CN216849849U - Basket of flowers drive arrangement of machine is peeled off to degumming - Google Patents
Basket of flowers drive arrangement of machine is peeled off to degumming Download PDFInfo
- Publication number
- CN216849849U CN216849849U CN202123057858.6U CN202123057858U CN216849849U CN 216849849 U CN216849849 U CN 216849849U CN 202123057858 U CN202123057858 U CN 202123057858U CN 216849849 U CN216849849 U CN 216849849U
- Authority
- CN
- China
- Prior art keywords
- basket
- flowers
- suspension rod
- electric cylinder
- mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses a machine's basket of flowers drive arrangement is peeled off in degumming, the on-line screen storage device comprises a base, the seat that goes up and down is installed to vertical lift on the base, and this seat that goes up and down is driven by lift power device, be provided with the mount pad on the seat that goes up and down, this mount pad is provided with the mounting panel that extends to soak device's soaking cavity top, install on the mounting panel and be used for hanging and adjust the adjusting device that hangs of basket of flowers angle, the lower extreme that hangs adjusting device stretches into and hangs the basket of flowers in the soaking cavity. This basket of flowers drive arrangement not only can drive the lift of basket of flowers, can drive the slope of basket of flowers moreover, makes the wafer be in the tilt state submergence like this in chemical liquid, avoids the irregular position of wafer to remove, and it is more thorough to remove glue.
Description
Technical Field
The utility model relates to a machine's basket of flowers drive arrangement is peeled off in degumming for peel off the basket of flowers in the soaking cavity of machine to the degumming drives.
Background
The photoresist stripping machine is equipment needed in the chip production process, the photoresist stripping machine mainly aims to remove photoresist on a wafer subjected to photoetching by using chemical liquid, the photoresist stripping machine comprises a soaking cavity, the chemical liquid is stored in the soaking cavity, a flower basket is placed in the soaking cavity and driven by a flower basket driving device, and the flower basket driving device drives the flower basket to lift, so that the wafer in the flower basket is soaked in the chemical liquid or taken out. And present basket of flowers drive arrangement can only drive the basket of flowers lift, therefore the position of the wafer in the basket of flowers originally is more accurate when placing, but just probably receive buoyancy behind the submergence to the chemical liquid and take place the position change, and the wafer position change is irregular, after the degumming is accomplished, need move the wafer that moves in the manipulator with the basket of flowers and absorb one by one and shift to other positions, because the wafer position changes in the basket of flowers, it is also inaccurate to absorb the transfer to other positions, thereby influence automated production, the horizontally soaking of wafer is in the chemical liquid in addition, probably the incomplete leaf breaks away from in the figure of wafer during the degumming, lead to the degumming incomplete.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem that will solve is: the utility model provides a machine is peeled off to degumming's basket of flowers drive arrangement, this basket of flowers drive arrangement not only can drive the lift of basket of flowers, can drive the basket of flowers slope moreover, makes the wafer be in the tilt state submergence like this in chemical liquid, avoids the irregular position of wafer to remove, and it is more thorough to degumming.
In order to solve the technical problem, the technical scheme of the utility model is that: the utility model provides a machine's basket of flowers drive arrangement is peeled off in degumming, the on-line screen storage device comprises a base, the seat that goes up and down is installed to vertical lift on the base, and this seat that goes up and down is driven by lift power device, be provided with the mount pad on the seat that goes up and down, this mount pad is provided with the mounting panel that extends to soak the cavity top of soak device, install on the mounting panel and be used for hanging and adjust the suspension adjusting device of basket of flowers angle, the lower extreme that hangs adjusting device stretches into and soaks the internal basket of flowers of soaking.
As a preferable scheme, the suspension adjusting device comprises a first suspension rod and a second suspension rod which are parallel, the upper end of the first suspension rod is fixed on the mounting plate, the lower end of the first suspension rod is hinged to one side of the upper end of the flower basket, the second suspension rod is axially slidably mounted on the mounting plate and driven by the axial power device, and the lower end of the second suspension rod is hinged to the other side of the upper end of the flower basket.
As a preferable scheme, the axial power device comprises a rodless electric cylinder fixed on the mounting plate, the sliding direction of a sliding component of the rodless electric cylinder is a vertical direction, and the power end of the rodless electric cylinder is connected with the upper end of the second suspension rod through a connecting seat.
As a preferred scheme, be provided with a mounting groove on the mounting panel, the rodless electric jar is fixed on the electric jar support of an L shape, fix in the mounting groove through fixing bolt on the electric jar support, be provided with horizontal installation strip hole on the electric jar support, horizontal installation strip hole extends to the first direction that hangs the pole, fixing bolt retrains in horizontal installation strip downtheholely, be provided with the convenience on the mounting panel the hole of dodging that the connecting seat goes up and down.
As a preferred scheme, the connecting seat includes an L-shaped connecting plate, one plate of the connecting plate is fixed to a sliding part of the rodless electric cylinder through a bolt, the lower end of the other plate of the connecting plate is connected to a connecting sleeve through a bolt, the connecting sleeve is in threaded connection with a cylindrical threaded sleeve, the upper end of the second suspension rod is provided with a ball head, the cylindrical threaded sleeve is provided with a spherical inner hole facilitating connection of the ball head, and the ball head is mounted in the spherical inner hole of the cylindrical threaded sleeve.
Preferably, the lifting power device comprises a lifting rodless electric cylinder, and a power end of the lifting rodless electric cylinder is detachably fixed with the mounting seat.
After the technical scheme is adopted, the utility model discloses an effect is: because the flower basket driving device of the degumming stripping machine comprises a base, a lifting seat is vertically arranged on the base in a lifting way, the lifting seat is driven by a lifting power device, a mounting seat is arranged on the lifting seat, the mounting seat is provided with a mounting plate extending to the upper part of a soaking cavity of a soaking device, a hanging adjusting device used for hanging and adjusting the angle of the flower basket is arranged on the mounting plate, the lower end of the hanging adjusting device extends into the soaking cavity and hangs the flower basket in the soaking cavity, the lifting seat is driven by the lifting power device to lift, the soaking or the lifting of the flower basket can be realized, the hanging adjusting device can hang the flower basket and simultaneously adjust the angle of the flower basket, so that the flower basket is inclined, the inclined flower basket enables wafers to be uniformly inclined towards one side, when the wafers enter chemical liquid, the positions of the wafers can be possibly changed due to the influence of buoyancy, but because the wafer slope, consequently can incline the homonymy still under the effect of gravity, finally rely on the lateral wall of basket of flowers, and because the wafer slope when degumming simultaneously, the contact of convenient chemical liquid that can be better and glue film, it is more thorough to remove glue, when mentioning simultaneously, the wafer slope just more can guarantee that all wafers rely on the lateral wall of basket of flowers all the time, after breaking away from the chemical liquid, hang adjusting device and make its level again angle regulation to make things convenient for shifting out of wafer.
And because the suspension adjusting device comprises a first suspension rod and a second suspension rod which are parallel, the upper end of the first suspension rod is fixed on the mounting plate, the lower end of the first suspension rod is hinged to one side of the upper end of the flower basket, the second suspension rod is axially and slidably mounted on the mounting plate and driven by the axial power device, and the lower end of the second suspension rod is hinged to the other side of the upper end of the flower basket, the suspension adjusting device drives the second suspension shaft to lift by using the axial power device, so that the suspension heights of the second suspension shaft and the first suspension shaft are different, the flower basket can incline, and the lifting amplitude of the second suspension shaft directly reflects the inclination angle of the flower basket.
And because the mounting plate is provided with a mounting groove, the rodless electric cylinder is fixed on an L-shaped electric cylinder support, the electric cylinder support is fixed in the mounting groove through a fixing bolt, the electric cylinder support is provided with a horizontal mounting strip hole, the horizontal mounting strip hole extends towards the direction of the first suspension rod, the fixing bolt is restrained in the horizontal mounting strip hole, the mounting plate is provided with a avoiding hole which is convenient for the connecting seat to lift, and by adopting the structure, the mounting position of the rodless electric cylinder can be adjusted, so that the rodless electric cylinder is conveniently connected with the second suspension rod.
And because the connecting seat comprises an L-shaped connecting plate, one plate part of the connecting plate is fixed on the sliding part of the rodless electric cylinder through a bolt, the lower end of the other plate part of the connecting plate is connected with a connecting sleeve through a bolt, the connecting sleeve is in threaded connection with a cylindrical screw sleeve, the upper end of the second suspension rod is provided with a ball head part, the cylindrical screw sleeve is provided with a spherical inner hole which is convenient for the connection of the ball head part, the ball head part is arranged in the spherical inner hole of the cylindrical screw sleeve, the second suspension rod can be better driven by utilizing the ball head part and the spherical inner hole, and the second suspension rod can be conveniently and more stably lifted through the matching of the ball head part and the spherical inner hole.
Drawings
The present invention will be further explained with reference to the drawings and examples.
Fig. 1 is a perspective view of an embodiment of the present invention;
FIG. 2 is a perspective sectional view of a connecting seat of the embodiment of the present invention;
in the drawings: 1. soaking the cavity; 2. a flower basket; 3. a hinged seat; 4. a base; 5. lifting a rodless electric cylinder; 6. a lifting seat; 7. a mounting base; 71. mounting a plate; 8. an axial power device; 9. a first suspension bar; 10. a second suspension bar; 101. a ball head portion; 11. an electric cylinder support; 12. mounting grooves; 13. avoiding holes; 14. a connecting seat; 141. connecting sleeves; 142. a cylindrical threaded sleeve; 1421. a spherical inner hole.
Detailed Description
The present invention will be described in further detail with reference to the following examples.
As shown in fig. 1 and 2, a drive device for a flower basket 2 of a stripping machine comprises a base 4, a lifting seat 6 is vertically installed on the base 4 in a lifting mode, the lifting seat 6 is driven by a lifting power device, the lifting power device comprises a lifting rodless electric cylinder 5, the power end of the lifting rodless electric cylinder 5 is detachably fixed to a mounting seat 7, the lifting position of the lifting seat 6 can be accurately controlled by the lifting rodless electric cylinder 5, the height of the flower basket 2 can be accurately controlled by the position of the lifting seat 6, wafers can be conveniently sent into each wafer placing groove of the flower basket 2 piece by piece, and the wafers of the flower basket 2 can be conveniently taken out piece by piece.
Be provided with mount pad 7 on the lift seat 6, this mount pad 7 is provided with the mounting panel 71 that extends to soak cavity 1 top of soak device, install on the mounting panel 71 and be used for hanging and adjust the suspension adjusting device of basket of flowers 2 angle, the lower extreme that hangs adjusting device stretches into and soaks the interior basket of flowers 2 that soaks in the cavity 1.
In this embodiment, the suspension adjusting device includes a first suspension rod 9 and a second suspension rod 10 which are parallel to each other, the upper end of the first suspension rod 9 is fixed on the mounting plate 71, the lower end of the first suspension rod 9 is hinged to one side of the upper end of the flower basket 2, the second suspension rod 10 is axially slidably mounted on the mounting plate 71 and driven by the axial power device 8, and the lower end of the second suspension rod 10 is hinged to the other side of the upper end of the flower basket 2 through the hinge base 3.
The axial power device 8 comprises a rodless electric cylinder fixed on the mounting plate 71, the sliding direction of a sliding component of the rodless electric cylinder is vertical, and the power end of the rodless electric cylinder is connected with the upper end of the second suspension rod 10 through a connecting seat 14.
In this embodiment, the mounting plate 71 is provided with a mounting groove 12, the rodless electric cylinder is fixed on an L-shaped electric cylinder support 11, the electric cylinder support 11 is fixed in the mounting groove 12 through a fixing bolt, the electric cylinder support 11 is provided with a horizontal mounting bar hole, the horizontal mounting bar hole extends towards the first direction of hanging the rod 9, the fixing bolt is constrained in the horizontal mounting bar hole, and the mounting plate 71 is provided with a convenient avoiding hole 13 for the lifting of the connecting seat 14. The position of the cylinder block 11 can be changed by horizontally installing the bar hole, so that the connection holder 14 can be better connected with the second suspension bar 10.
As shown in fig. 2, the connection seat 14 includes an L-shaped connection plate, one plate portion of the connection plate is fixed on the sliding component of the rodless electric cylinder by a bolt, a connection sleeve 141 is connected to a lower end of the other plate portion of the connection plate by a bolt, a cylindrical screw sleeve 142 is connected to the connection sleeve 141 by a thread, the upper end of the second suspension rod 10 is provided with a ball head 101, the cylindrical screw sleeve 142 is provided with a spherical inner hole 1421 for facilitating connection of the ball head 101, and the ball head 101 is installed in the spherical inner hole 1421 of the cylindrical screw sleeve 142.
The wafer is delivered to a photoresist stripping machine for photoresist stripping after photoetching, a lifting power device is utilized to drive a flower basket 2 in a soaking cavity 1 of the stripping machine to lift, each wafer placing groove on the flower basket 2 is aligned to a material port of the soaking cavity 1, the wafer is conveniently delivered, the flower basket 2 is driven by a suspension adjusting device to incline and descend to be immersed into chemical liquid in the soaking cavity 1 for photoresist stripping, the wafer is lifted and adjusted to be horizontal after photoresist stripping, and then the wafer is taken out piece by piece from the material port.
The above-mentioned embodiments are merely descriptions of the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and various modifications and alterations made to the technical solution of the present invention without departing from the spirit of the present invention are intended to fall within the scope of the present invention defined by the claims.
Claims (6)
1. The utility model provides a machine's basket of flowers drive arrangement is peeled off to degumming, includes the base, its characterized in that: the utility model discloses a flower basket soaking device, including base, lifting power device, mount pad, soak cavity top, install the suspension adjusting device who is used for hanging and adjust the basket of flowers angle on the mounting panel, the lower extreme that hangs adjusting device stretches into and hangs the basket of flowers in the soak cavity on the base.
2. The flower basket driving device of the stripper as defined in claim 1, wherein: the suspension adjusting device comprises a first suspension rod and a second suspension rod which are parallel, the upper end of the first suspension rod is fixed on the mounting plate, the lower end of the first suspension rod is hinged to one side of the upper end of the flower basket, the second suspension rod is axially slidably mounted on the mounting plate and driven by an axial power device, and the lower end of the second suspension rod is hinged to the other side of the upper end of the flower basket.
3. The apparatus of claim 2, further comprising: the axial power device comprises a rodless electric cylinder fixed on the mounting plate, the sliding direction of a sliding component of the rodless electric cylinder is vertical, and the power end of the rodless electric cylinder is connected with the upper end of the second suspension rod through a connecting seat.
4. The apparatus of claim 3, further comprising: be provided with a mounting groove on the mounting panel, the rodless electric jar is fixed on the electric jar support of an L shape, fix in the mounting groove through fixing bolt on the electric jar support, be provided with horizontal installation strip hole on the electric jar support, horizontal installation strip hole extends to the first direction that hangs the pole, fixing bolt retrains in horizontal installation strip downtheholely, be provided with the convenience on the mounting panel the hole of dodging that the connecting seat goes up and down.
5. The apparatus of claim 4, further comprising: the connecting seat comprises an L-shaped connecting plate, one plate part of the connecting plate is fixed on a sliding part of the rodless electric cylinder through a bolt, the lower end of the other plate part of the connecting plate is connected with a connecting sleeve through a bolt, a cylindrical screw sleeve is connected onto the connecting sleeve in a threaded mode, the upper end of the second suspension rod is provided with a ball head, a spherical inner hole facilitating connection of the ball head is formed in the cylindrical screw sleeve, and the ball head is installed in the spherical inner hole of the cylindrical screw sleeve.
6. The apparatus of claim 5, further comprising: the lifting power device comprises a lifting rodless electric cylinder, and the power end of the lifting rodless electric cylinder is detachably fixed with the mounting seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123057858.6U CN216849849U (en) | 2021-12-08 | 2021-12-08 | Basket of flowers drive arrangement of machine is peeled off to degumming |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123057858.6U CN216849849U (en) | 2021-12-08 | 2021-12-08 | Basket of flowers drive arrangement of machine is peeled off to degumming |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216849849U true CN216849849U (en) | 2022-06-28 |
Family
ID=82106101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123057858.6U Active CN216849849U (en) | 2021-12-08 | 2021-12-08 | Basket of flowers drive arrangement of machine is peeled off to degumming |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216849849U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115415230A (en) * | 2022-08-26 | 2022-12-02 | 曲靖阳光新能源股份有限公司 | Inclined slow lifting structure for cleaning machine |
-
2021
- 2021-12-08 CN CN202123057858.6U patent/CN216849849U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115415230A (en) * | 2022-08-26 | 2022-12-02 | 曲靖阳光新能源股份有限公司 | Inclined slow lifting structure for cleaning machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN216849849U (en) | Basket of flowers drive arrangement of machine is peeled off to degumming | |
| CN114200795A (en) | Soaking type degumming stripping machine | |
| CN105301218A (en) | Water pollution treatment effect fish experiment control apparatus | |
| CN218959217U (en) | Copper-depositing feeding parent basket | |
| CN216718904U (en) | Soaking type degumming stripping machine | |
| CN206893012U (en) | A kind of rotating disk mechanism | |
| CN114319452B (en) | Automatic well lid detection device and method based on AI identification | |
| CN110137115A (en) | Anti-drop device and wafer cleaning equipment | |
| CN215031706U (en) | Stabilizing mean of soaking equipment | |
| CN205193060U (en) | Water pollution control effect fish experimental control device | |
| CN210381512U (en) | Steel wire mesh plate lifting equipment | |
| CN207134958U (en) | A kind of varnish apparatus of Pump for well stator coil | |
| CN108854789B (en) | Solution shaking machine for laboratory experiment beaker | |
| CN216686570U (en) | Semi-automatic sheet arranging and pushing device | |
| CN213749691U (en) | Bedding thermal insulation performance tester environment frame lifting device | |
| CN220596887U (en) | Tray jacking rotary supporting device | |
| CN219850418U (en) | Suspension coating device | |
| CN220435055U (en) | Fan base convenient to remove | |
| CN214128848U (en) | Full-automatic etching device with intelligent vibration frequency adjustment function | |
| CN214163039U (en) | Be used for two-sided PCB board suction means that detects of robot | |
| CN211305456U (en) | Automatic screw machine of beating of screw formula connecting terminal | |
| CN218189750U (en) | Lifting device for glass slide rack | |
| CN212008204U (en) | Automatic stirring density measuring device for particle analysis experiment | |
| CN214142581U (en) | Electroplating device with adjustable height | |
| CN219834510U (en) | Pickling device for PCB production |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |