CN115857279A - 保持装置、曝光装置以及物品制造方法 - Google Patents

保持装置、曝光装置以及物品制造方法 Download PDF

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Publication number
CN115857279A
CN115857279A CN202211024317.XA CN202211024317A CN115857279A CN 115857279 A CN115857279 A CN 115857279A CN 202211024317 A CN202211024317 A CN 202211024317A CN 115857279 A CN115857279 A CN 115857279A
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China
Prior art keywords
holding
optical element
holding device
base
holding portion
Prior art date
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Pending
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CN202211024317.XA
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English (en)
Chinese (zh)
Inventor
白畑恭平
羽切正人
木村一贵
关美津留
由井友树
西川友弘
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Publication of CN115857279A publication Critical patent/CN115857279A/zh
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN202211024317.XA 2021-09-24 2022-08-25 保持装置、曝光装置以及物品制造方法 Pending CN115857279A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-155516 2021-09-24
JP2021155516A JP7328292B2 (ja) 2021-09-24 2021-09-24 保持装置、露光装置、及び物品の製造方法

Publications (1)

Publication Number Publication Date
CN115857279A true CN115857279A (zh) 2023-03-28

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CN202211024317.XA Pending CN115857279A (zh) 2021-09-24 2022-08-25 保持装置、曝光装置以及物品制造方法

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JP (1) JP7328292B2 (ja)
KR (1) KR20230043714A (ja)
CN (1) CN115857279A (ja)
TW (1) TW202314397A (ja)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009058762A1 (de) 2009-12-14 2011-06-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ablenkeinrichtung für eine Projektionsvorrichtung, Projektionsvorrichtung zum Projizieren eines Bildes und Verfahren zum Ansteuern einer Ablenkeinrichtung für eine Projektionsvorrichtung
DE102012212503B4 (de) 2012-07-17 2014-11-20 Carl Zeiss Smt Gmbh Lithographieanlage und verfahren
JP2018005189A (ja) 2016-07-08 2018-01-11 キヤノン株式会社 保持装置、光学装置、および移動体
JP2018066958A (ja) 2016-10-21 2018-04-26 キヤノン株式会社 光学装置、投影光学系、露光装置及び物品の製造方法
DE102017207763A1 (de) 2017-05-09 2018-04-19 Carl Zeiss Smt Gmbh Gelenkanordnung für ein optisches Element, insbesondere in einer mikrolithographischen Projektionsbelichtungsanlage
CN110703407B (zh) 2019-10-17 2020-10-30 中国科学院长春光学精密机械与物理研究所 高精度拼接反射镜支撑驱动结构

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Publication number Publication date
JP2023046745A (ja) 2023-04-05
KR20230043714A (ko) 2023-03-31
JP7328292B2 (ja) 2023-08-16
TW202314397A (zh) 2023-04-01

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