CN115629461A - Gluing method for improving laser damage resistance threshold of gluing cubic energy beam splitter prism - Google Patents

Gluing method for improving laser damage resistance threshold of gluing cubic energy beam splitter prism Download PDF

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Publication number
CN115629461A
CN115629461A CN202211327021.5A CN202211327021A CN115629461A CN 115629461 A CN115629461 A CN 115629461A CN 202211327021 A CN202211327021 A CN 202211327021A CN 115629461 A CN115629461 A CN 115629461A
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China
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prism
cubic
gluing
energy
angle
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Inventor
董莹
胡荣
陈文建
赵兴梅
陈晓磊
刘永强
王慧娜
袁阳
刘星红
韩娟妮
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Xian institute of Applied Optics
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Xian institute of Applied Optics
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Priority to CN202211327021.5A priority Critical patent/CN115629461A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/1805Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for prisms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The invention belongs to the technical field of optical manufacturing processes, and discloses a gluing method for improving the laser damage resistance threshold of a gluing cubic energy beam splitter prism. The method uses Ti 2 O 3 Is a high refractive index thin film material made of SiO 2 An energy light splitting film system is designed on a low-refractive-index film material and is deposited on the inclined plane of the right-angle prism, the gluing cubic energy light splitting prism is prepared in a light glue mode, and the groove where the two right-angle prisms are attached is sealed by epoxy resin glue/photosensitive glue, so that the phenomenon that the laser damage resistance threshold of the gluing cubic energy light splitting prism is low due to poor heat resistance of a glue layer can be eliminated, and the laser damage resistance threshold of the gluing cubic energy light splitting prism is improved. The laser damage resistance threshold of the cemented cubic energy beam splitter prism prepared by the method of the invention exceeds 140MW/cm 2 . The method has universality for the bonding energy light-splitting device of the glass material with the refractive index of 1.46-1.56.

Description

Gluing method for improving laser damage resistance threshold of gluing cubic energy beam splitter prism
Technical Field
The invention belongs to the technical field of optical manufacturing processes, and relates to a gluing method for improving the laser damage resistance threshold of a gluing cubic energy beam splitter prism.
Background
The cemented cubic energy beam splitter prism is a common optical element, and as the energy of a modern Laser system is stronger, the requirement on the Laser-induced Damage Threshold (LIDT) of the cemented cubic energy beam splitter prism is higher, the LIDT of the cemented cubic energy beam splitter prism becomes a main factor restricting the application of the modern high-energy Laser system, and the improvement of the LIDT of the cemented cubic energy beam splitter prism has great significance on Laser energy transmission and a high-energy Laser system.
The preparation of the cemented cubic energy splitting prism comprises two main processes: and (5) optical coating and gluing.
In the traditional gluing cubic energy splitting prism, an energy splitting film is deposited on the inclined plane of a right-angle prism, and an optical adhesive such as epoxy resin adhesive or photosensitive adhesive is used for being glued with the inclined plane of another right-angle prism without a film according to the direction of the cubic prism, so that the gluing cubic energy splitting prism is obtained.
The product performance is investigated, and the temperature resistance range of the GHJ-01 (Z) -type epoxy resin after being completely cured is-60 ℃ to +80 ℃; the temperature resistance range of the NOA 61 (Noland optical adhesive 61) type photosensitive adhesive after being completely cured is-150 ℃ to +125 ℃; the temperature resistant ranges of the epoxy resin glue and the photosensitive glue of other types are basically equivalent.
To SiO 2 Bonding cubic energy of thin film material as low refractive index materialThe LIDT test of the quantitative light splitting prism shows that: after the glued cubic energy beam splitter prism is irradiated by laser, the glue layer can be firstly denatured and invalid due to laser irradiation, so that the glued cubic energy beam splitter prism is damaged, the glued cubic energy beam splitter prism LIDT containing optical bonding glue is mainly determined by the glue layer, and an LIDT test experiment carried out on the optical bonding glue shows that: the LIDT of the epoxy resin glue is not more than 80MW/cm 2 The LIDT of the photosensitive adhesive is not more than 120MW/cm 2 Both smaller than the LIDT of the membrane layer.
Through analysis, the following results are obtained: to improve the LIDT of a cemented cube energy splitting prism one should first start with the glue layer.
And SiO 2 Compared with film materials, all the existing optical adhesives have difference in temperature resistance range, and different optical adhesives have no obvious LIDT performance improvement effect on the glued cubic energy beam splitter prism.
The glueless gluing method is used for preparing the gluing cubic energy beam splitter prism, so that the influence of a glue layer on the gluing cubic energy beam splitter prism LIDT can be fundamentally eliminated.
At present, no report is found on the glueless gluing cubic energy beam splitter prism prepared by a light glue mode.
Disclosure of Invention
Objects of the invention
The purpose of the invention is: aiming at the defect that the traditional cemented cubic energy beam splitter prism LIDT is low, the cementing method for improving the cemented cubic energy beam splitter prism LIDT is provided.
(II) technical scheme
In order to solve the technical problem, the invention provides a gluing method for improving the laser damage resistance threshold of a beam splitter prism, which comprises the following steps:
1) Preparing two 45-degree right-angle prisms A and B made of materials with refractive indexes of 1.46-1.55, wherein the upper surfaces and the lower surfaces of the right-angle prisms A and B are rough surfaces, the right-angle surfaces and the inclined surfaces of the right-angle prisms A and B are polished surfaces, and the inclined surfaces of the right-angle prisms A and B are chamfered at 30-45 degrees.
2) The energy splitting film system is determined according to a conventional optical film design method.
Using conventional optical film design methods with Ti 2 O 3 The film material is high refractive index material, siO 2 The film material is a low refractive index material designed energy light splitting film system, and the last layer of the film system must be SiO 2 Film material, last layer of SiO 2 The thickness of the film material can be arbitrarily selected.
3) And (3) depositing the energy light splitting film system in the step (2) on the inclined surface of the right-angle prism A.
4) And (3) gluing the inclined plane of the right-angle prism A coated with the energy light-splitting film and the inclined plane of the right-angle prism B uncoated according to the direction of the cubic prism by using a photoresist process.
5) And filling the grooves at the joint of the two right-angle prisms with epoxy resin glue or photosensitive glue.
6) And after the filling adhesive layer is completely cured, processing the adhesive layer to be smooth.
(III) advantageous effects
According to the gluing method for improving the laser damage resistance threshold of the gluing cubic energy beam splitter prism, the gluing cubic energy beam splitter prism is prepared by using the optical cement method, so that the influence of a glue layer on the laser damage resistance threshold of the gluing cubic energy beam splitter prism can be eliminated, and the laser damage resistance threshold of the gluing cubic energy beam splitter prism is improved. The LIDT test shows that: the LIDT of the bonding cubic energy light splitting prism prepared by epoxy resin glue is not more than 80MW/cm 2 (ii) a The LIDT of the bonding cubic energy beam splitter prism prepared by the photosensitive adhesive is not more than 120MW/cm 2 (ii) a The LIDT of the cemented cubic energy beam splitter prism prepared by the optical cement method of the invention exceeds 140MW/cm 2 At 140MW/cm 2 ~150MW/cm 2 In the middle of; the method of the invention is suitable for the gluing cubic energy beam splitting prism of the material with the refractive index of 1.46-1.52.
Drawings
FIG. 1 is a schematic diagram of a cemented prism made by the method of the present invention.
Fig. 2 is a 45 deg. right angle prism used for the cemented cube energy splitting prism of the present invention.
FIG. 3 is a simulation curve of transmittance of the cemented cubic energy splitting prism prepared by the method of the present invention.
Detailed Description
In order to make the objects, contents and advantages of the present invention more apparent, the following detailed description of the present invention will be made in conjunction with the accompanying drawings and examples.
The gluing method for improving the laser damage resistance threshold of the beam splitter prism comprises the following steps:
(1) As shown in fig. 2, the two materials are H-K9L, a 45-degree right-angle prism a and a right-angle prism B, both of which are normally polished on right-angle surfaces and inclined surfaces, and the inclined surface of the right-angle prism a and the inclined surface of the right-angle prism B both have an internal chamfer angle of 30-45 degrees.
(2) As shown in FIG. 3, with Ti 2 O 3 The film material is high refractive index material, siO 2 The film material is a low refractive index material, an energy light splitting film of 1000 nm-1100 nm is designed, and the last layer of the energy light splitting film must be SiO 2 Film material, last layer of SiO 2 The thickness of the film material can be arbitrarily selected.
(3) And (3) depositing the energy light splitting film system in the step (2) on the inclined plane of the right-angle prism A.
(4) And gluing the prism A with the inclined surface coated with the energy light splitting film and the prism B with the inclined surface uncoated by using an optical cement mode according to the direction of the cubic prism to form the energy cubic light splitting prism.
(5) And filling the joint of the prism A and the prism B with epoxy resin glue or photosensitive glue.
(6) The glue filling layer is cured and the glue layer is treated to be flush with the upper and lower surfaces of the energy cube prism to produce a cemented prism as shown in figure 1.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims (9)

1. A gluing method for improving the laser damage resistance threshold of a gluing cubic energy beam splitter prism is characterized by comprising the following steps:
step one, designing an energy light splitting film system
Using Ti 2 O 3 The film material is high refractive index material, siO 2 The film material is a low refractive index material, and an energy spectral film system of 1000 nm-1100 nm is designed;
step two, preparing an energy light splitting film
Depositing an energy splitting film in the first step on the inclined plane of the right-angle prism A by using two 45-degree right-angle prisms A and B with polished surfaces, and not coating the right-angle prism B;
step three, preparing the bonding cubic energy beam splitter prism by a photoresist method
Bonding the inclined plane of the right-angle prism A coated with the energy splitting film and the inclined plane of the right-angle prism B uncoated by an optical cement method according to the direction of the cubic prism to prepare a glued cubic prism;
and step four, sealing the edge and finishing the surface.
2. The bonding method for improving the laser damage resistance threshold of the bonded cubic energy splitting prism as claimed in claim 1, wherein in the second step, the right angle prism A and the right angle prism B are all any glass material bonded energy splitting device with the refractive index of 1.46-1.56.
3. The method as claimed in claim 2, wherein the inclined planes of the right-angle prisms a and B have inward 30 ° to 45 ° chamfers.
4. The method as claimed in claim 3, wherein the last layer of the energy splitting film system coated on the inclined plane of the right-angle prism is SiO 2 A film material.
5. The method of claim 4, wherein the straight lines are aligned with a predetermined alignment angle to improve the laser damage threshold of the cemented cube energy splitting prismLast layer of SiO of energy beam splitting film plated on inclined surface of angular prism A 2 The film material is of any thickness.
6. The gluing method for improving the laser damage resistance threshold of the glued cubic energy splitting prism as defined in claim 5, wherein in the fourth step, after the right-angle prism A and the right-angle prism B are fitted, triangular grooves are formed on the upper surface and the lower surface of the formed cubic prism, the grooves are filled with an optical adhesive, the glue is cured, and the redundant glue on the upper surface and the lower surface is corrected and smoothed.
7. The method as claimed in claim 6, wherein the grooves formed by the right-angle prisms A and B are filled with epoxy glue or photosensitive glue.
8. The method as claimed in claim 7, wherein the epoxy glue or photosensitive glue is of any type.
9. Use of the gluing method for improving the laser damage resistance threshold of the glued cubic energy splitting prism according to any one of claims 1 to 8 in the technical field of optical manufacturing processes.
CN202211327021.5A 2022-10-26 2022-10-26 Gluing method for improving laser damage resistance threshold of gluing cubic energy beam splitter prism Pending CN115629461A (en)

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Application Number Priority Date Filing Date Title
CN202211327021.5A CN115629461A (en) 2022-10-26 2022-10-26 Gluing method for improving laser damage resistance threshold of gluing cubic energy beam splitter prism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211327021.5A CN115629461A (en) 2022-10-26 2022-10-26 Gluing method for improving laser damage resistance threshold of gluing cubic energy beam splitter prism

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CN115629461A true CN115629461A (en) 2023-01-20

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