CN115629085A - Full-automatic intelligent flaw detection equipment for semiconductor chip collecting tray - Google Patents
Full-automatic intelligent flaw detection equipment for semiconductor chip collecting tray Download PDFInfo
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- CN115629085A CN115629085A CN202211646852.9A CN202211646852A CN115629085A CN 115629085 A CN115629085 A CN 115629085A CN 202211646852 A CN202211646852 A CN 202211646852A CN 115629085 A CN115629085 A CN 115629085A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/38—Collecting or arranging articles in groups
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Abstract
The invention discloses full-automatic intelligent defect detection equipment for a semiconductor chip extraction disc, which comprises a rack, wherein an upper bin assembly is arranged on the rack, a material distribution mechanism is arranged on one side of the upper bin assembly of the rack, a detection jig is arranged on the other side of the upper bin assembly of the rack, a sorting mechanism is arranged behind the detection jig on the rack, and a detection platform is arranged on the sorting mechanism. In the uniform motion process of the detection jig, the detection platform detects the extraction disc in real time, the AOI flaw detection is realized, the judgment accuracy is more than or equal to 98 percent, and the over-killing rate is as follows: less than or equal to 1 percent; the device realizes full-automatic detection and unmanned intellectualization; this equipment has saved a large amount of manpower and material resources costs for the enterprise.
Description
Technical Field
The invention relates to the technical field of semiconductor detection, in particular to full-automatic intelligent defect detection equipment for a semiconductor chip extraction disc.
Background
The manufacture of semiconductor chips belongs to the high-tech field, and the production efficiency of the semiconductor chips influences the production of electronic products such as downstream notebooks, mobile phones and the like; the defect detection process is involved in the production process of the semiconductor chip, is one of important detection contents of product quality inspection, and has wide market application requirements in industrial intelligent manufacturing production.
At present, a large amount of manual detection is adopted in the domestic semiconductor industry. Manually carrying out manual visual inspection on each piece of crystal extraction disc under a microscope, manually observing whether the surface has flaws, and judging whether the flaws affect the use of the built-in crystal.
The manual visual detection method has many defects, which are as follows:
1. according to the subjective judgment of each detection worker, the results of visual judgment of different people on the same extraction disc may be different, so that the judgment result is unstable;
2. the manual judgment has limited working efficiency, a large amount of manual work needs to be organized for visual inspection, in the semiconductor industry, the yield is huge, corresponding matched manual efficiency is needed, and under the current market conditions, a large amount of human input is difficult to organize.
Disclosure of Invention
The invention aims to provide full-automatic intelligent flaw detection equipment for a semiconductor chip tray so as to solve the problems in the prior art.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a full-automatic intelligent flaw detection equipment of semiconductor chip extraction dish, includes the frame, install the feed bin subassembly in the frame, the frame is located feed bin subassembly one side and installs feed mechanism, the frame is located feed bin subassembly opposite side and installs detection tool, the frame is located the detection tool rear and installs sorting mechanism, the last testing platform that installs of sorting mechanism.
Preferably, it includes the material loading support to go up the feed bin subassembly, first servo motor and screw rod are installed to material loading support bottom, drive through synchronizing wheel and hold-in range between first servo motor and the screw rod, install the crane on the screw rod, second servo motor is installed on the crane top, second servo motor has the removal seat through the ball screw drive, remove the seat top and install and wait to examine magazine one, wait to examine magazine two, wait to examine magazine three and NG magazine.
Preferably, the lifting frame is connected with the feeding support through a first linear bearing, the lifting frame is provided with a detection assembly, and the moving base is connected with the lifting frame through a sliding block and a sliding rail.
Preferably, the material distributing mechanism comprises a material distributing support, a first linear slide rail and a rack are mounted on the material distributing support, a sliding plate is slidably mounted on the first linear slide rail, a third servo motor is mounted on the sliding plate, a gear matched with the rack is mounted at the output end of the third servo motor, and a first push rod is adjustably mounted on the sliding plate.
Preferably, the first push rod is connected with the sliding plate in a sliding mode through the sliding seat, a first spring is arranged between the sliding plate and the sliding seat, a first spring adjuster for adjusting the first spring is installed on the sliding plate, and a clamping groove is formed in one end, far away from the sliding seat, of the first push rod.
Preferably, detection tool includes X axle lead screw module, X axle servo motor is installed to X axle lead screw module one end, slidable mounting has Y axle lead screw module on the X axle lead screw module, Y axle lead screw module one end is installed, Y axle servo motor, slidable mounting has the fixing base on the Y axle lead screw module, slidable mounting has two splint on the fixing base, install the centering motor on the fixing base, the centering motor passes through two splint of T shape lead screw drive.
Preferably, two a plurality of leading wheels are all installed to the top of splint, two a plurality of cylinders that compress tightly are installed to the equidistance in the outside of splint, the drive has the depression bar on the cylinder that compresses tightly.
Preferably, testing platform is including detecting the support, it installs the camera to detect support upper portion, detect the support lower part and install first light source and second light source, and detect the support and be located the outside of first light source and second light source and install and sweep a yard rifle and a point laser ware.
Preferably, sorting mechanism is including selecting separately the support, select separately and install sharp module on the support, fourth servo motor is installed to sharp module one end, slidable mounting has the carriage on the sharp module, install the lift cylinder on the carriage, the drive of lift cylinder has the mount pad, the second push rod is installed to mount pad one side.
Preferably, a second linear bearing and a second spring are arranged between the second push rod and the mounting seat, a second spring adjuster for adjusting the second spring is mounted on the mounting seat, and a clamping groove is formed in one end of the second push rod.
Compared with the prior art, the invention has the beneficial effects that: manually placing a material box to be detected in the feeding bin assembly, taking a plate to be detected out from the material box to be detected by the material distribution mechanism, and placing the plate on the detection jig; in the process of uniform motion of the detection jig, the detection platform detects the extraction disc in real time and displays the current detection result on a display outside the equipment; the sorting mechanism carries out NG/OK sorting according to the detection result and respectively conveys NG/OK extraction trays into corresponding NG/OK material boxes; after all the extraction trays in the material arranging box are detected, the equipment reminds a person to remove and place a new extraction tray material box to be detected; this application has realized AOI's flaw detection, and it is greater than or equal to 98% to judge the rate of accuracy, and the rate of killing excessively: less than or equal to 1 percent; the device realizes full-automatic detection and unmanned intellectualization; the equipment saves a large amount of labor and material cost for enterprises, and one equipment can save 10 persons and 10 microscopes.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the internal structure of the present invention;
FIG. 3 is a schematic structural view of the feeding bin assembly and the distributing mechanism of the present invention;
FIG. 4 is a schematic view of the construction of the upper bin assembly of the present invention;
FIG. 5 is a schematic structural view of a material distributing mechanism of the present invention;
FIG. 6 is a schematic structural view of another view of the distributing mechanism of the present invention;
FIG. 7 is a schematic structural view of a detection tool and a sorting mechanism according to the present invention;
FIG. 8 is a schematic structural diagram of a testing fixture according to the present invention;
FIG. 9 is a schematic view of another angle of view of the inspection tool of the present invention;
FIG. 10 is a schematic view of the configuration of the sorting mechanism of the present invention;
FIG. 11 is a schematic view of a portion of the sorting mechanism of the present invention;
FIG. 12 is a schematic structural diagram of the detection platform of the present invention.
In the figure: 1. a frame; 2. a feeding bin assembly; 3. a material distribution mechanism; 4. detecting a jig; 5. detecting a platform; 6. a sorting mechanism; 7. an air source triple piece; 8. a barometer; 9. HIMI; 10. a power switch; 11. a display; 201. a first servo motor; 202. a screw; 203. a first linear bearing; 204. a detection component; 205. a second servo motor; 206. a ball screw; 207. a first material box to be detected; 208. a second material box to be detected; 209. a third material box to be detected; 210. NG a material box; 301. a first linear slide rail; 302. a third servo motor; 303. a rack; 304. a first push rod; 305. a first spring adjuster; 306. a first spring; 307. a sliding seat; 401. an X-axis lead screw module; 402. an X-axis servo motor; 403. a Y-axis servo motor; 404. a Y-axis lead screw module; 405. a fixed seat; 406. centering the motor; 407. a T-shaped lead screw; 408. a second linear slide rail; 409. a pressing cylinder; 410. a guide wheel; 501. a camera; 502. scanning a code gun; 503. a point laser; 504. a first light source; 505. a second light source; 601. a linear module; 602. a fourth servo motor; 603. a lifting cylinder; 604. a mounting base; 605. a second linear bearing; 606. a second spring; 607. a second push rod.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without inventive efforts based on the embodiments of the present invention, are within the scope of protection of the present invention. Thus, the following detailed description of the embodiments of the present invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
Referring to fig. 1-12, in the embodiment of the present invention, a full-automatic intelligent defect detection apparatus for a semiconductor chip extraction tray includes a rack 1, wherein an upper bin assembly 2 is installed on the rack 1, a material distribution mechanism 3 is installed on one side of the upper bin assembly 2 of the rack 1, a detection jig 4 is installed on the other side of the upper bin assembly 2 of the rack 1, a sorting mechanism 6 is installed behind the detection jig 4 of the rack 1, and a detection platform 5 is installed on the sorting mechanism 6; the device also comprises an air source triple piece 7, a barometer 8, an HIMI9, a power switch 10 and a display 11; manually placing a material box to be detected in the feeding bin assembly 2, taking a plate to be detected out of the material box to be detected by the material distribution mechanism 3, and placing the plate on the detection jig 4; in the process of uniform motion of the detection jig 4, the detection platform 5 detects the extraction disc in real time and displays the current detection result on a display outside the device; the sorting mechanism 6 carries out NG/OK sorting according to the detection result and respectively sends NG/OK extraction trays into corresponding NG/OK material boxes; after all the extraction trays in the material arranging box are detected, the equipment reminds a person to move away and place a new extraction tray material box to be detected.
Go up feed bin subassembly 2 and include the material loading support, first servo motor 201 and screw rod 202 are installed to material loading support bottom, drive through synchronizing wheel and hold-in range between first servo motor 201 and the screw rod 202, install the crane on the screw rod 202, second servo motor 205 is installed on the crane top, second servo motor 205 has the removal seat through ball screw 206 drive, it installs on the seat top to wait to examine magazine 207, wait to examine magazine two 208, wait to examine magazine three 209 and NG magazine 210, be connected through first linear bearing 203 between crane and the material loading support, install determine module 204 on the crane (determine module 204 is provided with a plurality of sensors, can carry out accurate induction detection to the magazine), remove and be connected through slider and slide rail between seat and the crane. Go up feed bin subassembly 2 action principle: manually placing the tray material box to be detected (20 trays to be detected are placed in the tray material box); after the three to-be-detected material boxes 209 are detected, the first servo motor 201 drives the ball screw 206 to rotate, so that the material boxes move forwards, the second to-be-detected material box 208 moves to the first to-be-detected material box 207, and the material box switching is completed in sequence.
The material distributing mechanism 3 comprises a material distributing support, a first linear slide rail 301 and a rack 303 are mounted on the material distributing support, a sliding plate is slidably mounted on the first linear slide rail 301, a third servo motor 302 is mounted on the sliding plate, a gear matched with the rack 303 is mounted at the output end of the third servo motor 302, and a first push rod 304 is adjustably mounted on the sliding plate; the first push rod 304 is connected with a sliding plate in a sliding manner through a sliding seat 307, a first spring 306 is arranged between the sliding plate and the sliding seat 307, a first spring adjuster 305 for adjusting the first spring 306 is installed on the sliding plate, and a clamping groove is formed in one end, away from the sliding seat 307, of the first push rod; the spring regulator that this application set up can adjust the removal of mechanism, and the precision is higher. The principle of the material distribution mechanism 3 is as follows: the third servo motor 302 drives the rack 303 to drive the first push rod 304 to move forward, and a piece of extraction disc in the material box to be detected is pushed into the detection jig 4, so that the material distribution function is sequentially completed.
The detection jig 4 comprises an X-axis lead screw module 401, wherein one end of the X-axis lead screw module 401 is provided with an X-axis servo motor 402, a Y-axis lead screw module 404 is slidably mounted on the X-axis lead screw module 401, one end of the Y-axis lead screw module 404 is provided with a Y-axis servo motor 403, a fixed seat 405 is slidably mounted on the Y-axis lead screw module 404, two clamping plates are slidably mounted on the fixed seat 405, a centering motor 406 is mounted on the fixed seat 405, and the centering motor 406 drives the two clamping plates through a T-shaped lead screw 407; two a plurality of leading wheels 410 are all installed to the top of splint, two a plurality of cylinders 409 that compress tightly are installed to the equidistance in the outside of splint, the drive has the depression bar on compressing tightly the cylinder 409. The X-axis lead screw module 401, the Y-axis lead screw module 404 and the fixed seat 405 are all provided with induction components. And (4) detecting a jig: after the first push rod 304 pushes the product into the detection fixture 4, the centering motor 406 drives the T-shaped screw rod 407 to center and clamp the disc to be extracted; the servo motor drives the X-axis lead screw module 401 and the Y-axis lead screw module 404 to move, the detection product jig is driven to move to the AOI detection platform, and flaw and flatness detection is carried out.
Detection platform 5 (AOI flaw detection mechanism and flatness detection mechanism) is including detecting the support, detect support upper portion and install camera 501, first light source 504 and second light source 505 are installed to the detection support lower part, and detect the support and be located the outside of first light source 504 and second light source 505 and install and sweep yard rifle 502 and point laser 503. A camera and 2 special light sources are arranged in the device to realize defect detection of the extraction disc, and point laser is arranged to realize flatness detection.
The sorting mechanism 6 comprises a sorting support, a linear module 601 (an induction mechanism is arranged on the linear module 601) is arranged on the sorting support, a fourth servo motor 602 is arranged at one end of the linear module 601, a sliding frame is slidably arranged on the linear module 601, a lifting cylinder 603 is arranged on the sliding frame, the lifting cylinder 603 is driven by a mounting seat 604, and a second push rod 607 is arranged on one side of the mounting seat 604; be provided with second linear bearing 605 and second spring 606 between second push rod 607 and the mount pad 604, install the second spring regulator who is used for adjusting second spring 606 on the mount pad 604, draw-in groove (the existence of draw-in groove, can be better carry out the centre gripping to the product, and cooperate the buffer function of the spring of this application, can realize fine centre gripping, and do not harm the product) has been seted up to second push rod 607 one end. A sorting mechanism: the fourth servo motor 602 drives the linear module 601 to move, and drives the second push rod 607 to push the detected extraction disc into the material box; if the detection result is NG, the sorting mechanism moves in a matched manner with the detection jig, and the NG tablets are sorted to an NG material box; and if the detection is OK, sorting the original material box.
Manually placing a material box to be detected in the feeding bin assembly 2, taking a plate to be detected out of the material box to be detected by the material distribution mechanism 3, and placing the plate on the detection jig 4; in the process of uniform motion of the detection jig 4, the detection platform 5 detects the extraction disc in real time and displays the current detection result on a display outside the device; the sorting mechanism 6 carries out NG/OK sorting according to the detection result and respectively sends NG/OK extraction trays into corresponding NG/OK material boxes; after all the extraction trays in the material arranging box are detected, the equipment reminds a person to remove and place a new extraction tray material box to be detected; go up feed bin subassembly 2: 6 tray extraction material boxes are arranged in the tray extraction device, each tray extraction material box contains more than 20 trays to be detected, and the tray extraction device is suitable for four types of tray extraction material boxes; a material distributing mechanism 3: automatically entering from the disc extracting material box, and taking out a disc to be detected and placing the disc on a detection jig; and (4) detecting a jig: conveying the material box to be detected to AOI and point laser for flaw detection; AOI flaw detection mechanism: carrying out AOI detection on internal defects of the extraction disc; flatness detection mechanism: point laser is adopted to realize the flatness detection of the surface of the extraction disc; the sorting mechanism 6: if the detection result is NG, the sorting mechanism and the detection jig move in a matched mode, and the NG slices are sorted to an NG material box; if the detection is OK, sorting to the original material box; the defect detection of AOI is realized, the judgment accuracy is more than or equal to 98 percent, and the overdischarge rate is as follows: less than or equal to 1 percent; the device realizes full-automatic detection and unmanned intellectualization; the equipment saves a large amount of labor and material cost for enterprises, and one equipment can save 10 persons and 10 microscopes.
The working principle of the invention is as follows: manually placing a material box to be detected in the feeding bin assembly 2, taking a plate to be detected out of the material box to be detected by the material distribution mechanism 3, and placing the plate on the detection jig 4; in the process of uniform motion of the detection jig 4, the detection platform 5 detects the extraction disc in real time and displays the current detection result on a display outside the device; the sorting mechanism 6 carries out NG/OK sorting according to the detection result and respectively sends NG/OK extraction trays into corresponding NG/OK material boxes; after all the extraction plates in the material arranging box are detected, the equipment reminds the worker to move away and place a new extraction plate material box to be detected;
go up feed bin subassembly 2: 6 tray extraction material boxes are arranged in the tray extraction device, each tray extraction material box contains more than 20 trays to be detected, and the tray extraction device is suitable for four types of tray extraction material boxes;
a material distributing mechanism 3: automatically entering from the disc extracting material box, and taking out a disc to be detected and placing the disc on a detection jig;
and (4) detecting a jig: conveying the material box to be detected to AOI and point laser for flaw detection;
AOI flaw detection mechanism: carrying out AOI detection on internal defects of the extraction disc;
flatness detection mechanism: spot laser is adopted to realize the flatness detection of the surface of the extraction disc;
the sorting mechanism 6: if the detection result is NG, the sorting mechanism and the detection jig move in a matched mode, and the NG slices are sorted to an NG material box; and if the detection is OK, sorting to the original material box.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The utility model provides a full-automatic intelligent flaw detection equipment of semiconductor chip collection dish, includes frame (1), its characterized in that: install feed bin subassembly (2) on frame (1), frame (1) is located feed bin subassembly (2) one side and installs feed mechanism (3), frame (1) is located feed bin subassembly (2) opposite side and installs detection tool (4), frame (1) is located detection tool (4) rear and installs sorting mechanism (6), install testing platform (5) on sorting mechanism (6).
2. The apparatus of claim 1, wherein the apparatus comprises: go up feed bin subassembly (2) including the material loading support, first servo motor (201) and screw rod (202) are installed to material loading support bottom, drive through synchronizing wheel and hold-in range between first servo motor (201) and screw rod (202), install the crane on screw rod (202), second servo motor (205) are installed on the crane top, second servo motor (205) have the removal seat through ball screw (206) drive, remove the seat top and install and wait to examine magazine (207), wait to examine magazine two (208), wait to examine magazine three (209) and NG magazine (210).
3. The apparatus of claim 2, wherein the apparatus comprises: the lifting frame is connected with the feeding support through a first linear bearing (203), a detection assembly (204) is installed on the lifting frame, and the moving seat is connected with the lifting frame through a sliding block and a sliding rail.
4. The apparatus of claim 1, wherein the apparatus comprises: the material distribution mechanism (3) comprises a material distribution support, a first linear sliding rail (301) and a rack (303) are mounted on the material distribution support, a sliding plate is mounted on the first linear sliding rail (301) in a sliding mode, a third servo motor (302) is mounted on the sliding plate, a gear matched with the rack (303) is mounted at the output end of the third servo motor (302), and a first push rod (304) is adjustably mounted on the sliding plate.
5. The apparatus of claim 4, wherein the apparatus comprises: the first push rod (304) is connected with the sliding plate in a sliding mode through the sliding seat (307), a first spring (306) is arranged between the sliding plate and the sliding seat (307), a first spring adjuster (305) for adjusting the first spring (306) is installed on the sliding plate, and a clamping groove is formed in one end, far away from the sliding seat (307), of the first push rod (304).
6. The apparatus of claim 1, wherein the apparatus comprises: detection tool (4) include X axle lead screw module (401), X axle servo motor (402) are installed to X axle lead screw module (401) one end, slidable mounting has Y axle lead screw module (404) on X axle lead screw module (401), Y axle lead screw module (404) one end install, Y axle servo motor (403), slidable mounting has fixing base (405) on Y axle lead screw module (404), slidable mounting has two splint on fixing base (405), install centering motor (406) on fixing base (405), centering motor (406) are through two splint of T shape lead screw (407) drive.
7. The apparatus of claim 6, wherein the apparatus comprises: two a plurality of leading wheels (410) are all installed on the top of splint, two a plurality of cylinders (409) that compress tightly are installed to the equidistance in the outside of splint, the drive has the depression bar on compressing tightly cylinder (409).
8. The apparatus of claim 1, wherein the apparatus comprises: the detection platform (5) comprises a detection support, a camera (501) is installed on the upper portion of the detection support, a first light source (504) and a second light source (505) are installed on the lower portion of the detection support, and a code scanning gun (502) and a spot laser (503) are installed on the outer side, located on the first light source (504) and the second light source (505), of the detection support.
9. The apparatus of claim 1, wherein the apparatus comprises: sorting mechanism (6) is including selecting separately the support, install sharp module (601) on the separation support, fourth servo motor (602) are installed to sharp module one end, slidable mounting has the carriage on sharp module (601), install lift cylinder (603) on the carriage, lift cylinder (603) drive has mount pad (604), second push rod (607) is installed to mount pad (604) one side.
10. The apparatus of claim 9, wherein the apparatus comprises: a second linear bearing (605) and a second spring (606) are arranged between the second push rod (607) and the mounting seat (604), a second spring adjuster used for adjusting the second spring (606) is mounted on the mounting seat (604), and a clamping groove is formed in one end of the second push rod (607).
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| CN202211646852.9A CN115629085A (en) | 2022-12-21 | 2022-12-21 | Full-automatic intelligent flaw detection equipment for semiconductor chip collecting tray |
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| CN202211646852.9A CN115629085A (en) | 2022-12-21 | 2022-12-21 | Full-automatic intelligent flaw detection equipment for semiconductor chip collecting tray |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117339910A (en) * | 2023-12-06 | 2024-01-05 | 智翼博智能科技(苏州)有限公司 | Flexible replacement type tray detection equipment |
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