CN115458449B - 一种机械摆臂与槽体紧凑配合的晶圆槽式清洗机 - Google Patents
一种机械摆臂与槽体紧凑配合的晶圆槽式清洗机 Download PDFInfo
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- CN115458449B CN115458449B CN202211408949.6A CN202211408949A CN115458449B CN 115458449 B CN115458449 B CN 115458449B CN 202211408949 A CN202211408949 A CN 202211408949A CN 115458449 B CN115458449 B CN 115458449B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
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Priority Applications (1)
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CN202211408949.6A CN115458449B (zh) | 2022-11-11 | 2022-11-11 | 一种机械摆臂与槽体紧凑配合的晶圆槽式清洗机 |
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CN202211408949.6A CN115458449B (zh) | 2022-11-11 | 2022-11-11 | 一种机械摆臂与槽体紧凑配合的晶圆槽式清洗机 |
Publications (2)
Publication Number | Publication Date |
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CN115458449A CN115458449A (zh) | 2022-12-09 |
CN115458449B true CN115458449B (zh) | 2023-06-23 |
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CN202211408949.6A Active CN115458449B (zh) | 2022-11-11 | 2022-11-11 | 一种机械摆臂与槽体紧凑配合的晶圆槽式清洗机 |
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Families Citing this family (3)
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CN116682771B (zh) * | 2023-08-02 | 2023-09-26 | 北京特思迪半导体设备有限公司 | 晶圆清洗机构及晶圆清洗系统 |
CN117153751B (zh) * | 2023-11-01 | 2024-01-26 | 泓浒(苏州)半导体科技有限公司 | 基于超真空环境无颗粒物污染的晶圆输送通道 |
CN118143003B (zh) * | 2024-05-10 | 2024-07-09 | 苏州智程半导体科技股份有限公司 | 一种晶圆间距可调式清洗机用清洗槽 |
Family Cites Families (7)
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JPH0691062B2 (ja) * | 1985-04-24 | 1994-11-14 | 日本電気株式会社 | 半導体スライスの洗浄方法 |
TWM416494U (en) * | 2011-07-08 | 2011-11-21 | Gallant Micro Machining Co Ltd | Device for absorption of oil mist or dust |
US9070631B2 (en) * | 2013-03-14 | 2015-06-30 | Mei Llc | Metal liftoff tools and methods |
CN107051966A (zh) * | 2017-03-08 | 2017-08-18 | 常州市科沛达超声工程设备有限公司 | 全自动硅片清洗线及其工作方法 |
CN209478236U (zh) * | 2018-12-29 | 2019-10-11 | 东莞市易辉自动化机械有限公司 | 一种机械手用防护装置 |
CN111081617B (zh) * | 2019-11-12 | 2022-12-13 | 至微半导体(上海)有限公司 | 一种芯片产品提篮后道高速传输且偏移自动复位的装置 |
CN217165553U (zh) * | 2021-12-23 | 2022-08-12 | 苏州金研光电科技股份有限公司 | 一种旋转式超声波清洗机 |
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Address after: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Applicant after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Address before: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Applicant before: Zhicheng semiconductor equipment technology (Kunshan) Co.,Ltd. |
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Address after: 215000, No. 889 Zhonghua Road, Bacheng Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region after: China Address before: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region before: China |