Disclosure of Invention
In order to solve the above-mentioned problems, the present invention provides a graphite crucible and an apparatus for preventing deformation of a quartz crucible,
in order to achieve the purpose, the embodiment of the invention adopts the technical scheme that: the utility model provides a graphite crucible, includes a plurality of lamella bodies, has the seam between two adjacent lamella bodies, and every lamella body is including the contact surface that is used for with quartz crucible contact, be provided with on the contact surface with the recess of seam intercommunication, at least part the recess is located correspondingly the flexion of lamella body.
Optionally, the groove includes a first sub-groove and a second sub-groove that intersect and communicate with each other, a first end of the first sub-groove is close to the top of the graphite crucible, a second end of the first sub-groove extends to the joint in a direction away from the top of the graphite crucible, the second sub-groove is located at a corresponding curved portion of the petal body, and the second sub-groove extends along a circumferential direction of the graphite crucible.
Optionally, the first end of the first sub-groove is located at a junction of a vertical portion and a curved portion of the graphite crucible.
Optionally, the first end of the first sub-groove is rectangular or rounded in profile.
Optionally, the cross section of the second sub-groove is arc-shaped or rectangular.
Optionally, each flap body is provided with at least one first sub-groove.
Optionally, each flap body is provided with at least two first sub-grooves, and the second ends of the at least two second sub-grooves intersect at the seam.
Optionally, the second sub-grooves on the plurality of petals are connected end to form an annular structure.
Optionally, the graphite crucible includes two the petal body, two on the petal body the recess with two between the petal body the seam is symmetry axis symmetry setting.
The embodiment of the invention also provides a device for preventing the quartz crucible from deforming, which comprises the graphite crucible, wherein the quartz crucible is arranged in the graphite crucible.
The invention has the beneficial effects that: through the setting of graphite crucible upper groove, increase gas passage, can effectually discharge because of the gaseous of impurity production, avoid effectively guaranteeing the crystal bar quality and reducing the risk of thermal field damage because the crucible that gaseous can not in time escape and lead to warp.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
As shown in fig. 1 to 6, an embodiment of the present invention provides a graphite crucible 4, which includes a plurality of petals, a seam is provided between two adjacent petals, each petal includes a contact surface for contacting with a quartz crucible 3, a groove is provided on the contact surface, the groove is communicated with the seam, and at least a part of the groove is located at a curved portion of the corresponding petal.
In the crystal growth process, the quartz crucible 3 is easy to deform due to the influence of gas generation and temperature, the crystal growth is influenced, and the thermal field is damaged in serious cases to destroy the quality of the crystal bar.
Through processing 4 fluting to graphite crucible, increase gas passage, can effectually discharge because of the gaseous of impurity production, avoid effectively guaranteeing the crystal bar quality and reducing the risk of thermal field damage because the crucible that gaseous can not in time escape and lead to warp.
Generally, the bulge deformation of the quartz crucible 3 due to the gas being unable to be discharged often occurs at the R portion (bent portion) of the quartz crucible 3, and in the present embodiment, at least a portion of the groove is located at the corresponding bent portion of the flap body, so that the generated impurity gas can effectively escape through the groove, and the bulge deformation problem of the quartz crucible 3 is solved. And can bring positive influence to the quality of the crystal bar.
In this embodiment, for example, the groove includes a first sub-groove 1 and a second sub-groove 2 that intersect and communicate with each other, a first end of the first sub-groove 1 is close to the top of the graphite crucible 4, a second end of the first sub-groove 1 extends to the joint in a direction away from the top of the graphite crucible 4, the second sub-groove 2 is located at a corresponding bending portion of the petal body, and the second sub-groove 2 extends along the circumferential direction of the graphite crucible 4.
The first sub-groove 1 and the second sub-groove 2 extend along different directions, and the first sub-groove 1 and the second sub-groove 2 are communicated with each other to effectively discharge gas.
In the present embodiment, the first end of the first sub-groove 1 is located at the intersection of the vertical part and the bent part of the graphite crucible 4.
The joint of the vertical part and the bending part of the graphite crucible 4 is easy to bulge due to gas, so that the first sub-groove 1 is arranged at the joint of the vertical part and the bending part of the graphite crucible 4 to discharge the gas, thereby effectively preventing the deformation of the quartz crucible 3.
Fig. 3 and 4 are enlarged schematic views of a point a (indicated by reference numeral 5) in fig. 2, and the first end of the first sub-groove 1 is, for example, in the present embodiment, right-angled or rounded in profile.
Referring to fig. 3, in the embodiment, preferably, the first end of the first sub-groove 1 is a rounded corner, which can effectively reduce the hard contact between the quartz crucible 3 and the graphite crucible 4 caused by high temperature deformation.
Fig. 5 and 6 are enlarged schematic views at B (reference numeral 6) of fig. 2, and the cross section of the second sub-groove 2 is arc-shaped or rectangular in the embodiment as an example.
Referring to fig. 5, in the embodiment, preferably, the cross section of the second sub-groove 2 is arc-shaped, which can effectively reduce the hard contact between the quartz crucible 3 and the graphite crucible 4 caused by high-temperature deformation.
In this embodiment, for example, a joint of the first sub-groove 1 and the second sub-groove 2 is a rounded corner, that is, the joint of the first sub-groove 1 and the second sub-groove 2 is in smooth transition, so as to facilitate the flow of gas and reduce the resistance, referring to fig. 1.
In this embodiment, for example, each flap body is provided with at least one first sub-groove 1.
The number of the first sub-grooves 1 can be set according to actual needs, and the more the number of the first sub-grooves 1 is, the more the gas channels are, so that the gas is discharged.
In this embodiment, for example, each flap body is provided with at least two first sub-grooves 1, and the second ends of at least two second sub-grooves 2 intersect at the seam.
The bottom of the graphite crucible 4 is spherical, and the extending direction of each second sub-groove 2 passes through the center of the bottom of the graphite crucible 4, so that the gas flow path is reduced, and the gas is discharged conveniently.
In this embodiment, for example, the second sub-grooves 2 on the plurality of petals are connected end to form an annular structure.
The structure that constitutes graphite crucible 4's lamella body is the same, second sub-recess 2 is located the handing-over department of graphite crucible 4's vertical portion and flexion, the position that quartz crucible 3 takes place to swell easily and warp promptly, the effectual deformation that prevents quartz crucible 3, consequently, it is a plurality of on the lamella body second sub-recess 2 end to end forms an annular structure, and effectual exhaust prevents the deformation of quartz crucible 3.
Referring to fig. 1 and 2, in this embodiment, for example, the graphite crucible 4 includes two lobes, and the grooves on the two lobes are symmetrically disposed with the joint between the two lobes as a symmetry axis.
In this embodiment, for example, the width of the first sub-groove 1 is the same as the width of the second sub-groove 2, and the width of the first sub-groove 1 is 1-2 mm.
In this embodiment, for example, the depth of the first sub-groove 1 is the same as the depth of the second sub-groove 2, the depth of the first sub-groove 1 is 0.4-0.6mm, and preferably, the depth of the first sub-groove 1 is 0.5 mm.
The embodiment of the invention also provides a device for preventing the quartz crucible 3 from deforming, which comprises the graphite crucible 4, wherein the quartz crucible 3 is arranged in the graphite crucible 4.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.