CN115415230A - Inclined slow lifting structure for cleaning machine - Google Patents
Inclined slow lifting structure for cleaning machine Download PDFInfo
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- CN115415230A CN115415230A CN202211031150.XA CN202211031150A CN115415230A CN 115415230 A CN115415230 A CN 115415230A CN 202211031150 A CN202211031150 A CN 202211031150A CN 115415230 A CN115415230 A CN 115415230A
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- rod
- frame
- sliding groove
- moving
- sliding
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- 238000004140 cleaning Methods 0.000 title claims abstract description 50
- 239000007788 liquid Substances 0.000 claims description 42
- 210000000078 claw Anatomy 0.000 claims description 14
- 229910000831 Steel Inorganic materials 0.000 claims description 10
- 239000010959 steel Substances 0.000 claims description 10
- 238000003860 storage Methods 0.000 claims description 9
- 238000011010 flushing procedure Methods 0.000 claims description 8
- 238000003466 welding Methods 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 46
- 229910052710 silicon Inorganic materials 0.000 abstract description 45
- 239000010703 silicon Substances 0.000 abstract description 45
- 235000012431 wafers Nutrition 0.000 abstract description 20
- 238000000034 method Methods 0.000 description 13
- 230000009286 beneficial effect Effects 0.000 description 9
- 238000005406 washing Methods 0.000 description 7
- 238000012544 monitoring process Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- 210000005056 cell body Anatomy 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 210000004027 cell Anatomy 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/045—Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/12—Brushes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention provides an inclined slow lifting structure for a cleaning machine, which comprises: moving frame, the moving frame below is provided with the support frame, there are the stand of two vertical directions on the frame of support frame both ends respectively, the moving frame both ends are provided with two guide bars respectively, be provided with on the guide bar along the first guide way of axial extension, first guide way is passed on the stand top, be provided with two pneumatic cylinders on the frame of support frame other both ends respectively, the regulation pole bottom of vertical setting is connected with the piston rod of pneumatic cylinder, it is articulated with moving frame to adjust the pole top. The invention aims to provide an inclined slow pulling structure for a cleaning machine, which is convenient to use and maximizes the distance between silicon wafers.
Description
Technical Field
The invention relates to the technical field of silicon wafer cleaning, in particular to an inclined slow pulling structure for a cleaning machine.
Background
At present, the design of large-size silicon chip products becomes the common development target of each enterprise, and the replacement of large-size silicon chips becomes urgent need for further improving the efficiency of downstream batteries and components. In the preparation process of the solar cell, the silicon wafer needs to be washed by water to remove impurities on the surface of the silicon wafer, and then dried to carry out the next procedure. Because silicon chip size grow, both sides bracing piece distance extension, when the silicon chip is being mentioned from liquid, because the siphon effect of water, lead to pulling the in-process silicon chip that the groove was mentioned slowly and adsorb together, cause liquid to remain on the silicon chip, influence the stoving effect of silicon chip, the next process that influences silicon chip production goes on, influences the production yield of silicon chip.
Disclosure of Invention
Therefore, the invention aims to solve the problem that the silicon wafers are adsorbed together due to the siphon effect of water when the silicon wafers are lifted from liquid in the prior art.
Therefore, the technical scheme is that the invention provides an inclined slow lifting structure for a cleaning machine, which comprises the following components: the movable frame is characterized in that a support frame is arranged below the movable frame, two vertical upright columns are arranged on frames at two ends of the support frame respectively, two guide rods are arranged at two ends of the movable frame respectively, first guide grooves extending along the axial direction are formed in the guide rods, the top ends of the upright columns penetrate through the first guide grooves, two hydraulic cylinders are arranged on frames at the other two ends of the support frame respectively, the bottom ends of vertically arranged adjusting rods are connected with piston rods of the hydraulic cylinders, and the top ends of the adjusting rods are hinged to the movable frame.
Preferably, a cleaning pool is arranged below the supporting frame, the size of the cleaning pool is larger than that of the movable frame, and the movable frame can reciprocate in the cleaning pool.
Preferably, two groove bodies are symmetrically arranged in the movable frame, baffles are obliquely arranged at the top ends of the two sides of each groove body respectively, the two baffles are symmetrically arranged, and grooves are formed in the baffles at intervals.
Preferably, the support frame is provided with the bracing piece of vertical direction respectively all around, the bracing piece bottom is provided with the supporting seat, the bracing piece top is provided with the mount, mount top both sides are provided with the hoist engine respectively, the steel cable top of vertical setting with the output of hoist engine is connected, the steel cable bottom with the support frame is connected.
Preferably, the top end of the upright post penetrates through the fixed frame to be connected with the first limiting plate, and the upright post can reciprocate on the fixed frame.
Preferably, the angle of inclination of the baffle to the upright is 10 to 15 degrees.
Preferably, the movable frame, the support frame and the fixed frame are of a frame structure formed by welding rectangular steel pipes.
Preferably, the mount bottom is provided with washing unit, washing unit includes: a driving motor, a first crank, a first chute body and a first moving rod,
a box body is arranged in the middle of the bottom end of the fixed frame, an opening is formed in the bottom end of the box body, an electric cylinder in the vertical direction is arranged on the inner wall of the top end of the box body, a piston rod of the electric cylinder is downward connected with a driving motor, an output shaft of the driving motor downward penetrates through one end of a first crank and is connected with a mounting plate, the first crank is fixedly connected with the output shaft of the driving motor, an ultrasonic generator is arranged at the bottom end of the mounting plate, a first sliding groove in the vertical direction is formed in the inner wall of one side of the box body, the bottom end of the first sliding groove is communicated with the opening, a sliding rod in the vertical direction is arranged in the first sliding groove, the top end of the sliding rod is connected with the inner wall of the top end of the first sliding groove, the bottom end of the sliding rod penetrates through the opening and extends out of the box body to be connected with a second limiting plate, a first sliding block is sleeved on the sliding rod and can reciprocate on the sliding rod, a first connecting rod is arranged in the box body, one end of the first sliding rod is connected with a first sliding groove body, and can reciprocate in the first sliding groove;
the other end of the first crank is connected with the first moving rod and the connecting part of the moving plate in a rotating mode, a first cavity is formed in the moving plate, a plurality of nozzles are arranged at the bottom end of the moving plate at intervals, the nozzles are communicated with the first cavity, a liquid storage tank is arranged at the other end of the first moving rod, a cylinder body is arranged at the top end of the first moving rod, a piston is arranged in the cylinder body, one end of a piston shaft is connected with the first sliding groove in a connecting mode, the other end of the piston shaft extends into the cylinder body and is connected with the piston, the piston and the piston shaft can reciprocate in the cylinder body, a second cavity is arranged in the first moving rod, the second cavity is communicated with the first cavity, one end of a liquid inlet pipe is communicated with the liquid storage tank, the other end of the liquid inlet pipe is communicated with the cylinder body, a liquid inlet check valve is arranged on the liquid inlet pipe, one end of the liquid outlet pipe is communicated with the second cavity, the other end of the liquid outlet pipe is communicated with the cylinder body, a liquid outlet check valve is arranged on the liquid outlet pipe, and a hairbrush is arranged at the bottom end of the moving plate.
Preferably, support frame one side is provided with loading attachment, loading attachment includes: a motor, a second crank, a rocker and a first swing rod,
a base is arranged on one side of the support frame, a motor is arranged at the top end of one side of the base, an output shaft of the motor is upwards connected with one end of a second crank, the other end of the second crank is rotatably connected with one end of a rocker, a first rocker is arranged on one side of the motor, one end of the first rocker is rotatably connected with the base, the rocker is rotatably connected with the first rocker, a second guide groove is formed in the first rocker, an L-shaped fixed rod is arranged at the top end of the other side of the base, a second rocker is rotatably connected to the top end of the right-angled end of the L-shaped fixed rod, second sliding grooves are respectively formed in the frames on the two sides of the L-shaped fixed rod, the two second sliding grooves are communicated through an arc-shaped first sliding groove body, a third guide groove is formed in the second rocker, a second moving rod is arranged in the third guide groove, and the second moving rod can reciprocate in the third guide groove;
a fixed column is arranged at one end, close to the motor, of the second moving rod, the fixed column penetrates through the second moving rod, the top end of the fixed column can reciprocate in the second guide groove, the bottom end of the fixed column can reciprocate in the second sliding groove and the arc-shaped first sliding groove, a second sliding groove body is arranged at one end, far away from the motor, of the second oscillating rod, an L-shaped sliding groove is formed in the second sliding groove, the vertical portion of the L-shaped sliding groove is located at one end, far away from the motor, of the second sliding groove, a second sliding block is arranged in the second sliding groove and can reciprocate in the second sliding groove, one end, far away from the motor, of the second moving rod extends out of the third guide groove to be connected with the second sliding block, a third sliding groove is obliquely arranged on the second sliding block, a third sliding block is arranged in the L-shaped sliding groove and can reciprocate in the L-shaped sliding groove, one end of a second connecting rod penetrates through the third sliding groove to be connected with the third sliding block, and an electric mechanical claw is arranged at the other end of the second connecting rod.
Preferably, be provided with the controller on a base lateral wall, be provided with the treater in the controller, be provided with display screen, control panel on the controller lateral wall, display screen one side is provided with alarm and emergency stop button, be provided with first speed sensor and angle sensor on the moving frame, be provided with second speed sensor on the second connecting rod, last height sensor and the pressure sensor of being provided with of electric gripper, the treater respectively with pneumatic cylinder, motor, display screen, control panel, alarm, emergency stop button, first speed sensor, angle sensor, second speed sensor, height sensor, pressure sensor electric connection.
The technical scheme of the invention has the following advantages: the invention provides an inclined slow lifting structure for a cleaning machine, which comprises: moving frame, the moving frame below is provided with the support frame, there are the stand of two vertical directions on the frame of support frame both ends respectively, the moving frame both ends are provided with two guide bars respectively, be provided with on the guide bar along the first guide way of axial extension, first guide way is passed on the stand top, be provided with two pneumatic cylinders on the frame of support frame other both ends respectively, the regulation pole bottom of vertical setting is connected with the piston rod of pneumatic cylinder, it is articulated with moving frame to adjust the pole top. Because will carry the structure to change into the slope promotion slowly, increase the height of cleaning machine cell body, the silicon chip is at the in-process that rises, because silicon chip self gravity reason, the whole slope of silicon chip is in one side, ensures silicon chip interval maximize, and the silicon chip is carrying the in-process interval keeping unanimous slowly, effectively prevents the adhesion of silicon chip, improves the silicon chip yields.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
The technical solution of the present invention is further described in detail by the accompanying drawings and embodiments.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a pictorial representation of a prior art embodiment of the present invention;
FIG. 3 is a side view of the moving frame of the present invention;
FIG. 4 is a schematic view of the flushing device according to the present invention;
FIG. 5 is an enlarged view of the flushing device A of the present invention;
FIG. 6 is an enlarged view of the flushing device B of the present invention;
FIG. 7 is a top view of the flushing device of the present invention;
FIG. 8 is a schematic top view of the loading device of the present invention;
FIG. 9 is a schematic structural view of a second chute body of the feeding device of the present invention;
FIG. 10 is a side view of a second chute of the loading assembly of the present invention;
FIG. 11 is a schematic diagram of a controller according to the present invention;
FIG. 12 is a side view of the controller of the present invention;
wherein, 1-a moving frame, 2-a support frame, 3-a column, 4-a hydraulic cylinder, 5-an adjusting rod, 6-a cleaning pool, 7-a groove body, 8-a baffle, 9-a groove, 10-a support rod, 11-a support seat, 12-a fixed frame, 13-a windlass, 14-a first limit plate, 15-a guide rod, 16-a first guide groove, 17-a driving motor, 18-a first crank, 19-a first slide groove body, 20-a first moving rod, 21-a box body, 22-an opening, 23-an electric cylinder, 24-a mounting plate, 25-an ultrasonic generator, 26-a first slide groove, 27-a first slide block, 28-a first connecting rod, 29-a moving plate, 30-a first cavity, 31-a nozzle and 32-a liquid storage tank, 33-cylinder body, 34-piston, 35-piston shaft, 36-second cavity, 37-liquid inlet pipe, 38-liquid inlet check valve, 39-liquid outlet pipe, 40-liquid outlet check valve, 41-brush, 42-motor, 43-second crank, 44-rocker, 45-first rocker, 46-base, 47-second guide groove, 48-L type fixed rod, 49-second rocker, 50-first sliding groove body, 52-third guide groove, 53-second movable rod, 54-second limit plate, 55-fixed column, 56-second sliding groove body, 57-L type sliding groove, 58-second sliding block, 59-third sliding groove, 60-third sliding block, 61-second connecting rod, 62-electromechanical gripper, 63-slide bar, 64-pressure sensor, 65-controller, 66-processor, 67-display screen, 68-control panel, 69-alarm, 70-emergency stop button, 71-first speed sensor, 72-angle sensor, 73-second speed sensor, 74-height sensor.
Detailed Description
In order to make the technical problems, technical solutions and advantages of the present invention more apparent, the preferred embodiments of the present invention are described below with reference to the accompanying drawings, and it should be understood that the preferred embodiments described herein are only for illustrating and explaining the present invention and are not to be used for limiting the present invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly or indirectly connected to the other element.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the device or element so referred to must be in a particular orientation, constructed or operated in a particular orientation, and is not to be construed as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
An embodiment of the present invention provides an inclined slow pulling structure for a cleaning machine, as shown in fig. 1 to 3, including: moving frame 1, moving frame 1 below is provided with support frame 2, there are the stand 3 of two vertical directions on the frame of 2 both ends of support frame respectively, moving frame 1 both ends are provided with two guide bars 15 respectively, be provided with along axially extended first guide way 16 on the guide bar 15, 3 tops of stand pass first guide way 16, be provided with two pneumatic cylinders 4 on the frame of 2 other both ends frames respectively, the 5 bottoms of regulation pole of vertical setting with the piston rod of pneumatic cylinder 4 is connected, adjust pole 5 tops with moving frame 1 articulates.
The working principle and the beneficial effects of the technical scheme are as follows: when the silicon wafer needs to be cleaned, a flower basket containing the silicon wafer is installed on the movable frame 1, a hydraulic cylinder 4 and an adjusting rod 5 on the supporting frame 2 are started, the heights of two ends of the movable frame 1 are adjusted, the stand column 3 moves in the first guide groove 16, the inclination angle of the movable frame 1 is adjusted, the stand column 3 and the first guide groove 16 are used for limiting the moving range of the movable frame 1 on the stand column 3, the inclination angle range of the movable frame 1 is further limited, the movable frame 1 with the adjusted inclination angle is used, and the supporting frame 2 and the like fall into water for cleaning. Because will draw the structure to change into the slope slowly and promote, increase the height of cleaning machine cell body, the silicon chip is at the in-process that rises, because silicon chip self gravity reason, the whole slope of silicon chip is in one side, guarantee silicon chip interval maximize, and the silicon chip is drawing the in-process interval slowly and keep unanimous, effectively prevents the adhesion of silicon chip, improves the silicon chip yields.
In one embodiment, a cleaning pool 6 is arranged below the support frame 2, the size of the cleaning pool 6 is larger than that of the movable frame 1, and the movable frame 1 can reciprocate in the cleaning pool 6.
The working principle and the beneficial effects of the technical scheme are as follows: the cleaning pool 6 is used for cleaning the silicon wafer in the movable frame 1, and the movable frame 1 moves up and down in the cleaning pool 6, so that the cleaning efficiency and the cleaning quality of the silicon wafer are improved.
In one embodiment, two groove bodies 7 are symmetrically arranged in the moving frame 1, baffle plates 8 are obliquely arranged at the top ends of two sides of each groove body 7 respectively, the two baffle plates 8 are symmetrically arranged, and grooves 9 are arranged on the baffle plates 8 at intervals.
The working principle and the beneficial effects of the technical scheme are as follows: the cell body 7 is used for installing the basket of flowers of placing the silicon chip, and the baffle 8 that the slope set up is used for fixed basket of flowers with recess 9, avoids the silicon chip cleaning process basket of flowers to skid and drops, prevents that the silicon chip from dropping, improves the stability of device.
In one embodiment, the support frame 2 is provided with support bars 10 in a vertical direction around the support frame 2, the bottom ends of the support bars 10 are provided with support seats 11, the top end of the support bar 10 is provided with a fixing frame 12, two sides of the top end of the fixing frame 12 are provided with windlasses 13, the top ends of the vertically arranged steel cables are connected with the output ends of the windlasses 13, and the bottom ends of the steel cables are connected with the support frame 2.
The working principle and the beneficial effects of the technical scheme are as follows: when the moving frame 1 needs to be placed into the cleaning pool 6 for cleaning, the two winches 13 are started to drive the steel cables to extend downwards, the support frame 2 is driven to move downwards, and the moving frame 1 is driven to move downwards, so that the slow lifting structure falls into the cleaning pool 6, the operation is simple, and the moving frame 1 is convenient to lift.
In one embodiment, the top end of the upright 3 passes through the fixing frame 12 and is connected with a first limiting plate 14, and the upright 3 can reciprocate on the fixing frame 12.
The working principle and the beneficial effects of the technical scheme are as follows: the upright column 3 is used for limiting the horizontal movement range of the moving frame 1 and the support frame 2 and preventing the moving frame 1 and the support frame 2 from falling outside the cleaning pool 6 or colliding with the inner wall of the cleaning pool 6; first limiting plate 14 is used for limiting the vertical movement range of moving frame 1 and support frame 2, prevents support frame 2 and the collision of the inner wall of the bottom end of cleaning pool 6, avoids support frame 2 to damage, and improves the life who carries the structure slowly.
In one embodiment, the angle of the baffle 8 inclining to the upright post 3 is 10-15 degrees, so that the firmness of installing the flower basket is improved, and the flower basket is prevented from falling off.
In one embodiment, the movable frame 1, the supporting frame 2, and the fixing frame 12 are all rectangular steel pipes welded to form a frame structure.
The working principle and the beneficial effects of the technical scheme are as follows: the movable frame 1, the support frame 2 and the fixing frame 12 are simple in structure and high in rigidity, and the slow lifting structure is not easy to deform and damage in the using process, can provide stable support and is convenient to install and maintain.
In one embodiment, as shown in fig. 4-7, the bottom end of the fixing frame 12 is provided with a flushing device, which comprises: a driving motor 17, a first crank 18, a first chute body 19, a first moving rod 20,
a box body 21 is arranged in the middle of the bottom end of the fixed frame 12, an opening 22 is formed in the bottom end of the box body 21, an electric cylinder 23 in the vertical direction is arranged on the inner wall of the top end of the box body 21, a piston rod of the electric cylinder 23 is downward connected with a driving motor 17, an output shaft of the driving motor 17 downward passes through one end of a first crank 18 to be connected with a mounting plate 24, the first crank 18 is fixedly connected with the output shaft of the driving motor 17, an ultrasonic generator 25 is arranged at the bottom end of the mounting plate 24, a first sliding chute 26 in the vertical direction is formed in the inner wall of one side of the box body 21, the bottom end of the first sliding chute 26 is communicated with the opening 22, a sliding rod 63 in the vertical direction is arranged in the first sliding chute 26, the top end of the sliding rod 63 is connected with the inner wall of the top end of the first sliding chute 26, the bottom end of the sliding rod 63 passes through the opening 22 to extend out of the box body 21 to be connected with a second limiting plate 54, a first sliding block 27 is sleeved on the sliding rod 63, a first sliding rod 27 is capable of reciprocating on the sliding rod 27, a first sliding rod 28 is arranged in the box body 27, a first sliding rod 19 is rotatably connected with a first sliding chute body 19, a first moving rod moving plate 20 is arranged in the middle of the first sliding chute 19, and a first moving plate 20 is arranged in the first moving plate 19;
the other end of the first crank 18 is connected with the joint of the first moving rod 20 and the moving plate 29 in a rotating manner, a first cavity 30 is arranged in the moving plate 29, a plurality of nozzles 31 are arranged at the bottom end of the moving plate 29 at intervals, the nozzles 31 are communicated with the first cavity 30, a liquid storage tank 32 is arranged at the other end of the first moving rod 20, a cylinder body 33 is arranged at the top end of the first moving rod 20, a piston 34 is arranged in the cylinder body 33, one end of a piston shaft 35 is connected with the first sliding groove 19, the other end of the piston shaft 35 extends into the cylinder body 33 and is connected with the piston 34, the piston 34 and the piston shaft 35 can reciprocate in the cylinder body 33, a second cavity 36 is arranged in the first moving rod 20, the second cavity 36 is communicated with the first cavity 30, one end of a liquid inlet pipe 37 is communicated with the liquid storage tank 32, the other end of the liquid inlet pipe 37 is communicated with the cylinder body 33, a liquid inlet check valve 38 is arranged on the liquid inlet pipe 37, one end of the second cavity 36 is communicated with the second cavity 36, the other end of the liquid outlet pipe is communicated with the cylinder body 33, a one-way valve 39 is arranged on the liquid outlet pipe, a bottom end of the moving plate 29 is communicated with the liquid outlet pipe 33, and a one-way brush 40 is arranged on the moving plate 29.
The working principle and the beneficial effects of the technical scheme are as follows: after the silicon wafer is cleaned in the cleaning pool 6, in the process that the slow-pulling structure is lifted to be separated from the cleaning pool 6, due to the siphon effect of water, cleaning liquid and impurities mixed in the cleaning liquid can remain on the surface of the silicon wafer, the next procedure of the silicon wafer is affected, the electric cylinder 23 is started, the washing device is driven to move downwards along the sliding rod 63 to penetrate through the opening 22 and extend out of the box body 21, the second limiting plate 54 is used for limiting the moving range of the first sliding block 27 and further limiting the downward moving range of the washing device, the driving motor 17 is started to drive the first crank 18 to rotate, the first moving rod 20 and the moving plate 29 are driven to rotate around the output shaft of the driving motor 17 and drive the first moving rod 20 to reciprocate around the output shaft of the driving motor 17, the first moving rod 20 to reciprocate in the first sliding groove body 19, the first moving rod 20 rotates around the first sliding groove body 19 through composite superposition of movement, when the first moving rod 20 moves towards one end far away from the moving plate 29, the distance between the cylinder body 33 and the first sliding groove body 19 is increased, the piston 34 and the piston shaft 35 moves towards one end of the liquid storage tank 32, when the piston moves towards the cavity of the first moving rod 32, the one-way moving liquid outlet valve 34 and the one-way moving rod 32, the one-way moving rod 32 is closed, and the one-way moving rod 32 is close to the one-way moving valve 32, when the one-way moving liquid outlet valve 32, the one-way moving rod 32 is close to the one-way moving liquid outlet valve of the first moving rod 32; the first moving rod 20 drives the moving plate 29 to rotate around the output shaft of the driving motor 17, reciprocate along the first sliding groove body 19 and simultaneously rotate around the first sliding groove body 19, the moving plate 29 drives the nozzles 31 to rotate around the output shaft of the driving motor 17, reciprocate along the first sliding groove body 19 and simultaneously rotate around the first sliding groove body 19, the nozzles 31 perform spiral motion, and the nozzles 31 perform scanning type washing, so that the washing range is wide, and the washing efficiency is high; the moving plate 29 drives the brush 41 to rotate around the output shaft of the driving motor 17, reciprocate along the first sliding groove body 19 and rotate around the first sliding groove body 19, so that the brush 41 sweeps or loosens impurities with strong adsorption force on the surface of the silicon wafer, the nozzles 31 can flush the impurities, the flushing quality is improved, the cleaning effect of the silicon wafer is improved, and the next step of working procedures is facilitated.
In one embodiment, as shown in fig. 8 to 10, a loading device is disposed on one side of the supporting frame 2, and the loading device includes: a motor 42, a second crank 43, a rocker 44, a first rocker 45,
a base 46 is arranged on one side of the support frame 2, a motor 42 is arranged at the top end of one side of the base 46, an output shaft of the motor 42 is connected with one end of a second crank 43 upwards, the other end of the second crank 43 is rotatably connected with one end of a rocker 44, a first rocker 45 is arranged on one side of the motor 42, one end of the first rocker 45 is rotatably connected with the base 46, the rocker 44 is rotatably connected with the first rocker 45, a second guide groove 47 is arranged on the first rocker 45, an L-shaped fixed rod 48 is arranged at the top end of the other side of the base 46, a second rocker 49 is rotatably connected with the top end of the right-angled end of the L-shaped fixed rod 48, second sliding grooves 50 are respectively arranged on the two side frames of the L-shaped fixed rod 48, the two second sliding grooves 50 are communicated with each other through an arc-shaped first sliding groove 51, a third guide groove 52 is arranged on the second rocker 49, a second moving rod 53 is arranged in the third guide groove 52, and the second moving rod 53 can reciprocate in the third guide groove 52;
a fixed column 55 is arranged at one end of the second moving rod 53 close to the motor 42, the fixed column 55 penetrates through the second moving rod 53, the top end of the fixed column 55 can reciprocate in the second guide groove 47, the bottom end of the fixed column 55 can reciprocate in the second sliding groove 50 and the arc-shaped first sliding groove 51, a second sliding groove body 56 is arranged at one end of the second swing rod 49 far away from the motor 42, an L-shaped sliding groove 57 is arranged in the second sliding groove body 56, the vertical portion of the L-shaped sliding groove 57 is located at one end of the second sliding groove body 56 far away from the motor 42, a second sliding block 58 is arranged in the second sliding groove body 56, the second sliding block 58 can reciprocate in the second sliding groove body 56, one end of the second moving rod 53 far away from the motor 42 extends out of the third guide groove 52 to be connected with the second sliding block 58, a third sliding groove 59 is obliquely arranged on the second sliding block 58, a third sliding block 60 is arranged in the L-shaped sliding groove 57, one end of the third sliding block 60 can reciprocate in the L-shaped sliding groove 57, one end of the second connecting rod 61 penetrates through the second sliding groove 59 to be connected with a third sliding block 59, and the other end of the second connecting rod 61 is connected with a third sliding claw 62.
The working principle and the beneficial effects of the technical scheme are as follows: before cleaning silicon wafers, a basket filled with the silicon wafers needs to be installed on the moving frame 1, the motor 42 is started to drive the second crank 43 to rotate, the rocker 44 is driven to reciprocate back and forth and left and right, the first rocker 45 is driven to swing left and right around the joint of the base 46, in an initial state, the second rocker 49 is overlapped with the horizontal frame of the L-shaped fixed rod 48, when the first rocker 45 swings right, the second rocker 49 is fixed, the top end of the fixed column 55 moves right in the second guide groove 47, the bottom end of the fixed column 55 moves right in the horizontal second sliding groove 50, the second moving rod 53 is driven to move right in the third guide groove 52, the second sliding block 58 is driven to move right in the second sliding groove 56, the third sliding block 60, the second connecting rod 61 and the electric mechanical claw 62 are driven to move right along the horizontal groove of the L-shaped sliding groove 57, after the third sliding block 60 moves to the right end of the L-shaped sliding groove 57, the second sliding block 58 continues to drive the third sliding block 59 to continue to move right, the second connecting rod 61 moves right along the third sliding groove 59, and the third sliding block 60 and the electric mechanical claw 62 moves downward along the vertical sliding groove 46 of the L-shaped sliding groove 57 to transport the vertical transport groove 46 for holding the silicon wafers in advance; when the first swing link 45 swings leftwards, the top end of the fixed column 55 moves leftwards in the second guide groove 47, the bottom end of the fixed column 55 moves leftwards in the second horizontal sliding groove 50, the second moving rod 53 moves leftwards in the third guide groove 52, the second sliding block 58 is driven to move leftwards in the second sliding groove 56, the electric mechanical claw 62 and a flower basket grabbed by the electric mechanical claw rise firstly and then move leftwards along the horizontal groove of the L-shaped sliding groove 57, the first swing link 45 continues swinging leftwards, the bottom end of the fixed column 55 moves leftwards in the first sliding groove 51, the second swing link 49 and the second moving rod 53 are driven to swing leftwards, when the bottom end of the fixed column 55 moves into the second vertical sliding groove 50, the second swing link 49 is superposed with the vertical frame of the L-shaped fixed rod 48, the first oscillating bar 45 continuously oscillates leftwards, the second oscillating bar 49 is fixed, the top end of the fixed column 55 moves forwards in the second guide groove 47, the bottom end of the fixed column 55 moves forwards in the vertical second sliding groove 50 to drive the second moving rod 53 and the second sliding block 58 to move forwards along the third guide groove 52 to drive the third sliding block 60, the second connecting rod 61 and the electric mechanical claw 62 to move forwards and downwards along the L-shaped sliding groove 57, the electric mechanical claw 62 places the grabbed flower basket in the groove body 7 of the moving frame 1, the processes are repeated, the silicon wafers to be cleaned are placed on the moving frame 1 in sequence, the flower baskets are not influenced mutually, the silicon wafer feeding is safe and orderly, and the feeding efficiency is high; the electric mechanical claw 62 can directly install the flower basket on the baffle 8 and the groove 9, secondary adjustment is not needed, and the flower basket installation precision is high; the feeding device can adjust the moving direction of the grabbed flower basket, can install the flower basket from an immovable source on the movable frame 1, and is small in structure, small in occupied space and convenient to use.
In one embodiment, as shown in fig. 11 to 12, a controller 65 is disposed on one side wall of the base 46, a processor 66 is disposed in the controller 65, a display screen 67 and a control panel 68 are disposed on one side wall of the controller 65, an alarm 69 and an emergency stop button 70 are disposed on one side of the display screen 67, a first speed sensor 71 and an angle sensor 72 are disposed on the moving frame 1, a second speed sensor 73 is disposed on the second connecting rod 61, a height sensor 74 and a pressure sensor 64 are disposed on the electric gripper 62, and the processor 66 is electrically connected to the hydraulic cylinder 4, the motor 42, the display screen 67, the control panel 68, the alarm 69, the emergency stop button 70, the first speed sensor 71, the angle sensor 72, the second speed sensor 73, the height sensor 74, and the pressure sensor 64, respectively.
The working principle and the beneficial effects of the technical scheme are as follows: the controller 65 is used for controlling the operation of each device, and the first speed sensor 71 is used for monitoring the moving speed of the moving frame 1; the angle sensor 72 is used for monitoring the inclination angle of the moving frame 1; a second speed sensor 73 for monitoring the moving speed of the electromechanical jaw 62; the height sensor 74 is used for monitoring the position height of the electric mechanical claw 62, so that the electric mechanical claw 62 can accurately grab the flower basket conveniently; the pressure sensor 64 is used for monitoring the pressure applied to the basket grabbed by the electric mechanical claw 62, so that the basket is prevented from falling off due to the fact that the electric mechanical claw 62 is not firmly grabbed; the processor 66 is used for controlling the operation of each sensor and processing the data monitored by each sensor; the display screen 67 is used for displaying the running state of each mechanism and the monitoring data of each sensor; the control panel 68 is used for inputting control commands and controlling the operation of each mechanism; when the slow-pulling structure fails, the alarm 69 gives an alarm sound to remind workers of timely handling; when a sudden situation occurs, the slow pull structure can be directly closed by pressing the emergency stop button 70, thereby avoiding greater loss.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. An inclined slow lifting structure for a cleaning machine, comprising: moving frame (1), moving frame (1) below is provided with support frame (2), there are stand (3) of two vertical directions on the frame of support frame (2) both ends respectively, moving frame (1) both ends are provided with two guide bars (15) respectively, be provided with on guide bar (15) along axially extended first guide way (16), stand (3) top is passed first guide way (16), be provided with two pneumatic cylinders (4) on the frame of support frame (2) other both ends respectively, vertical regulation pole (5) bottom that sets up with the piston rod of pneumatic cylinder (4) is connected, adjust pole (5) top with moving frame (1) is articulated.
2. The inclined slow lifting structure for the cleaning machine as claimed in claim 1, characterized in that a cleaning pool (6) is arranged below the supporting frame (2), the size of the cleaning pool (6) is larger than that of the moving frame (1), and the moving frame (1) can reciprocate in the cleaning pool (6).
3. The inclined slow lifting structure for the cleaning machine is characterized in that two tank bodies (7) are symmetrically arranged in the moving frame (1), baffle plates (8) are obliquely arranged at the top ends of the two sides of each tank body (7), the two baffle plates (8) are symmetrically arranged, and grooves (9) are arranged on the baffle plates (8) at intervals.
4. The inclined slow lifting structure for the cleaning machine according to claim 1, wherein the support frame (2) is provided with vertical support rods (10) around each, the bottom end of each support rod (10) is provided with a support base (11), the top end of each support rod (10) is provided with a fixing frame (12), the two sides of the top end of each fixing frame (12) are provided with a winding machine (13), the top end of a vertically arranged steel cable is connected with the output end of each winding machine (13), and the bottom end of each steel cable is connected with the support frame (2).
5. The inclined slow lifting structure for the cleaning machine as claimed in claim 4, characterized in that the top end of the upright (3) passes through the fixing frame (12) and is connected with a first limit plate (14), and the upright (3) can reciprocate on the fixing frame (12).
6. An inclined slow lifting structure for a cleaning machine according to claim 3, wherein the angle of inclination of the baffle plate (8) to the upright (3) is 10 to 15 degrees.
7. The inclined slow lifting structure for the cleaning machine is characterized in that the movable frame (1), the support frame (2) and the fixed frame (12) are all of a frame structure formed by welding rectangular steel pipes.
8. The inclined slow-lifting structure for the cleaning machine as claimed in claim 4, characterized in that a flushing device is arranged at the bottom end of the fixing frame (12), said flushing device comprising: a driving motor (17), a first crank (18), a first chute body (19) and a first moving rod (20),
the middle of the bottom end of the fixing frame (12) is provided with a box body (21), the bottom end of the box body (21) is provided with an opening (22), an electric cylinder (23) in the vertical direction is arranged on the inner wall of the top end of the box body (21), a piston rod of the electric cylinder (23) is connected with a driving motor (17) downwards, an output shaft of the driving motor (17) downwards passes through one end of a first crank (18) to be connected with a mounting plate (24), the first crank (18) is fixedly connected with the output shaft of the driving motor (17), the bottom end of the mounting plate (24) is provided with an ultrasonic generator (25), a first sliding groove (26) in the vertical direction is arranged on the inner wall of one side of the box body (21), the bottom end of the first sliding groove (26) is communicated with the opening (22), a sliding rod (63) in the vertical direction is arranged in the first sliding groove (26), the top end of the sliding rod (63) is connected with the inner wall of the top end of the first sliding groove (26), the sliding rod (63) penetrates through the opening (22) to extend out of the limiting plate (21) to be connected with a second limiting plate (54), a sliding block (27) is sleeved on the first sliding block (27), and one end of the first sliding rod (27) is arranged in the reciprocating rod (27), the other end of the first connecting rod (28) is rotatably connected with a first sliding chute body (19), a first moving rod (20) is arranged in the first sliding chute body (19), one end of the first moving rod (20) penetrates through the first sliding chute body (19) to be connected with the middle of a moving plate (29), and the first moving rod (20) can reciprocate in the first sliding chute body (19);
the other end of the first crank (18) is connected with the joint of the first moving rod (20) and the moving plate (29) in a rotating manner, a first cavity (30) is formed in the moving plate (29), a plurality of nozzles (31) are arranged at the bottom end of the moving plate (29) at intervals, the nozzles (31) are communicated with the first cavity (30), a liquid storage box (32) is arranged at the other end of the first moving rod (20), a cylinder body (33) is arranged at the top end of the first moving rod (20), a piston (34) is arranged in the cylinder body (33), one end of a piston shaft (35) is connected with the first sliding groove body (19), the other end of the piston shaft (35) extends into the cylinder body (33) to be connected with the piston (34), the piston (34) and the piston shaft (35) can reciprocate in the cylinder body (33), a second cavity (36) is formed in the first moving rod (20), the second cavity (36) is communicated with the first cavity (30), one end of a liquid inlet pipe (37) is communicated with the liquid storage box (32), the other end of the liquid inlet pipe (37) is communicated with the liquid storage tube (37), and a second cavity (36) is communicated with a one-way liquid inlet pipe (39) and a second cavity (38), the other end of the liquid outlet pipe (39) is communicated with the cylinder body (33), a liquid outlet one-way valve (40) is arranged on the liquid outlet pipe (39), and a brush (41) is arranged at the bottom end of the moving plate (29).
9. The inclined slow lifting structure for the cleaning machine as claimed in claim 1, characterized in that a loading device is arranged on one side of the supporting frame (2), and the loading device comprises: a motor (42), a second crank (43), a rocker (44) and a first swing rod (45),
a base (46) is arranged on one side of the support frame (2), an electric motor (42) is arranged at the top end of one side of the base (46), an output shaft of the electric motor (42) faces upwards and is connected with one end of a second crank (43), the other end of the second crank (43) is rotatably connected with one end of a rocker (44), a first rocker (45) is arranged on one side of the electric motor (42), one end of the first rocker (45) is rotatably connected with the base (46), the rocker (44) is rotatably connected with the first rocker (45), a second guide groove (47) is formed in the first rocker (45), an L-shaped fixing rod (48) is arranged at the top end of the other side of the base (46), a second rocker (49) is rotatably connected to the top end of the right-angle end of the L-shaped fixing rod (48), second sliding grooves (50) are respectively formed in the side frames of the L-shaped fixing rod (48), the two second sliding grooves (50) are communicated through arc-shaped first sliding groove bodies (51), a third guide groove (52) is formed in the second sliding groove (53), and a second guide groove (53) can move in a reciprocating manner;
a fixed column (55) is arranged at one end, close to the motor (42), of the second moving rod (53), the fixed column (55) penetrates through the second moving rod (53), the top end of the fixed column (55) can reciprocate in the second guide groove (47), the bottom end of the fixed column (55) can reciprocate in the second sliding groove (50) and the arc-shaped first sliding groove body (51), a second sliding groove body (56) is arranged at one end, far away from the motor (42), of the second swing rod (49), an L-shaped sliding groove (57) is arranged in the second sliding groove body (56), the vertical part of the L-shaped sliding groove (57) is located at one end, far away from the motor (42), of the second sliding groove body (56), a second sliding block (58) is arranged in the second sliding groove body (56), the second sliding block (58) can reciprocate in the second sliding groove body (56), one end, far away from the motor (42), of the second moving rod (53) extends out of the third guide groove (52) to be connected with the second sliding block (58), a third sliding groove (57) is arranged in the second sliding groove body (57), and a third sliding groove (57) can tilt in the second sliding groove (58), and the third sliding groove (57) is arranged in the second sliding groove (57), one end of a second connecting rod (61) penetrates through the third sliding groove (59) to be connected with the third sliding block (60), and the other end of the second connecting rod (61) is provided with an electric mechanical claw (62).
10. The inclined slow lifting structure for the cleaning machine according to claim 9, wherein a controller (65) is disposed on one side wall of the base (46), a processor (66) is disposed in the controller (65), a display screen (67) and a control panel (68) are disposed on one side wall of the controller (65), an alarm (69) and an emergency stop button (70) are disposed on one side of the display screen (67), a first speed sensor (71) and an angle sensor (72) are disposed on the moving frame (1), a second speed sensor (73) is disposed on the second connecting rod (61), a height sensor (74) and a pressure sensor (64) are disposed on the electric gripper (62), and the processor (66) is electrically connected to the hydraulic cylinder (4), the motor (42), the display screen (67), the control panel (68), the alarm (69), the emergency stop button (70), the first speed sensor (71), the angle sensor (72), the second speed sensor (73), the height sensor (74) and the pressure sensor (64), respectively.
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| CN202211031150.XA CN115415230B (en) | 2022-08-26 | 2022-08-26 | Inclined slow lifting structure for cleaning machine |
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| CN202211031150.XA CN115415230B (en) | 2022-08-26 | 2022-08-26 | Inclined slow lifting structure for cleaning machine |
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Cited By (2)
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| CN116851343A (en) * | 2023-07-17 | 2023-10-10 | 西安医学院第一附属医院 | Clinical apparatus cleaner for gastroenterology |
| TWI829537B (en) * | 2022-12-07 | 2024-01-11 | 大陸商西安奕斯偉材料科技股份有限公司 | Devices and equipment for silicon wafer degumming |
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| TWI829537B (en) * | 2022-12-07 | 2024-01-11 | 大陸商西安奕斯偉材料科技股份有限公司 | Devices and equipment for silicon wafer degumming |
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| CN116851343B (en) * | 2023-07-17 | 2024-02-23 | 西安医学院第一附属医院 | Clinical apparatus cleaner for gastroenterology |
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