CN219393371U - Suction nozzle device - Google Patents

Suction nozzle device Download PDF

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Publication number
CN219393371U
CN219393371U CN202320350647.1U CN202320350647U CN219393371U CN 219393371 U CN219393371 U CN 219393371U CN 202320350647 U CN202320350647 U CN 202320350647U CN 219393371 U CN219393371 U CN 219393371U
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China
Prior art keywords
suction nozzle
distance
lifting
cam shaft
lifting suction
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CN202320350647.1U
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Chinese (zh)
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李海生
严铭明
高聪
曹飞龙
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Hangzhou Changchuan Technology Co Ltd
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Hangzhou Changchuan Technology Co Ltd
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Abstract

The utility model provides a suction nozzle device, which relates to the technical field of semiconductor chip carrying, and comprises a distance-changing mechanism, a first lifting suction nozzle and a second lifting suction nozzle; the plurality of first lifting suction nozzles are arranged on the distance changing mechanism side by side and are in sliding fit with the distance changing mechanism along the arrangement direction; the distance changing mechanism comprises a cam shaft, the cam shaft is provided with a plurality of guide grooves, and the guide grooves are in sliding fit with the first lifting suction nozzles in a one-to-one correspondence manner so as to adjust the distance between the first lifting suction nozzles when the cam shaft rotates; the second lifting suction nozzles are fixedly arranged on the variable-pitch mechanism and positioned between any two adjacent first lifting suction nozzles. The suction nozzle device provided by the utility model has the advantages of simple structure, small occupied space, guaranteed pitch-changing precision, good compatibility, more flexible number setting of suction nozzles and the like.

Description

Suction nozzle device
Technical Field
The utility model relates to the technical field of semiconductor chip carrying, in particular to a suction nozzle device.
Background
With the rapid development of the semiconductor industry in recent years, the carrying, picking and detecting efficiency of chips is in higher demand. In the industry of TFT film transistor's surface crack detection, when detecting protruding, dirty, need be solitary to take a picture again after every chip picks up alone, take a picture including lower surface and upper surface, the manipulator transport mechanism that involves needs to satisfy quick removal lift to realize the function of displacement according to the product difference. The traditional pick-up mechanism adopts a belt transmission mechanism to realize the distance change of the suction nozzle, the belt transmission mechanism adopts two groups, the two groups of belt transmission mechanisms are driven by the same motor and have different numbers of teeth of the driving belt wheels, and the suction nozzle is connected on the belt of each group of belt transmission mechanism. When the motor is started, the two belts drive the suction nozzles on each belt to move, and as the number of teeth of the driving pulleys is different, the driving pulleys in the two groups of belt transmission mechanisms rotate for one circle, and the movement distances of the two belts are different, so that the synchronous increase and decrease of the distance between the two suction nozzles are realized, and the two suction nozzles have the following defects:
1. the transmission friction process of the belt pulley and the synchronous belt is required to be designed to be clamped by a tensioning block, the tensioning of two ends is difficult to install in a narrow space, single-side tensioning is the most of cases, the single-side clamping can generate loose risk in the reciprocating motion process, the precision positioning is lacking in the moving process of the variable-spacing suction nozzle, and meanwhile, the phenomenon of dust falling exists in the long-term moving process of the synchronous belt, so that the problem to be solved in the industry is solved;
2. the traditional variable-pitch structure has the disadvantages of large volume, inconvenient installation and debugging, limited number of variable-pitch suction nozzles and uniqueness of variable-pitch numerical values, so that the suction nozzles are not good in compatibility with certain jigs, a material receiving disc and stations of a crack test station jig disc;
3. the size of suction nozzle end load has great influence to the stability of adsorbing the product, adopts hollow motor in the tradition trade, but this scheme exposes the hollow motor and removes and lead to lift load increase (motor weight also includes in the lift load of suction nozzle) as a part of operating system and suction nozzle in actual debugging in-process, and the moment of inertia of increase influences the motor model selection, and the load of increase directly influences the lift stability of end suction nozzle, can cause the problem that suction nozzle adsorption precision produced the deviation.
Disclosure of Invention
The utility model aims to provide a suction nozzle device which has the advantages of simple structure, small occupied space, guaranteed range changing precision, good compatibility, more flexible number setting of suction nozzles and the like.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides a suction nozzle device, which comprises a distance changing mechanism, a first lifting suction nozzle and a second lifting suction nozzle;
the plurality of first lifting suction nozzles are arranged on the distance changing mechanism side by side and are in sliding fit with the distance changing mechanism along the arrangement direction;
the distance changing mechanism comprises a cam shaft, wherein the cam shaft is provided with a plurality of guide grooves which are in sliding fit with the first lifting suction nozzles in a one-to-one correspondence manner, so that the distance between the first lifting suction nozzles can be adjusted when the cam shaft rotates;
the second lifting suction nozzles are fixedly arranged on the distance changing mechanism and are positioned between any two adjacent first lifting suction nozzles.
Further, the distance changing mechanism further comprises a fixed seat and a first driving assembly;
the cam shaft is rotatably arranged on the fixed seat;
the first driving component is arranged on the fixed seat and is in transmission connection with the cam shaft, and the first driving component is used for driving the cam shaft to rotate relative to the fixed seat;
and each first lifting suction nozzle is in sliding fit with the fixed seat.
Further, the second lifting suction nozzle is fixedly arranged on the fixing seat.
Further, the guide grooves are divided into two groups, the number of the guide grooves in the two groups is the same, the guide grooves in the two groups are symmetrically arranged about a first plane, and the first plane is the cross section of the cam shaft.
Further, in any one of the guide grooves:
each guide groove extends spirally around the axis of the camshaft, the rotation direction of each guide groove is the same, and the pitch of each guide groove gradually decreases in a direction gradually approaching the first plane.
Further, each guide groove is provided with a first matching section, a second matching section and a third matching section positioned between the first matching section and the second matching section, and the first matching section and the second matching section are respectively positioned at two ends of the guide groove;
the distance between the first matching sections in the two adjacent guide grooves is a first distance, the distance between the second matching sections in the two adjacent guide grooves is a second distance, the distance between the third matching sections in the two adjacent guide grooves is a third distance, the first distance is larger than the third distance, and the third distance is larger than the second distance.
Further, the first lifting suction nozzle comprises a mounting seat, a second driving component and a suction nozzle component, wherein the mounting seat is in sliding fit with the distance changing mechanism and stretches into the guide groove to be in sliding fit with the guide groove, the second driving component is mounted on the mounting seat and connected with the suction nozzle component, and the second driving component is used for driving the suction nozzle component to vertically move.
Further, the second driving assembly comprises a motor, a gear, a rack and a sliding seat;
the motor is arranged on the mounting seat, and a power output shaft of the motor is connected with the gear to drive the gear to rotate relative to the mounting seat;
the rack is arranged on the sliding seat and meshed with the gear, and the sliding seat is in sliding fit with the mounting seat along the vertical direction;
the suction nozzle component is arranged on the sliding seat.
Further, the suction nozzle device further comprises an electrical box assembly for installing cables and air paths;
the electric appliance box assembly comprises a drag chain, a pressing plate, an electric appliance box and a fixing plate, wherein the drag chain is installed on the electric appliance box through the fixing plate, the drag chain forms a channel for accommodating the cable and the air circuit, the pressing plate is installed on the fixing plate and located at the end part of the drag chain, and the pressing plate is used for furling the cable and the air circuit on the fixing plate.
Further, the number of the first lifting suction nozzles at two sides of the second lifting suction nozzle is the same.
The suction nozzle device provided by the utility model has the following beneficial effects:
when the suction nozzle device provided by the utility model is used, the second lifting suction nozzle is fixed, the cam shaft can be rotated, and each guide groove on the cam shaft rotates along with the cam shaft, and as the first lifting suction nozzle is in sliding fit with the guide groove, the sliding of each first lifting suction nozzle relative to the distance-changing mechanism can be realized under the stirring of the guide groove, so that the distance between each first lifting suction nozzle and the second lifting suction nozzle can be adjusted.
Compared with the prior art, the suction nozzle device provided by the utility model has the advantages that the structure is simple, the occupied space is small, the traditional synchronous belt transmission structure is replaced by the guide groove on the cam shaft as a guide when the cam shaft rotates, the track of the guide groove is fixed, the distance moved by the first lifting suction nozzle is fixed when the cam shaft rotates, the distance changing precision is ensured, and the problems of dust falling and poor distance changing precision caused by loosening of the synchronous belt are fundamentally solved; secondly, as the cam shaft rotates, the distance between the first lifting suction nozzles is continuously changed, the variable-distance numerical value is not unique, stepless adjustment of the distance can be realized, and good compatibility is achieved; thirdly, more first lifting suction nozzles can be adapted by increasing the number of the guide grooves, a belt transmission mechanism does not need to be added according to the number of the first lifting suction nozzles, and the number of the first lifting suction nozzles is more flexible to set; finally, the second lifting suction nozzle does not need to be matched with the cam shaft, and the distance between the second lifting suction nozzle and the first lifting suction nozzle can be adjusted through movement of each first lifting suction nozzle, so that the cost is saved.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic three-dimensional structure of a suction nozzle device according to an embodiment of the present utility model under a first view angle;
fig. 2 is a schematic three-dimensional structure of a suction nozzle device according to an embodiment of the present utility model under a second view angle;
fig. 3 is a schematic view of a partial three-dimensional structure of a suction nozzle device according to an embodiment of the present utility model under a third view angle;
FIG. 4 is a schematic three-dimensional structure of a camshaft according to an embodiment of the present utility model;
FIG. 5 is a schematic diagram of a front view of a camshaft according to an embodiment of the present utility model;
FIG. 6 is a schematic diagram of a rear view of a camshaft according to an embodiment of the present utility model;
fig. 7 is a schematic diagram of a front view of a part of a suction nozzle device according to an embodiment of the present utility model;
fig. 8 is a schematic diagram of a front view of a part of a suction nozzle device according to an embodiment of the present utility model;
fig. 9 is a schematic diagram of a front view of a part of a suction nozzle device according to an embodiment of the present utility model;
fig. 10 is a schematic diagram of a partial three-dimensional structure of a suction nozzle device under a third view angle according to an embodiment of the present utility model;
FIG. 11 is a schematic view of a partial enlarged structure at B of FIG. 2;
fig. 12 is a schematic three-dimensional structure of a first lifting suction nozzle according to an embodiment of the present utility model;
FIG. 13 is a schematic view of a partial enlarged structure at A of FIG. 12;
fig. 14 is a schematic three-dimensional structure of a second lifting suction nozzle according to an embodiment of the present utility model;
fig. 15 is a schematic three-dimensional structure of an electrical box assembly according to an embodiment of the present utility model;
fig. 16 is a schematic three-dimensional structure of another suction nozzle device according to an embodiment of the present utility model.
Icon: 1-a distance-changing mechanism; 11-a camshaft; 111-a first guide groove; 1111-a first mating section; 1112-a second mating segment; 1113-a third mating segment; 112-a second guide groove; 113-a third guide groove; 114-a fourth guide groove; 115-a fifth guide groove; 116-sixth guide grooves; 12-fixing base; 121-bearing seats; 122-slide rails; 13-a first drive assembly; 131-rotating the motor; 132—a driving pulley; 133-a belt; 134-driven pulleys; 2-a first lifting suction nozzle; 21-a mounting base; 211-a slider; 212-a convex shaft; 213-guide rail; 214-a tension spring; 22-a second drive assembly; 221-motor; 222-a gear; 223-rack; 224-a sliding seat; 2241-slip blocks; 23-a suction nozzle assembly; 231-upper limit block; 232-a spring; 233-lower limit block; 234-spline shaft; 235-suction nozzle fixing seat; 236-a suction nozzle connection plate; 237-quick-insert nozzle; 3-an electrical box assembly; 31-drag chain; 32-pressing plates; 33-an electrical box; 34-a fixed plate; 4-a second lifting suction nozzle; 5-a first auxiliary line; 6-a second auxiliary line; 7-a third auxiliary line.
Detailed Description
The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
The following describes specific embodiments of the present utility model in detail with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the utility model, are not intended to limit the utility model.
An embodiment of the present utility model is to provide a suction nozzle device, as shown in fig. 1 to 3, including a variable-pitch mechanism 1, a first lift suction nozzle 2, and a second lift suction nozzle 4; the first lifting suction nozzles 2 are arranged in a plurality, and the first lifting suction nozzles 2 are arranged on the variable-pitch mechanism 1 side by side and are in sliding fit with the variable-pitch mechanism 1 along the arrangement direction; the variable-pitch mechanism 1 comprises a cam shaft 11, wherein the cam shaft 11 is provided with a plurality of guide grooves which are in sliding fit with the first lifting suction nozzles 2 in a one-to-one correspondence manner so as to adjust the distance between the first lifting suction nozzles 2 when the cam shaft 11 rotates; the second lifting suction nozzle 4 is fixedly arranged on the variable-pitch mechanism 1 and is positioned between any two adjacent first lifting suction nozzles 2.
The suction nozzle device provided by the embodiment breaks away from the traditional mode of realizing suction nozzle pitch variation through the belt transmission mechanism, and adjusts the distance between the first lifting suction nozzles 2 through the sliding fit of the guide grooves on the cam shaft 11 and the first lifting suction nozzles 2, so that the pitch variation precision is ensured, and the problem of poor pitch variation precision caused by loosening of the synchronous belt and the phenomenon of powder falling of the synchronous belt are fundamentally solved; secondly, the first lifting suction nozzles 2 can be stopped at any position by controlling the rotation angle of the cam shaft 11, so that the distance between two adjacent first lifting suction nozzles 2 can be adjusted steplessly, and the compatibility is good; again, the length of the cam shaft 11 is easy to adjust, the number of the guide grooves on the cam shaft is also easy to adjust, and more first lifting suction nozzles can be adapted according to the needs; finally, the second lifting suction nozzle 4 does not need to be matched with the guide groove on the cam shaft 11, the distance between the second lifting suction nozzle and the first lifting suction nozzle can be adjusted through the movement of each first lifting suction nozzle, and the structure of the second lifting suction nozzle 4 is simpler and the cost is saved.
In some embodiments, as shown in fig. 1, the number of first lifting suction nozzles 2 on both sides of the second lifting suction nozzle 4 is the same.
In use, the second lifting suction nozzles 4 are fixed along the arrangement direction of the plurality of first lifting suction nozzles 2, and the first lifting suction nozzles 2 positioned at both sides of the second lifting suction nozzles 4 move along the track of the guide groove along with the rotation of the cam shaft 11.
The structure of the camshaft 11 is specifically described below:
the extending track of each guiding groove on the cam shaft 11 is related to the moving distance of each first lifting suction nozzle 2 after the cam shaft 11 rotates by a unit angle, so that a user can design the extending track of each guiding groove according to the moving distance of each first lifting suction nozzle 2 required to drive a product.
In some embodiments, the cam shaft 11 is provided with a plurality of guide grooves, and the plurality of guide grooves are distributed at intervals along the axial direction of the cam shaft 11, and each guide groove is in sliding fit with one first lifting suction nozzle 2 so as to adjust the distance between the first lifting suction nozzles 2.
When the lifting suction nozzle is used, the rotation angle of the cam shaft 11 can be controlled to enable each lifting suction nozzle 2 to be static at different positions, so that adjustment of different distances is realized. Every time the cam shaft 11 is stationary at an angle, the first lifting nozzle 2 will stop at a certain mating section of the guide slot. Therefore, each guide groove can be provided with a plurality of matching sections, such as two, three, four and the like, and the first lifting suction nozzle 2 is static at different matching sections and corresponds to different distance parameters.
The specific explanation will be given taking as an example that each guide groove has three mating sections. As shown in fig. 5 and 6, the three mating segments are a first mating segment 1111, a second mating segment 1112, and a third mating segment 1113 located between the first mating segment 1111 and the second mating segment 1112, the first mating segment 1111 and the second mating segment 1112 being located at both ends of the guide slot, respectively;
the distance between the first mating segments 1111 of the two adjacent guide grooves is a first distance, the distance between the second mating segments 1112 of the two adjacent guide grooves is a second distance, the distance between the third mating segments 1113 of the two adjacent guide grooves is a third distance, the first distance is greater than the third distance, and the third distance is greater than the second distance.
When the first elevation suction nozzle 2 is stationary at the first fitting section 1111, the distance between two adjacent first elevation suction nozzles 2 is maximized; when the first lifting suction nozzles 2 are stationary at the second fitting section 1112, the distance between two adjacent first lifting suction nozzles 2 is the smallest; when the first lift nozzle 2 is stationary at the third mating segment 1113, the distance between two adjacent first lift nozzles 2 tends to be intermediate.
According to the actual production requirement, personnel can also divide fourth cooperation section, fifth cooperation section etc. in the guiding groove. When there are an infinite number of mating segments, the guide slot can be considered to be made up of individual mating segments. Specifically, the plurality of guide grooves on the camshaft 11 may be divided into two groups, the number of the guide grooves in the two groups being the same, and the two groups of guide grooves being symmetrically arranged about a first plane, which is a cross section of the camshaft 11.
Because the two groups of guide grooves are symmetrically arranged about the first plane, and each guide groove extends spirally around the axis of the cam shaft 11, the two guide grooves symmetrical about the first plane have different spiral directions, and when the cam shaft 11 rotates, the two first lifting suction nozzles 2 correspondingly matched with the two guide grooves are close to or far away from each other.
Of course, the plurality of guide grooves may be divided into three groups, four groups, or the like as needed.
In any one set of guide grooves: the rotation direction of each guide groove may be the same, and the pitch of each guide groove gradually decreases in a direction gradually approaching the first plane.
The arrangement can ensure that when the cam shaft 11 rotates, the first lifting suction nozzles 2 matched with the same group of guide grooves are gradually close to each other or gradually far away from each other, so that the orderly adjustment of the distance between the first lifting suction nozzles 2 is ensured, and the movement process is smooth without blocking.
The number of the guide grooves in each set of the guide grooves may be one, two, three, four, etc., and the following embodiments will be specifically described by taking the structure shown in fig. 4 as an example.
As shown in fig. 4, the plurality of guide grooves on the camshaft 11 are divided into two groups, each group including three guide grooves, six guide grooves in total, the six guide grooves being, from left to right, a first guide groove 111, a second guide groove 112, a third guide groove 113, a fourth guide groove 114, a fifth guide groove 115, and a sixth guide groove 116, respectively. As shown in fig. 5 and 6, three auxiliary lines are introduced, a first auxiliary line 5, a second auxiliary line 6 and a third auxiliary line 7. When each first lifting suction nozzle 2 slides to the first end of each guide groove, the connecting line of the position where each first lifting suction nozzle 2 is matched with each guide groove can be regarded as a first auxiliary line 5; when each first lifting suction nozzle 2 slides to the second end of each guide groove, the connection line of the matching position of each first lifting suction nozzle 2 and each guide groove can be regarded as a third auxiliary line 7; when each first elevating suction nozzle 2 slides between the first end and the second end of each guide groove, the connection line where each first elevating suction nozzle 2 is engaged with each guide groove can be regarded as the second auxiliary line 6.
The intersection between the first auxiliary wire 5 and the respective guide groove may be regarded as a first fitting section 1111, the intersection between the second auxiliary wire 6 and the respective guide groove may be regarded as a third fitting section 1113, and the intersection between the third auxiliary wire 7 and the respective guide groove may be regarded as a second fitting section 1112.
As the pitch of each guide groove gradually decreases in a direction gradually approaching the first plane, it can be seen in conjunction with fig. 5 and 6 that the distance between two adjacent guide grooves at the first auxiliary line 5 is the largest (the distance between two adjacent first lifting suction nozzles 2 is the largest); the distance between two adjacent guide grooves at the third auxiliary line 7 is the smallest (the distance between two adjacent first elevating suction nozzles 2 is the smallest); the distance between the adjacent two guide grooves at the second auxiliary line 6 tends to be between the maximum distance and the minimum distance (the distance between the adjacent two first elevating suction nozzles 2 tends to be between the maximum distance and the minimum distance).
In specific use, the detection of two specifications of incoming products can be realized through the cam shaft 11. When the A product and the B product are adsorbed, the first lifting suction nozzle 2 reaches the position where the guide groove intersects with the first auxiliary line 5, and the distance between the first lifting suction nozzles 2 is L 1 The position is shown in fig. 7 (where the first auxiliary line 5 is blocked). When the product A is placed, the initial position of the cam shaft 11 matched with the first lifting suction nozzle 2 is the position of the first auxiliary line 5, the matched position of the cam shaft 11 and the first lifting suction nozzle 2 slides from the position of the first auxiliary line 5 to the position of the third auxiliary line 7, namely, the first lifting suction nozzle 2 reaches the position where the guide groove intersects with the third auxiliary line 7, and the distance between the first lifting suction nozzle 2 is L 3 The position is shown in fig. 8 (in which the third auxiliary line 7 is blocked). When the product B is adsorbed, the initial position of the cam shaft 11 and the first lifting suction nozzle 2 is the position of the first auxiliary line 5, the matched position slides from the position of the first auxiliary line 5 to the position of the second auxiliary line 6, namely, the first lifting suction nozzle 2 reaches the position where the guide groove intersects with the second auxiliary line 6, and the distance between the first lifting suction nozzles 2 is L 2 The position is shown in fig. 9 (in which the second auxiliary line 6 is blocked).
Wherein L is 1 >L 2 >L 3
The following describes the structure of the pitch mechanism 1 in detail:
in some embodiments, as shown in fig. 10, the pitch mechanism 1 further comprises a fixed base 12 and a first drive assembly 13, wherein:
the fixed seat 12 is provided with two bearing seats 121 which are oppositely arranged, and two ends of the cam shaft 11 are arranged on the two bearing seats 121 so as to allow the cam shaft 11 to rotate relative to the fixed seat 12;
the first driving component 13 is arranged on the fixed seat 12 and is in transmission connection with the cam shaft 11, and the first driving component 13 is used for driving the cam shaft 11 to rotate relative to the fixed seat 12;
each first lifting suction nozzle 2 is slidably matched with the fixed seat 12 along the axial direction of the cam shaft 11 so as to fix the moving direction of each first lifting suction nozzle 2.
The above-mentioned pitch change mechanism 1 has a simple structure and can ensure stable rotation of the cam shaft 11.
Specifically, as shown in fig. 11, the fixing base 12 is further provided with a sliding rail 122, the extending direction of the sliding rail 122 is parallel to the axial direction of the cam shaft 11, and the first lifting suction nozzle 2 may be provided with a sliding block 211 matched with the sliding rail 122 in a sliding manner, so that the first lifting suction nozzle 2 is in sliding fit with the distance changing mechanism 1.
In order to ensure that the camshaft 11 is not interfered by the outside in the rotation process, two bearing blocks 121 can be further provided with an outer cover, and the outer cover is arranged outside the camshaft 11 to protect the camshaft 11.
Any structure capable of driving the camshaft 11 to rotate relative to the fixed seat 12 may be adopted as the first driving assembly 13 in the above-mentioned embodiment. The first driving assembly 13 may include a structure that a rotary motor and the like perform a rotary motion, or may include a combination of a structure that a pneumatic cylinder, a hydraulic cylinder and the like perform a linear motion and a transmission assembly, and the transmission assembly may be a link assembly.
As shown in fig. 10, the first driving assembly 13 includes a rotation motor 131, a driving pulley 132, a belt 133 and a driven pulley 134, the rotation motor 131 is mounted on the fixing base 12 by a screw or the like, the driving pulley 132 is connected with a power output shaft of the rotation motor 131, the driven pulley 134 is connected with the cam shaft 11, and the belt 133 is sleeved outside the driving pulley 132 and the driven pulley 134. When the rotation motor 131 rotates, power is transmitted to the driven pulley 134 through the driving pulley 132 and the belt 133, driving the driven pulley 134 to rotate, and further, the driven pulley 134 drives the cam shaft 11 to rotate.
The structure of the first elevating suction nozzle 2 is specifically described as follows:
in some embodiments, as shown in fig. 12, the first elevating nozzle 2 includes a mount 21, a second drive assembly 22, and a nozzle assembly 23, wherein:
one side of the mounting seat 21 is provided with a sliding block 211 and a convex shaft 212, the sliding block 211 is in sliding fit with the sliding rail 122 on the variable-pitch mechanism 1, and the convex shaft 212 is used for extending into the guide groove to be in sliding fit with the guide groove;
the second driving component 22 is mounted on the mounting seat 21 and connected with the suction nozzle component 23, and the second driving component 22 is used for driving the suction nozzle component 23 to move vertically.
Any structure capable of driving the suction nozzle assembly 23 to move vertically may be adopted as the second driving assembly 22 in the above-mentioned embodiment. The second driving assembly 22 may include a structure that performs a linear motion, such as a pneumatic cylinder, a hydraulic cylinder, or the like, and the second driving assembly 22 may also include a combination of a structure that performs a rotational motion, such as a rotary motor, and a transmission assembly (e.g., a crank slider mechanism), where the transmission assembly may convert the rotational motion into a linear motion, and the transmission assembly may be a link assembly.
In some embodiments, as shown in fig. 13, the second drive assembly 22 includes a motor 221, a gear 222, a rack 223, and a skid 224, wherein:
the motor 221 is installed on one side of the installation seat 21, the power output shaft of the motor 221 penetrates through the installation seat 21 and is connected with the gear 222 on the other side of the installation seat 21, and the power output shaft of the motor 221 is used for driving the gear 222 to rotate relative to the installation seat 21;
the rack 223 extends in a vertical direction, is fixedly mounted to the sliding seat 224 by a screw or the like, and is engaged with the gear 222;
the sliding block 2241 is installed on the sliding seat 224, and the sliding block 2241 is in sliding fit with the guide rail 213 on the installation seat 21 along the vertical direction;
the suction nozzle assembly 23 is mounted on the slide block 224.
Above-mentioned second drive assembly 22 drives the suction nozzle structure with traditional cavity rotating electrical machines and changes into motor 221 and drive rack and pinion mechanism, separates motor 221 and suction nozzle subassembly 23, shifts the motor 221 heavy burden to fixed mount pad 21, and reduced moment of inertia causes the influence to the motor 221 selection type, has reduced the load and directly produced the precision deviation influence to the stability of lifting of terminal suction nozzle subassembly 23.
Specifically, as shown in fig. 12, a tension spring 214 may be provided on the mounting base 21, and the tension spring 214 may be used to pull the sliding base 224, so as to prevent the sliding base 224 from falling down when the motor 221 is suddenly powered off and the position of the sliding base 224 cannot be limited by the rack 223.
As shown in fig. 12 and 13, the nozzle assembly 23 may include an upper stopper 231, a spring 232, a lower stopper 233, a spline shaft 234, a nozzle fixing base 235, a nozzle connecting plate 236, a quick-insert nozzle 237, and the like. The upper limiting block 231, the spring 232 and the lower limiting block 233 are sleeved outside the spline shaft 234, the spring 232 is located between the upper limiting block 231 and the lower limiting block 233, and the sliding seat 224 is connected to the upper limiting block 231, so that when the suction nozzle assembly 23 contacts a workpiece, the spring 232 has an upward acting force on the upper limiting block 231, and further the downward moving distance of the sliding seat 224 is limited, so that the buffer effect is achieved, and accidental injury to the workpiece is prevented.
The fast-inserting suction nozzle 237 is installed on the suction nozzle fixing seat 235 through the suction nozzle connecting plate 236, and the fast-inserting suction nozzle 237 is used for sucking the TFT thin film transistor at the lower part.
The suction nozzle assembly 23 may take the form of a conventional structure, which will not be described in detail herein for the sake of brevity.
The structure of the second elevating suction nozzle 4 is specifically described as follows:
the second lifting suction nozzle 4 has a similar structure to the first lifting suction nozzle 2. Since the second lifting suction nozzle 4 is fixedly mounted on the variable-pitch mechanism 1, it does not need to be matched with the guide groove on the cam shaft 11 or slidingly matched with the variable-pitch mechanism 1. As shown in fig. 12 and 14, therefore, the second lifting nozzle 4 differs from the first lifting nozzle 2 in that: the second lifting nozzle is not provided with a slider 211 (for sliding engagement with the slide rail 122 on the pitch change mechanism 1) and a protruding shaft 212 (for sliding engagement with the guide groove extending into the guide groove).
When the pitch mechanism 1 comprises the fixed seat 12, the second lifting suction nozzle 4 can be fixedly arranged on the fixed seat 12 through a connecting piece such as a screw.
In some embodiments, as shown in fig. 15 and 16, the nozzle device further includes an electrical box assembly 3 for mounting cables and air paths. The cable can supply power for the variable-pitch mechanism 1 and each first lifting suction nozzle 2, and the air circuit can supply air for the first lifting suction nozzles 2.
In some embodiments, as shown in fig. 15, the electrical box assembly 3 includes a drag chain 31, a pressing plate 32, an electrical box 33, and a fixing plate 34, the drag chain 31 is mounted on the electrical box 33 through the fixing plate 34, the drag chain 31 forms a channel for accommodating a cable and an air path, the pressing plate 32 is mounted on the fixing plate 34 and is located at an end of the drag chain 31, and the pressing plate 32 is used for folding the cable and the air path on the fixing plate 34.
The electrical box assembly 3 is designed with the drag chain 31, which not only can protect the cable from being broken and scratched in the bending process, but also can reduce the risk of falling dust in the movement.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the utility model.

Claims (10)

1. A suction nozzle device is characterized by comprising a variable-pitch mechanism (1), a first lifting suction nozzle (2) and a second lifting suction nozzle (4);
the plurality of first lifting suction nozzles (2) are arranged, and the plurality of first lifting suction nozzles (2) are arranged on the variable-pitch mechanism (1) side by side and are in sliding fit with the variable-pitch mechanism (1) along the arrangement direction;
the variable-pitch mechanism (1) comprises a cam shaft (11), wherein the cam shaft (11) is provided with a plurality of guide grooves which are in sliding fit with the first lifting suction nozzles (2) in a one-to-one correspondence manner, so that the distance between the first lifting suction nozzles (2) is adjusted when the cam shaft (11) rotates;
the second lifting suction nozzles (4) are fixedly arranged on the variable-pitch mechanism (1) and are positioned between any two adjacent first lifting suction nozzles (2).
2. The suction nozzle arrangement as claimed in claim 1, characterized in that the pitch change mechanism (1) further comprises a stationary seat (12) and a first drive assembly (13);
the cam shaft (11) is rotatably arranged on the fixed seat (12);
the first driving assembly (13) is arranged on the fixed seat (12) and is in transmission connection with the cam shaft (11), and the first driving assembly (13) is used for driving the cam shaft (11) to rotate relative to the fixed seat (12);
each first lifting suction nozzle (2) is in sliding fit with the fixed seat (12).
3. Suction nozzle arrangement according to claim 2, characterized in that the second lifting suction nozzle (4) is fixedly mounted on the holder (12).
4. Suction nozzle arrangement according to claim 1, characterized in that the guide slots are divided into two groups, the number of guide slots in the two groups being the same, the guide slots of the two groups being symmetrically arranged about a first plane, which is the cross section of the camshaft (11).
5. The suction nozzle device as set forth in claim 4, wherein in any one of said guide grooves:
each of the guide grooves extends spirally around an axis of the camshaft (11), the rotation direction of each of the guide grooves is the same, and the pitch of each of the guide grooves gradually decreases in a direction gradually approaching the first plane.
6. The suction nozzle device as claimed in claim 1, characterized in that each guide slot has a first mating section (1111), a second mating section (1112) and a third mating section (1113) between the first mating section (1111) and the second mating section (1112), the first mating section (1111) and the second mating section (1112) being located at both ends of the guide slot, respectively;
the distance between the first fitting sections (1111) in two adjacent guide grooves is a first distance, the distance between the second fitting sections (1112) in two adjacent guide grooves is a second distance, the distance between the third fitting sections (1113) in two adjacent guide grooves is a third distance, the first distance is greater than the third distance, and the third distance is greater than the second distance.
7. The suction nozzle device according to claim 1, wherein the first lifting suction nozzle (2) comprises a mounting seat (21), a second driving assembly (22) and a suction nozzle assembly (23), the mounting seat (21) is in sliding fit with the distance changing mechanism (1) and stretches into the guide groove to be in sliding fit with the guide groove, the second driving assembly (22) is mounted on the mounting seat (21), the second driving assembly (22) is connected with the suction nozzle assembly (23), and the second driving assembly (22) is used for driving the suction nozzle assembly (23) to vertically move.
8. The suction nozzle device as claimed in claim 7, wherein the second drive assembly (22) comprises a motor (221), a gear (222), a rack (223) and a glide base (224);
the motor (221) is arranged on the mounting seat (21), and a power output shaft of the motor (221) is connected with the gear (222) to drive the gear (222) to rotate relative to the mounting seat (21);
the rack (223) is mounted on the sliding seat (224) and meshed with the gear (222), and the sliding seat (224) is in sliding fit with the mounting seat (21) along the vertical direction;
the suction nozzle assembly (23) is mounted on the sliding seat (224).
9. The suction nozzle device according to claim 1, characterized in that the suction nozzle device further comprises an electrical box assembly (3) for mounting cables and air paths;
the electric appliance box assembly (3) comprises a drag chain (31), a pressing plate (32), an electric appliance box (33) and a fixing plate (34), wherein the drag chain (31) is installed on the electric appliance box (33) through the fixing plate (34), the drag chain (31) forms a channel for accommodating a cable and an air channel, the pressing plate (32) is installed on the fixing plate (34) and is located at the end part of the drag chain (31), and the pressing plate (32) is used for furling the cable and the air channel on the fixing plate (34).
10. Nozzle arrangement according to any of claims 1-9, characterized in that the number of the first lifting nozzles (2) on both sides of the second lifting nozzle (4) is the same.
CN202320350647.1U 2023-02-21 2023-02-21 Suction nozzle device Active CN219393371U (en)

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CN202320350647.1U CN219393371U (en) 2023-02-21 2023-02-21 Suction nozzle device

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Application Number Priority Date Filing Date Title
CN202320350647.1U CN219393371U (en) 2023-02-21 2023-02-21 Suction nozzle device

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CN219393371U true CN219393371U (en) 2023-07-21

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117096080A (en) * 2023-09-27 2023-11-21 上海广川科技有限公司 Variable-spacing module structure of wafer transmission system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117096080A (en) * 2023-09-27 2023-11-21 上海广川科技有限公司 Variable-spacing module structure of wafer transmission system

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