece ceramic warm pressing core body according to claim 1, characterized in that the inside of the glass pressure-sensing surface is provided with a blank area.
9. The two-piece ceramic warm pressing core body of claim 1, wherein 3 pin structures are arranged on the base.
10. The preparation method of the double-sheet ceramic warm-pressing core body is characterized by comprising the following steps:
(1) cleaning the elastic membrane and the base, and drying water for later use;
(2) printing a measuring electrode and a first shielding electrode on the surface of the base, printing a source electrode and a second shielding electrode on the surface of the elastic diaphragm, and then sintering at high temperature;
(3) pre-sintering after the glass pressure-sensitive surface printed on the base is obtained in the step (2);
(4) cleaning and drying the elastic membrane obtained in the step (2) and the base obtained in the step (3), and then sintering the core body at a high temperature after the source electrode and the measuring electrode face are prevented from facing each other;
(5) and (3) mounting a pin structure on the core body, and then curing at high temperature to obtain the double-piece ceramic warm pressing core body.
CN202110920747.9A 2021-08-11 2021-08-11 Double-piece ceramic warm-pressing core body and preparation method thereof Pending CN113483828A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110920747.9A CN113483828A (en) 2021-08-11 2021-08-11 Double-piece ceramic warm-pressing core body and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110920747.9A CN113483828A (en) 2021-08-11 2021-08-11 Double-piece ceramic warm-pressing core body and preparation method thereof

Publications (1)

Publication Number Publication Date
CN113483828A true CN113483828A (en) 2021-10-08

Family

ID=77946259

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110920747.9A Pending CN113483828A (en) 2021-08-11 2021-08-11 Double-piece ceramic warm-pressing core body and preparation method thereof

Country Status (1)

Country Link
CN (1) CN113483828A (en)

Similar Documents

Publication Publication Date Title
CA2028115C (en) Capacitive pressure sensor and method of manufacturing same
US9541461B2 (en) Ceramic pressure sensor and method for production thereof
US5499158A (en) Pressure transducer apparatus with monolithic body of ceramic material
JPH06201503A (en) Capacitance-type pressure transducer
CN212409938U (en) MEMS pressure sensor oil-filled core
EP2720019A1 (en) Pressure transducer using ceramic diaphragm
CN112268641A (en) Square ceramic resistance type pressure sensor
CN212779682U (en) Capacitive pressure sensor
CN215573105U (en) Double-piece ceramic warm-pressing core body
CN113483828A (en) Double-piece ceramic warm-pressing core body and preparation method thereof
CN204679199U (en) Split type sputtered thin film pressure transducer
CN108132280B (en) Flexible substrate for mounting gas sensor
CN110132462B (en) Pressure sensor packaging structure and packaging method thereof
CN207798303U (en) A kind of fexible film pressure sensor
CN114216519B (en) Temperature and pressure integrated sensor packaging structure
CN210774447U (en) Ceramic capacitor pressure sensor
CN209085807U (en) Become capacitive pressure transducer
CN217304218U (en) Flexible pressure sensor
CN212963791U (en) Capacitance type pressure transmitter
CN113405697A (en) Square ceramic capacitance type pressure sensor
CN214096435U (en) Square ceramic resistance type pressure sensor
CN212621209U (en) Economical absolute pressure ceramic sensor
CN108731852A (en) A kind of capacitance pressure transducer,
CN109341906B (en) Variable capacitance pressure sensor
CN219064736U (en) Touch sensor and electronic equipment

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination