CN212840144U - Heat insulation structure in draft tube - Google Patents
Heat insulation structure in draft tube Download PDFInfo
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- CN212840144U CN212840144U CN202021780758.9U CN202021780758U CN212840144U CN 212840144 U CN212840144 U CN 212840144U CN 202021780758 U CN202021780758 U CN 202021780758U CN 212840144 U CN212840144 U CN 212840144U
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Abstract
The utility model discloses an inside insulation construction of draft tube relates to monocrystalline silicon production facility technical field, and the main objective provides the inside insulation construction of draft tube that can improve the heat preservation effect of draft tube. The utility model discloses a main technical scheme does: an internal insulation structure of a draft tube, comprising: the graphite paper layer comprises a first graphite paper layer and a second graphite paper layer, and the first graphite paper layer is attached to the side wall of the guide cylinder; the carbon felt layer comprises a first carbon felt layer group and a second carbon felt layer, one side of the first carbon felt layer group is attached to the first graphite paper layer, the second carbon felt layer is located at the bottom of the first carbon felt layer group, one side of the second carbon felt layer is attached to the first carbon felt layer group, the other side of the second carbon felt layer is attached to the second graphite paper layer, the first carbon felt layer group comprises a plurality of first carbon felt layer components, and two adjacent first carbon felt layer components are attached to each other. The utility model discloses mainly used water conservancy diversion.
Description
Technical Field
The utility model relates to a monocrystalline silicon production facility technical field especially relates to an inside insulation construction of draft tube.
Background
The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas environment and growing dislocation-free single crystals by using a Czochralski method, and a guide cylinder forms a part of a graphite thermal field and plays an important role in the growth process of the single crystal silicon.
The existing guide cylinder mainly adopts a mode that a soft carbon felt for heat preservation is arranged on the side part of the guide cylinder, the soft carbon felt is installed in a longitudinal gradient mode, the heat preservation effect is poor, heat dissipation of a thermal field is easily caused, and therefore the longitudinal temperature gradient in the thermal field cannot reach an expected difference value, adverse effects are brought to normal growth of a crystal bar, particularly, the lower edge of the guide cylinder is low in temperature due to the action of argon, oxidizing gas is easy to deposit, the oxidizing gas is attached to the lower edge of the guide cylinder, the temperature in the furnace is high, and blown-off oxides easily cause the breakage of the crystal bar, reverse cutting and unavailable length are caused, crystal pulling efficiency is influenced, the effective length of the crystal bar is reduced, and the utilization rate is reduced.
SUMMERY OF THE UTILITY MODEL
In view of this, the embodiment of the utility model provides an inside insulation construction of draft tube, the main objective provides the inside insulation construction of draft tube that can improve the heat preservation effect of draft tube.
In order to achieve the above object, the utility model mainly provides the following technical scheme:
the embodiment of the utility model provides an inside insulation construction of draft tube, include:
the graphite paper layer comprises a first graphite paper layer and a second graphite paper layer, and the first graphite paper layer is attached to the side wall of the guide cylinder;
carbon felt layer, carbon felt layer includes first carbon felt layer group and second carbon felt layer, one side of first carbon felt layer group is in first graphite paper layer, second carbon felt layer is located the bottom of first carbon felt layer group, one side of second carbon felt layer is in first carbon felt layer group, the opposite side is in second graphite paper layer, first carbon felt layer group includes a plurality of first carbon felt layer parts, adjacent two first carbon felt layer part is laminated each other.
Further, a plurality of the first carbon felt layer parts are sequentially arranged in a stepped structure.
Further, two adjacent first carbon felt layer parts are a first carbon felt layer first part and a first carbon felt layer second part respectively, the first carbon felt layer first part is close to the first graphite paper layer, and the height of the first carbon felt layer first part is higher than that of the first carbon felt layer second part.
Further, the middle part of the second carbon felt layer is provided with a first through hole.
Further, the second carbon felt layer has a first side attached to one end of each of the first carbon felt layer parts.
Furthermore, one side of the second graphite paper layer, which is far away from the second carbon felt layer, is a second side surface, and the second side surface is flush with the end surface of the bottom end of the guide cylinder.
Furthermore, the number of the third graphite paper layers is multiple, and each third graphite paper layer is arranged between two adjacent first carbon felt layer parts.
Further, the number of the first carbon felt layer parts is four.
Compared with the prior art, the utility model discloses following technological effect has:
in the technical scheme provided by the embodiment of the utility model, the graphite paper layer has the function of increasing the heat reflection inside the draft tube, and comprises a first graphite paper layer and a second graphite paper layer, wherein the first graphite paper layer is attached to the side wall of the draft tube; the carbon felt layer is used for improving the heat preservation effect in the guide cylinder, the carbon felt layer comprises a first carbon felt layer group and a second carbon felt layer, one side of the first carbon felt layer group is attached to the first graphite paper layer, the second carbon felt layer is positioned at the bottom of the first carbon felt layer group, one side of the second carbon felt layer is attached to the first carbon felt layer group, the other side of the second carbon felt layer is attached to the second graphite paper layer, the first carbon felt layer group comprises a plurality of first carbon felt layer components, two adjacent first carbon felt layer components are attached to each other, compared with the prior art, a soft carbon felt for heat preservation is arranged on the side portion of the guide cylinder, the soft carbon felt is installed in a longitudinal gradient mode, the heat preservation effect is poor, heat dissipation of a thermal field is easy to cause, therefore, the longitudinal temperature gradient in the thermal field cannot reach the difference value which should be achieved, adverse effects are brought to the normal growth of a crystal rod, particularly under the guide cylinder, due to the effect of argon gas, the temperature is low, the oxidizing gas is easy to deposit and is attached to the lower edge of the guide cylinder, the temperature in the furnace is high, the blown oxide is easy to break the single crystal rod, the back cut and the unavailable length are caused, the crystal pulling efficiency is influenced, the effective length of the crystal rod is reduced, and the utilization rate is reduced. The second graphite paper layer is added at the bottom of the first carbon felt layer group, so that the heat reflection in the guide cylinder can be effectively increased, the stability of the temperature of a crystal growth interface is ensured, the uniformity of the internal quality of the crystal rod is improved, in addition, the second carbon felt layer is additionally arranged at the bottom of the first carbon felt layer group, so that the heat preservation effect of the bottom of the guide shell can be improved, the longitudinal temperature gradient is increased, the heat loss of a thermal field can be effectively reduced, the normal growth of a crystal bar is guaranteed while the energy is saved, and the adverse effect of single crystal impurity edge breakage caused by insulation falling can be avoided.
Drawings
Fig. 1 is a schematic structural view of an internal thermal insulation structure of a draft tube provided in an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
As shown in fig. 1, the embodiment of the utility model provides an inside insulation construction of draft tube, include:
the graphite paper layer comprises a first graphite paper layer 11 and a second graphite paper layer 12, and the first graphite paper layer 11 is attached to the side wall of the guide cylinder 9;
the carbon felt layer, the carbon felt layer includes first carbon felt layer group 21 and second carbon felt layer 22, and attached in first graphite paper layer 11 in one side of first carbon felt layer group 21, and second carbon felt layer 22 is located the bottom of first carbon felt layer group 21, and attached in first carbon felt layer group 21 in one side of second carbon felt layer 22, and attached in second graphite paper layer 12 in the opposite side, and first carbon felt layer group 21 includes a plurality of first carbon felt layer parts, and two adjacent first carbon felt layer parts are laminated each other.
In the technical scheme provided by the embodiment of the utility model, the graphite paper layer has the function of increasing the heat reflection inside the draft tube 9, the graphite paper layer comprises a first graphite paper layer 11 and a second graphite paper layer 12, and the first graphite paper layer 11 is attached to the side wall of the draft tube 9; the carbon felt layer has the function of improving the heat preservation effect in the draft tube 9, the carbon felt layer comprises a first carbon felt layer group 21 and a second carbon felt layer 22, one side of the first carbon felt layer group 21 is attached to the first graphite paper layer 11, the second carbon felt layer 22 is positioned at the bottom of the first carbon felt layer group 21, one side of the second carbon felt layer 22 is attached to the first carbon felt layer group 21, the other side of the second carbon felt layer is attached to the second graphite paper layer 12, the first carbon felt layer group 21 comprises a plurality of first carbon felt layer parts, two adjacent first carbon felt layer parts are attached to each other, compared with the prior art, a soft carbon felt for heat preservation is arranged on the side portion of the draft tube 9, the soft carbon felt is installed in a longitudinal gradient mode, the heat preservation effect is poor, heat of a thermal field is easy to dissipate, the longitudinal temperature gradient in the thermal field cannot reach the difference value, adverse effect is brought to the normal growth of a crystal rod, particularly, under the draft tube 9, due to the effect of argon gas, the temperature is low, oxidizing gas is easy to deposit and is attached to the lower edge of the guide shell 9, the temperature in the furnace is high, the blown oxide is easy to break the single crystal rod, reverse cutting and unavailable length are caused, the crystal pulling efficiency is influenced, the effective length of the crystal rod is reduced, and the utilization rate is reduced, in the technical scheme, the uniformity of the internal quality of the crystal rod is improved by adding the first graphite paper layer 11 on the side wall of the guide shell 9 and adding the second graphite paper layer 12 at the bottom of the first carbon felt layer group 21, the heat reflection in the guide shell 9 can be effectively increased, the stability of the temperature of a crystal growth interface is ensured, in addition, the second carbon felt layer 22 is added at the bottom of the first carbon felt layer group 21, the heat preservation effect at the bottom of the guide shell 9 can be improved, the longitudinal temperature gradient is increased, the heat loss of a thermal field can be effectively reduced, the normal growth of the crystal rod is ensured while energy is saved, the adverse effect of the edge breakage of the single crystal impurities caused by insulation falling can be avoided.
The graphite paper layer is used for increasing heat reflection inside the guide shell 9, is mainly made of graphite paper materials, is mainly formed by chemically treating high-carbon flake graphite and performing high-temperature expansion rolling, and is a base material for manufacturing various graphite sealing elements, and comprises a first graphite paper layer 11 and a second graphite paper layer 12, wherein the first graphite paper layer 11 is attached to the side wall of the guide shell 9, and the second graphite paper layer 12 is attached to a second carbon felt layer 22; the carbon felt layer has the function of improving the heat preservation effect in the draft tube 9, the carbon felt layer comprises a first carbon felt layer group 21 and a second carbon felt layer 22, one side of the first carbon felt layer group 21 is attached to the first graphite paper layer 11, the second carbon felt layer 22 is positioned at the bottom of the first carbon felt layer group 21, one side of the second carbon felt layer 22 is attached to the first carbon felt layer group 21, the other side of the second carbon felt layer group is attached to the second graphite paper layer 12, the first carbon felt layer group 21 comprises a plurality of first carbon felt layer parts, the number of the first carbon felt layer parts is four, two adjacent first carbon felt layer parts are attached to each other, the second graphite paper layer 12 and the second carbon felt layer 22 are matched with each other, so that the bottom of the draft tube 9 is preserved, the plurality of first carbon felt layer parts of the first carbon felt layer group 21 are attached to each other, the plurality of first carbon felt layer parts are sequentially arranged in a ladder structure, and optionally, two adjacent first carbon felt layer parts are respectively a first carbon layer first part 211 and a first carbon layer second carbon layer part 212, the first carbon felt layer first part 211 is close to the first graphite paper layer 11, wherein the height of the first carbon felt layer first part 211 is higher than the height of the first carbon felt layer second part 212, so that the first carbon felt layer group 21 can preserve heat of the side wall of the draft tube 9, and simultaneously, the second graphite paper layer 12 and the second carbon felt layer 22 can support the bottom of the first carbon felt layer group 21, thereby achieving the technical effect of supporting the first carbon felt layer group 21, in the technical scheme, the first graphite paper layer 11 is added on the side wall of the draft tube 9, the second graphite paper layer 12 is added at the bottom of the first carbon felt layer group 21, thereby effectively increasing the heat reflection inside the draft tube 9, ensuring the stability of the crystal growth interface temperature, thereby improving the uniformity of the internal quality of the crystal rod, and the second carbon felt layer 22 is added at the bottom of the first carbon felt layer group 21, which not only can improve the heat preservation effect at the bottom of the draft tube 9, the longitudinal temperature gradient is increased, the heat loss of a thermal field can be effectively reduced, the normal growth of a crystal bar is ensured while energy is saved, and the adverse effect of single crystal impurity edge breakage caused by insulation falling can be avoided.
Further, the second carbon felt layer 22 has a first through hole in the middle. In this embodiment, a second carbon felt layer 22 is further defined, and a first through hole is formed in the middle of the second carbon felt layer 22, and the first through hole is used for communicating with the guide cylinder 9, so that the guide cylinder 9 can conduct flow.
Further, the second carbon felt layer 22 has a first side 221, and the first side 221 is attached to one end of each first carbon felt layer part. In this embodiment, the carbon felt layers are further defined, and since a certain inclination angle is formed between each first carbon felt layer part and the second carbon felt layer 22, so that the second carbon felt layer 22 is spaced from each first carbon felt layer part, an end face of each first carbon felt layer part is cut, so that an end face of each first carbon felt layer part can be completely attached to the first side face 221 of the second carbon felt layer 22, thereby improving the connectivity between the second carbon felt layer 22 and each first carbon felt layer part.
Further, one side of the second graphite paper layer 12, which is far away from the second carbon felt layer 22, is a second side surface, and the second side surface is flush with the bottom end surface of the guide cylinder 9. In this embodiment, further limited second graphite paper layer 12, the second side of second graphite paper layer 12 and the terminal surface parallel and level of draft tube 9 bottom, that is to say, the lateral surface of second graphite paper layer 12 and the bottom terminal surface of draft tube 9 are located the coplanar for the side of draft tube 9 can be covered by graphite paper layer and carbon felt layer completely, thereby increased the inside heat reflection of draft tube 9, guaranteed the stability of crystal growth interface temperature, thereby improved the homogeneity of crystal bar internal quality.
Furthermore, the number of the third graphite paper layers is multiple, and each third graphite paper layer is arranged between two adjacent first carbon felt layer parts. In this embodiment, increased the third graphite paper layer, the third graphite paper layer is a plurality of, and every third graphite paper layer sets up between two adjacent first carbon felt layer parts, can reach better thermal insulation performance.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (8)
1. The utility model provides an inside insulation construction of draft tube which characterized in that includes:
the graphite paper layer comprises a first graphite paper layer and a second graphite paper layer, and the first graphite paper layer is attached to the side wall of the guide cylinder;
carbon felt layer, carbon felt layer includes first carbon felt layer group and second carbon felt layer, one side of first carbon felt layer group is in first graphite paper layer, second carbon felt layer is located the bottom of first carbon felt layer group, one side of second carbon felt layer is in first carbon felt layer group, the opposite side is in second graphite paper layer, first carbon felt layer group includes a plurality of first carbon felt layer parts, adjacent two first carbon felt layer part is laminated each other.
2. The internal thermal insulation structure of guide shell according to claim 1,
the first carbon felt layer parts are sequentially arranged in a stepped structure.
3. The internal thermal insulation structure of guide shell according to claim 1,
two adjacent first carbon felt layer parts are respectively a first carbon felt layer first part and a first carbon felt layer second part, the first carbon felt layer first part is close to the first graphite paper layer, wherein the height of the first carbon felt layer first part is higher than that of the first carbon felt layer second part.
4. The internal thermal insulation structure of guide shell according to claim 1,
the middle part of the second carbon felt layer is provided with a first through hole.
5. The internal thermal insulation structure of guide shell according to claim 4,
the second carbon felt layer has a first side attached to one end of each of the first carbon felt layer parts.
6. The internal thermal insulation structure of guide shell according to claim 1,
and one side of the second graphite paper layer, which is far away from the second carbon felt layer, is a second side surface, and the second side surface is flush with the end surface of the bottom end of the guide cylinder.
7. The internal insulation structure of a draft tube according to claim 1, further comprising:
and the third graphite paper layers are multiple, and each third graphite paper layer is arranged between two adjacent first carbon felt layer parts.
8. The inner thermal insulation structure of guide shell according to any one of claims 1 to 7,
the number of the first carbon felt layer parts is four.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021780758.9U CN212840144U (en) | 2020-08-24 | 2020-08-24 | Heat insulation structure in draft tube |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021780758.9U CN212840144U (en) | 2020-08-24 | 2020-08-24 | Heat insulation structure in draft tube |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115323479A (en) * | 2022-08-16 | 2022-11-11 | 晶澳太阳能有限公司 | Guide cylinder and preparation method thereof |
| CN116219532A (en) * | 2023-05-08 | 2023-06-06 | 苏州晨晖智能设备有限公司 | Guide cylinder for single crystal furnace, preparation method and single crystal furnace |
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2020
- 2020-08-24 CN CN202021780758.9U patent/CN212840144U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115323479A (en) * | 2022-08-16 | 2022-11-11 | 晶澳太阳能有限公司 | Guide cylinder and preparation method thereof |
| CN116219532A (en) * | 2023-05-08 | 2023-06-06 | 苏州晨晖智能设备有限公司 | Guide cylinder for single crystal furnace, preparation method and single crystal furnace |
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