CN205003309U - Grating duplicator that contains waterproof layer - Google Patents
Grating duplicator that contains waterproof layer Download PDFInfo
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- CN205003309U CN205003309U CN201520654105.9U CN201520654105U CN205003309U CN 205003309 U CN205003309 U CN 205003309U CN 201520654105 U CN201520654105 U CN 201520654105U CN 205003309 U CN205003309 U CN 205003309U
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Abstract
The utility model discloses a grating duplicator that contains waterproof layer belongs to replica grating technical field. Including mother grating, mother grating includes the mother grating substrate, bond on the mother grating substrate the glue film and plate the aluminium rete that closes on the glue film, its characterized in that, still including being used for the waterproof layer that separates mother grating and replica grating, the waterproof layer distributes evenly and inseparable the laminating on the aluminium rete parallelly, mother grating can be plane shape or concave shape, the shape of cross section of mother grating's cutting is zigzag or sinusoid, zigzag or sinusoidal go of waterproof layer for matcing the cutting, the aspect ratio of mother grating's cutting is 0.1-0.5, the thickness of waterproof layer is 0.1-0.25 mu m, the waterproof layer is to anchoring strength < the 5Ncm2 of replica grating's glue film. Compared with the prior art, the utility model, its beneficial effect lies in making the replica grating on -stick on mother grating and replica grating separation, improves the processing input and output and compares and machining efficiency.
Description
Technical field
The utility model relates to replica grating technical field, specifically a kind of grating replication device containing water barrier.
Background technology
Diffraction grating is a kind of very important optical device be made up of intensive, equidistant parallel groove, and it utilizes many seam diffraction and interference effect, and the light beam be mapped on grating is carried out dispersion by the difference of wavelength, then focuses on through imaging lens and form spectrum.Diffraction grating stable performance, resolution is high, and high and with wavelength the change of angular dispersion is little, so be used widely in various spectral instrument.The diffraction grating of current use have a plane with concave surface, its surface be subject to very meticulous, modulate uniformly.The variation range of modulating frequency is very large, and very high to the uniformity requirement of groove width, delineation conditional request is very tight.Even well rose engine, the grating (the delineation speed of rose engine be 15-25 bar/point) delineating one piece of 100 × 100mm calculates needs 4 round the clock.In order to the needs in satisfied production, solution is that the grating of delineation is copied as master grating.
Current grating replication has two kinds: replica method to be exactly Vacuum Coating method.Secondary replica method is gelatin replica method.Secondary replica method is the cut first copying master grating, then draws on the gelatin of blank by this cut print.Secondary duplication process is more loaded down with trivial details, and one time replica method is comparatively conventional.
Current once-through method replica grating technology adopts aluminizer reproduction technology, master grating glue-line plates an aluminum membranous layer, adheres on aluminum membranous layer with the substrate of cementing agent by replica grating.After adhesive cures, replica grating is separated with master grating.Due between aluminum membranous layer and cementing agent without any separating layer, when being separated with master grating by replica grating after adhesive cures, replica grating easily sticks on master grating, causes that replica grating is defective even to be scrapped.
Utility model content
The utility model is in order to overcome the deficiencies in the prior art, and provide a kind of grating replication device containing water barrier, object is master grating to be separated with replica grating, and replica grating is not bonded on master grating, improves processing input-output ratio and working (machining) efficiency.
In order to solve above-mentioned technical matters, the basic technical scheme that the utility model proposes is:
A kind of grating replication device containing water barrier, comprise master grating, described master grating comprises master grating substrate, be bonded in the on-chip glue-line of master grating and plating is combined in aluminum membranous layer on glue-line, it is characterized in that, also comprise the water barrier for being separated with replica grating by master grating, described water barrier be evenly distributed and close parallel be fitted on aluminum membranous layer.
Further, described master grating can be planar shaped or concave shape.
Further, the shape of cross section of the cutting of described master grating is serrate or sinusoidal, and described water barrier is the serrate of coupling cutting or sinusoidal row.
Further, the depth-to-width ratio of the cutting of described master grating is 0.1 ~ 0.5.
Further, the thickness of described water barrier is 0.1 ~ 0.25 μm.
Further, described water barrier is to the adhesion < 5N/cm of the glue-line of replica grating
2.
The beneficial effects of the utility model are:
By setting up water barrier between aluminum membranous layer and replica grating, water barrier be evenly distributed and close parallel be fitted on aluminum membranous layer, both the chamfered shape of the effective transfer printing master grating of replica grating can have been made, replica grating can be made again to be separated with master grating, replica grating is prevented to be bonded on master grating, improve processing input-output ratio, save production cost, working (machining) efficiency is high.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of a kind of grating replication device containing water barrier of the present utility model;
Fig. 2 is in a kind of schematic diagram containing replica grating on the grating replication device of water barrier of the present utility model.
Embodiment
Below with reference to drawings and Examples, the utility model is described further, but protection domain of the present utility model should not be limited with this.
For convenience of description and understand the technical solution of the utility model, below illustrate that the orientation that the noun of locality used all is shown with accompanying drawing is as the criterion.
A kind of grating replication device containing waterproof membrane of the present utility model, comprising master grating 1, master grating 1 comprises master grating substrate 11, is bonded in the on-chip glue-line 12 of master grating, plating the aluminum membranous layer 13 that is combined on glue-line and the water barrier 2 for being separated with replica grating 3 by master grating 1.
Master grating 1 can be planar shaped or concave shape.The shape of cross section of the cutting 14 of master grating 1 is serrate or sinusoidal or arbitrary shape.In the present embodiment, the cutting 14 of master grating 1 adopts serrate.The depth-to-width ratio of the cutting 14 of master grating 1 is less than 0.1 ~ 0.5.Cutting 14 depth-to-width ratio is too large, and little bottom cutting 14, therefore water barrier 2 can not reach bottom cutting 14 completely, and master grating 1 exists with replica grating 3 and is separated dead angle, easily causes the problem that replica grating 3 cutting is cracked during separation.
Water barrier 2 be evenly distributed and close parallel be fitted on aluminum membranous layer 13, the shape of the upper surface of water barrier 2 is the serrate of coupling cutting 14, for the shape of the cutting 14 of replica grating 3 transfer printing master grating 1.Replica grating 3 copies at the upper surface of water barrier 2.The thickness of water barrier 2 is 0.1 ~ 0.25 μm.The too low replica grating 3 that likely causes of the thickness of water barrier 2 destroys water barrier 2 and adheres to master grating, affects separating effect.The thickness of water barrier 2 is too large, then can not the shape of the effective cutting 14 of transfer printing master grating 1, causes replica grating 3 and master grating 1 similarity is low even cannot use.
The adhesion < 5N/cm of the glue-line 32 of water barrier 2 pairs of replica gratings 3
2.The adhesion of water barrier 2 pairs of glue-lines 32 is little, be easy to water barrier 2 and glue-line 32 being separated completely or part is separated.Even if water barrier 2 is separated with glue-line 32 part, physics or chemical method also can be used to remove the residual fraction of water barrier 2 on glue-line 32 easily, such as, strike off or solvent cleaning with blade.Glue-line 32 can be epoxy resin or vibrin, but is not limited to epoxy resin and vibrin, also can use the thermoset resin that urea resin, phenolics etc. are heat-resisting.
The principle of work of the application's utility model:
First in vacuum coater, on the aluminum membranous layer 13 of master grating 1, plate water barrier 2, then master grating 1 is taken out in vacuum coater.Master grating 1 being formed water barrier 2 and is not limited to the method, can be that any water barrier 2 pairs of aluminum membranous layers 2 that make adhere to the additive method reaching above-described embodiment requirement.Then with the glue-line 32 of replica grating 3, the substrate 31 of replica grating 3 is adhered on aluminum membranous layer 13.After glue-line 32 solidifies, be separated with master grating 1 by replica grating 3, cutting 14 shape of master grating 1 is inverted, and cutting 14 shape transfers to the surface of replica grating 3.Replica grating 3 plates one deck aluminium film, so far, completes the making that chamfered shape is equal to the replica grating 3 of cutting 14 shape of master grating 1.
The announcement of book and instruction according to the above description, the utility model those skilled in the art can also change above-mentioned embodiment and revise.Therefore, the utility model is not limited to embodiment disclosed and described above, also should fall in the protection domain of claim of the present utility model modifications and changes more of the present utility model.In addition, although employ some specific terms in this instructions, these terms just for convenience of description, do not form any restriction to the utility model.
Claims (6)
1. the grating replication device containing water barrier, comprise master grating, described master grating comprises master grating substrate, be bonded in the on-chip glue-line of master grating and plating is combined in aluminum membranous layer on glue-line, it is characterized in that, also comprise the water barrier for being separated with replica grating by master grating, described water barrier be evenly distributed and close parallel be fitted on aluminum membranous layer.
2. a kind of grating replication device containing water barrier according to claim 1, it is characterized in that, described master grating can be planar shaped or concave shape.
3. a kind of grating replication device containing water barrier according to claim 1, it is characterized in that, the shape of cross section of the cutting of described master grating is serrate or sinusoidal, and described water barrier is the serrate of coupling cutting or sinusoidal row.
4. a kind of grating replication device containing water barrier according to claim 1, it is characterized in that, the depth-to-width ratio of the cutting of described master grating is 0.1 ~ 0.5.
5. a kind of grating replication device containing water barrier according to claim 1, it is characterized in that, the thickness of described water barrier is 0.1 ~ 0.5 μm.
6. a kind of grating replication device containing water barrier according to claim 1, it is characterized in that, described water barrier is to the adhesion < 5N/cm of the glue-line of replica grating
2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520654105.9U CN205003309U (en) | 2015-08-27 | 2015-08-27 | Grating duplicator that contains waterproof layer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520654105.9U CN205003309U (en) | 2015-08-27 | 2015-08-27 | Grating duplicator that contains waterproof layer |
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| CN205003309U true CN205003309U (en) | 2016-01-27 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107783214A (en) * | 2017-10-13 | 2018-03-09 | 苏州领锐源奕光电科技有限公司 | A kind of preparation method of echelle grating aluminium film |
-
2015
- 2015-08-27 CN CN201520654105.9U patent/CN205003309U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107783214A (en) * | 2017-10-13 | 2018-03-09 | 苏州领锐源奕光电科技有限公司 | A kind of preparation method of echelle grating aluminium film |
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