CN109116461A - A kind of DUV wide spectrum is without the glue polarizer - Google Patents
A kind of DUV wide spectrum is without the glue polarizer Download PDFInfo
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- CN109116461A CN109116461A CN201811103430.0A CN201811103430A CN109116461A CN 109116461 A CN109116461 A CN 109116461A CN 201811103430 A CN201811103430 A CN 201811103430A CN 109116461 A CN109116461 A CN 109116461A
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- China
- Prior art keywords
- glue
- bbo
- polarizer
- duv
- bbo crystal
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3083—Birefringent or phase retarding elements
Abstract
The present invention relates to a kind of DUV wide spectrums without the glue polarizer, including the first bbo crystal, the second bbo crystal and the intermediate-index layer that two bbo crystal joint places are arranged in；The bbo crystal is cut by certain angle, and the optical axis of bbo crystal is parallel to incident light surface, and the optical axis of two panels BBO is parallel to each other；The intermediate-index layer respectively with two bbo crystal optical contants.The present invention is operable between wavelength 220nm-1000nm, and polarised light extinction ratio is greater than 30dB.
Description
Technical field
The present invention relates to polarizer design field, especially a kind of DUV wide spectrum is without the glue polarizer.
Background technique
With the development of Modern Optics Technology, various polarizing devices apply more and more, common polarizing devices
There is Glan-Thomson, Glan-Taylor, Glan-laser, the polarizing device of glass mould and plastics base, glass mould and plastic device disappear
Light ratio difference, it is poor to the resistivity of high power laser light and ultraviolet light, and the crystalline material that Glan prism generallys use has YVO4Or
Natural Iceland spar composition, although can work in very wide wave-length coverage as between 400nm-2000nm, due to material spy
Property, it is poor less than 350nm or less light transmission in ultraviolet band, restricted from ultraviolet band is applied to, although also having based on BBO
The Glan prism of material, but be typically only capable to reach in one section of wave-length coverage of ultraviolet very little, having no can be used in 220nm-
The Glan prism of 1000nm range.
Summary of the invention
In view of this, the purpose of the present invention is to propose to a kind of DUV wide spectrums without the glue polarizer, it is operable with wavelength 220nm-
Between 1000nm, polarised light extinction ratio is greater than 30dB.
The present invention is realized using following scheme: a kind of DUV wide spectrum is without the glue polarizer, including the first bbo crystal, second
Bbo crystal and the intermediate-index layer that two bbo crystal joint places are set；The bbo crystal is cut by certain angle,
And the optical axis of bbo crystal is parallel to incident light surface, and the optical axis of two panels BBO is parallel to each other；The intermediate-index layer difference
With two bbo crystal optical contants.
Preferably, guaranteeing that deep ultraviolet has good light transmission without organic matter glue between two bbo crystals of the invention.
Further, the intermediate-index layer uses SiO2Material, Mgf2Material or fused quartz glass material, light transmission
Wave band is 215nm-2000nm.
Further, the intermediate-index layer is SiO2Film layer or Mgf2Film layer.
Further, the intermediate-index layer fused quartz glass layer good using deep ultraviolet through performance, transmission region
From 215nm-2000nm；The fused quartz glass layer with a thickness of 1-10000um.
Further, incident interface o light total reflection of the DUV wide spectrum without the glue polarizer, e light transmission, light are incident
Angle is 62.48 degree of -64.37 degree, i.e., prism cutting angle is 27.52 degree of -25.63 degree, and wherein transmission region is 220nm-
1000nm, transmitance are greater than 50%, and extinction ratio is 1000:1 between wavelength 220nm-970nm.
Further, the bbo crystal uses α-BBO material or β-BBO material, transmission region 215nm-
2000nm。
Further, uv-curable glue or heat cure are used after the intermediate-index layer and two bbo crystal optical contants
Glue sealing, so that optical cement interface and air insulated, while the bond strength between this auxiliary glue enhancing two panels.
Further, the face that first bbo crystal is contacted with the second bbo crystal with air, is coated with the SiO of single layer2Film,
Mgf2The composite multilayer membrane of film or both composition, realizes the broadband anti-reflection film from 215nm-1000nm.
Particularly, the present invention is narrow-minded in vacuum condition or air conditions decentralization, does not pollute to optical surface.
Preferably, the present invention uses BBO, ultraviolet fused quartz glass or Mgf2Crystal makes 220nm-970nm optical polarization
The polarizer.Polarizer type is Glan-Thomson, and BBO is optical birefringence crystal, with traditional CaCO3,YVO4Compared at DUV sections
With translucency, while having biggish o light e optical index poor.BBO is designed as triangular prism, cutting angle is taken to make just
BBO and fused quartz or other optical materials interface o light total reflection, e light transmission, while with second piece of same BBO Prism compensation
The e light deflection of light due to caused by refraction by prism.Binderless binding technology is used between two pieces of prisms, a piece of UV grade of optical cement melts
Quartz glass, full optical path use spectral transmission in the full spectrum of 220nm-970nm without organic composition glue.
Compared with prior art, the invention has the following beneficial effects: the operation wavelength of the polarizer of the present invention is in 220nm-
Between 970nm, polarised light extinction ratio is greater than 30dB.
Detailed description of the invention
Fig. 1 is structural representation Fig. 1 of the embodiment of the present invention.
Fig. 2 is structural representation Fig. 2 of the embodiment of the present invention.
Fig. 3 is BBO of the embodiment of the present invention and fused quartz glass refractive index schematic diagram.
Fig. 4 is o light and e light total reflection angle schematic diagram of BBO of the embodiment of the present invention material relative to melting quartz glass.
Fig. 5 is the surface BBO of embodiment of the present invention Mgf2 single layer anti reflective coating reflectivity schematic diagram.
Fig. 6 is DUV of embodiment of the present invention wide spectrum without glue polarizer o light transmission rate schematic diagram.
Fig. 7 is DUV of embodiment of the present invention wide spectrum without glue polarizer e light transmission rate schematic diagram.
Fig. 8 is DUV of embodiment of the present invention wide spectrum without glue polarizer extinction ratio schematic diagram.
Specific embodiment
The present invention will be further described with reference to the accompanying drawings and embodiments.
It is noted that described further below be all exemplary, it is intended to provide further instruction to the application.Unless another
It indicates, all technical and scientific terms used herein has usual with the application person of an ordinary skill in the technical field
The identical meanings of understanding.
It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singular
Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet
Include " when, indicate existing characteristics, step, operation, device, component and/or their combination.
A kind of DUV wide spectrum is present embodiments provided without the glue polarizer, including the first bbo crystal, the second bbo crystal, with
And the intermediate-index layer of two bbo crystal joint places is set；The bbo crystal is cut by certain angle, and bbo crystal
Optical axis be parallel to incident light surface, the optical axis of two panels BBO is parallel to each other；The intermediate-index layer respectively with two BBO crystalline substances
Body optical contant.
Preferably, guaranteeing that deep ultraviolet has good light transmission without organic matter glue between two bbo crystals of the invention.
In the present embodiment, the intermediate-index layer uses SiO2Material, Mgf2Material or fused quartz glass material,
Transmission region is 215nm-2000nm.
In the present embodiment, the intermediate-index layer is SiO2Film layer or Mgf2Film layer.
In the present embodiment, the intermediate-index layer fused quartz glass layer good using deep ultraviolet through performance, light transmission
Wave band is from 215nm-2000nm；The fused quartz glass layer with a thickness of 1-10000um.
In the present embodiment, incident interface o light total reflection of the DUV wide spectrum without the glue polarizer, e light transmission, light
Incident angle is 62.48 degree of -64.37 degree, i.e. prism cutting angle is 27.52 degree of -25.63 degree, and wherein transmission region is
220nm-1000nm, transmitance is greater than 50%, extinction ratio > 1000:1, operation wavelength 220nm-970nm.
In the present embodiment, the bbo crystal uses α-BBO material or β-BBO material, transmission region 215nm-
2000nm。
In the present embodiment, uv-curable glue or heat are used after the intermediate-index layer and two bbo crystal optical contants
Solidification glue sealing, so that optical cement interface and air insulated, while the bond strength between this auxiliary glue enhancing two panels.
In the present embodiment, the face that first bbo crystal is contacted with the second bbo crystal with air, is coated with single layer
SiO2Film, Mgf2The composite multilayer membrane of film or both composition, realizes the broadband anti-reflection film from 215nm-1000nm.
Particularly, the present embodiment is narrow-minded in vacuum condition or air conditions decentralization, does not pollute to optical surface.
Preferably, the present invention uses BBO, ultraviolet fused quartz glass or Mgf2Crystal makes 220nm-970nm optical polarization
The polarizer.Polarizer type is Glan-Thomson, and BBO is optical birefringence crystal, with traditional CaCO3,YVO4Compared at DUV sections
With translucency, while having biggish o light e optical index poor.BBO is designed as triangular prism, cutting angle is taken to make just
BBO and fused quartz or other optical materials interface o light total reflection, e light transmission, while with second piece of same BBO Prism compensation
The e light deflection of light due to caused by refraction by prism.Binderless binding technology is used between two pieces of prisms, a piece of UV grade of optical cement melts
Quartz glass, full optical path use spectral transmission in the full spectrum of 220nm-970nm without organic composition glue.
Particularly, in the present embodiment, optical axis is parallel to each other between first bbo crystal optical axis and second bbo crystal
As shown in Figure 1, the optical axis between two panels BBO is parallel to each other, it is parallel with the plane of incidence to can be used optical axis, the normal direction side on incident inclined-plane
Into the plane formed with light transmission direction, as shown in Figure 1；Or using on optical axis and incident inclined-plane with normal orientation and light
Transmission direction forms unilateral vertical, as shown in Figure 2.It therebetween is the good fused quartz glass of UV transmission；BBO and molten stone
It is combined between English glass using optical cement.
In framework shown in Fig. 1, non-polarized light enters crystal, and (polarization state is perpendicular to incident light and light for o light on interface
The plane of axis composition) it is reflected, go out to project crystal from side；E light penetrates interface, and into other one piece of crystal, radiation direction is mended
It repays to original parallel direction, polarization state is parallel with optical axis direction.
Similarly shown in 2 in framework, polarization state and optical axis direction exiting parallel, perpendicular to plane of incidence.
In the present embodiment, BBO has excellent UV transmission range, still has excellent light transmission at 200nm；
And UV grade fused quartz has excellent light transmission using synthesis fused quartz, can achieve 150nm or so still with excellent
Light transmission.α-BBO is used as birefringece crystal simultaneously, and o light, e light and fused quartz glass refractive index are as shown in Figure 3.The e light of BBO
Refractive index with wavelength from the increase of 200-2000nm its value between 1.7-1.54, o optical index changes between 1.9-1.64,
Fused quartz glass is between 1.49-1.46.In each wave band, there are nFused quartz<ne<no。
In the present embodiment, as shown in figure 4, for bbo crystal o light and e the light angle of total reflection at different wavelengths it
Between there are a fixed difference, when the angle of reflection of o light changes from 200nm-2000nm, increase to 63.5 ° from 52 °；E light it is complete
When angle of reflection increases from 200nm-2000nm, increase to 74.1 ° from 61 °.It is appropriate to choose cutting angle and wave-length coverage, o light can be made
Under the premise of total reflection, e light is not totally reflected, while incident angle is close to Brewster's angle, can keep one it is higher
Transmitance；To which realization is polarized function and obtains high polarisation extinction coefficient.Wave band is chosen between 220nm-970nm, is cut
Chamfer degree is between 27.52-25.63 ° shown in θ as shown in figure 1, thus realize 220nm-970nm it is good be polarized effect.
In the present embodiment, as shown in figure 5, since the e optical index of BBO is between 1.46-1.5, o light 1.9-1.64 table
Face reflection will cause biggish smooth reflection loss.It is coated with single layer anti reflective coating in the crystal plane of incidence and light emission face, central wavelength is excellent
Change and go out in the light transmittance lower 230nm that compares, reduces loss, for incident wavelength in 230nm, surface reflectivity reaches < 1.5%
Level.
In the present embodiment, as shown in fig. 6, under the premise of having outgoing and plane of incidence anti-reflection film, since cutting angle exists
Under the premise of being totally reflected o light entrance crystal and air inclined-plane, e light makes e light keep higher light transmission close to Brewster's angle
Rate, as shown in the figure from 240nm-980nm, e light transmittance can be close to e light transmittance between 90%, 230nm-240nm and be greater than
E light transmission rate is greater than 50% between 80%, 220nm-230nm.
In the present embodiment, as shown in fig. 7, the o light transmission simulated, transmissivity is small between 220nm-980nm
Transmissivity is less than 1% between 0.04%, 970nm-1000nm.In the device of actual fabrication, between 220nm-970nm, o
Light transmittance < 0.1%.
In the present embodiment, as shown in figure 8, between 220nm-970nm, extinction ratio > 1000:1 has excellent be polarized
Performance.Between 220nm-940nm, extinction ratio theoretical value is on 50dB, actually can reach > 40dB.
Particularly, α-bbo crystal is cut into prism first by the present embodiment, as shown in Figures 1 and 2；It is fixed that crystal is carried out again
To the C axis direction of crystal being strictly parallel to the plane of incidence, both perpendicular to upper cutting surface as shown in Figure 1, or cutting perpendicular to lateral incision
Face is as shown in Figure 2.It is trimmed to using fine grinding direction close at brilliant size, then carries out S1, S2, S3, the optics in the face S4 respectively again
Frosted, polishing, make surface reach < λ/10, and the surface accuracy of λ=633nm reaches the surface finish level of American army mark 10-5.
Single layer MgF is carried out to the face of S1 and S2 again2Or SiO2Anti-reflection film, central wavelength optimize at 230nm.
Thereafter the fused quartz glass of instrument bevel size dimension carries out frosted, polishing, and surface face shape reaches < λ/10, and λ=
The surface accuracy of 633nm, reaches the surface finish level of American army mark 10-5, and thickness can be between 1-10000 μm, in this implementation
1mm thickness is taken in mode.
BBO prism hypotenuse/facet surfaces are contacted in fused quartz glass two sides, two prisms optical axis phase by difference optical cement using optical contant technique
Mutually parallel, alignment assembling can deepen ultraviolet adhesive curing to increase air-tightness and being firmly combined property at contact surface；Or it is adopted in side
Using plate to be glued at prism side can be to improve firmness as reinforcement.
The foregoing is merely presently preferred embodiments of the present invention, all equivalent changes done according to scope of the present invention patent with
Modification, is all covered by the present invention.
Claims (8)
1. a kind of DUV wide spectrum is without the glue polarizer, it is characterised in that: including the first bbo crystal, the second bbo crystal and setting
Intermediate-index layer two bbo crystal joint places；The bbo crystal is cut by certain angle, and the optical axis of bbo crystal
It is parallel to incident light surface, the optical axis of two panels BBO is parallel to each other；The intermediate-index layer respectively with two bbo crystal optical cements
It closes.
2. a kind of DUV wide spectrum according to claim 1 is without the glue polarizer, it is characterised in that: the intermediate-index layer
Using SiO2Material, Mgf2Material or fused quartz glass material, transmission region 215nm-2000nm.
3. a kind of DUV wide spectrum according to claim 2 is without the glue polarizer, it is characterised in that: the intermediate-index layer
For SiO2Film layer or Mgf2Film layer.
4. a kind of DUV wide spectrum according to claim 2 is without the glue polarizer, it is characterised in that: the intermediate-index layer
Using the good fused quartz glass layer of deep ultraviolet through performance, transmission region is from 215nm-2000nm；The fused quartz glass layer
With a thickness of 1-10000um.
5. a kind of DUV wide spectrum according to claim 1 is without the glue polarizer, it is characterised in that: the DUV wide spectrum is without glue
The incident interface o light total reflection of the polarizer, e light transmission, angle of incidence of light are 62.48 degree of -64.37 degree, i.e. prism cutting angle
Degree is 27.52 degree of -25.63 degree, and wherein transmission region is 220nm-1000nm, and transmitance is greater than 50%, in wavelength 220nm-
Extinction ratio is 1000:1 between 970nm.
6. a kind of DUV wide spectrum according to claim 1 is without the glue polarizer, it is characterised in that: the bbo crystal uses α-
BBO material or-BBO material, transmission region 215nm-2000nm.
7. a kind of DUV wide spectrum according to claim 1 is without the glue polarizer, it is characterised in that: the intermediate-index layer
It is sealed with uv-curable glue or heat-curable glue is used after two bbo crystal optical contants, so that optical cement interface and air insulated.
8. a kind of DUV wide spectrum according to claim 1 is without the glue polarizer, it is characterised in that: first bbo crystal with
The face that second bbo crystal is contacted with air is coated with the SiO of single layer2Film, Mgf2Film or both composition composite multilayer membrane, realize from
The broadband anti-reflection film of 215nm-1000nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811103430.0A CN109116461A (en) | 2018-09-20 | 2018-09-20 | A kind of DUV wide spectrum is without the glue polarizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811103430.0A CN109116461A (en) | 2018-09-20 | 2018-09-20 | A kind of DUV wide spectrum is without the glue polarizer |
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| Publication Number | Publication Date |
|---|---|
| CN109116461A true CN109116461A (en) | 2019-01-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811103430.0A Pending CN109116461A (en) | 2018-09-20 | 2018-09-20 | A kind of DUV wide spectrum is without the glue polarizer |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101551484A (en) * | 2009-05-08 | 2009-10-07 | 福州福特科光电有限公司 | Deep ultraviolet ultra-wideband polarizer |
| CN102096141A (en) * | 2010-12-23 | 2011-06-15 | 福建福晶科技股份有限公司 | Alpha-BBO polarizing prism |
-
2018
- 2018-09-20 CN CN201811103430.0A patent/CN109116461A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101551484A (en) * | 2009-05-08 | 2009-10-07 | 福州福特科光电有限公司 | Deep ultraviolet ultra-wideband polarizer |
| CN102096141A (en) * | 2010-12-23 | 2011-06-15 | 福建福晶科技股份有限公司 | Alpha-BBO polarizing prism |
Non-Patent Citations (1)
| Title |
|---|
| 上海交通大学出版社: "《抗蚀剂及其微细加工技术》", 31 March 1989 * |
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Application publication date: 20190101 |