CN112151422A - Chip cleaning and drying device - Google Patents

Chip cleaning and drying device Download PDF

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Publication number
CN112151422A
CN112151422A CN202011029438.4A CN202011029438A CN112151422A CN 112151422 A CN112151422 A CN 112151422A CN 202011029438 A CN202011029438 A CN 202011029438A CN 112151422 A CN112151422 A CN 112151422A
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CN
China
Prior art keywords
cleaning
box
chip
drying
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN202011029438.4A
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Chinese (zh)
Inventor
陈圆圆
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Hefei Highland Creative Technology Co ltd
Original Assignee
Hefei Highland Creative Technology Co ltd
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Priority to CN202011029438.4A priority Critical patent/CN112151422A/en
Publication of CN112151422A publication Critical patent/CN112151422A/en
Withdrawn legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/001Drying-air generating units, e.g. movable, independent of drying enclosure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004Nozzle assemblies; Air knives; Air distributors; Blow boxes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67046Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67248Temperature monitoring

Abstract

The invention discloses a chip cleaning and drying device which comprises a main body mechanism, a supporting mechanism, a cleaning mechanism, a scrubbing mechanism, a drying mechanism and a waste liquid collecting mechanism, wherein a box body is connected with a bottom plate through a connecting piece, a base is fixedly arranged above the bottom plate, the output end of a motor is connected with a supporting plate, a cleaning box is arranged above the supporting plate, and electric telescopic rods are symmetrically arranged inside the cleaning box. This chip washs drying device, be provided with electric telescopic handle, the electric telescopic handle of both sides can crisscross extend and shrink, thereby can drive and put thing board left and right sides and rock, and then be convenient for will put the chip on the thing board and collide the washing with the cleaning solution, be provided with the draw-in groove simultaneously, expanding spring in the draw-in groove can extrude the chip fixedly, thereby can prevent to put the chip on the thing board and drop at abluent in-process accident, and the draw-in groove is provided with a plurality ofly, thereby be convenient for wash the chip in batches, and then be convenient for improve device's cleaning efficiency.

Description

Chip cleaning and drying device
Technical Field
The invention relates to the technical field of chip processing, in particular to a chip cleaning and drying device.
Background
The chip is the general name of semiconductor component product, because electronic component's miniaturization leads to the chip to be infected with impurity easily in process of production, these impurity can cause the influence to the performance and the quality of chip, and then lead to the inside circuit of chip to appear the short circuit because of impurity easily, consequently need wash the chip, the washing device is used to current chip is most inconvenient to carry out the washing in batches to the chip, the cleaning efficiency is lower, it is not convenient enough to use, thereby on the other hand most cleaning process singleness of current cleaning device appears cleaning not thorough phenomenon easily, to the above-mentioned problem, need improve current equipment.
Disclosure of Invention
The invention aims to provide a chip cleaning and drying device, which aims to solve the problems that most of the existing chip cleaning devices proposed in the background art are inconvenient to clean chips in batches, have low cleaning efficiency and are not convenient to use, and most of the existing cleaning devices are single in cleaning process, so that the phenomenon of incomplete cleaning is easy to occur.
In order to achieve the purpose, the invention provides the following technical scheme: a chip cleaning and drying device comprises a main body mechanism, a supporting mechanism, a cleaning mechanism, a brushing mechanism, a drying mechanism and a waste liquid collecting mechanism,
the main body mechanism comprises a bottom plate, a fastener, a box body, universal self-locking wheels and a connecting piece, wherein the box body is arranged above the bottom plate and is connected with the bottom plate through the connecting piece, the connecting piece is in threaded connection with the fastener, and the universal self-locking wheels are symmetrically arranged at the bottom of the bottom plate;
supporting mechanism, supporting mechanism sets up in the inside of box, and supporting mechanism includes base, motor, backup pad, fly leaf, washing case, heating wire, electric telescopic handle, connecting plate and puts the thing board, the base is fixed to be set up in the top of bottom plate, and is provided with the motor in the base, the output and the backup pad of motor are connected, and the front side of motor is provided with the fly leaf, and the fly leaf passes through the screw simultaneously and is connected with the base, the top of backup pad is provided with the washing case, and washs the incasement bottom embedding and have the heating wire, the inside symmetry of wasing the case is provided with electric telescopic handle, and electric telescopic handle is connected with the lateral wall about wasing the case respectively, and electric telescopic handle keeps away from the one end and the connecting plate fixed connection of wasing.
Preferably, motor, backup pad, fly leaf and washing case constitute revolution mechanic, and wash the case and be connected with the backup pad block, it is connected with the backup pad through the screw to wash the case, and the right side below of just wasing the case is connected with the blow off pipe.
Preferably, the inside of washing case is provided with temperature sensor, and be electric connection between temperature sensor and controller and the heating wire.
Preferably, the article placing plate is provided with a clamping groove, limiting plates are symmetrically arranged in the clamping groove, the limiting plates are connected with the inner side wall of the clamping groove through telescopic springs, and the bottom of the clamping groove is provided with a through hole.
Preferably, the cleaning mechanism is arranged at the left side of the supporting mechanism and comprises a liquid storage tank, a first liquid pump, a first water inlet pipeline, a liquid storage tank cover, a first hydraulic cylinder, a water inlet, a spray header, a spray pipe, a water tank, a second water inlet pipeline and a second liquid pump, the liquid storage tank is fixedly arranged above the bottom plate, a first liquid pump is arranged in the liquid storage tank, a liquid storage tank cover is clamped at the top of the liquid storage tank, a first hydraulic cylinder is arranged above the liquid storage tank cover, and the first hydraulic cylinder is fixedly connected with the left inner wall of the box body, one end of the first hydraulic cylinder far away from the box body is connected with the spray pipe, the bottom of the spray pipe is provided with a spray head, meanwhile, the spray pipe is connected with a first liquid pump through a first water inlet pipeline, a water tank is arranged at the rear side of the liquid storage tank, and the top of the water tank is connected with a water inlet and a second liquid pump, and the second liquid pump is connected with the spray pipe through a second water inlet pipeline.
Preferably, scrub the mechanism setting in supporting mechanism's top, and scrub the mechanism and include second pneumatic cylinder, cleaning brush, mount and support frame, the interior top fixed connection of second pneumatic cylinder and box, and the one end that the box was kept away from to the second pneumatic cylinder is connected with the top of mount, the mount bottom is passed through the support frame and is connected with the cleaning brush.
Preferably, the cleaning brushes are arranged at the bottom of the fixing frame at equal intervals and are rotatably connected with the supporting frame.
Preferably, dry mechanism includes fan, dust cover, heating device, connecting tube, exhaust duct, third pneumatic cylinder and the head of airing exhaust, and the fan setting is at the top of box, and the left end and the dust cover of fan are connected simultaneously, the right-hand member and the heating device of fan are connected, and the one end that heating device kept away from the fan passes through the connecting tube and is connected with the exhaust duct, the right side of exhaust duct passes through the right side inner wall fixed connection of third pneumatic cylinder and box, and the bottom of exhaust duct is provided with the head of airing exhaust.
Preferably, the waste liquid collecting mechanism is arranged in the base, the collecting mechanism is arranged on the right side of the cleaning box and comprises a waste liquid box, a lifting handle, a filter screen, a drain pipe and a limiting part, the lifting handle is arranged at the top of the waste liquid box, the limiting part is arranged in the waste liquid box, the drain pipe is connected to the bottom of the waste liquid box, the filter screen is arranged above the limiting part, and the filter screen is connected with the limiting part through screws.
Compared with the prior art, the invention has the beneficial effects that: the chip cleaning and drying device is provided with a chip cleaning and drying device,
(1) the electric telescopic rods are arranged, the electric telescopic rods on the two sides can be extended and contracted in a staggered mode, so that the object placing plate can be driven to shake left and right, chips on the object placing plate can be conveniently collided and cleaned with cleaning liquid, meanwhile, the clamping grooves are formed, the telescopic springs in the clamping grooves can extrude and fix the chips, the chips on the object placing plate can be prevented from accidentally falling off in the cleaning process, and the clamping grooves are provided with a plurality of grooves, so that the chips can be conveniently cleaned in batches, and the cleaning efficiency of the device can be improved;
(2) the cleaning solution in the cleaning tank can be heated by the heating wire, so that the decontamination capability of the cleaning solution is enhanced, and meanwhile, the chip can be sterilized at high temperature;
(3) the second hydraulic cylinder is arranged and can drive the cleaning brush to move downwards to be in contact with the chip on the object placing plate, and the object placing plate drives the chip to rotate under the coordination of the motor, so that the cleaning brush can conveniently scrub the chip, stubborn stains on the chip can be conveniently cleaned, and the cleaning force of the device can be conveniently improved;
(4) the fan is arranged, the fan can spray hot air to the cleaned chips through the heating device and the air exhaust head, and meanwhile, under the action of the third hydraulic cylinder, the air exhaust head can blow air to the chips at different positions on the object placing plate, so that the phenomenon of uneven drying of the chips is prevented conveniently, and the drying speed of the chips is increased;
(5) be provided with the waste liquid case, the waste liquid case can be saved the waste water that produces in the cleaning process to be convenient for prevent that waste water from flowing wantonly, cause the pollution to the device, be provided with the filter screen simultaneously, the impurity in the filter screen can be filtered the sewage, thereby can prevent that impurity in the sewage from blockking up the drain pipe, and then be convenient for guarantee the normal use of device.
Drawings
FIG. 1 is a schematic cross-sectional front view of the present invention;
FIG. 2 is a schematic top view of the cross-sectional structure of the present invention;
FIG. 3 is an enlarged view of the structure at A in FIG. 1 according to the present invention;
FIG. 4 is an enlarged view of the structure at B in FIG. 1 according to the present invention;
FIG. 5 is a schematic sectional view of the waste liquid collecting mechanism according to the present invention;
FIG. 6 is a schematic diagram of the working process of the present invention.
In the figure: 1. the cleaning device comprises a main body mechanism, 101, a bottom plate, 102, a fastener, 103, a box body, 104, a universal self-locking wheel, 105, a connecting piece, 2, a supporting mechanism, 201, a base, 202, a motor, 203, a supporting plate, 204, a movable plate, 205, a cleaning box, 206, an electric heating wire, 207, an electric telescopic rod, 208, a connecting plate, 209, a storage plate, 2091, a clamping groove, 2092, a through hole, 2093, a telescopic spring, 2094, a limiting plate, 3, a cleaning mechanism, 301, a liquid storage box, 302, a first liquid pump, 303, a first water inlet pipeline, 304, a liquid storage box cover, 305, a first hydraulic cylinder, 306, a water inlet, 307, a spray head, 308, a spray pipe, 309, a water tank, 3010, a second water inlet pipeline, 3011, a second liquid pump, 4, a scrubbing mechanism, 401, a second hydraulic cylinder, 402, a cleaning brush 403, a fixing frame, 404, a supporting frame, 5, a drying mechanism, Heating device, 504, connecting pipeline, 505, exhaust pipeline, 506, third hydraulic cylinder, 507, exhaust head, 6, waste liquid collecting mechanism, 601, waste liquid box, 602, handle, 603, filter screen, 604, drain pipe, 605, limiting piece, 7 and temperature sensor.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-6, the present invention provides a technical solution: a chip cleaning and drying device is disclosed, as shown in FIG. 1, FIG. 2, FIG. 5 and FIG. 6, a main body mechanism 1 comprises a bottom plate 101, a fastening member 102, a box body 103, a universal auto-lock wheel 104 and a connecting member 105, and the box body 103 is arranged above the bottom plate 101, the drying mechanism 5 comprises a fan 501, a dust cover 502, a heating device 503, a connecting pipe 504, an exhaust pipe 505, a third hydraulic cylinder 506 and an exhaust head 507, and the fan 501 is arranged on the top of the box body 103, while the left end of the fan 501 is connected with the dust cover 502, the dust cover 502 is convenient for filtering the air flow extracted by the fan 501, thereby preventing dust from polluting chips, the right end of the fan 501 is connected with the heating device 503, and one end of the heating device 503 far away from the fan 501 is connected with the exhaust pipe 505 through the connecting pipe 504, the right side of the exhaust pipe 505 is fixedly connected with the inner wall of the right side of the box body 103, the chip after being cleaned is convenient to dry, so that the functionality of the device is convenient to enrich, the box body 103 is connected with the bottom plate 101 through the connecting piece 105, the connecting piece 105 is in threaded connection with the fastening piece 102, meanwhile, the bottom of the bottom plate 101 is symmetrically provided with the universal self-locking wheels 104, the supporting mechanism 2 is arranged inside the box body 103, the supporting mechanism 2 comprises a base 201, a motor 202, a supporting plate 203, a movable plate 204, a cleaning box 205, an electric heating wire 206, an electric telescopic rod 207, a connecting plate 208 and a storage plate 209, the base 201 is fixedly arranged above the bottom plate 101, the motor 202 is arranged in the base 201, the output end of the motor 202 is connected with the supporting plate 203, the movable plate 204 is arranged on the front side of the motor 202, the supporting plate 203, the movable plate 204 and the cleaning box 205 form a rotating structure, the cleaning box 205 is connected, and the lower right of the cleaning box 205 is connected with a drain pipe, which is convenient for detaching the cleaning box 205 from the supporting plate 203, thereby being convenient for cleaning the inside of the cleaning box 205, meanwhile, the movable plate 204 is connected with the base 201 through screws, the cleaning box 205 is arranged above the supporting plate 203, the inside of the cleaning box 205 is provided with a temperature sensor 7, the temperature sensor 7, a controller and a heating wire 206 are electrically connected, thereby being convenient for preventing the chip from being damaged by high-temperature cleaning liquid, thereby being convenient for protecting the chip, the heating wire 206 is embedded in the bottom of the cleaning box 205, the waste liquid collecting mechanism 6 is arranged inside the base 201, the collecting mechanism 6 is arranged at the right side of the cleaning box 205, the collecting mechanism 6 comprises a waste liquid box 601, a handle 602, a filter screen 603, a drain pipe 604 and a limiting piece 605, the top of the waste liquid box 601 is provided with the handle 602, and the inside of, meanwhile, a drain pipe 604 is connected to the bottom of the waste liquid tank 601, a filter screen 603 is arranged above the limiting piece 605, the filter screen 603 is connected with the limiting piece 605 through screws, and the waste liquid tank 601 is convenient for preventing waste liquid from polluting equipment.
As shown in fig. 1, fig. 2, fig. 3 and fig. 4, the electric telescopic rods 207 are symmetrically arranged inside the cleaning box 205, the electric telescopic rods 207 are respectively connected with left and right side walls of the cleaning box 205, meanwhile, one end of the electric telescopic rods 207 far away from the cleaning box 205 is fixedly connected with the connecting plate 208, the object placing plate 209 is clamped above the connecting plate 208, a slot 2091 is formed in the object placing plate 209, limit plates 2094 are symmetrically arranged in the slot 2091, the limit plates 2094 are connected with inner side walls of the slot 2091 through telescopic springs 2093, through holes 2092 are formed in the bottom of the slot 2091, the telescopic springs 2093 and the limit plates 2094 are convenient for fixing chips, so that the chips are prevented from accidentally falling off in the cleaning process, the cleaning mechanism 3 is arranged on the left side of the supporting mechanism 2, and the cleaning mechanism 3 comprises a liquid storage tank 301, a first liquid pump 302, a first water inlet pipeline 303, a water inlet 306, a spray head 307, a spray pipe 308, a water tank 309, a second water inlet pipeline 3010 and a second liquid pump 3011, wherein the liquid storage tank 301 is fixedly arranged above the bottom plate 101, a first liquid pump 302 is arranged in the liquid storage tank 301, the top of the liquid storage tank 301 is clamped with a liquid storage tank cover 304, a first hydraulic cylinder 305 is arranged above the liquid storage tank cover 304, the first hydraulic cylinder 305 is fixedly connected with the inner wall of the left side of the tank body 103, one end of the first hydraulic cylinder 305 far away from the tank body 103 is connected with the spray pipe 308, the bottom of the spray pipe 308 is provided with the spray head 307, the spray pipe 308 is connected with the first liquid pump 302 through a first water inlet pipeline 303, the rear side of the liquid storage tank 301 is provided with the water tank 309, the top of the water tank 309 is connected with the water inlet 306 and the second liquid pump 3011, the second liquid pump 3011 is connected with the spray pipe 308 through the second water inlet pipeline 3010, so as, meanwhile, the chip is convenient to wash for the second time, the brushing mechanism 4 is arranged above the supporting mechanism 2, the brushing mechanism 4 comprises a second hydraulic cylinder 401, a cleaning brush 402, a fixing frame 403 and a supporting frame 404, the cleaning brush 402 is arranged at the bottom of the fixing frame 403 at equal intervals, the cleaning brush 402 is rotatably connected with the supporting frame 404, the second hydraulic cylinder 401 is fixedly connected with the inner top of the box body 103, one end, far away from the box body 103, of the second hydraulic cylinder 401 is connected with the top of the fixing frame 403, the bottom of the fixing frame 403 is connected with the cleaning brush 402 through the supporting frame 404, and the cleaning brush 402 can brush stubborn stains on the chip, so that the cleaning force of the device is improved.
The working principle is as follows: the model of the temperature sensor 7 is PT100, the model of the controller is RPCF-6, when the chip cleaning and drying device is used, firstly, the device is moved to a working area by using the universal self-locking wheel 104, then, the chip is placed in the clamping groove 2091, the left side and the right side of the chip are fixed by using the telescopic spring 2093 and the limiting plate 2094 in the clamping groove 2091, the power supply is connected, then, the first hydraulic cylinder 305 drives the spray pipe 308 to move to the upper part of the cleaning box 205, meanwhile, the cleaning liquid in the liquid storage box 301 enters the spray pipe 308 through the first water inlet pipeline 303 under the action of the first liquid pump 302 and is sprayed to the inside of the cleaning box 205 from the spray head 307 at the bottom of the spray pipe 308, after water injection is completed, the heating wire 206 heats the cleaning liquid in the cleaning box 205, meanwhile, the electric telescopic rods 207 on the two sides alternately contract and extend to drive the object placing plate 209 to shake left and right, thereby, the cleaning liquid in the chip cleaning box 205 on, meanwhile, the temperature sensor 7 can monitor the temperature of the cleaning liquid in the cleaning tank 205 in real time, when the temperature sensor 7 detects that the temperature of the cleaning liquid exceeds a set value, the temperature sensor will transmit the detected information to the controller, the controller will close the heating wire 206, thereby preventing the chip from being damaged, after the impact cleaning is finished, the second hydraulic cylinder 401 will drive the cleaning brush 402 to move downwards to contact with the upper surface of the chip, meanwhile, the motor 202 will drive the cleaning tank 205 to rotate through the supporting plate 203, thereby facilitating the cleaning brush 402 to brush the chips at different positions on the object plate 209, after the brushing is finished, the motor 202 is closed, a valve on a drain pipe is opened to discharge the sewage in the cleaning tank 205 into the waste liquid tank 601, meanwhile, the filter screen 603 in the waste liquid tank 601 will filter the sewage, and the filtered sewage will be discharged through the drain pipe 604, then the second liquid pump 3011 is started, the second liquid pump 3011 will drive the water in the water tank 309 to enter the spraying pipe 308 through the second water inlet pipeline 3010, at the same time the first hydraulic cylinder 305 will drive the spraying pipe 308 to move left and right in a circulating reciprocating manner above the cleaning tank 205, so that the spraying head 307 below the spraying pipe 308 can be used to wash the chips in the cleaning tank 205 for many times, after washing, the blower 501 and the heating device 503 can be started, the blower 501 will extract the outside air flow and then discharge it into the heating device 503, the heating device 503 can heat the air flow, the heated air flow will enter the exhaust pipeline 505 through the connecting pipeline 504 and then be ejected from the exhaust head 507, and at the same time the third hydraulic cylinder 506 will drive the exhaust pipeline 505 and move left and right to facilitate the exhaust head 507 to dry different chips, thus completing all the work, those not described in detail in this specification are within the skill of the art.
The terms "central," "longitudinal," "lateral," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for simplicity of description only and are not intended to indicate or imply that the referenced devices or elements must be in a particular orientation, constructed and operative in a particular orientation, and are not to be considered limiting of the claimed invention.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the invention can be made, and equivalents and modifications of some features of the invention can be made without departing from the spirit and scope of the invention.

Claims (9)

1. The utility model provides a chip cleaning and drying device, includes that main part mechanism (1), supporting mechanism (2), wiper mechanism (3), scrubbing mechanism (4), dry mechanism (5) and waste liquid collect mechanism (6), its characterized in that:
the self-locking mechanism comprises a main body mechanism (1), wherein the main body mechanism (1) comprises a bottom plate (101), a fastening piece (102), a box body (103), universal self-locking wheels (104) and a connecting piece (105), the box body (103) is arranged above the bottom plate (101), the box body (103) is connected with the bottom plate (101) through the connecting piece (105), the connecting piece (105) is in threaded connection with the fastening piece (102), and the universal self-locking wheels (104) are symmetrically arranged at the bottom of the bottom plate (101);
the support mechanism (2) is arranged inside the box body (103), the support mechanism (2) comprises a base (201), a motor (202), a support plate (203), a movable plate (204), a cleaning box (205), heating wires (206), an electric telescopic rod (207), a connecting plate (208) and an object placing plate (209), the base (201) is fixedly arranged above the bottom plate (101), the motor (202) is arranged in the base (201), the output end of the motor (202) is connected with the support plate (203), the movable plate (204) is arranged on the front side of the motor (202), the movable plate (204) is connected with the base (201) through screws, the cleaning box (205) is arranged above the support plate (203), the heating wires (206) are embedded into the inner bottom of the cleaning box (205), the electric telescopic rods (207) are symmetrically arranged inside the cleaning box (205), and electric telescopic handle (207) are connected with the left and right sides lateral wall of wasing case (205) respectively, and electric telescopic handle (207) keep away from the one end and the connecting plate (208) fixed connection of wasing case (205) simultaneously, the top block of connecting plate (208) has puts thing board (209).
2. The device for cleaning and drying the chip according to claim 1, wherein: motor (202), backup pad (203), fly leaf (204) and washing case (205) constitute rotating-structure, and wash case (205) and backup pad (203) block and be connected, wash case (205) and be connected with backup pad (203) through the screw, and the right side below of just wasing case (205) is connected with the blow off pipe.
3. The device for cleaning and drying the chip according to claim 1, wherein: the inside of wasing case (205) is provided with temperature sensor (7), and is electric connection between temperature sensor (7) and controller and heating wire (206).
4. The device for cleaning and drying the chip according to claim 1, wherein: the article placing plate (209) is provided with a clamping groove (2091), limiting plates (2094) are symmetrically arranged in the clamping groove (2091), the limiting plates (2094) are connected with the inner side wall of the clamping groove (2091) through telescopic springs (2093), and the bottom of the clamping groove (2091) is provided with a through hole (2092).
5. The device for cleaning and drying the chip according to claim 1, wherein: the cleaning mechanism (3) is arranged on the left side of the supporting mechanism (2), the cleaning mechanism (3) comprises a liquid storage box (301), a first liquid pump (302), a first water inlet pipeline (303), a liquid storage box cover (304), a first hydraulic cylinder (305), a water inlet (306), a spray head (307), a spray pipe (308), a water tank (309), a second water inlet pipeline (3010) and a second liquid pump (3011), the liquid storage box (301) is fixedly arranged above the bottom plate (101), the first liquid pump (302) is arranged in the liquid storage box (301), the liquid storage box cover (304) is clamped at the top of the liquid storage box (301), the first hydraulic cylinder (305) is arranged above the liquid storage box cover (304), the first hydraulic cylinder (305) is fixedly connected with the inner wall of the left side of the box body (103), one end, far away from the box body (103), of the first hydraulic cylinder (305) is connected with the spray pipe (308), and the bottom of shower (308) is provided with shower head (307), and shower (308) are connected with first liquid pump (302) through first inlet channel (303) simultaneously, the rear side of liquid reserve tank (301) is provided with water tank (309), and water tank (309) top is connected with water inlet (306) and second liquid pump (3011), and second liquid pump (3011) are connected with shower (308) through second inlet channel (3010) simultaneously.
6. The device for cleaning and drying the chip according to claim 1, wherein: scrubbing mechanism (4) sets up in the top of supporting mechanism (2), and scrubbing mechanism (4) include second pneumatic cylinder (401), cleaning brush (402), mount (403) and support frame (404), the interior top fixed connection of second pneumatic cylinder (401) and box (103), and the one end that box (103) were kept away from in second pneumatic cylinder (401) is connected with the top of mount (403), mount (403) bottom is passed through support frame (404) and is connected with cleaning brush (402).
7. The device for cleaning and drying the chip according to claim 1, wherein: the cleaning brushes (402) are arranged at the bottom of the fixing frame (403) at equal intervals, and the cleaning brushes (402) are rotatably connected with the supporting frame (404).
8. The device for cleaning and drying the chip according to claim 1, wherein: drying mechanism (5) include fan (501), dust cover (502), heating device (503), connecting tube (504), exhaust pipe (505), third pneumatic cylinder (506) and air exhaust head (507), and fan (501) set up the top at box (103), and the left end and the dust cover (502) of fan (501) are connected simultaneously, the right-hand member and the heating device (503) of fan (501) are connected, and heating device (503) keep away from the one end of fan (501) and pass through connecting tube (504) and be connected with exhaust pipe (505), the right side of exhaust pipe (505) is passed through the right side inner wall fixed connection of third pneumatic cylinder (506) with box (103), and the bottom of exhaust pipe (505) is provided with air exhaust head (507).
9. The device for cleaning and drying the chip according to claim 1, wherein: the waste liquid collecting mechanism (6) is arranged inside the base (201), the collecting mechanism (6) is arranged on the right side of the cleaning box (205), the collecting mechanism (6) comprises a waste liquid box (601), a lifting handle (602), a filter screen (603), a drain pipe (604) and a limiting piece (605), the lifting handle (602) is arranged at the top of the waste liquid box (601), the limiting piece (605) is arranged inside the waste liquid box (601), the drain pipe (604) is connected to the bottom of the waste liquid box (601), the filter screen (603) is arranged above the limiting piece (605), and the filter screen (603) is connected with the limiting piece (605) through screws.
CN202011029438.4A 2020-09-27 2020-09-27 Chip cleaning and drying device Withdrawn CN112151422A (en)

Priority Applications (1)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112928046A (en) * 2021-01-22 2021-06-08 徐州中辉光伏科技有限公司 Solar photovoltaic wafer etching device
CN113182248A (en) * 2021-04-12 2021-07-30 常州机电职业技术学院 Chip cleaning machine with monitoring system and cleaning method thereof
CN115229554A (en) * 2022-08-09 2022-10-25 苏州广运成智能控制有限公司 Automatic change highlight chamfer equipment
CN115415230A (en) * 2022-08-26 2022-12-02 曲靖阳光新能源股份有限公司 Inclined slow lifting structure for cleaning machine

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112928046A (en) * 2021-01-22 2021-06-08 徐州中辉光伏科技有限公司 Solar photovoltaic wafer etching device
CN113182248A (en) * 2021-04-12 2021-07-30 常州机电职业技术学院 Chip cleaning machine with monitoring system and cleaning method thereof
CN115229554A (en) * 2022-08-09 2022-10-25 苏州广运成智能控制有限公司 Automatic change highlight chamfer equipment
CN115415230A (en) * 2022-08-26 2022-12-02 曲靖阳光新能源股份有限公司 Inclined slow lifting structure for cleaning machine

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Application publication date: 20201229