CN209342954U - A kind of antireflective coating that can eliminate ghost in large angle incidence optical imagery - Google Patents

A kind of antireflective coating that can eliminate ghost in large angle incidence optical imagery Download PDF

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CN209342954U
CN209342954U CN201822209747.4U CN201822209747U CN209342954U CN 209342954 U CN209342954 U CN 209342954U CN 201822209747 U CN201822209747 U CN 201822209747U CN 209342954 U CN209342954 U CN 209342954U
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refractive index
layer
antireflective coating
low
high refractive
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何晓虎
闫涛
王超
刘峰
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Jiangxi Phenix Optical Technology Co Ltd
CETHIK Group Ltd
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Jiangxi Phenix Optical Technology Co Ltd
CETHIK Group Ltd
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Abstract

The utility model discloses a kind of antireflective coatings that can eliminate ghost in large angle incidence optical imagery, antireflective coating is disposed on the substrate, antireflective coating includes N number of alternating structure stacked by low-index film and high refractive index layer, the low-index film of the latter alternating structure is stacked on the high refractive index layer of previous alternating structure, the top of N number of alternating structure has stacked gradually one layer of high refractive index layer and one layer of low-index film formation base structure, antireflective coating further includes the middle refractive index film layer being arranged between any two adjacent film layers of the foundation structure.The antireflective coating of the utility model still meets antiradar reflectivity required by lens design in large angle incidence, mitigates the ghost phenomenon even being eliminated in camera lens.

Description

A kind of antireflective coating that can eliminate ghost in large angle incidence optical imagery
Technical field
The utility model belongs to antireflective coating technical field, and in particular to a kind of to eliminate in large angle incidence optical imagery The antireflective coating of ghost.
Background technique
In the optical path of optical instrument, the interface that several light pass through always is had.When light propagation, a light transmission is often encountered Face, some total light is reflected, to influence transmission effects.The reflection on this optical element surface can produce in optical system Raw two serious consequences: the first, the loss of light energy reduces the brightness of picture;The second, each surface is multiple inside optical system Reflection and caused by stray light, stray light finally can also reach image planes, the contrast of picture is caused to reduce, and resolution ratio declines.It is opposite and It says, consequence caused by second of effect is more serious.In order to reduce above two effect, often plated on the surface of optical element suitable When anti-reflection film, to improve the transmission performance of optical element.
Currently on the market the camera lens of visible camera and various digital products nearly all use plated film lens, and according to The type for needing institute's film plating layer of actual conditions is slightly different, and in the type of many film plating layers, most common is antireflective film.
When general consideration plating antireflective film, all assume that incident film surface is vertical incidence (being 0 ° of incidence relative to normal), The transmitance for calculating whole group camera lens is also to account for from 0 ° of incident angle according to the transmitance in camera lens optical axis area.In reality Border is in use, in general incident angle is considered within the scope of 0 ° ± 15 ° by 0 ° of incidence without too big problem, but due to mesh Preceding various digital image devices require stringent, the design of camera lens increasingly elaborate to image quality, use mirror surface it is extremely recessed or The place of the extremely convex eyeglass of person is also more and more, in the case that eyeglass is extremely recessed or extremely convex, will necessarily generate the big angle of light Condition of incidence is spent, if at this moment considering will result in certain deviation also according to 0 ° of incidence.
Due to the physical characteristic of optical thin film, for the light of different angle incidence, plated film curve will appear shift phenomenon, Incident angle is bigger, deviates also bigger.This is because as incident angle is gradually increased to close to polarizing angle, S polarized light and P Polarised light is gradually disengaged, and reflected light becomes linearly polarized light from partial poolarized light, especially when light is with brewster angle incidence, instead Penetrating light becomes S polarized light, i.e. (complete) polarised light.
As shown in Fig. 1 (left side), it is available light (i.e. non-polarized light), available light vibrates in all directions as seen from the figure is It is equally distributed;And as shown in Fig. 1 (right side), it is (complete) polarised light, as seen from the figure, the same Ray Of Light of (complete) polarised light is all It vibrates in the same direction, the separation of S polarized light P-polarized light at this time reaches maximum, and the curve of spectrum of film is caused seriously to deviate The curve of design.
As shown in Figure 2, Figure 3, Figure 4,0 ° of incidence angle, 15 ° of incidence angles and 40 ° of incidence angles are simulated on TFCalc software.It will The simulated light spectrogram of three kinds of different incidence angles compares as can be seen that after incidence angle increases, and S polarized light and P-polarized light are divided From the reflectivity curve of AR film deviates design, and antireflective effect is deteriorated, and the probability for ghost occur so as to cause camera lens becomes larger.
The case where most of AR films do not consider large angle incidence in design in the prior art, so as to cause optics Anti-reflection effect of the eyeglass in large angle incidence is deteriorated, and the reflection light and stray light inside entire camera lens is increased, to make It is imaged in image planes at unwanted light, generates dazzle or ghost, reduce image quality.
So wide-angle antireflective film is contemplated that depolarization when designing, for isotropism film, in oblique incidence condition The change of its lower equivalent bit phase thickness and optical admittance be it is intrinsic, therefore, the design of the design of depolarized film than polarization film Increasingly complex, up to the present there are no fully effective design methods.
Existing improved technology first is that using multilayer birefringent film, realize under oblique incidence condition in visible-range The design of interior broadband depolarization anti-reflection film, single axial birefringence plural layers of the design using optical axis perpendicular to the plane of incidence are realized Under oblique incidence condition in visible-range antireflective film depolarization.But this method design it is complex, Coating Materials used compared with To be rare, and available types are less.
Existing another improved technology is to realize broad-angle-incident to relatively narrow wave band, but transmitance is not highly desirable.
Utility model content
The utility model provides a kind of antireflective coating that can eliminate ghost in large angle incidence optical imagery, the antireflective coating Still meet antiradar reflectivity required by lens design in large angle incidence, mitigates the ghost phenomenon even being eliminated in camera lens.
To achieve the above object, technical solution adopted in the utility model are as follows:
A kind of antireflective coating that can eliminate ghost in large angle incidence optical imagery, the antireflective coating are arranged in substrate On, the antireflective coating includes N number of alternating structure stacked by low-index film and high refractive index layer, and the latter is alternately tied The low-index film of structure is stacked on the high refractive index layer of previous alternating structure, the top of N number of alternating structure One layer of high refractive index layer and one layer of low-index film formation base structure are stacked gradually, the antireflective coating further includes setting Set the middle refractive index film layer between any two adjacent film layers of the foundation structure.
Preferably, the antireflective coating include the low-index film being sequentially stacked on substrate, high refractive index layer, Middle refractive index film layer, low-index film, middle refractive index film layer, high refractive index layer, low-index film, high refractive index Film layer, low-index film, high refractive index layer, middle refractive index film layer, high refractive index layer and low-index film.
Preferably, the thickness of each film layer being sequentially stacked on substrate is respectively by adjacent substrates side 9.71nm、29.02nm、19.69nm、17.92nm、10.47nm、16.25nm、131.65nm、12.43nm、45.97nm、 75.15nm、1.99nm、56.16nm、104.25nm。
Preferably, the substrate is optical element.
Preferably, the high refractive index layer includes in lanthanium titanate, titanium oxide, zirconium oxide, tantalum oxide and niobium oxide It is one or more.
Preferably, the middle refractive index film layer includes one of aluminium oxide and cerium fluoride or a variety of.
Preferably, the low-index film includes one of magnesium fluoride, silica and aluminum fluoride or a variety of.
The antireflective coating provided by the utility model that ghost in large angle incidence optical imagery can be eliminated, will be big in design The situation of angle incidence is as Consideration, so that S polarized light and P-polarized light do not deviate by too far, reality in large angle incidence Still meet the light splitting requirement of eyeglass when existing large angle incidence, meet the required antiradar reflectivity of design, mitigation even is eliminated mirror Ghost phenomenon in head promotes the clarity for shooting photo significantly, and the improvement of image quality is clearly.
Detailed description of the invention
Fig. 1 is the schematic diagram of non-polarized light and (complete) polarised light;
Fig. 2 be light with 0 ° of incidence when simulated light spectrogram;
Fig. 3 be light with 15 ° of incidence when simulated light spectrogram;
Fig. 4 be light with 40 ° of incidence when simulated light spectrogram;
Fig. 5 is the structural schematic diagram of the antireflective coating of the utility model;
The schematic diagram that Fig. 6 changes for the reflectivity of S component and P component with incidence angle;
Fig. 7 be light with 0 °, 20 °, the antireflective coating of the utility model is passed through in 40 ° of incidences when simulated light spectrogram;
Fig. 8 is to measure light after eyeglass plates the antireflective coating of the utility model with 0 °, 20 °, 40 ° of incident spectrograms;
Fig. 9 is the initial image of certain camera lens;
Figure 10 plates the image after the antireflective coating of the utility model for certain camera lens.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model It clearly and completely describes, it is clear that described embodiment is only the utility model a part of the embodiment, rather than whole realities Apply example.Based on the embodiments of the present invention, those of ordinary skill in the art institute without making creative work The every other embodiment obtained, fall within the protection scope of the utility model.
It should be noted that when component be referred to as with another component " connection " when, it can directly with another component It connects or there may also be components placed in the middle.Unless otherwise defined, all technical and scientific terms used herein with The meaning that is generally understood by a person skilled in the technical field of the present invention is identical.Herein in the explanation of the utility model It is not to be to limit the utility model that term used in book, which is only for the purpose of describing specific embodiments,.
A kind of antireflective coating that can eliminate ghost in large angle incidence optical imagery, antireflective coating are disposed on the substrate, should Antireflective coating includes the low-index film being alternately stacked, middle refractive index film layer and high refractive index layer.The alternating heap It is folded to be interpreted as antireflective coating and be carried out by low-index film, middle refractive index film layer and these three film layers of high refractive index layer It stacks, is not related to concrete mode, quantity and the order stacked.
Specifically, antireflective coating includes N number of alternating structure stacked by low-index film and high refractive index layer, and after The low-index film of one alternating structure is stacked on the high refractive index layer of previous alternating structure, N number of alternating structure The top has stacked gradually one layer of high refractive index layer and one layer of low-index film formation base structure.
Ideal anti-reflective effect in order to obtain needs to advanced optimize film layer in foundation structure, therefore centre is rolled over The rate film layer of penetrating is arranged between any two adjacent film layers of foundation structure.I.e. middle refractive index film layer is added according to optimization Add, middle refractive index film layer can be set between two high refractive index layers, and middle refractive index film layer also can be set in low folding It penetrates between rate film layer and high refractive index layer, and the quantity of middle refractive index film layer is 0 layer, 1 layer or multilayer.It is intermediate by setting The quantity of refractivity film layer and position, the thickness for each film layer of step section of going forward side by side, reach the antireflective coating of the present embodiment at 80 ° Field angle, i.e., incidence angle from 0 ° to 40 ° in the range of, maximum residual reflectivity is in 0.5% design object below.
When carrying out Film Design, usually used supervisory wavelength is 550nm, and in the base of 1/4 supervisory wavelength thickness The thickness of each film layer is adjusted on plinth by coefficient a.Each film layer used a when adjusting thickness can be it is identical, can also be with It is different.And after thicknesses of layers is adjusted, the too small corresponding film layer of thicknesses of layers is deleted on demand.It needs to illustrate It is, when adjusting each thicknesses of layers, generally to use simulation softward, the value of a is accordingly adjusted on the basis of simulation softward operation, Determine the thickness of each film layer, finally to reach the design object of antireflective coating.The use of simulation softward is not that the utility model changes Into emphasis, no longer repeated herein.
As shown in figure 5, a kind of structure of antireflective coating is as follows in the present embodiment: the antireflective coating includes being sequentially laminated on base Low-index film 2, high refractive index layer 3, middle refractive index film layer 4, low-index film 5, middle refractive index film on plate 1 Layer 6, high refractive index layer 7, low-index film 8, high refractive index layer 9, low-index film 10, high refractive index layer 11, Middle refractive index film layer 12, high refractive index layer 13 and low-index film 14.
The antireflective coating of the present embodiment is good to the anti-reflective effect of light, and in order to further increase effect, the present embodiment Middle each layer of setting all has corresponding film thickness.For example, in the present embodiment be arranged low-index film 2 with a thickness of 9.71nm, High refractive index layer 3 with a thickness of 29.02nm, the thickness with a thickness of 19.69nm, low-index film 5 of middle refractive index film layer 4 Degree be 17.92nm, middle refractive index film layer 6 with a thickness of 10.47nm, high refractive index layer 7 with a thickness of 16.25nm, low folding Penetrate rate film layer 8 with a thickness of 131.65nm, high refractive index layer 9 with a thickness of 12.43nm, low-index film 10 with a thickness of 45.97nm, high refractive index layer 11 with a thickness of 75.15nm, middle refractive index film layer 12 with a thickness of 1.99nm, high refractive index Film layer 13 with a thickness of 56.16nm, low-index film 14 with a thickness of 104.25nm.
Wherein, the material of substrate can be optical element, and optical element refers to that any one is used to form optical path, optics or with The related instrument of optics, device, object.Such as: lens, optical fiber, plane mirror, grating, optoisolator, beam splitter, grating etc..
In layers of material selection, not only need to consider the stability of physical property and chemical property, it is also necessary to consider light Transmitance.Under the comprehensively considering of each factor, the material of high refractive index layer includes but is not limited to following refractive index n > 2 (refractive index is for lanthanium titanate (refractive index 2.1), titanium oxide (refractive index 2.35), zirconium oxide (refractive index 2.05), tantalum oxide And one of niobium oxide (refractive index 2.3) or a variety of 2.25).
The material of middle refractive index film layer includes but is not limited to the aluminium oxide (refractive index that following refractive index is 1.5≤n≤2 1.63) and one of cerium fluoride (refractive index 1.63) or a variety of for.
The material of low-index film include but is not limited to following refractive index n < 1.5 magnesium fluoride (refractive index 1.38), One of silica (refractive index 1.46) and aluminum fluoride (refractive index 1.35) are a variety of.
Due to the polarization separation of P light, S light in wide-angle, cause under light normal incidence by reasonable The membrane system of design, in the case where oblique incidence, due to the effective thickness of film layer is thinning and the P light of film layer and S light it is saturating It crosses rate to deviate to two different directions, thus causes the transmittance curve value of entire membrane system to be far longer than after being averaged and wanted The value asked, the transmittance curve in entire spectral region are all decreased obviously.
The antireflective coating of the present embodiment considers the factor of depolarization, so that still meeting eyeglass in large angle incidence Light splitting requires, to obtain preferable imaging effect.
It further, is θ with light0It is illustrated for angle is incident.
When light is with θ0When angle incidence, film layer is different to the effective refractive index (admittance value) of S component and P component, deposits In η p=n/cos θ, η s=ncos θ, each optically thin effective film of layer is thinning, since reflectivity R (transmissivity T) is refraction The function of rate n, the difference of two group component admittance values, causing whole group membrane system R, T, there are polarization separation Δ n:
As shown in Fig. 6 (a), if light is with θ0When angle incidence passes through air and glass, wherein n1For air, n2For glass BK7, and n1<n2.As seen from the figure, the reflectivity R of S componentSIt is θ0Increasing function, the reflectivity R of P componentPWith θ0Increase Increase after falling before.
Work as RPWhen being zero, reflected light is only left RS, angle, θ at this timeBReferred to as Brewster's angle.When light and cloth scholar this When special angle incidence, reflected light is mutually perpendicular to refraction light.
As shown in Fig. 6 (b), if light is with θ0When angle incidence passes through air and glass, wherein n1For glass BK7, n2For sky Gas, and n1>n2.As seen from the figure, the reflectivity R of S componentSIt is θ0Increasing function, the reflectivity R of P componentPWith θ0Increase it is first Increase after decline.
RPEqually in θBPlace is zero, but θ at this timeBLess than the θ in Fig. 6 (a)BValue.
And work as RSAnd RPReflectivity when being 100%, be referred to as totally reflected, angle at this time is θC, referred to as critical angle, then
Using the antireflective coating of the present embodiment, spectrogram of the light with 0 °, 20 °, 40 ° of incidence when is simulated in TFC software, Whether observation antireflective coating meets design requirement: in the case where wavelength is 420~700nm, maximum reflectivity Rmax≤ 0.5%.
Analog result meets design requirement as shown in fig. 7, when light is with 0 ° of incidence;When light is with 20 ° of incidence, satisfaction is set Meter requires;Angle of incidence of light increases to 40 °, wavelength be 400~700nm within the scope of reflectivity still 0.5% hereinafter, Show that the antireflective coating of the present embodiment meets design requirement.
Under the premise of analog result meets design requirement, further practical survey is carried out to the antireflective coating of the present embodiment Examination.
Test process is as follows: the antireflective coating of the present embodiment being plated on eyeglass, after successively having plated each film layer, is surveyed respectively Measure light with 0 °, 20 °, 40 ° of incidence when light map, observation antireflective coating whether meet design requirement: wavelength be 420~ Under 700nm, maximum reflectivity Rmax≤ 0.5%.
For actual test result as shown in figure 8, when light is with 0 °, 20 °, 40 ° of incidence, reflectivity is all satisfied design requirement.
The antireflective coating of the present embodiment in light vertical incidence or has certain angle it can be seen from testing twice above When incident, reflectivity can reach design requirement, and reflectivity is low, to improve imaging effect.
Further, in order to directly compare imaging effect, more intuitively to reflect the present embodiment antireflective coating Effect.Using certain camera lens as test object, reflectivity mistake of the camera lens due to the face R1 of the first eyeglass and the face R2 of the second eyeglass There is the case where fraction defective is 100% so as to cause the camera lens in height.
The case where field angle is 80 ° or so of position, includes large angle incidence due to eyeglass, and in large angle incidence Local reflectivity it is excessively high, cause light enter it is rear it is reflective form red ghost, while effect of taking pictures is unintelligible, initially at As effect as shown in figure 9, it is ghost that circle, which irises out the imaging of position, in figure, the ghost is red in colour imaging figure.
After the antireflective coating for plating the present embodiment on the camera lens, equally shot 80 ° of field angle or so of position, imaging Effect is as shown in Figure 10.As seen from the figure, it is thin out to iris out the ghost in the imaging of position for circle, disappears substantially on view, in coloured silk Ghost becomes pale from original red in color imaging, and the solar flare in imaging also completely removes.
The imaging effect of comparison diagram 9 and Figure 10, it can be seen that the shooting photo after plating the antireflective coating of the present embodiment Clarity is substantially improved, and also very name is obvious for the improvement of image quality.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not present Contradiction all should be considered as described in this specification.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed, But it cannot be understood as the limitations to utility model patent range.It should be pointed out that for the common skill of this field For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to The protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.

Claims (7)

1. a kind of antireflective coating that can eliminate ghost in large angle incidence optical imagery, the antireflective coating are disposed on the substrate, It is characterized in that, the antireflective coating includes N number of alternating structure stacked by low-index film and high refractive index layer, it is latter The low-index film of a alternating structure is stacked on the high refractive index layer of previous alternating structure, N number of alternating structure The top stacked gradually one layer of high refractive index layer and one layer of low-index film formation base structure, the antireflective coating It further include the middle refractive index film layer being arranged between any two adjacent film layers of the foundation structure.
2. the antireflective coating of ghost in large angle incidence optical imagery can be eliminated as described in claim 1, which is characterized in that institute Stating antireflective coating includes the low-index film being sequentially stacked on substrate, high refractive index layer, middle refractive index film layer, low folding Penetrate rate film layer, middle refractive index film layer, high refractive index layer, low-index film, high refractive index layer, low-index film, High refractive index layer, middle refractive index film layer, high refractive index layer and low-index film.
3. the antireflective coating of ghost in large angle incidence optical imagery can be eliminated as claimed in claim 2, which is characterized in that institute State the thickness of each film layer being sequentially stacked on substrate be respectively by adjacent substrates side 9.71nm, 29.02nm, 19.69nm, 17.92nm、10.47nm、16.25nm、131.65nm、12.43nm、45.97nm、75.15nm、1.99nm、56.16nm、 104.25nm。
4. the antireflective coating of ghost in large angle incidence optical imagery can be eliminated as described in claim 1, which is characterized in that institute Stating substrate is optical element.
5. the antireflective coating of ghost in large angle incidence optical imagery can be eliminated as described in claim 1, which is characterized in that institute Stating high refractive index layer includes one of lanthanium titanate, titanium oxide, zirconium oxide, tantalum oxide and niobium oxide or a variety of.
6. the antireflective coating of ghost in large angle incidence optical imagery can be eliminated as described in claim 1, which is characterized in that institute It includes one of aluminium oxide and cerium fluoride or a variety of for stating middle refractive index film layer.
7. the antireflective coating of ghost in large angle incidence optical imagery can be eliminated as described in claim 1, which is characterized in that institute Stating low-index film includes one of magnesium fluoride, silica and aluminum fluoride or a variety of.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111812762A (en) * 2020-07-16 2020-10-23 杭州美迪凯光电科技股份有限公司 Infrared cut-off filter for improving glare ghost phenomenon and preparation method thereof
CN112130232A (en) * 2020-09-25 2020-12-25 厦门美澜光电科技有限公司 Lens capable of improving color contrast and preparation method thereof
WO2022052268A1 (en) * 2020-09-14 2022-03-17 诚瑞光学(深圳)有限公司 Lens and lens assembly

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111812762A (en) * 2020-07-16 2020-10-23 杭州美迪凯光电科技股份有限公司 Infrared cut-off filter for improving glare ghost phenomenon and preparation method thereof
WO2022052268A1 (en) * 2020-09-14 2022-03-17 诚瑞光学(深圳)有限公司 Lens and lens assembly
CN112130232A (en) * 2020-09-25 2020-12-25 厦门美澜光电科技有限公司 Lens capable of improving color contrast and preparation method thereof

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