CN110456519A - Polarization beam apparatus and preparation method thereof, polarization beam splitting method - Google Patents
Polarization beam apparatus and preparation method thereof, polarization beam splitting method Download PDFInfo
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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Abstract
A kind of polarization beam apparatus and preparation method thereof, polarization beam splitting method, which includes: two identical Dove prisms, the opposite and symmetrical setting in bottom surface；And multilayer optical film, plating are set between two Dove prisms, to be stacked according to high and low refractive index alternative form；Wherein, it is parallel to the incident light that Dove prism optical axis direction is incident to a Dove prism, suppressed inner total reflection and film interference can be generated at the interface of multilayer optical film to realize polarization spectro after Dove prism transmits, export s, p-component emergent light in parallel from two Dove prisms respectively.The present invention realizes the ultraviolet high polarization extinction ratio to the entire wave band of near infrared band, has the advantages that input, exports symmetrical, can be applied to polarization fiber device.
Description
Technical field
The invention belongs to basic optical Element Technology field more particularly to a kind of polarization beam apparatus and preparation method thereof, partially
Shake beam-splitting method, to feasible from ultraviolet to the broadband of near infrared band, and has high polarization extinction ratio.
Background technique
Polarizer and polarization beam apparatus are all to be widely used in optical instrument, laser, electro-optic displays, optical recorder
Optical element in.Only transmit and use reflected light in polarizer, and transmitted light and reflection in polarization beam apparatus (PBS)
Light no less important.In principle, the Different Effects of any physics and the quadrature component generation to non-polarized light chemically, are ok
Construction as PBS.It is existing to utilize Brewster (Brewster) corner effect, birefringence effect, film interference, light absorption etc.
Phenomenon, which is used alone or in combination, constructs various forms of polarization beam apparatus.Lead both at home and abroad it is to be used have it is following several, respectively
Its feature and disadvantage: 1. birefringent (Birefringent) polarization beam apparatus are listed, based on birefringent and total reflection, is had very
Good performance, bandwidth is all very high to the extinction ratio of reflected light and transmitted light from ultraviolet to near-infrared, the disadvantage is that price is relatively more high
It is expensive, and be limited by size；Wiregrating 2. (Wire grid) polarization beam apparatus, be based on diffraction, bandwidth from infrared to far infrared,
The extinction ratio of transmitted light and reflected light is not high, maximum the disadvantage is that can only be feasible to infrared region；3. film polarizing beamsplitter (Thin
Film plate-cube), it is based on film interference, the disadvantage is that smaller bandwidth.Therefore, for ideal PBS with wide, visual angle is big, right
Reflected light, refraction light have the requirement of High Extinction Ratio, are only met preferably based on birefringent polarization beam apparatus, but its price
Valuableness, it is size-limited.Therefore there are still the demands to high-performance PBS at present.
Summary of the invention
In view of this, the present invention provides a kind of polarization beam apparatus and preparation method thereof, polarization beam splitting method, at least
Solve at least one of above-mentioned technical problem.
As one aspect of the present invention, a kind of polarization beam apparatus is provided, comprising:
Two identical Dove prisms, the opposite and symmetrical setting in bottom surface；And
Multilayer optical film, plating are set between described two Dove prisms, for according to high and low refractive index alternative form heap
It is folded to form；
Wherein, it is parallel to the incident light that Dove prism optical axis direction is incident to a Dove prism, is passed through the Dove prism
Suppressed inner total reflection and film interference can be generated after defeated at the interface of the multilayer optical film to realize polarization spectro,
S, p-component emergent light are exported in parallel from two Dove prisms respectively.
As another aspect of the present invention, a kind of preparation method of polarization beam apparatus as described above is provided, including
Following steps:
Multilayer optical film is divided into two parts, is plated on the bottom surface of two Dove prisms respectively；
The Dove prism bottom surface of two plated films is opposite, the polarization beam apparatus is assembled by glued or bonding technology.
As another aspect of the invention, a kind of polarization beam splitting side using polarization beam apparatus as described above is provided
Method, comprising the following steps:
Light beam is set to be parallel to the optical axis direction of a Dove prism, the light beam incident from the plane of incidence of the Dove prism
It is transmitted at multilayer optical film through the Dove prism, generates at the interface of the multilayer optical film and be all-trans in suppressed
It penetrates and film interference, so that exit face of the p-component by reflection and from the Dove prism, s component is transmitted and from another
The exit face of Dove prism obtains the p-component and s component emergent light for being parallel to the optical axis direction respectively.
As it is still another aspect of the present invention to provide a kind of polarization fiber devices, comprising:
Polarization beam apparatus as described above；
Multiple optical fiber collimators are coupled respectively to the input terminal and output end of the polarization beam apparatus.
Based on the above-mentioned technical proposal, the beneficial effects of the present invention are:
(1) the invention proposes a kind of high performance polarization beam apparatus (PBS), made using Dove prism structure in optics
Incidence angle at film is greater than the angle of total reflection, is based on suppressed inner total reflection and film interference, realizes polarization spectro.
(2) polarization beam apparatus provided by the invention is non-absorbing, broadband, wide-angle, and in reflected light and thoroughly
The high polarization extinction ratio penetrated in light: the ultraviolet polarization extinction ratio to the entire wave band of near infrared band maintain always 1000: 1 with
On, and can achieve 10000: 1 or more in visible and infrared band.
(3) size of polarization beam apparatus provided by the invention is more flexible, has the advantages that input, exports symmetrical, is convenient for
With fiber coupling, polarization fiber device can be applied to.
Detailed description of the invention
Fig. 1 is the composed structure schematic diagram of polarization beam apparatus of the present invention；
Fig. 2 is the membrane structure simplification figure of polarization beam apparatus of the present invention；
Fig. 3 is the part building block of polarization beam apparatus of the present invention；
Fig. 4 is change curve of the 1 transparent substrates refractive index of the embodiment of the present invention with wavelength；
Fig. 5 is 1 high refractive index film refractive index of the embodiment of the present invention with wavelength change curve；
Fig. 6 is 1 low refractive index film refractive index of the embodiment of the present invention with wavelength change curve；
Fig. 7 be in the reflected light of the embodiment of the present invention 1 s component (Rs) with the change curve of wavelength；
Fig. 8 be in the transmitted light of the embodiment of the present invention 1 p-component (Tp) with the change curve of wavelength；
Fig. 9 be 1 Monitoring Thickness of Optical Thin-Film of the embodiment of the present invention occur minor change after Rs with wavelength change curve；
Figure 10 be 1 Monitoring Thickness of Optical Thin-Film of the embodiment of the present invention occur minor change after Tp with wavelength change curve；
Figure 11 is the refractive index curve of 2 high refractive index film of the embodiment of the present invention；
Figure 12 is the Rs of the embodiment of the present invention 2 with wavelength change curve；
Figure 13 is the Tp of the embodiment of the present invention 2 with wavelength change curve；
Figure 14 is the Rs of the embodiment of the present invention 3 with wavelength change curve；
Figure 15 is the Tp of the embodiment of the present invention 3 with wavelength change curve.
In above-mentioned attached drawing, appended drawing reference meaning is as follows:
A- multilayer optical film；B, C-Dove prism；D, E, F- film layer；
The S1- plane of incidence；S2, S3-exit facet.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in further detail.
The present invention provides a kind of polarization beam apparatus and preparation method thereof, polarization beam splitting method, are based on suppressed inner total reflection,
By Dove prism and film interference, conventional limit is broken through, realizes the broadband from ultraviolet near infrared band, and there is height
The polarization beam apparatus of extinction ratio.And the characteristics of having input and output symmetrical, being convenient for fiber coupling.
Fig. 1 is the basic composition schematic diagram of polarization beam apparatus of the present invention.It can be seen that the present invention is using a kind of " Sanming City
Control " structure.Polarization beam apparatus of the invention includes that identical transparent substrates road prestige (Dove) prism B, C and multilayer optical are thin
Film A.The bottom surface Dove prism B, C is opposite and symmetrical setting；Multilayer optical film A plating is set between Dove prism B, C, according to
High and low refractive index alternative form stacks, and "high", " low " represent relatively large between the refractive index of adjacent two layers optical thin film herein
It is small.Light beam is parallel to the incidence of Dove prism optical axis, and after Dove mirror plane of incidence S1 refraction, light beam is deflected to multilayer optical film
The direction A is propagated, and suppressed inner total reflection and film interference is generated at the interface of multilayer optical film A, thus in multilayer optical
The P component of light beam is reflected on film A, and S component transmits, and is finally passed through the refraction of Dove prism exit facet S2, S3 respectively, is obtained
The P component and S component emergent light of Dove prism optical axis must be parallel to.
The Dove prism shape of selection seems the isosceles right-angle prism for being shaved apex angle.The refractive index of Dove prism B, C are situated between
Between the maximum refractive index and lowest refractive index of multilayer optical film A, preferably, the selection of Dove prism should expire as far as possible
FootWherein n0For Dove prism material refractive index, n1、n2The respectively highest of dielectric multi-layer optical thin film
Refractive index and lowest refractive index.Based on this, Dove prism, which needs to choose to shoot high, penetrates rate material, and refractive index n0 is generally greater than
1.7 or more, such as glass of high refractive index, Al2O3, silicon or germanium etc..
Multilayer optical film structure of the invention is made of the dielectric film of multilayer different refractivity, and Fig. 2 is the present invention
The membrane structure simplification figure of polarization beam apparatus, by taking the dielectric film of 2 kinds of different refractivities is staggeredly stacked by refractive index height as an example,
It is only labelled with wherein trilamellar membrane layer in figure, is denoted as film layer D, E, F respectively, wherein film layer D refractive index is n1, and film layer E refractive index is
N2, film layer F refractive index is n1, and meets relationship n1 > n2, and entire film is the alternate structure of this high low-refraction, the number of plies
Generally tens of layers.The refractive index of optical film materials and Dove prism material needs to meet n1 > n0 > n2 condition, thus
Meet suppressed internal reflection condition.It certainly, in other embodiments, can also be thin using the medium of such as 3 kinds different refractivities
Film is staggeredly stacked structure as long as being capable of forming high low-refraction.
After determining optical film materials, Dove prism material (determining refractive index n0, n1, n2) and the number of plies of plated film,
The film thickness of optical thin film can be optimized.Specifically, it is possible, firstly, to arbitrarily assuming one group of film thickness parameter as primary condition
(generally, can choose every tunic thickness is λ/4 as initial parameter), using fresnel formula, takes computer program numerical value
The method of calculating can calculate membrane structure under this group of initial parameter, S, P component transmission of different wave length, reflection coefficient.So
Afterwards, polarization extinction ratio is calculated separately through the S component of each wavelength, the transmission of P component, reflection coefficient, successively by each wavelength
Polarization extinction ratio carries out numerical optimization as optimization aim, to film thickness parameter, can finally obtain every layer of film of meet demand
It is thick.
Due to needing to realize high polarization extinction ratio in very wide wave-length coverage, and the number of plies of film is more, can optimize ginseng
Number is more, it is easier to realize optimization aim.Generally, film layer quantity can be between 10 to 200 layers, and between 50~60, i.e.,
The ultraviolet high polarization extinction ratio to infrared full-wave section can be achieved.
Based on this, be determined that optical film materials, Dove prism material, the number of plies of plated film and thickness are thick, the present invention into
One step provides a kind of preparation method of above-mentioned polarization beam apparatus, includes the following steps:
Multilayer optical film A is divided into two parts, is plated on the bottom surface of two Dove prisms B, C respectively, such as Fig. 3 is formed
Shown in structure；
Then the Dove prism bases of two plated films are opposite, by glued or bonding technology, it is assembled into as shown in Figure 1
Polarization beam apparatus.
Wherein, since the demand of bonding technology, the optical surface type of Dove mirror bottom surface there are certain requirements, generally require reach λ/
10 magnitudes, wherein λ is the typical wavelengths of polarizer work.
Wherein, multilayer optical film is formed symmetrical between two Dove prisms, thus, it is possible to simultaneously to two
Dove prism carries out plated film；For example, in embodiment 1, plating 27 tunics on each Dove mirror, common optics plating membrane material is used
Expect ZrO2、MgF2As film material, the film layer number of entire device is equivalent to 53 layers.
Polarization beam apparatus of the invention can allow entire device input and output symmetrical, become the device that horizontal direction two goes out into two
Part, convenient for application.For example, can be applied to polarize by the input of addition optical fiber collimator coupled polarization beam splitter, output end
Optical fibre device.
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Embodiment 1
The high-performance PBS of (350nm-1800nm) from ultraviolet band near infrared band.The Dove rib of two bottom surface plated films
Mirror is assembled into a component using optical cement or gluing technique.Two bottom surfaces need optical cement, therefore machined surface type in the subsequent process
Precision needs are relatively high, reach λ/10, other transparent surfaces such as the plane of incidence, exit facet and top surface reach λ/4.Two trapezoidal
Face is opaque, therefore without the requirement of face type.The base material of Dove prism is Al2O3.The Dove prism of the present embodiment is using typical
Size, the long 44.94mm in bottom surface, width 12.7mm, the long 19.54mm in top surface, width 12.7mm, the height between bottom surface and top surface are
12.7mm can be zoomed in and out proportionally to changing size according to demand practical application is various.The size is directed to Al2O3Substrate
The approximate midpoint for reaching bottom surface after reflecting of the directional light from the incidence of trapezoidal hypotenuse midpoint can be made to be reflected and be reflected.
Dove prism Al2O3Refractive index n0 is with wavelength change curve as shown in figure 4, the high refractive index film n1 of optical thin film makes
It is ZrO2, that low refractive index film n2 is MgF2, the refractive index curve of the two is shown in Fig. 5 and Fig. 6.Select these three materials
The reason is that their refractive index can be covered from ultraviolet to infrared band, and meet n1 > n0 > n2.It is calculated by numerical value, optimization
Film thickness parameter list afterwards is shown in Table 1.Can see is the interlaced structure of high low-refraction.Pay attention to listing in table is to every
Block Al2O3Dove prism carries out totally 27 layers of parameter of plated film.Since outermost layer uses after the Dove prism of two pieces of plated films is connected
Be ZrO2, actually share 53 layer films.Using fresnel formula, by Dove Refractive Index of Glass Prism, the folding of every layer of optical thin film
It penetrates rate and film thickness brings formula into, the method for taking computer program numerical value to calculate calculates transmission matrix, can finally obtain leakage point
Variation of the amount with wavelength, i.e. Fig. 7, Fig. 8, P component (Tp) light is bent with wavelength change in S component (Rs) and refraction light in reflected light
Line.From leakage component curve on, it can be seen that in the range of 350nm to 1800nm polarization extinction ratio can reach 1000: 1 with
On.Consider in practical coating process that, there may be error, Fig. 9, Figure 10 are to add the mistake of [- 0.5,0.5] nm in every tunic thickness
The result of Rs and Tp after difference, it can be seen that even if coating process existing defects, still can keep very high delustring in all band
Than.
Table 1
Embodiment 2
If with Ta2O5Substitute ZrO2As high refractive index substance, this gives corresponding filming parameters.Ta2O5Folding
The rate curve of penetrating is shown in that Figure 11, Figure 12 and Figure 13 are using Ta2O5As high refractive index film Rs and Tp with wavelength variation.Wherein
Initial refers to that the film thickness still according to embodiment 1 before, optimized refer to according to Ta2O5Refractive index carry out film thickness optimization
Result afterwards.Film thickness after optimization is as shown in table 2.
Table 2
Embodiment 3
In the high-performance PBS of near infrared band (780nm-3000nm), Al is remained as using Dove prism2O3, optical thin film
High refractive index film be ZrO2, low refractive index film is MgF2.It still include 53 layer films.Rs and Tp after optimization with wavelength change
Change curve and see Figure 14,15, film thickness is shown in Table 3.As Figure 14,15 can be seen that effect of the PBS in near-infrared of this structure of the present invention
Very well, extinction ratio can maintain 10000: 1 in all band.
Table 3
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
Describe in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in protection of the invention
Within the scope of.
Claims (10)
1. a kind of polarization beam apparatus, comprising:
Two identical Dove prisms, the opposite and symmetrical setting in bottom surface；And
Multilayer optical film, plating be set to described two Dove prisms between, for according to high and low refractive index alternative form stack and
At；
Wherein, it is parallel to the incident light that Dove prism optical axis direction is incident to a Dove prism, after Dove prism transmission
Suppressed inner total reflection and film interference can be generated at the interface of the multilayer optical film to realize polarization spectro, respectively
S, p-component emergent light are exported in parallel from two Dove prisms.
2. polarization beam apparatus according to claim 1, which is characterized in that the refractive index of the Dove prism is between multilayer optical
Between the maximum refractive index and lowest refractive index for learning film；
Preferably,Wherein n0For Dove prism Refractive Index of Material, n1、n2Respectively multilayer is situated between
The maximum refractive index and lowest refractive index of matter film.
3. polarization beam apparatus according to claim 1, which is characterized in that the bottom surface of the Dove prism is to reach the amount of λ/10
The optical surface type of grade, wherein λ is the typical wavelengths of polarizer work.
4. polarization beam apparatus according to claim 1, which is characterized in that the multilayer optical film includes 2 to 3 kinds of differences
The membrane material of refractive index, film layer number is between 10 to 200 layers.
5. polarization beam apparatus according to claim 1, which is characterized in that the multilayer optical film is in two Dove prisms
Between formed it is symmetrical.
6. polarization beam apparatus according to claim 1, it is characterised in that:
The material that the Dove prism is selected is glass, Al2O3, silicon or germanium；
The material that the multilayer optical film is selected is ZrO2/MgF2、Ta2O5/MgF2、ZrO2/SiO2Or Ta2O5/SiO2。
7. a kind of preparation method of such as polarization beam apparatus as claimed in any one of claims 1 to 6, comprising the following steps:
Multilayer optical film is divided into two parts, is plated on the bottom surface of two Dove prisms respectively；
The Dove prism bottom surface of two plated films is opposite, the polarization beam apparatus is assembled by glued or bonding technology.
8. preparation method according to claim 7, which is characterized in that the preparation method further includes to the multilayer optical
The step of film thickness of film optimizes, specifically:
According to the film layer number of the refractive index of optical film materials, the refractive index of Dove prism material and optical thin film, pass through phenanthrene
Nie Er formula calculates separately s, the transmission of p-component, reflection coefficient；
Polarization extinction ratio is calculated by the s, the transmission of p-component, reflection coefficient, is optimization aim to multilayer optical using polarization extinction ratio
The film thickness for learning film optimizes.
9. a kind of polarization beam splitting method using such as polarization beam apparatus as claimed in any one of claims 1 to 6, including following step
It is rapid:
Light beam is set to be parallel to the optical axis direction of a Dove prism, incident from the plane of incidence of the Dove prism, the light beam is through institute
Dove prism is stated to be transmitted at multilayer optical film, generated at the interface of the multilayer optical film suppressed inner total reflection and
Film interference, so that exit face of the p-component by reflection and from the Dove prism, s component is transmitted and from another road prestige
The exit face of prism obtains the p-component and s component emergent light for being parallel to the optical axis direction respectively.
10. a kind of polarization fiber device, comprising:
Such as polarization beam apparatus as claimed in any one of claims 1 to 6；
Multiple optical fiber collimators are coupled respectively to the input terminal and output end of the polarization beam apparatus.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110989184A (en) * | 2019-12-19 | 2020-04-10 | 华中科技大学 | Spatial light modulator based on frustrated total internal reflection |
| CN114114703A (en) * | 2021-12-10 | 2022-03-01 | 中国科学院光电技术研究所 | All-dielectric depolarization beam splitter prism suitable for wide-angle incidence and preparation method thereof |
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| CN1632643A (en) * | 2005-01-10 | 2005-06-29 | 中国科学院上海光学精密机械研究所 | Method for manufacturing wide-angle wide-spectrum polarization beam splitting film |
| CN103713395A (en) * | 2014-01-15 | 2014-04-09 | 福建福特科光电股份有限公司 | Infrared depolarization beamsplitting device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6229648B1 (en) * | 1998-04-06 | 2001-05-08 | Unic View Ltd. | Compact projector |
| CN1632643A (en) * | 2005-01-10 | 2005-06-29 | 中国科学院上海光学精密机械研究所 | Method for manufacturing wide-angle wide-spectrum polarization beam splitting film |
| CN103713395A (en) * | 2014-01-15 | 2014-04-09 | 福建福特科光电股份有限公司 | Infrared depolarization beamsplitting device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110989184A (en) * | 2019-12-19 | 2020-04-10 | 华中科技大学 | Spatial light modulator based on frustrated total internal reflection |
| CN114114703A (en) * | 2021-12-10 | 2022-03-01 | 中国科学院光电技术研究所 | All-dielectric depolarization beam splitter prism suitable for wide-angle incidence and preparation method thereof |
| CN114114703B (en) * | 2021-12-10 | 2023-10-03 | 中国科学院光电技术研究所 | All-dielectric depolarization beam splitter prism suitable for wide-angle incidence and preparation method thereof |
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