WO2012157466A1

WO2012157466A1 - X-ray inspection apparatus

Info

Publication number: WO2012157466A1
Application number: PCT/JP2012/061740
Authority: WO
Inventors: 佳秀太田
Original assignee: オムロン株式会社
Priority date: 2011-05-13
Filing date: 2012-05-08
Publication date: 2012-11-22
Also published as: JP2012237708A

Abstract

An X-ray inspection apparatus (100) is provided with an X-ray source (2), an X-ray detection unit (3), and a holding mechanism that holds a subject to be inspected, and the X-ray inspection apparatus performs image pickup by applying X-rays to the subject from a plurality of directions, said subject being held by means of the holding mechanism. In the X-ray inspection apparatus (100), a clamp (50) supports a substrate (10) from above. The clamp (50) has the end surface thereof sloped, thereby reliably supporting the substrate (10), and being capable of retracting from an optical path of transmitting light of the X-rays radiated from the X-ray source (2), said optical path being formed due to the substrate (10).

Description

X-ray inspection equipment

The present invention relates to an X-ray inspection apparatus, and more particularly to an X-ray inspection apparatus that inspects an inspection object by generating an X-ray tomographic image.

2. Description of the Related Art Conventionally, inspection apparatuses that inspect industrial products such as substrates using X-rays are known.
For example, Patent Document 1 (Japanese Patent Application Laid-Open No. 2010-160070) discloses an X-ray inspection apparatus including a fixed focus type X-ray source, a detector, and an object moving mechanism. In the X-ray inspection apparatus, the positions of the object and the detector are changed with respect to the X-ray source. Thereby, a detector receives the X-ray which permeate | transmitted the target object with the several irradiation angle. Then, an X-ray CT (Computed Tomography) image of the object is generated by reconstructing images at a plurality of irradiation angles received by the detector.

JP 2010-160070 A

However, in such an inspection apparatus, it is necessary to change the position of the object during the inspection as described above, and therefore it is necessary to hold the inspection object more reliably. Therefore, it is necessary to secure a larger area for holding the object.

On the other hand, in such an inspection apparatus, it is required to make the inspection target area wider. In particular, in the present day when the miniaturization of the device advances, it is assumed that components are mounted on a board in a wider range. For this reason, the request | requirement about expanding the inspection object area | region in a board | substrate is also increasing.

The present invention has been conceived in view of such circumstances, and an object of the present invention is to make it possible to reliably hold an object while widening an inspection object region in an X-ray inspection apparatus.

An X-ray inspection apparatus according to the present invention includes an X-ray source, an X-ray detection unit, and a holding mechanism that holds an inspection target, and irradiates the inspection target held by the holding mechanism from a plurality of directions. This is an X-ray inspection apparatus for imaging with the emitted X-rays. The holding mechanism is configured so that the X-ray source is irradiated with X-rays from one side in the first direction with respect to the inspection target, and an X-ray fluoroscopic image of the inspection target is captured by the X-ray detection unit from the other side. It includes a first member that holds the inspection object and supports the inspection object from one side, and a second member that supports the inspection object from the other side. The first member in the second direction intersecting the first direction and the end surface on the inspection object side of the second member are inspected in the second direction as they are separated from the inspection object in the first direction. It has a slope away from.

Preferably, the second member supports the inspection object continuously or at a plurality of locations in the third direction intersecting with the second direction, and at least a part of the second member supports the inspection object in the third direction. Notches are provided so that the area to be supported is reduced.

Preferably, the second member is fixed to the supporting member extending in the third direction intersecting with the second direction and the supporting member so that the position of the second member can be changed in the third direction. A pressing member for supporting the object by pressing, and the pressing member is located on the other side in the first direction.

According to the present invention, in an X-ray inspection apparatus that irradiates an inspection object with X-rays from one side in the first direction and detects X-rays from the other side, the inspection object of a member that supports the inspection object The shape of the end face on the object side is devised. Specifically, the end face is inclined so as to move away from the inspection object in the second direction as the distance from the inspection object in the first direction increases.

As a result, the X-ray detection unit further supports the X-ray transmitted through the end side of the inspection object in the X-ray detection unit while supporting the inspection object over a long distance by the supporting member in the second direction. Detection is possible without being blocked by the end face. Therefore, in the X-ray inspection apparatus, the inspection object can be reliably held while widening the inspection object region.

It is a figure which shows typically the structure of a part of board | substrate manufacturing line containing the X-ray inspection apparatus which is the 1st Embodiment of this invention. It is a figure for demonstrating schematic structure of the X-ray inspection apparatus of FIG. It is a figure for demonstrating schematic structure of the X-ray inspection apparatus of FIG. It is a figure for demonstrating the structure of the member which supports a board | substrate in a substrate stage. It is a figure for demonstrating the structure of the member which supports a board | substrate in a substrate stage. It is a figure for demonstrating the characteristic of the structure of the clamp of FIG. 5, and a baseplate. It is a figure for demonstrating the characteristic of the structure of the clamp of FIG. 5, and a baseplate. It is a figure for demonstrating the shape of the clamp in the X-ray inspection apparatus of the 2nd Embodiment of this invention. It is a figure for demonstrating the shape of the clamp in the X-ray inspection apparatus of the 3rd Embodiment of this invention. FIG. 10 is a side view of FIG. 9.

Hereinafter, an embodiment of an inspection apparatus of the present invention will be described with reference to the drawings. It should be noted that the same components are denoted by the same reference symbols in the respective drawings, and detailed description thereof will not be repeated.

[First Embodiment]
<Schematic configuration of production line>
FIG. 1 is a diagram schematically showing a partial configuration of a substrate production line including the inspection apparatus according to the present embodiment. In the present embodiment, as an example of the inspection object, a substrate manufactured by the manufacturing line shown in FIG.

Referring to FIG. 1, a production line includes an X-ray inspection apparatus 100 according to an embodiment of the present invention, and an apparatus (adjacent to the upstream side in the production line with respect to X-ray inspection apparatus 100 ( An upstream device 1000) and a device (downstream device 2000) installed adjacent to the downstream side.

The X-ray inspection apparatus 100 includes a conveyor base 90 for transporting a substrate (such as a substrate 10 described later) in the X-ray inspection apparatus 100 and a base plate 91 placed on the conveyor base 90. The base plate 91 includes a belt 92 for feeding the substrate. The X-ray inspection apparatus 100 also includes a clamp 50 that supports the substrate on the belt 92 from above.

In the X-ray inspection apparatus 100, when the conveyor base 90 moves, the substrate conveyed on the conveyor base 90 moves in the X-ray inspection apparatus 100. In FIG. 1, three different positions of the conveyor base 90 are shown as a conveyor base 90, a conveyor base 90A, and a conveyor base 90B. As the conveyor base 90 moves, the base plate 91, the belt 92, and the clamp 50 also move. In FIG. 1,

base plates

91, 91A, 91B,

belts

92, 92A, 92B, and

clamps

50, 50A, 50B are shown in correspondence with the positions of the

conveyor bases

90, 90A, 90B.

In the X-ray inspection apparatus 100, the conveyor base is disposed at the position indicated by the conveyor base 90 at the time of activation, and is disposed at the position indicated by the conveyor base 90A when receiving the substrate conveyed from the upstream apparatus 1000, and the received substrate is inspected. Is disposed at the position indicated by the conveyor base 90B, is disposed at the position indicated by the conveyor base 90B when the substrate after inspection is transferred to the downstream apparatus 2000, and is again conveyed when the next substrate is received from the upstream apparatus 1000. It arrange | positions in the position shown by the base 90A, and the change of the same arrangement | positioning is repeated after that.

The production line includes a transport rail 1001 for transporting a substrate, which is provided between the upstream apparatus 1000 and a conveyor base 90A at a position indicated by reference numeral 90A. The production line also includes a transport rail 2001 for transporting a substrate, which is provided between the conveyor base 90B at the position indicated by reference numeral 90B and the downstream apparatus 2000. In FIG. 1, the substrate 10A is a substrate sent from the upstream device 1000 to the conveyor base 90A in the direction of the arrow R11, and the substrate 10B is disposed on the belt 92A and supported by the clamp 50A from above. The board 10C is a board sent from the belt 92B to the downstream apparatus 2000 through the transport rail 2001 in the direction of the arrow R12.

<Configuration of inspection device>
The X-ray inspection apparatus 100 of the present embodiment is intended for places where appearance inspection is difficult, such as pack fillets formed on IC (Integrated Circuit) leads and solder electrodes constituting a BGA (Ball Grid Array). An X-ray tomographic image is reconstructed and an inspection is performed using the generated tomographic image. In addition, the inspection apparatus according to the present embodiment has a function of generating an X-ray CT image as a tomographic image and a function of generating a tomographic image by tomosynthesis.

2 and 3 are diagrams for explaining a schematic configuration of the X-ray inspection apparatus 100. FIG.
Referring to FIG. 2, an X-ray inspection apparatus 100 is provided above a substrate stage 1 that supports a substrate 10 that is an inspection object, an X-ray source 2 disposed below the substrate stage 1, and the substrate stage 1. The detector stage 4 and the control apparatus 7 which controls operation | movement of the said inspection apparatus are included.

FIG. 2 shows a state in which the component 11 is mounted on the substrate 10. In FIG. 2, some of the components of the transport mechanism for the substrate 10 are omitted. On the other hand, in FIG. 3, the control device 7 is omitted.

The substrate stage 1 has a pair of

conveyors

15A, 15B and

conveyors

15A, 15B that support the substrate 10 at each edge along the length direction (left-right direction in FIG. 2; hereinafter, this is referred to as the X direction). Is provided with a pair of

conveyor support portions

16A and 16B. The

conveyors

15A and 15B receive the board 10 from an upstream mechanism (not shown), carry the board 10 to a position supported by a stopper (clamp 50) provided on the conveyor 15A or the conveyor 15B, and stop. The

conveyors

15A and 15B carry out the substrate 10 to the outside (downstream apparatus 2000) after the support by the stopper is completed.

The

conveyor support portions

16A and 16B are supported so as to be movable in the X and Y directions in FIG. 2 by being driven and controlled by the substrate control mechanism 78 in a state where the

conveyors

15A and 15B are supported. The substrate 10 moves horizontally (moves on a horizontal virtual plane) by the movement of the

conveyor support portions

16A and 16B.

In the X-ray inspection apparatus 100, the clamp 50 is displaced by the substrate control mechanism 78, thereby taking a state of supporting the substrate 20 and a state of releasing the support.

The X-ray inspection apparatus 100 is provided with a slide rail 61 along the X-axis direction and a slide rail 66 along the Y-axis direction as a mechanism for moving the

conveyor support portions

16A and 16B in the X and Y directions in FIG. It has been.

The slide rail 61 is connected to the

conveyor support portions

16A and 16B via the slider 62. The X-ray inspection apparatus 100 is provided with a slide rail (not shown) along the X-axis direction that makes a pair with the slide rail 61. The slide rail is connected to the conveyor support portions 16 A and 16 B via the slider 63.

The slide rail 66 is connected to the

support portions

64 and 65 via a slider 67. The

support parts

64 and 65 are connected to the

sliders

62 and 63. Thereby, the slide rail 66 is connected to the

conveyor support portions

16A and 16B via the slider 67, the

support portions

64 and 65, and the

sliders

62 and 63. Further, the X-ray inspection apparatus 100 is provided with a slide rail (not shown) that is paired with the slide rail 66 along the Y-axis direction and a support portion that connects the slide rail to the

support portions

64 and 65.

In the X-ray inspection apparatus 100, the substrate control mechanism 78 makes a pair with the slider 62, the slider 63, the slider 67, and the slider 67 in order to drive the

conveyor support portions

16A and 16B in the X-axis direction and the Y-axis direction. A slider (not shown) is driven and controlled.

The

conveyor support portions

16A and 16B and the

support portions

64 and 65 in FIG. 2 correspond to the conveyor base 90 in FIG. Further, the

conveyors

15A and 15B in FIG. 2 correspond to the base plate 91 in FIG. Although the shape of the corresponding member is different between FIG. 1 and FIG. 2, these functions are the same.

The detector stage 4 includes a pair of

slide rails

41A and 41B (hereinafter referred to as “Y-

axis rails

41A and 41B”) along the Y-axis direction, and a slide rail 42 along the X-axis direction (hereinafter referred to as “X-axis rail”). 42 "). Each Y-

axis rail

41A, 41B is provided with a pair of sliders 43. Both ends of the X-axis rail 42 are supported by

sliders

43 and 43 of the Y-

axis rails

41A and 41B.

A large slider 45 is provided on the X-axis rail 42. A flat panel detector 3 (hereinafter abbreviated as “FPD3”) is attached to the slider 45 as a two-dimensional X-ray detector via a connecting member 46.

In the X-ray inspection apparatus 100, the large slider 45 is moved in the directions of arrows R3 and R4, and the slider 43 is moved in the directions of arrows R1 and R2.

The X-ray inspection apparatus 100 is further provided with a CCD camera 5 and a displacement sensor 6 for detecting the position of the substrate 10 in the XY plane and the position in the height direction perpendicular to the plane. The detection output of the CCD (Charge Coupled Device) camera 5 is processed by the image processing mechanism 77B, and the detection output of the displacement sensor 6 is processed by the displacement meter control mechanism 77A.

The

sliders

43 and 45 move the FPD 3 when a drive motor (not shown) is driven and controlled by the detector control mechanism 75. Specifically, the FPD 3 moves along the X-axis direction according to the movement of the slider 45 and also moves along the Y-axis direction according to the movement of the slider 43 of the Y-

axis rails

41A and 41B.

The FPD 3 is connected to the control device 7 via a cable (not shown). Similarly, the X-ray source 2, the CCD camera 5, the displacement sensor 6, and the driving units of the

stages

1 and 4 are also cable-connected to the control device 7.

The CCD camera 5 and the displacement sensor 6 are used for the purpose of checking the state of the substrate 10 before inspection. Specifically, the CCD camera 5 images the fiducial mark 19 on the substrate 10 in order to align the substrate 10 at an accurate position. The image generated by this imaging is input to the image processing mechanism 77B of the control device 7, used for measuring the amount of positional deviation of the substrate 10, and the positional relationship between the

stages

1 and 4 is adjusted based on the measured value. The

The displacement sensor 6 measures the distance to the upper surface of the substrate 10. The measured distance data is input to the displacement meter control mechanism 77A of the control device 7, and is used for the purpose of adjusting the height of a reference plane T, which will be described later, at the time of X-ray fluoroscopic imaging.

FIG. 2 also shows a block diagram of the main part of the control device 7 of the X-ray inspection apparatus 100 of the present embodiment.

The control device 7 executes control relating to X-ray fluoroscopic imaging, and also executes tomographic image reconstruction processing and inspection. The control device 7 is configured by, for example, a personal computer in which a dedicated program is installed. The program may be installed in the main storage unit 71 of the control device 7 at the time of shipment, or may be recorded on a recording medium detachable from the control device 7 and installed in the control device 7 as appropriate. Alternatively, it may be downloaded from the server on the network to the control device 7 through the network.

The control device 7 includes a calculation unit 70 including a CPU (Central Processing Unit), an auxiliary storage unit 72 including an auxiliary storage device, an input unit 73 configured to accept input of information from the outside, such as a keyboard and operation buttons, and image information and audio. And an X-ray source control mechanism 79 for controlling the X-ray output operation of the X-ray source 2 and the like.

The arithmetic unit 70 controls the operation of each mechanism such as the detector control mechanism 75, thereby performing X-ray fluoroscopic imaging (projection) on the substrate 10 while variously changing the positional relationship between the X-ray source 2, the FPD 3, and the substrate 10. Execute. The calculation unit 70 also functions to control the operation of the CCD camera 5, the displacement sensor 6, and the conveyors 15 A and 15 B, the function to adjust the position of the substrate 10 based on the input from the CCD camera 5, and the displacement sensor 6. It also has a function of changing the set value of the height of the reference plane T at the time of photographing based on the input from and adjusting the movement amount of the substrate 10 and FPD 3 in accordance with the change.

In the X-ray inspection apparatus 100, as will be described later, a plurality of X-ray fluoroscopic imaging is performed for a plurality of inspection regions of the substrate 10 by changing the position of the FPD 3 for each inspection region. The fluoroscopic images generated by the hourly fluoroscopic imaging are stored in the auxiliary storage unit 72. The calculation unit 70 sets information for identifying the corresponding examination region and the position of the FPD 3 at the time of photographing as additional information in these images, and stores these additional information in the auxiliary storage unit 72 in association with the images. The calculation unit 70 determines the suitability of the part to be inspected of the substrate 10 based on the data obtained by the reconstruction. The determination result is output to an output unit 74 such as a monitor or an external device, for example.

In the X-ray inspection apparatus 100, all or at least a part of the detector control mechanism 75, the image acquisition mechanism 76, the displacement meter control mechanism 77A, the image processing mechanism 77B, the substrate control mechanism 78, and the X-ray source control mechanism 79 are dedicated. Hardware resources (LSI (Large Scale Integration) or the like), or may be realized in software by the arithmetic unit 70 executing a program stored in the main storage unit 71.

FIG. 3 schematically shows the positional relationship between the X-ray source 2, the FPD 3, and the substrate 10 when imaging for tomosynthesis is performed.

FIG. 3 shows a plurality of positions of the FPD 3 where X-ray images are taken when the image acquisition mechanism 76 turns the FPD 3 in the direction of the arrow R0 on the XY plane where the FPD 3 exists. . The plurality of positions include

FPDs

3, 3A, 3B, 3C. When taking an X-ray image of the substrate 10, the position of the FPD 3 sequentially moves along a virtual circle centered on the optical axis of the X-ray source 2. The spherical shape shown in each of the

FPDs

3, 3A, 3B, and 3C in FIG. 3 schematically shows an image of the member mounted on the substrate 10. The turning of the FPD 3 is realized by appropriately moving the large slider 45 in the directions of arrows R3 and R4 and moving the slider 43 in the directions of arrows R1 and R2.

In the X-ray inspection apparatus 100, images taken at a plurality of positions including the

FPDs

3, 3A, 3B, and 3C are appropriately reconstructed to inspect the substrate 10 (whether or not components to be mounted are mounted, etc.) ) Is performed. It should be noted that a known technique (for example, Patent Document 1 (Japanese Patent Laid-Open No. 2010-160070)) may be employed for reconstructing a photographed X-ray image and inspecting the substrate 10 using the reconstructed image. The description is not repeated here because it is possible.

<Configuration of holding mechanism>
As described above, in the X-ray inspection apparatus 100, the substrate 10 on the substrate stage 1 is supported from above by the clamp 50 and is supported from below by the base plate 91. Hereinafter, with reference to FIG. 4 and FIG. 5, the structure of the member that supports the substrate 10 in the substrate stage 1 will be described.

First, referring to FIG. 4, a belt 92 is provided at the end of the base plate 91 on the side in contact with the substrate 10. The belt 92 conveys the substrate 10 by rotating in the conveyance direction of the substrate 10 (left-right direction in FIG. 4).

The clamp 50 is connected to the guide 51. The guide 51 is pivotally supported by a spring shaft 53. A roller 52 is positioned above the guide 51. An air slide table 81 is connected to the roller 52 via a shaft 82. The roller 52 changes its rotational position around the shaft 82 in accordance with the amount of air supplied to the air slide table 81, thereby causing the roller 52 to move in the directions indicated by arrows R21 and R22 in FIG. The position changes.

A spring shaft 83 is connected to the spring shaft 53. A spring 84 is fixed to the spring shaft 83. The spring shaft 83 is urged by a spring 84 in a predetermined rotation direction as will be described later, and the spring shaft 53 connected to the spring shaft 83 and the guide connected to the spring shaft 53. 51 is similarly energized. And the guide 51 is fixed to the position which supports the board | substrate 10 so that it may press toward the downward direction from the upper direction by being pressed by the roller 52 from the upper direction.

FIG. 5 is a diagram showing a state in which each element shown in FIG. 4 is viewed from the side.
In FIG. 5, an arrow R 24 indicates the biasing direction as described above with respect to the spring shaft 53. When the amount of air supplied to the air slide table 81 is changed from the state indicated by the solid line in FIG. 5, the roller 52 rotates in the direction of the arrow R22 and moves to the position indicated by the roller 52X. The clamp 50 and the guide 51 rotate in the direction of the arrow R23 by the biasing of the direction of the arrow R24 with respect to the shaft 53 for use. The clamp 50X and the guide 51X indicate the positions of the clamp and the guide corresponding to the roller 52X.

When the supply amount to the air slide table 81 is adjusted, the roller 52X is rotated in the direction of the arrow R21 and moved to the position indicated by the roller 52. The shaft moves from the position indicated by the guide 51 to the position indicated by the guide 51. Similarly, the clamp fixed to the shaft also moves from the position indicated by the clamp 50X to the position indicated by the clamp 50. Thereby, the clamp 50 fixes the board | substrate 10 so that it may press from upper direction. In the present embodiment, the upper surface of the guide 51 is configured not to be horizontal but to be inclined with respect to the horizontal direction. Accordingly, the guide 51 rotates and moves as described with reference to FIG. 5 due to the displacement caused by the rotation of the roller 52, and thereby the clamp 50 moves up and down.

It should be noted that the method of moving the clamp 50 up and down is not limited to a method using an air syringe that changes the amount of air supplied to the air slide table 81. For example, the motor may be directly moved in the vertical direction. However, as in the present embodiment, it is possible to suppress (avoid) the generation of noise that is considered to be caused by driving the motor by being moved up and down by the air syringe instead of the motor, and thus X It is possible to avoid the line image from being affected by the noise as much as possible.

In the X-ray inspection apparatus 100, when the substrate 10 is fixed to the substrate stage 1, the substrate 10 is supported so as to be pressed by the clamp 50 from above, and is instructed by the base plate 91 from below. In the base plate 91, the belt 92 is mainly in contact with the substrate 10. Then, with the substrate 10 fixed to the substrate stage 1, the conveyor base 90 turns as described with reference to FIG. 1, so that the substrate 10 is X-rayed while being fixed to the conveyor base 90. The inside of the inspection apparatus 100 is turned.

FIG. 6 is a view for explaining the characteristics of the structure of the clamp 50 and the base plate 91.
FIG. 6 shows a state where the substrate 10 is fixed by the clamp 50 and the base plate 91.

In the present embodiment, the X-ray source 2 irradiates the substrate 10 (inspection object) from the lower side in the vertical direction. Then, an X-ray fluoroscopic image of the inspection object is captured from above by the FPD 3 (X-ray detection unit). The inspection object is supported by the clamp 50 from above and supported by the base plate 91 (belt 92) from below. In the present embodiment, the base plate 91 (belt 92) constitutes a first member that supports the inspection object from one side, and the clamp 50 supports the second object that supports the inspection object from the other side. Is configured.

The horizontal end surfaces of the base plate 91 and the clamp 50 are each inclined with respect to the vertical direction. Specifically, as mainly shown in FIG. 6, the end surface of the base plate 91 has an angle of θ2 with respect to the vertical direction, and the end surface of the clamp 50 has an angle of θ1 with respect to the vertical direction. Have an angle. By having such an inclination, the end surface of the base plate 91 is shaped so as to move away from the inspection object in the left-right direction toward the lower side. Moreover, the said end surface of the clamp 50 becomes a shape which leaves | separates from a test target object about the left-right direction, so that an upper side is.

Since the end surface of the clamp 50 has the inclination as described above, the substrate 10 of X-rays (indicated by the symbol XR) emitted from the X-ray source 2 while the clamp 50 reliably supports the substrate 10. It is possible to avoid as much as possible that the transmitted light by is blocked by the clamp 50. Note that an angle θ3 in FIG. 6 is an X-ray irradiation angle of the X-ray source 2.

Further, as shown in FIG. 7, the end surface of the base plate 91 has the inclination as described above, so that the base plate 91 is emitted from the X-ray source 2 while extending the base plate 91 farther in the left-right direction toward the substrate 10 side. That the X-rays are shielded by the base plate 91 can be avoided as much as possible.

As the inclination angle θ1 of the end surface of the clamp 50 increases, the transmitted light that has passed through the end portion of the substrate 10 on the clamp 50 side can be sent to the FPD 3, and the region to be inspected in the substrate 10 can be widened. it can. In addition, it is preferable that inclination | tilt angle (theta) 1 is more than the angle of the half of (theta) 3, for example. Although it is considered that the upper limit is not particularly limited, it is preferable that the upper limit is ensured so that the clamp 50 can sufficiently support (press) the substrate 10.

Similarly, as the inclination angle θ2 of the end surface of the base plate 91 is increased, X-rays can be transmitted to the end portion of the substrate 10 on the base plate 91 side, and a region to be inspected in the substrate 10 is widened. can do. In addition, it is preferable that inclination | tilt angle (theta) 2 is more than the angle of the half of (theta) 3, for example. Although it is considered that the upper limit is not particularly limited, it is preferable that the upper limit is ensured so as to guarantee the strength enough to support the substrate 10.

[Second Embodiment]
Hereinafter, changes in the X-ray inspection apparatus 100 of the present embodiment with respect to the X-ray inspection apparatus 100 of the first embodiment will be mainly described.

FIG. 8 is a diagram for explaining the shape of the clamp in the X-ray inspection apparatus 100 of the present embodiment.

As described above, in the X-ray inspection apparatus 100 according to the first embodiment, the clamp 50 and the base plate 91 have dimensions in the transport direction of the substrate 10 and are surfaces including the transport direction, that is, the Inclination as described with reference to FIG. 6 and FIG. 7 is provided on the end face in the direction intersecting the transport direction. And by providing the said inclination, the board | substrate 10 is hold | maintained (supported) more reliably, and the area | region to be examined is expanded.

In the X-ray inspection apparatus 100 of the present embodiment, as shown in FIG. 8, the clamp 50 is formed with a partially cutout 501 in the transport direction of the substrate 10. Note that the X direction and Y direction in FIG. 8 are the same as the X direction in FIG. 2. That is, the X direction indicates the transport direction of the substrate 10, and the Y direction indicates a direction orthogonal to the transport direction. In the clamp 50 according to the present embodiment, the portion where the notch 501 is formed has a smaller area for supporting the substrate 10 in the Y direction than in other portions in the transport direction (X direction). Thereby, there are fewer regions that block the light irradiated from the X-ray source 2 and transmitted through the substrate 10.

As described above, the inspection target area of the substrate 10 can be further expanded by cutting out a part thereof as in the clamp 50 of the present embodiment.

It should be noted that the ratio at which the notch is formed in the clamp 50 can be appropriately determined within a range in which the clamp 50 can support the substrate 10 with sufficient strength.

[Third Embodiment]
Hereinafter, changes in the X-ray inspection apparatus 100 of the present embodiment with respect to the X-ray inspection apparatus 100 of the first embodiment will be mainly described.

FIG. 9 is a diagram for explaining the shape of the clamp in the X-ray inspection apparatus 100 of the present embodiment. In FIG. 9, the arrow X indicates the transport direction of the substrate 10 as in the X direction of FIG. FIG. 10 is a side view of FIG.

The clamp of the present embodiment includes a rail portion 510, claw portions 511 to 513, and fixing members 511A to 513A instead of the clamp 50 of the first embodiment. The rail portion 510 includes a pair of upper and lower elongated members that extend in the X direction. By fixing the fixing members 511A to 513A to the members, the claw portions 511 to 513 are fixed to the rail portion 510, respectively. In the present embodiment, the claw portions 511 to 513 support the substrate 10 from above.

The fixing position of the claw portions 511 to 513 in the X direction can be changed. That is, by changing the fixing positions of the fixing members 511A to 513A in the respective rail portions 510, the fixing positions of the claw parts 511 to 513 in the X direction can be changed.

By changing the fixing position of the claw portions 511 to 513 in the X direction, the fixing position from above the board 10 can be changed according to the arrangement of components mounted on the board 10.

In recent years, in order to realize flexible, high-mix low-volume production that can respond to changes in the market, diversification of inspection objects is expected. In the X-ray inspection apparatus 100 of the present embodiment, the fixing positions of the claw portions 511 to 513 can be changed according to the type of inspection object. Thereby, the X-ray inspection apparatus 100 of this Embodiment can respond to various test objects.

In this embodiment, the claw portions 511 to 513 constitute a pressing member, and the rail portion 510 constitutes a supporting member.

In FIG. 9, the number of claw portions that support the substrate 10 from above is “3”, but this is an example. As long as the substrate 10 can be supported with sufficient force, the number thereof is changed as appropriate.

Further, the dimensions of each claw portion (particularly, the dimension in the X direction which is the conveyance direction of the substrate 10) are appropriately set as long as the substrate 10 can be supported with sufficient force.

[Other variations]
In each of the embodiments described above, as an example of an X-ray inspection apparatus, an inspection apparatus used for so-called in-line inspection that inspects an inspection object (substrate 10) in a production line is exemplified. Therefore, it is required to transport the inspection object safely and at high speed during the inspection. In the X-ray inspection apparatus of each embodiment, the inspection object can be more stably fixed while ensuring a wider inspection area in the inspection object. However, the X-ray inspection apparatus according to the present invention is not limited to the one used for in-line inspection. The present invention is also intended to be implemented in an X-ray inspection apparatus used independently for a production line.

In each of the embodiments described above, the holding / release of the substrate 10 is changed by moving the clamp 50 that supports the substrate 10 from above as described with reference to FIG. The substrate 10 is held between the clamp 50 and the base plate 91 (belt 92) by being pressed downward from above by the clamp 50.

In addition, the holding | maintenance aspect of the test target object in the inspection apparatus according to this invention is not limited to such an aspect. That is, for example, the inspection object may be pressed and held from below to above. However, when holding the inspection object by pressing the inspection object from the bottom to the top and pressing the inspection object against the lower surface of a separately provided member, the member is damaged by being constantly pushed up from below. It is predicted that In the present embodiment, by pressing and holding the inspection object downward, it is possible to avoid as much as possible the risk of damage to the member as described above.

Further, in each of the embodiments described above, a mechanism (air slide table 81, roller 52, etc.) for changing holding / release of the substrate 10 is provided above the substrate 10 and irradiates the substrate 10 with X-rays. The apparatus (X-ray source 2) which performs is provided in the downward side of the board | substrate 10. FIG. That is, a mechanism for changing holding / release and an X-ray irradiation apparatus are provided on the opposite side with the substrate 10 interposed therebetween. By arranging in this way, the X-ray irradiation apparatus can be brought closer to a position closer to the substrate 10 than when both are provided on the same side with respect to the substrate 10. Thereby, the X-ray inspection apparatus 100 can capture an image with a higher magnification on the substrate 10. Further, when the mechanism is placed with the X-ray irradiation apparatus and the substrate 10 sandwiched therebetween, that is, both are separated as much as possible, the mechanism becomes an X-ray interference material output by the X-ray irradiation apparatus. Can be avoided without fail.

In each embodiment, the first direction corresponds to the vertical direction, the second direction corresponds to the Y direction, and the third direction corresponds to the X direction, but this is merely an example. If the first to third directions intersect with each other, the X-ray irradiation may be performed from the top to the bottom, for example, or may be performed in the horizontal direction.

It should be considered that each embodiment and its modifications disclosed this time are illustrative and not restrictive in all respects. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

In addition, each embodiment and its modified examples are intended to be implemented alone or in combination as appropriate.

1 substrate stage, 2 X-ray source, 3 flat panel detector, 4 detector stage, 5 camera, 6 displacement sensor, 7 control device, 10 substrate, 50 clamp, 70 arithmetic unit, 71 main storage unit, 72 auxiliary storage unit, 73 Input unit, 74 output unit, 75 detector control mechanism, 76 image acquisition mechanism, 77A control mechanism, 77B image processing mechanism, 78 substrate control mechanism, 79 X-ray source control mechanism, 81 air slide table, 82 shaft, 84 spring, 90 Conveyor base, 92 belt, 100 X-ray inspection apparatus, 510 rail section, 511 to 513 claw section, 511A to 513A fixing member, 1000 upstream apparatus, 2000 downstream apparatus.

Claims

An X-ray source (2), an X-ray detector (3), and a holding mechanism that holds an inspection object, and X-rays irradiated from a plurality of directions onto the inspection object held by the holding mechanism An X-ray inspection apparatus (100) for imaging by:
The holding mechanism is
An X-ray is irradiated from the one side in the first direction to the inspection object by the X-ray source (2), and an X-ray fluoroscopic image of the inspection object is taken by the X-ray detection unit (3) from the other side. Hold the object to be inspected,
A first member (91, 92) for supporting the inspection object from the one side, and a second member (50) for supporting the inspection object from the other side,
The end surface on the inspection object side of the first member (91, 92) and the second member (50) in the second direction intersecting with the first direction is the inspection in the first direction. The X-ray inspection apparatus (100) having an inclination such that the further away from the object, the further away from the inspection object in the second direction.
The second member (50) is
For the third direction intersecting the second direction, support the inspection object continuously or at a plurality of locations,
The X-ray inspection apparatus (100) according to claim 1, wherein a cutout is provided so that at least a part of the third direction supports a region to be inspected in the third direction.
The second member (50) is
A support member (510) extending in a third direction intersecting the second direction;
A pressing member (511 to 513) fixed to the supporting member so that the position thereof can be changed in the third direction and supporting the inspection object by pressing,
The X-ray inspection apparatus (100) according to claim 1, wherein the pressing members (511 to 513) are located on the other side in the first direction.