CN212621209U - Economical absolute pressure ceramic sensor - Google Patents

Abstract

The utility model provides an economical ceramic sensor that presses absolutely, includes ceramic sheet metal and the ceramic substrate who combines with it, and the welding has a plurality of pad on the ceramic sheet metal, all connects through the wire between every pad, is provided with the first bridge resistance of a plurality of and a plurality of second bridge resistance on the wire, last a plurality of being provided with of ceramic substrate presses absolutely hole and one presses absolutely the blind hole, presses absolutely the blind hole setting and is in ceramic substrate's intermediate position, a plurality of press absolutely hole be in ceramic substrate is last evenly distributed and be circular setting, ceramic sheet metal and ceramic substrate's shape equal for octagon and ceramic sheet metal and ceramic substrate's length of side. The utility model discloses a design has the ceramic substrate of the absolute pressure through-hole of corresponding size and absolute pressure blind hole, and it cooperatees with the ceramic sheet metal, and designs for octagonal shape, can effectually reduce the volume that the sensor was pressed absolutely to the tradition, has reduced space utilization, has improved the mechanical structure intensity of sensor absolutely, has guaranteed its use reliability.

Description

Economical absolute pressure ceramic sensor

Technical Field

The utility model belongs to the technical field of the pressure sensor technique and specifically relates to an economical ceramic sensor that presses absolutely.

Background

The pressure sensor is divided into a gauge pressure sensor and an absolute pressure sensor, the gauge pressure sensor compares atmospheric pressure with the measured pressure by leading the atmospheric pressure to one end of a pressure sensing element through an air duct in a transmitter cable, the difference value of the two pressures is the measured pressure, the absolute pressure sensor compares the measured pressure with an absolute vacuum value, and the measured result is subtracted from the local atmospheric pressure to obtain the actually measured pressure value. In the traditional ceramic pressure sensor, an aluminum oxide ceramic diaphragm is generally used as a strain elastic element of the pressure sensor, a sintered resistor is printed on the surface of the strain elastic element by adopting a thick film process to form a Wheatstone bridge, and when the ceramic diaphragm generates micro linear deformation under the action of pressure, the output end of the bridge circuit generates voltage output which is precisely and linearly related to the pressure under the excitation voltage. However, most of the conventional ceramic absolute pressure sensors have large volumes, so that the conventional ceramic absolute pressure sensors are insensitive to sensing, cannot sensitively detect corresponding pressure value signals, and are also insensitive to sensing because the sizes of the through holes on the ceramic base and the bonding pads on the ceramic thin plate cannot correspond to each other.

Therefore, in order to make up for the defect that the signal error of the detection pressure value of the traditional ceramic absolute pressure sensor is larger, an economical absolute pressure ceramic sensor needs to be designed.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to overcome prior art not enough, provide a ceramic sensor is pressed to absolute pressure with low costs and detectivity is high.

The utility model provides a its technical problem take following technical scheme to realize:

the utility model provides an economical ceramic sensor that presses absolutely, includes ceramic sheet metal and the ceramic base that combines with it, ceramic sheet metal on weld have a plurality of pad, every all connect through the wire between the pad be provided with the first bridge circuit resistance of a plurality of and a plurality of second bridge circuit resistance on the wire, be provided with a plurality of blind hole and a blind hole that presses absolutely on the ceramic base, blind hole setting that presses absolutely be in ceramic base's intermediate position, a plurality of blind hole that presses absolutely be in ceramic base is last evenly distributed and is circular setting.

Preferably, the number of the bonding pads is four, and the four bonding pads are made of palladium silver.

Preferably, the number of the first bridge resistors is 4, and the resistance value of each first bridge resistor is 10K Ω.

Preferably, the number of the second bridge resistors is 2, and the resistance value of each second bridge resistor is 1K Ω.

Preferably, the width of the conducting wire is 0.3 mm.

Preferably, the number of the absolute pressure through holes is 8, and the diameter of each absolute pressure through hole is 0.8 mm.

Preferably, the diameter of the absolute pressure blind hole is 3.2mm, and the opening depth of the absolute pressure blind hole is 0.6 mm.

Preferably, the ceramic thin plate and the ceramic base are octagonal in shape, and the side lengths of the ceramic thin plate and the ceramic base are equal.

Preferably, the ceramic thin plate and the ceramic base have long sides of 7.7mm and short sides of 3.8 mm.

Preferably, the first bridge resistor and the second bridge resistor are both ruthenium resistors.

The utility model has the advantages that:

the utility model discloses a design has the ceramic substrate of the absolute pressure through-hole of corresponding size and absolute pressure blind hole, and it cooperatees with the ceramic sheet metal, and designs for octagonal shape, can effectually reduce the volume that the sensor was pressed absolutely to the tradition, improves its detection precision, has reduced space utilization, has improved the mechanical structure intensity of sensor absolutely, has guaranteed its use reliability.

Drawings

FIG. 1 is a schematic structural view of a ceramic sheet according to the present invention;

FIG. 2 is a schematic structural view of the ceramic base of the present invention;

fig. 3 is a schematic cross-sectional structural view of the ceramic base according to the present invention.

In the figure: 1. a ceramic sheet; 11. a pad; 12. a first bridge resistor; 13. a wire; 14. a second bridge resistor; 2. a ceramic base; 21. an absolute pressure through hole; 22. and (6) pressing the blind holes.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

The embodiments of the present invention will be described in detail with reference to the accompanying drawings:

as shown in fig. 1-3, an economical ceramic sensor that presses absolutely, ceramic base 2 that combines with it including ceramic sheet 1, the welding has a plurality of pad 11, every on the ceramic sheet 1 all connect through wire 13 between the pad 11 be provided with the first bridge resistance of a plurality of 12 and the second bridge resistance of a plurality of 14 on the wire 13, be provided with a plurality of blind hole 21 and a blind hole 22 that presses absolutely on ceramic base 2, blind hole 22 that presses absolutely set up ceramic base 2's intermediate position, a plurality of blind hole 21 that presses absolutely evenly distributed just is circular setting on ceramic base 2.

Further, as shown in fig. 1, the number of the bonding pads 11 is four, the four bonding pads 11 are made of pd or ag, the number of the first bridge resistors 12 is 4, the resistance of each of the first bridge resistors 12 is 10K Ω, the number of the second bridge resistors 14 is 2, and the resistance of each of the second bridge resistors 14 is 1K Ω.

Further, the width of the conductive line 13 is 0.3mm in the most preferable embodiment.

Further, as shown in fig. 2 and 3, the number of the absolute pressure through holes 21 is 8, the diameter of each absolute pressure through hole 21 is 0.8mm in the optimal embodiment, the diameter of each absolute pressure blind hole 22 is 3.2mm in the optimal embodiment, and the opening depth of each absolute pressure blind hole 22 is 0.6mm in the optimal embodiment, so that the designed opening size can ensure that the ceramic thin plate 1 and the ceramic base 2 are attached to each other more closely, and the detection pressure value is more accurate.

Further, the ceramic thin plate 1 and the ceramic base 2 are octagonal, the side lengths of the ceramic thin plate 1 and the ceramic base 2 are equal, and the side length angles of the octagonal of the ceramic thin plate 1 and the octagonal of the ceramic base 2 are also equal, so that the ceramic thin plate 1 and the ceramic base 2 can be tightly attached together, the mechanical strength of the absolute pressure ceramic sensor is enhanced, and the reliability of the absolute pressure ceramic sensor is improved.

Further, the long side of ceramic sheet 1 and ceramic base 2 is 7.7mm, and minor face length is 3.8mm, and through the length of the major and minor faces of design, the space occupation rate that can ensure to press ceramic sensor absolutely when work is placed is minimum, and the length this moment still can not influence its efficiency of gathering pressure numerical value and transmission.

Furthermore, the first bridge resistor 12 and the second bridge resistor 14 are both ruthenium resistors, and since the thick film ruthenium-based resistor replaces the original palladium-silver alloy resistor to become the mainstream of the thick film resistor in two or three decades, the thick film resistor has been widely applied to the fields of thick film hybrid integrated circuits, networks, resistor networks and the electronic industry, and has the advantages of wide working range, precise formed circuit, high reliability, simple manufacturing process and low economic cost.

During the concrete implementation, ceramic sheet 1 presses on ceramic substrate 2 and is fixed in the equipment of the pressure value that awaits measuring, the pressure value signal on it is gathered to the acquisition circuit on the ceramic sheet 1, and transmit to outside through pad 11 in the processing module that shows, first bridge resistance 12 and second bridge resistance 14 are used for maintaining acquisition circuit's voltage balance, take care of acquisition circuit, because ceramic sheet 1 and ceramic substrate 2's overall dimension is less than traditional absolute pressure sensor, therefore, its is small, economic cost is low, the efficiency of nevertheless gathering pressure signal and transmission data does not reduce, so its practicality obtains improving.

The utility model discloses a design has the ceramic substrate 2 of the dead man hole 21 of pressing and the blind hole 22 of pressing of corresponding size, and it cooperatees with ceramic sheet metal 1, and designs for the shape of octagon, can effectually reduce the volume that the tradition pressed the sensor absolutely, improves its detection precision, has reduced space utilization, has improved the mechanical structure intensity who presses the sensor absolutely, has guaranteed its use reliability.

It should be emphasized that the embodiments described herein are illustrative and not restrictive, and thus the present invention is not limited to the embodiments described in the detailed description, but also falls within the scope of the present invention, in any other embodiments derived by those skilled in the art according to the technical solutions of the present invention.

Claims (10)

1. An economical absolute pressure ceramic sensor is characterized in that: the insulation pressure ceramic plate comprises a ceramic thin plate (1) and a ceramic base (2) combined with the ceramic thin plate, wherein a plurality of bonding pads (11) are welded on the ceramic thin plate (1), each bonding pad (11) is connected with each other through a wire (13), a plurality of first bridge resistors (12) and a plurality of second bridge resistors (14) are arranged on the wires (13), a plurality of insulation pressure through holes (21) and an insulation pressure blind hole (22) are arranged on the ceramic base (2), the insulation pressure blind hole (22) is arranged in the middle of the ceramic base (2), and the insulation pressure through holes (21) are uniformly distributed on the ceramic base (2) and are circularly arranged.

2. An economical absolute pressure ceramic sensor according to claim 1, characterized in that: the number of the bonding pads (11) is four, and the four bonding pads (11) are made of palladium silver.

3. An economical absolute pressure ceramic sensor according to claim 1, characterized in that: the number of the first bridge resistors (12) is 4, and the resistance value of each first bridge resistor (12) is 10K omega.

4. An economical absolute pressure ceramic sensor according to claim 1, characterized in that: the number of the second bridge resistors (14) is 2, and the resistance value of each second bridge resistor (14) is 1 Komega.

5. An economical absolute pressure ceramic sensor according to claim 1, characterized in that: the width of the lead (13) is 0.3 mm.

6. An economical absolute pressure ceramic sensor according to claim 1, characterized in that: the number of the absolute pressure through holes (21) is 8, and the diameter of each absolute pressure through hole (21) is 0.8 mm.

7. An economical absolute pressure ceramic sensor according to claim 1, characterized in that: the diameter of the absolute pressure blind hole (22) is 3.2mm, and the opening depth of the absolute pressure blind hole (22) is 0.6 mm.

8. An economical absolute pressure ceramic sensor according to claim 1, characterized in that: the ceramic thin plate (1) and the ceramic base (2) are octagonal, and the side lengths of the ceramic thin plate (1) and the ceramic base (2) are equal.

9. An economical absolute pressure ceramic sensor according to claim 8, wherein: the long sides of the ceramic thin plate (1) and the ceramic base (2) are both 7.7mm, and the lengths of the short sides are both 3.8 mm.

10. An economical absolute pressure ceramic sensor according to claim 1, characterized in that: the first bridge resistor (12) and the second bridge resistor (14) are both ruthenium resistors.

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