CN115415230B - Inclined slow lifting structure for cleaning machine - Google Patents
Inclined slow lifting structure for cleaning machine Download PDFInfo
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- CN115415230B CN115415230B CN202211031150.XA CN202211031150A CN115415230B CN 115415230 B CN115415230 B CN 115415230B CN 202211031150 A CN202211031150 A CN 202211031150A CN 115415230 B CN115415230 B CN 115415230B
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- sliding groove
- frame
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- movable
- motor
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- 238000004140 cleaning Methods 0.000 title claims abstract description 41
- 239000007788 liquid Substances 0.000 claims description 35
- 238000011010 flushing procedure Methods 0.000 claims description 15
- 229910000831 Steel Inorganic materials 0.000 claims description 10
- 239000010959 steel Substances 0.000 claims description 10
- 210000000078 claw Anatomy 0.000 claims description 8
- 238000003860 storage Methods 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims 6
- 238000003466 welding Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 45
- 229910052710 silicon Inorganic materials 0.000 abstract description 45
- 239000010703 silicon Substances 0.000 abstract description 45
- 235000012431 wafers Nutrition 0.000 description 27
- 238000000034 method Methods 0.000 description 14
- 230000009286 beneficial effect Effects 0.000 description 9
- 230000033001 locomotion Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 210000005056 cell body Anatomy 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000003973 irrigation Methods 0.000 description 1
- 230000002262 irrigation Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/045—Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/12—Brushes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention provides an inclined slow lifting structure for a cleaning machine, which comprises the following components: the movable frame comprises a movable frame body, wherein a supporting frame is arranged below the movable frame body, two upright posts in the vertical direction are respectively arranged on frames at two ends of the supporting frame body, two guide rods are respectively arranged at two ends of the movable frame body, a first guide groove extending along the axial direction is formed in each guide rod, two hydraulic cylinders are respectively arranged on frames at the other two ends of the supporting frame body, the bottom ends of adjusting rods in the vertical direction are connected with piston rods of the hydraulic cylinders, and the top ends of the adjusting rods are hinged to the movable frame body. The invention aims to provide an inclined slow lifting structure for a cleaning machine, which is convenient to use and has maximized silicon chip spacing.
Description
Technical Field
The invention relates to the technical field of silicon wafer cleaning, in particular to an inclined slow lifting structure for a cleaning machine.
Background
Currently, the design of large-size silicon wafer products is a target for common development of enterprises, and in order to further improve efficiency, downstream batteries and components are urgent demands for the generation of large-size silicon wafers. In the preparation process of the solar cell, the silicon wafer is required to be washed by water to remove impurities on the surface of the silicon wafer, and then dried to carry out the next process. Because the silicon wafer size is enlarged, the distance between the support rods on two sides is prolonged, when the silicon wafer is lifted from the liquid, the silicon wafers are adsorbed together in the process of lifting the slow lifting groove due to the siphon effect of water, so that the liquid is remained on the silicon wafers, the drying effect of the silicon wafers is affected, the next process of silicon wafer production is affected, and the production yield of the silicon wafers is affected.
Disclosure of Invention
Therefore, the invention aims to solve the problem that the silicon wafers are adsorbed together due to the siphon effect of water when the silicon wafers are lifted from the liquid in the prior art.
Therefore, the technical scheme adopted by the invention is that the invention provides an inclined slow lifting structure for a cleaning machine, which comprises the following components: the movable frame comprises a movable frame body, wherein a supporting frame is arranged below the movable frame body, two upright posts in the vertical direction are respectively arranged on frames at two ends of the supporting frame body, two guide rods are respectively arranged at two ends of the movable frame body, a first guide groove extending along the axial direction is formed in each guide rod, the top ends of the upright posts penetrate through the first guide grooves, two hydraulic cylinders are respectively arranged on frames at two other ends of the supporting frame body, the bottom ends of an adjusting rod in the vertical direction are connected with piston rods of the hydraulic cylinders, and the top ends of the adjusting rod are hinged to the movable frame body.
Preferably, a cleaning tank is arranged below the supporting frame, the size of the cleaning tank is larger than that of the movable frame, and the movable frame can reciprocate in the cleaning tank.
Preferably, two groove bodies are symmetrically arranged in the moving frame, baffle plates are obliquely arranged at the top ends of two sides of the groove bodies respectively, two baffle plates are symmetrically arranged, and grooves are formed in the baffle plates at intervals.
Preferably, the support frame is provided with the bracing piece of vertical direction all around respectively, the bracing piece bottom is provided with the supporting seat, the bracing piece top is provided with the mount, mount top both sides are provided with the hoist engine respectively, the steel cable top of vertical setting with the output of hoist engine is connected, the steel cable bottom with the support frame is connected.
Preferably, the top end of the upright post penetrates through the fixing frame to be connected with the first limiting plate, and the upright post can reciprocate on the fixing frame.
Preferably, the baffle plate is inclined to the upright post by an angle of 10-15 degrees.
Preferably, the movable frame, the support frame and the fixed frame are all rectangular steel pipes welded to form a frame structure.
Preferably, the bottom end of the fixing frame is provided with a flushing device, and the flushing device comprises: a driving motor, a first crank, a first chute body and a first moving rod,
the middle of the bottom end of the fixing frame is provided with a box body, the bottom end of the box body is provided with an opening, the inner wall of the top end of the box body is provided with an electric cylinder in the vertical direction, a piston rod of the electric cylinder faces downwards and is connected with a driving motor, an output shaft of the driving motor downwards passes through one end of a first crank to be connected with a mounting plate, the first crank is fixedly connected with an output shaft of the driving motor, the bottom end of the mounting plate is provided with an ultrasonic generator, the inner wall of one side of the box body is provided with a first sliding groove in the vertical direction, the bottom end of the first sliding groove is communicated with the opening, a sliding rod in the vertical direction is arranged in the first sliding groove, the top end of the sliding rod is connected with the inner wall of the top end of the first sliding groove, the bottom end of the sliding rod penetrates through the opening to extend out of the box body and is connected with a second limiting plate, a first sliding block is sleeved on the sliding rod and can reciprocate on the sliding rod, one end of the first connecting rod is fixedly connected with the first sliding block, the other end of the first connecting rod is rotationally connected with the first sliding block, a first sliding groove is arranged on the inner wall of the first sliding groove, a first sliding groove is arranged in the first sliding groove, and the first sliding groove can reciprocate in the first sliding groove and can reciprocate in the first sliding groove;
the utility model discloses a brush, including movable plate, piston shaft, feed liquor pipe, first crank other end with the junction of movable plate with the first movable rod with the movable plate rotates to be connected, be provided with first cavity in the movable plate, the movable plate bottom interval is provided with a plurality of nozzles, the nozzle with first cavity intercommunication, the first movable rod other end is provided with the liquid reserve tank, first movable rod top is provided with the cylinder body, be provided with the piston in the cylinder body, piston shaft one end with first spout body coupling, the piston shaft other end extends into in the cylinder body with piston connection, the piston with piston shaft can be in reciprocating motion in the cylinder body, be provided with the second cavity in the first movable rod, the second cavity with first cavity intercommunication, feed liquor pipe one end with the liquid reserve tank intercommunication, the feed liquor pipe other end with the cylinder body intercommunication, be provided with the feed liquor check valve on the feed liquor pipe, the drain pipe one end with second cavity intercommunication, the drain pipe other end with the cylinder body intercommunication, be provided with the drain check valve on the drain pipe, the movable plate bottom is provided with.
Preferably, a feeding device is arranged on one side of the supporting frame, and the feeding device comprises: a motor, a second crank, a rocker, a first swing rod,
the support frame is characterized in that a base is arranged on one side of the support frame, a motor is arranged at the top end of one side of the base, an output shaft of the motor is upwards connected with one end of a second crank, the other end of the second crank is in rotary connection with one end of a rocker, a first rocker is arranged on one side of the motor, one end of the first rocker is in rotary connection with the base, the rocker is in rotary connection with the first rocker, a second guide groove is formed in the first rocker, an L-shaped fixing rod is arranged at the top end of the other side of the base, a second sliding groove is rotatably connected to the top end of a right-angle end of the L-shaped fixing rod, second sliding grooves are respectively formed in side frames of two sides of the L-shaped fixing rod, the two second sliding grooves are communicated through an arc-shaped first sliding groove body, a third guide groove is formed in the second rocker, a second moving rod is arranged in the third guide groove, and the second moving rod can reciprocate in the third guide groove;
the second movable rod is close to one end of the motor and is provided with a fixed column, the fixed column penetrates through the second movable rod, the top end of the fixed column can reciprocate in the second guide groove, the bottom end of the fixed column can reciprocate in the second sliding groove and the arc-shaped first sliding groove, one end, far away from the motor, of the second swing rod is provided with a second sliding groove body, an L-shaped sliding groove is arranged in the second sliding groove body, the vertical part of the L-shaped sliding groove is located at one end, far away from the motor, of the second sliding groove body, a second sliding block is arranged in the second sliding groove body, the second movable rod is far away from one end, far away from the motor, of the second sliding groove is extended out of the third guide groove and is connected with the second sliding block, a third sliding groove is obliquely arranged on the second sliding block, a third sliding block is arranged in the L-shaped sliding groove, the third sliding block can reciprocate in the L-shaped sliding groove, and a first connecting rod penetrates through the third sliding groove and a third connecting rod is connected with a third mechanical claw.
Preferably, a controller is arranged on one side wall of the base, a processor is arranged in the controller, a display screen and a control panel are arranged on one side wall of the controller, an alarm and a sudden stop button are arranged on one side of the display screen, a first speed sensor and an angle sensor are arranged on the movable frame, a second speed sensor is arranged on the second connecting rod, a height sensor and a pressure sensor are arranged on the electric gripper, and the processor is respectively connected with the hydraulic cylinder, the motor, the display screen, the control panel, the alarm, the sudden stop button, the first speed sensor, the angle sensor, the second speed sensor, the height sensor and the pressure sensor.
The technical scheme of the invention has the following advantages: the invention provides an inclined slow lifting structure for a cleaning machine, which comprises the following components: the movable frame comprises a movable frame body, wherein a supporting frame is arranged below the movable frame body, two upright posts in the vertical direction are respectively arranged on frames at two ends of the supporting frame body, two guide rods are respectively arranged at two ends of the movable frame body, a first guide groove extending along the axial direction is formed in each guide rod, two hydraulic cylinders are respectively arranged on frames at the other two ends of the supporting frame body, the bottom ends of adjusting rods in the vertical direction are connected with piston rods of the hydraulic cylinders, and the top ends of the adjusting rods are hinged to the movable frame body. Because with slowly carry and draw the structure change to slope promotion, increase the height of cleaning machine cell body, the in-process that the silicon chip risees, because silicon chip self gravity reason, the whole slope of silicon chip is in one side, guarantee silicon chip interval maximize, and the silicon chip keeps unanimous at slow carry and draw in-process intermediate distance, effectively prevents the adhesion of silicon chip, improves the silicon chip yields.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims thereof as well as the appended drawings.
The technical scheme of the invention is further described in detail through the drawings and the embodiments.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a prior art diagram of the present invention;
FIG. 3 is a side view of a moving frame of the present invention;
FIG. 4 is a schematic view of the structure of the flushing device of the present invention;
FIG. 5 is an enlarged view of the flushing device A of the present invention;
FIG. 6 is an enlarged view of the flushing device B of the present invention;
FIG. 7 is a top view of the irrigation device of the present invention;
FIG. 8 is a schematic top view of the feeding device of the present invention;
FIG. 9 is a schematic view of a second chute body structure of the feeding device of the present invention;
FIG. 10 is a side view of a second chute body of the loading device of the present invention;
FIG. 11 is a schematic diagram of a controller according to the present invention;
FIG. 12 is a side view of a controller according to the present invention;
wherein, 1-moving frame, 2-supporting frame, 3-upright post, 4-hydraulic cylinder, 5-adjusting rod, 6-cleaning tank, 7-groove body, 8-baffle, 9-groove, 10-supporting rod, 11-supporting seat, 12-fixing frame, 13-hoist, 14-first limiting plate, 15-guiding rod, 16-first guiding groove, 17-driving motor, 18-first crank, 19-first groove body, 20-first moving rod, 21-box body, 22-opening, 23-electric cylinder, 24-mounting plate, 25-ultrasonic generator, 26-first groove, 27-first sliding block, 28-first connecting rod, 29-moving plate, 30-first cavity, 31-nozzle, 32-liquid storage tank, 33-cylinder, 34-piston, 35-piston shaft, 36-second cavity, 37-liquid inlet pipe, 38-liquid inlet check valve, 39-liquid outlet pipe, 40-liquid outlet check valve, 41-brush, 42-motor, 43-second crank, 44-rocker, 45-first rocker, 46-base, 47-second guide groove, 48-L-shaped fixing rod, 49-second rocker, 50-first chute body, 52-third guide groove, 53-second moving rod, 54-second limiting plate, 55-fixing column, 56-second chute body, 57-L-chute, 58-second slide block, 59-third chute, 60-third slide block, 61-second connecting rod, 62-electric mechanical claw, 63-slide bar, 64-pressure sensor, 65-controller, 66-processor, 67-display screen, 68-control panel, 69-alarm, 70-scram button, 71-first speed sensor, 72-angle sensor, 73-second speed sensor, 74-height sensor.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more apparent, preferred embodiments of the present invention will be described below with reference to the accompanying drawings, it being understood that the preferred embodiments described herein are for illustrating and explaining the present invention only and are not limiting the present invention.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly or indirectly connected to the other element.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are merely for convenience in describing and simplifying the description based on the orientation or positional relationship shown in the drawings, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
The embodiment of the invention provides an inclined slow lifting structure for a cleaning machine, which is shown in figures 1-3 and comprises the following components: the movable frame 1, movable frame 1 below is provided with support frame 2, there are stand 3 of two vertical directions respectively on the frame of support frame 2 both ends, movable frame 1 both ends are provided with two guide bars 15 respectively, be provided with on the guide bar 15 along the first guide slot 16 of axial extension, stand 3 top passes first guide slot 16, be provided with two pneumatic cylinders 4 respectively on the frame of support frame 2 both ends in addition, the regulation pole 5 bottom of vertical setting with the piston rod of pneumatic cylinder 4 is connected, regulation pole 5 top with movable frame 1 articulates.
The working principle and the beneficial effects of the technical scheme are as follows: when the silicon wafer needs to be cleaned, the flower basket for containing the silicon wafer is arranged on the movable frame 1, the hydraulic cylinder 4 and the adjusting rod 5 on the supporting frame 2 are started, the heights of the two ends of the movable frame 1 are adjusted, the upright post 3 moves in the first guide groove 16, the inclination angle of the movable frame 1 is adjusted, the upright post 3 and the first guide groove 16 are used for limiting the moving range of the movable frame 1 on the upright post 3, the inclination angle range of the movable frame 1 is further limited, and the movable frame 1, the supporting frame 2 and the like with the adjusted inclination angles fall into water to be cleaned. Because with slowly carry and draw the structure change to slope promotion, increase the height of cleaning machine cell body, the in-process that the silicon chip risees, because silicon chip self gravity reason, the whole slope of silicon chip is in one side, guarantee silicon chip interval maximize, and the silicon chip keeps unanimous at slow carry and draw in-process intermediate distance, effectively prevents the adhesion of silicon chip, improves the silicon chip yields.
In one embodiment, a cleaning tank 6 is arranged below the support frame 2, the cleaning tank 6 is larger than the moving frame 1 in size, and the moving frame 1 can reciprocate in the cleaning tank 6.
The working principle and the beneficial effects of the technical scheme are as follows: the cleaning pool 6 is used for cleaning the silicon wafers in the movable frame 1, and the movable frame 1 moves up and down in the cleaning pool 6, so that the cleaning efficiency and the cleaning quality of the silicon wafers are improved.
In one embodiment, two groove bodies 7 are symmetrically arranged in the moving frame 1, baffle plates 8 are respectively and obliquely arranged at the top ends of two sides of the groove bodies 7, two baffle plates 8 are symmetrically arranged, and grooves 9 are formed in the baffle plates 8 at intervals.
The working principle and the beneficial effects of the technical scheme are as follows: the cell body 7 is used for installing the basket of placing the silicon chip, and baffle 8 and recess 9 that the slope set up are used for fixed basket of flowers, avoid the silicon chip to wash the in-process basket of flowers to skid and drop, prevent that the silicon chip from dropping, improve the stability of device.
In one embodiment, support rods 10 in the vertical direction are respectively arranged around the support frame 2, support seats 11 are arranged at the bottom ends of the support rods 10, fixing frames 12 are arranged at the top ends of the support rods 10, windlass 13 are respectively arranged at two sides of the top ends of the fixing frames 12, the top ends of vertically arranged steel cables are connected with the output ends of the windlass 13, and the bottom ends of the steel cables are connected with the support frame 2.
The working principle and the beneficial effects of the technical scheme are as follows: when the movable frame 1 is required to be placed into the cleaning pool 6 for cleaning, the two windlass 13 are started, the steel cable is driven to extend downwards, the support frame 2 is driven to move downwards, the movable frame 1 is driven to move downwards, the slow lifting structure falls into the cleaning pool 6, the operation is simple, and the movable frame 1 is convenient to lift.
In one embodiment, the top end of the upright 3 is connected to the first limiting plate 14 through the fixing frame 12, and the upright 3 can reciprocate on the fixing frame 12.
The working principle and the beneficial effects of the technical scheme are as follows: the upright post 3 is used for limiting the horizontal movement range of the movable frame 1 and the support frame 2 and preventing the movable frame 1 and the support frame 2 from falling outside the cleaning pool 6 or colliding with the inner wall of the cleaning pool 6; the first limiting plate 14 is used for limiting the vertical movement range of the movable frame 1 and the supporting frame 2, preventing the supporting frame 2 from colliding with the inner wall of the bottom end of the cleaning tank 6, avoiding the damage of the supporting frame 2 and prolonging the service life of the slow lifting structure.
In one embodiment, the baffle 8 is inclined to the upright 3 by an angle of 10-15 degrees, so that the firmness of installing the flower basket is improved, and the flower basket is prevented from falling off.
In one embodiment, the moving frame 1, the supporting frame 2 and the fixing frame 12 are all welded by rectangular steel pipes to form a frame structure.
The working principle and the beneficial effects of the technical scheme are as follows: the movable frame 1, the support frame 2 and the fixed frame 12 are simple in structure, high in rigidity and convenient to install and maintain, and are not easy to deform and damage in the use process of the slow lifting structure.
In one embodiment, as shown in fig. 4-7, the bottom end of the fixing frame 12 is provided with a flushing device, and the flushing device includes: a driving motor 17, a first crank 18, a first chute body 19, a first moving rod 20,
a box body 21 is arranged in the middle of the bottom end of the fixed frame 12, an opening 22 is arranged at the bottom end of the box body 21, an electric cylinder 23 in the vertical direction is arranged on the inner wall of the top end of the box body 21, a piston rod of the electric cylinder 23 is downwards connected with a driving motor 17, an output shaft of the driving motor 17 downwards passes through one end of a first crank 18 to be connected with a mounting plate 24, the first crank 18 is fixedly connected with the output shaft of the driving motor 17, an ultrasonic generator 25 is arranged at the bottom end of the mounting plate 24, a first chute 26 in the vertical direction is arranged on the inner wall of one side of the box body 21, the bottom end of the first chute 26 is communicated with the opening 22, a sliding rod 63 in the vertical direction is arranged in the first chute 26, the top end of the sliding rod 63 is connected with the inner wall of the top end of the first chute 26, the bottom end of the sliding rod 63 extends out of the box body 21 to be connected with a second limiting plate 54 through the opening 22, a first sliding rod 27 is sleeved on the sliding rod 63, the first sliding rod 27 can reciprocate on the first sliding rod 63, a first sliding rod 28 is arranged in the box body 21, a first sliding rod 28 is arranged in the first sliding rod 28 and the first sliding rod 19 is in the first sliding rod 19, and the first sliding rod 19 is in the first sliding rod 19;
the utility model discloses a liquid-suction device, including first crank 18, first movable rod 20, movable plate 29, piston shaft 35, piston shaft 33, piston shaft 34 can be in reciprocating motion in cylinder body 33, be provided with a plurality of nozzles 31 in the interval of movable plate 29 bottom, nozzle 31 with first cavity 30 intercommunication, the first movable rod 20 other end is provided with liquid reserve tank 32, the first movable rod 20 top is provided with cylinder body 33, be provided with piston 34 in the cylinder body 33, piston shaft 35 one end with first spout body 19 is connected, the piston shaft 35 other end extends into in cylinder body 33 with piston 34 is connected, piston shaft 34 with piston shaft 35 can be in cylinder body 33 reciprocating motion, be provided with second cavity 36 in the first movable rod 20, second cavity 36 with first cavity 30 intercommunication, liquid inlet tube 37 one end with liquid reserve tank 32 intercommunication, the liquid inlet tube 37 other end with cylinder body 33 intercommunication, be provided with liquid inlet tube one end 38, second cavity 39 with liquid outlet tube 39, be provided with liquid outlet tube 39 on the other end is provided with liquid outlet tube 39, the other end is provided with liquid outlet tube 39 on the cylinder body 33 intercommunication, the other end is provided with liquid outlet tube 39.
The working principle and the beneficial effects of the technical scheme are as follows: after the silicon wafer is cleaned in the cleaning pool 6, in the process that the slow lifting structure is lifted to be separated from the cleaning pool 6, the surface of the silicon wafer can remain cleaning liquid and impurities mixed in the cleaning liquid due to the siphon effect of water, the next procedure of the silicon wafer is affected, the electric cylinder 23 is started, the flushing device is driven to move downwards along the sliding rod 63 to pass through the opening 22 and extend out of the box body 21, the second limiting plate 54 is used for limiting the moving range of the first sliding block 27, further limiting the downwards moving range of the flushing device, the driving motor 17 is started, the first crank 18 is driven to rotate, the first moving rod 20 and the moving plate 29 are driven to rotate around the output shaft of the driving motor 17, the first moving rod 20 is driven to reciprocate in the first sliding groove body 19, the first moving rod 20 rotates around the first sliding groove body 19 through the combined superposition of the motion, the first moving rod 20 rotates around the output shaft of the driving motor 17, the first sliding groove body 19 at the same time, when the first moving rod 20 moves towards one end far away from the moving plate 29, the first sliding groove body 19, the distance between the cylinder 33 and the first sliding groove body 19 increases, the piston 34 moves towards the piston 35 in the first sliding groove body 33, and the piston 33 moves towards the first sliding valve 33, and then moves towards the one end 33 through the first sliding valve 33, and then the one-way valve 33 is closed, the one-way valve 32 is opened, the liquid is blown out of the liquid is 32, the liquid is in the one-way valve 32, and enters the one-way valve 32, and is closed, and is opened, and is one-way valve 32, and is closed, and is one-way valve 32, and is one-way is opened, and is one-way and is one and is valve and is one; the first movable rod 20 drives the movable plate 29 to rotate around the output shaft of the driving motor 17 and reciprocate along the first chute body 19 and rotate around the first chute body 19, the movable plate 29 drives the nozzles 31 to rotate around the output shaft of the driving motor 17 and reciprocate along the first chute body 19 and rotate around the first chute body 19, the nozzles 31 do spiral motions, the scanning type flushing of the nozzles 31 is large in flushing range and high in flushing efficiency; the movable plate 29 drives the hairbrush 41 to rotate around the output shaft of the driving motor 17, and simultaneously moves reciprocally along the first chute body 19, and simultaneously rotates around the first chute body 19, the hairbrush 41 sweeps or loosens impurities with strong adsorption force on the surface of the silicon wafer, the nozzle 31 is convenient for flushing the impurities, the flushing quality is improved, the cleaning effect of the silicon wafer is improved, and the next procedure is convenient.
In one embodiment, as shown in fig. 8-10, a feeding device is disposed on one side of the support frame 2, and the feeding device includes: a motor 42, a second crank 43, a rocker 44, a first rocker 45,
a base 46 is arranged on one side of the support frame 2, a motor 42 is arranged at the top end of one side of the base 46, an output shaft of the motor 42 is upwards connected with one end of a second crank 43, the other end of the second crank 43 is rotationally connected with one end of a rocker 44, a first rocker 45 is arranged on one side of the motor 42, one end of the first rocker 45 is rotationally connected with the base 46, the rocker 44 is rotationally connected with the first rocker 45, a second guide groove 47 is arranged on the first rocker 45, an L-shaped fixing rod 48 is arranged at the top end of the other side of the base 46, a second rocker 49 is rotationally connected with the top end of a right-angle end of the L-shaped fixing rod 48, second sliding grooves 50 are respectively arranged on two side frames of the L-shaped fixing rod 48, the two second sliding grooves 50 are communicated through an arc-shaped first sliding groove body 51, a third guide groove 52 is arranged on the second rocker 49, a second moving rod 53 is arranged in the third guide groove 52, and the second moving rod 53 can reciprocate in the third guide groove 52;
the second moving rod 53 is provided with a fixed column 55 near one end of the motor 42, the fixed column 55 passes through the second moving rod 53, the top end of the fixed column 55 can reciprocate in the second guide groove 47, the bottom end of the fixed column 55 can reciprocate in the second sliding groove 50 and the arc-shaped first sliding groove body 51, one end of the second swing rod 49 away from the motor 42 is provided with a second sliding groove body 56, the second sliding groove body 56 is internally provided with an L-shaped sliding groove 57, the vertical part of the L-shaped sliding groove 57 is positioned at one end of the second sliding groove body 56 away from the motor 42, the second sliding groove body 56 is internally provided with a second sliding block 58, the second sliding block 58 can reciprocate in the second sliding groove body 56, one end of the second moving rod 53 away from the motor 42 extends out of the third guide groove 52 to be connected with the second sliding block 58, the second sliding groove 58 is obliquely provided with a third sliding groove 59, the L-shaped sliding groove 57 is internally provided with a third sliding block 60, the third sliding groove 60 can reciprocate in the second sliding groove body 60 and the second sliding groove 58 is provided with a third connecting rod 60, and the other end of the second sliding groove 61 can reciprocate in the second sliding groove 61.
The working principle and the beneficial effects of the technical scheme are as follows: before cleaning the silicon wafer, the basket filled with the silicon wafer is required to be installed on the moving frame 1, the motor 42 is started, the second crank 43 is driven to rotate, the rocker 44 is driven to reciprocate back and forth and reciprocate left and right, the first rocker 45 is driven to swing left and right around the joint of the base 46 of the rocker, in an initial state, the second rocker 49 is overlapped with the horizontal frame of the L-shaped fixing rod 48, when the first rocker 45 swings right, the second rocker 49 is fixed, the top end of the fixing column 55 moves right in the second guide groove 47, the bottom end of the fixing column 55 moves right in the second horizontal chute 50, the second moving rod 53 is driven to move right in the third guide groove 52, the second slider 58 is driven to move right in the second chute body 56, the third slider 60, the second connecting rod 61 and the electric gripper 62 are driven to move right along the horizontal groove of the L-shaped chute 57, and after the third slider 60 moves to the right-angle end of the L-shaped chute 57, the second slider 58 is driven to move right, the third chute 59 is driven to move right, the second slider 61 is driven to move right, and the third connecting rod 61 is driven to move right along the third connecting rod 62 moves down along the electric gripper 60 and the electric gripper to grasp the basket 46 on the base 46; when the first swing rod 45 swings leftwards, the top end of the fixed column 55 moves leftwards in the second guide groove 47, the bottom end of the fixed column 55 moves leftwards in the second horizontal sliding groove 50, the second moving rod 53 moves leftwards in the third guide groove 52, the second sliding block 58 is driven to move leftwards in the second sliding groove body 56, so that the electric mechanical claw 62 and the flower basket grabbed by the electric mechanical claw are lifted firstly and then move leftwards along the horizontal groove of the L-shaped sliding groove 57, the first swing rod 45 continues to swing leftwards, the bottom end of the fixed column 55 moves leftwards in the first sliding groove body 51, the second swing rod 49 and the second moving rod 53 are driven to swing leftwards, when the bottom end of the fixed column 55 moves into the second vertical sliding groove 50, the second swing rod 49 coincides with the vertical frame of the L-shaped fixed rod 48, the first swing rod 45 continues to swing leftwards, the second swing rod 49 is fixed, the top end of the fixed column 55 moves forwards in the second guide groove 47, the bottom end of the fixed column 55 moves forwards in the vertical second slide groove 50, the second moving rod 53 and the second slide block 58 are driven to move forwards along the third guide groove 52, the third slide block 60, the second connecting rod 61 and the electric mechanical claw 62 are driven to move forwards along the L-shaped slide groove 57 and then move downwards, the electric mechanical claw 62 places the grabbed flower baskets in the groove body 7 on the moving frame 1, the processes are repeated, silicon wafers to be cleaned are placed on the moving frame 1 in sequence, the flower baskets do not affect each other, the silicon wafer feeding is safe and orderly, and the feeding efficiency is high; the electric mechanical claw 62 can directly mount the flower basket on the baffle plate 8 and the groove 9, secondary adjustment is not needed, and the flower basket mounting precision is high; the movable direction of the basket that loading attachment adjustable snatched can install the basket of motionless source on moving frame 1, and the structure is small and exquisite, and occupation space is little, convenient to use.
In one embodiment, as shown in fig. 11-12, a controller 65 is disposed on a side wall of the base 46, a processor 66 is disposed in the controller 65, a display 67 and a control panel 68 are disposed on a side wall of the controller 65, an alarm 69 and an emergency stop button 70 are disposed on one side of the display 67, a first speed sensor 71 and an angle sensor 72 are disposed on the moving frame 1, a second speed sensor 73 is disposed on the second connecting rod 61, a height sensor 74 and a pressure sensor 64 are disposed on the electric gripper 62, and the processor 66 is electrically connected with the hydraulic cylinder 4, the motor 42, the display 67, the control panel 68, the alarm 69, the emergency stop button 70, the first speed sensor 71, the angle sensor 72, the second speed sensor 73, the height sensor 74 and the pressure sensor 64, respectively.
The working principle and the beneficial effects of the technical scheme are as follows: the controller 65 is used for controlling each device to operate, and the first speed sensor 71 is used for monitoring the moving speed of the moving frame 1; the angle sensor 72 is used for monitoring the inclination angle of the moving frame 1; the second speed sensor 73 is for monitoring the moving speed of the electric gripper 62; the height sensor 74 is used for monitoring the position height of the electric gripper 62, so that the electric gripper 62 can conveniently and accurately grasp the flower basket; the pressure sensor 64 is used for monitoring the pressure applied to the electric gripper 62 for gripping the flower basket, so that the falling of the flower basket caused by the loose gripping of the electric gripper 62 is avoided; the processor 66 is used for controlling the operation of each sensor and processing the data monitored by each sensor; the display screen 67 is used for displaying the operation state of each mechanism and the monitoring data of each sensor; the control panel 68 is used for inputting control commands and controlling the operation of the mechanisms; when the slow lifting structure fails, the alarm 69 sounds an alarm to remind workers to process in time; when an emergency occurs, the slow lifting structure can be directly closed by pressing the emergency stop button 70, so that larger loss is avoided.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (9)
1. An inclined slow-lifting structure for a cleaning machine, comprising: the movable frame (1), be provided with support frame (2) below movable frame (1), there are stand (3) of two vertical directions respectively on the frame of support frame (2) both ends, movable frame (1) both ends are provided with two guide bars (15) respectively, be provided with on guide bar (15) along axially extending first guide slot (16), stand (3) top is passed first guide slot (16), be provided with two pneumatic cylinders (4) respectively on the frame of support frame (2) both ends frame in addition, the regulation pole (5) bottom of vertical setting with the piston rod of pneumatic cylinder (4) is connected, regulation pole (5) top with movable frame (1) are articulated;
one side of the supporting frame (2) is provided with a feeding device, and the feeding device comprises: a motor (42), a second crank (43), a rocker (44) and a first swing rod (45),
a base (46) is arranged on one side of the supporting frame (2), a motor (42) is arranged at the top end of one side of the base (46), an output shaft of the motor (42) is upwards connected with one end of a second crank (43), the other end of the second crank (43) is rotationally connected with one end of a rocker (44), a first rocker (45) is arranged on one side of the motor (42), one end of the first rocker (45) is rotationally connected with the base (46), a second guide groove (47) is formed in the first rocker (44) and is rotationally connected with the first rocker (45), an L-shaped fixing rod (48) is arranged at the top end of the other side of the base (46), a second sliding groove (49) is rotationally connected at the top end of the right-angle end of the L-shaped fixing rod (48), two side frames of the L-shaped fixing rod (48) are respectively provided with a second sliding groove (50), the two second sliding grooves (50) are communicated through a first sliding groove body (51), a third guide groove (52) is formed in the second rocker (49), and a third guide groove (52) can move in the second guide groove (52) in the second guide groove (53);
the second movable rod (53) is provided with a fixed column (55) near one end of the motor (42), the fixed column (55) passes through the second movable rod (53), the top end of the fixed column (55) can reciprocate in the second guide groove (47), the bottom end of the fixed column (55) can reciprocate in the second sliding groove (50) and the arc-shaped first sliding groove body (51), one end of the second swing rod (49) far away from the motor (42) is provided with a second sliding groove body (56), the second sliding groove body (56) is internally provided with an L-shaped sliding groove (57), the vertical part of the L-shaped sliding groove (57) is positioned at one end of the second sliding groove body (56) far away from the motor (42), a second sliding block (58) is arranged in the second sliding groove body (56), the second sliding block (58) can reciprocate in the second sliding groove (56), one end of the second swing rod (49) far away from the motor (42) is provided with a second sliding groove (56), the third sliding groove (58) can reciprocate in the third sliding groove (58), the third sliding groove (58) is provided with a third sliding groove (60), one end of a second connecting rod (61) passes through the third sliding groove (59) to be connected with the third sliding block (60), and the other end of the second connecting rod (61) is provided with an electric mechanical claw (62).
2. A tilting slow-lifting structure for a washing machine according to claim 1, characterized in that a washing tank (6) is provided below the supporting frame (2), the washing tank (6) being larger in size than the moving frame (1), the moving frame (1) being capable of reciprocating in the washing tank (6).
3. The inclined slow lifting structure for the cleaning machine according to claim 1, wherein two groove bodies (7) are symmetrically arranged in the movable frame (1), baffle plates (8) are obliquely arranged at the top ends of two sides of the groove bodies (7) respectively, the two baffle plates (8) are symmetrically arranged, and grooves (9) are formed in the baffle plates (8) at intervals.
4. The inclined slow lifting structure for a cleaning machine according to claim 1, wherein support rods (10) in the vertical direction are respectively arranged around the support frame (2), support bases (11) are arranged at the bottom ends of the support rods (10), fixing frames (12) are arranged at the top ends of the support rods (10), windlass (13) are respectively arranged at two sides of the top ends of the fixing frames (12), the top ends of vertically arranged steel cables are connected with the output ends of the windlass (13), and the bottom ends of the steel cables are connected with the support frame (2).
5. A tilting slow-lifting structure for a cleaning machine according to claim 4, characterized in that the top end of the upright (3) is connected with the first limiting plate (14) through the fixing frame (12), and the upright (3) can reciprocate on the fixing frame (12).
6. A tilting slow-lifting structure for a washing machine according to claim 3, characterized in that the angle of inclination of the baffle (8) towards the upright (3) is 10-15 degrees.
7. The inclined slow-lifting structure for the cleaning machine according to claim 4, wherein the movable frame (1), the supporting frame (2) and the fixed frame (12) are all formed by welding rectangular steel pipes.
8. A tilting slow-lifting structure for a washing machine according to claim 4, characterized in that the bottom end of the fixed frame (12) is provided with a flushing device comprising: a driving motor (17), a first crank (18), a first chute body (19) and a first moving rod (20),
the utility model discloses a reciprocating type electric box, including fixing frame (12) and connecting rod (27), box (21) are provided with in the middle of fixing frame (12) bottom, box (21) bottom is provided with opening (22), be provided with electric jar (23) of vertical direction on box (21) top inner wall, the piston rod of electric jar (23) is connected with driving motor (17) downwards, the output shaft of driving motor (17) passes first crank (18) one end downwards and is connected with mounting panel (24), first crank (18) with the output shaft fixed connection of driving motor (17), mounting panel (24) bottom is provided with supersonic generator (25), be provided with first spout (26) of vertical direction on box (21) one side inner wall, first spout (26) bottom with opening (22) intercommunication, be provided with slide bar (63) of vertical direction in first spout (26), slide bar (63) top with first spout (26) top inner wall connection, slide bar (63) bottom pass opening (22) are passed box (21) and second board (54) fixed connection, first slider (27) can be provided with one and reciprocating type electric box (27) can be provided with on the first slider (27), one end of the first connecting rod (28) is connected with the first sliding block (27), the other end of the first connecting rod (28) is rotationally connected with a first sliding groove body (19), a first moving rod (20) is arranged in the first sliding groove body (19), one end of the first moving rod (20) passes through the first sliding groove body (19) to be connected with the middle of the moving plate (29), and the first moving rod (20) can reciprocate in the first sliding groove body (19);
the other end of the first crank (18) is rotationally connected with the joint of the first movable rod (20) and the movable plate (29), a first cavity (30) is arranged in the movable plate (29), a plurality of nozzles (31) are arranged at intervals at the bottom end of the movable plate (29), the nozzles (31) are communicated with the first cavity (30), a liquid storage tank (32) is arranged at the other end of the first movable rod (20), a cylinder body (33) is arranged at the top end of the first movable rod (20), a piston (34) is arranged in the cylinder body (33), one end of a piston shaft (35) is connected with the first chute body (19), the other end of the piston shaft (35) extends into the cylinder body (33) to be connected with the piston (34), the piston (34) and the piston shaft (35) can reciprocate in the cylinder body (33), a second cavity (36) is arranged in the first movable rod (20), the second cavity (36) is communicated with the first cavity (30), one end of the liquid storage tank (37) is communicated with the liquid inlet pipe (37) and the other end of the liquid storage tank (37) is communicated with the liquid inlet pipe (37) and the liquid inlet pipe (37) is communicated with the liquid inlet pipe (37), the other end of the liquid outlet pipe (39) is communicated with the cylinder body (33), a liquid outlet one-way valve (40) is arranged on the liquid outlet pipe (39), and a brush (41) is arranged at the bottom end of the moving plate (29).
9. The tilting slow lifting structure for a cleaning machine according to claim 1, wherein a controller (65) is arranged on one side wall of the base (46), a processor (66) is arranged in the controller (65), a display screen (67) and a control panel (68) are arranged on one side wall of the controller (65), an alarm (69) and an emergency stop button (70) are arranged on one side of the display screen (67), a first speed sensor (71) and an angle sensor (72) are arranged on the moving frame (1), a second speed sensor (73) is arranged on the second connecting rod (61), a height sensor (74) and a pressure sensor (64) are arranged on the electric gripper (62), and the processor (66) is electrically connected with the hydraulic cylinder (4), the electric motor (42), the display screen (67), the control panel (68), the alarm (69), the emergency stop button (70), the first speed sensor (71), the angle sensor (72), the second speed sensor (73) and the pressure sensor (64) respectively.
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| CN202211031150.XA CN115415230B (en) | 2022-08-26 | 2022-08-26 | Inclined slow lifting structure for cleaning machine |
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| CN202211031150.XA CN115415230B (en) | 2022-08-26 | 2022-08-26 | Inclined slow lifting structure for cleaning machine |
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| CN115415230B true CN115415230B (en) | 2023-07-04 |
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| CN115889318A (en) * | 2022-12-07 | 2023-04-04 | 西安奕斯伟材料科技有限公司 | Device and equipment for degumming silicon wafer |
| CN116851343B (en) * | 2023-07-17 | 2024-02-23 | 西安医学院第一附属医院 | Clinical apparatus cleaner for gastroenterology |
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| US6091498A (en) * | 1996-07-15 | 2000-07-18 | Semitool, Inc. | Semiconductor processing apparatus having lift and tilt mechanism |
| CN203910837U (en) * | 2014-06-19 | 2014-10-29 | 温州海旭科技有限公司 | Full-automatic silicon wafer cleaning machine |
| CN108389813B (en) * | 2018-02-26 | 2020-04-03 | 上海提牛机电设备有限公司 | Silicon wafer cleaning and drying integrated device and cleaning method thereof |
| CN108511376A (en) * | 2018-05-30 | 2018-09-07 | 郑州恒之博新能源科技有限公司 | A kind of lifting type spray cleaning system |
| CN208596665U (en) * | 2018-08-10 | 2019-03-12 | 常州捷佳创精密机械有限公司 | A kind of slow lifting wing drop bracket |
| CN111613554B (en) * | 2020-05-19 | 2024-02-27 | 北京北方华创微电子装备有限公司 | Silicon wafer cleaning machine |
| CN214022324U (en) * | 2020-09-04 | 2021-08-24 | 四川鼎尖动物药业有限责任公司 | Ampoule drenches bottle machine |
| CN213103522U (en) * | 2020-09-11 | 2021-05-04 | 杞县东磁新能源有限公司 | Surface cleaning device for large-size silicon wafer |
| CN112151422A (en) * | 2020-09-27 | 2020-12-29 | 合肥高地创意科技有限公司 | Chip cleaning and drying device |
| CN114453373A (en) * | 2020-11-10 | 2022-05-10 | 湖北铭驰玻璃科技有限公司 | Glass processing surface cleaning device |
| CN213716848U (en) * | 2020-12-07 | 2021-07-16 | 天津市环智新能源技术有限公司 | Piece basket bearing device and full lifting cleaning system with same |
| CN113066741A (en) * | 2021-02-25 | 2021-07-02 | 安徽绿能技术研究院有限公司 | Cleaning and texturing automatic feeding mechanism for manufacturing silicon wafers and production process thereof |
| CN215988665U (en) * | 2021-07-07 | 2022-03-08 | 禄丰隆基硅材料有限公司 | Lifting device and silicon wafer cleaning system |
| CN216174798U (en) * | 2021-09-29 | 2022-04-05 | 天津环博科技有限责任公司 | Slowly-lifting throwing mechanism |
| CN216213293U (en) * | 2021-11-05 | 2022-04-05 | 无锡京运通科技有限公司 | Lifting device for cleaning silicon wafer |
| CN216849849U (en) * | 2021-12-08 | 2022-06-28 | 江苏晋誉达半导体股份有限公司 | Basket of flowers drive arrangement of machine is peeled off to degumming |
| CN114496899A (en) * | 2022-02-12 | 2022-05-13 | 浙江艾科半导体设备有限公司 | Wafer lifting equipment and lifting process thereof |
| CN216965573U (en) * | 2022-03-08 | 2022-07-15 | 锦州佑华硅材料有限公司 | Angle-adjustable cleaning machine slow lifting groove bracket |
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