CN102411213A - Manufacturing method of prismatic polarizing beam splitter - Google Patents
Manufacturing method of prismatic polarizing beam splitter Download PDFInfo
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- CN102411213A CN102411213A CN2010102939302A CN201010293930A CN102411213A CN 102411213 A CN102411213 A CN 102411213A CN 2010102939302 A CN2010102939302 A CN 2010102939302A CN 201010293930 A CN201010293930 A CN 201010293930A CN 102411213 A CN102411213 A CN 102411213A
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- beam splitter
- polarizing beam
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Abstract
The invention relates to a manufacturing method of a prismatic polarizing beam splitter. The method comprises the following steps that: two optical glass prisms are selected; one luminous surface of each of the optical glass prism is plated with a polarizing light splitting film pile, wherein the two polarizing light splitting film piles on the surfaces of the optical glass prisms are completely same; And the two optical glass prisms plated with the polarizing light splitting film piles are combined together. According to the invention, a mode that symmetrical polarizing light splitting membrane piles are plated on two optical glass prisms is employed during the manufacturing process of the prismatic polarizing beam splitter, so that the complex film plating process is simplified and the processing is simple as well as the requirement on film plating equipment is low; and costs are low and batch process production is realized.
Description
Technical field
The present invention relates to the manufacturing field of optical element, relate in particular to a kind of method for making of lens type polarizing beam splitter.
Background technology
Polarizing beam splitter is that incident light is separated into transmitted light and the catoptrical optical element with orthogonal plane of polarization, and it can be used for various types of optical systems, for example: be applied in the Projection Display.
Existing lens type polarizing beam splitter composes cubic shaped by two right angle trigonometry prisms; Therebetween on the surface of contact; Be that plating polarization spectro membrane stack constitutes polarization light-dividing surface on the diagonal plane of polarizing beam splitter, this polarization light-dividing surface can reflect the S linearly polarized light and see through the P linearly polarized light.Its preparation method normally utilizes coating process to be coated with the medium polarization spectro membrane stack of multilayer therein on optical glass prism, through the glue-line (not shown) two prisms is glued together again, becomes a complete polarization splitting prism.Yet this method needs the disposable polarization spectro membrane stack that is coated with multilayer, complex process, and cost is high, and is high to the requirement of filming equipment, is difficult to realize large-scale batch process.
Summary of the invention
In view of this, must provide a kind of processing simple, cost is low, can realize the method for making of the lens type polarizing beam splitter that batch machining is produced.
Goal of the invention of the present invention realizes through following technical scheme:
A kind of method for making of lens type polarizing beam splitter may further comprise the steps: choose two optical glass prisms; One of them logical optical surface at said two optical glass prisms plates identical polarization spectro membrane stack respectively; Two glass prisms that are coated with the polarization spectro membrane stack are combined.
Lens type polarizing beam splitter of the present invention, the mode of the polarization spectro membrane stack through plating symmetry on two optical glass prisms is simplified complicated coating process, processing is simple, to filming equipment require lowly, cost is low, can realize batch machining production.
Description of drawings
In order to be easy to explanation, the present invention is done to describe in detail by following preferred embodiment and accompanying drawing.
Fig. 1 is the process flow diagram of the method for making of lens type polarizing beam splitter of the present invention.
Fig. 2 is the refinement process flow diagram of step S103 one embodiment among Fig. 1 of the present invention.
Fig. 3 is the refinement process flow diagram of another embodiment of step S103 among Fig. 1 of the present invention.
Fig. 4 is the synoptic diagram according to the spatial structure of the lens type polarizing beam splitter of an embodiment of the inventive method making.
Fig. 5 is the synoptic diagram according to the spatial structure of the lens type polarizing beam splitter of another embodiment of the inventive method making.
Fig. 6 is the curve map of the relation of the transmitance of lens type polarizing beam splitter of the present invention and wavelength.
Embodiment
Shown in Figure 1 is the process flow diagram of the method for making of lens type polarizing beam splitter of the present invention.At step S101, choose two optical glass prisms.In the embodiment of the present invention, the structure of two optical glass prisms is identical, and in the embodiment, two optical glass prisms are the right-angle triangle prism.
At step S102, plate symmetrical polarization spectro membrane stack, promptly plate identical polarization spectro membrane stack at one of them logical optical surfaces of two optical glass prisms respectively.In the embodiment of the present invention, the polarization spectro membrane stack was plated on respectively on the inclined-plane of right-angle triangle prism by range upon range of composition of titanium dioxide, aluminium oxide and silica material of different-thickness.
At step S103, integrate, be about to two glass prisms that are coated with the polarization spectro membrane stack and combine, be made into the lens type polarizing beam splitter.
In addition, in the embodiment of the present invention, between step S102 and S103, also carry out following steps: the plating anti-reflection film, promptly respectively at the logical optical surface plating of other of two optical glass prisms anti-reflection film.
In embodiment of the present invention, the step of plating anti-reflection film can also be carried out before the symmetrical polarization spectro membrane stack of plating.In a word, before integrating two glass prisms, two glass prisms need be carried out the step of plating anti-reflection film and the symmetrical polarization spectro membrane stack of plating.
Fig. 2 is the refinement process flow diagram of step S103 one embodiment among Fig. 1 of the present invention.At step S1031, near, the two polarization spectro membrane stacks that are about on the glass prism abut against together in opposite directions.At step S1032, bonding is fixing, promptly through on the surface of glass prism the bonding thin sheet glass fix.In the embodiment of the present invention, thin sheet glass is bonded in the upper and lower surface of two glass prisms usually, and its size and dimension is unrestricted, as long as make two glass prisms ability fixed to one another.Lens type polarizing beam splitter by this method made can be consulted Fig. 4.
Fig. 3 is the refinement process flow diagram of another embodiment of step S103 among Fig. 1 of the present invention.At step S1031 ', apply the in-depth optical cement, promptly on the polarization spectro membrane stack, apply the in-depth optical cement.In the embodiment of the present invention, the in-depth optical cement can be coated on the two polarization spectro membrane stacks, perhaps is coated on the polarization spectro membrane stack of one of them.
At step S1032 ', exert pressure, boning is one, is about to two glass prisms and exerts pressure in opposite directions, through the in-depth optical cement two polarization spectro membrane stacks bonding is one.
At step S1033 ', heating makes the volatilization of in-depth optical cement, i.e. heating is bonded in the glass prism of one, makes in-depth optical cement volatilization wherein.In the embodiment of the present invention, after the volatilization of in-depth optical cement, two polarization beam splitters push away tightly being combined as a whole.
Lens type polarizing beam splitter by this method made can be consulted Fig. 5.
Consulting Fig. 4, is the synoptic diagram of spatial structure of the lens type polarizing beam splitter of the embodiment made according to the inventive method.This lens type polarizing beam splitter comprises two optical glass prisms 10,11, and is arranged on two optical glass prisms 10, the polarization light-dividing surface between 11 20.Polarization light-dividing surface 20 in the embodiment of the present invention is made up of the two polarization spectro membrane stacks 201,202 that are symmetrically distributed; This polarization light-dividing surface 20 separates into incident light transmitted light and the reflected light with orthogonal plane of polarization; Or reflection S polarized light, transmission P polarized light.Its film structure is consulted table 1.
Table 1
| Layer | Material | Thickness (nm) | Layer | Material | Thickness (nm) |
| 1 | TIO2 | 118.97 | 19 | TIO2 | 158.41 |
| 2 | AL2O3 | 95.62 | 20 | AL2O3 | 204.88 |
| 3 | TIO2 | 69.54 | 21 | TIO2 | 69.87 |
| 4 | AL2O3 | 204.94 | 22 | SIO2 | 141.19 |
| 5 | TIO2 | 74.51 | 23 | TIO2 | 23.28 |
| 6 | AL2O3 | 114.85 | 24 | SIO2 | 134.28 |
| 7 | TIO2 | 66.77 | 25 | TIO2 | 54.99 |
| 8 | SIO2 | 155.38 | 26 | SIO2 | 189.68 |
| 9 | TIO2 | 117.06 | 27 | TIO2 | 117.06 |
| 10 | SIO2 | 189.68 | 28 | SIO2 | 155.38 |
| 11 | TIO2 | 54.99 | 29 | TIO2 | 66.77 |
| 12 | SIO2 | 134.28 | 30 | AL2O3 | 114.85 |
| 13 | TIO2 | 23.28 | 31 | TIO2 | 74.52 |
| 14 | SIO2 | 141.19 | 32 | AL2O3 | 204.94 |
| 15 | TIO2 | 69.87 | 33 | TIO2 | 69.54 |
| 16 | AL2O3 | 204.88 | 34 | AL2O3 | 95.61 |
| 17 | TIO2 | 158.41 | 35 | TIO2 | 118.97 |
| 18 | SIO2 | 116.03 |
With 35 layers be example, polarization light-dividing surface 20 is made up of the polarization spectro membrane stack 202 half the, the 19th layer to 35 layers of 201,18 layers of the 1st layer to 17 layers, 18 layers half the polarization spectro membrane stacks.As shown in table 1; The 1st layer to 17 layers, the 19th layer to 35 layers material and thickness all are symmetrical the 18th layer of both sides that are distributed in; And when actual fabrication; The 18th layer is to be plated in the 17th layer and the 19th laminar surface after dividing half-and-half respectively, is bonded and fixed at together through thin sheet glass 30 afterwards, is made into the lens type polarizing beam splitter.According to this design, can obtain curve map as shown in Figure 6.Consult Fig. 6, be the curve map of the relation of the transmitance of lens type polarizing beam splitter of the present invention and wavelength.Wherein, on behalf of light beam, P, S incide the curve map of polarization light-dividing surface 20 with 45 ° of incident angles.Can know that by figure for the transmissivity average out between P polarized light 450nm～630nm more than 85%, and the transmissivity average out between S polarized light 450nm～630nm is below 0.5%, the ideal value near 0%.
In addition; The refractive index of the titanium dioxide in the table 1 and the relation of wavelength are consulted table 2-1; The refractive index of aluminium oxide and the relation of wavelength are consulted table 2-2, and the refractive index of monox and the relation of wavelength are consulted table 2-3, and the relation of the refractive index of optical glass of the present invention (substrate) and wavelength is consulted table 2-4.
The refractive index of table 2-1 titanium dioxide and the relation of wavelength
| Wavelength (nm) | Refractive index | Wavelength (nm) | Refractive index |
| 420 | 2.532 | 720 | 2.284 |
| 440 | 2.481 | 740 | 2.280 |
| 460 | 2.443 | 760 | 2.276 |
| 480 | 2.414 | 780 | 2.272 |
| 500 | 2.391 | 800 | 2.269 |
| 520 | 2.372 | 820 | 2.266 |
| 540 | 2.357 | 840 | 2.263 |
| 560 | 2.344 | 860 | 2.261 |
| 580 | 2.332 | 880 | 2.258 |
| 600 | 2.323 | 900 | 2.256 |
| 620 | 2.314 | 920 | 2.254 |
| 640 | 2.307 | 940 | 2.252 |
| 660 | 2.300 | 960 | 2.250 |
| 680 | 2.294 | 980 | 2.248 |
| 700 | 2.289 | 1000 | 2.246 |
The refractive index of table 2-2 aluminium oxide and the relation of wavelength
| Wavelength (nm) | Refractive index | Wavelength (nm) | Refractive index |
| 380 | 1.666 | 600 | 1.632 |
| 400 | 1.659 | 620 | 1.631 |
| 420 | 1.653 | 640 | 1.630 |
| 440 | 1.649 | 660 | 1.630 |
| 460 | 1.645 | 680 | 1.629 |
| 480 | 1.642 | 700 | 1.628 |
| 500 | 1.640 | 720 | 1.628 |
| 520 | 1.638 | 740 | 1.628 |
| 540 | 1.636 | 760 | 1.627 |
| 560 | 1.635 | 780 | 1.627 |
| 580 | 1.633 | 800 | 1.626 |
The refractive index of table 2-3 monox and the relation of wavelength
| Wavelength (nm) | Refractive index | Wavelength (nm) | Refractive index |
| 300 | 1.520 | 600 | 1.473 |
| 350 | 1.498 | 650 | 1.471 |
| 400 | 1.485 | 700 | 1.470 |
| 420 | 1.482 | 750 | 1.469 |
| 440 | 1.481 | 800 | 1.468 |
| 450 | 1.480 | 900 | 1.466 |
| 500 | 1.477 | 1000 | 1.465 |
| 550 | 1.475 | 1100 | 1.464 |
| 580 | 1.474 | 1200 | 1.464 |
The refractive index of table 2-4 optical glass (substrate) and the relation of wavelength
Fig. 5 is the synoptic diagram according to the spatial structure of the lens type polarizing beam splitter of another embodiment of the inventive method making.This lens type polarizing beam splitter and structure shown in Figure 4 are basic identical; Difference is that lens type polarizing beam splitter shown in Figure 5 is when making; Two polarization spectro membrane stacks 201 ', 202 ' are that the optical cement both sides are deepened in symmetrical being distributed in; So, omitted thin sheet glass, and two polarization spectro membrane stacks 201 ', 202 ' are combined as a whole tightly still.
Therefore, lens type polarizing beam splitter of the present invention, the mode of the polarization spectro membrane stack through plating symmetry on two optical glass prisms is simplified complicated coating process, processing is simple, to filming equipment require lowly, cost is low, can realize batch machining production.
The embodiment of the above is the preferred embodiments of invention; Be not to limit practical implementation scope of the present invention with this; Scope of the present invention comprises and is not limited to this embodiment, and all shapes according to the present invention, the equivalence that structure is done change and all comprise in protection scope of the present invention.
Claims (8)
1. the method for making of a lens type polarizing beam splitter is characterized in that, may further comprise the steps:
Choose two optical glass prisms;
One of them logical optical surface at said two optical glass prisms plates identical polarization spectro membrane stack respectively;
Two glass prisms that are coated with the polarization spectro membrane stack are combined.
2. the method for making of lens type polarizing beam splitter according to claim 1 is characterized in that, the said step that two glass prisms that are coated with the polarization spectro membrane stack are combined may further comprise the steps:
Two polarization spectro membrane stacks on the glass prism are abutted against together in opposite directions; And
Through on the surface of glass prism the bonding thin sheet glass fix.
3. the method for making of lens type polarizing beam splitter according to claim 1 is characterized in that, the said step that two glass prisms that are coated with the polarization spectro membrane stack are combined may further comprise the steps:
On said polarization spectro membrane stack, apply the in-depth optical cement;
Two glass prisms are exerted pressure in opposite directions, two polarization spectro membrane stacks bonding is one through the in-depth optical cement; And
Heating is bonded in the glass prism of one, makes in-depth optical cement volatilization wherein.
4. the method for making of lens type polarizing beam splitter according to claim 3 is characterized in that, said in-depth optical cement is coated in respectively on the two polarization spectro membrane stacks, perhaps is coated on the polarization spectro membrane stack of one of them.
5. the method for making of lens type polarizing beam splitter according to claim 1 is characterized in that, and is further comprising the steps of:
Other logical optical surface at said two optical glass prisms plates anti-reflection film respectively.
6. according to the method for making of any described lens type polarizing beam splitter of claim 1 to 5, it is characterized in that said polarization spectro membrane stack is by range upon range of composition of titanium dioxide, aluminium oxide and silica material of different-thickness.
7. according to the method for making of any described lens type polarizing beam splitter of claim 1 to 5, it is characterized in that the structure of said two optical glass prisms is identical.
8. the method for making of lens type polarizing beam splitter according to claim 7 is characterized in that, said two optical glass prisms are the right-angle triangle prism, and said polarization spectro membrane stack is plated on respectively on the inclined-plane of right-angle triangle prism.
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| CN2010102939302A CN102411213A (en) | 2010-09-20 | 2010-09-20 | Manufacturing method of prismatic polarizing beam splitter |
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| CN2010102939302A CN102411213A (en) | 2010-09-20 | 2010-09-20 | Manufacturing method of prismatic polarizing beam splitter |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109445120A (en) * | 2018-11-30 | 2019-03-08 | 河南平原光电有限公司 | A kind of polarization spectroscope production method of interference stopping lightscreening plate structure |
| CN112394531A (en) * | 2020-11-25 | 2021-02-23 | 中国科学院微电子研究所 | Polarization beam splitting prism capable of reducing optical path difference |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5969861A (en) * | 1994-02-07 | 1999-10-19 | Nikon Corporation | Polarizing optical system |
| CN1361436A (en) * | 2000-12-28 | 2002-07-31 | 云南大学 | Making process of polarizing and beam splitting prism |
| CN1791815A (en) * | 2003-05-16 | 2006-06-21 | 3M创新有限公司 | Polarizing beam splitter and projection systems using the polarizing beam splitter |
| CN201314976Y (en) * | 2008-11-13 | 2009-09-23 | 福建华科光电有限公司 | Color mixed polarizing prism |
| CN101625431A (en) * | 2009-08-13 | 2010-01-13 | 福州光诚光电有限公司 | Method for producing novel high-power polarization splitting prism |
-
2010
- 2010-09-20 CN CN2010102939302A patent/CN102411213A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5969861A (en) * | 1994-02-07 | 1999-10-19 | Nikon Corporation | Polarizing optical system |
| CN1361436A (en) * | 2000-12-28 | 2002-07-31 | 云南大学 | Making process of polarizing and beam splitting prism |
| CN1791815A (en) * | 2003-05-16 | 2006-06-21 | 3M创新有限公司 | Polarizing beam splitter and projection systems using the polarizing beam splitter |
| CN201314976Y (en) * | 2008-11-13 | 2009-09-23 | 福建华科光电有限公司 | Color mixed polarizing prism |
| CN101625431A (en) * | 2009-08-13 | 2010-01-13 | 福州光诚光电有限公司 | Method for producing novel high-power polarization splitting prism |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109445120A (en) * | 2018-11-30 | 2019-03-08 | 河南平原光电有限公司 | A kind of polarization spectroscope production method of interference stopping lightscreening plate structure |
| CN112394531A (en) * | 2020-11-25 | 2021-02-23 | 中国科学院微电子研究所 | Polarization beam splitting prism capable of reducing optical path difference |
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Address after: Cui Jing Road Shenzhen City, Guangdong province 518118 Pingshan New District No. 35 No. 1 Building 6 East Applicant after: Butterfly Technology (Shenzhen) Limited Address before: 518057, Guangdong, Nanshan District hi tech Industrial Park, Shenzhen District North West Road, No. 5, Galaxy Fengyun building, 3 floor Applicant before: Butterfly Technology (Shenzhen) Limited |
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Application publication date: 20120411 |