CN115841977A

CN115841977A - Wafer conveying device

Info

Publication number: CN115841977A
Application number: CN202310150809.1A
Authority: CN
Inventors: 祝佳辉; 周磊; 张庆; 鲍伟成; 葛敬昌; 王文广; 叶莹
Original assignee: Shanghai Guona Semiconductor Technology Co ltd
Current assignee: Shanghai Guona Semiconductor Technology Co ltd
Priority date: 2023-02-22
Filing date: 2023-02-22
Publication date: 2023-03-24
Anticipated expiration: 2043-02-22
Also published as: CN115841977B

Abstract

The invention discloses a wafer handling device, which comprises a telescopic rotating mechanism capable of moving up and down under the action of a lifting mechanism, wherein the telescopic rotating mechanism comprises a rotating part, a telescopic part and an end effector; the rotating part is used for driving the telescopic part to rotate so that the end effector positioned on the telescopic part can face the wafer boat or the wafer box; the telescopic part is used for driving the end effector to extend or retract so that the end effector can enter a wafer boat or a wafer box to take and place wafers; the end effector comprises plate forks and plate fork mounting plates which are arranged in a one-to-one correspondence manner, and angle adjusting mechanisms are arranged on the plate fork mounting plates; the angle adjusting mechanism comprises a second adjusting plate capable of moving along the length direction of the piece fork, the upper end of the second adjusting plate is provided with a first plane fixedly connected with the piece fork, and the lower end of the second adjusting plate is provided with a first cambered surface capable of sliding along the piece fork mounting plate; and a second cambered surface for the first cambered surface to slide is arranged on the blade fork mounting plate. The invention can effectively improve the transmission efficiency and the transmission precision of the wafer.

Description

Wafer conveying device

Technical Field

The invention relates to the technical field of wafer transmission equipment, in particular to a wafer handling device.

Background

In semiconductor manufacturing, wafers are used as basic carriers for manufacturing chips, and a plurality of processes are required, and in the process, the wafers in the carriers (cassettes) are generally transferred to a boat capable of holding a plurality of wafers at intervals up and down, and then the boat is directly transferred into each process chamber, so as to simultaneously perform the processes on the plurality of wafers. In order to realize the wafer circulation between the wafer cassette and the wafer boat, a conveying mechanism is generally arranged between the wafer cassette and the wafer boat, but in the existing conveying mechanism, the matching degree of each moving part is low, and the wafer conveying efficiency and the conveying precision are influenced.

Disclosure of Invention

In order to overcome the above disadvantages, an object of the present invention is to provide a wafer handling apparatus, which can effectively improve wafer transfer efficiency and transfer accuracy.

In order to achieve the above purposes, the invention adopts the technical scheme that: a wafer handling device is positioned between a wafer boat and a carrier and comprises a telescopic rotating mechanism capable of moving up and down under the action of a lifting mechanism, wherein the telescopic rotating mechanism comprises a rotating part, a telescopic part and an end effector; the rotating part is used for driving the telescopic part to rotate so that the end effector positioned on the telescopic part can face the wafer boat or the wafer box; the telescopic part is used for driving the end effector to extend or retract so that the end effector can enter a wafer boat or a wafer box to take and place wafers;

the end effector comprises a single-piece fork group and a multi-piece fork group, the single-piece fork group and the multi-piece fork group respectively comprise piece forks and piece fork mounting plates which are arranged in a one-to-one correspondence manner, and angle adjusting mechanisms are arranged on the piece fork mounting plates; the angle adjusting mechanism comprises a second adjusting plate which can move along the length direction of the piece fork under the action of the driving part, the upper end of the second adjusting plate is provided with a first plane fixedly connected with the piece fork, and the lower end of the second adjusting plate is provided with a first cambered surface capable of sliding along the piece fork mounting plate; the piece fork mounting plate is provided with a second cambered surface for the first cambered surface to slide, the second cambered surface is a lower concave arc surface, and the second cambered surface is gradually inclined upwards from the direction away from the clamping end of the piece fork to the direction close to the clamping end of the piece fork.

The invention has the beneficial effects that:

1. the lifting mechanism drives the telescopic rotating mechanism to move up and down so that the end effector of the telescopic rotating mechanism can move to a proper height for taking and placing the wafer; the rotating part can drive the end effector to rotate randomly in the horizontal direction, so that the end effector can be aligned to the wafer box or the wafer boat; the end effector can be driven by the telescopic part to linearly extend and retract along the horizontal direction, so that the end effector can enter a wafer box or a wafer boat along the horizontal direction to take and place wafers; the flexible movement of the end effector in multiple directions is realized through the cooperation of the lifting mechanism, the rotating part and the telescopic part, so that the transmission efficiency of the wafer is improved;

2. in the end effector, the single-wafer fork group can detect the wafer placing condition in a wafer box or a wafer boat and can take and place a single wafer, and the multiple-wafer fork group can simultaneously take and place multiple continuous wafers so as to improve the wafer taking and placing efficiency; the single-piece fork group and the multi-piece fork group are matched to reasonably pick and place the wafers under different working conditions, so that the application range of the end effector is enlarged;

3. the inclination angle of the wafer fork can be adjusted through the arrangement of the angle adjusting mechanism, so that the problem that the wafer fork sags due to clamping of the wafer can be solved, and the levelness of the wafer fork is ensured, so that the wafer fork can smoothly enter a wafer boat or a wafer box to pick and place the wafer.

4. In angle adjustment mechanism, guaranteed through the cooperation of first cambered surface, second cambered surface that the second regulating plate smoothly slided on the piece fork mounting panel, and injectd the first plane that makes the second regulating plate in sliding through the radian to the second cambered surface and can produce the slope, and then realize the slope of piece fork, reach the purpose of regulating piece fork inclination.

Further, the second cambered surface is provided with a cambered surface sliding groove along the length direction of the blade fork, and the first cambered surface is provided with a cambered surface sliding rail matched with the cambered surface sliding groove. The sliding direction of the first cambered surface along the second cambered surface can be limited by the cooperation of the cambered surface sliding groove and the cambered surface sliding rail, and the sliding stability is further improved.

Further, the driving part comprises a driving motor, a transmission part, a screw rod and an adapter plate; the screw rod is arranged on the piece fork mounting plate along the length direction of the piece fork, and a first nut seat is sleeved on the screw rod in a threaded manner; the transmission part can drive the screw rod to rotate under the action of the driving motor; the first nut seat is connected with the second adjusting plate through the adapter plate, and the adapter plate is hinged with the first nut seat and the second adjusting plate respectively. When the transmission part drives the screw rod to rotate under the action of the driving motor, the first nut seat can only linearly move along the screw rod due to the limitation of the adapter plate, so that the first nut seat can push the adapter plate to synchronously move, the adapter plate immediately pushes the second adjusting plate to slide along the second cambered surface, and the smooth inclination of the second adjusting plate in the sliding process can be ensured through the hinging of the adapter plate, the first nut seat and the second adjusting plate.

Further, the transmission piece comprises a shaft rod, a first bevel gear and a second bevel gear; the shaft lever is arranged along the width direction of the sheet fork, and one end of the shaft lever is connected with a driving motor arranged on the sheet fork mounting plate; the first bevel gear is fixedly sleeved on the shaft rod, the second bevel gear is fixedly sleeved on the screw rod, and the first bevel gear and the second bevel gear are vertically arranged and can be in meshing transmission. When the driving motor is started, the shaft lever rotates immediately and drives the first bevel gear to rotate synchronously, and at the moment, the rotation of the first bevel gear can be transmitted to the second bevel gear due to the meshing of the second bevel gear and the first bevel gear, so that the rotation of the screw rod is realized; the driving force of the driving motor can be stably transmitted to the screw rod through the transmission part.

Further, still be equipped with the piece fork angle detection portion that is used for detecting the piece fork gradient on the piece fork mounting panel, piece fork angle detection portion includes the sensor fixed plate of rigid coupling in piece fork mounting panel one side, and the sensor fixed plate extends out the piece fork mounting panel towards the one end of piece fork and an organic whole is provided with the board of bending that is located the piece fork below, and installs the pressure sensor who supplies the piece fork butt on the board of bending. In an initial state, the chip fork and the pressure sensor are in a critical abutting state, namely the chip fork abuts against the pressure sensor, but no pressure is generated on the pressure sensor, and at the moment, the pressure sensor does not detect a pressure signal (the pressure signal is 0); when the wafer is clamped by the wafer fork, the clamping end of the wafer fork is sagged, at the moment, the wafer fork above the pressure sensor is stressed and is pressed downwards against the pressure sensor, and the pressure sensor can detect a pressure signal. The drooping condition of the piece fork can be timely known through the arrangement of the piece fork angle detection part, and a basis is provided for the adjustment quantity of the angle adjustment mechanism.

Furthermore, the multi-piece fork group comprises a plurality of forks and a variable pitch part, the plurality of forks comprise a plurality of groups of distance adjusting piece fork groups which are arranged from inside to outside along the vertical direction, and each group of distance adjusting piece fork group comprises two distance adjusting piece forks which are arranged up and down; the pitch-adjusting part comprises pitch-adjusting transmission parts which are arranged in one-to-one correspondence with the pitch-adjusting piece fork groups, and all the pitch-adjusting transmission parts are connected through a synchronous driving mechanism and can enable the moving stroke of the pitch-adjusting piece forks of the multiple groups of pitch-adjusting piece fork groups to be sequentially multiplied from inside to outside.

The distance between the chip forks in the multi-chip fork group can be adjusted through the arrangement of the distance changing part, so that the distance between the chip forks is matched with the distance between wafers in a wafer boat or a wafer box; the synchronous movement of the distance adjusting piece forks of the multiple distance adjusting piece fork groups can be realized through the matching of the distance adjusting transmission parts and the synchronous driving mechanism, so that the integral distance adjusting efficiency of the multiple distance adjusting piece fork groups is improved; and the moving stroke of the distance adjusting piece forks of the plurality of distance adjusting piece fork groups is multiplied from inside to outside in sequence, so that the distance between every two adjacent piece forks can be kept the same all the time in the distance adjusting process, and continuous wafers can be taken and placed.

Furthermore, the distance adjusting transmission part comprises a bidirectional screw rod and two screw rod nuts sleeved on the bidirectional screw rod, and the two screw rod nuts are respectively connected with the two distance adjusting piece forks in the same group so as to drive the two distance adjusting piece forks in the same group to synchronously and reversely move. Set up two screw portions that the pitch is the same and screw direction is opposite on two-way lead screw respectively to with two screw-nut suit respectively on two screw portions, when two-way lead screw rotated, two screw-nut can carry out reverse equidistance along the screw portion that corresponds and remove, and then drive two reverse equidistance of roll adjustment piece fork and remove.

Further, the synchronous driving mechanism comprises a synchronous driving motor, a synchronous belt and a plurality of synchronous wheels, wherein the synchronous belt is wound on the plurality of synchronous wheels in a closed loop; the synchronizing wheels and the bidirectional screw rods are arranged in one-to-one correspondence, the two-way screw rods corresponding to the synchronizing wheels are coaxially connected to the axes of the synchronizing wheels, and the angular speeds of the synchronizing wheels are multiplied in sequence, so that the rotating speeds of the corresponding two-way screw rods are multiplied in sequence; the output shaft of the synchronous driving motor is coaxially connected with a synchronous wheel. The synchronous driving mechanism can realize that a single synchronous driving motor drives a plurality of synchronous wheels to synchronously rotate, thereby realizing the synchronous operation of a plurality of groups of distance adjusting piece forks; can drive the synchronous operation of multiunit roll adjustment piece fork through the injecing to synchronous wheel angular velocity for the moving distance of different group roll adjustment piece forks is different, and then satisfies the equidistant requirement between the adjacent two forks in the accommodation process.

Further, the multi-piece fork group further comprises a variable-pitch box body used for containing the variable-pitch part, the variable-pitch box body is fixedly connected to the telescopic part, an installation opening for the piece fork installation plate to penetrate is formed in one side, facing the piece fork, of the variable-pitch box body, and a detection part used for detecting whether the wafer is clamped or not is arranged on the piece fork installation plate. Live displacement portion through the cladding of displacement box body, the problem that the granule that can effectively avoid displacement portion operation in-process to produce pollutes the piece fork is then convenient for realize being connected of piece fork and displacement portion through the setting of installation open-ended, then whether have the wafer on the detection piece fork of being convenient for through the setting of detection portion.

Further, the single-piece fork group comprises a piece fork and a piece fork fixing portion, the piece fork fixing portion comprises a piece fork mounting plate used for mounting the piece fork, a detection portion used for detecting whether the wafer is clamped or not is arranged on the piece fork mounting plate, and the piece fork fixing portion is fixedly connected with the telescopic portion. The clamping operation of the single piece fork can be realized through the arrangement of the single piece fork group, and whether a wafer exists on the single piece fork or not is convenient to detect through the arrangement of the detection part.

Furthermore, the telescopic part comprises a telescopic shell, and a first driving part and a second driving part which are used for independently driving the single-piece fork group and the multi-piece fork group to move along the length direction of the telescopic shell are respectively arranged on the telescopic shell. Independent telescopic motion of the single-piece fork group and the multi-piece fork group is achieved through the arrangement of the first driving piece and the second driving piece, so that the single-piece fork group or the multi-piece fork group can be selected to pick and place the wafer according to actual working conditions.

Further, the rotating part comprises a rotating base, a rotating motor and a synchronous belt group, wherein the rotating base is fixedly connected to the lifting mechanism and can move up and down along the vertical direction under the action of the lifting mechanism; the rotating motor is connected with the telescopic part through the synchronous belt group.

Further, the synchronous belt group comprises a driving wheel, a driven wheel and a belt, the driving wheel is coaxially connected with an output shaft of the rotating motor, the driven wheel is installed on the rotating base, a fixing flange used for connecting the telescopic part is coaxially connected to the driven wheel, and the belt is wound on the driving wheel and the driven wheel in a closed loop mode. The arrangement of the synchronous belt group can improve the rotating stability of the telescopic part.

Further, a tension wheel capable of abutting against the belt is arranged between the driving wheel and the driven wheel, and the tension wheel is movably arranged on the rotating base through an adjusting piece. The tensioning of belt can be guaranteed through the setting of take-up pulley, and the tensile force of belt can be adjusted according to actual demand through the removal of take-up pulley.

Further, the lifting mechanism comprises a screw rod motor which is vertically arranged on the lifting frame, and a second nut seat is sleeved on a screw rod of the screw rod motor; the lifting frame is further provided with vertical rails symmetrically arranged on two sides of the screw rod, two ends of the second nut seat are respectively connected with connecting plates in one-to-one correspondence with the vertical rails, one side of each connecting plate is provided with a sliding block capable of sliding along the corresponding vertical rail, and the other side of each connecting plate can be abutted to the telescopic rotating mechanism and is fixedly connected with the telescopic rotating mechanism. The movement of the second nut seat can be guided through the arrangement of the vertical rail and the sliding block.

Furthermore, the second nut seat comprises a nut seat body, and two ends of the nut seat body can be respectively abutted against the side walls of the two connecting plates; the two ends of the nut seat body are respectively provided with extension plates in one-to-one correspondence with the connecting plates, and the extension plates can abut against one side, far away from the vertical rail, of the corresponding connecting plates. The positions of the second nut seat and the connecting plate are limited by utilizing the structures of the second nut seat and the connecting plate, so that the moving stability and synchronism of the second nut seat and the connecting plate are improved on the premise of not increasing the cost, and the movement reliability of the lifting movement of the telescopic rotating mechanism is further ensured.

Drawings

FIG. 1 is a schematic structural diagram of a wafer handling device according to an embodiment of the present invention;

FIG. 2 is a schematic structural view of an end effector according to an embodiment of the present invention;

FIG. 3 is a schematic structural diagram of a multi-piece fork set according to an embodiment of the present invention;

FIG. 4 is a schematic view of an assembly structure of a piece fork and a variable-pitch portion of the multi-piece fork set according to the embodiment of the invention;

FIG. 5 is a schematic structural diagram of a multi-piece fork assembly having only one set of adjustment fork assemblies in accordance with an embodiment of the present invention;

FIG. 6 is a rear view of a multi-piece fork set in accordance with an embodiment of the present invention;

FIG. 7 isbase:Sub>A sectional view taken along line A-A of FIG. 6;

FIG. 8 is a sectional view taken along line B-B of FIG. 6;

FIG. 9 is a schematic view of the assembly of the detecting portion of the multi-piece fork set according to the embodiment of the present invention;

FIG. 10 is a schematic structural diagram of a monolithic fork set in accordance with an embodiment of the present invention;

FIG. 11 is a schematic view of the angle adjustment mechanism of the embodiment of the present invention mounted on the plate fork mounting plate;

FIG. 12 is a partial enlarged view of portion A of FIG. 11;

FIG. 13 is an exploded view of an angle adjustment mechanism of an embodiment of the present invention;

FIG. 14 is a schematic structural view of a second regulating plate according to an embodiment of the present invention;

FIG. 15 is a schematic structural diagram of a plate fork angle detection portion according to an embodiment of the present invention;

FIG. 16 is a schematic view of an embodiment of the present invention with a first plane in a horizontal plane;

FIG. 17 is a schematic structural diagram of an embodiment of the present invention in which the first plane is at an inclined plane;

FIG. 18 is a schematic view of an end effector of an embodiment of the present invention assembled to a telescoping portion;

FIG. 19 is a schematic structural diagram of the telescopic part according to the embodiment of the present invention;

FIG. 20 is a schematic view of a rotary part according to an embodiment of the present invention;

FIG. 21 is a partial enlarged view of portion B of FIG. 20;

FIG. 22 is a schematic structural diagram of a lifting mechanism according to an embodiment of the present invention;

FIG. 23 is a schematic view of a second nut seat and a connecting plate according to an embodiment of the present invention.

In the figure:

1-a lifting mechanism; 11-a lifting frame; 12-a screw motor; 13-a second nut seat; 131-

A nut seat body; 132-an extension plate; 14-a vertical rail; 15-a connecting plate; 151-limiting column; 16-bottom support;

2-a rotating part; 21-rotating the base; 211-base runner; 212-a first regulation plate; 213-kidney shaped hole; 22-synchronous band group; 221-a driving wheel; 222-a belt; 223-a tensioning wheel; 23-a fixed flange;

3-a telescoping section; 31-a telescopic housing; 32-a drive assembly; 321-motor number one; 322-a set of drive belts; 323-connecting member; 33-drive assembly number two; 34-a guide rail;

4-an end effector; 41-single piece fork set; 411. 421-piece fork; 412-plate fork fixing part; 42-multi-piece fork set; 422-variable pitch fixing seat; 423-bidirectional screw rod; 424-guide bar; 425-a chip fork mounting plate; 4251-a second cambered surface; 4252-cambered surface sliding groove; 4253-Limit plate; 4254-lead screw mounting seat; 426-synchronous belt; 427-a synchronizing wheel; 428-variable pitch case; 43-an angle adjustment mechanism; 431-a second adjustment plate; 4311-first plane; 4312-first cambered surface; 4313-cambered surface slide rail; 432-drive motor; 433-a screw rod; 434-a patch panel; 435-a first nut seat; 436-drive mount; 437-shaft lever; 438-bevel gear No. one; 439-second bevel gear; 44-sensor mount; 441-pressure sensor;

5-a detection part.

Detailed Description

The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the invention easier to understand by those skilled in the art, and thus will clearly and clearly define the scope of the invention.

Examples

Referring to fig. 1, the wafer handling device of the present invention is located between a wafer boat and a carrier, and includes a telescopic rotating mechanism capable of moving up and down under the action of a lifting mechanism 1, wherein the telescopic rotating mechanism includes a rotating part 2, a telescopic part 3 and an end effector 4. The rotating part 2 is used to drive the telescopic part 3 to rotate, so that the end effector 4 on the telescopic part 3 can face the wafer boat or wafer cassette. The telescopic portion 3 is used to drive the end effector 4 to extend or retract, so that the end effector 4 can enter a wafer boat or a wafer cassette to pick and place wafers.

Referring to fig. 2, the end effector 4 includes a single-blade fork group 41 and a multi-blade fork group 42, wherein the single-blade fork group 41 is used for detecting the wafer placement condition in the wafer cassette or the wafer boat and can pick and place a single wafer; the multi-piece fork set 42 is used for picking and placing a plurality of continuous wafers, and the picking and placing quantity of the wafers is consistent with the quantity of the pieces of forks in the multi-piece fork set. When the number of the continuous wafers in the wafer box is less than that of the wafer forks in the multi-wafer fork group 42 or the wafers in the wafer box are discontinuous wafers, only the single wafer fork group 41 can be used for sequentially taking and placing the single wafers. It should be noted that the term "continuous" means that the pitch between any two adjacent wafers in a group of wafers is the same, and the term "discontinuous" means that the pitch between at least one adjacent two wafers in the group of wafers is different from the pitch between any other adjacent two wafers in the group of wafers.

When the multi-piece fork group 42 takes and places continuous wafers, the problem that the pitch between the pieces of forks in the multi-piece fork group 42 is not matched with the pitch between the wafers may occur, therefore, in some embodiments, the multi-piece fork group 42 is designed to be a structure with adjustable pitch between the pieces of forks, specifically, as shown in fig. 3 and fig. 5, the multi-piece fork group 42 includes a plurality of pieces of forks 421 distributed up and down and a variable pitch portion for adjusting the pitch between the pieces of forks 421, and the pitches between two adjacent pieces of forks 421 are the same. When the number of the plate forks 421 is even, the plurality of plate forks 421 include a plurality of distance adjusting plate fork sets arranged from inside to outside along the vertical direction, and each distance adjusting plate fork set includes two distance adjusting plate forks arranged up and down. When the number of the plate forks 421 is odd, the plurality of plate forks 421 include a fixed plate fork and a plurality of distance-adjusting plate fork sets disposed on two sides of the fixed plate fork from inside to outside along the vertical direction (i.e., the odd plate forks use only one middle plate fork as the fixed plate fork, and the rest plate forks are divided into a plurality of distance-adjusting plate fork sets according to the even plate forks). The distance between two adjacent piece forks can be adjusted by moving the distance adjusting piece fork up and down.

In addition, in order to ensure that the distances between two adjacent distance adjusting piece forks are the same after adjustment, the moving strokes of the distance adjusting piece forks of the distance adjusting piece fork groups are sequentially multiplied from inside to outside according to the sequence of the distance adjusting piece fork groups. Exemplarily, as shown in fig. 5, the multi-piece fork set includes a fixed piece fork and a set of distance adjusting piece forks, and at this time, the distance adjusting piece forks of the distance adjusting piece fork set only need to move reversely relative to the fixed piece fork to realize the distance adjustment between the two distance adjusting piece forks and the fixed piece fork; as shown in fig. 3, the multi-piece fork set includes a fixed piece fork and two distance adjusting piece fork sets, and at this time, the distance of movement of one distance adjusting piece fork set far away from the fixed piece fork (outside) needs to be twice as long as that of one distance adjusting piece fork set near the fixed piece fork (inside).

In some embodiments, referring to fig. 4 and fig. 5, the pitch-changing portion includes a pitch-changing fixing seat 422, and the pitch-changing fixing seat 422 is provided with a pitch-adjusting transmission member corresponding to the pitch-adjusting blade fork sets one by one, and the pitch-adjusting transmission member is configured to drive two pitch-adjusting blade forks in the corresponding pitch-adjusting blade fork sets to synchronously and reversely move. All the distance adjusting transmission parts are connected through a synchronous driving mechanism so as to realize synchronous distance adjustment of the multiple distance adjusting piece fork groups.

Specifically, referring to fig. 4 to 8, the distance-adjusting transmission member includes a bidirectional screw 423 disposed on the variable-distance fixing base 422 along the vertical direction, two screw nuts capable of moving in opposite directions are sleeved on the bidirectional screw 423, and the two screw nuts are respectively connected to two distance-adjusting plate forks in the corresponding distance-adjusting plate fork set. To improve the stability of the movement of the blade fork, guide rods 424 may be further provided on both sides of the bidirectional screw 423 to guide the movement of the screw nut along the bidirectional screw. In some embodiments, the pitch change portion further includes a plate fork mounting plate 425 disposed in one-to-one correspondence with the plate fork 421 to connect the corresponding fixed plate fork or pitch plate fork to the pitch pedestal 422 or pitch drive. Specifically, a piece fork mounting plate 425 corresponding to the fixing piece fork is fixedly connected to the variable pitch fixing base 422, and one end of the piece fork mounting plate extends out of the variable pitch fixing base 422 and is connected with the fixing piece fork. The plate fork mounting plate 425 corresponding to the distance-adjusting plate fork is correspondingly and fixedly connected to the screw nut, and one end of the plate fork mounting plate extends out of the variable-distance fixing seat 422 and is connected with the corresponding distance-adjusting plate fork. Further, the feed screw nut may be directly integrated on the chip fork mounting plate 425, and a through hole through which the guide rod 424 passes may be opened on the chip fork mounting plate 425.

In some embodiments, referring to fig. 8, the synchronous driving mechanism includes a synchronous driving motor, a synchronous belt 426, and a plurality of synchronous wheels 427, wherein the synchronous wheels 427 are disposed in one-to-one correspondence with the bidirectional screw 423, and the corresponding bidirectional screw 423 is coaxially connected to the axis of the synchronous wheels 427. The plurality of timing wheels 427 are also commonly wound with a timing belt 426 in a closed loop. The synchronous drive motor is mounted on the pitch-variable fixing base 422, and the output shaft of the synchronous drive motor is coaxially connected with a synchronous wheel 427. And the angular velocities of the synchronizing wheels 427 are adapted to the moving stroke ratios required for the pitch forks of their corresponding sets of pitch forks.

For convenience of understanding, when the number of the plate forks is 5, the third plate fork from top to bottom is a fixed plate fork, the second and fourth plate forks from top to bottom are distance adjusting plate forks (hereinafter referred to as "first distance adjusting plate forks") in the first distance adjusting plate fork set, the first and fifth plate forks from top to bottom are distance adjusting plate forks (hereinafter referred to as "second distance adjusting plate forks") in the second distance adjusting plate fork set, and accordingly, the synchronizing wheel corresponding to the first distance adjusting plate fork set is referred to as a first synchronizing wheel, the synchronizing wheel corresponding to the second distance adjusting plate fork set is referred to as a second synchronizing wheel, and in order to ensure that after distance adjustment, the distance between the second distance adjusting plate fork and the first distance adjusting plate fork on the same side of the fixed plate fork is the same as the distance between the first distance adjusting plate fork and the fixed plate fork, the moving stroke of the second distance adjusting plate fork is twice as the moving stroke of the first distance adjusting plate fork. Therefore, the transmission ratio of the first synchronizing wheel to the second synchronizing wheel is 1. By analogy, when the number of the plate forks is 7, the moving stroke ratio of the distance adjusting plate forks of the three distance adjusting plate fork groups is 1.

In some embodiments, the timing belt 426 and the timing wheel 427 may employ a toothed belt and wheel configuration to further enhance the stability of the transmission therebetween. Furthermore, the synchronous driving mechanism also comprises a tension wheel used for adjusting the tightness of the synchronous belt.

In the multi-piece fork set, the synchronous movement of all the distance adjusting piece forks driven by a single driving source can be realized through the matching of the distance adjusting transmission piece and the synchronous driving mechanism, so that the distance adjusting efficiency is improved; in addition, through setting up a plurality of synchronizing wheel drive ratio to make the synchronous motion of the regulation piece fork of different groups, its travel is multiple increase simultaneously, in order to guarantee that the interval between the adjacent two forks in the adjustment process still keeps the same.

In order to avoid the problem of blade fork contamination caused by particles scattered onto the blade forks during the operation of the pitch varying portion, in some embodiments, referring to fig. 2 and fig. 3, the multi-blade fork set 42 further includes a pitch varying box 428, the pitch varying fixing seat 422, the pitch varying transmission part, and the synchronous driving mechanism are all built in the pitch varying box 428, an installation opening is opened on one side of the pitch varying box 428 facing the blade forks 421, and the blade fork installation plate 425 penetrates through the installation opening to realize the connection between the blade forks and the pitch varying portion. When the multi-piece fork 42 is connected to the extendable portion 3, the variable-pitch case 428 is simply fixed to the extendable portion 3.

In order to detect whether the wafer is gripped by the blade fork 421, in some embodiments, referring to fig. 3 and 9, the detecting part 5 is further mounted on the blade fork mounting plate 425. The detecting portion 5 includes opposite-direction sensors corresponding to the sheet forks 421, wherein the emitting ends and the receiving ends of the opposite-direction sensors corresponding to the sheet forks 421 on the uppermost layer are respectively installed on two sides of the sheet fork installation plate, and the installation heights of the emitting ends and the receiving ends are different, so that when the wafer is located on the sheet forks, the wafer can shield opposite-direction light rays of the emitting ends and the receiving ends. The transmitting ends and the receiving ends of the other correlation sensors are respectively arranged on the corresponding piece fork mounting plate and the last layer of piece fork mounting plate, so that when the wafer enters between the two piece forks, the wafer can shield the correlation light rays of the transmitting ends and the receiving ends.

In some embodiments, referring to fig. 10, the single piece fork set 41 includes a piece fork 411 and a piece fork fixing portion 412, the piece fork 411 is fixedly installed on a piece fork installation plate 425 of the piece fork fixing portion 412, and the piece fork fixing portion 412 is fixedly connected with the telescopic portion 3 to transmit the transmission force of the telescopic portion 3 to the piece fork 411. Similarly, in order to detect whether the wafer is gripped by the wafer fork 411, the wafer fork mounting plate 425 is provided with the detection unit 5, and specifically, the wafer fork mounting plate may be provided with two transmitting ends and receiving ends of the correlation sensor having different heights.

Because the piece fork is limited by the size between the wafer grooves of the wafer box, the piece fork is thin, and the size of the piece fork is long, when the wafer is clamped, the clamping end (the end of the piece fork which is firstly contacted with the wafer) of the piece fork is in a suspended state, and the clamping end of the piece fork is easy to droop. Therefore, in some embodiments, in order to make the blade fork clamp the wafer horizontally as much as possible, the surface of the blade fork mounting plate contacting the blade fork may be an inclined surface, and the inclined surface of the blade fork mounting plate is inclined gradually upward from the end far away from the clamping end of the blade fork to the end near the clamping end of the blade fork to offset the drooping angle of the clamping end of the blade fork. In practice, the angle between the inclined surface and the horizontal plane is generally not greater than 0.4 °.

To further solve the sagging problem when the blade forks grip the wafer, in some embodiments, an angle adjusting mechanism 43 for adjusting the inclination of the

blade forks

411, 421 may be disposed between the blade fork mounting plate 425 and the blade forks 411, 421 (in a single blade fork set, in a multi-blade fork set, the blade forks 421). Specifically, referring to fig. 11 to 14, the angle adjusting mechanism 43 includes a second adjusting plate 431 movable along the length direction of the

blade forks

411 and 421 by the driving portion, the upper end of the second adjusting plate 431 is provided with a first plane 4311 fixedly connected to the

blade forks

411 and 421, and the lower end is provided with a first arc 4312 capable of sliding along the blade fork mounting plate 425. The upper end of the blade fork mounting plate 425 is provided with a second arc surface 4251 matched with the first arc surface 4312, the second arc surface 4251 is a concave arc surface, and the second arc surface 4251 gradually inclines upwards from the direction far away from the blade fork clamping end to the direction close to the blade fork clamping end. When the first arc surface 4312 is completely attached to the second arc surface 4251, the first plane 4311 is in a horizontal plane. When the driving portion drives the second adjusting plate 431 to move toward the clamping end of the blade fork, the first arc surface 4312 can slide upward along the second arc surface 4251, and the first plane 4311 tilts toward the clamping end of the blade fork, so that the

blade forks

411 and 421 fixed on the first plane 4311 can tilt toward the clamping end of the blade fork. In the angle adjusting mechanism, smooth sliding of the second adjusting plate 431 on the plate fork mounting plate 425 is guaranteed through matching of the first cambered surface 4312 and the second cambered surface 4251, the first plane 4311 of the second adjusting plate 431 in sliding can incline by limiting the radian of the second cambered surface 4251, and then the inclination of the

plate forks

411 and 421 is realized, and the purpose of adjusting the inclination angles of the

plate forks

411 and 421 is achieved.

Further, referring to fig. 13 and 14, the second arc surface 4251 is provided with an arc sliding groove 4252 along the length direction of the blade fork, and the first arc surface 4312 is provided with an arc sliding rail 4313 matching with the arc sliding groove 4252. The relative sliding between the arc chute 4252 and the arc slide rail 4313 and the relative sliding between the first arc 4312 and the second arc 4251 are kept synchronous, that is, when the first arc 4312 slides along the second arc 4251, the arc slide rail 4313 can move along the arc chute 4252, and the arc chute 4252 and the arc slide rail 4313 are arranged to limit the second adjusting plate 431 to slide only along the sliding direction of the first arc 4312.

In some embodiments, referring to fig. 13, the upper end of the plate fork mounting plate 425 is further provided with a limit plate 4253 for limiting the moving range of the second adjusting plate 431, and the limit plate 4253 is located at a side close to the lower end of the second arc surface 4251. When the first arc surface 4312 is completely engaged with the second arc surface 4251, the side of the second adjusting plate 431 away from the blade fork gripping end abuts against the limiting plate 4253.

In some embodiments, referring to fig. 11 and 15, a piece fork angle detecting portion for detecting the inclination of the

piece forks

411 and 421 is further disposed on the piece fork mounting plate 425, the piece fork angle detecting portion includes a sensor fixing plate 44 fixedly connected to one side of the piece fork mounting plate 425, the sensor fixing plate 44 extends out of the piece fork mounting plate 425 toward one end of the clamping end of the piece fork and is integrally provided with a bending plate located below the

piece forks

411 and 421, and a pressure sensor 441 is mounted on the bending plate for abutting the

piece forks

411 and 421. When the

chip forks

411 and 421 are kept horizontal, the

chip forks

411 and 421 and the pressure sensor 441 are in a state of critical pressure (the critical pressure means that the

chip forks

411 and 421 abut against the pressure sensor 441, but no pressure is generated on the pressure sensor 441), and at this time, the pressure sensor 441 does not detect a pressure signal (the pressure signal is 0); when the

sheet forks

411 and 421 hang down, the

sheet forks

411 and 421 will press against the pressure sensor 441, and the pressure sensor 441 detects the pressure signal, at this time, the angle adjusting mechanism 43 can be activated to adjust the inclination of the

sheet forks

411 and 421 until the pressure signal of the pressure sensor 441 is 0 again. The drooping condition of the

sheet forks

411 and 421 can be known in time through the arrangement of the sheet fork angle detection part, and a basis is provided for the adjustment quantity of the angle adjustment mechanism 43.

In some embodiments, referring to fig. 12 and 13, the driving part is located on the plate fork mounting plate 425 and includes a driving motor 432, a driving member, a screw rod 433, and an adapter plate 434, wherein the screw rod 433 is arranged on the plate fork mounting plate 425 along the length direction of the

plate forks

411 and 421, and a first nut seat 435 is screwed on the screw rod; the transmission piece can drive the screw rod 433 to rotate under the action of the driving motor 432; the first nut holder 435 is connected to the second adjustment plate 431 through an adapter plate 434, and the adapter plate 431 is hinged to the first nut holder 435 and the second adjustment plate 431, respectively.

Specifically, the hinge structure of the adapter plate 434, the first nut seat 435, and the second adjustment plate 431 is as follows:

the adapter plate 431 comprises a plate body, and one end of the plate body facing the second adjusting plate 431 is integrally provided with a plate body hanging lug capable of being hinged with the second adjusting plate 431. The first nut seat 435 includes a seat body threaded on the lead screw 433, seat body lugs are symmetrically disposed at both ends of the seat body, and a pair of seat body lugs are hinged to the plate body through a pin shaft. When the screw rod 433 rotates, because the adapter plate 434 limits the first nut seat 435, the first nut seat 435 can only move linearly along the screw rod 433, so that the seat body suspension loop can push the adapter plate 434 to move synchronously, and the plate body suspension loop can immediately push the second adjusting plate 431 to slide along the second cambered surface 4251.

Furthermore, in order to ensure the normal operation of the driving portion, the position-avoiding groove for accommodating the screw rod 433 is formed on the position-limiting plate 4253.

In some embodiments, referring to fig. 12, the transmission member includes two transmission mounts 436, a shaft 437, a first bevel gear 438, and a second bevel gear 439, the transmission mounts 436 are provided in two, and the two transmission mounts 436 are disposed on the plate fork mounting plate 425 along the width of the

plate forks

411, 421. The shaft 437 is inserted into a pair of transmission mounts 436, and one end thereof is connected to a drive motor 432 mounted on the blade fork mounting plate 425. The first bevel gear 438 is fixedly sleeved on the shaft rod 437, the second bevel gear 439 is fixedly sleeved on the screw rod 433, and the first bevel gear 438 and the second bevel gear 439 are vertically arranged and can be meshed for transmission. When the driving motor 432 drives the shaft 437 to rotate, the first bevel gear 438 rotates synchronously, and drives the second bevel gear 439 engaged therewith to rotate, thereby driving the screw rod 433 to rotate. In addition, in order to improve the stability of the screw 433 in the rotating process, a screw mounting seat 4254 for the screw 433 to penetrate through is further arranged on the piece fork mounting plate 425, and further, the screw mounting seat 4254 is positioned in the yielding groove.

As shown in fig. 16, in the initial state, the first plane 4311 is in a horizontal state, the first arc surface 4312 and the second arc surface 4251 are completely attached, and at this time, the contact portion between the blade forks 411 and 421 and the first plane 4311 is in a horizontal state; when the clamping ends of the film forks 411 and 421 clamp the wafer and droop, the film fork portion above the pressure sensor 441 is pressed against the pressure sensor 441 by force, and at this time, the pressure sensor 441 can detect a pressure signal; then, the driving motor 432 is started, the transmission member operates and drives the screw rod 433 to rotate, the first nut seat 435 moves along the screw rod 433 and pushes the second adjusting plate 431 to slide along the blade fork mounting plate 425 through the adapter plate 434, so that the first plane 4311 inclines towards the blade fork clamping end, and further the blade forks 411 and 421 fixedly connected with the first plane 4311 can incline towards the blade fork clamping end (as shown in fig. 17, the blade forks form an included angle θ with the horizontal plane) to offset the dropping angle of the clamping ends of the blade forks 411 and 421 until the pressure signal of the pressure sensor 441 is 0, the driving motor 432 stops operating, and the blade forks 411 and 421 and the pressure sensor 441 return to the critical pressing state.

In some embodiments, referring to fig. 18 and 19, the telescopic portion 3 includes a telescopic housing 31 connected to the rotating portion 2, and the telescopic housing 31 is provided with a first driving assembly 32 and a second driving assembly 33 for driving the single-piece fork set 41 and the multi-piece fork set 42 to move along the length direction of the telescopic housing 31. The first driving assembly 32 and the second driving assembly 33 can adopt screw transmission, belt transmission or other linear movement driving modes.

Illustratively, referring to fig. 19, the first driving assembly 32 adopts a belt-driven driving method, and includes a first motor 321, a driving belt set 322, and a connecting member 323. A first motor 321 is installed on the telescopic shell 31 and used for driving the transmission belt set 322 to operate; the driving belt set 322 is disposed in the telescopic housing 31 and includes a driving transmission wheel, a driven transmission wheel and a transmission belt, wherein the driving transmission wheel is coaxially mounted on an output shaft of the first motor 321, the driven transmission wheel is fixedly mounted on the telescopic housing 31, and the transmission belt is wound on the driving transmission wheel and the driven transmission wheel in a closed loop. The connecting member 323 is mounted on the transmission belt and is fixedly connected to the plate fork fixing portion 412 of the single plate fork set 41. When the first motor is started, the driving transmission wheel rotates and drives the transmission belt to transmit, the driven transmission wheel rotates immediately, and the connecting piece 323 connected with the transmission belt moves immediately along with the transmission belt, so that the single-piece fork group 41 is driven to move. It should be noted that the radial dimensions of the driven transmission wheel and the driving transmission wheel are the same, and the axis connecting line of the driven transmission wheel and the driving transmission wheel is parallel to the length direction of the telescopic shell 31, so as to ensure that the transmission belt can drive the connecting member 323 to move along the length direction of the telescopic shell 31, and to realize the extension and retraction of the single fork group 41 along the length direction of the telescopic shell 31. The second driving element 33 can refer to the first driving element 32, and can also be other linear driving structures in the prior art, which are not described in detail in this embodiment.

In order to improve the transmission stability of the transmission belt set 322, in an example, the driving transmission wheel and the driven transmission wheel both use gears, the transmission belt uses a toothed belt capable of meshing with the gears, and the connecting member 323 uses a toothed clip capable of clamping on the toothed belt.

Further, a guide rail 34 arranged along the longitudinal direction of the telescopic housing 31 is further installed in the telescopic housing 31, and a guide rail slider movable along the guide rail 34 is fixed to the connecting member 323. The coupling member 323 can be guided by the engagement of the guide rail 34 and the guide rail slider to suppress the influence of the backlash of the transmission belt on the linear movement of the coupling member 323.

In some embodiments, referring to fig. 20 and 21, the rotating part 2 includes a rotating base 21, a rotating motor, and a synchronous belt set 22, wherein the rotating base 21 is fixed to the lifting mechanism 1 and can move up and down along the Z axis (vertical direction) by the lifting mechanism 1. The rotating electric machine is installed in the rotating base 21, and its output shaft is connected to the telescopic part 3 through a timing belt group 22. Specifically, the timing belt set 22 includes a driving wheel 221, a driven wheel and a belt 222, the driving wheel 221 is coaxially connected with an output shaft of the rotating motor, the driven wheel is installed on the rotating base 21, the driven wheel is coaxially connected with a fixing flange 23 for connecting the telescopic housing 31, and the belt 222 is wound around the driving wheel 221 and the driven wheel in a closed loop. When the rotating motor is started, the driving wheel 221 rotates immediately and drives the belt 222 to transmit, thereby driving the driven wheel to rotate, and the fixed flange 23 rotates immediately and drives the telescopic part 3 to rotate. In one example, the diameter of the driven wheel may be set to be larger than the diameter of the driving wheel 221, so that the rotation speed of the driven wheel is smaller than the rotation speed of the driving wheel 221, and on the premise that the rotation speed of the rotating motor is not changed, the rotational stability of the driven wheel is enhanced, thereby ensuring the rotational stability of the telescopic portion 3.

In some embodiments, in order to adjust the tightness of the belt 222, a tension pulley 223 capable of abutting against the belt 222 is further disposed between the driving pulley 221 and the driven pulley, and the tension pulley 223 is movably mounted on the rotating base 21 through an adjusting member. Specifically, referring to fig. 21, the rotating base 21 is provided with a base sliding groove 211 arranged along a direction perpendicular to a connecting line of the axes of the driving wheel 221 and the driven wheel, the adjusting member includes a first adjusting plate 212 and a guide rod, the first adjusting plate 212 is slidably disposed in the base sliding groove 211, one end of the first adjusting plate is provided with a tension wheel 223, and the other end of the first adjusting plate is provided with a waist-shaped hole 213 arranged along a moving direction of the first adjusting plate. A through hole penetrating through the base sliding groove 211 is formed in the rotating base 21, and the inner diameter of the through hole is matched with the radial size of the guide rod. The guide rod is sequentially arranged in the waist-shaped hole 213 and the through hole in a penetrating way and is fixed on the rotating base 21 through a fastener. The movement range of the first adjusting plate 212 in the base sliding groove 211 can be limited through the matching of the waist-shaped hole 213 and the guide rod, and further, the tension adjusting range of the belt 222 by the tension wheel 223 can be limited.

When the tension pulley 223 is provided, the tension pulley 223 may be provided outside the belt 222, or the tension pulley 223 may be provided inside the belt 222. When the tensioner 223 is disposed outside the belt 222, the tensioner 223 abuts against the outer side face of the belt 222, and when the belt 222 is tensioned, the tensioner 223 pushes the belt 222 from the outer side of the belt 222 to the inner side of the belt 222; when the tension pulley 223 is disposed inside the belt 222, the tension pulley 223 abuts against the inner side surface of the belt 222, and when the belt 222 is tensioned, the tension pulley 223 pushes the belt 222 from the inner side of the belt 222 to the outer side of the belt 222. It should be noted that when the tensioning wheel 223 is disposed outside the belt 222, the contact area between the belt 222 and the driving wheel 221 and the driven wheel is correspondingly reduced during tensioning the belt 222, and therefore, the moving range of the tensioning wheel 223 needs to be reasonably designed to ensure effective transmission between the belt 222 and the driving wheel 221 and the driven wheel.

In some embodiments, referring to fig. 22, the lifting mechanism 1 includes a lead screw motor 12 disposed on the lifting frame 11 along the Z-axis direction (vertical direction), and a second nut seat 13 is sleeved on a lead screw of the lead screw motor 12. In order to improve the stability of the second nut seat 13 during movement, vertical rails 14 symmetrically arranged at two sides of the screw rod along the X-axis direction are further arranged on the lifting frame 11, two ends of the second nut seat 13 are respectively connected with connecting plates 15 in one-to-one correspondence with the vertical rails 14, one side of each connecting plate 15 facing the Y-axis direction is provided with a sliding block capable of sliding along the corresponding vertical rail 14, and the other side of each connecting plate 15 can be abutted to the rotating base 21 and is fixedly connected with the rotating base 21. When the second nut seat 13 moves up and down along the lead screw, the connecting plate 15 moves immediately and drives the slide block to move up and down along the corresponding vertical rail 14. The lifting movement of the connecting plate 15 can be guided by the matching of the two vertical rails 14 and the sliding block, and further the lifting movement of the second nut seat 13 on the screw rod is guided, so that the lifting movement stability of the screw rod is improved.

In some embodiments, referring to fig. 23, the second nut seat 13 includes a nut seat body 131 sleeved on the lead screw, and two ends of the nut seat body 131 in the X-axis direction can abut against the side walls of the two connecting plates 15 respectively, so as to limit the nut seat body 131 in the X-axis direction by the two connecting plates 15. The nut seat body 131 is further provided with extension plates 132 corresponding to the connection plates 15 one to one at two ends in the X-axis direction, and the extension plates 132 can abut against one side of the corresponding connection plate 15 away from the vertical rail 14, so that the extension plates 132 can limit the connection plate 15 in the Y-axis direction, and the sliding block is prevented from slipping off the vertical rail 14. Note that the nut holder body 131 is integrally formed with the extension plate 132. Furthermore, the extending plate 132 is provided with a limiting hole along the Y-axis direction, and the corresponding connecting plate 15 is provided with a limiting post 151 capable of being embedded into the limiting hole. The lifting movement of the second nut seat 13 can be transmitted to the connecting plate 15 through the matching of the limiting hole and the limiting column 151, so that the synchronism of the movement of the connecting plate 15 and the second nut seat 13 is ensured. In this example, the second nut seat 13 and the connecting plate 15 are used for mutual limiting, so that on the premise of not increasing the cost, the stability and the synchronism of the movement of the second nut seat 13 and the connecting plate 15 are improved, and the movement reliability of the telescopic rotating mechanism in the Z-axis direction is further ensured.

In one example, the bottom of the elevator frame 11 is provided with a shoe 16 that can support the telescoping mechanism.

The wafer handling apparatus of the present embodiment has a multi-axis driving method in which the end effector can be arbitrarily rotated in the horizontal direction by the rotating portion so that the end effector can be aligned with the wafer cassette or the wafer boat; the end effector can linearly extend and retract along the horizontal direction through the extension part, so that the end effector can enter the wafer box or the wafer boat along the horizontal direction; the lifting assembly realizes the lifting movement of the end effector so that the end effector can be aligned to the wafers at different height positions; in the end effector, a single-piece fork group and a multi-piece fork group are arranged, wafers under different working conditions (continuous or discontinuous and the like) can be reasonably picked and placed, and the single-piece fork group and the multi-piece fork group can be respectively driven to independently operate through a first driving assembly and a second driving assembly of a telescopic part, so that the single-piece fork group and the multi-piece fork group can independently enter a wafer box or a wafer boat; in the multi-piece fork group, the distance between the pieces of forks in the multi-piece fork group can be adjusted through the arrangement of the variable pitch part, so that the distance between the pieces of forks is matched with the distance between wafers in a wafer boat or a wafer box.

The above embodiments are merely illustrative of the technical concept and features of the present invention, and the present invention is not limited thereto, and any equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.

Claims

1. A wafer handling device is located between wafer boat and carrier, its characterized in that: the device comprises a telescopic rotating mechanism capable of moving up and down under the action of a lifting mechanism, wherein the telescopic rotating mechanism comprises a rotating part, a telescopic part and an end effector; the rotating part is used for driving the telescopic part to rotate so that the end effector positioned on the telescopic part can face the wafer boat or the wafer box; the telescopic part is used for driving the end effector to extend or retract so that the end effector can enter the wafer boat or the wafer box to take and place the wafers;

the end effector comprises a single-piece fork group and a multi-piece fork group, the single-piece fork group and the multi-piece fork group respectively comprise piece forks and piece fork mounting plates which are arranged in a one-to-one correspondence manner, and angle adjusting mechanisms are arranged on the piece fork mounting plates; the angle adjusting mechanism comprises a second adjusting plate which can move along the length direction of the piece fork under the action of a driving part, the upper end of the second adjusting plate is provided with a first plane fixedly connected with the piece fork, and the lower end of the second adjusting plate is provided with a first cambered surface which can slide along the piece fork mounting plate; be equipped with the confession on the piece fork mounting panel the second cambered surface that first cambered surface slided, the second cambered surface is concave arc surface down, just the second cambered surface is got the end from keeping away from the piece fork clamp and is got the direction of getting the end and upwards inclining gradually to being close to the piece fork clamp.

2. The wafer handling device of claim 1, wherein: the second cambered surface is provided with a cambered surface sliding groove along the length direction of the blade fork, and the first cambered surface is provided with a cambered surface sliding rail matched with the cambered surface sliding groove.

3. The wafer handling device of claim 1, wherein: the driving part comprises a driving motor, a transmission part, a screw rod and an adapter plate; the screw rod is arranged on the plate fork mounting plate along the length direction of the plate fork, and a first nut seat is sleeved on the screw rod in a threaded manner; the transmission part can drive the screw rod to rotate under the action of the driving motor; the first nut seat is connected with the second adjusting plate through the adapter plate, and the adapter plate is hinged to the first nut seat and the second adjusting plate respectively.

4. The wafer handling device of claim 3, wherein: the transmission piece comprises a shaft lever, a first bevel gear and a second bevel gear; the shaft lever is arranged along the width direction of the sheet fork, and one end of the shaft lever is connected with a driving motor arranged on the sheet fork mounting plate; the first bevel gear is fixedly sleeved on the shaft rod, the second bevel gear is fixedly sleeved on the screw rod, and the first bevel gear and the second bevel gear are vertically arranged and can be in meshing transmission.

5. The wafer handling device of claim 1, wherein: still be equipped with the piece fork angle detection portion that is used for detecting the piece fork gradient on the piece fork mounting panel, piece fork angle detection portion includes the rigid coupling and is in the sensor fixed plate of piece fork mounting panel one side, the sensor fixed plate extends towards the one end of piece fork the piece fork mounting panel and an organic whole are provided with the board of bending that is located the piece fork below, just install the pressure sensor who supplies the piece fork butt on the board of bending.

6. The wafer handling device of any of claims 1 to 5, wherein: the multi-piece fork group comprises a plurality of pieces of forks and a variable pitch part, the plurality of pieces of forks comprise a plurality of groups of distance adjusting piece fork groups which are arranged from inside to outside along the vertical direction, and each group of distance adjusting piece fork group comprises two distance adjusting piece forks which are arranged up and down; the pitch-adjusting part comprises pitch-adjusting transmission parts which are arranged in one-to-one correspondence with the pitch-adjusting piece fork groups, and all the pitch-adjusting transmission parts are connected through a synchronous driving mechanism and can enable the moving stroke of the pitch-adjusting piece forks of the multiple groups of pitch-adjusting piece fork groups to be multiplied from inside to outside in sequence.

7. The wafer handling device of claim 6, wherein: the distance adjusting transmission part comprises a bidirectional screw rod and two screw rod nuts sleeved on the bidirectional screw rod, and the two screw rod nuts are respectively connected with the two distance adjusting piece forks of the corresponding distance adjusting piece fork group so as to drive the two distance adjusting piece forks to synchronously and reversely move.

8. The wafer handling device of claim 7, wherein: the synchronous driving mechanism comprises a synchronous driving motor, a synchronous belt and a plurality of synchronous wheels, and the synchronous belt is wound on the plurality of synchronous wheels in a closed loop; the synchronous wheels and the bidirectional screw rods are arranged in one-to-one correspondence, the two-way screw rods corresponding to the synchronous wheels are coaxially connected to the axes of the synchronous wheels, and the angular speeds of the synchronous wheels are sequentially increased in multiples, so that the rotating speeds of the corresponding two-way screw rods are sequentially increased in multiples; and the output shaft of the synchronous driving motor is coaxially connected with one synchronous wheel.

9. The wafer handling device of claim 6, wherein: the multi-disc fork group still includes the displacement box body that is used for the holding displacement portion, displacement box body rigid coupling is in on the pars contractilis, its orientation the one side of piece fork is seted up and is supplied the installation opening that the piece fork mounting panel wore to establish, be equipped with on the piece fork mounting panel and be used for detecting whether press from both sides the detection portion of getting the wafer.

10. The wafer handling device of claim 1, wherein: the single-chip fork group comprises a chip fork and a chip fork fixing part, the chip fork fixing part comprises a chip fork mounting plate used for mounting the chip fork, and a detection part used for detecting whether the wafer is clamped or not is arranged on the chip fork mounting plate; and the piece fork fixing part is fixedly connected with the telescopic part.

11. The wafer handling device of claim 1, wherein: the telescopic part comprises a telescopic shell, and a first driving part and a second driving part which are used for independently driving the single-piece fork group and the multi-piece fork group to move along the length direction of the telescopic shell are respectively arranged on the telescopic shell.

12. The wafer handling device of claim 1, wherein: the rotating part comprises a rotating base, a rotating motor and a synchronous belt group, and the rotating base is fixedly connected to the lifting mechanism and can move up and down along the vertical direction under the action of the lifting mechanism; the rotating motor is connected with the telescopic part through the synchronous belt group.

13. The wafer handling device of claim 12, wherein: the synchronous belt set comprises a driving wheel, a driven wheel and a belt, the driving wheel is coaxially connected with an output shaft of the rotating motor, the driven wheel is installed on the rotating base, a fixing flange used for being connected with the telescopic portion is coaxially connected to the driven wheel, and the belt is wound on the driving wheel and the driven wheel in a closed loop mode.

14. The wafer handling device of claim 13, wherein: and a tension pulley capable of abutting against the belt is further arranged between the driving wheel and the driven wheel, and the tension pulley is movably arranged on the rotating base through an adjusting piece.

15. The wafer handling device of claim 1, wherein: the lifting mechanism comprises a screw rod motor which is vertically arranged on the lifting rack, and a second nut seat is sleeved on a screw rod of the screw rod motor; the lifting rack is further provided with vertical rails symmetrically arranged on two sides of the screw rod, two ends of the second nut seat are respectively connected with connecting plates in one-to-one correspondence with the vertical rails, a sliding block capable of sliding along the corresponding vertical rail is arranged on one side of each connecting plate, and the other side of each connecting plate can be abutted to the telescopic rotating mechanism and fixedly connected with the telescopic rotating mechanism.

16. The wafer handling device of claim 15, wherein: the second nut seat comprises a nut seat body, and two ends of the nut seat body can be respectively abutted against the side walls of the two connecting plates; the two ends of the nut seat body are respectively provided with extension plates in one-to-one correspondence with the connecting plates, and the extension plates can abut against one sides, far away from the vertical rails, of the corresponding connecting plates.