CN101551484A - Deep ultraviolet ultra-wideband polarizer - Google Patents
Deep ultraviolet ultra-wideband polarizer Download PDFInfo
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- CN101551484A CN101551484A CNA2009101117115A CN200910111711A CN101551484A CN 101551484 A CN101551484 A CN 101551484A CN A2009101117115 A CNA2009101117115 A CN A2009101117115A CN 200910111711 A CN200910111711 A CN 200910111711A CN 101551484 A CN101551484 A CN 101551484A
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- bbo crystal
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Abstract
The invention relates to a deep ultraviolet ultra-wideband polarizer, which includes crystal materials and glue, wherein, the crystal materials are alpha-BBO crystal materials; the alpha-BBO crystal materials are two right-angle trapezium or right-angled triangle birefringent materials with 60-63 degrees of cutting angle and identical dimension, shape construction and optical axis direction, coupling the two crystal materials along the inclined plane in the rotational symmetry modus, coating glue at the inclined plane of two alpha-BBO crystal materials, wherein, the refractivity of the glue is 1.35-1.60. The polarizer of the invention can cover the deep UV, visible, and infrared light with a wavelength of 190-3300nm, which can not done by the current other polarizers. And the present invention also has a high UV transmittance, wherein, the transmittance in the 190-250nm is up to more than 50%, the transmittance at 250nm and above is up to 85%; a high extinction ratio, up to 5*10 [-6]; a large acceptance angle, which is more than 12 degrees.
Description
Technical field:
The present invention relates to a kind of polarizer, relate in particular to the deep ultraviolet ultra-wideband polarizer that a kind of operation wavelength is 190～3300nm.
Background technology:
The use lowest wavelength of general icelandspar (Calcite) polarizer can only reach 350nm, though and at present common α-BBO polarizer can reach 200nm, wavelength coverage that can't covering wide can only be segmented into 200-270nm, 300-700nm,＞700nm.Because semicon industry, accuracy requirement to coat thickness detection is more and more higher, this ellipsometer that just requires to test this little thickness can cover from deep ultraviolet near infrared detectability, and will realize this function, and main restriction is exactly the critical component of ellipsometer---polarizer.
Existing Glan Thompson (Glan thomson) polarizer is only done material with icelandspar usually, because material itself, it can not be used for deep ultraviolet.Though can having well at deep ultraviolet, passes through α-BBO, but want to make Glan Thompson and must overcome three problems: 1. angle design wants reasonable and just right, 2. to there be a kind of glue very high transmissivity to be arranged in ultraviolet, 3. the refractive index of glue is wanted and can good coupling be arranged with the refractive index of α-BBO material, though the patent of invention that our company applied for " deep ultraviolet; as seen; near infrared polarizer (200510018753.6) " has solved three above-mentioned problems, but owing to do not reach optimization in the selection of glue and the design of angle, the polarizer of original technology can only cover the wavelength coverage of 190-950nm.Now reach optimization, make polarizer can cover 190-3300nm by selection and angle design at glue.
Summary of the invention:
The objective of the invention is to solve the above-mentioned defective that prior art exists, provide a kind of and can cover the deep ultraviolet of 190-3300nm wavelength light, visible, infrared polarizer.
Technical scheme of the present invention is as follows: polarizer of the present invention comprises crystalline material and glue, it is characterized in that: it is characterized in that: described crystalline material is α-bbo crystal material; Described α-bbo crystal material be two sizes, shape structure and optical axis direction all identical, corner cut is the birefringent material of 60-63 degree, right-angled trapezium or right-angle triangle, two crystalline materials are coupled in rotational symmetric mode along the inclined-plane, form a rectangle, be provided with glue between the inclined-plane of two α-bbo crystal material, the refractive index of described glue is 1.35-1.60.
Polarizer of the present invention can cover the deep ultraviolet that wavelength is 190-3300nm, visible, infrared light, and this is that other polarizers can not be accomplished at present.And the present invention also has very high ultraviolet permeability, can reach greater than＞50% in the transmitance of 190-250nm, can reach in the above transmitance of 250nm＞85%; High extinction ratio reaches 5x10
-6Big acceptance angle, acceptance angle＞12 degree.The present invention has made full use of the advantage of the high ultraviolet permeability of α-BBO, when relating to two α-bbo crystal corner cut is that 60-63 is when spending, can be implemented in the 190nm-3300nm scope and make o light (normal light, big refractive index) incident angle at the gummed interface produces reflection greater than being all-trans the angle, made e light (non-ordinary light simultaneously, little refractive index) incident angle at the gummed interface can see through glue-line less than being all-trans the angle, and the light that comes out from exit facet is polarized light like this.
Description of drawings:
Fig. 1 is that α of the present invention-bbo crystal material shape is trapezoidal structural representation;
Fig. 2 is that α of the present invention-bbo crystal material shape is leg-of-mutton structural representation.
Label declaration: 1 crystalline material, 2 glue, α corner cut.
Embodiment:
As shown in Figure 1, 2: the present invention includes crystalline material 1 and glue 2, described crystalline material 1 is α-bbo crystal material; With α-bbo crystal material be two sizes, shape structure and optical axis direction all identical, right-angled trapezium or triangular structure of right angle, wherein, the corner cut that angle trapezoidal or hypotenuse and base is α-bbo crystal material, corner cut α is the 60-63 degree, between the inclined-plane of two α-bbo crystal material, be provided with glue 2, the refractive index of described glue is 1.35-1.60, the refractive index of glue can have good coupling with the refractive index of α-bbo crystal material, and described glue has very high transmissivity in ultraviolet.
Process: two crystal forming polarizer are identical (measure-alike, optical axis direction is identical) triangles.In process, we select top-quality part earlier from α-BBO blank, cut out a square according to the optical axis direction, the size that design, and then are cut into two triangles along the diagonal angle.Two are stitched together, and processing polishing inclined-plane and minor face right angle face have identical angle to guarantee two together; Carry out gluing after polished, two crystal are glued together along the inclined-plane.Glue can be arranged at by the mode that applies between the inclined-plane of two crystalline materials, will note guaranteeing the depth of parallelism of both ends of the surface during gummed, guarantees that the inclined-plane of two crystalline materials is parallel.When guaranteeing to bind quality, the thickness of glue-line is got over Bao Yuehao, and polish once more to both ends of the surface the gummed back, last plated film.
The main application of this product: be mainly used in ellipsometer, spectroanalysis instrument, laser instrument, little measuring instruments etc. all need polarized light together, rise partially or the parts of analyzing as laser in the equipment.
Claims (1)
1, a kind of deep ultraviolet ultra-wideband polarizer, it comprises crystalline material and glue, it is characterized in that: described crystalline material is α-bbo crystal material; Described α-bbo crystal material be two sizes, shape structure and optical axis direction all identical, corner cut is the birefringent material of 60-63 degree, right-angled trapezium or right-angle triangle, two crystalline materials are coupled in rotational symmetric mode along the inclined-plane, form a rectangle, be provided with glue between the inclined-plane of two α-bbo crystal material, the refractive index of described glue is 1.35-1.60.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009101117115A CN101551484A (en) | 2009-05-08 | 2009-05-08 | Deep ultraviolet ultra-wideband polarizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009101117115A CN101551484A (en) | 2009-05-08 | 2009-05-08 | Deep ultraviolet ultra-wideband polarizer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101551484A true CN101551484A (en) | 2009-10-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2009101117115A Pending CN101551484A (en) | 2009-05-08 | 2009-05-08 | Deep ultraviolet ultra-wideband polarizer |
Country Status (1)
| Country | Link |
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| CN (1) | CN101551484A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102967942A (en) * | 2012-11-08 | 2013-03-13 | 福建福晶科技股份有限公司 | Adjustable beam displacer |
| CN109116461A (en) * | 2018-09-20 | 2019-01-01 | 闽江学院 | A kind of DUV wide spectrum is without the glue polarizer |
| CN109471214A (en) * | 2018-12-18 | 2019-03-15 | 福建福晶科技股份有限公司 | A kind of deep ultraviolet coupling devating prism |
-
2009
- 2009-05-08 CN CNA2009101117115A patent/CN101551484A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102967942A (en) * | 2012-11-08 | 2013-03-13 | 福建福晶科技股份有限公司 | Adjustable beam displacer |
| CN109116461A (en) * | 2018-09-20 | 2019-01-01 | 闽江学院 | A kind of DUV wide spectrum is without the glue polarizer |
| CN109471214A (en) * | 2018-12-18 | 2019-03-15 | 福建福晶科技股份有限公司 | A kind of deep ultraviolet coupling devating prism |
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| C06 | Publication | ||
| PB01 | Publication | ||
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| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Open date: 20091007 |