CN115639275A - Ultrasonic inspection apparatus and inspection apparatus - Google Patents

Ultrasonic inspection apparatus and inspection apparatus Download PDF

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Publication number
CN115639275A
CN115639275A CN202210831826.7A CN202210831826A CN115639275A CN 115639275 A CN115639275 A CN 115639275A CN 202210831826 A CN202210831826 A CN 202210831826A CN 115639275 A CN115639275 A CN 115639275A
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CN
China
Prior art keywords
unit
inspection
subject
inspection unit
ultrasonic
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Pending
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CN202210831826.7A
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Chinese (zh)
Inventor
吉田枫佳
奈良晃宽
小山孝生
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Yamaha Fine Technologies Co Ltd
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Yamaha Fine Technologies Co Ltd
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Priority claimed from JP2021165471A external-priority patent/JP2023015965A/en
Application filed by Yamaha Fine Technologies Co Ltd filed Critical Yamaha Fine Technologies Co Ltd
Publication of CN115639275A publication Critical patent/CN115639275A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/225—Supports, positioning or alignment in moving situation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/18—Investigating the presence of flaws defects or foreign matter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N24/00—Investigating or analyzing materials by the use of nuclear magnetic resonance, electron paramagnetic resonance or other spin effects
    • G01N24/08—Investigating or analyzing materials by the use of nuclear magnetic resonance, electron paramagnetic resonance or other spin effects by using nuclear magnetic resonance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/069—Defect imaging, localisation and sizing using, e.g. time of flight diffraction [TOFD], synthetic aperture focusing technique [SAFT], Amplituden-Laufzeit-Ortskurven [ALOK] technique
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
    • G01N29/275—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving both the sensor and the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/32—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/0289—Internal structure, e.g. defects, grain size, texture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/102—Number of transducers one emitter, one receiver

Abstract

In an ultrasonic inspection apparatus and an inspection apparatus, a positional change of a transport body with respect to an inspection unit can be suppressed regardless of a transport mode of the transport body. An ultrasonic inspection device (1) is provided with: a base (2); an inspection unit (3) having a transmission unit (11) that transmits ultrasonic waves and a reception unit (12) that is located at a position spaced apart from the transmission unit (11) and that receives ultrasonic waves; and a movable unit (5) which is provided between the base (2) and the inspection unit (3) and which is capable of moving the inspection unit (3) relative to the base (2) in the direction in which the transmission unit (11) and the reception unit (12) are arranged. The inspection unit (3) further comprises a contact section (15) which is brought into contact with the conveyance body (100) passing between the transmission section (11) and the reception section (12) and which applies a force in the alignment direction to the inspection unit (3).

Description

Ultrasonic inspection apparatus and inspection apparatus
Technical Field
The present invention relates to an ultrasonic inspection apparatus and an inspection apparatus.
Background
Conventionally, there are ultrasonic inspection apparatuses: the ultrasonic diagnostic apparatus includes a transmission unit that transmits an ultrasonic wave to a subject and a reception unit that receives the ultrasonic wave transmitted through the subject, and detects a defect in the subject by analyzing a reception state of the ultrasonic wave with respect to the reception unit (see, for example, patent document 1). The present invention is not limited to the ultrasonic inspection apparatus, and may be applied to an inspection apparatus that passes an object through an inspection unit (e.g., an image sensor, an X-ray sensor, etc.) and inspects the external appearance and internal state of the object by the inspection unit.
Documents of the prior art
Patent document
Patent document 1: japanese patent application laid-open No. 2020-027011
Disclosure of Invention
Technical problems to be solved by the invention
In such an ultrasonic inspection apparatus, a defect inside the subject may be detected while the subject is conveyed between the transmission unit and the reception unit in a direction intersecting the direction in which the transmission unit and the reception unit are arranged (the arrangement direction). Further, according to the method of transporting the subject, the trajectory of the transport of the subject passing between the transmitting unit and the receiving unit is not linear but curved, or is not orthogonal to the direction of arrangement of the transmitting unit and the receiving unit but inclined. Therefore, when the subject passes between the transmission unit and the reception unit, the position of the subject in the arrangement direction of the transmission unit and the reception unit changes.
In order to allow the change in the position of the subject in the arrangement direction, it is conceivable to enlarge the interval between the transmission unit and the reception unit, for example. However, if the distance between the transmission unit and the reception unit is increased, a diffracted wave is likely to be generated in which the ultrasonic wave transmitted from the transmission unit reaches the reception unit while bypassing the outside of the edge of the subject. If the receiving unit receives a diffracted wave that does not pass through the subject, the inside of the subject may not be detected accurately, and therefore, generation of the diffracted wave is not desired.
In an inspection apparatus that inspects the external appearance and internal state of a subject by an inspection unit by passing the subject through the inspection unit, not only an ultrasonic inspection apparatus, but also an inspection apparatus that is not preferable because if the position of the subject relative to the inspection unit changes, the subject may not be accurately inspected.
The present invention has been made in view of the above circumstances, and an object thereof is to provide an ultrasonic inspection apparatus and an inspection apparatus capable of suppressing a positional change of an object to be inspected (a transport body) with respect to an inspection unit regardless of a transport mode of the object to be inspected (the transport body).
Means for solving the problems
A first aspect of the present invention is an ultrasonic inspection apparatus including: a base; an inspection unit having a transmission unit that transmits ultrasonic waves and a reception unit that is located at a position spaced apart from the transmission unit and receives the ultrasonic waves; and a movable unit provided between the base and the inspection unit, the movable unit being capable of moving the inspection unit relative to the base in an arrangement direction of the transmission unit and the reception unit, the inspection unit further including a contact portion that comes into contact with the conveyance body between the transmission unit and the reception unit to apply a force to the inspection unit in the arrangement direction.
A second aspect of the present invention is an inspection apparatus having an inspection unit through which an object is passed to inspect at least one of an external appearance and an internal state of the object, the inspection apparatus including a following mechanism for causing the inspection unit to follow a movement trajectory of the object.
Effects of the invention
According to the present invention, it is possible to suppress a change in position of the subject (the transport body) with respect to the examination unit (the examination unit) regardless of the transport mode of the subject (the transport body).
Drawings
Fig. 1 is a front view schematically showing an ultrasonic inspection apparatus according to a first embodiment.
Fig. 2 is a sectional view showing an inspection unit of the ultrasonic inspection apparatus of fig. 1.
Fig. 3 is a perspective view schematically showing a main part of an inspection unit of the ultrasonic inspection apparatus of fig. 1.
Fig. 4 is a sectional view showing an inspection unit and a movable unit of the ultrasonic inspection apparatus of fig. 1.
Fig. 5 is a diagram showing the transport trajectory of the subject passing between the transmission unit and the reception unit and the movement of the inspection unit according to the transport of the subject.
Fig. 6 is a front view schematically showing an ultrasonic inspection apparatus according to a second embodiment.
Fig. 7 is a front view schematically showing an ultrasonic inspection apparatus according to a third embodiment.
Fig. 8 is a front view schematically showing an ultrasonic inspection apparatus according to a fourth embodiment.
Fig. 9 is a front view schematically showing a first modification of the fourth embodiment.
Fig. 10 is a front view schematically showing a second modification of the fourth embodiment.
Fig. 11 is a cross-sectional view schematically showing a modification of the inspection unit of the ultrasonic inspection apparatus according to the first to fourth embodiments.
Fig. 12 is a front view schematically showing an ultrasonic inspection apparatus according to a fifth embodiment.
Fig. 13 is a view of the ultrasonic inspection apparatus and the rotary transport apparatus for transporting a subject in fig. 12, as viewed from above.
Fig. 14 is a diagram showing a first example of a movement trajectory of the subject of the ultrasonic inspection apparatus shown in fig. 12 and 13, as viewed from the side.
Fig. 15 is a diagram showing a second example of the movement trajectory of the subject of the ultrasonic inspection apparatus shown in fig. 12 and 13, as viewed from the side.
Fig. 16 is a side view schematically showing a case where the ultrasonic inspection apparatus according to the fifth embodiment is applied to a conveyor of a conveyor type.
Fig. 17 is a front view as viewed from the direction XVII of fig. 16.
Fig. 18 is a perspective view schematically showing a case where the ultrasonic inspection apparatus of the fifth embodiment is applied to a pillow packaging machine.
Fig. 19 is a cross-sectional view schematically showing a subject manufactured by the pillow packaging machine of fig. 18 and an ultrasonic inspection apparatus according to a fifth embodiment for inspecting the subject.
Description of the reference numerals
1. 1D, 1E, 1F, 1G, 1H, 1J \8230, an ultrasonic inspection device 2 \8230, a base 3 \8230, an inspection unit (inspection section) 5 \8230, a movable unit 6D, 6E \8230, a return section 7F, 7G \8230, a holding section 9J \8230, a following mechanism 11 \8230, a transmitting section 12 \8230, a receiving section 15 \8230, a contact section 21, 22 \8230, a guide section 25, 26 \8230, a limiting section 91J \8230, a driving section 92J \8230, a position detection sensor 100 \8230, a subject (conveying body), 103 \8230, an edge section (inspection target section), 107 \828230, a joint section (inspection target section), RP 301 \8230, a reference position, W \8230position, and W \823030
Detailed Description
[ first embodiment ]
A first embodiment of the present invention will be described below with reference to fig. 1 to 5.
As shown in fig. 1 and 2, the ultrasonic inspection apparatus 1 of the present embodiment inspects a defect of an object 100 (a carrier) using ultrasonic waves W. The subject 100 of the present embodiment is an object in which two members 101 are joined to each other, and is configured as a packaging container or the like, for example. The defect of the object 100 is, for example, a peeled portion of the two members 101 joined.
As shown in fig. 1, the ultrasonic inspection apparatus 1 includes a base 2, an inspection unit 3, and a movable unit 5.
The inspection unit 3 functions as an inspection unit through which the subject 100 passes to inspect internal defects (internal states) of the subject 100. The inspection unit 3 is attached to the base 2 via a movable unit 5 described later. The inspection unit 3 includes a transmission unit 11 and a reception unit 12. The transmitter 11 and the receiver 12 are located at positions spaced apart from each other. The transmitter 11 and the receiver 12 are fixed to the same fixing unit 13. This maintains the gap between the transmitter 11 and the receiver 12.
As shown in fig. 2, the transmission unit 11 transmits the ultrasonic wave W toward the reception unit 12. The ultrasonic wave W is transmitted from the transmission surface 11a of the transmission unit 11. The transmission surface 11a of the present embodiment is formed in a concave shape recessed from the periphery thereof toward the center. Thereby, the ultrasonic wave W transmitted from the transmission surface 11a converges (focuses) in a point shape. As illustrated in fig. 3, the transmission surface 11a of the present embodiment is formed in a rectangular shape when viewed from the arrangement direction (X-axis direction) of the transmission unit 11 and the reception unit 12, but is not limited thereto.
As shown in fig. 2, the receiving unit 12 is located at a position spaced apart from the transmitting unit 11, and receives the ultrasonic wave W transmitted from the transmitting unit 11. The receiving unit 12 has a receiving surface 12a that faces the transmission surface 11a of the transmitting unit 11 and receives the ultrasonic wave W. The receiving surface 12a of the present embodiment is formed in a concave shape recessed from the periphery of the receiving surface 12a toward the center, as in the case of the transmitting surface 11 a. This makes it possible to receive the ultrasonic wave W which is transmitted from the transmission surface 11a, converged, and then expanded into a spherical shape. The receiving surface 12a may be formed to receive the converged ultrasonic wave W, for example. In fig. 3, the receiving surface 12a is formed in a rectangular shape when viewed from the arrangement direction (X-axis direction) of the transmitting unit 11 and the receiving unit 12, but is not limited thereto.
In the drawing, the arrangement direction of the transmitter 11 and the receiver 12 is shown by the X-axis direction. The positive X-axis direction indicates the main transmission direction of the ultrasonic wave W. The main direction perpendicular to the arrangement direction of the transmission unit 11 and the reception unit 12 and in which the object 100 passes between the transmission unit 11 and the reception unit 12 is represented by the positive Y-axis direction, and the opposite direction is represented by the negative Y-axis direction. The Z-axis direction indicates a direction orthogonal to the X-axis direction and the Y-axis direction.
As shown in fig. 2, when the subject 100 passes between the transmission unit 11 and the reception unit 12, the two members 101 constituting the subject 100 are arranged mainly along the arrangement direction (X-axis direction) of the transmission unit 11 and the reception unit 12. This allows the ultrasonic wave W transmitted from the transmission unit 11 to pass through the subject 100 in the direction in which the two members 101 overlap each other, and then to be received by the reception unit 12.
As shown in fig. 1, the movable unit 5 is provided between the base 2 and the inspection unit 3. The movable unit 5 can move the inspection unit 3 in the X-axis direction with respect to the base 2. Specifically, the movable unit 5 has a guide rail 31 and a block 32 mounted to be slidable in a linear direction with respect to the guide rail 31. The guide rail 31 extends linearly and is fixed to the inspection unit 3. The block 32 is fixed to the base 2 and is movable in the longitudinal direction thereof relative to the guide rail 31 within a predetermined range. The guide rail 31 may be fixed to the base 2, and the block 32 may be fixed to the inspection unit 3.
The movable unit 5 configured as described above allows the inspection unit 3 to move linearly in the X-axis direction with respect to the base 2. The movable unit 5 may be, for example, a linear guide in which the block 32 can smoothly move in a linear direction with respect to the guide rail 31 without rattling. The movable unit 5 may be configured to allow the block 32 to swing with respect to the guide rail 31, for example.
As shown in fig. 1 to 4, the inspection unit 3 further includes a contact portion 15. The contact portion 15 is in contact with the object 100 passing between the transmission portion 11 and the reception portion 12, and applies a force in the X-axis direction (alignment direction) to the inspection unit 3. When the subject 100 comes into contact with the contact portion 15, a force in the X-axis direction is applied to the inspection unit 3, and the inspection unit 3 moves in the X-axis direction with respect to the base 2.
The contact portion 15 of the present embodiment is a guide portion 21, 22 that guides the subject 100 between the transmission portion 11 and the reception portion 12. The guide units 21 and 22 may be provided in at least one of the transmission unit 11 and the reception unit 12. In the present embodiment, the guide units 21 and 22 are provided in both the transmission unit 11 and the reception unit 12. The two guide portions 21 and 22 provided in the transmission unit 11 and the reception unit 12 are located at positions spaced apart from each other in the X-axis direction. In the present embodiment, the distance between the two guide units 21 and 22 is smaller than the distance between the transmission unit 11 and the reception unit 12.
As shown in fig. 2 to 4, the first guide portion 21 provided in the transmission portion 11 is provided at the edge of the transmission surface 11a located on the Y-axis negative direction side. The first guide portion 21 has a guide surface 21a facing the Y-axis negative direction side. The guide surface 21a of the first guide portion 21 is inclined so as to face the positive X-axis direction (the receiving portion 12 side) and the positive Y-axis direction. The second guide portion 22 provided in the receiving portion 12 is provided at the edge of the receiving surface 12a on the Y-axis negative direction side. The second guide portion 22 has a guide surface 22a facing the Y-axis negative direction side. The guide surface 22a of the second guide portion 22 is inclined so as to face the positive Y-axis direction as it faces the negative X-axis direction (the transmission portion 11 side). Accordingly, the distance between the guide surfaces 21a and 22a of the first and second guide portions 21 and 22 in the X-axis direction decreases toward the positive Y-axis direction.
By configuring the guide portions 21 and 22 as described above, even when the subject 100 that has entered between the transmission portion 11 and the reception portion 12 is located at a position shifted in the X-axis direction with respect to the gap between the two guide portions 21 and 22, the subject 100 can be guided between the two guide portions 21 and 22 (between the transmission portion 11 and the reception portion 12) by the guide surfaces 21a and 22a of the guide portions 21 and 22 by the contact of the subject 100 with the guide surfaces 21a and 22a of the guide portions 21 and 22.
Here, as described above, the inspection unit 3 can be moved in the X-axis direction with respect to the base 2 by the movable unit 5. Therefore, when the subject 100 comes into contact with the guide surfaces 21a and 22a of the guide portions 21 and 22, a force is applied to the inspection unit 3 in the X-axis direction. Then, the test unit 3 is moved in the X-axis direction relative to the base 2 and the test object 100, whereby the test object 100 is guided between the two guide portions 21 and 22.
The guide portions 21 and 22 of the present embodiment also serve as the restricting portions 25 and 26. When the subject 100 passes between the transmission unit 11 and the reception unit 12, the restriction units 25 and 26 restrict the ultrasonic waves W transmitted from the transmission unit 11 from reaching the reception unit 12 without passing through the subject 100, as shown in fig. 4. As illustrated in fig. 4, among the ultrasonic waves W that are transmitted from the transmission unit 11 to the reception unit 12 without passing through the subject 100, there are ultrasonic waves W2 (i.e., diffracted waves) that are intended to bypass the edge 103 of the subject 100. The restricting units 25 and 26 do not restrict the ultrasonic waves W1 (i.e., the transmitted waves) transmitted from the transmission unit 11 through the subject 100 from reaching the reception unit 12.
In other words, the restricting units 25 and 26 restrict the second propagation path of the ultrasonic wave W2 different from the first propagation path of the ultrasonic wave W1 that has passed through the subject 100 and reached the receiving unit 12. The second propagation path of the ultrasonic wave W2 is a propagation path of a diffracted wave (the ultrasonic wave W2 that is to bypass the outside of the edge portion 103 of the subject 100) illustrated in fig. 4.
The restricting units 25 and 26 may be provided at least on one of the transmitting unit 11 and the receiving unit 12. In the present embodiment, as shown in fig. 2 to 4, the restricting units 25 and 26 are provided in both the transmitting unit 11 and the receiving unit 12.
The first regulating portion 25 provided in the transmission portion 11 is disposed so as to face the transmission surface 11a in the X-axis direction (the arrangement direction), and covers a part of the transmission surface 11 a. The first regulating portion 25 is formed in a tubular shape having a smaller inner cross-sectional area as it goes from the transmission surface 11a toward the positive X-axis direction (toward the receiving portion 12). The first regulating portion 25 may be formed in a cylindrical shape of, for example, a cone shape, but in the present embodiment, it is formed in a cylindrical shape of a quadrangular pyramid shape as shown in fig. 3. Of the openings at both ends of the tubular first regulating portion 25, the opening on the side having the larger inner cross-sectional area is connected to the peripheral edge of the transmission surface 11 a. The surface of the outer surface of the first regulating portion 25 formed in a tapered shape facing the Y-axis negative direction functions as the guide surface 21a of the first guide portion 21.
As shown in fig. 2 to 4, the second regulating portion 26 provided in the receiving portion 12 is disposed so as to face the receiving surface 12a in the X-axis direction (arrangement direction), and covers a part of the receiving surface 12a. The second limiting portion 26 is formed in a cylindrical shape whose inner cross-sectional area decreases from the receiving surface 12a toward the X-axis negative direction (transmission side). The second regulating portion 26 may be formed in a cylindrical shape of a cone, for example, but in the present embodiment, it is formed in a cylindrical shape of a quadrangular pyramid as shown in fig. 3. Of the openings at both ends of the cylindrical second regulating portion 26, the opening on the side having the larger cross-sectional area on the inner side is connected to the peripheral edge of the receiving surface 12a. The surface of the outer surface of the second regulating portion 26 formed in a tapered shape facing the Y-axis negative direction functions as the guide surface 22a of the second guide portion 22.
As shown in fig. 2 and 3, the first and second conical tubular restricting portions 25 and 26 are suitable for the mode of transmitting the ultrasonic wave W from the transmitting portion 11, converging the ultrasonic wave W into a point shape, then expanding the ultrasonic wave W into a spherical shape, and then reaching the receiving portion 12. That is, the ultrasonic wave W transmitted from the transmission surface 11a of the transmission unit 11 and propagated while converging can be emitted from the opening 25a (transmission-side opening 25 a) on the side where the cross-sectional area is smaller in the first restriction unit 25 having a tapered tubular shape to the outside of the first restriction unit 25. The ultrasonic wave W emitted from the transmission-side opening 25a can enter the second limiting section 26 from the opening 26a (reception-side opening 26 a) on the side of the second limiting section 26 having a small cross-sectional area in the tapered cylindrical shape, and can reach the receiving surface 12a of the reception section 12 after expanding into a spherical shape.
In the present embodiment, the distance between the transmission-side opening 25a and the reception-side opening 26a of the first and second restrictions 25, 26 (hereinafter, referred to as the distance between the two restrictions 25, 26) corresponds to the substantial distance between the transmission unit 11 and the reception unit 12. The interval between the two regulating portions 25 and 26 is preferably as small as possible within a range through which the subject 100 can pass therebetween. For example, in a state where the subject 100 is positioned between the two regulating units 25 and 26, the distance between the regulating units 25 and 26 and the subject 100 is preferably equal to or less than the wavelength of the ultrasonic wave W. In this case, the ultrasonic wave W2 (diffracted wave) which is transmitted from the transmission unit 11 to the reception unit 12 without passing through the subject 100 can be more effectively limited.
The movable unit 5 and the contact portion 15 of the present embodiment function as a following mechanism for causing the inspection unit 3 to follow the movement trajectory of the subject 100. The movable unit 5 and the contact portion 15 constituting the following mechanism cause the inspection unit 3 to follow the movement trajectory of the inspection target site inspected by the inspection unit 3 in the subject 100. The inspection target site of the subject 100 is, for example, a joint portion of two members 101 joined in the subject 100.
As described above, according to the ultrasonic inspection apparatus 1 of the first embodiment, the inspection unit 3 including the transmission unit 11 and the reception unit 12 can be moved in the arrangement direction (X-axis direction) of the transmission unit 11 and the reception unit 12 with respect to the base 2 by the movable unit 5. The inspection unit 3 further includes a contact portion 15 that is brought into contact with the object 100 passing between the transmission portion 11 and the reception portion 12, and applies a force in the alignment direction to the inspection unit 3.
Therefore, if the position of the subject 100 in the arrangement direction changes when the subject 100 passes between the transmission unit 11 and the reception unit 12, the subject 100 comes into contact with the contact portion 15 of the inspection unit 3, thereby pressing the inspection unit 3 in the arrangement direction. Thereby, the inspection unit 3 is moved in the arrangement direction by the movable unit 5 so as to follow the change in the position of the subject 100. As a result, even if the interval between the transmission unit 11 and the reception unit 12 is substantially narrowed, the subject 100 can pass between the transmission unit 11 and the reception unit 12 while allowing the change of the position of the subject 100 in the arrangement direction. That is, the interval between the transmission unit 11 and the reception unit 12 can be substantially narrowed to suppress the generation of the diffraction wave. Therefore, the generation of the diffracted wave can be suppressed regardless of the conveyance system of the subject 100 between the transmission unit 11 and the reception unit 12.
Here, an example of a mode of conveying the subject 100 between the transmission unit 11 and the reception unit 12 will be described with reference to fig. 5.
For example, as shown in fig. 5, the subject 100 may be conveyed such that a trajectory T1 of conveyance of the subject 100 passing between the transmitter 11 and the receiver 12 is arcuate when viewed from the Z-axis direction. For example, when the subject 100 is conveyed by a conveying apparatus (rotary conveying apparatus) that rotates about the Z-axis direction as a central axis, the trajectory T1 of the conveyance of the subject 100 may be in an arc shape as shown in fig. 5. In this case, the position of the subject 100 (particularly, the examination target portion of the subject 100) in the arrangement direction (X-axis direction) changes while the subject 100 passes through the examination unit 3.
In contrast, in the ultrasonic inspection apparatus 1 according to the first embodiment, the movable unit 5 can move the inspection unit 3 in the arrangement direction so as to follow the change in the position of the subject 100 (i.e., the movement trajectory of the subject 100). In the present embodiment, the following of the position change of the inspection unit 3 with respect to the subject 100 is performed by pressing the subject 100 against the guide surfaces 21a, 22a of the guide portions 21, 22 in the arrangement direction in accordance with the position change of the subject 100, and applying a force in the arrangement direction to the inspection unit 3. When the subject 100 is conveyed as indicated by the trajectory T1 shown in fig. 5 and the position of the subject 100 changes in the X-axis negative direction, the positions of the transmission unit 11 and the reception unit 12 of the inspection unit 3 indicated by the two-dot chain line change in the X-axis negative direction so as to be the positions of the transmission unit 11 and the reception unit 12 indicated by the solid line.
In the ultrasonic inspection apparatus 1 according to the first embodiment, the distance between the two guide units 21 and 22 is smaller than the distance between the transmission unit 11 and the reception unit 12. Therefore, it is possible to suppress the occurrence of positional deviation of the subject 100 in the arrangement direction of the transmission unit 11 and the reception unit 12, which occurs between the transmission unit 11 and the reception unit 12. This can suppress the occurrence of variations in the intensity (received signal intensity) of the ultrasonic waves W transmitted through the subject 100 and received by the receiving unit 12. Therefore, the subject 100 can be inspected with high accuracy.
In the ultrasonic inspection apparatus 1 according to the first embodiment, the guide units 21 and 22 that guide the subject 100 between the transmission unit 11 and the reception unit 12 also serve as the restriction units 25 and 26 that restrict W transmitted from the transmission unit 11 from reaching the reception unit 12 without passing through the subject 100 when the subject 100 passes between the transmission unit 11 and the reception unit 12. This can suppress the ultrasonic wave W2 (for example, diffracted wave) that does not pass through the subject 100 from reaching the receiving unit 12 without increasing the number of components of the ultrasonic inspection apparatus 1, and can detect a defect of the subject 100 more accurately.
As described above, in the ultrasonic inspection apparatus 1 according to the first embodiment, the following mechanism including the movable unit 5 and the contact portion 15 moves the inspection unit 3 in the orthogonal direction (the arrangement direction, the X-axis direction) in accordance with a change in position of the object 100 relative to the inspection unit 3 (the inspection portion) in the orthogonal direction (the arrangement direction, the X-axis direction) orthogonal to the direction (the Y-axis direction) in which the object 100 passes. Thereby, the inspection unit 3 follows the movement trajectory of the subject 100 by the following mechanism. Therefore, when the subject 100 passes through the inspection unit 3, a positional change of the subject 100 with respect to the inspection unit 3 can be suppressed. Therefore, the internal state of the subject 100 can be accurately inspected by the inspection unit 3.
[ second embodiment ]
Next, a second embodiment of the present invention will be described with reference to fig. 6. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals and the like, and the description thereof is omitted.
As shown in fig. 6, the ultrasonic inspection apparatus 1D of the second embodiment includes a base 2, an inspection unit 3, and a movable unit 5, as in the first embodiment. The ultrasonic inspection apparatus 1D of the present embodiment further includes a returning section 6D. The returning section 6D returns the inspection unit 3 to the reference position RP in the X-axis direction (arrangement direction).
The returning unit 6D of the present embodiment returns the inspection unit 3 to the reference position RP by gravity. Specifically, the returning section 6D is a guide rail 31 of the movable unit 5 arranged with its longitudinal direction inclined with respect to the horizontal direction. In fig. 6, the X-axis direction represents the horizontal direction. The Z-axis direction represents the vertical direction, and the positive Z-axis direction side represents the upper side in the vertical direction.
In fig. 6, the guide rail 31 extends toward the negative Z-axis direction (i.e., downward in the vertical direction) as it goes toward the positive X-axis direction. Thus, a force (gravity) directed in the positive X-axis direction acts on the inspection unit 3 by its own weight. The magnitude of the gravitational force (the force of the returning section 6D) acting on the inspection unit 3 is preferably smaller than the force with which the subject 100 presses the inspection unit 3 in the X-axis direction (the X-axis negative direction in fig. 6) against the gravitational force.
The reference position RP of the inspection unit 3 in fig. 6 is an end position in the movement range of the inspection unit 3 based on the movable unit 5, and is the lowermost position in the movement range of the inspection unit 3.
In the ultrasonic inspection apparatus 1D of the second embodiment, as in the first embodiment, when the object 100 passes between the transmitter 11 and the receiver 12 of the inspection unit 3, the inspection unit 3 moves in the X-axis direction relative to the base 2 so as to follow the change in position of the object 100 in the X-axis direction. Thereafter, when the inspection unit 3 is located at a position away from the reference position RP while the object 100 passes between the transmission unit 11 and the reception unit 12, the inspection unit 3 returns to the reference position RP by its own weight.
The ultrasonic inspection apparatus 1D according to the second embodiment provides the same effects as those of the first embodiment.
The ultrasonic inspection apparatus 1D according to the second embodiment includes a returning unit 6D that returns the inspection unit 3 to the reference position RP in the arrangement direction (X-axis direction) of the transmitter 11 and the receiver 12. Therefore, when the predetermined object 100 passes between the transmitter 11 and the receiver 12, even if the inspection unit 3 is located at a position away from the reference position RP, the returning section 6D can return the inspection unit 3 to the reference position RP. This allows the subsequent subject 100 to enter between the transmitter 11 and the receiver 12 of the inspection unit 3 disposed at the reference position RP. Therefore, even if the position of the inspection unit 3 when the subject 100 passes through deviates from the reference position RP, a plurality of subjects 100 can be continuously passed through the inspection unit 3.
[ third embodiment ]
Next, a third embodiment of the present invention will be described with reference to fig. 7. In the third embodiment, the same components as those in the first and second embodiments are denoted by the same reference numerals, and the description thereof will be omitted.
As shown in fig. 7, an ultrasonic inspection apparatus 1E according to the third embodiment includes a base 2, an inspection unit 3, and a movable unit 5, as in the first embodiment. The ultrasonic inspection apparatus 1E of the present embodiment further includes a returning unit 6E for returning the inspection unit 3 to the reference position RP in the X-axis direction (alignment direction), as in the second embodiment.
However, the returning portion 6E of the present embodiment is an elastic body 41E provided between the base 2 and the inspection unit 3. The elastic body 41E elastically expands and contracts in response to movement of the inspection unit 3 in the X-axis direction with respect to the base 2. The magnitude of the elastic force (the force of the returning portion 6E) acting on the elastic body 41E of the inspection unit 3 is preferably smaller than the force with which the object 100 presses the inspection unit 3 in the X-axis direction against the elastic force. The elastic body 41E illustrated in fig. 7 is a spring, but may be rubber, for example. As illustrated in fig. 7, when there is one elastic body 41E constituting the returning section 6E, the inspection unit 3 is not acted on the elastic force of the elastic body 41E in a state where the inspection unit 3 is disposed at the reference position RP. The reference position RP of the inspection unit 3 in fig. 7 is the end position of the movement range of the inspection unit 3 based on the movable unit 5, but may be, for example, the middle of the movement range of the inspection unit 3.
In the ultrasonic inspection apparatus 1E of the third embodiment, as in the first embodiment, when the object 100 passes between the transmitter 11 and the receiver 12 of the inspection unit 3, the inspection unit 3 moves in the X-axis direction with respect to the base 2 so as to follow the positional change of the object 100 in the X-axis direction. Thereafter, when the inspection unit 3 is located at a position apart from the reference position RP when the subject 100 passes between the transmission unit 11 and the reception unit 12, the inspection unit 3 returns to the reference position RP by the elastic force of the elastic body 41E.
The ultrasonic inspection apparatus 1E according to the third embodiment has the same effects as those of the second embodiment.
[ fourth embodiment ]
Next, a fourth embodiment of the present invention will be described with reference to fig. 8. In the fourth embodiment, the same components as those in the first embodiment are denoted by the same reference numerals and the like, and description thereof is omitted.
As shown in fig. 8, an ultrasonic inspection apparatus 1F according to the fourth embodiment includes a base 2, an inspection unit 3, and a movable unit 5, as in the first embodiment. The ultrasonic inspection apparatus 1F of the present embodiment further includes a holding portion 7F. The holding unit 7F holds the inspection unit 3 at a reference position RP in the X-axis direction (arrangement direction).
The holding portion 7F of the present embodiment is constituted by a pair of magnets 51F, 52F provided in the base 2 and the inspection unit 3. The pair of magnets 51F and 52F includes a base-side magnet 51F fixed to the base 2 and a unit-side magnet 52F fixed to the inspection unit 3.
The pair of magnets 51F and 52F are disposed at positions closest to each other, that is, at positions where the magnetic force acting between the pair of magnets 51F and 52F becomes maximum in a state where the inspection unit 3 is disposed at the reference position RP. When the inspection unit 3 is disposed at the reference position RP, the magnitude of the magnetic force acting between the pair of magnets 51F, 52F is preferably smaller than the force with which the inspection unit 3 is pressed in the X-axis direction against the magnetic force by the object 100.
The pair of magnets 51F, 52F are disposed on one side in the X-axis direction with respect to the main body portion (portion including the transmission unit 11 and the reception unit 12) of the inspection unit 3 disposed at the reference position RP. Specifically, the base-side magnet 51F is fixed to a portion of the base 2 located on the X-axis positive direction side (right side) of the main body portion of the inspection unit 3 disposed at the reference position RP. The unit-side magnet 52F is fixed to a portion of the fixing portion 13 of the inspection unit 3 that extends in the X-axis positive direction side with respect to the receiving portion 12.
The reference position RP of the inspection unit 3 in fig. 8 is an end position of the movement range of the inspection unit 3 based on the movable unit 5.
In the ultrasonic inspection apparatus 1F according to the fourth embodiment, as shown in fig. 8, in a state in which the inspection unit 3 is disposed at the reference position RP, the inspection unit 3 is held at the reference position RP by a magnetic force acting between the pair of magnets 51F, 52F. However, when the position of the subject 100 in the X-axis direction changes when the subject 100 passes between the transmitter 11 and the receiver 12 of the inspection unit 3, the inspection unit 3 is pressed in the X-axis direction by the subject 100 and moves in the X-axis direction relative to the base 2 so as to follow the change in the position of the subject 100.
The ultrasonic inspection apparatus 1F according to the fourth embodiment provides the same effects as those of the first embodiment.
The ultrasonic inspection apparatus 1F according to the fourth embodiment includes a holding unit 7F that holds the inspection unit 3 at a reference position RP in the arrangement direction (X-axis direction) of the transmission unit 11 and the reception unit 12. This can prevent the inspection unit 3 from being displaced from the reference position RP by an unexpected external force (e.g., vibration). This can prevent the subject 100 from being unable to enter between the transmission unit 11 and the reception unit 12 due to an unexpected positional deviation of the inspection unit 3.
In the fourth embodiment, for example, the holding unit may hold the inspection unit 3 at each of a plurality of reference positions. In the ultrasonic inspection apparatus 1G illustrated in fig. 9, the holding portion 7G is configured to hold the inspection unit 3 at two reference positions located apart from each other in the X-axis direction (arrangement direction). The holding portion 7G illustrated in fig. 9 includes two sets of magnet units 50G1 and 50G2 each including a pair of magnets 51F and 52F. Two sets of magnet units 50G1, 50G2 are provided on both sides of the inspection unit 3 in the X-axis direction.
The pair of magnets 51F, 52F constituting the first magnet unit 50G1 of the two sets of magnet units 50G1, 50G2 are located at positions closest to each other in a state where the inspection unit 3 is arranged at the first reference position RP1 of the two reference positions. Thus, in a state where the inspection unit 3 is disposed at the first reference position RP1, the inspection unit 3 is held at the first reference position RP1 by the magnetic force acting between the pair of magnets 51F, 52F of the first magnet unit 50G 1. In a state where the inspection unit 3 is disposed at the first reference position RP1, the pair of magnets 51F, 52F constituting the second magnet unit 50G2 of the two sets of magnet units 50G1, 50G2 are located at positions separated from each other in the X-axis direction. Therefore, the inspection unit 3 does not move from the first reference position RP1 due to the magnetic force acting between the pair of magnets 51F, 52F of the second magnet unit 50G2.
Although not shown, in a state where the inspection unit 3 is disposed at the second reference position, the pair of magnets 51F, 52F of the second magnet unit 50G2 are located at positions closest to each other. Thus, in a state where the inspection unit 3 is disposed at the second reference position, the inspection unit 3 is held at the second reference position by the magnetic force acting between the pair of magnets 51F, 52F of the second magnet unit 50G2. In the state where the inspection unit 3 is disposed at the second reference position, the inspection unit 3 is not moved from the second reference position by the magnetic force acting between the pair of magnets 51F, 52F of the first magnet unit 50G 1.
The ultrasonic inspection apparatus according to the fourth embodiment may include the same returning units 6D and 6E as those of the second and third embodiments, for example. In this case, the reference position of the inspection unit 3 by the returning sections 6D and 6E and the reference position of the inspection unit 3 by the holding sections 7F and 7G may be the same as each other, or may be different from each other as illustrated in fig. 10.
The ultrasonic inspection apparatus 1H illustrated in fig. 10 includes the returning section 6D (inclined guide rail 31) of the second embodiment illustrated in fig. 6 and the holding section 7F (pair of magnets 51F, 52F) of the fourth embodiment illustrated in fig. 8. The reference position RP1 (first reference position RP 1) of the inspection unit 3 by the returning section 6D is the lowest position (Z-axis negative direction) within the movement range of the inspection unit 3. Although not shown, the reference position (second reference position) of the inspection unit 3 by the holding portion 7F is a position above (in the positive Z-axis direction) the first reference position RP1.
In the fourth embodiment, the holding portions 7F and 7G are not limited to being formed by the pair of magnets 51F and 52F, and may be formed by, for example, a magnet provided on one of the base 2 and the inspection unit 3 and a magnetic body (e.g., iron) provided on the other.
In the first to fourth embodiments, the transmission surface 11a of the transmission unit 11 may be formed such that the ultrasonic wave W transmitted from the transmission surface 11a converges only in the Y-axis direction, that is, converges in a linear shape extending in the Z-axis direction, for example.
The transmission surface 11a of the transmission unit 11 may be formed so that the ultrasonic waves W transmitted from the transmission surface 11a do not converge. In this case, the transmission surface 11a of the transmission unit 11 and the reception surface 12a of the reception unit 12 may be formed as flat surfaces as shown in fig. 11, for example.
In the first to fourth embodiments, the guide portions 21 and 22 may not be used as the restricting portions 25 and 26, for example. In this case, as shown in fig. 11, for example, the guide units 21 and 22 may be provided on the rear side (the Y-axis negative direction side) of the passing direction of the subject 100 with respect to the transmission unit 11 and the reception unit 12. The guide units 21 and 22 illustrated in fig. 11 are provided in both the transmission unit 11 and the reception unit 12. The two guide portions 21 and 22 have guide surfaces 21a and 22a facing the Y-axis negative direction side. The two guide surfaces 21a and 22a are formed such that their intervals are enlarged toward the Y-axis negative direction side.
In the first to fourth embodiments, the contact portion 15 of the inspection unit 3 may be, for example, the transmission portion 11 and the reception portion 12. That is, the subject 100 may be brought into contact with the transmitter 11 and the receiver 12 functioning as the contact portion 15, thereby applying a force in the alignment direction to the inspection unit 3.
In the first to fourth embodiments, the movable unit 5 and the contact portion 15 (following mechanism) that function as following mechanisms may be configured to move the inspection unit 3 in a direction orthogonal to a direction in which the object 100 passes (for example, the Y-axis direction) in accordance with a change in position of the object 100 relative to the inspection unit 3 (inspection portion) in the orthogonal direction. That is, in the first to fourth embodiments, the movable unit 5 and the contact portion 15 may be configured to move the inspection unit 3 in a direction (for example, Z-axis direction) orthogonal to a direction in which the subject 100 passes (for example, Y-axis direction) and an arrangement direction (for example, X-axis direction) of the transmission portion 11 and the reception portion 12 in accordance with the change in the position of the subject 100.
In the first to fourth embodiments, the conveyance body passing between the transmission unit 11 and the reception unit 12 (inspection unit) is not limited to the subject 100, and may be an object conveyed together with the subject 100 by a conveyance device, for example. The object to be conveyed together with the subject 100 may be, for example, a tool that holds the subject 100, a component of a mechanism for conveying the subject 100, or the like.
[ problem to be solved ]
The purpose of the present invention is to provide an ultrasonic inspection device that can suppress the generation of diffracted waves regardless of the mode of conveyance of a conveyance body such as a subject between a transmission unit and a reception unit.
[ Effect ]
According to the present invention, the generation of diffracted waves can be suppressed regardless of the conveyance method of the conveyance body between the transmission unit and the reception unit.
[ fifth embodiment ]
Next, a fifth embodiment of the present invention will be described with reference to fig. 12 to 15. In the fifth embodiment, the same components as those in the first embodiment are denoted by the same reference numerals and the like, and the description thereof is omitted.
As shown in fig. 12, the ultrasonic inspection apparatus 1J according to the fifth embodiment includes, as in the first embodiment, an inspection unit 3 (inspection unit) through which the object 100 passes to inspect the internal state (internal defect) of the object 100, and a following mechanism 9J for making the inspection unit 3 follow the movement trajectory of the object 100. The structure of the inspection unit 3 is the same as that of the first embodiment. The structure of the inspection unit 3 is not limited to the structure of the first embodiment, and may be the structure illustrated in fig. 11 or the like.
The following mechanism 9J according to the fifth embodiment is configured to follow the movement locus of the examination target portion examined by the examination unit 3 in the object 100, as in the first embodiment. Unlike the first to fourth embodiments in which the test unit 3 is pressed by the subject 100 and passively follows the movement trajectory (position change) of the subject 100, the following mechanism 9J according to the fifth embodiment is configured to actively follow the movement trajectory of the subject 100.
The following mechanism 9J is configured to move the inspection unit 3 in a direction orthogonal to a direction in which the object 100 passes (for example, a Y-axis positive direction) in accordance with a change in position of the object 100 in the orthogonal direction. Here, the orthogonal direction is, for example, an X-axis direction or a Z-axis direction. In the present embodiment, the following mechanism 9J moves the inspection unit 3 in both the X-axis direction and the Z-axis direction. The positive Z-axis direction is a direction extending through the object 100 of the inspection unit 3. An edge 103, which is a distal end portion in the extending direction (positive Z-axis direction) of the subject 100, is an examination target portion of the subject 100 in the present embodiment. The following mechanism 9J moves the inspection unit 3 in the Z-axis direction, and thereby can cause the inspection unit 3 to follow a change in position of the edge 103 (inspection target site) of the subject 100 in the Z-axis direction.
The following mechanism 9J of the present embodiment includes a driving unit 91J that drives the inspection unit 3 in orthogonal directions (X-axis direction and Z-axis direction). The driving unit 91J may be configured to reciprocate the inspection unit 3 in the orthogonal direction within a predetermined range. The driving unit 91J of the present embodiment is a servo system using a ball screw, a linear motor, or the like. The drive unit 91J is a servo system, and thus the inspection unit 3 can be accurately moved.
As shown in fig. 13 to 15, the following mechanism 9J of the present embodiment further includes a position detection sensor 92J that detects the position of the subject 100 in the orthogonal direction (X-axis direction and Z-axis direction). Specifically, the position detection sensor 92J detects the position of the edge 103 (examination target site) of the subject 100.
The position detection sensor 92J is disposed on the rear side of the inspection unit 3 (the side where the object 100 approaches the inspection unit 3) with the principal direction (the positive direction of the Y axis) in which the object 100 passes through the inspection unit 3 as the front side, and detects the position of the object 100 before reaching the inspection unit 3. The position detection sensor 92J includes an X-axis position detection sensor 92J1 and a Z-axis position detection sensor 92J2. The X-axis position detection sensor 92J1 detects the position of the subject 100 in the X-axis direction. The Z-axis position detection sensor 92J2 detects the position of the object 100 in the Z-axis direction.
The driving unit 91J drives the inspection unit 3 in the X-axis direction and the Z-axis direction based on the position of the object 100 detected by the position detection sensor 92J. For example, when the X-axis position detection sensor 92J1 detects that the subject 100 is positioned on the X-axis positive direction side of the reference position in the X-axis direction, the driving unit 91J drives the inspection unit 3 in the X-axis positive direction to move to a predetermined position on the X-axis positive direction side of the reference position. Similarly, for example, when the Z-axis position detection sensor 92J2 detects that the subject 100 is positioned on the Z-axis positive direction side of the reference position in the Z-axis direction, the driving unit 91J drives the inspection unit 3 in the Z-axis positive direction to move the inspection unit to a predetermined position on the Z-axis positive direction side of the reference position.
As shown in fig. 13, the ultrasonic inspection apparatus 1J of the fifth embodiment inspects the object 100 conveyed by the rotary conveyor 200. The rotary transport apparatus 200 is, for example, a rotary filling machine that fills the subject 100 as a packaging container with contents while transporting the subject 100, and seals the contents by joining the edge 103 of the subject 100. The rotary transfer device 200 includes a rotary transfer table 201 that rotates about a rotation axis O1 extending in the Z-axis direction. The rotary conveyance table 201 rotates in the direction of an arrow D1 shown in fig. 13, for example.
The edge 103 (inspection target site) of the object 100 conveyed by the rotary conveyor 200 extends linearly when viewed from the Z-axis direction. The subject 100 is attached to the rotary table 201 by a jig 203 (see fig. 14 and 15) or the like so that the edge 103 thereof extends on the rotary table 201 in a tangential direction of a circular rotation path 202 centered on the rotation axis O1. The object 100 may be attached to the rotating table 201 such that the middle portion of the edge 103 in the longitudinal direction is in contact with the rotating rail 202. In the present embodiment, the object 100 is attached to the rotary table 201 such that the longitudinal end of the edge 103 is in contact with the rotary rail 202.
Although only one subject 100 may be mounted on the rotary transport table 201, in the present embodiment, a plurality of subjects 100 are mounted so as to be arranged in the circumferential direction of the rotary transport table 201. The method of attaching the subject 100 to the rotary transport table 201 may be the same or different among the plurality of subjects 100.
In the example shown in fig. 13, two subjects 100 are attached to the rotary transport table 201 such that the edge portions 103 of two subjects 100 adjacent to each other in the circumferential direction of the rotary transport table 201 extend in opposite directions from the point of contact with the rotary rail 202 in the circumferential direction. In this case, the method of mounting the subject 100 to the rotary transport table 201 differs between the two subjects 100. Therefore, the movement locus of the edge 103 of the subject 100 passing through the inspection unit 3 differs between the two subjects 100.
The plurality of subjects 100 may be attached to the rotary transport table 201 such that the edge portions 103 of the plurality of subjects 100 arranged in the circumferential direction of the rotary transport table 201 extend in the same direction (for example, the direction of the arrow D1) as the tangent point of the rotary track 202. In this case, the method of mounting the subject 100 to the rotary transport table 201 is the same among the plurality of subjects 100. Therefore, the movement locus of the edge 103 of the subject 100 passing through the inspection unit 3 is the same among the plurality of subjects 100.
The ultrasonic inspection apparatus 1J inspects the edge 103 (inspection target site) of the object 100 conveyed by the rotary conveyor 200. The inspection unit 3 is disposed to pass the edge 103 of the object 100 moving in the circumferential direction of the rotary transport table 201. The Y-axis direction (linear direction) in fig. 13 indicates a direction in which the edge 103 of the subject 100 passes through the inspection unit 3. The X-axis direction corresponds to the radial direction of the rotation path 202 of the rotary table 201, and the Z-axis direction corresponds to the direction in which the rotation axis O1 of the rotary table 201 extends.
In the above state, when the object 100 is conveyed by the rotary conveyor 200, the position where the end of the object 100 passes through the inspection unit 3 changes in the radial direction (X-axis direction). In the ultrasonic inspection apparatus 1J of the present embodiment, a change in position of the edge 103 of the subject 100 in the X-axis direction is detected by the X-axis position detection sensor 92J 1. Then, the driving unit 91J moves the inspection unit 3 in the X-axis direction based on the position of the edge 103 of the object 100 detected by the X-axis position detection sensor 92J1, and causes the inspection unit 3 to follow the movement trajectory of the edge 103 of the object 100. This enables the edge 103 of the subject 100 to pass through the inspection unit 3 accurately, and the inspection unit 3 can perform an inspection accurately.
When the subject 100 is conveyed by the rotary conveyor 200 and passes through the inspection unit 3 mainly in the Y-axis direction, for example, when the subject 100 also moves in the Z-axis positive direction as shown in fig. 14, the ultrasonic inspection apparatus 1J detects a position change in the Z-axis direction of the edge 103 of the subject 100 by the Z-axis position detection sensor 92J2. Then, the driving unit 91J moves the inspection unit 3 in the positive Z-axis direction based on the position of the edge 103 of the object 100 detected by the Z-axis position detection sensor 92J2, and causes the inspection unit 3 to follow the movement trajectory of the edge 103 of the object 100. This enables the edge 103 of the subject 100 to pass through the inspection unit 3 accurately, and the inspection unit 3 can perform an accurate inspection. In addition, when the subject 100 also moves in the Z-axis negative direction, the inspection unit 3 can be made to follow the movement trajectory of the edge 103 of the subject 100 in the same manner.
As illustrated in fig. 15, even when the subject 100 is conveyed by the rotary conveyor 200 and passes through the inspection unit 3 mainly in the Y-axis direction in a state where the posture of the subject 100 is not correct, the inspection unit 3 can follow the movement locus of the edge 103 of the subject 100 by the Z-axis position detection sensor 92J2 and the driving unit 91J. In fig. 15, the edge 103 of the subject 100 as the inspection target portion is inclined with respect to the Y-axis direction (the conveying direction of the rotary conveying apparatus 200 with respect to the subject 100). That is, in fig. 15, when the object 100 passes through the inspection unit 3 in the positive Y-axis direction, the inspection unit 3 gradually moves in the positive Z-axis direction and follows the movement locus of the inclined edge portion 103.
The ultrasonic inspection apparatus 1J according to the fifth embodiment provides the same effects as those of the first embodiment.
That is, since the inspection unit 3 follows the movement locus of the subject 100 by the following mechanism 9J, the positional change of the subject 100 with respect to the inspection unit 3 can be suppressed. Therefore, the internal state of the subject 100 can be accurately inspected by the inspection unit 3. The following mechanism 9J can move the inspection unit 3 in the orthogonal direction in accordance with a change in position of the subject 100 in the orthogonal direction (X-axis direction, Z-axis direction), thereby allowing the inspection unit 3 to follow the movement trajectory of the subject 100.
In the ultrasonic inspection apparatus 1J according to the fifth embodiment, the follower mechanism 9J includes a driving unit 91J that drives the inspection unit 3 in the orthogonal direction. Thus, even if the inspection unit 3 does not come into contact with the subject 100 as in the first to fourth embodiments, the inspection unit 3 can be made to follow the movement locus of the subject 100.
In the ultrasonic inspection apparatus 1J according to the fifth embodiment, the follower mechanism 9J includes a position detection sensor 92J that detects the position of the subject 100 in the orthogonal direction. The driving unit 91J drives the inspection unit 3 in the orthogonal direction based on the position of the object 100 detected by the position detection sensor 92J. Thereby, even if the movement trajectory of the subject 100 has no reproducibility (even in the case where the movement trajectory of the subject 100 differs among a plurality of subjects 100), the examination unit 3 can be made to follow the movement trajectory of the subject 100.
In the fifth embodiment, when the movement trajectory of the subject 100 has reproducibility, the following mechanism 9J may not include the position detection sensor 92J, for example. The "reproducibility with the movement trajectory of the subject 100" means that the movement trajectory (positional change) of the subject 100 by the inspection unit 3 is the same among the plurality of subjects 100.
When the movement trajectory of the subject 100 has reproducibility, a cam mechanism or a link mechanism, for example, may be used as the driving unit 91J of the follower mechanism 9J. The cam mechanism or the link mechanism is advantageous in that it is configured at a lower cost than the servo system.
When the movement trajectory of the subject 100 has reproducibility, the driving unit 91J may move the inspection unit 3 based on, for example, information on the movement trajectory of the subject 100 (information such as the timing at which the subject 100 passes through the inspection unit 3) output from a conveyor (for example, the rotary conveyance device 200 shown in fig. 13) that conveys the subject 100.
In the fifth embodiment, the following mechanism 9J may move the inspection unit 3 only in one of the X-axis direction and the Z-axis direction, for example.
In the fifth embodiment, the object 100 is not limited to passing through the inspection unit 3 by moving in the Y-axis positive direction with respect to the inspection unit 3. For example, the driving unit 91J may move the inspection unit 3 in the Y-axis direction (i.e., the direction in which the object 100 passes) to pass the object 100 through the inspection unit 3. The configuration in which the driving unit 91J moves the inspection unit 3 in the Y-axis direction can be applied to the first to fourth embodiments, for example.
The ultrasonic inspection apparatus 1J according to the fifth embodiment is not limited to the rotary conveyor 200, and may be applied to, for example, a conveyor 300 of a conveyor type illustrated in fig. 16 and 17 or a pillow packaging machine 400 illustrated in fig. 18.
In the conveyor 300 of the conveyor type illustrated in fig. 16 and 17, the object 100 such as a packaging container is conveyed in a straight direction (positive Y-axis direction) while being placed on the belt conveyor 301. The conveyor 300 of the conveyor type conveys the subject 100 so that the longitudinal direction of the edge 103 (inspection target portion) of the subject 100 is along the conveying direction of the subject 100.
The ultrasonic inspection apparatus 1J is disposed at an end of the conveyor 300 of the conveyor type in the width direction (Z-axis direction) of the belt conveyor 301. The ultrasonic inspection apparatus 1J inspects the internal state of the edge 103 (inspection target portion) of the object 100 protruding from the end in the width direction of the belt conveyor 301 in the object 100 conveyed by the conveyor-type conveyor 300. In the ultrasonic inspection apparatus 1J, the inspection unit 3 is moved in the vertical direction (X-axis direction) and the width direction (Z-axis direction) perpendicular to the conveying direction of the subject 100, thereby following the movement trajectory of the subject 100 (particularly, the edge portion 103). This enables the internal state of the edge 103 of the subject 100 to be accurately inspected while the subject 100 is conveyed by the conveyor 300 of the conveyor type.
The pillow packaging machine 400 illustrated in fig. 18 continuously manufactures the test object 100 into a plurality of packaging containers from the strip-shaped sheet 105. In the pillow packing machine 400, both ends in the width direction of the strip-shaped sheet 105 are continuously joined in the sealing section 401. In the following description, an object in which both ends in the width direction of the belt-shaped sheet 105 are joined is referred to as a subject 100.
The ultrasonic inspection apparatus 1J is disposed immediately after the sealing portion 401 in the transfer direction (Y-axis positive direction) of the belt-shaped sheet 105. As shown in fig. 18 and 19, the ultrasonic inspection apparatus 1J inspects the internal state of the bonded portion 107 (inspection target site) of the belt-like sheet 105 bonded by the seal portion 401 in the subject 100. In the ultrasonic inspection apparatus 1J, the inspection unit 3 is moved in the width direction (X-axis direction) and the up-down direction (Z-axis direction) orthogonal to the transfer direction of the subject 100 (belt-shaped sheet 105), thereby following the movement locus of the subject 100 (particularly, the joint portion 107). This enables the internal state of the joint portion 107 of the subject 100 to be accurately inspected while the subject 100 is transferred (conveyed) by the pillow packaging machine 400.
The ultrasonic inspection apparatuses according to the first to fourth embodiments may be applied to the rotary conveying apparatus 200, the conveyor type conveyor 300, and the pillow packaging machine 400 described above, for example.
In the fifth embodiment, the conveying body passing through the inspection unit 3 (inspection portion) is not limited to the object 100, and may be, for example, an object conveyed together with the object 100 by a conveying device. The object to be conveyed together with the subject 100 may be, for example, a device for holding the subject 100, a component of a mechanism for conveying the subject 100, or the like.
The present invention has been described above in detail, but the present invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the present invention.
The present invention is not limited to the ultrasonic inspection apparatuses described in the first to fifth embodiments, and can be applied to any inspection apparatus in which the inspection unit inspects the external appearance and internal state of the subject 100 by passing the subject through the inspection unit. That is, in the inspection apparatus of the present invention, the inspection unit is not limited to the inspection of the subject 100 using ultrasonic waves as in the first to fifth embodiments.
In the inspection apparatus of the present invention, the inspection unit may inspect the object 100 using, for example, X-rays. In this case, the examination unit can examine the internal state of the subject 100 by acquiring X-rays reflected or transmitted by the subject 100, for example.
In the inspection apparatus of the present invention, the inspection unit may inspect the object 100 using infrared rays or near infrared rays, for example. In this case, the inspection unit can inspect the internal state of the subject 100 by acquiring infrared rays or near-infrared rays reflected or transmitted by the subject 100, for example.
In the inspection apparatus of the present invention, the inspection unit may inspect the subject 100 by acquiring an image of the subject 100, for example. In this case, the examination unit may examine the subject 100 by performing various processes on the acquired image. In such a configuration, the inspection unit can inspect the appearance of the subject 100 using the acquired image.
In the examination apparatus of the present invention, the examination unit may examine the subject 100 using magnetic resonance, for example. Specifically, the examination unit may examine the subject 100 by analyzing a Magnetic Resonance Image (MRI) acquired from the subject 100, for example. In this case, the examination unit can examine the internal state of the subject 100 using magnetic resonance.

Claims (16)

1. An ultrasonic inspection apparatus, comprising:
a base;
an inspection unit having a transmission unit that transmits ultrasonic waves and a reception unit that is located at a position spaced apart from the transmission unit and receives the ultrasonic waves;
a movable unit provided between the base and the inspection unit and capable of moving the inspection unit relative to the base in an arrangement direction of the transmission unit and the reception unit,
the inspection unit further includes a contact portion that comes into contact with the conveyance body passing between the transmission portion and the reception portion, and applies a force in the alignment direction to the inspection unit.
2. The ultrasonic inspection apparatus according to claim 1,
the contact portion has a guide portion that guides the conveyance body toward between the transmission portion and the reception portion.
3. The ultrasonic inspection apparatus according to claim 2,
the guide portion also serves as a restricting portion that restricts the ultrasonic wave transmitted from the transmitting portion from reaching the receiving portion without passing through the conveying body when the conveying body passes between the transmitting portion and the receiving portion.
4. An ultrasonic inspection apparatus according to any one of claims 1 to 3,
the inspection device is provided with a returning section that returns the inspection unit to a reference position in the arrangement direction.
5. The ultrasonic inspection apparatus according to any one of claims 1 to 4,
the inspection device is provided with a holding unit for holding the inspection unit at a reference position in the arrangement direction.
6. An inspection apparatus having an inspection unit through which a subject passes to inspect at least one of an external appearance and an internal state of the subject,
and a following mechanism for making the inspection unit follow the movement locus of the subject.
7. The inspection device of claim 6,
the following mechanism moves the inspection unit in an orthogonal direction orthogonal to a direction in which the object passes, in accordance with a change in position of the object relative to the inspection unit in the orthogonal direction.
8. The inspection apparatus of claim 7,
the following mechanism has a driving section that drives the inspection section in the orthogonal direction.
9. The inspection apparatus of claim 8,
the following mechanism has a position detection sensor that detects a position of the subject in the orthogonal direction,
the driving unit drives the inspection unit in the orthogonal direction according to the position of the subject detected by the position detection sensor.
10. The inspection device of any one of claims 6 to 9,
the following mechanism causes the examination unit to follow a movement locus of an examination target portion of the subject.
11. The inspection apparatus according to any one of claims 6 to 10,
the examination unit examines the subject using X-rays.
12. The inspection apparatus according to any one of claims 6 to 10,
the examination unit examines the subject using ultrasonic waves.
13. The inspection device of any one of claims 6 to 10,
the inspection unit inspects the subject using infrared rays.
14. The inspection device of any one of claims 6 to 10,
the inspection unit inspects the subject using near infrared rays.
15. The inspection device of any one of claims 6 to 10,
the inspection unit inspects the subject by acquiring an image of the subject.
16. The inspection device of any one of claims 6 to 10,
the examination unit examines the subject using magnetic resonance.
CN202210831826.7A 2021-07-20 2022-07-14 Ultrasonic inspection apparatus and inspection apparatus Pending CN115639275A (en)

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JP2021165471A JP2023015965A (en) 2021-07-20 2021-10-07 Ultrasonic inspection device and inspection device
JP2021-165471 2021-10-07

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JP2696135B2 (en) * 1986-09-29 1998-01-14 新明和工業株式会社 Robot scanning control method
JPS6394152A (en) * 1986-10-07 1988-04-25 Shin Meiwa Ind Co Ltd Control method for scanning of robot
JPH02201155A (en) * 1989-01-30 1990-08-09 Motokama Yoshiyuki Non-destructive inspection method and device for agricultural product internal condition
JPH0650944A (en) * 1992-07-31 1994-02-25 Nkk Corp Inspecting apparatus for lap-joint welding part
US6588118B2 (en) * 2001-10-10 2003-07-08 Abb Inc. Non-contact sheet sensing system and related method
JP4696895B2 (en) * 2005-12-20 2011-06-08 Ｊｆｅスチール株式会社 Water column type ultrasonic flaw detector and water column type ultrasonic flaw detection method
JP2008232825A (en) * 2007-03-20 2008-10-02 Matsushita Electric Ind Co Ltd Ultrasonic inspection system
US10578565B2 (en) * 2017-09-11 2020-03-03 The Boeing Company X-ray inspection system for pipes
JP7190154B2 (en) 2018-08-10 2022-12-15 ヤマハファインテック株式会社 ultrasonic inspection equipment
CN111855806B (en) * 2020-08-03 2023-07-21 中国大唐集团科学技术研究院有限公司华中电力试验研究院 Ultrasonic detection method for brazing of generator bridging strands

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