CN115976476A - Double-open masking mechanism and thin film deposition machine - Google Patents

Abstract

The invention provides a double-open type shielding mechanism and a film deposition machine, which mainly comprise a first shielding plate, a second shielding plate, at least one driving motor and a shaft sealing device, wherein the driving motor is respectively connected with the first shielding plate and the second shielding plate through an outer tube body and a shaft body of the shaft sealing device, drives the first shielding plate and the second shielding plate to swing towards opposite directions and is switched between an opening state and a shielding state. The first and second shielding plates comprise at least one groove to reduce the weight of the first and second shielding plates and reduce the load of the driving motor on and driving the first and second shielding plates.

Description

Double-open masking mechanism and thin film deposition machine

technical field

The present invention relates to a double-opening type shielding mechanism. At least one groove is mainly arranged on the shielding plate to reduce the weight of the first and second shielding plates, and reduce the load of the driving motor and drive the first and second shielding plates. burden.

Background technique

Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD) and Atomic Layer Deposition (ALD) are commonly used thin film deposition equipment, and are widely used in the manufacturing processes of integrated circuits, light-emitting diodes and displays.

The deposition equipment mainly includes a cavity and a wafer carrier, wherein the wafer carrier is located in the cavity and is used to carry at least one wafer. Taking physical vapor deposition as an example, a target needs to be set in the chamber, wherein the target faces the wafer on the wafer carrier. During physical vapor deposition, the inert gas and/or reaction gas can be delivered into the cavity, bias voltage is applied to the target material and the wafer holding plate respectively, and the carried wafer is heated by the wafer holding plate.

The inert gas in the cavity forms ionized inert gas due to the action of high-voltage electric field, and the ionized inert gas will be attracted by the bias voltage on the target and bombard the target. Target atoms or molecules sputtered from the target are attracted by the bias voltage on the wafer carrier plate and deposited on the surface of the heated wafer to form a thin film on the surface of the wafer.

After a period of use, a deposited film will be formed on the inner surface of the chamber, so the chamber needs to be cleaned periodically to prevent the deposited film from falling during the process and contaminating the wafer. In addition, oxides or other pollutants may also be formed on the surface of the target, so the target needs to be cleaned periodically. Generally speaking, a burn-in process is usually used to impinge the target in the chamber with plasma ions to remove oxides or other pollutants on the surface of the target.

When cleaning the cavity and the target, it is necessary to take out the wafer carrier and the wafer in the cavity, or isolate the wafer carrier to avoid contamination of the wafer carrier and the wafer during the cleaning process.

Contents of the invention

After a period of use, the thin film deposition machine usually needs to be cleaned to remove the thin film deposited in the chamber and the oxide or nitride on the target. Particles generated during the cleaning process will contaminate the susceptor, so it is necessary to isolate the susceptor from the contaminants. The present invention proposes a double-opening shielding mechanism and a thin film deposition machine. The driving device drives two shielding plates to swing in opposite directions, so that the two shielding plates switch between an open state and a shielding state.

When cleaning the reaction chamber, the driving device drives the two shielding plates to approach each other in a swinging manner, so that the two shielding plates are close to each other and shield the carrier plate in the accommodating space, so as to avoid the plasma used in the cleaning process or generated Contamination contacts the carrier tray and/or the substrate it carries. During the deposition process, the driving device drives the two shielding plates away from each other in a swinging manner, so as to deposit the thin film on the substrate in the reaction chamber.

An object of the present invention is to provide a thin film deposition machine with a double-opening shielding mechanism, which mainly includes a reaction chamber, a carrier plate and a double-opening shielding mechanism. The double-opening shielding mechanism includes a driving device and two shielding plates, wherein the driving device is connected and drives the two shielding plates to swing in opposite directions, so that the two shielding plates operate in an open state and a shielding state.

At least one groove is provided on the surface of the two shielding boards facing the bearing tray, which can reduce the weight of the shielding boards without affecting the shielding effect of the shielding boards. By reducing the weight of the shielding plate, it is beneficial to reduce the burden of the driving device to drive the shielding plate to rotate.

Specifically, the driving device is respectively connected to and carries two shielding plates through two connecting arms, and by providing at least one groove on the shielding plate, the load of the connecting arms carrying the shielding plate can be reduced. In addition, at least one perforated portion can be further provided on the connecting arm, which can reduce the weight of the connecting arm without affecting the structural strength of the connecting arm, and facilitate the driving device to drive the two shielding plates in opposite directions through the two connecting arms. swing.

An object of the present invention is to provide a thin film deposition machine with a double-opening shielding mechanism, including a driving device, two shielding plates, two connecting arms and two distance sensing units, wherein the driving device is connected by two The arms respectively connect the two shielding plates. A groove is provided on the surface of the shielding plate, and at least one perforation is provided on the connecting arm, so as to reduce the weight of the shielding plate and the connecting arm.

In addition, a reflective surface is respectively arranged on the two connecting arms. When the two connecting arms are operated in the shielding state, the sensing light beams emitted by the two distance sensing units will be projected on the reflecting surfaces of the two connecting arms, and the two distance sensing units will be measured. The distance between a connecting arm and the two distance sensing units is used to determine that the two connecting arms are operating in a shielded state.

An object of the present invention is to provide a thin film deposition machine with a double-opening shielding mechanism, which mainly includes a reaction chamber, a carrier plate and a double-opening shielding mechanism. The double-opening shielding mechanism includes a driving device and two shielding plates, wherein the driving device includes a shaft sealing device and a driving motor.

The drive motor is connected to the two drive plates through the outer tube body and the shaft body of the shaft seal device respectively, wherein two sensing units are arranged on the side of the outer tube body and/or the shaft body to confirm the outer tube body and/or shaft body The angle of rotation, and judging from the angle of the outer tube body and/or the shaft body whether the two shielding plates operate in a shielding state or an open state.

In order to achieve the above object, the present invention proposes a thin film deposition machine, comprising: a reaction chamber, including an accommodating space; a carrier plate, located in the accommodating space, and used to carry at least one substrate; and a double-opening The shielding mechanism includes: a first shielding plate located in the accommodating space; a second shielding plate located in the accommodating space, wherein both the first shielding plate and the second shielding plate include at least one groove facing the side of the carrying tray direction; and a driving device, including: a shaft sealing device, connected to the first shielding plate and the second shielding plate; at least one driving motor, connected to the shaft sealing device, and driving the first shielding plate and the second shielding device respectively through the shaft sealing device The plates swing in opposite directions, so that the first shielding plate and the second shielding plate are switched between an open state and a shielding state, wherein a gap is formed between the first shielding plate and the second shielding plate operating in the open state space, and the first shielding plate and the second shielding plate operating in the shielding state are close to each other, and are used to shield the carrier tray.

The present invention proposes a double-opening shielding mechanism, which is suitable for a thin film deposition machine, including: a first shielding plate; a second shielding plate, wherein the first shielding plate and the second shielding plate both include at least one groove, set On the lower surface of the first shielding plate and the second shielding plate; and a driving device, including: a shaft sealing device, connected to the first shielding plate and the second shielding plate; at least one driving motor, connected to the shaft sealing device, and through the shaft The sealing device respectively drives the first shielding plate and the second shielding plate to swing in opposite directions, so that the first shielding plate and the second shielding plate switch between an open state and a shielding state, wherein the first shielding plate operating in the open state A space is formed between the plate and part of the second shielding plate, and the first shielding plate and the second shielding plate operating in the shielding state are close to each other to form a shielding member.

The thin film deposition machine and the double-opening shielding mechanism, wherein the shaft sealing device includes an outer tube body and a shaft body, the outer tube body includes a space for accommodating the shaft body, and the drive motor is connected to the first shielding plate through the shaft body , connecting the second shielding plate through the outer tube body, and synchronously driving the shaft body and the outer tube body to rotate in opposite directions.

The thin film deposition machine and the double-opening shielding mechanism include two sensing units adjacent to the outer tube body, and there is a distance between the two sensing units, which are used to sense the rotation of the outer tube body to a first A position and a second position, wherein when the outer tube body rotates to the first position, the second shielding plate operates in an open state, and when the outer tube body rotates to the second position, the second shielding plate operates in a shielding state.

The film deposition machine and the double-opening shielding mechanism include a first connecting arm and a second connecting arm, the shaft body is connected to the first shielding plate through the first connecting arm, and the outer tube is connected to the first shielding plate through the second connecting arm. At least one perforation portion is arranged on the second shielding plate, the first connecting arm and the second connecting arm.

The film deposition machine and the double-opening shielding mechanism include a first distance sensing unit and a second distance sensing unit, and the first connecting arm has a first reflective surface, and the second connecting arm has a first Two reflective surfaces, wherein the first distance sensing unit and the second distance sensing unit are arranged on the reaction cavity, and are respectively used to project a first sensing light beam and a second sensing light beam to the first connecting arm The first reflective surface and the second reflective surface of the second connecting arm are used to confirm that the first shielding plate and the second shielding plate are operating in a shielding state.

The beneficial effects of the present invention are: to provide a novel double-opening shielding mechanism, at least one groove is mainly arranged on the shielding plate to reduce the weight of the first and second shielding plates, and reduce the load of the driving motor and drive the first And the burden of the second shielding plate.

Description of drawings

FIG. 1 is a schematic side sectional view of an embodiment of a thin film deposition machine operating in a shielded state according to the present invention.

Fig. 2 is a three-dimensional exploded schematic view of the double-opening type shielding mechanism of the present invention.

FIG. 3 is a three-dimensional schematic diagram and a partial cross-sectional schematic diagram of an embodiment of the shielding plate of the double-opening shielding mechanism of the present invention.

Fig. 4 is a top view of an embodiment of the connecting arm of the double-opening type shielding mechanism of the present invention.

FIG. 5 is a perspective cross-sectional schematic view of an embodiment of the driving device of the double-opening type shielding mechanism of the present invention.

FIG. 6 is a schematic structural view of an embodiment of the thin film deposition machine operating in a shielded state according to the present invention.

FIG. 7 is a structural diagram of an embodiment of the thin film deposition machine operating in the open state of the present invention.

Explanation of reference numerals: 10-thin film deposition machine; 100-double-open shielding mechanism; 11-reaction chamber; 111-stopper; 112-opening; 113-sensing area; Unit; 141-first connecting arm; 1411-first reflecting surface; 1413-first protruding part; 142-perforated part; 143-second connecting arm; 1431-second reflecting surface; 1433-second protruding part ; 144-positioning recess; 15-shielding member; 151-first shielding plate; 153-second shielding plate; 154-groove; 156-positioning protrusion; 161-target material; 17-drive device; 171-drive motor; 1711-first drive motor; 1713-second drive motor; 173-shaft seal device; 1731-shaft body; 1733-outer tube body; 1735-transmission unit; Body; 191—the first distance sensing unit; 193—the second distance sensing unit; 195—the shielding plate sensing unit; L1—the first sensing beam; L2—the second sensing beam.

Detailed ways

Please refer to FIG. 1 , which is a schematic side sectional view of an embodiment of a thin film deposition machine operating in a shielded state according to the present invention. As shown in the figure, the thin film deposition machine 10 mainly includes a reaction chamber 11, a carrier plate 165 and a double-opening shielding mechanism 100, wherein the reaction chamber 11 includes an accommodating space 12 for accommodating the carrier plate 165 and some double-opening shielding mechanism 100.

The carrier plate 165 is located in the accommodating space 12 of the reaction chamber 11 and is used for carrying at least one substrate 163 . Taking the thin film deposition machine 10 as a physical vapor deposition chamber as an example, a target 161 is disposed in the reaction chamber 11 , wherein the target 161 faces the substrate 163 and the carrier plate 165 . For example, the target 161 can be disposed on the upper surface of the reaction chamber 11 and face the carrier plate 165 and/or the substrate 163 located in the accommodating space 12 .

Please refer to FIG. 2 , the double-opening shielding mechanism 100 includes a first shielding plate 151 , a second shielding plate 153 and a driving device 17 , wherein the first shielding plate 151 and the second shielding plate 153 are located in the accommodating space 12 . The driving device 17 is connected to the first shielding plate 151 and the second shielding plate 153, and drives the first shielding plate 151 and the second shielding plate 153 to swing in opposite directions respectively, so that the first shielding plate 151 and the second shielding plate 153 are in the shielding state. and the open state, for example, the first shielding plate 151 and the second shielding plate 153 swing synchronously with the driving device 17 as the axis.

The first shielding plate 151 and the second shielding plate 153 described in the embodiment of the present invention operate in a shielding state, which can be defined as the first shielding plate 151 and the second shielding plate 153 approaching each other and forming a shielding member 15 to shield Carrier tray 165 . Specifically, the first shielding plate 151 and the second shielding plate 153 operating in the shielding state will not be in direct contact, and the distance between the two is less than a threshold value, such as less than 1mm, to prevent the first shielding plate 151 and the second shielding plate 151 from touching each other. The shielding plate 153 generates particles during contact.

Please refer to Fig. 3, at least one groove 154 can be provided on the surface of the first shielding plate 151 and the second shielding plate 153, the setting of the groove 154 can reduce the weight of the first shielding plate 151 and the second shielding plate 153, and at the same time It will not affect the shielding effects of the first shielding plate 151 and the second shielding plate 153 . For example, the first shielding plate 151 and the second shielding plate 153 can be titanium, the depth of the groove 154 is about 30% to 70% of the thickness of the first shielding plate 151 and the second shielding plate 153, the cross-sectional area of the groove 154 It is about 30% to 70% of the area of the first shielding plate 151 and the second shielding plate 153 . In addition, a fillet or chamfer can be provided between the bottom and the side of the groove 154 .

Specifically, the first shielding plate 151 and the second shielding plate 153 can be semicircular plates, and the groove 154 can be a part of an annular groove, such as a half of an annular groove or a quarter of an annular groove. An annular groove is close to the outer side or radially outer side of the first shielding plate 151 and the second shielding plate 153 . In addition, the groove 154 can be disposed on the first shielding plate 151 and the second shielding plate 153 in a symmetrical manner, so as to avoid changing the center of mass of the first shielding plate 151 and the second shielding plate 153 due to the groove 154 .

In one embodiment of the present invention, the first shielding plate 151 and the second shielding plate 153 operating in the shielding state are used to shield the carrier tray 165, wherein the lower surfaces of the first shielding plate 151 and the second shielding plate 153 face the carrier tray 165 , and the groove 154 is disposed on the lower surfaces of the first shielding plate 151 and the second shielding plate 153 so that the groove 154 faces the carrier plate 165 .

In one embodiment of the present invention, the driving device 17 is respectively connected to and drives the first shielding plate 151 and the second shielding plate 153 to swing or rotate in opposite directions through the first connecting arm 141 and a second connecting arm 143. The arm 141 and the second connecting arm 143 are similar to scissors, wherein the first connecting arm 141 and the second connecting arm 143 are used to support the first shielding plate 151 and the second shielding plate 153 respectively. By reducing the weight of the first shielding plate 151 and the second shielding plate 153 , the load on the first connecting arm 141 and the second connecting arm 143 can be reduced, so as to prevent the first connecting arm 141 and the second connecting arm 143 from being deformed or broken.

Please refer to FIG. 4 , the first connecting arm 141 and the second connecting arm 143 are respectively provided with at least one through hole 142 to reduce the weight of the first connecting arm 141 and the second connecting arm 143 . In addition, the perforation portion 142 is provided on the first connecting arm 141 and the second connecting arm 143 without reducing the structural strength of the first connecting arm 141 and the second connecting arm 143 .

In an embodiment of the present invention, the surfaces of the first shielding plate 151 and the second shielding plate 153 can also be provided with a plurality of positioning protrusions 156, wherein the positioning protrusions 156 and the grooves 154 are arranged on the first shielding plate 151 and the second shielding plate 151. On the same surface of the shielding plate 153, for example, the lower surface. The surface of the first connecting arm 141 and the second connecting arm 143 for carrying the first shielding plate 151 and the second shielding plate 153 is provided with a plurality of positioning recesses 144, and through the setting of the positioning protrusions 156 and the positioning recesses 144, the second A shielding plate 151 and a second shielding plate 153 are respectively placed in the fixed positions of the first connecting arm 141 and the second connecting arm 143, and can prevent the first shielding plate 151 and the second shielding plate 153 from being opposite to the first connecting arm 141 and the first connecting arm 141. The second connecting arm 143 is displaced.

The positioning projections 156 provided on the lower surfaces of the first shielding plate 151 and the second shielding plate 153 and the positioning recesses 144 provided on the upper surfaces of the first connecting arm 141 and the second connecting arm 143 are only one embodiment of the present invention. Rather than limiting the scope of the rights of the present invention.

In different embodiments, positioning recesses may be provided on the lower surfaces of the first shielding plate 151 and the second shielding plate 153 , and positioning protrusions may be provided on the upper surfaces of the first connecting arm 141 and the second connecting arm 143 . For example, a plurality of screw holes can be set on the first connecting arm 141 and the second connecting arm 143, and the screws can be locked on the screw holes to form positioning protrusions on the upper surfaces of the first connecting arm 141 and the second connecting arm 143. part, and align with the positioning recesses on the lower surfaces of the first shielding plate 151 and the second shielding plate 153 through the screws protruding from the upper surfaces of the first connecting arm 141 and the second connecting arm 143 .

In one embodiment of the present invention, please refer to FIG. 5 , the driving device 17 includes a driving motor 171 and a shaft sealing device 173, wherein the driving motor 171 is connected to the first shielding plate 151 and the second shielding plate 153 through the shaft sealing device 173 , and drive the first shielding plate 151 and the second shielding plate 153 to swing in opposite directions through the shaft sealing device 173, so that the first shielding plate 151 and the second shielding plate 153 switch between an open state and a shielding state.

Specifically, the shaft sealing device 173 includes an outer tube body 1733 and a shaft body 1731, wherein the outer tube body 1733 includes a space for accommodating the shaft body 1731, and the driving motor 171 synchronously drives the outer tube body 1733 and the shaft body 1731 turns in the opposite direction.

The outer tube body 1733 and the shaft body 1731 are arranged coaxially, and the outer tube body 1733 and the shaft body 1731 can rotate relatively. The driving motor 171 is connected to the first connecting arm 141 through the shaft body 1731 , and is connected to and drives the first shielding plate 151 to swing through the first connecting arm 141 . The driving motor 171 is connected to the second connecting arm 143 through the outer tube body 1733 , and is connected to and drives the second shielding plate 153 to swing through the second connecting arm 143 .

The shaft seal device 173 may be a common shaft seal, which is mainly used to isolate the accommodating space 12 of the reaction chamber 11 from the external space, so as to maintain the vacuum of the accommodating space 12 . For example, the outer tube body 1733 is located in a fixed tube body 1737 and is connected to the fixed tube body 1737 through a plurality of bearings, while the shaft body 1731 is connected to the outer tube body 1733 through a plurality of bearings. In another embodiment of the present invention, the shaft sealing device 173 may be a magnetic fluid shaft seal, and includes a plurality of bearings, at least one permanent magnet, at least one magnetic pole piece, and at least one magnetic fluid.

The number of the driving motor 171 can be one, as shown in FIG. 2 , wherein the driving motor 171 simultaneously drives the shaft body 1731 and the outer tube body 1733 to rotate in opposite directions through a linkage mechanism. In another embodiment of the present invention, as shown in FIG. 5 , there may be two driving motors 171 , which are the first driving motor 1711 and the second driving motor 1713 . The first driving motor 1711 is connected to drive the shaft body 1731 to rotate, and drives the first shielding plate 151 to swing through the shaft body 1731 and the first connecting arm 141 . The second driving motor 1713 drives the outer tube body 1733 to rotate through a transmission unit 1735 , for example, the transmission unit 1735 can be a transmission belt, and drives the second shielding plate 153 to swing through the outer tube body 1733 and the second connecting arm 143 .

Generally speaking, the rotation angle or position of the shaft body 1731 can be obtained by the rotation angle of the first driving motor 1711 , and the rotation angle or position of the outer tube body 1733 can be obtained by the rotation angle of the second driving motor 1713 . However, when the second driving motor 1713 drives the outer tubular body 1733 to rotate, the transmission unit 1735 may slide relative to the second driving motor 1713 and the outer tubular body 1733 . In this way, it is impossible to correctly judge whether the outer tube body 1733 has rotated to the default angle or position based on the rotation angle of the second driving motor 1713. Of course, it is also impossible to judge whether the second shielding plate 153 connected and driven by the outer tube body 1733 is correct. The operation is in the shielded state or the open state.

To this end, two sensing units 131 can be respectively disposed on the side of the outer tube body 1733 of the shaft sealing device 173 , and there is a distance between the two sensing units 131 . For example, two sensing units 131 form an angle with the axis of the outer tube body 1733, and are used to sense the rotation of the outer tube body 1733 to a first position (or first angle) and a second position (or first angle) respectively. two angles).

Specifically, when the outer tube body 1733 rotates to the first position, it will drive the second shielding plate 153 to rotate to the open state, and when the outer tube body 1733 rotates to the second position, it will drive the second shielding plate 153 to rotate to shaded state. There is basically no relative rotation between the outer tube body 1733 and the second shielding plate 153, so the two sensing units 131 can sense the rotation of the outer tube body 1733 to the first position or the second position, and confirm the second shielding plate Whether 153 is indeed operating in an open state or a shielded state.

In another embodiment of the present invention, two sensing units 131 can also be provided on the side of the shaft body 1731 of the shaft sealing device 173, wherein there is a distance between the two sensing units 131, and they are used to sense the shaft respectively. The body 1731 rotates to a third position (or third angle) and a fourth position (or fourth angle).

When the shaft body 1731 rotates to the third position, it will drive the first shielding plate 151 to rotate to the open state, and when the shaft body 1731 rotates to the fourth position, it will drive the first shielding plate 151 to rotate to the shielding state. Therefore, the two sensing units 131 can sense that the shaft body 1731 rotates to the third position or the fourth position, so as to confirm whether the first shielding plate 151 is indeed rotated to the open state or the shielding state.

In addition, in order to further confirm whether the first shielding plate 151 and the second shielding plate 153 are operating in the shielding state, as shown in FIG. 2, FIG. 4 and FIG. Set a first reflective surface 1411 and a second reflective surface 1431, and set a first distance sensing unit 191 and a second distance sensing unit 193 on the reaction chamber 11, such as the first distance sensing unit 191 and The second distance sensing unit 193 may be an optical rangefinder.

Specifically, the first connecting arm 141 and the second connecting arm 143 respectively include a first protruding portion 1413 and a second protruding portion 1433, and the first reflective surface 1411 and the second reflective surface 1431 are respectively arranged on the second On the first protruding portion 1413 and the second protruding portion 1433 . For example, the first protruding portion 1413 and the second protruding portion 1433 respectively protrude from the first connecting arm 141 and the second connecting arm 143 along the radial direction of the first shielding plate 151 and the second shielding plate 153 .

The first distance sensing unit 191 is disposed on the same side of the reaction chamber 11 as the first connecting arm 141 and the first shielding plate 151, wherein the first distance sensing unit 191 is used to project a first sensing beam L1 to the first sensing beam L1. A connecting arm 141 . In actual application, the setting position of the first distance sensing unit 191 can be adjusted, so that when the first shielding plate 151 operates in the shielding state, the first sensing beam L1 generated by the first distance sensing unit 191 is projected on the first connecting arm. 141 of the first reflective surface 1411. At this time, the first sensing light beam L1 is perpendicular to the first reflective surface 1411 , so that the first distance sensing unit 191 receives the first sensing light beam L1 reflected by the first reflective surface 1411 . The first distance sensing unit 191 can measure the distance between the first connecting arm 141 and the first distance sensing unit 191 by the reflected first sensing light beam L1, and judge whether the first shielding plate 151 is It is indeed operating in the shaded state.

The second distance sensing unit 193 is disposed on the same side of the reaction chamber 11 as the second connecting arm 143 and the second shielding plate 153, wherein the second distance sensing unit 193 is used to project a second sensing beam L2 to the first sensing beam L2. Two connecting arms 143 . When the second shielding plate 153 operates in the shielding state, the second sensing light beam L2 generated by the second distance sensing unit 193 will project on the second reflecting surface 1431 of the second connecting arm 143, wherein the second sensing light beam L2 and The second reflective surface 1431 is vertical, so that the second distance sensing unit 193 can receive the reflected second sensing light beam L2 to measure the distance between the second connecting arm 143 and the second distance sensing unit 193, and Based on the measured distance, it is judged whether the second shielding plate 153 is actually operating in the shielding state.

In one embodiment of the present invention, as shown in FIG. 6 and FIG. 7, two sensing areas 113 are respectively arranged on the reaction chamber 11, wherein the two sensing areas 113 protrude from the reaction chamber 11, and the first distance sensor The measuring unit 191 and the second distance sensing unit 193 are respectively disposed in the two sensing areas 113 .

In addition, a shielding plate sensing unit 195 may be further provided on the two sensing areas 113 respectively, wherein the two shielding plate sensing units 195 are used to sense the first shielding plate 151 and the first shielding plate 151 entering the two sensing areas 113 respectively. The second shielding plate 153 . When the two shielding plate sensing units 195 sense the first shielding plate 151 and the second shielding plate 153 , it can be determined that the first shielding plate 151 and the second shielding plate 153 are operating in an open state, as shown in FIG. 7 . When operating in the open state, the first shielding plate 151 and the second shielding plate 153 will be far away from each other, wherein a space 152 will be formed between the first shielding plate 151 and the second shielding plate 153, so that the first shielding plate 151 and the second shielding plate 151 The shielding plate 153 does not shield the carrying tray 165 .

In one embodiment of the present invention, as shown in FIG. 1 , a stopper 111 can be provided in the accommodation space 12 of the reaction chamber 11, wherein one end of the stopper 111 is connected to the reaction chamber 11, and the other end of the stopper 111 is An opening 112 is formed. When the carrier plate 165 approaches the target 161 , it will enter or contact the opening 112 formed by the blocking member 111 . The reaction chamber 11, the carrier plate 165 and the stopper 111 will partition a reaction space in the accommodation space 12, and deposit a thin film on the surface of the substrate 163 in the reaction space, which can prevent the reaction chamber 11 and the reaction space outside the reaction space from A deposited film is formed on the surface of the susceptor 165 .

Advantages of the present invention:

Provide a novel double-opening type shielding mechanism, at least one groove is provided on the shielding plate to reduce the weight of the first and second shielding plates, and reduce the load of the driving motor to carry and drive the first and second shielding plates .

The above description is only a preferred embodiment of the present invention, and is not intended to limit the implementation scope of the present invention, that is, any equal changes and changes made according to the shape, structure, characteristics and spirit described in the scope of the patent application of the present invention Modifications should be included in the patent application scope of the present invention.

Claims (10)

1. A thin film deposition machine, characterized in that, comprising: A reaction chamber, including an accommodating space; a carrier tray, located in the accommodating space, and used to carry at least one substrate; and A double-opening shielding mechanism, comprising: a first shielding plate located in the accommodating space; a second shielding plate located in the accommodating space, wherein both the first shielding plate and the second shielding plate include at least one groove facing the direction of the carrier tray; and A driving device, comprising: a shaft sealing device connected to the first shielding plate and the second shielding plate; At least one driving motor is connected to the shaft sealing device, and drives the first shielding plate and the second shielding plate to swing in opposite directions through the shaft sealing device, so that the first shielding plate and the second shielding plate are in a switching between an open state and a shielding state, wherein a space is formed between the first shielding plate and the second shielding plate operating in the open state, and the first shielding plate and the second shielding plate operating in the shielding state The second shielding boards are close to each other and are used to shield the carrier tray. 2. The thin film deposition machine according to claim 1, wherein the shaft sealing device comprises an outer tube body and a shaft body, the outer tube body includes a space for accommodating the shaft body, the drive The motor is connected to the first shielding plate through the shaft body, connected to the second shielding plate through the outer tube body, and synchronously drives the shaft body and the outer tube body to rotate in opposite directions. 3. The thin film deposition machine according to claim 2, characterized in that it comprises two sensing units adjacent to the outer tube body, and there is a distance between the two sensing units, which are used for sensing The outer tube rotates to a first position and a second position, wherein when the outer tube rotates to the first position, the second shielding plate operates in the open state, and the outer tube rotates to the second position, the second shielding plate operates in the shielding state. 4. The thin film deposition machine according to claim 2, characterized in that it comprises a first connecting arm and a second connecting arm, the shaft is connected to the first shielding plate through the first connecting arm, and the outer The pipe body is connected to the second shielding plate through the second connecting arm, and at least one perforation portion is disposed on the first connecting arm and the second connecting arm. 5. The thin film deposition machine according to claim 4, comprising a first distance sensing unit and a second distance sensing unit, and the first connecting arm has a first reflective surface, the first distance sensing unit The two connecting arms have a second reflective surface, wherein the first distance sensing unit and the second distance sensing unit are arranged on the reaction cavity, and are respectively used to transmit a first sensing light beam and a second sensing light beam. The sensing beam is projected onto the first reflective surface of the first connecting arm and the second reflective surface of the second connecting arm to confirm that the first shielding plate and the second shielding plate operate in the shielding state. 6. A double-opening shielding mechanism, characterized in that it is suitable for a thin film deposition machine, including: a first shielding plate; A second shielding plate, wherein both the first shielding plate and the second shielding plate include at least one groove disposed on the lower surfaces of the first shielding plate and the second shielding plate; and A driving device, comprising: a shaft sealing device connected to the first shielding plate and the second shielding plate; At least one driving motor is connected to the shaft sealing device, and drives the first shielding plate and the second shielding plate to swing in opposite directions through the shaft sealing device, so that the first shielding plate and the second shielding plate are in a switching between an open state and a shielding state, wherein a space is formed between the first shielding plate and the second shielding plate operating in the open state, and the first shielding plate and the second shielding plate operating in the shielding state The second shielding boards are close to each other and form a shielding part. 7. The double-opening shielding mechanism according to claim 6, wherein the shaft sealing device includes an outer tube body and a shaft body, the outer tube body includes a space for accommodating the shaft body, the drive The motor is connected to the first shielding plate through the shaft body, connected to the second shielding plate through the outer tube body, and synchronously drives the shaft body and the outer tube body to rotate in opposite directions. 8. The double-opening type shielding mechanism according to claim 7, characterized in that it comprises two sensing units adjacent to the outer tube body, there is a distance between the two sensing units, and are used to sense The outer tube rotates to a first position and a second position, wherein when the outer tube rotates to the first position, the second shielding plate operates in the open state, and the outer tube rotates to the second position, the second shielding plate operates in the shielding state. 9. The double-opening shielding mechanism according to claim 7, characterized in that it comprises a first connecting arm and a second connecting arm, the shaft is connected to the first shielding plate through the first connecting arm, and the outer The pipe body is connected to the second shielding plate through the second connecting arm, and at least one perforation portion is disposed on the first connecting arm and the second connecting arm. 10. The double-opening type shielding mechanism according to claim 9, wherein the first connecting arm has a first protruding portion, the first protruding portion includes a first reflective surface, and the second connecting arm Then there is a second protruding portion, and the second protruding portion includes a second reflective surface.

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