CN220931712U - Heating furnace - Google Patents

Abstract

The utility model discloses a heating furnace, which comprises: the furnace body is provided with an inner cavity; the heat preservation layer is arranged in the inner cavity of the furnace body and is surrounded by a containing space; the process pipe is arranged in the accommodating space; the supporting mechanism penetrates through the furnace body and the heat insulation layer and supports the process pipe so that the process pipe is spaced from the heat insulation layer, and at least part of the supporting mechanism is positioned outside the furnace body. In the heating furnace, the process pipe is supported by the supporting mechanism, so that the process pipe is separated from the heat insulation layer, and the heat insulation layer is prevented from being crushed by the process pipe.

Description

Heating furnace

Technical Field

The utility model relates to the technical field of coating equipment, in particular to a heating furnace.

Background

At present, china has a relatively perfect photovoltaic industry chain, in the photovoltaic industry chain, a photovoltaic cell panel is an important part of the photovoltaic industry chain, and the production quality of the photovoltaic cell panel is always focused on by various manufacturers. In the manufacturing process of the photovoltaic cell panel, the process of diffusion, annealing, coating and the like of the silicon wafer is included, and a heating furnace cannot be omitted in the processes.

In the related art, some supporting modes of the process tube inside the heating furnace are as follows: the supporting blocks are arranged on the heat preservation in the furnace body, the supporting blocks are utilized to support the process pipe, the hardness of the heat preservation is low, the supporting effect is not ideal, and the gravity of the process pipe can act on the heat preservation, so that the heat preservation is easy to damage.

Disclosure of utility model

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides the heating furnace which can reduce the risk of damaging the heat insulation layer.

A heating furnace according to some embodiments of the present utility model includes: the furnace body is provided with an inner cavity; the heat preservation layer is arranged in the inner cavity of the furnace body and is surrounded by a containing space; the process pipe is arranged in the accommodating space; the supporting mechanism penetrates through the furnace body and the heat preservation layer and supports the process pipe so that the process pipe is spaced from the heat preservation layer, and at least part of the supporting mechanism is located outside the furnace body.

The heating furnace provided by the embodiment of the utility model has at least the following beneficial effects:

In the heating furnace, the process pipe is supported by the supporting mechanism, so that the process pipe is separated from the heat insulation layer, and the heat insulation layer is prevented from being crushed by the process pipe.

According to some embodiments of the utility model, the support mechanism comprises at least two support assemblies, at least two support assemblies are arranged at intervals along the circumferential direction of the process pipe, at least two support assemblies are all located below the process pipe, each support assembly penetrates through the furnace body and the heat insulation layer and supports the process pipe, and at least part of each support assembly is located outside the furnace body.

According to some embodiments of the utility model, each of the support assemblies comprises a plurality of rigid supports spaced apart along an axial direction of the process tube, each of the rigid supports passing through the furnace body and the insulation and supporting the process tube, and at least a portion of each of the rigid supports being located outside of the furnace body.

According to some embodiments of the utility model, each of the support assemblies further comprises a support plate extending in an axial direction of the process tube;

in each of the support assemblies: and one ends of all the hard supporting pieces extending into the accommodating space jointly support the supporting plate, and the supporting plate supports the process pipe.

According to some embodiments of the utility model, in each of the support assemblies: the bottom of backup pad is equipped with the spout, every rigid support piece's top all is equipped with wears to locate sliding part in the spout.

According to some embodiments of the utility model, the upper side of the support plate is provided with a guide groove, the extending direction of the guide groove is parallel to the axial direction of the process tube, and the outer side wall of the process tube is provided with a guide block in sliding fit with the guide groove.

According to some embodiments of the utility model, one end of the guide groove penetrates through the front end face of the supporting plate, and the other end of the guide groove is provided with a positioning wall matched with the guide block in a positioning way.

According to some embodiments of the utility model, the side wall of the furnace body is provided with a plurality of first through holes, and the side wall of the heat insulation layer is provided with a plurality of second through holes which are arranged opposite to the first through holes one by one;

Each hard support piece passes through the furnace body and the heat preservation layer through the first through hole and the second through hole.

According to some embodiments of the utility model, each of the rigid supports is further sleeved with a sealing ring for sealing a gap between the rigid support and the first through hole.

According to some embodiments of the utility model, the rigid support is screwed with the first through hole corresponding thereto.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The utility model is further described with reference to the accompanying drawings and examples, in which:

FIG. 1 is a schematic view showing a structure of a heating furnace according to an embodiment of the present utility model;

FIG. 2 is a schematic cross-sectional view of a heating furnace according to an embodiment of the present utility model;

FIG. 3 is an enlarged view of FIG. 2 at A;

FIG. 4 is an enlarged view at B in FIG. 2;

fig. 5 is a schematic view showing the structure of a process tube and a support plate according to an embodiment of the present utility model.

Reference numerals:

100. A furnace body; 110. A first through hole; 120. A positioning groove;

200. A heat preservation layer; 210. An accommodating space; 220. A second through hole;

300. A process tube; 310. A guide block;

400. A support mechanism; 410. a support assembly; 411. a rigid support; 4111. a sliding part; 412. a support plate; 4121. a chute; 4122. a guide groove; 413. and (3) sealing rings.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and to simplify the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model. Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

As shown in fig. 1, a heating furnace according to an embodiment of the present utility model includes a furnace body 100, an insulating layer 200, a process tube 300, and a supporting mechanism 400.

Referring to fig. 1 and 2, the furnace body 100 is provided with an inner cavity.

Specifically, the furnace body 100 is a hollow structure provided with an inner cavity, and the cross section of the inner cavity of the furnace body 100 is circular.

The heat insulating layer 200 is disposed in the inner cavity of the furnace body 100, and encloses a receiving space 210.

Specifically, the heat-insulating layer 200 is a cylindrical structure, the heat-insulating layer 200 is attached to the inner wall of the furnace body 100 and is coaxially arranged with the furnace body 100, and the inner space of the heat-insulating layer 200 is the accommodating space 210.

Wherein, the heat preservation layer 200 is made of heat preservation material, for example, the material of the heat preservation layer 200 is heat preservation cotton or other heat preservation materials; the heat preservation layer 200 can play a role in heat preservation, and reduces the risk of heat dissipation in the accommodating space 210.

In some embodiments, the insulation 200 presses against the inner wall of the furnace body 100 by virtue of its own elasticity, thereby achieving positioning of the insulation 200 with the furnace body 100. Of course, in other embodiments, the insulating layer 200 and the furnace body 100 may be fixed together by other members.

The process tube 300 is disposed in the accommodating space 210 and spaced apart from the heat insulation layer 200.

Specifically, the process tube 300 is disposed in the receiving space 210 and coaxially with the insulation layer 200, and the process tube 300 is supported by the support mechanism 400 to be spaced apart from the insulation layer 200. Wherein the process tube 300 is a quartz tube, and a silicon wafer can be placed inside the process tube 300 to realize coating.

Wherein the support mechanism 400 passes through the furnace body 100 and the insulation layer 200 and supports the process tube 300, and at least part of the support mechanism 400 is located outside the furnace body 100.

It will be appreciated that the support mechanism 400 sequentially passes through the furnace body 100 and the insulation layer 200 from the outside of the furnace body 100 and supports the process tube 300 such that the process tube 300 is spaced apart from the insulation layer 200, and that a portion of the support mechanism 400 is located outside the furnace body 100 such that the support mechanism 400 can be supported on the ground or on a member located outside the heating furnace.

It should be noted that the support mechanism 400 is used to support the process tube 300, and other support members are needed to support the furnace body 100.

In the heating furnace of the utility model, the process pipe 300 is supported by the supporting mechanism 400, so that the process pipe 300 is spaced from the heat insulation layer 200, and the heat insulation layer 200 can be prevented from being crushed by the process pipe 300.

As shown in fig. 1 and 2, in some embodiments, the support mechanism 400 includes at least two support assemblies 410, the at least two support assemblies 410 are disposed at intervals along the circumference of the process tube 300, and the at least two support assemblies 410 are located below the process tube 300, each support assembly 410 passes through the furnace body 100 and the insulation layer 200 and supports the process tube 300, and at least part of each support assembly 410 is located outside the furnace body 100.

It will be appreciated that at least two support assemblies 410 are spaced apart along the circumference of the process tube 300 and both support the process tube 300, which may improve the stability with which the process tube 300 is supported, and that a portion of each support assembly 410 is located outside the furnace body 100, which may allow each support assembly 410 to be supported on the ground or a member outside the furnace.

Specifically, in the present embodiment, the number of the support assemblies 410 is two, and the two support assemblies 410 are spaced apart along the circumference of the process tube 300 and are located below the process tube 300, and the two support assemblies 410 support the process tube 300 together.

Of course, in other embodiments, the number of support assemblies 410 may be three or more.

Referring to fig. 1 and 2, further, each support assembly 410 includes a plurality of hard supports 411 disposed at intervals along an axial direction of the process tube 300, each hard support 411 passes through the furnace body 100 and the insulation 200 and supports the process tube 300, and at least a portion of each hard support 411 is located outside the furnace body 100.

It will be appreciated that the process tube 300 may be stably supported by all of the hard supports 411 of the plurality of support assemblies 410, reducing the risk of tilting the process tube 300, and that a portion of each hard support 411 is located outside the furnace body 100, such that each hard support 411 may be supported on the ground or a member outside the furnace.

It should be noted that, the hard support 411 may be made of a quartz material, and the process tube 300 is supported by the hard support 411, so that the support effect is better and the position of the process tube 300 is more stable than the process tube 300 is supported by the soft insulation layer 200.

Of course, in other embodiments, the hard support 411 may be made of other materials and hard materials.

Further, the sidewall of the furnace body 100 is provided with a plurality of first through holes 110, and the sidewall of the heat insulation layer 200 is provided with a plurality of second through holes 220 which are arranged opposite to the first through holes 110 one by one; each hard support 411 passes through the furnace body 100 and the insulation layer 200 through the first through hole 110 and the second through hole 220.

Specifically, the lower sidewall of the furnace body 100 is provided with a plurality of groups of first through holes 110, the plurality of groups of first through holes 110 are arranged at intervals along the circumferential direction of the furnace body 100, and each group of first through holes 110 comprises a plurality of first through holes 110 arranged at intervals along the axial direction of the furnace body 100; the number of the second through holes 220 is the same as that of the first through holes 110, and all the second through holes 220 are oppositely arranged in a one-to-one correspondence with all the first through holes 110; each hard support 411 passes through the furnace body 100 and the insulation layer 200 through one first through hole 110 and a second through hole 220 opposite to the first through hole 110.

As shown in fig. 2 and 4, in some embodiments, each hard support 411 is further sleeved with a sealing ring 413 for sealing a gap between the hard support and the first through hole 110. Therefore, the risk of outward heat dissipation in the heating furnace can be reduced, and the internal temperature of the heating furnace is ensured.

Specifically, the outer sidewall of the furnace body 100 is provided with a positioning groove 120 at the outer end of each first through hole 110, and a sealing ring 413 is disposed in the positioning groove 120 to seal the outer end of the first through hole 110.

The sealing ring 413 may be made of a high temperature resistant material.

In some embodiments, the hard support 411 is threaded with its corresponding first through hole 110.

It can be understood that the first through hole 110 is a threaded hole, an external thread is provided on an outer side wall of the hard support 411, the hard support 411 is disposed in the first through hole 110 in a penetrating manner, and the external thread of the hard support 411 is connected with the internal thread of the first through hole 110. In this way, on the one hand, the fixing of the hard support 411 and the furnace body 100 can be realized, and on the other hand, by rotating the hard support 411, the length of the hard support 411 extending into the accommodating space 210 can be adjusted, so that fine adjustment can be performed on the hard support 411, the process tube 300 can be stably supported, and the risk of tilting the process tube 300 can be reduced.

As shown in fig. 2 and 3, in some embodiments, each support assembly 410 further includes a support plate 412, the support plates 412 extending in the axial direction of the process tube 300; in each support assembly 410, all the hard support members 411 are supported by a support plate 412 at one end thereof extending into the receiving space 210, and the support plate 412 supports the process tube 300.

It will be appreciated that the process tube 300 is supported on the support plate 412, and the force for supporting the process tube 300 is provided by the plurality of rigid supports 411, and the process tube 300 is supported by the support plate 412, so that the stress of the process tube 300 is more uniform, and the risk of damage to the process tube 300 due to excessive local stress can be reduced.

Further, in each support assembly 410, a sliding groove 4121 is provided at the bottom of the support plate 412, and a sliding portion 4111 penetrating the sliding groove 4121 is provided at the top of each hard support 411. Wherein the extending direction of the sliding groove 4121 is parallel to the axial direction of the process tube 300.

It can be appreciated that, during the assembly process of the heating furnace, the heat insulation layer 200 can be assembled in the inner cavity of the furnace body 100; then, a plurality of hard supporting pieces 411 penetrate through the furnace body 100 and the heat preservation layer 200 to complete the assembly of all the hard supporting pieces 411; then, the sliding groove 4121 on the supporting plate 412 corresponds to the sliding portion 4111 of the foremost hard supporting piece 411, and the supporting plate 412 is pushed backward, so that the supporting plate 412 is supported by the plurality of hard supporting pieces 411. After the support plate 412 is installed in place, the support plate 412 and the at least one hard support 411 may be fixed together by welding or clamping, so as to prevent the support plate 412 from moving randomly.

Wherein, by providing the sliding groove 4121 at the bottom of the supporting plate 412, the efficiency of assembling the supporting plate 412 with the plurality of hard supporting pieces 411 can be improved.

As shown in fig. 3 and 5, further, a guide groove 4122 is provided on the upper side of the support plate 412, the extending direction of the guide groove 4122 is parallel to the axial direction of the process tube 300, and the outer side wall of the process tube 300 is provided with a guide block 310 slidably fitted in the guide groove 4122.

It will be appreciated that during placement of the process tube 300 on the support plate 412, the guide blocks 310 on the process tube 300 may be extended into the guide slots 4122, and then the process tube 300 may be pushed backward, thereby allowing the process tube 300 to be installed in place and convenient to operate.

Wherein, the guide groove 4122 can play a guiding role on the process tube 300, and the side wall of the guide groove 4122 can also limit the rotation of the process tube 300, thereby improving the stability.

Further, one end of the guide groove 4122 penetrates the front end surface of the support plate 412, and the other end of the guide groove 4122 has a positioning wall that is in positioning engagement with the guide block 310.

It will be appreciated that when the guide block 310 on the process tube 300 slides along the guide slot 4122 until the guide block 310 abuts against the positioning wall, it is possible to indicate that the process tube 300 is in place, and the operation is simple.

In the heating furnace of the utility model, the process pipe 300 is supported by the supporting mechanism 400, so that the process pipe 300 is spaced from the heat insulation layer 200, and the heat insulation layer 200 can be prevented from being crushed by the process pipe 300. In addition, the process tube 300 is supported by the hard support 411, so that the process tube 300 is more stable in position compared with the process tube 300 supported by the soft heat insulation layer 200.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A heating furnace, characterized by comprising:

the furnace body is provided with an inner cavity;

The heat preservation layer is arranged in the inner cavity of the furnace body and is surrounded by a containing space;

the process pipe is arranged in the accommodating space;

The supporting mechanism penetrates through the furnace body and the heat preservation layer and supports the process pipe so that the process pipe is spaced from the heat preservation layer, and at least part of the supporting mechanism is located outside the furnace body.

2. The furnace of claim 1 wherein the support mechanism comprises at least two support assemblies, at least two of the support assemblies being spaced circumferentially about the process tube, and at least two of the support assemblies being located below the process tube, each of the support assemblies passing through the furnace body and the insulating layer and supporting the process tube, and at least a portion of each of the support assemblies being located outside of the furnace body.

3. The furnace of claim 2, wherein each support assembly comprises a plurality of rigid supports disposed at intervals along an axial direction of the process tube, each rigid support passing through the furnace body and the insulation and supporting the process tube, and at least a portion of each rigid support being located outside of the furnace body.

4. A furnace according to claim 3, wherein each support assembly further comprises a support plate extending in an axial direction of the process tube;

in each of the support assemblies: and one ends of all the hard supporting pieces extending into the accommodating space jointly support the supporting plate, and the supporting plate supports the process pipe.

5. The furnace of claim 4, wherein in each of the support assemblies: the bottom of backup pad is equipped with the spout, every rigid support piece's top all is equipped with wears to locate sliding part in the spout.

6. The furnace of claim 4, wherein the upper side of the support plate is provided with a guide groove, the extending direction of the guide groove is parallel to the axial direction of the process tube, and the outer side wall of the process tube is provided with a guide block in sliding fit with the guide groove.

7. The heating furnace according to claim 6, wherein one end of the guide groove penetrates through the front end face of the support plate, and the other end of the guide groove is provided with a positioning wall in positioning fit with the guide block.

8. A heating furnace according to claim 3, wherein the side wall of the furnace body is provided with a plurality of first through holes, and the side wall of the heat insulating layer is provided with a plurality of second through holes which are arranged in one-to-one opposite relation to the plurality of first through holes;

Each hard support piece passes through the furnace body and the heat preservation layer through the first through hole and the second through hole.

9. The furnace of claim 8, wherein each of the rigid supports is further sleeved with a seal ring for sealing a gap between the rigid support and the first through hole.

10. The furnace of claim 8, wherein the rigid support is threadably coupled to the corresponding first through hole.