CN115841977B

CN115841977B - Wafer carrying device

Info

Publication number: CN115841977B
Application number: CN202310150809.1A
Authority: CN
Inventors: 祝佳辉; 周磊; 张庆; 鲍伟成; 葛敬昌; 王文广; 叶莹
Original assignee: Shanghai Guona Semiconductor Technology Co ltd
Current assignee: Shanghai Guona Semiconductor Technology Co ltd
Priority date: 2023-02-22
Filing date: 2023-02-22
Publication date: 2023-05-02
Anticipated expiration: 2043-02-22
Also published as: CN115841977A

Abstract

The invention discloses a wafer carrying device, which comprises a telescopic rotating mechanism capable of lifting and moving under the action of a lifting mechanism, wherein the telescopic rotating mechanism comprises a rotating part, a telescopic part and an end effector; the rotating part is used for driving the telescopic part to rotate so that the end effector positioned on the telescopic part can face the wafer boat or the wafer box; the telescopic part is used for driving the end effector to extend or retract so that the end effector can enter the wafer boat or the wafer box to pick and place wafers; the tail end actuator comprises a sheet fork and a sheet fork mounting plate which are arranged in a one-to-one correspondence manner, and an angle adjusting mechanism is arranged on the sheet fork mounting plate; the angle adjusting mechanism comprises a second adjusting plate capable of moving along the length direction of the sheet fork, the upper end of the second adjusting plate is provided with a first plane fixedly connected with the sheet fork, and the lower end of the second adjusting plate is provided with a first cambered surface capable of sliding along the sheet fork mounting plate; the sheet fork mounting plate is provided with a second cambered surface for the first cambered surface to slide. The invention can effectively improve the transmission efficiency and the transmission precision of the wafer.

Description

Wafer carrying device

Technical Field

The invention relates to the technical field of wafer transmission equipment, in particular to a wafer carrying device.

Background

In semiconductor manufacturing, wafers are required to be subjected to a plurality of processes as basic carriers for preparing chips, and in the process, wafers in the carriers (wafer cassettes) are generally transferred into wafer boats capable of holding a plurality of wafers at intervals up and down, and then the wafer boats are directly transferred into each process chamber to simultaneously process the plurality of wafers. In order to realize wafer circulation between the wafer box and the wafer boat, a conveying mechanism is generally arranged between the wafer box and the wafer boat, but in the conventional conveying mechanism, the matching degree between moving parts is low, and the wafer transmission efficiency and the transmission precision are affected.

Disclosure of Invention

In order to overcome the above-mentioned drawbacks, an object of the present invention is to provide a wafer handling device, which can effectively improve the wafer transmission efficiency and the transmission precision.

In order to achieve the above purpose, the invention adopts the following technical scheme: the wafer carrying device is positioned between the wafer boat and the carrier and comprises a telescopic rotating mechanism capable of moving up and down under the action of a lifting mechanism, wherein the telescopic rotating mechanism comprises a rotating part, a telescopic part and an end effector; the rotating part is used for driving the telescopic part to rotate so that the end effector positioned on the telescopic part can face the wafer boat or the wafer box; the telescopic part is used for driving the end effector to extend or retract so that the end effector can enter the wafer boat or the wafer box to pick and place wafers;

the end effector comprises a single-piece fork group and a multi-piece fork group, wherein the single-piece fork group and the multi-piece fork group respectively comprise a piece fork and a piece fork mounting plate which are arranged in a one-to-one correspondence manner, and the piece fork mounting plate is provided with an angle adjusting mechanism; the angle adjusting mechanism comprises a second adjusting plate which can move along the length direction of the sheet fork under the action of the driving part, the upper end of the second adjusting plate is provided with a first plane fixedly connected with the sheet fork, and the lower end of the second adjusting plate is provided with a first cambered surface which can slide along the sheet fork mounting plate; the sheet fork mounting plate is provided with a second cambered surface for the first cambered surface to slide, the second cambered surface is a concave circular cambered surface, and the second cambered surface gradually inclines upwards from a direction away from the sheet fork clamp picking end to a direction close to the sheet fork clamp picking end.

The invention has the beneficial effects that:

1. the lifting mechanism drives the telescopic rotating mechanism to lift and move so that the end effector of the telescopic rotating mechanism can move to a proper height for taking and placing wafers; the end effector can be driven to rotate at will in the horizontal direction through the rotating part, so that the end effector can be aligned to the wafer box or the wafer boat; the end effector can be driven to linearly stretch and retract along the horizontal direction through the stretching part, so that the end effector can enter the wafer box or the wafer boat along the horizontal direction to take and put wafers; the flexible movement of the end effector in multiple directions is realized through the cooperation of the lifting mechanism, the rotating part and the telescopic part, so that the transmission efficiency of the wafer is improved;

2. in the end effector, the single-chip fork group can detect the placement condition of the wafers in the wafer box or the wafer boat and can pick and place single-chip wafers, and the multi-chip fork group can pick and place multiple continuous wafers at the same time so as to improve the wafer picking and placing efficiency; the wafers under different working conditions can be reasonably fetched and placed through the matching of the single fork group and the multi-fork group, so that the application range of the end effector is increased;

3. the inclination angle of the wafer fork can be adjusted through the arrangement of the angle adjusting mechanism, so that the problem that the wafer fork sags due to clamping of the wafer can be overcome, the levelness of the wafer fork is guaranteed, and the wafer fork can be smoothly fed into the wafer boat or the wafer box to be taken and placed.

4. In the angle adjusting mechanism, smooth sliding of the second adjusting plate on the sheet fork mounting plate is guaranteed through cooperation of the first cambered surface and the second cambered surface, and the first plane of the second adjusting plate in sliding can be inclined through radian limitation of the second cambered surface, so that the inclination of the sheet fork is realized, and the purpose of adjusting the inclination angle of the sheet fork is achieved.

Further, the second cambered surface is provided with a cambered surface sliding groove along the length direction of the sheet fork, and the first cambered surface is provided with a cambered surface sliding rail matched with the cambered surface sliding groove. The sliding direction of the first cambered surface along the second cambered surface can be limited through the cooperation of the cambered surface sliding groove and the cambered surface sliding rail, so that the sliding stability is further improved.

Further, the driving part comprises a driving motor, a transmission piece, a screw rod and an adapter plate; the screw rod is arranged on the sheet fork mounting plate along the length direction of the sheet fork, and a first nut seat is sleeved on the screw rod in a threaded manner; the transmission piece can drive the screw rod to rotate under the action of the driving motor; the first nut seat is connected with the second adjusting plate through the adapter plate, and the adapter plate is respectively hinged with the first nut seat and the second adjusting plate. When the transmission piece drives the screw rod to rotate under the action of the driving motor, the first nut seat can only move linearly along the screw rod due to the limit of the adapter plate, so that the first nut seat can push the adapter plate to move synchronously, the adapter plate can push the second adjusting plate to slide along the second cambered surface, and the inclination of the second adjusting plate in the sliding process can be guaranteed to be smooth through the hinge joint of the adapter plate and the first nut seat and the second adjusting plate.

Further, the transmission piece comprises a shaft lever, a first bevel gear and a second bevel gear; the shaft lever is distributed along the width direction of the sheet fork, and one end of the shaft lever is connected with a driving motor arranged on the sheet fork mounting plate; the first bevel gear is fixedly sleeved on the shaft rod, the second bevel gear is fixedly sleeved on the screw rod, and the first bevel gear and the second bevel gear are vertically arranged and can be meshed for transmission. When the driving motor is started, the shaft rod rotates immediately and drives the first bevel gear to rotate synchronously, and at the moment, the rotation of the first bevel gear can be transmitted to the second bevel gear due to the meshing of the second bevel gear and the first bevel gear, so that the rotation of the screw rod is realized; the driving force of the driving motor can be smoothly transmitted to the screw rod through the arrangement of the transmission piece.

Further, a fork angle detection part for detecting the gradient of the fork is further arranged on the fork mounting plate, the fork angle detection part comprises a sensor fixing plate fixedly connected to one side of the fork mounting plate, the sensor fixing plate extends out of the fork mounting plate towards one end of the fork and is integrally provided with a bending plate positioned below the fork, and a pressure sensor for the fork to butt is arranged on the bending plate. In the initial state, the sheet fork and the pressure sensor are in a critical pressing state, namely the sheet fork is pressed against the pressure sensor, but no pressure is generated on the pressure sensor, and at the moment, the pressure sensor does not detect a pressure signal (the pressure signal is 0); when the wafer is clamped by the wafer fork clamp, the clamping end of the wafer fork clamp sags, and at the moment, the wafer fork above the pressure sensor is stressed and pressed downwards to lean against the pressure sensor, and the pressure sensor can detect a pressure signal. The sagging condition of the sheet fork can be timely known through the arrangement of the sheet fork angle detection part, and a basis is provided for the adjustment quantity of the angle adjustment mechanism.

Further, the multi-blade fork group comprises a plurality of blade forks and a distance changing part, the plurality of blade forks comprise a plurality of groups of distance adjusting blade fork groups which are arranged from inside to outside along the vertical direction, and each group of distance adjusting blade fork groups comprises two distance adjusting blade forks which are arranged up and down; the distance-changing part comprises distance-adjusting transmission pieces which are arranged in one-to-one correspondence with the distance-adjusting sheet fork groups, all the distance-adjusting transmission pieces are connected through a synchronous driving mechanism, and the moving stroke of the distance-adjusting sheet forks of the plurality of groups of distance-adjusting sheet fork groups can be increased in turn from inside to outside in a multiple manner.

The spacing of the wafer forks in the multi-fork group is adjustable through the arrangement of the spacing changing part so as to meet the requirement that the spacing of the wafer forks is matched with the spacing of the wafers in the wafer boat or the wafer box; the synchronous movement of the distance adjusting fork of the plurality of groups of distance adjusting fork groups can be realized through the cooperation of the distance adjusting transmission piece and the synchronous driving mechanism, so that the integral distance adjusting efficiency of the plurality of fork groups is improved; and the distance adjusting fork moving stroke of the plurality of groups of distance adjusting fork groups is increased from inside to outside in turn in multiple, so that the distance between two adjacent fork groups can be kept the same all the time in the distance adjusting process, and further continuous wafers can be fetched and placed.

Further, the distance-adjusting transmission piece comprises a bidirectional screw rod and two screw nuts sleeved on the bidirectional screw rod, and the two screw nuts are respectively connected with the two distance-adjusting sheet forks of the same group so as to drive the two distance-adjusting sheet forks of the same group to synchronously and reversely move. Two screw thread parts with the same screw pitch and opposite screw thread directions are respectively arranged on the two-way screw rod, and the two screw rod nuts are respectively sleeved on the two screw thread parts, so that when the two-way screw rod rotates, the two screw rod nuts can reversely and equidistantly move along the corresponding screw thread parts, and further, the two distance-adjusting fork is driven to reversely and equidistantly move.

Further, the synchronous driving mechanism comprises a synchronous driving motor, a synchronous belt and a plurality of synchronous wheels, wherein the synchronous belt is wound on the plurality of synchronous wheels in a closed loop; the synchronous wheels are arranged in one-to-one correspondence with the bidirectional screw rods, the corresponding bidirectional screw rods are coaxially connected to the axle center of the synchronous wheels, and the angular speeds of the synchronous wheels are sequentially multiplied, so that the rotating speeds of the corresponding bidirectional screw rods are sequentially multiplied; an output shaft of the synchronous driving motor is coaxially connected with a synchronous wheel. The synchronous driving mechanism is arranged to realize that a single synchronous driving motor drives a plurality of synchronous wheels to synchronously rotate, so that synchronous operation of a plurality of groups of distance-adjusting fork is realized; the synchronous driving mechanism drives the multiple groups of distance-adjusting fork to synchronously operate through limiting the angular speed of the synchronous wheel, so that the moving strokes of the different groups of distance-adjusting fork are different, and the requirement of equidistant between two adjacent forks in the adjusting process is further met.

Furthermore, the multi-fork group further comprises a distance-changing box body for accommodating the distance-changing part, the distance-changing box body is fixedly connected to the telescopic part, one side of the distance-changing box body, which faces the fork, is provided with an installation opening for the fork installation plate to penetrate through, and the fork installation plate is provided with a detection part for detecting whether a wafer is clamped or not. The variable-pitch part is covered by the variable-pitch box body, so that the problem that particles generated in the operation process of the variable-pitch part pollute the wafer fork can be effectively avoided, the connection between the wafer fork and the variable-pitch part can be conveniently realized through the arrangement of the mounting opening, and the detection of whether wafers exist on the wafer fork or not can be conveniently realized through the arrangement of the detection part.

Further, the single fork group comprises a fork and a fork fixing part, the fork fixing part comprises a fork mounting plate for mounting the fork, a detecting part for detecting whether a wafer is clamped or not is arranged on the fork mounting plate, and the fork fixing part is fixedly connected with the telescopic part. The clamping operation of the single-chip fork can be realized through the arrangement of the single-chip fork group, and whether wafers exist on the single-chip fork or not can be conveniently detected through the arrangement of the detection part.

Further, the telescopic part comprises a telescopic shell, and a first driving piece and a second driving piece which are used for independently driving the single-chip fork group and the multi-chip fork group to move along the length direction of the telescopic shell are respectively arranged on the telescopic shell. Independent telescopic movement of the single-chip fork group and the multi-chip fork group is realized through the arrangement of the first driving piece and the second driving piece, so that the single-chip fork group or the multi-chip fork group can be conveniently selected to take and put wafers according to actual working conditions.

Further, the rotating part comprises a rotating base, a rotating motor and a synchronous belt group, and the rotating base is fixedly connected to the lifting mechanism and can lift and move along the vertical direction under the action of the lifting mechanism; the rotating motor is connected with the telescopic part through the synchronous belt group.

Further, the synchronous belt group comprises a driving wheel, a driven wheel and a belt, wherein the driving wheel is coaxially connected with an output shaft of the rotating motor, the driven wheel is arranged on the rotating base, a fixed flange for connecting the telescopic part is coaxially connected to the driven wheel, and the belt is wound on the driving wheel and the driven wheel in a closed loop. The rotation stability of the telescopic part can be improved through the arrangement of the synchronous belt group.

Further, a tensioning wheel which can be abutted against the belt is arranged between the driving wheel and the driven wheel, and the tensioning wheel is movably arranged on the rotating base through an adjusting piece. The tensioning of the belt can be guaranteed through the arrangement of the tensioning wheel, and the tensioning force of the belt can be adjusted according to actual requirements through the movement of the tensioning wheel.

Further, the lifting mechanism comprises a screw rod motor which is vertically arranged on the lifting rack, and a screw rod of the screw rod motor is sleeved with a second nut seat; the lifting frame is also provided with vertical rails symmetrically arranged on two sides of the screw rod, two ends of the second nut seat are respectively connected with connecting plates corresponding to the vertical rails one by one, one side of each connecting plate is provided with a sliding block capable of sliding along the corresponding vertical rail, and the other side of each connecting plate can be abutted to the telescopic rotating mechanism and fixedly connected with the telescopic rotating mechanism. The movement of the second nut seat can be guided through the arrangement of the vertical rail and the sliding block.

Furthermore, the second nut seat comprises a nut seat body, and two ends of the nut seat body can be respectively abutted against the side walls of the two connecting plates; the two ends of the nut seat body are also respectively provided with extension plates corresponding to the connecting plates one by one, and the extension plates can be abutted to one side, away from the vertical rail, of the corresponding connecting plates. The limiting of the positions of the second nut seat and the connecting plate can utilize the structures of the second nut seat and the connecting plate to limit each other, so that the stability and the synchronism of the movement of the second nut seat and the connecting plate are improved on the premise of not increasing the cost, and the movement reliability of the lifting movement of the telescopic rotating mechanism is further ensured.

Drawings

FIG. 1 is a schematic view of a wafer handling apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic view of an end effector according to an embodiment of the present invention;

FIG. 3 is a schematic view of a multi-fork assembly according to an embodiment of the present invention;

FIG. 4 is a schematic diagram illustrating an assembly structure of a fork and a pitch changing portion of a multi-fork set according to an embodiment of the present invention;

FIG. 5 is a schematic view of a multi-pallet fork assembly according to an embodiment of the present invention having only one set of adjustment pallet fork assemblies;

FIG. 6 is a rear view of a multi-prong set according to an embodiment of the present invention;

FIG. 7 is a schematic view in section in the direction A-A of FIG. 6;

FIG. 8 is a schematic view in section in the direction B-B in FIG. 6;

FIG. 9 is an assembled schematic view of a detection portion in a multi-fork set according to an embodiment of the present invention;

FIG. 10 is a schematic diagram of a monolithic fork assembly according to an embodiment of the present invention;

FIG. 11 is a schematic view of an angle adjustment mechanism according to an embodiment of the present invention mounted on a fork mounting plate;

FIG. 12 is an enlarged view of a portion of the portion A of FIG. 11;

FIG. 13 is an exploded view of an angle adjustment mechanism according to an embodiment of the present invention;

FIG. 14 is a schematic view of a second adjusting plate according to an embodiment of the present invention;

FIG. 15 is a schematic view of a fork angle detecting unit according to an embodiment of the present invention;

FIG. 16 is a schematic view of a first plane in a horizontal plane according to an embodiment of the present invention;

FIG. 17 is a schematic view of a first plane of an embodiment of the present invention in an inclined plane;

FIG. 18 is a schematic view of an end effector of an embodiment of the present invention assembled to a telescoping portion;

FIG. 19 is a schematic view of a telescopic portion according to an embodiment of the present invention;

FIG. 20 is a schematic view of a rotary part according to an embodiment of the present invention;

FIG. 21 is an enlarged view of a portion of the portion B of FIG. 20;

FIG. 22 is a schematic diagram of a lifting mechanism according to an embodiment of the present invention;

fig. 23 is a schematic structural view of the second nut seat and the connecting plate according to the embodiment of the present invention.

In the figure:

1-a lifting mechanism; 11-a lifting frame; 12-screw motor; 13-a second nut seat; 131-

A nut seat body; 132-an extension plate; 14-vertical rails; 15-connecting plates; 151-limiting columns; 16-a shoe;

2-a rotating part; 21-rotating the base; 211-a base chute; 212-a first adjusting plate; 213-waist-shaped holes; 22-synchronous band group; 221-a driving wheel; 222-a belt; 223-tensioning wheel; 23-fixing the flange;

3-telescoping part; 31-a telescopic housing; 32-a first drive assembly; 321-motor number one; 322-belt group; 323-a connector; 33-drive assembly number two; 34-a guide rail;

4-an end effector; 41-a monolithic fork set; 411. 421-sheet fork; 412-a sheet fork fixation; 42-multi-pallet fork group; 422-a fixed base of variable pitch; 423-a bidirectional screw rod; 424-guide bar; 425-sheet fork mounting plate; 4251-a second cambered surface; 4252-cambered surface chute; 4253-limiting plate; 4254-screw mount; 426—synchronous belt; 427-synchronizing wheel; 428-variable-pitch cartridge; 43-angle adjustment mechanism; 431-a second adjustment plate; 4311—a first plane; 4312-a first cambered surface; 4313-arc slide rails; 432-driving a motor; 433-screw rod; 434-an adapter plate; 435-a first nut mount; 436-drive mount; 437—shaft lever; 438-bevel gear number one; 439-second bevel gear; 44-sensor holders; 441-a pressure sensor;

5-detecting part.

Detailed Description

The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making clear and defining the scope of the present invention.

Examples

Referring to fig. 1, a wafer handling apparatus of the present invention is located between a wafer boat and a carrier, and includes a telescopic rotating mechanism capable of moving up and down under the action of a lifting mechanism 1, wherein the telescopic rotating mechanism includes a rotating portion 2, a telescopic portion 3 and an end effector 4. The rotating part 2 is used for driving the telescopic part 3 to rotate so that the end effector 4 positioned on the telescopic part 3 can face the wafer boat or the wafer box. The telescopic part 3 is used for driving the end effector 4 to extend or retract so that the end effector 4 can enter the wafer boat or the wafer box to take and put wafers.

Referring to fig. 2, the end effector 4 includes a single-chip fork group 41 and a multi-chip fork group 42 that can operate independently, wherein the single-chip fork group 41 is used for detecting the placement condition of wafers in a wafer cassette or a wafer boat and can pick and place single-chip wafers; the multi-fork group 42 is used for picking and placing a plurality of continuous wafers, and the number of the wafers picked and placed is consistent with the number of the forks in the multi-fork group. When the number of consecutive wafers in the wafer cassette is smaller than the number of the wafer forks in the multi-wafer fork group 42 or the wafers in the wafer cassette are discontinuous, only the single wafer can be sequentially taken and placed by the single-wafer fork group 41. It should be noted that a continuous wafer refers to a plurality of wafers, wherein the spacing between any two adjacent wafers is the same, and a discontinuous wafer refers to a plurality of wafers, wherein the spacing between at least one adjacent two wafers is different from the spacing between any two adjacent wafers.

When the multi-fork group 42 picks up and places continuous wafers, there is a possibility that the problem that the fork pitch in the multi-fork group 42 is not matched with the wafer pitch may occur, therefore, in some embodiments, the multi-fork group 42 is designed to have a structure with an adjustable fork pitch, specifically, referring to fig. 3 and fig. 5, the multi-fork group 42 includes a plurality of forks 421 distributed up and down and a pitch changing portion for adjusting the fork 421 pitch, and the pitches between two adjacent forks 421 are the same. When the number of the slit 421 is even, the plurality of slit 421 includes a plurality of sets of slit groups arranged from inside to outside in the vertical direction, and each set of slit groups includes two slit groups arranged up and down. When the number of the plate forks 421 is odd, the plate forks 421 include a fixed plate fork and a plurality of groups of distance-adjusting plate fork groups arranged on two sides of the fixed plate fork from inside to outside in the vertical direction (i.e. the odd plate forks only use one plate fork in the middle as the fixed plate fork, and the rest plate forks are divided into a plurality of groups of distance-adjusting plate fork groups according to the even plate forks). The distance between two adjacent sheet forks can be adjusted by moving the distance-adjusting sheet fork up and down.

In addition, in order to ensure that the spacing between two adjacent adjusted sheet forks is the same, the moving stroke of the distance adjusting sheet forks of the plurality of groups of distance adjusting sheet fork groups is sequentially multiplied according to the sequence from inside to outside of the distance adjusting sheet fork groups. Illustratively, as shown in fig. 5, the multi-blade fork group includes a fixed blade fork and a set of distance-adjusting blade fork groups, and at this time, the distance-adjusting blade fork of the distance-adjusting blade fork group can realize the adjustment of the distance between the two distance-adjusting blade forks and the fixed blade fork only by moving reversely relative to the fixed blade fork; as shown in fig. 3, the multi-blade fork group includes one fixing blade fork and two sets of distance-adjusting fork groups, and at this time, the distance that one set of distance-adjusting fork groups far from the fixing blade fork (outside) moves needs to be twice the distance that one set of distance-adjusting fork groups near the fixing blade fork (inside) moves.

In some embodiments, referring to fig. 4 and fig. 5, the distance changing portion includes a distance changing fixing seat 422, and a distance adjusting transmission member disposed on the distance changing fixing seat 422 in one-to-one correspondence with the distance adjusting fork group is used to drive two distance adjusting forks in the corresponding distance adjusting fork group to move in opposite directions. All the distance-adjusting transmission pieces are connected through a synchronous driving mechanism so as to realize synchronous distance adjustment of a plurality of groups of distance-adjusting sheet fork groups.

Specifically, referring to fig. 4 to 8, the distance-adjusting transmission member includes a bidirectional screw rod 423 disposed on the distance-adjusting fixing seat 422 along a vertical direction, two screw nuts capable of moving synchronously and reversely are sleeved on the bidirectional screw rod 423, and the two screw nuts are respectively connected with two distance-adjusting blade forks in the corresponding distance-adjusting blade fork group. In order to improve the stability of the movement of the distance adjusting fork, guide rods 424 may be further disposed on both sides of the bidirectional screw rod 423 to guide the movement of the screw nut along the bidirectional screw rod. In some embodiments, the gauge further includes a gauge mounting plate 425 disposed in one-to-one correspondence with the gauge 421 to connect the corresponding gauge mount or gauge mount to the gauge mount 422 or gauge drive. Specifically, the plate fork mounting plate 425 corresponding to the fixing plate fork is fixedly connected to the variable-pitch fixing seat 422, and one end of the plate fork mounting plate extends out of the variable-pitch fixing seat 422 and is connected with the fixing plate fork. The fork mounting plates 425 corresponding to the distance-adjusting forks are respectively fixedly connected to the screw nuts, and one ends of the fork mounting plates extend out of the distance-adjusting fixing seats 422 and are connected with the corresponding distance-adjusting forks. Further, the lead screw nut may be directly integrated on the fork mounting plate 425, and a through hole through which the guide rod 424 passes may be formed in the fork mounting plate 425.

In some embodiments, referring to fig. 8, the synchronous driving mechanism includes a synchronous driving motor, a synchronous belt 426, and a plurality of synchronous wheels 427, where the synchronous wheels 427 are disposed in one-to-one correspondence with the bidirectional screw rods 423, and the corresponding bidirectional screw rods 423 are coaxially connected at the axis of the synchronous driving mechanism. A plurality of synchronizing wheels 427 are also commonly wound with a closed-loop synchronizing belt 426. The synchronous drive motor is mounted on the variable-pitch fixed base 422 and its output shaft is coaxially connected with a synchronous wheel 427. And the angular speeds of the synchronizing wheels 427 are adapted to the movement stroke ratios required by the distance adjusting forks of the corresponding distance adjusting fork sets.

For example, for ease of understanding, when the number of the forks is 5, the third fork from top to bottom is a fixed plate fork, the second fork from top to bottom and the fourth fork from top are the distance-adjusting forks in the first group of distance-adjusting forks (hereinafter referred to as "first distance-adjusting forks"), and the first fork from top to bottom and the fifth fork from top are the distance-adjusting forks in the second group of distance-adjusting forks (hereinafter referred to as "second distance-adjusting forks"), then correspondingly, the synchronizing wheel corresponding to the first group of distance-adjusting forks is referred to as a first synchronizing wheel, the synchronizing wheel of the second group of distance-adjusting forks is referred to as a second synchronizing wheel, and in order to ensure that the distance between the second distance-adjusting forks and the first distance-adjusting forks on the same side of the fixed plate fork is kept the same as the distance between the first distance-adjusting forks and the fixed plate fork, the moving distance of the second distance-adjusting forks should be twice the moving distance of the first distance-adjusting forks. Therefore, the transmission ratio of the first synchronous wheel to the second synchronous wheel should be 1:2, so that the moving stroke ratio of the first distance adjusting fork and the second distance adjusting fork is 1:2. Similarly, when the number of the sheet forks is 7, the moving travel ratio of the distance-adjusting sheet forks of the three distance-adjusting sheet fork groups is 1:2:3, and the transmission ratio of the corresponding synchronous wheels is 1:2:3.

In some embodiments, the timing belt 426 and the timing wheel 427 may be configured by a toothed belt and a toothed wheel to further enhance the stability of the transmission therebetween. Still further, the synchronous driving mechanism further comprises a tensioning wheel for adjusting tightness of the synchronous belt.

In the multi-fork group, the synchronous movement of all the distance-adjusting fork can be driven by a single driving source through the cooperation of the distance-adjusting transmission piece and the synchronous driving mechanism, so that the distance-adjusting efficiency is improved; in addition, through setting up to a plurality of synchronizing wheel transmission ratios to when making the synchronous removal of different groups's adjustment piece fork, its travel is the multiple increase, in order to guarantee that the interval between two adjacent piece forks in the adjustment process remains the same still.

In order to avoid the problem of pollution to the blade fork caused by particles generated during the operation of the pitch changing portion being scattered onto the blade fork, in some embodiments, referring to fig. 2 and 3, the multi-blade fork group 42 further includes a pitch changing box 428, and the pitch changing fixed seat 422, the pitch changing transmission member and the synchronous driving mechanism are all built in the pitch changing box 428, and a mounting opening is formed on one side of the pitch changing box 428 facing the blade fork 421, and the blade fork mounting plate 425 is arranged at the mounting opening in a penetrating manner so as to realize connection between the blade fork and the pitch changing portion. When the multi-blade fork group 42 is connected to the telescopic portion 3, the distance-changing case 428 is fixed to the telescopic portion 3.

To detect whether the wafer is clamped by the fork 421, in some embodiments, referring to fig. 3 and 9, a detecting portion 5 is further mounted on the fork mounting plate 425. The detecting portion 5 includes correlation sensors corresponding to the sheet forks 421 one to one, wherein the transmitting ends and the receiving ends of the correlation sensors corresponding to the sheet forks 421 on the uppermost layer are respectively installed on two sides of the sheet fork mounting plate, and the mounting heights of the transmitting ends and the receiving ends are different, so that when the wafer is located on the sheet forks, the wafer can shield the correlation light of the transmitting ends and the receiving ends. The emitting end and the receiving end of the other opposite emission sensors are respectively arranged on the corresponding sheet fork mounting plate and the upper layer sheet fork mounting plate, so that when a wafer enters between the two sheet forks, the wafer can shield opposite rays of the emitting end and the receiving end.

In some embodiments, referring to fig. 10, the single fork group 41 includes a fork 411 and a fork fixing portion 412, the fork 411 is fixedly mounted on a fork mounting plate 425 of the fork fixing portion 412, and the fork fixing portion 412 is fixedly connected with the telescopic portion 3 to transmit a driving force of the telescopic portion 3 to the fork 411. Similarly, in order to detect whether the wafer is clamped by the wafer fork 411, the detection unit 5 is mounted on the wafer fork mounting plate 425, and specifically, the two emission ends and the receiving ends of the correlation sensors having different heights may be mounted on the wafer fork mounting plate.

The wafer fork is limited by the size between the wafer grooves of the wafer box, so that the wafer fork is thinner, and the wafer fork is longer in size, and when the wafer is clamped, the clamping end of the wafer fork (the end, which is firstly contacted with the wafer, of the wafer fork) is in a suspended state, so that the sagging phenomenon of the clamping end of the wafer fork is very easy to occur. Thus, in some embodiments, in order to keep the wafer held by the fork as horizontally as possible, the surface of the fork mounting plate contacting the fork may be configured as an inclined surface, and the direction in which the fork mounting plate is inclined may be gradually inclined upward from the end far from the fork clamping end to the end near the fork clamping end, so as to offset the sagging angle of the fork clamping end. In actual setting, the inclined plane and the horizontal plane are generally included by not more than 0.4 degrees.

To further address sagging issues that occur when the wafer is clamped by the fork, in some embodiments, an angle adjustment mechanism 43 for adjusting the inclination of the

forks

411, 421 may be provided between the fork mounting plate 425 and the forks 411, 421 (fork 411 in a single fork set and fork 421 in a multiple fork set). Specifically, referring to fig. 11 to 14, the angle adjusting mechanism 43 includes a second adjusting plate 431 capable of moving along the length direction of the

fork

411 and 421 under the action of a driving part, the upper end of the second adjusting plate 431 is provided with a first plane 4311 fixedly connected with the

fork

411 and 421, and the lower end is provided with a first arc surface 4312 capable of sliding along the fork mounting plate 425. The upper end of the fork mounting plate 425 is provided with a second cambered surface 4251 matched with the first cambered surface 4312, the second cambered surface 4251 is a concave circular cambered surface, and the second cambered surface 4251 gradually inclines upwards from a direction away from the fork clamping end to a direction close to the fork clamping end. When the first cambered surface 4312 is completely adhered to the second cambered surface 4251, the first plane 4311 is in a horizontal plane. When the driving portion drives the second adjusting plate 431 to move toward the tab fork clamping end, the first arc surface 4312 can slide upward along the second arc surface 4251, and the first plane 4311 is inclined toward the tab fork clamping end, so that the

tabs

411 and 421 fixedly connected to the first plane 4311 can be inclined toward the tab fork clamping end. In the angle adjusting mechanism, smooth sliding of the second adjusting plate 431 on the sheet fork mounting plate 425 is ensured through matching of the first cambered surface 4312 and the second cambered surface 4251, and the first plane 4311 of the second adjusting plate 431 in sliding can be inclined through limiting the radian of the second cambered surface 4251, so that the inclination of the

sheet fork

411 and 421 is realized, and the purpose of adjusting the inclination angle of the

sheet fork

411 and 421 is achieved.

Further, referring to fig. 13 and 14, a second arc 4251 is provided with an arc chute 4252 along the length direction of the fork, and the first arc 4312 is provided with an arc slide rail 4313 matching with the arc chute 4252. The relative sliding between the arc-surface sliding groove 4252 and the arc-surface sliding rail 4313 and the relative sliding between the first arc surface 4312 and the second arc surface 4251 are kept synchronous, namely, when the first arc surface 4312 slides along the second arc surface 4251, the arc-surface sliding rail 4313 can move along the arc-surface sliding groove 4252, and the purpose of the arc-surface sliding groove 4252 and the arc-surface sliding rail 4313 is to limit the second adjusting plate 431 to slide along the sliding direction of the first arc surface 4312 only.

In some embodiments, referring to fig. 13, the upper end of the fork mounting plate 425 is further provided with a limiting plate 4253 for limiting the movement range of the second adjusting plate 431, and the limiting plate 4253 is located at a side near the lower end of the second cambered surface 4251. When the first arc surface 4312 and the second arc surface 4251 are completely attached, the side of the second adjusting plate 431 away from the tab fork clamping end abuts against the limiting plate 4253.

In some embodiments, referring to fig. 11 and 15, a fork angle detecting portion for detecting the inclination of the

forks

411 and 421 is further provided on the fork mounting plate 425, where the fork angle detecting portion includes a sensor fixing plate 44 fixedly connected to one side of the fork mounting plate 425, one end of the sensor fixing plate 44 facing the fork clamping end extends out of the fork mounting plate 425 and is integrally provided with a bending plate located below the

forks

411 and 421, and the bending plate is provided with a pressure sensor 441 for abutting the

forks

411 and 421. When the

forks

411 and 421 are kept horizontal, the

forks

411 and 421 and the pressure sensor 441 are in a critical pressing state (the critical pressing means that the

forks

411 and 421 are in contact with the pressure sensor 441 and no pressure is generated to the pressure sensor 441), and at this time, the pressure sensor 441 does not detect a pressure signal (the pressure signal is 0); when the

prongs

411 and 421 droop, the

prongs

411 and 421 will press against the pressure sensor 441, and the pressure sensor 441 will detect the pressure signal, at this time, the angle adjusting mechanism 43 will be activated to adjust the inclination of the

prongs

411 and 421 until the pressure signal of the pressure sensor 441 is again 0. The sagging condition of the

fork

411, 421 can be timely known by the arrangement of the fork angle detecting part, and a basis is provided for the adjustment amount of the angle adjusting mechanism 43.

In some embodiments, referring to fig. 12 and 13, the driving part is located on the fork mounting plate 425 and comprises a driving motor 432, a transmission member, a screw 433 and an adapter plate 434, wherein the screw 433 is arranged on the fork mounting plate 425 along the length direction of the

forks

411 and 421, and a first nut seat 435 is sleeved on the screw; the transmission piece can drive the screw 433 to rotate under the action of the driving motor 432; the first nut seat 435 is connected with the second adjusting plate 431 through the adapter plate 434, and the adapter plate 431 is hinged with the first nut seat 435 and the second adjusting plate 431 respectively.

Specifically, the hinge structures of the adapter plate 434, the first nut seat 435, and the second adjusting plate 431 are as follows:

the adapter plate 431 includes a plate body, and a plate body hanger capable of being hinged to the second adjusting plate 431 is integrally provided at one end of the plate body facing the second adjusting plate 431. The first nut seat 435 comprises a seat body which is sleeved on the screw rod 433 by threads, seat body hangers are symmetrically arranged at two ends of the seat body, and a pair of seat body hangers are hinged with the plate body by a pin shaft. When the screw rod 433 rotates, the adapter plate 434 limits the first nut seat 435, so that the first nut seat 435 can only move linearly along the screw rod 433, and further the seat body hanging lugs can push the adapter plate 434 to move synchronously, and the plate body hanging lugs push the second adjusting plate 431 to slide along the second cambered surface 4251.

Further, in order to ensure the normal operation of the driving part, a relief groove for accommodating the screw 433 is formed in the limiting plate 4253.

In some embodiments, referring to fig. 12, the driving member includes a driving mounting seat 436, a shaft 437, a first bevel gear 438, and a second bevel gear 439, the driving mounting seat 436 is provided with two driving mounting seats, and the two driving mounting seats 436 are arranged on the sheet fork mounting plate 425 along the width direction of the

sheet fork

411, 421. The shaft 437 is threaded onto a pair of drive mounts 436, one end of which is connected to a drive motor 432 mounted on the fork mounting plate 425. The first bevel gear 438 is fixedly sleeved on the shaft lever 437, the second bevel gear 439 is fixedly sleeved on the screw rod 433, and the first bevel gear 438 and the second bevel gear 439 are vertically arranged and can be meshed for transmission. When the driving motor 432 drives the shaft 437 to rotate, the first bevel gear 438 rotates synchronously and drives the second bevel gear 439 meshed with the first bevel gear 438 to rotate, thereby driving the screw 433 to rotate. In addition, in order to improve the stability in the rotation process of the screw 433, a screw mounting seat 4254 for the screw 433 to penetrate is further provided on the sheet fork mounting plate 425, and further, the screw mounting seat 4254 is located in the relief groove.

As shown in fig. 16, in the initial state, the first plane 4311 is in a horizontal state, the first cambered surface 4312 and the second cambered surface 4251 are completely attached, and at this time, the contact parts of the fork 411 and 421 and the first plane 4311 are in a horizontal state; when the clamping ends of the wafer fork 411 and 421 sag due to clamping of the wafer, the position of the wafer fork above the pressure sensor 441 is pressed against the pressure sensor 441 under force, and at this time, the pressure sensor 441 can detect a pressure signal; then, the driving motor 432 is started, the driving member operates and drives the screw rod 433 to rotate, the first nut seat 435 moves along the screw rod 433 and pushes the second adjusting plate 431 to slide along the fork mounting plate 425 through the adapter plate 434, so that the first plane 4311 inclines upwards towards the direction of the fork clamping end, and further the forks 411 and 421 fixedly connected with the first plane 4311 can incline towards the direction of the fork clamping end (as shown in fig. 17, the forks form an included angle θ with the horizontal plane) to offset the sagging angle of the fork 411 and 421 clamping end until the pressure signal of the pressure sensor 441 is 0, the driving motor 432 stops operating, and the position between the forks 411 and 421 and the pressure sensor 441 returns to the critical pressing state.

In some embodiments, referring to fig. 18 and 19, the telescopic portion 3 includes a telescopic housing 31 connected to the rotary portion 2, and a first driving assembly 32 and a second driving assembly 33 for driving the single-blade fork group 41 and the multi-blade fork group 42 to move along the length direction of the telescopic housing 31 are respectively provided on the telescopic housing 31. The first driving component 32 and the second driving component 33 can adopt screw transmission, belt transmission or other driving modes of linear movement.

Illustratively, referring to fig. 19, the first driving assembly 32 adopts a belt driving manner, and includes a first motor 321, a belt group 322 and a connecting member 323. A first motor 321 is mounted on the telescopic housing 31 for driving the belt group 322 to operate; the driving belt group 322 is built in the telescopic shell 31 and comprises a driving wheel, a driven driving wheel and a driving belt, wherein the driving wheel is coaxially arranged on an output shaft of the first motor 321, the driven driving wheel is fixedly arranged on the telescopic shell 31, and the driving belt is wound on the driving wheel and the driven driving wheel in a closed loop. The connecting piece 323 is mounted on the transmission belt and fixedly connected with the sheet fork fixing part 412 of the sheet fork group 41. When the motor I is started, the driving transmission wheel rotates to drive the transmission belt to rotate, the driven transmission wheel rotates along with the transmission belt, and the connecting piece 323 connected with the transmission belt moves along with the transmission belt to drive the single fork group 41 to move. It should be noted that the radial dimensions of the driven driving wheel and the driving wheel are the same, and the axis connecting line of the driven driving wheel and the driving wheel is parallel to the length direction of the telescopic housing 31, so as to ensure that the driving belt can drive the connecting piece 323 to move along the length direction of the telescopic housing 31, so as to realize the extension and retraction of the single-piece fork group 41 along the length direction of the telescopic housing 31. The second driving component 33 can refer to the structure of the first driving component 32, and can be other linear driving structures in the prior art, which will not be described in detail in this embodiment.

To improve the stability of the drive of the belt set 322, in one example, the driving and driven drive wheels each employ gears, the drive belt employs toothed belts capable of meshing with the gears, and the connecting piece 323 employs toothed clamps capable of clamping on the toothed belts.

Further, a guide rail 34 disposed along the length direction of the telescopic housing 31 is also installed in the telescopic housing 31, and a guide rail slider movable along the guide rail 34 is fixedly connected to the connecting member 323. The connecting piece 323 can be guided along with the movement of the driving belt through the matching of the guide rail 34 and the guide rail sliding block, so that the influence of the shaking of the driving belt on the linear movement of the connecting piece 323 is restrained.

In some embodiments, referring to fig. 20 and 21, the rotating part 2 includes a rotating base 21, a rotating motor, and a synchronous belt set 22, where the rotating base 21 is fixedly connected to the lifting mechanism 1 and can move up and down along the Z-axis (vertical direction) under the action of the lifting mechanism 1. The rotating motor is mounted in a rotating base 21, and its output shaft is connected to the telescopic section 3 via a synchronizing belt set 22. Specifically, the synchronous belt set 22 includes a driving wheel 221, a driven wheel and a belt 222, the driving wheel 221 is coaxially connected with an output shaft of the rotating motor, the driven wheel is mounted on the rotating base 21, a fixing flange 23 for connecting the telescopic housing 31 is coaxially connected thereto, and the belt 222 is wound on the driving wheel 221 and the driven wheel in a closed loop. When the rotary motor is started, the driving wheel 221 rotates, and drives the belt 222 to drive, and further drives the driven wheel to rotate, and the fixed flange 23 rotates and drives the telescopic part 3 to rotate. In an example, the diameter of the driven wheel may be set to be larger than the diameter of the driving wheel 221, so that the rotation speed of the driven wheel is smaller than the rotation speed of the driving wheel 221, and the rotation stability of the driven wheel is enhanced on the premise that the rotation speed of the rotating motor is unchanged, so as to ensure the rotation stability of the telescopic part 3.

In some embodiments, in order to adjust the tightness of the belt 222, a tensioning wheel 223 capable of abutting against the belt 222 is further provided between the driving wheel 221 and the driven wheel, and the tensioning wheel 223 is movably mounted on the rotating base 21 through an adjusting member. Specifically, referring to fig. 21, a base sliding groove 211 is formed in the rotating base 21, and the base sliding groove 211 is arranged in a direction perpendicular to the axis connecting line direction of the driving wheel 221 and the driven wheel, the adjusting piece comprises a first adjusting plate 212 and a guide rod, the first adjusting plate 212 is slidably arranged in the base sliding groove 211, one end of the first adjusting plate is provided with a tensioning wheel 223, and the other end of the first adjusting plate is provided with a waist-shaped hole 213 arranged in the moving direction. The rotating base 21 is provided with a through hole penetrating through the base sliding groove 211, and the inner diameter of the through hole is matched with the radial dimension of the guide rod. The guide rod is sequentially inserted into the waist-shaped hole 213 and the through hole, and is fixed to the rotating base 21 by a fastener. The movement range of the first adjusting plate 212 in the base sliding groove 211 can be limited by the cooperation of the waist-shaped hole 213 and the guide rod, and the tension adjusting range of the tension pulley 223 on the belt 222 can be further limited.

When the tension pulley 223 is provided, the tension pulley 223 may be provided outside the belt 222, or the tension pulley 223 may be provided inside the belt 222. When the tension pulley 223 is disposed outside the belt 222, the tension pulley 223 abuts against the outer side surface of the belt 222, and when the belt 222 is tensioned, the tension pulley 223 pushes the belt 222 from the outside of the belt 222 to the inside of the belt 222; when the tension pulley 223 is disposed inside the belt 222, the tension pulley 223 abuts against the inner side surface of the belt 222, and when the belt 222 is tensioned, the tension pulley 223 pushes the belt 222 from the inside of the belt 222 to the outside of the belt 222. It should be noted that, when the tensioning wheel 223 is disposed on the outer side of the belt 222, the contact area between the belt 222 and the driving wheel 221 and the driven wheel will be correspondingly reduced during the process of tensioning the belt 222, so that the movement range of the tensioning wheel 223 needs to be reasonably planned during design to ensure effective transmission between the belt 222 and the driving wheel 221 and the driven wheel.

In some embodiments, referring to fig. 22, the lifting mechanism 1 includes a screw motor 12 disposed on the lifting frame 11 along the Z-axis direction (vertical direction), and a second nut seat 13 is sleeved on the screw of the screw motor 12. In order to improve the stability of the second nut seat 13 during moving, the lifting frame 11 is further provided with vertical rails 14 symmetrically arranged at two sides of the screw rod along the X-axis direction, two ends of the second nut seat 13 are respectively connected with connecting plates 15 corresponding to the vertical rails 14 one by one, one side of each connecting plate 15 facing the Y-axis direction is provided with a sliding block capable of sliding along the corresponding vertical rail 14, and the other side of each connecting plate 15 can be abutted to the rotating base 21 and fixedly connected with the rotating base 21. When the second nut seat 13 moves up and down along the screw rod, the connecting plate 15 moves along with the slide block and drives the slide block to move up and down along the corresponding vertical rail 14. The lifting movement of the connecting plate 15 can be guided through the cooperation of the two vertical rails 14 and the sliding block, so that the lifting movement of the second nut seat 13 on the screw rod is guided, and the lifting movement stability of the second nut seat is improved.

In some embodiments, referring to fig. 23, the second nut seat 13 includes a nut seat body 131 sleeved on a screw rod, and two ends of the nut seat body 131 along the X-axis direction can respectively abut against side walls of the two connecting plates 15, so that the two connecting plates 15 are utilized to limit the nut seat body 131 in the X-axis direction. The nut seat body 131 is also provided with extension plates 132 corresponding to the connecting plates 15 one by one along two ends of the X-axis direction respectively, and the extension plates 132 can be abutted against one side, away from the vertical rail 14, of the corresponding connecting plates 15, so that the Y-axis direction limiting of the connecting plates 15 is performed by utilizing the extension plates 132, and sliding of the sliding blocks on the vertical rail 14 is avoided. It should be noted that the nut seat body 131 and the extension plate 132 are integrally formed. Further, the extending plate 132 is provided with a limiting hole along the Y-axis direction, and the corresponding connecting plate 15 is provided with a limiting post 151 capable of being embedded in the limiting hole. The lifting movement of the second nut seat 13 can be transmitted to the connecting plate 15 through the cooperation of the limiting hole and the limiting column 151, so that the synchronism of the movement of the connecting plate 15 and the second nut seat 13 is ensured. In this example, the second nut seat 13 and the connecting plate 15 are mutually limited by using their own structures, so that the stability and synchronism of the movement of the second nut seat 13 and the connecting plate 15 are improved without increasing the cost, and the movement reliability of the telescopic rotating mechanism along the Z-axis direction is further ensured.

In one example, the bottom of the elevator frame 11 is provided with a shoe 16 that can support the telescopic rotating mechanism.

The wafer handling device of the embodiment has a multi-axis driving mode, wherein the end effector can rotate at will in the horizontal direction through the rotating part, so that the end effector can be aligned to the wafer box or the wafer boat; the linear expansion and contraction of the end effector along the horizontal direction is realized through the expansion and contraction part, so that the end effector can enter the wafer box or the wafer boat along the horizontal direction; the lifting movement of the end effector is realized through the lifting assembly, so that the end effector can be aligned to wafers at different height positions; in the end effector, a single-chip fork group and a multi-chip fork group are arranged to reasonably pick and place wafers under different working conditions (continuous or discontinuous, etc.), and the single-chip fork group and the multi-chip fork group can be driven to independently operate through a first driving component and a second driving component of the telescopic part, so that the single-chip fork group and the multi-chip fork group can independently enter a wafer box or a wafer boat; in the multi-fork group, the spacing of the fork in the multi-fork group is adjustable through the arrangement of the spacing changing part so as to meet the requirement that the spacing of the fork is matched with the spacing of the wafers in the wafer boat or the wafer box.

The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and to implement the same, but are not intended to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.

Claims

1. The utility model provides a wafer handling device, is located between wafer boat and the carrier, its characterized in that: the telescopic rotating mechanism comprises a rotating part, a telescopic part and an end effector; the rotating part is used for driving the telescopic part to rotate so that the end effector positioned on the telescopic part can face the wafer boat or the wafer box; the telescopic part is used for driving the end effector to extend or retract so that the end effector can enter the wafer boat or the wafer box to take and put wafers;

the end effector comprises a single-piece fork group and a multi-piece fork group, wherein the single-piece fork group and the multi-piece fork group respectively comprise a piece fork and a piece fork mounting plate which are arranged in a one-to-one correspondence manner, and the piece fork mounting plate is provided with an angle adjusting mechanism; the angle adjusting mechanism comprises a second adjusting plate which can move along the length direction of the sheet fork under the action of a driving part, the upper end of the second adjusting plate is provided with a first plane fixedly connected with the sheet fork, and the lower end of the second adjusting plate is provided with a first cambered surface which can slide along the sheet fork mounting plate; the sheet fork mounting plate is provided with a second cambered surface for sliding of the first cambered surface, the second cambered surface is a concave circular cambered surface, and the second cambered surface is gradually inclined upwards from a direction away from the sheet fork clamping end to a direction close to the sheet fork clamping end.

2. The wafer handling device of claim 1, wherein: the second cambered surface is provided with a cambered surface sliding groove along the length direction of the sheet fork, and the first cambered surface is provided with a cambered surface sliding rail matched with the cambered surface sliding groove.

3. The wafer handling device of claim 1, wherein: the driving part comprises a driving motor, a transmission piece, a screw rod and an adapter plate; the screw rod is arranged on the sheet fork mounting plate along the length direction of the sheet fork, and a first nut seat is sleeved on the screw rod in a threaded manner; the transmission piece can drive the screw rod to rotate under the action of the driving motor; the first nut seat is connected with the second adjusting plate through the adapter plate, and the adapter plate is hinged with the first nut seat and the second adjusting plate respectively.

4. A wafer handling device according to claim 3, wherein: the transmission part comprises a shaft lever, a first bevel gear and a second bevel gear; the shaft rod is distributed along the width direction of the sheet fork, and one end of the shaft rod is connected with a driving motor arranged on the sheet fork mounting plate; the first bevel gear is fixedly sleeved on the shaft rod, the second bevel gear is fixedly sleeved on the screw rod, and the first bevel gear and the second bevel gear are vertically arranged and can be meshed for transmission.

5. The wafer handling device of claim 1, wherein: the sheet fork angle detection part is used for detecting the gradient of the sheet fork, the sheet fork angle detection part comprises a sensor fixing plate fixedly connected to one side of the sheet fork mounting plate, one end of the sensor fixing plate, which faces the sheet fork, extends out of the sheet fork mounting plate, a bending plate positioned below the sheet fork is integrally arranged on the sheet fork mounting plate, and a pressure sensor for the sheet fork to butt is arranged on the bending plate.

6. The wafer handling device according to any one of claims 1 to 5, wherein: the multi-blade fork group comprises a plurality of blade forks and a distance changing part, wherein the blade forks comprise a plurality of groups of distance adjusting blade fork groups which are arranged from inside to outside along the vertical direction, and each group of distance adjusting blade fork groups comprises two distance adjusting blade forks which are arranged up and down; the distance changing part comprises distance adjusting transmission parts which are arranged in one-to-one correspondence with the distance adjusting fork groups, all the distance adjusting transmission parts are connected through a synchronous driving mechanism, and the moving stroke of the distance adjusting forks of the plurality of groups of distance adjusting fork groups can be increased in turn from inside to outside in a multiple manner.

7. The wafer handling device of claim 6, wherein: the distance-adjusting transmission piece comprises a bidirectional screw rod and two screw nuts sleeved on the bidirectional screw rod, wherein the two screw nuts are respectively connected with the two distance-adjusting sheet forks of the corresponding distance-adjusting sheet fork group so as to drive the two distance-adjusting sheet forks to synchronously and reversely move.

8. The wafer handling device of claim 7, wherein: the synchronous driving mechanism comprises a synchronous driving motor, a synchronous belt and a plurality of synchronous wheels, wherein the synchronous belt is wound on the synchronous wheels in a closed loop; the synchronous wheels are arranged in one-to-one correspondence with the bidirectional screw rods, the corresponding bidirectional screw rods are coaxially connected to the axle center of the synchronous wheels, and the angular speeds of the synchronous wheels are sequentially multiplied, so that the rotating speeds of the corresponding bidirectional screw rods are sequentially multiplied; and an output shaft of the synchronous driving motor is coaxially connected with one synchronous wheel.

9. The wafer handling device of claim 6, wherein: the multi-fork group further comprises a distance changing box body used for accommodating the distance changing part, the distance changing box body is fixedly connected to the telescopic part, one side of the distance changing box body, which faces the fork, is provided with an installation opening for the fork installation plate to penetrate through, and the fork installation plate is provided with a detection part used for detecting whether a wafer is clamped or not.

10. The wafer handling device of claim 1, wherein: the single-piece fork group comprises a piece fork and a piece fork fixing part, wherein the piece fork fixing part comprises a piece fork mounting plate used for mounting the piece fork, and a detection part used for detecting whether a wafer is clamped or not is arranged on the piece fork mounting plate; and the sheet fork fixing part is fixedly connected with the telescopic part.

11. The wafer handling device of claim 1, wherein: the telescopic part comprises a telescopic shell, and a first driving piece and a second driving piece which are used for independently driving the single-chip fork group and the multi-chip fork group to move along the length direction of the telescopic shell are respectively arranged on the telescopic shell.

12. The wafer handling device of claim 1, wherein: the rotating part comprises a rotating base, a rotating motor and a synchronous belt group, and the rotating base is fixedly connected to the lifting mechanism and can lift and move along the vertical direction under the action of the lifting mechanism; the rotating motor is connected with the telescopic part through the synchronous belt group.

13. The wafer handling device of claim 12, wherein: the synchronous belt group comprises a driving wheel, a driven wheel and a belt, wherein the driving wheel is coaxially connected with an output shaft of the rotating motor, the driven wheel is mounted on the rotating base, a fixing flange used for connecting the telescopic part is coaxially connected onto the driven wheel, and the belt is wound on the driving wheel and the driven wheel in a closed loop.

14. The wafer handling device of claim 13, wherein: and a tensioning wheel which can be propped against the belt is further arranged between the driving wheel and the driven wheel, and the tensioning wheel is movably arranged on the rotating base through an adjusting piece.

15. The wafer handling device of claim 1, wherein: the lifting mechanism comprises a screw rod motor which is vertically arranged on the lifting rack, and a screw rod of the screw rod motor is sleeved with a second nut seat; the lifting frame is also provided with vertical rails symmetrically arranged on two sides of the screw rod, two ends of the second nut seat are respectively connected with connecting plates corresponding to the vertical rails one by one, one side of each connecting plate is provided with a sliding block capable of sliding along the corresponding vertical rail, and the other side of each connecting plate can be abutted to the telescopic rotating mechanism and fixedly connected with the telescopic rotating mechanism.

16. The wafer handling device of claim 15, wherein: the second nut seat comprises a nut seat body, and two ends of the nut seat body can be respectively abutted against the side walls of the two connecting plates; the nut seat is characterized in that the two ends of the nut seat body are also respectively provided with extension plates corresponding to the connecting plates one by one, and the extension plates can be abutted to one sides, away from the vertical rails, of the corresponding connecting plates.