CN115787070A - Crucible, crucible assembly and single crystal furnace - Google Patents
Crucible, crucible assembly and single crystal furnace Download PDFInfo
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- CN115787070A CN115787070A CN202211522679.1A CN202211522679A CN115787070A CN 115787070 A CN115787070 A CN 115787070A CN 202211522679 A CN202211522679 A CN 202211522679A CN 115787070 A CN115787070 A CN 115787070A
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- crucible
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Abstract
The invention relates to a crucible, which comprises a cylindrical main body and a base, wherein the cylindrical main body is made of a carbon fiber composite material, and the base is made of a graphite material. The invention also relates to a crucible assembly and a single crystal furnace. The crucible provided by the embodiment of the invention comprises a cylindrical main body and a base, wherein the cylindrical main body comprises crucible petals made of multi-petal carbon fiber composite materials. Compared with the crucible made of graphite in the related technology, when the crucible is used for bearing a quartz crucible, the carbon fiber composite material and quartz do not react, so that the quartz crucible can be tightly attached to the crucible in the embodiment of the invention in the crystal pulling process, the carbon fiber composite material has good high-temperature heat conduction performance, heat can be uniformly transmitted to the quartz crucible, uniform precipitation of oxygen in the quartz crucible is facilitated, and uniformity of radial oxygen in a crystal bar is facilitated.
Description
Technical Field
The invention relates to the technical field of silicon product manufacturing, in particular to a crucible, a crucible assembly and a single crystal furnace.
Background
The crucible assembly generally applied to the single crystal furnace comprises a quartz crucible and a graphite crucible positioned at the periphery of the quartz crucible, wherein the quartz crucible is used for containing silicon melt, and the graphite crucible is integrally made of graphite, and the graphite crucible has the following defects: the exhaust performance is not good, carbon monoxide gas is generated due to the reaction of graphite and quartz in the crystal pulling process, the gas cannot be discharged in time, the quartz crucible is caused to bulge, the normal operation of crystal pulling is influenced to a great extent, the quality of crystal bars is seriously influenced, uneven heating in the crucible is possibly caused, convection is disordered, and then the breakage of the crystal bars is caused, and the crystal pulling yield is influenced.
Disclosure of Invention
In order to solve the technical problems, the invention provides a crucible, a crucible assembly and a single crystal furnace, which solve the problem that the crystal pulling yield is influenced by carbon monoxide gas generated by the reaction of a graphite crucible and a quartz crucible.
In order to achieve the purpose, the embodiment of the invention adopts the technical scheme that: a crucible comprises a cylindrical main body and a base, wherein the base is made of graphite materials.
Optionally, the cylindrical body comprises multiple crucible petals, a gap is formed between every two adjacent crucible petals, the gap extends from the top of the cylindrical body to the bottom of the cylindrical body, and is inclined along the circumferential direction of the cylindrical body relative to the axial direction of the cylindrical body, and the inclination direction of the gap is opposite to the rotation direction of the crucible in the crystal pulling process.
Optionally, the cylindrical main body includes a straight wall portion and an arc portion, the arc portion has a first end far away from the straight wall portion, and the base is provided with an insertion groove into which the first end is inserted.
Optionally, in the axial direction of the tubular main body, the cross section of the base is i-shaped, the base includes a first supporting portion and a second supporting portion which are arranged oppositely, the first supporting portion is arranged close to the tubular main body, the first supporting portion and the second supporting portion are connected through a connecting column, and the inserting groove is formed between the first supporting portion and the second supporting portion.
Optionally, the inner side surface of the arc-shaped portion includes a first region far away from the straight wall portion, the first region is recessed to form a step groove, and the step groove is matched with the first supporting portion, so that the inner side surface of the arc-shaped portion and one surface of the first supporting portion far away from the second supporting portion are located on the same plane.
Optionally, the step groove includes a step surface, the step surface is an inclined surface extending obliquely in a direction away from the straight wall portion, and one surface of the first supporting portion close to the second supporting portion is an inclined surface matched with the step surface.
Optionally, one surface of the second support portion close to the first support portion is a planar structure parallel to the radial direction of the cylindrical main body, and the bottom surface of the arc portion away from the straight wall portion is a planar structure.
The embodiment of the invention also provides a crucible assembly which is characterized by comprising a quartz crucible and the crucible positioned outside the quartz crucible.
The embodiment of the invention also provides a single crystal furnace which comprises the crucible assembly.
The invention has the beneficial effects that: the crucible provided by the embodiment of the invention comprises a cylindrical main body and a base, wherein the cylindrical main body comprises crucible petals made of multi-petal carbon fiber composite materials. Compared with the crucible made of graphite in the related technology, when the crucible is used for bearing a quartz crucible, the carbon fiber composite material and quartz do not react, so that the quartz crucible can be tightly attached to the crucible in the embodiment of the invention in the crystal pulling process, the carbon fiber composite material has good high-temperature heat conduction performance, heat can be uniformly transmitted to the quartz crucible, uniform precipitation of oxygen in the quartz crucible is facilitated, and uniformity of radial oxygen in a crystal bar is facilitated. Simultaneously this carbon fiber composite's crucible lamella matter is light, is convenient for carry and clearance. In the process of isometric, the bottom heater is in a closed state under the normal condition, so that the temperature of the bottom of the crucible is relatively cold, the quartz crucible and the graphite base do not react, and the bottom is ensured to be tightly attached.
Drawings
FIG. 1 is a first schematic view showing the structure of a crucible in an embodiment of the present invention;
FIG. 2 is a second schematic view showing the structure of a crucible in the example of the present invention;
FIG. 3 shows a schematic structural view of a crucible flap in an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a base in an embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The crucible assembly, which is generally applied to a single crystal furnace, includes a quartz crucible for containing a silicon solution and a graphite crucible for containing the quartz crucible, and carbon monoxide gas is generated during crystal pulling due to reaction of graphite with quartz, and the gas cannot be discharged in time to cause a swelling phenomenon of the quartz crucible. Since the reaction of the R-shaped part of the crucible is the most severe, the bulge usually occurs at the R-shaped part, which greatly affects the normal operation of crystal pulling, seriously affects the quality of crystal bars, and possibly causes uneven heating in the crucible and turbulent convection, thereby causing the breakage of crystal bars and affecting the yield of crystal pulling.
With reference to fig. 1 to 4, in order to solve the above problems, the present embodiment provides a crucible, which includes a cylindrical main body 1 and a base 2, wherein the cylindrical main body 1 is made of a carbon fiber composite material.
The crucible generally comprises a straight wall part and an arc part (i.e. the R-shaped part), and the part with severe reaction (in the conventional technology, the graphite crucible and the quartz crucible react) is at the arc part, so in the present embodiment, the cylindrical body 1 is made of carbon fiber composite material, and the carbon fiber composite material does not react with quartz, so that the quartz crucible can be tightly attached to the crucible in the present embodiment during the crystal pulling process, the carbon fiber composite material has good high-temperature heat conductivity, and can uniformly transmit heat to the quartz crucible, thereby facilitating uniform precipitation of oxygen in the quartz crucible and facilitating uniformity of radial oxygen in the crystal bar.
It should be noted that, in the crystal pulling process, the heating structure is arranged around the crucible (i.e. around the cylindrical body 1 of the crucible), and the graphite crucible and the quartz crucible in the conventional art react at a high temperature to generate gas, so that the cylindrical body 1 of the crucible is easy to react with the quartz crucible, and the temperature of the bottom of the crucible is relatively low, and the reaction is light, therefore, in this embodiment, the cylindrical body 1 is mainly improved for the cylindrical body 1, and the cylindrical body 1 is made of carbon fiber composite material, so as to avoid the reaction with the quartz crucible.
In the conventional technology, a crucible located at the periphery of a quartz crucible is a graphite crucible, the graphite crucible is integrally made of graphite, and the graphite crucible is usually heavier and is not favorable for carrying of operators during assembling and cleaning the crucible. In this embodiment, the cylindrical main body 1 is made of a carbon fiber composite material, so that the cylindrical main body is light in weight and convenient to carry and clean.
In an exemplary embodiment, the base 2 is made of a carbon fiber composite material. The whole crucible is made of carbon fiber composite materials, so that gas generated by reaction with the quartz crucible is effectively avoided, and the crystal pulling yield is prevented from being influenced.
It should be noted that, because the crucible for preparing the integrated carbon fiber composite material has high preparation difficulty and manufacturing cost, the split design is adopted in the embodiment, and the preparation difficulty is reduced.
In an exemplary embodiment, the base 2 is made of graphite, the crucible is entirely made of carbon fiber composite material, the cost is high, and since the heating structure is arranged around the crucible (i.e. around the cylindrical body 1 of the crucible) during the crystal pulling process, and the graphite crucible and the quartz crucible in the conventional art react at high temperature to generate gas, the cylindrical body 1 of the crucible is easily reacted with the quartz crucible, while the temperature of the bottom of the crucible is relatively low, and the reaction is light, in this embodiment, the cylindrical body 1 is made of carbon fiber composite material, and the base 2 is made of graphite, so that the cost is reduced while the reaction with the quartz crucible is avoided.
In an exemplary embodiment, the cylindrical body 1 comprises a plurality of crucible flaps 11, and if one crucible flap 11 is damaged, the crucible flap can be replaced independently, so that the use efficiency is improved.
In an exemplary embodiment, the crucible petals are four petals, the base is made of graphite, and the crucible made of the integrated carbon fiber composite material is difficult to prepare and high in manufacturing cost, so that cost and efficiency can be reduced and the use efficiency can be improved by adopting the five-part design. In the process of isometric, the bottom heater is in a closed state under the normal condition, so that the temperature of the bottom of the crucible is relatively cold, the quartz crucible and the graphite base do not react, and the bottom is ensured to be tightly attached.
In an exemplary embodiment, the cylindrical body 1 comprises a multi-petal crucible petal 11, a slit 10 is arranged between two adjacent crucible petals 11, the slit 10 extends from the top of the cylindrical body 1 to the bottom of the cylindrical body 1, and the slit 10 is obliquely arranged along the circumferential direction of the cylindrical body 1 relative to the axial direction of the cylindrical body 1, and the oblique direction of the slit 10 is opposite to the rotation direction of the crucible during pulling.
The gap 10 and the axial direction of the cylindrical body 1 have a certain angle therebetween, and the size of the angle can be set according to actual needs, for example, the angle can be 30 degrees to 60 degrees, but not limited thereto.
The cylindrical body 1 of the crucible is made of carbon fiber composite materials, the carbon fiber composite materials are light in weight, the cylindrical body 1 comprises a plurality of crucible petals 11 and is not of an integral structure, therefore, in the crystal pulling process, the crucible rotates at a high speed, the cylindrical body 1 is easy to loosen, in order to avoid the phenomenon, a gap 10 between every two adjacent crucible petals 11 is arranged in an inclined mode, the inclined direction of the gap 10 is opposite to the rotating direction of the crucible in the crystal pulling process, and the tightness degree between the crucible petals 11 is enhanced.
The crucible has the advantages that the gaps are small among the crucible flaps, the gap lines are in an inclined state in the circumferential direction of the crucible, and the inclined direction is opposite to the crucible rotating direction of the crucible in the crystal pulling process, for example, in an exemplary embodiment, the crucible inclining direction of the four-flap crucible is clockwise inclined, the rotating speed of the crucible is anticlockwise turned, the crucible needs to be centered before crystal pulling, and due to the fact that the carbon fiber crucible is light in weight, when the rotating direction is opposite to the inclining direction in centering, the crucible can be attached more tightly along with rotation, and centering accuracy is improved.
Referring to fig. 2 and 4, in an exemplary embodiment, the cylindrical body 1 includes a straight wall portion and an arc portion, the arc portion has a first end far away from the straight wall portion, and the base 2 is provided with an insertion groove into which the first end is inserted.
Referring to fig. 4, in an exemplary embodiment, in an axial direction of the cylindrical main body 1, a cross section of the base 2 is i-shaped, the base 2 includes a first supporting portion 21 and a second supporting portion 22 which are oppositely arranged, the first supporting portion 21 is arranged close to the cylindrical main body 1, the first supporting portion 21 and the second supporting portion 22 are connected by a connecting column 23, and the inserting groove is formed between the first supporting portion 21 and the second supporting portion 22.
In an exemplary embodiment, the inner side surface 101 of the arc-shaped portion includes a first region disposed away from the straight wall portion, the first region is recessed to form a step groove 3, and the step groove 3 is matched with the first supporting portion 21, so that the inner side surface 101 of the arc-shaped portion and a surface of the first supporting portion 21 away from the second supporting portion 22 are located on the same plane.
In an exemplary embodiment, the stepped groove 3 includes a stepped surface, the stepped surface is an inclined surface extending obliquely in a direction away from the straight wall portion, and a surface of the first supporting portion 21 close to the second supporting portion 22 is an inclined surface matched with the stepped surface.
The inclined plane plays a guiding role, and is beneficial to the connection of the cylindrical main body 1 and the base 2.
In an exemplary embodiment, a surface of the second support portion 22 close to the first support portion 21 has a planar structure parallel to a radial direction of the tubular body 1, and a bottom surface 102 of the arc portion away from the straight wall portion has a planar structure. The support stability of the base 2 is improved.
The embodiment of the invention also provides a crucible assembly which is characterized by comprising a quartz crucible and the crucible positioned outside the quartz crucible.
The embodiment of the invention also provides a single crystal furnace which comprises the crucible assembly.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and scope of the invention, and such modifications and improvements are also considered to be within the scope of the invention.
Claims (9)
1. The crucible is characterized by comprising a cylindrical main body and a base, wherein the cylindrical main body is made of a carbon fiber composite material, and the base is made of a graphite material.
2. The crucible of claim 1, wherein the cylindrical body comprises a plurality of crucible petals with a gap between two adjacent crucible petals, the gap extending from a top of the cylindrical body to a bottom of the cylindrical body and being disposed at an inclination in a circumferential direction of the cylindrical body relative to an axial direction of the cylindrical body, the inclination of the gap being opposite to a rotational direction of the crucible during crystal pulling.
3. The crucible of claim 1 wherein the cylindrical body includes a straight wall portion and an arcuate portion having a first end distal from the straight wall portion, the base having an insertion slot into which the first end is inserted.
4. The crucible as claimed in claim 3, wherein the base has an I-shaped cross section in the axial direction of the cylindrical body, the base includes a first support portion and a second support portion which are oppositely disposed, the first support portion is disposed adjacent to the cylindrical body, the first support portion and the second support portion are connected by a connecting column, and the insertion groove is formed between the first support portion and the second support portion.
5. The crucible of claim 4, wherein the inner side surface of the arc portion comprises a first region disposed away from the straight wall portion, the first region being recessed to form a stepped groove, the stepped groove cooperating with the first support portion such that the inner side surface of the arc portion and a surface of the first support portion away from the second support portion are in a same plane.
6. The crucible of claim 5, wherein the stepped recess includes a stepped surface, the stepped surface being a slope extending obliquely away from the straight wall portion, and a surface of the first support portion adjacent to the second support portion being a slope cooperating with the stepped surface.
7. The crucible as set forth in claim 4 wherein one surface of the second support portion adjacent to the first support portion is of a planar configuration parallel to the radial direction of the cylindrical body, and the bottom surface of the arc-shaped portion remote from the straight wall portion is of a planar configuration.
8. A crucible assembly comprising a quartz crucible and the crucible of any one of claims 1 to 7 located outside the quartz crucible.
9. A single crystal furnace comprising the crucible assembly of claim 8.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211522679.1A CN115787070A (en) | 2022-11-30 | 2022-11-30 | Crucible, crucible assembly and single crystal furnace |
| TW111150618A TW202319599A (en) | 2022-11-30 | 2022-12-29 | Crucible, crucible assembly and single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211522679.1A CN115787070A (en) | 2022-11-30 | 2022-11-30 | Crucible, crucible assembly and single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115787070A true CN115787070A (en) | 2023-03-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211522679.1A Pending CN115787070A (en) | 2022-11-30 | 2022-11-30 | Crucible, crucible assembly and single crystal furnace |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN115787070A (en) |
| TW (1) | TW202319599A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115074830A (en) * | 2022-06-28 | 2022-09-20 | 乌海市京运通新材料科技有限公司 | Method for prolonging service life of czochralski monocrystalline quartz crucible and crucible structure |
-
2022
- 2022-11-30 CN CN202211522679.1A patent/CN115787070A/en active Pending
- 2022-12-29 TW TW111150618A patent/TW202319599A/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115074830A (en) * | 2022-06-28 | 2022-09-20 | 乌海市京运通新材料科技有限公司 | Method for prolonging service life of czochralski monocrystalline quartz crucible and crucible structure |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202319599A (en) | 2023-05-16 |
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Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Applicant after: Xi'an Yisiwei Material Technology Co.,Ltd. Address before: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Applicant before: Xi'an yisiwei Material Technology Co.,Ltd. |